Probe tip detection method and system, electronic device, and storage medium

Abstract

Embodiments of the present application relate to the technical field of semiconductor testing, and provide a probe tip detection method and system, an electronic device, and a storage medium. The method comprises: acquiring a first image captured when probes under detection are inserted into electronic components, and box-selecting a probe inserted image of a target electronic component; aligning the probe inserted image with a reference template, wherein the reference template is obtained by box-selecting the target electronic component in a second image that is obtained when the probes under detection are not inserted; establishing grayscale matrices for the probe inserted image and the reference template, and determining a tip shape of each probe under detection on the basis of the grayscale matrices; determining from the first image multiple tip perpendicular lines in the direction of each probe under detection, detecting the multiple tip perpendicular lines line by line until a target grayscale point is detected, and using the position of the target grayscale point as a tip position; and on the basis of the tip shape and the tip position, obtaining a probe tip detection result. The present application can improve the accuracy of probe tip detection results and the efficiency of identification.

Description

Probe tip detection method, system, electronic device and storage medium Technical Field

[0001] The present application relates to the field of semiconductor testing technology, and in particular to a method, system, electronic device, and storage medium for detecting a probe tip. Background Art

[0002] When testing semiconductor chips, a probe is usually used. The sharp tip and tiny size of the probe enable it to accurately and stably contact the electronic components on the chip surface to input and output signals.

[0003] However, the probe's sharp tip and tiny size make it difficult to visually detect bent, misaligned, or dirty probes. Therefore, when using probes to test semiconductor chips, a problem with the probe can usually only be determined by observing abnormal data from a large number of consecutive tests. Furthermore, the shape and position of the probe tip must be visually identified, which can lead to inaccurate results and low efficiency. Summary of the Invention

[0004] The main purpose of the embodiments of the present application is to propose a probe tip detection method, system, electronic device and storage medium, which can identify the probe tip shape or tip position without analyzing large quantities of test data, thereby improving the accuracy of the recognition result and the efficiency of recognition.

[0005] To achieve the above-mentioned objectives, the first aspect of an embodiment of the present application proposes a method for detecting a probe tip, the method comprising: obtaining a first image taken when the probe under test is piercing an electronic component, and framing a piercing image of the target electronic component from the first image; aligning the piercing image with a reference template; wherein the reference template is obtained by framing the target electronic component in a second image; the second image is obtained by photographing the target electronic component when it is not pierced by the probe under test; establishing a grayscale matrix for the piercing image and the reference template, and determining the tip shape of the probe under test based on the grayscale matrix; determining multiple tip perpendicular lines in the direction of the probe under test from the first image, and performing row-by-row detection based on the multiple tip perpendicular lines until a target grayscale point is detected, and taking the position of the target grayscale point as the tip position; obtaining a probe tip detection result based on the tip shape and the tip position.

[0006] According to some embodiments of the present application, aligning the acupuncture diagram with the reference template includes: selecting a first grayscale area from the reference template and establishing a first grayscale matrix corresponding to the first grayscale area; selecting a second grayscale area from the acupuncture diagram and establishing a second grayscale matrix corresponding to the second grayscale area; wherein there are at least two different grayscale values ​​in the first grayscale area and the second grayscale area; subtracting the second grayscale matrix from the first grayscale matrix to obtain an alignment matrix; adjusting the first grayscale area according to the alignment matrix until the reference template and the acupuncture diagram are aligned.

[0007] According to some embodiments of the present application, the adjusting of the first grayscale area according to the alignment matrix until the reference template and the acupuncture diagram are aligned includes: calculating the absolute values ​​of each matrix element in the alignment matrix and adding them to obtain a matrix alignment value; comparing the matrix alignment value with a preset alignment value to obtain a comparison result; wherein the preset alignment value is an alignment threshold that characterizes the alignment of the first grayscale area and the second grayscale area; if the comparison result characterizes that the matrix alignment value is greater than the preset alignment value, re-determining multiple third grayscale areas from the reference template and establishing a third grayscale matrix for each of the third grayscale areas; subtracting the second grayscale matrix from each of the third grayscale matrices in turn to obtain multiple new matrix alignment values; determining a target matrix alignment value from the multiple new matrix alignment values, and using the third grayscale area corresponding to the target matrix alignment value as the alignment area with the second grayscale area, aligning the reference template corresponding to the third grayscale area and the acupuncture diagram corresponding to the second grayscale area.

[0008] According to some embodiments of the present application, the acupuncture image and the reference template have the same size; establishing a grayscale matrix for the acupuncture image and the reference template, and determining the tip shape of the probe under test based on the grayscale matrix, includes: establishing a binarization matrix based on the grayscale values ​​of the reference template, and establishing a fourth grayscale matrix based on the grayscale values ​​of the acupuncture image; obtaining a tip morphology matrix by correspondingly multiplying the matrix elements of the binarization matrix with the matrix elements of the fourth grayscale matrix; and determining the tip shape of the probe under test based on the tip morphology matrix.

[0009] According to some embodiments of the present application, determining the tip shape of the probe under test based on the tip morphology matrix includes: obtaining a preset tip grayscale threshold; binarizing the matrix elements in the tip morphology matrix according to the tip grayscale threshold, and determining the tip shape of the probe under test based on the binarized tip morphology matrix.

[0010] According to some embodiments of the present application, determining multiple needle tip perpendicular lines in the direction of the measured probe from the first image includes: selecting two points to be measured on each of the measured probes in the first image, and calculating the direction slope of the measured probe based on the coordinates of the two points to be measured; calculating the slope of the perpendicular line of the needle tip based on the direction slope; and determining multiple needle tip perpendicular lines along the direction of the perpendicular line slope.

[0011] According to some embodiments of the present application, after obtaining the probe tip detection result based on the tip shape and the tip position, it also includes: if the probe tip detection result indicates that the tip of the probe under test is deformed, an alarm signal is issued; or, if the probe tip detection result indicates that the tip of the probe under test exceeds a preset needle insertion range, an alarm signal is issued; wherein, the preset needle insertion range is the range within which the tip of the probe under test can detect the target electronic component and obtain a detection result.

[0012] To achieve the above-mentioned objectives, a third aspect of an embodiment of the present application proposes a probe tip detection system, the system comprising: a needle insertion image acquisition module, configured to acquire a first image taken when a probe under test is inserting a needle into an electronic component, and to frame a needle insertion image of a target electronic component from the first image; an alignment module, configured to align the needle insertion image with a reference template; wherein the reference template is obtained by framing the target electronic component in a second image; and the second image is obtained by capturing the target electronic component when it is not inserted by the probe under test; a needle tip shape determination module, configured to establish a grayscale matrix for the needle insertion image and the reference template, and to determine the needle tip shape of the probe under test based on the grayscale matrix; a needle tip position determination module, configured to determine multiple needle tip perpendicular lines in the direction of the probe under test from the first image, and to perform row-by-row detection based on the multiple needle tip perpendicular lines until a target grayscale point is detected, and the position of the target grayscale point is used as the needle tip position; and a probe tip detection result acquisition module, configured to obtain a probe tip detection result based on the needle tip shape and the needle tip position.

[0013] To achieve the above-mentioned purpose, the third aspect of the embodiments of the present application proposes an electronic device, which includes a memory and a processor, the memory stores a computer program, and when the processor executes the computer program, it implements the probe tip detection method described in any one of the embodiments of the first aspect of the present application.

[0014] To achieve the above-mentioned purpose, the third aspect of the embodiments of the present application proposes a computer-readable storage medium, which stores a computer program. When the computer program is executed by a processor, it implements the probe tip detection method described in any one of the embodiments of the first aspect of the present application.

[0015] The probe tip detection method, system, electronic device, and storage medium proposed in the present application can obtain a first image captured when a probe under test is probing an electronic component, and frame a probing image of a target electronic component from the first image; align the probing image with a reference template to identify identical areas in the images, wherein the reference template is obtained by framing the target electronic component in a second image; the second image is obtained by capturing the target electronic component when it is not being probed by the probe under test; establish a grayscale matrix for the probing image and the reference template, thereby determining the shape of the probe tip under test based on different grayscale values; determine multiple perpendicular lines to the probe tip in the direction of the probe under test from the first image, and perform row-by-row detection based on the multiple perpendicular lines to avoid overlap between the detection direction and the direction of the probe under test, until a target grayscale point with a different grayscale from that of other areas is detected, and the location of the target grayscale point is used as the probe tip position; finally, based on the probe tip shape and tip position, a probe tip detection result can be obtained. The present application can identify the probe tip shape or tip position without analyzing a large amount of test data, thereby improving the accuracy and efficiency of the recognition result. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] FIG1 is a schematic structural diagram of a probe tip detection system provided in an embodiment of the present application;

[0017] FIG2 is a flow chart of a method for detecting a probe tip according to an embodiment of the present application;

[0018] FIG3 a is a schematic diagram of the hardware structure for testing a probe by moving a wafer stage according to an embodiment of the present application;

[0019] FIG3 b is a schematic diagram of a hardware structure for testing a probe by moving a wafer stage, provided in another embodiment of the present application;

[0020] FIG3 c is a schematic diagram of the hardware structure for testing the probe by moving the needle seat according to an embodiment of the present application;

[0021] FIG3 d is a schematic diagram of the hardware structure for testing the probe by needle card movement according to an embodiment of the present application;

[0022] FIG4 is a schematic diagram of a first image provided in an embodiment of the present application;

[0023] FIG5 is a pin-piercing diagram of a target electronic component selected from a first image according to an embodiment of the present application;

[0024] FIG6 is a schematic diagram of selecting a reference template provided in an embodiment of the present application;

[0025] FIG7 is a schematic diagram of aligning an acupuncture diagram with a reference template according to an embodiment of the present application;

[0026] FIG8 is a flow chart of step S204 in FIG7 ;

[0027] FIG9 a is a framed image of a second grayscale area provided in an embodiment of the present application;

[0028] FIG9 b is a framed image of a first grayscale area provided in an embodiment of the present application;

[0029] FIG9c is a framed image of a third grayscale area provided in an embodiment of the present application;

[0030] FIG10 is a flow chart of step S103 in FIG2 ;

[0031] FIG11a is a schematic diagram of a target area intercepted from an acupuncture diagram provided in an embodiment of the present application;

[0032] FIG11b is a schematic diagram of a target area of ​​a cutout reference template provided in an embodiment of the present application;

[0033] FIG12 is a flow chart of step S403 in FIG10 ;

[0034] 13 is a flow chart of determining multiple needle tip perpendicular lines in the direction of the probe under test from a first image according to an embodiment of the present application;

[0035] FIG14 is a probe vertical line search diagram provided in an embodiment of the present application;

[0036] FIG15 is an enlarged view of the search for the intersection of the needle tip and the probe tip under test according to an embodiment of the present application;

[0037] FIG16 is a schematic diagram of the functional modules of a probe tip detection system provided in an embodiment of the present application;

[0038] FIG17 is a schematic diagram of the hardware structure of the electronic device provided in an embodiment of the present application. DETAILED DESCRIPTION

[0039] In order to make the purpose, technical solutions and advantages of this application more clear, the following further describes this application in detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain this application and are not intended to limit this application.

[0040] It should be noted that although the device schematics illustrate functional module divisions and the flowcharts illustrate logical sequences, in certain circumstances, the steps shown or described may be performed in a sequence that differs from the module divisions in the device or the sequence in the flowcharts. The terms "first," "second," and so on, used in the specification, claims, and drawings, are used to distinguish similar items and are not necessarily used to describe a specific sequence or precedence.

[0041] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art to which this application pertains. The terms used herein are for the purpose of describing the embodiments of this application only and are not intended to limit this application.

[0042] Probes are important consumables required in semiconductor testing. They are used in design verification, wafer testing, and finished product testing to screen out product design defects and manufacturing defects. They play an important role in ensuring product yield, controlling costs, guiding chip design and process improvements, etc.

[0043] Among these, detecting the probe tip shape and position is particularly important. Specifically, the quality and shape of the probe tip directly impact the accuracy and repeatability of the test. Damage, wear, or deformation of the tip can lead to test errors and instability, necessitating tip shape testing. Semiconductor devices typically have very small lead-to-pad spacing. Inaccurate probe tip positioning can easily damage device leads or cause erroneous measurements. Therefore, tip position testing is essential to ensure the probe is properly contacting the device leads or pads.

[0044] In related technologies, a probe problem can only be confirmed when the probe's test data on semiconductors shows abnormalities continuously and in large quantities. Furthermore, the probe tip shape or position must be visually identified, which can lead to inaccurate results and low efficiency.

[0045] Based on this, the embodiments of the present application provide a probe tip detection method, system, electronic device and storage medium, which can identify the probe tip shape or tip position without analyzing large quantities of test data, thereby improving the accuracy of the recognition results and the efficiency of recognition.

[0046] The probe tip detection method, system, electronic device, and storage medium provided in the embodiments of the present application are specifically described through the following embodiments. First, the probe tip detection system in the embodiments of the present application is described.

[0047] Referring to FIG. 1 , in some embodiments, a probe tip detection system includes a controller 101 , a server 102 , and a photographing terminal 103 .

[0048] Specifically, the controller 101 can be the nerve center and command center of the detection system. The controller 101 can generate an operation control signal based on the instruction operation code and the timing signal to control the server end 102 and the shooting terminal 103. The server end 102 can be a computer or a group of computers, which can receive image data from the controller 101 and the shooting terminal 103, and analyze, process and store the image data. Specifically, the shooting terminal 103 can be various electronic devices including shooting functions, and can be equipped with lenses, image sensors, adapters, light sources, focusing mechanisms, etc. In a specific implementation, the shooting terminal 103 can be an image acquisition device such as a camera or a video recorder, or a smart phone, a handheld processing device, a tablet computer, a mobile notebook, a virtual reality device, an integrated handheld device, etc. The shooting terminal 103 can transmit the captured probe image, etc. to the server end 102 for processing and analysis to obtain the probe tip detection result.

[0049] The detection method of the probe tip in the embodiment of the present application can be illustrated by the following example.

[0050] It should be noted that in each specific embodiment of the present application, when it comes to the need to perform relevant processing based on data related to user identity or characteristics such as user information, user behavior data, user historical data, and user location information, the user's permission or consent will be obtained first. Moreover, the collection, use, and processing of these data will comply with relevant laws, regulations, and standards. In addition, when the embodiment of the present application needs to obtain the user's sensitive personal information, the user's separate permission or consent will be obtained through a pop-up window or by jumping to a confirmation page. After clearly obtaining the user's separate permission or consent, the necessary user-related data for the normal operation of the embodiment of the present application will be obtained.

[0051] FIG2 is an optional flowchart provided in an embodiment of the present application. The method in FIG2 may include but is not limited to steps S101 to S105.

[0052] Step S101 : obtaining a first image captured when a probe under test is inserted into an electronic component, and selecting a insertion image of a target electronic component from the first image.

[0053] It is understandable that the probe under test is a probe. Specifically, a probe is a tool for testing and measuring the performance of electronic equipment. In the semiconductor field, probes are widely used to test and analyze integrated circuits and other electronic components. The electronic components can be electronic components on integrated circuits, or electronic components on wafers, printed circuit boards (PCBAs), etc. The probe is usually a very small and sharp metal peak or needle-shaped structure that performs testing by lightly contacting the conductive surface of the component to be tested.

[0054] As shown in any of Figures 3a to 3c, Figures 3a to 3c are schematic diagrams of the hardware structure for testing the probe in an embodiment of the present application. It can be understood that the unit under test is the test object of the probe under test, such as a PCBA, a wafer, etc. The unit under test can be placed on a wafer stage, on which there is a probe under test, and the probe can be placed in a needle holder or in a needle card. The wafer stage can move in the horizontal direction to switch the electronic component under test. The unit under test can be moved under the probe, and the target electronic component can be aligned with the probe tip. The wafer stage can be moved upward or the probe can be moved downward to achieve contact between the probe under test and the target electronic component. For example, if the unit under test is a wafer, the probe tip can perform a pin test on the solder joints on the wafer.

[0055] Specifically, Figure 3a shows the use of a needle holder structure to place the probe under test, at which point the probe under test and the target electronic component are brought into contact by the up-and-down movement of the wafer stage. Figure 3b shows the use of a needle card structure to place the probe under test, at which point the probe under test and the target electronic component are brought into contact by the up-and-down movement of the wafer stage. Figure 3c shows the use of a needle holder structure to place the probe under test, at which point the probe under test and the target electronic component are brought into contact by the up-and-down movement of the needle holder. Figure 3d shows the use of a needle card structure to place the probe under test, at which point the probe under test and the target electronic component are brought into contact by the up-and-down movement of the needle card.

[0056] Figures 3a to 3c also illustrate the image capture device used in this application, for example, a first image, a second image, and so on. The device can move up and down, and specifically can be a camera, a camcorder, a scanner, or other device with a camera function, such as a mobile phone or tablet computer. When the image capture device is a camera, it also includes a coaxial light source and a lens. By adjusting the parameters of the coaxial light source and lens, different shooting effects and presentation methods can be achieved.

[0057] As shown in Figures 4 and 5, Figure 4 is a first image, and Figure 5 is a needle-piercing image of the target electronic component selected from the first image. It is understood that in order to obtain the needle tip shape and needle tip position of the probe under test, the probe under test needs to be inserted into a specified area of ​​the electronic component, such as a pad in a grain. When the probe is inserted, the needle-piercing image can be collected to obtain the first image, and then the needle-piercing image of the probe under test can be selected from the first image. It is understood that the specified area is generally the area where the probe under test can correctly test the electronic component under test and obtain test results.

[0058] In some embodiments, the probe can also be inserted into a thin sheet that easily leaves marks. The thin sheet can simulate the arrangement of electronic components or set a specific area to be detected, so that the probe tip can be detected even in the absence of electronic components. For example, a thin sheet that is easily marked by the probe can be attached to the slide stage. After the probe is inserted into the thin sheet, it can easily leave a mark on the sheet, thereby facilitating the detection of the probe and preventing damage to the probe during probe calibration. In some embodiments, the thin sheet can be a consumable material that easily leaves marks, such as copper foil or aluminum foil tape.

[0059] Step S102 , aligning the needle insertion image with a reference template; wherein the reference template is obtained by selecting a target electronic component in the second image; and the second image is obtained by photographing the target electronic component when it is not being pierced by the probe under test.

[0060] In some embodiments, an image of the target electronic component's unit under test can be captured as a second image before or after the probe is inserted into the target electronic component. This means that the probe tip is absent from the second image, only the unit under test. It should be understood that the first image should be captured at the same angle as the second image. If the angles are different, the camera should be moved to the same angle or the image should be adjusted. If the electronic components in the unit under test are arranged uniformly, as shown in Figure 6, the shape of the target electronic component is also consistent with the other electronic components. In this case, a single first image can be captured during the insertion phase. The insertion image corresponding to the target electronic component can then be selected from the first image, and a reference template can be selected from the other electronic components in the first image. For example, if the target electronic component is electronic component 1, and electronic component 2 is an electronic component in the same unit under test as electronic component 1 but not being tested, and electronic components 1 and 2 have the same structure and shape, electronic component 2 can be selected as the reference template to align with the insertion image of electronic component 1. This eliminates the need to capture two images, significantly saving testing time. Alternatively, if the unit under test has been calibrated at a historical time, and the frame selection of the reference template coincides with the position of the needle-piercing diagram of the target electronic component being tested, there is no need to repeatedly take the second image, and the historical reference template can be directly used as the reference template for this test, thereby saving test time and improving test efficiency.

[0061] Specifically, two areas can be selected from the needle puncture image and the reference template respectively, and the grayscale matrices of the two areas can be calculated. If there is a difference in the grayscale matrices, the area selected in the reference template is moved, and the grayscale matrix after the move is calculated until there is no difference in the grayscale matrices of the two areas selected from the needle puncture image and the reference template or the difference can be ignored. This means that the needle puncture image and the reference template have been aligned according to the two areas, so that specific elements in the needle puncture image and the reference template can be aligned, such as aligning the welding points.

[0062] Step S103: creating a grayscale matrix for the needle-piercing diagram and the reference template, and determining the needle tip shape of the probe under test according to the grayscale matrix.

[0063] In some embodiments, a grayscale matrix can be established for the needle puncture image and the reference template, and the matrix elements of the grayscale matrices of the two are correspondingly multiplied to obtain a new grayscale matrix. By comparing the new grayscale matrix with a preset grayscale threshold, the matrix elements greater than the grayscale threshold can be determined as traces left by the probe under test, and the matrix elements less than the grayscale threshold can be determined as areas not punctured by the probe under test, or the matrix elements greater than the grayscale threshold can be determined as areas not punctured by the probe under test, and the matrix elements less than the grayscale threshold can be determined as traces left by the probe under test, thereby quickly and accurately determining the shape of the needle tip left by the needle on the target electronic component of the needle tip.

[0064] Step S104 , determining multiple needle tip perpendicular lines in the direction of the probe under test from the first image, and performing line-by-line detection according to the multiple needle tip perpendicular lines until a target grayscale point is detected, and taking the position of the target grayscale point as the needle tip position.

[0065] In some embodiments, if the needle tip position is determined directly based on the first image or other images captured, firstly, the image needs to be magnified, which may cause the image to become blurred or lose details due to resolution limitations, thereby reducing accuracy; secondly, the image is captured from top to bottom by the camera, and the upper perspective determines that the determination of the needle tip position may be interfered with by images of other positions of the probe (such as the needle body); thirdly, one-by-one identification by the naked eye is inefficient and inaccurate. Therefore, the directional slope of the direction of the probe being measured can be determined from the first image, and then the slope of the perpendicular line of the directional slope can be calculated. The vertical line slope can be used to determine multiple needle tip perpendicular lines perpendicular to the probe tip.

[0066] It is understandable that, because the grayscale at other locations of the probe is consistent with the needle tip, it is necessary to set a perpendicular line to the needle tip so that the search range does not overlap with the direction of the probe, avoiding searching locations other than the probe tip, which would affect the determination of the needle tip's position. Since the grayscale values ​​of the needle tip and the surrounding area are different, for example, the grayscale value of the needle tip is different from the grayscale value of the target electronic component, the target grayscale point can be determined by detecting the perpendicular line row by row, and the location of the target grayscale point is used as the needle tip position. This can greatly improve the efficiency and accuracy of the needle tip position determination.

[0067] Step S105 : obtaining a probe tip detection result based on the tip shape and tip position.

[0068] When testing the probe tip, the probe tip can be tested periodically, for example, by capturing a first image and a second image every 5 or 30 minutes to obtain the shape and position of the probe tip. In some scenarios where high precision is required for the probe being tested, images can also be acquired and analyzed in real time to obtain the shape and position of the probe tip. The specific details can be adjusted as needed and are not limited by this application.

[0069] It is understandable that the number of probes to be tested can be one or multiple, for example, 2, 4, etc. Therefore, when testing multiple probes to be tested, only one first image can be taken, and then the needle tip shapes and needle tip positions of the multiple probes to be tested can be analyzed one by one, thereby improving the efficiency of detection.

[0070] It is understandable that if the shape of the probe tip is unqualified, the tip shape may be bent, misaligned, worn, etc. If the tip position is not within a preset range (such as the middle of the target electronic component), the probe being tested may also be judged to be unqualified. For example, when the probe tip is detected based on the tip shape and tip position, the detection personnel can analyze it based on the grayscale matrix and tip position, or through a pre-trained neural network. The neural network can be trained on a qualified grayscale matrix and tip position, or on a qualified image of the probe being tested, so as to have the ability to detect unqualified probes being tested and detect the probe tip more efficiently.

[0071] The probe tip detection method, system, electronic device, and storage medium proposed in the present application can obtain a first image captured when a probe under test is probing an electronic component, and frame a probing image of a target electronic component from the first image; align the probing image with a reference template to identify identical areas in the images, wherein the reference template is obtained by framing the target electronic component in a second image; the second image is obtained by capturing the target electronic component when it is not being probed by the probe under test; establish a grayscale matrix for the probing image and the reference template, thereby determining the shape of the probe tip under test based on different grayscale values; determine multiple perpendicular lines to the probe tip in the direction of the probe under test from the first image, and perform row-by-row detection based on the multiple perpendicular lines to avoid overlap between the detection direction and the direction of the probe under test, until a target grayscale point with a different grayscale from that of other areas is detected, and the location of the target grayscale point is used as the probe tip position; finally, based on the probe tip shape and tip position, a probe tip detection result can be obtained. The present application can identify the probe tip shape or tip position without analyzing a large amount of test data, thereby improving the accuracy and efficiency of the recognition result.

[0072] Referring to FIG. 7 , in some embodiments, aligning the acupuncture pattern with the reference template may include steps S201 to S204:

[0073] Step S201 : selecting a first grayscale region from a reference template and establishing a first grayscale matrix corresponding to the first grayscale region.

[0074] In some embodiments, a first grayscale region can be determined in advance from a reference template so that the first grayscale region can be subsequently aligned with a second grayscale region determined by a pin pattern, thereby determining a search range based on the aligned reference template and pin pattern. Specifically, a region with a significantly different grayscale in the reference template is generally selected as the first grayscale region. The first grayscale matrix thus established can have significant differences, facilitating subsequent calibration. For example, if the unit under test is a wafer, the bond pads on the die generally appear as highlighted areas in the image, while the grayscale of the area surrounding the bond pads is significantly different from that of the bond pads. Therefore, the bond pads and the area surrounding the bond pads can be simultaneously selected as the first grayscale region, and the first grayscale matrix can be established based on the grayscale values ​​of the first grayscale region.

[0075] Step S202 , selecting a second grayscale area from the acupuncture image, and establishing a second grayscale matrix corresponding to the second grayscale area; wherein there are at least two different grayscale values ​​in the first grayscale area and the second grayscale area.

[0076] Similarly, the second grayscale region is selected using the same method as the first grayscale region, i.e., a region with a more pronounced grayscale in the acupuncture image is selected, and a second grayscale matrix is ​​established based on the second grayscale region. It is understood that if there are at least two different grayscale values, or multiple different grayscale values, within the first and second grayscale regions, the more grayscale values ​​selected, the easier it is to align the first and second grayscale regions.

[0077] Step S203 : Subtracting the second grayscale matrix from the first grayscale matrix to obtain an alignment matrix.

[0078] For example, if the first grayscale matrix (denoted by A) established according to the first grayscale region is:

[0079] The second grayscale matrix (denoted by B) established according to the second grayscale area is:

[0080] Then, by subtracting the second grayscale matrix from the first grayscale matrix (or subtracting the first grayscale matrix from the second grayscale matrix), we can get the alignment matrix C, that is, C=AB, which means:

[0081] By analyzing the alignment matrix, the grayscale difference between the first grayscale matrix and the second grayscale matrix can be obtained. It can be understood that if there is no difference between the two matrix elements, the subtraction value should be 0, and if there is a difference between the two matrix elements, the subtraction value is not 0.

[0082] Step S204: adjusting the first grayscale area according to the alignment matrix until the reference template and the needle pattern are aligned.

[0083] In some embodiments, if the elements of the alignment matrix C are not 0 or are greater than a preset alignment value, it means that the first grayscale area and the second grayscale area are not aligned. At this time, the first grayscale area can be moved and the alignment matrix can be recalculated until the reference template and the needle pattern are aligned.

[0084] Referring to FIG. 8 , in some embodiments, step S204 may include steps S301 to S305 :

[0085] Step S301 , calculating the absolute value of each matrix element in the alignment matrix and then adding the calculated values ​​to obtain a matrix alignment value.

[0086] In some embodiments, after subtracting the second grayscale matrix (denoted by B) from the first grayscale matrix (denoted by A), a alignment matrix (denoted by C) can be obtained. Specifically, C is:

[0087] Furthermore, we can calculate the absolute value of each matrix element in the matrix C and add them together to obtain a new function f: f=∑∑|a ij -b ij |;

[0088] The value of f finally calculated is the matrix alignment value. According to the matrix alignment value, the difference between the first grayscale matrix and the second grayscale matrix can be determined more intuitively.

[0089] Step S302 : Compare the matrix alignment value with a preset alignment value to obtain a comparison result; wherein the preset alignment value is an alignment threshold representing the alignment of the first grayscale region and the second grayscale region.

[0090] In some embodiments, a preset alignment value can be set as the alignment threshold for the first grayscale region and the second grayscale region. The preset alignment value is the maximum tolerable matrix alignment value. If the preset alignment value is exceeded, it indicates that the first grayscale region and the second grayscale region cannot be aligned, that is, the first grayscale region and the second grayscale region do not belong to the same region. It is understood that the preset alignment value can be selected based on experience or needs.

[0091] Step S303 : If the comparison result indicates that the matrix alignment value is greater than the preset alignment value, a plurality of third grayscale regions are re-determined from the reference template, and a third grayscale matrix is ​​established for each third grayscale region.

[0092] In some embodiments, if the preset alignment value is 3 and the matrix alignment value is 2, and 2 is less than 3, then the comparison result indicates that the matrix alignment value is less than or equal to the preset alignment value, indicating that the difference between the first grayscale matrix and the second grayscale matrix is ​​tolerable, and the first grayscale region and the second grayscale region are aligned. If the matrix alignment value is 5 and 5 is greater than 3, then the comparison result indicates that the matrix alignment value is greater than the preset alignment value, indicating that the difference between the first grayscale matrix and the second grayscale matrix is ​​intolerable. At this time, multiple third grayscale regions can be re-determined by gradually moving the reference template. The specific movement trajectory can move up, down, left, and right according to a certain pixel step size. Each time a certain pixel step size is moved, a third grayscale region is obtained. The specific pixel step size is selected according to actual needs, and the embodiments of the present application do not impose specific restrictions on this.

[0093] It is understandable that the third grayscale area may be determined not according to the preset pixel compensation, but by random movement. Moreover, the first grayscale area, the second grayscale area, and the third grayscale area should be selected in the same direction as much as possible. For example, if the unit under test is a wafer, in the reference image, the probe under test is stuck on the bonding point, and the first grayscale area, the second grayscale area, and the third grayscale area can all be selected at the lower right corner of the bonding point to facilitate quick calculation and alignment. The first grayscale area, the second grayscale area, and the third grayscale area can also be selected at other positions of the bonding point, depending on the specific situation.

[0094] In some embodiments, a third grayscale matrix can be established based on the determined plurality of third grayscale regions to facilitate recalculation of matrix alignment values ​​for each third grayscale matrix. It is understood that to facilitate addition and subtraction operations between grayscale matrices, the sizes of the selected first grayscale region, the second grayscale region, and the third grayscale region should be the same. If the selected sizes are different, redundant data needs to be removed.

[0095] Step S304 : Subtract the second grayscale matrix from each third grayscale matrix in sequence to obtain a plurality of new matrix alignment values.

[0096] Specifically, the third grayscale matrix can be represented by A ij Indicates that each pixel step will get a new third grayscale matrix, that is, a new A ij , until all possible pixel steps are moved, the third grayscale matrix corresponding to all possible third grayscale areas is obtained, and each third grayscale matrix is ​​subtracted from the second grayscale matrix, or each second grayscale matrix is ​​subtracted from the third grayscale matrix, to obtain multiple new alignment matrices, specifically: C ij =A ij -B;

[0097] In some embodiments, the matrix alignment values ​​can be recalculated based on multiple new alignment matrices. The calculation method of the matrix alignment values ​​has been discussed above and will not be repeated here. After calculating the matrix alignment values ​​of each alignment matrix, a matrix D can be established based on each matrix alignment value to facilitate comparison of the matrix alignment values. The specific representation of matrix D is as follows:

[0098] Step S305: determine a target matrix alignment value from the multiple new matrix alignment values, and use the third grayscale area corresponding to the target matrix alignment value as the alignment area with the second grayscale area, and align the reference template corresponding to the third grayscale area with the acupuncture pattern corresponding to the second grayscale area.

[0099] It can be understood that since the matrix D is generated by the matrix alignment value corresponding to the pixel-by-pixel step, the matrix D covers all possible third grayscale areas that can be aligned with the second grayscale area. At this time, the minimum matrix alignment value is selected from the matrix D, and the third grayscale matrix corresponding to the minimum matrix alignment value, that is, the corresponding third grayscale area is used as the alignment area with the second arc area. Based on the alignment area, the reference template corresponding to the third grayscale area and the acupuncture pattern corresponding to the second grayscale area are aligned for further calculation.

[0100] Please refer to Figures 9a to 9c. Figure 9a is a probe image, and the boxed portion is the second grayscale area. Figures 9b and 9c are reference templates, where the boxed portion in Figure 9b is the first grayscale area, and the boxed portion in Figure 9c is the third grayscale area. As shown in Figures 9a and 9b, the first and second grayscale areas are not yet aligned. As shown in Figures 9a and 9c, the first and third grayscale areas are aligned, which means that the target areas of the probe image and the reference template are aligned. It can be understood that the target area is generally the area of ​​the probe needle test, that is, the area where the target electronic component is located. For example, if the wafer is being tested, the target area can be the die bonding area.

[0101] Referring to FIG. 10 , in some embodiments, the acupuncture diagram and the reference template have the same size; step S103 may include steps S401 to S403:

[0102] Step S401: establishing a binary matrix based on the grayscale values ​​of the reference template, and establishing a fourth grayscale matrix based on the grayscale values ​​of the acupuncture image.

[0103] In some embodiments, after aligning the target area of ​​the probe pattern with the target area of ​​the reference template, the target area can be selected. For example, if the unit under test is a wafer, the target area can be the pad area. After identifying the target area, the probe pattern and the reference template can be re-interpreted to remove redundant parts and focus only on the probe portion of the probe under test, that is, the aligned target area, thereby improving detection efficiency.

[0104] Please refer to Figures 11a and 11b. Figures 11a and 11b are schematic diagrams of intercepting the target area. Figure 11a is a schematic diagram of intercepting the target area in the acupuncture diagram. The location of the target area is marked in the figure. Figure 11b is a schematic diagram of intercepting the target area of ​​the reference template. The portion of the electronic component framed is the target area. The target areas in Figures 11a and 11b are both areas where the target electronic component is aligned. Specifically, the location of the target electronic component is consistent in the two target areas in Figures 11a and 11b. It is understandable that since the process of aligning the target area in the acupuncture diagram and the reference template has been described in detail above, it will not be repeated here.

[0105] It is understood that the target area can be omitted. It is sufficient to remove redundant data from the acupuncture image and the reference template. After removing the redundant data, the remaining portion of the acupuncture image and the reference template should be aligned to facilitate subsequent calculations. Redundant data removal can be performed manually by a tester or using an algorithm, and this embodiment of the application does not impose specific limitations on this.

[0106] In some embodiments, after the target area corresponding to the reference template and the acupuncture diagram is intercepted, a binary matrix can be established based on the target area intercepted by the reference template. Generally speaking, a grayscale matrix can be established for the target area intercepted by the reference template, and a grayscale threshold is set. Since the target electronic component is often highlighted in the image, the part greater than the grayscale threshold is determined as the target electronic component, and the part less than the grayscale threshold is determined as the non-target electronic component. A grayscale matrix is ​​established for the target area of ​​the reference template, that is, the part greater than the grayscale threshold (such as the grayscale threshold is set to 210, etc.) is set to 1, and the part less than the grayscale threshold is set to 0, thereby establishing a binary matrix of the reference template (represented by J). For example, J can be:

[0107] In the binary matrix J, 1 represents the target electronic component and 0 represents the area where the non-target electronic component is located, so that the position and shape of the target electronic component can be quickly distinguished.

[0108] Furthermore, a fourth grayscale matrix (denoted by J') can be established based on the grayscale values ​​of the target area intercepted from the acupuncture image. For example, J' can be:

[0109] It is understandable that establishing the fourth grayscale matrix based on the grayscale values ​​of the target area intercepted from the acupuncture image facilitates identification of the acupuncture marks based on different grayscale values.

[0110] Step S402 : Multiplying the matrix elements of the binarization matrix by the matrix elements of the fourth grayscale matrix to obtain a needle tip morphology matrix.

[0111] It is understandable that after the target electronic component is aligned, the matrix elements of the binarization matrix correspond one-to-one with the matrix elements of the fourth grayscale matrix. For example, in the binarization matrix, the matrix element at point A is located at position B, so in the fourth grayscale matrix, the matrix element at point A is also located at position B. Therefore, the matrix element at point A and the matrix element at point B can be multiplied correspondingly, and thus, the position of the needle tip of the probe under test in the fourth grayscale matrix can be correctly corresponded to the binarization matrix. It is understandable that if there is redundant data that causes the matrix elements of the binarization matrix and the fourth grayscale matrix to be unable to be multiplied correspondingly, the redundant data can be removed by a trained model to improve the accuracy of needle tip morphology recognition.

[0112] In some embodiments, the matrix elements of the binarized matrix can be multiplied correspondingly with the matrix elements of the fourth grayscale matrix. Specifically, the position of the target electronic component can be clearly identified through the binarized matrix (in the binarized matrix, the position of the target electronic component is represented by 1), and the area of ​​the non-target electronic component in the binarized matrix is ​​represented by 0. After multiplying the matrix elements of the binarized matrix with the matrix elements of the fourth grayscale matrix correspondingly, a needle tip morphology matrix is ​​obtained, and the matrix elements that were originally 0 in the binarized matrix are finally 0 in the needle tip morphology matrix. In this way, the area composed of the matrix elements that are 0 in the needle tip morphology matrix is ​​the area of ​​the non-target electronic component.

[0113] In some embodiments, the tip morphology matrix E can be obtained by multiplying the matrix elements of the binarization matrix (denoted by J) by the matrix elements of the fourth grayscale matrix (denoted by J'). J is represented as follows:

[0114] J' is expressed as follows:

[0115] The calculation results of the needle tip morphology matrix E are as follows:

[0116] From the above example, it can be seen that the area of ​​non-target electronic components is 0 in the binary matrix and is also 0 in the needle tip morphology matrix.

[0117] Step S403: determining the tip shape of the probe under test according to the tip shape matrix.

[0118] It can be understood that after the matrix elements with a value of 0 in the needle tip shape matrix are determined to be non-electronic components, the remaining non-zero matrix elements can be determined to be electronic components. Since the matrix element values ​​at the needle puncture point and the non-needle puncture point are different in the needle tip shape matrix, the shape of the needle tip can be quickly determined based on different matrix elements, which is more intuitive and accurate than viewing the probe with the naked eye.

[0119] Referring to FIG. 12 , in some embodiments, step S403 may include steps S501 and S502 :

[0120] Step S501: obtaining a preset needle tip grayscale threshold.

[0121] In some embodiments, because the matrix element values ​​corresponding to the needle insertion image of the probe under test may vary slightly in the needle tip morphology matrix, for example, the grayscale value of the needle insertion site of the probe under test may be 3 or 10. Therefore, a needle tip grayscale threshold can be set based on experience, for example, the needle tip grayscale threshold can be set to 50 (the specific value can be adjusted according to actual conditions). Because the needle insertion site will be shadowed and have a low grayscale value, matrix elements less than or equal to the needle tip grayscale threshold can be determined as the needle insertion site, and matrix elements greater than the needle tip grayscale threshold can be determined as non-needle insertion sites, thereby more accurately judging the needle tip shape.

[0122] Step S502 : Binarizing the matrix elements in the tip morphology matrix according to the tip grayscale threshold, and determining the tip shape of the probe under test according to the binarized tip morphology matrix.

[0123] In some embodiments, the matrix elements in the needle tip morphology matrix can be binarized according to the needle tip grayscale threshold. Specifically, the matrix elements less than or equal to the needle tip grayscale threshold can be set to 1, and the matrix elements greater than the needle tip grayscale threshold can be set to 0, thereby obtaining a binary matrix.

[0124] It can be understood that for the binary matrix, the area where the matrix element is 1 is the needle puncture area, and the area where the matrix element is not 1 is the non-needle puncture area. Specifically, the shape of the needle tip can be quickly and intuitively determined based on the distribution of 1 in the binary matrix, thereby determining whether the needle tip has problems such as wear and bending.

[0125] Referring to FIG. 13 , in some embodiments, determining multiple needle tip perpendicular lines in the direction of the probe under test from the first image may include steps S601 to S603:

[0126] Step S601 : selecting two points to be measured from each probe to be measured in the first image, and calculating the direction slope of the probe to be measured according to the coordinates of the two points to be measured.

[0127] It is understandable that it is difficult to determine the position of the needle tip of the probe under test by observing the captured image with the naked eye, which can easily cause eye fatigue to the tester and the analysis result is not accurate; or, after the image is enlarged, due to the limited resolution of the image, it may not be possible to accurately identify the position of the needle tip. Therefore, the present application provides a solution, specifically: for each probe under test in the first image, two points to be tested are taken. The points to be tested can be any two non-overlapping points. After that, the coordinates of the two points to be tested are obtained and the directional slope of the probe under test is calculated. The coordinates of the points to be tested can be obtained by establishing a coordinate system for the image.

[0128] Step S602: Calculate the vertical slope of the needle tip based on the direction slope.

[0129] Specifically, the vertical line slope of the needle tip can be calculated based on the direction slope, so as to determine multiple vertical lines of the needle tip according to the vertical line slope. For example, the two points for obtaining the direction of the needle tip of the probe under test are a: (x a ,y a ), b:(x b ,y b ), then the slope k of a and b is: k=(x b -x a ) / (y b -y a ), then the slope k' of the vertical line of the needle tip is: k'=(-1) / k.

[0130] Step S603: determining a plurality of needle tip perpendicular lines along the direction of the perpendicular line slope.

[0131] In some embodiments, multiple perpendicular lines to the probe tip can be determined along the slope of the perpendicular line to facilitate searching for the probe tip. It will be appreciated that determining the perpendicular line to the probe tip can prevent searching other locations of the probe under test. For example, if a search is performed along any straight line instead of the perpendicular line to the probe tip, it is highly likely that the search will find non-tip portions of the probe under test. However, searching along the perpendicular line to the probe tip avoids this problem.

[0132] Please refer to Figures 14 and 15 , which further explain the above. Figure 14 shows the probe direction, the direction of the probe's perpendicular, and the search direction, while Figure 15 is a further enlarged view. It is understood that the search can begin along the relative position of the probe being tested in the first image (or the acupuncture image). Once the target grayscale point is detected, the needle tip position has been found.

[0133] It is understandable that the relative position of the needle tip direction can be explained in conjunction with Figures 14 and 15. Figure 15 provides a schematic diagram of the needle tip and scanning of the probe being tested. When the probe is located in the upper left corner, the needle tip vertical line can start searching from the lower right corner to avoid overlapping with other positions of the probe being tested. As for the target grayscale point, since the search starts from the relative position, the search process at the relative position is mostly the area of ​​the target electronic component that has not been punctured by the needle, that is, the grayscale value is high. When searching along the search direction, when the intersection of the needle tip vertical line and the needle tip of the probe being tested is found, that is, the needle tip position of the needle tip, the grayscale value of the needle tip position will suddenly decrease. For example, if the grayscale value of other areas is 230, then the grayscale value of the needle tip position (generally black) will be significantly reduced, for example, the grayscale value is 5. At this time, the needle tip position can be quickly detected through the target grayscale point.

[0134] In some embodiments, a grayscale range can also be set, and points with grayscale values ​​below the grayscale range can be determined as target grayscale points. The specific grayscale range can be set according to actual conditions, for example, it can be set to a grayscale value of 30, etc., and this embodiment of the application does not impose specific limitations on this.

[0135] It is understandable that by searching for the needle tip perpendicular line, interference from other non-needle tip positions of the probe being measured can be avoided, and the needle tip position can be quickly identified.

[0136] In some embodiments, after step S105, steps S701 to S702 may be further included:

[0137] Step S701: If the probe tip detection result indicates that the tip of the probe under test is deformed, an alarm signal is issued.

[0138] In some embodiments, by observing the binarized needle tip morphology matrix, it is possible to quickly determine whether the needle tip of the probe under test is deformed. Specifically, the part of element 1 in the binary matrix represents the shape of the needle tip piercing the electronic component under test. For example, if the shape formed by the combination of element 1 in the binary matrix is ​​displayed as a long strip, it means that the probe under test is partially bent, etc. The inspection personnel can make a judgment based on experience, or can make a quick judgment through analysis of a trained model. If it is determined that the probe under test is abnormal, an alarm can be issued so that the inspection personnel can quickly adjust or repair it. Furthermore, if the probe under test has been numbered in advance, the number of the probe under test can be issued together with the alarm signal when the system issues an alarm signal, so as to distinguish different probes under test.

[0139] Step S702 , or, if the probe tip detection result indicates that the tip of the probe under test exceeds a preset puncture range, an alarm signal is issued; wherein the preset puncture range is the range within which the tip of the probe under test can detect the target electronic component and obtain a detection result.

[0140] In some embodiments, the needle insertion range of the probe can be pre-set, for example, located in the middle of the target electronic component. The specific size of the preset needle insertion range can be set according to the actual situation. If the inspection personnel find that the needle tip position of the tested probe exceeds the preset needle insertion range through analysis of the probe position, or the pre-trained model detects that the needle tip position of the tested probe exceeds the preset needle insertion range, an alarm signal is issued so that the problematic probe can be handled in time to prevent the problematic probe from continuing to detect the target electronic component. It can be understood that the preset needle insertion range is the range within which the needle tip of the tested probe can detect the target electronic component and obtain normal detection results. Exceeding the preset needle insertion range means that even if the probe is inserted, no detection result can be obtained.

[0141] Referring to FIG. 16 , an embodiment of the present application further provides a probe tip detection system that can implement the above-mentioned probe tip detection method. The probe tip detection system includes:

[0142] The puncture image acquisition module 1601 is used to acquire a first image captured when the probe under test is puncturing an electronic component, and select a puncture image of the target electronic component from the first image;

[0143] An alignment module 1602 is configured to align the needle insertion image with a reference template, wherein the reference template is obtained by selecting a target electronic component in the second image; and the second image is obtained by capturing the target electronic component before it is inserted by the probe under test.

[0144] The needle tip shape determination module 1603 is used to establish a gray matrix for the needle puncture diagram and the reference template, and determine the needle tip shape of the probe under test according to the gray matrix;

[0145] The needle tip position determination module 1604 is configured to determine multiple needle tip perpendicular lines in the direction of the probe under test from the first image, and perform line-by-line detection based on the multiple needle tip perpendicular lines until a target grayscale point is detected, and use the position of the target grayscale point as the needle tip position;

[0146] The probe tip detection result acquisition module 1605 is used to obtain the probe tip detection result based on the tip shape and tip position.

[0147] The specific implementation of the probe tip detection system is basically the same as the specific embodiment of the probe tip detection method described above, and will not be repeated here. Under the premise of meeting the requirements of the embodiment of the present application, the probe tip detection system can also be equipped with other functional modules to implement the probe tip detection method in the above embodiment.

[0148] The present application also provides an electronic device comprising a memory and a processor, wherein the memory stores a computer program, and the processor executes the computer program to implement the above-mentioned probe tip detection method. The electronic device can be any smart terminal including a tablet computer, an in-vehicle computer, or the like.

[0149] Please refer to FIG17 , which illustrates a hardware structure of an electronic device according to another embodiment. The electronic device includes:

[0150] The processor 1701 can be implemented as a general-purpose CPU (Central Processing Unit), a microprocessor, an application-specific integrated circuit (ASIC), or one or more integrated circuits, and is used to execute relevant programs to implement the technical solutions provided in the embodiments of the present application.

[0151] The memory 1702 can be implemented in the form of a read-only memory (ROM), a static storage device, a dynamic storage device, or a random access memory (RAM). The memory 1702 can store an operating system and other application programs. When the technical solutions provided in the embodiments of this specification are implemented through software or firmware, the relevant program code is stored in the memory 1702 and is called by the processor 1701 to execute the probe tip detection method of the embodiments of this application.

[0152] Input / output interface 1703, used to implement information input and output;

[0153] Communication interface 1704, used to implement communication interaction between this device and other devices, which can be achieved through wired means (such as USB, network cable, etc.) or wireless means (such as mobile network, WiFi, Bluetooth, etc.);

[0154] Bus 1705 , which transmits information between various components of the device (e.g., processor 1701 , memory 1702 , input / output interface 1703 , and communication interface 1704 );

[0155] The processor 1701 , the memory 1702 , the input / output interface 1703 and the communication interface 1704 are connected to each other in communication within the device via a bus 1705 .

[0156] An embodiment of the present application further provides a computer-readable storage medium, which stores a computer program. When the computer program is executed by a processor, the above-mentioned probe tip detection method is implemented.

[0157] The memory, as a non-transient computer-readable storage medium, can be used to store non-transient software programs and non-transient computer executable programs. In addition, the memory may include a high-speed random access memory and may also include a non-transient memory, such as at least one disk storage device, a flash memory device, or other non-transient solid-state storage device. In some embodiments, the memory may optionally include a memory remotely arranged relative to the processor, and these remote memories may be connected to the processor via a network. Examples of the above-mentioned network include, but are not limited to, the Internet, an intranet, a local area network, a mobile communication network, and combinations thereof.

[0158] The embodiments described in the embodiments of this application are intended to more clearly illustrate the technical solutions of the embodiments of this application and do not constitute a limitation on the technical solutions provided by the embodiments of this application. Those skilled in the art will appreciate that with the evolution of technology and the emergence of new application scenarios, the technical solutions provided in the embodiments of this application are also applicable to similar technical problems.

[0159] Those skilled in the art will understand that the technical solutions shown in the figures do not constitute a limitation on the embodiments of the present application, and may include more or fewer steps than shown in the figures, or a combination of certain steps, or different steps.

[0160] The device embodiments described above are merely illustrative. The units described as separate components may or may not be physically separate, i.e., they may be located in one place or distributed across multiple network units. Some or all of the modules may be selected based on actual needs to achieve the objectives of this embodiment.

[0161] Those skilled in the art will appreciate that all or some of the steps in the methods, systems, and functional modules / units in the devices disclosed above may be implemented as software, firmware, hardware, or appropriate combinations thereof.

[0162] The terms "first", "second", "third", "fourth", etc. (if any) in the specification of the present application and the above-mentioned drawings are used to distinguish similar objects and are not necessarily used to describe a specific order or sequential order. It should be understood that the data used in this way can be interchangeable where appropriate, so that the embodiments of the present application described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0163] It should be understood that in this application, "at least one (item)" and "several" refer to one or more, and "plurality" refers to two or more. "And / or" is used to describe the association relationship of associated objects, indicating that three relationships may exist. For example, "A and / or B" can mean: only A exists, only B exists, and A and B exist at the same time, where A and B can be singular or plural. The character " / " generally indicates that the previous and next associated objects are in an "or" relationship. "At least one of the following items" or similar expressions refers to any combination of these items, including any combination of single items or plural items. For example, at least one of a, b or c can mean: a, b, c, "a and b", "a and c", "b and c", or "a and b and c", where a, b, c can be single or multiple.

[0164] In the several embodiments provided in this application, it should be understood that the disclosed systems and methods can be implemented in other ways. For example, the system embodiments described above are merely illustrative. For example, the division of the above units is merely a logical function division. In actual implementation, there may be other division methods, such as multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be an indirect coupling or communication connection through some interfaces, devices or units, which can be electrical, mechanical or other forms.

[0165] The units described above as separate components may or may not be physically separate, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed across multiple network units. Some or all of these units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0166] In addition, the functional units in the various embodiments of the present application may be integrated into a single processing unit, or each unit may exist physically separately, or two or more units may be integrated into a single unit. The aforementioned integrated units may be implemented in the form of hardware or software functional units.

[0167] If the integrated unit is implemented in the form of a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present application, or the part that contributes to the prior art, or all or part of the technical solution can be embodied in the form of a software product, which is stored in a storage medium and includes multiple instructions for enabling a computer device (which can be a personal computer, server, or network device, etc.) to execute all or part of the steps of the methods of various embodiments of the present application. The aforementioned storage medium includes: various media that can store programs, such as a USB flash drive, a mobile hard disk, a read-only memory (ROM), a random access memory (RAM), a magnetic disk or an optical disk.

[0168] The preferred embodiments of the present invention are described above with reference to the accompanying drawings, but are not intended to limit the scope of the present invention. Any modifications, equivalent substitutions, and improvements made by those skilled in the art without departing from the scope and essence of the present invention should be within the scope of the present invention.

Claims

1. A method for detecting a probe tip, characterized in that: The method comprises: Acquire a first image taken when the probe under test is piercing the electronic component, and select a piercing image of the target electronic component from the first image; Aligning the needle-piercing image with a reference template; wherein the reference template is obtained by selecting the target electronic component in the second image; and the second image is obtained by photographing the target electronic component when it is not pierced by the probe under test; Establishing a grayscale matrix for the needle sticking diagram and the reference template, and determining the needle tip shape of the probe under test according to the grayscale matrix; Determine a plurality of needle tip vertical lines in the direction of the probe to be tested from the first image, and perform line-by-line detection according to the plurality of needle tip vertical lines until a target grayscale point is detected, and use the position of the target grayscale point as the needle tip position; Based on the needle tip shape and the needle tip position, a probe needle tip detection result is obtained.

2. The method for detecting a probe tip according to claim 1, characterized in that: The step of aligning the acupuncture diagram with the reference template comprises: Selecting a first grayscale area from the reference template, and establishing a first grayscale matrix corresponding to the first grayscale area; Select a second grayscale area from the acupuncture image, and establish a second grayscale matrix corresponding to the second grayscale area; wherein there are at least two different grayscale values ​​in the first grayscale area and the second grayscale area; Subtracting the second grayscale matrix from the first grayscale matrix to obtain a alignment matrix; The first grayscale area is adjusted according to the alignment matrix until the reference template and the acupuncture diagram are aligned.

3. The method for detecting a probe tip according to claim 2, characterized in that: The step of adjusting the first grayscale area according to the alignment matrix until the reference template and the acupuncture diagram are aligned includes: Calculating the absolute value of each matrix element in the alignment matrix and then adding them to obtain a matrix alignment value; Compare the matrix alignment value with a preset alignment value to obtain a comparison result; wherein the preset alignment value is an alignment threshold that characterizes the alignment of the first grayscale area and the second grayscale area; If the comparison result indicates that the matrix alignment value is greater than the preset alignment value, re-determine a plurality of third grayscale regions from the reference template, and establish a third grayscale matrix for each of the third grayscale regions; Subtracting the second grayscale matrix from each of the third grayscale matrices in turn to obtain a plurality of new matrix alignment values; A target matrix alignment value is determined from the multiple new matrix alignment values, and the third grayscale area corresponding to the target matrix alignment value is used as the alignment area with the second grayscale area to align the reference template corresponding to the third grayscale area with the acupuncture diagram corresponding to the second grayscale area.

4. The method for detecting a probe tip according to claim 1, characterized in that: The acupuncture diagram and the reference template have the same size; The step of establishing a grayscale matrix for the needle sticking diagram and the reference template, and determining the needle tip shape of the probe under test according to the grayscale matrix, comprises: A binary matrix is ​​established based on the grayscale values ​​of the reference template, and a fourth grayscale matrix is ​​established based on the grayscale values ​​of the acupuncture image; Obtaining a needle tip morphology matrix by correspondingly multiplying the matrix elements of the binarization matrix with the matrix elements of the fourth grayscale matrix; The needle tip shape of the probe under test is determined according to the needle tip morphology matrix.

5. The method for detecting a probe tip according to claim 4, characterized in that: Determining the tip shape of the probe under test according to the tip morphology matrix includes: Get the preset needle tip grayscale threshold; The matrix elements in the needle tip morphology matrix are binarized according to the needle tip grayscale threshold, and the needle tip shape of the probe under test is determined according to the binarized needle tip morphology matrix.

6. The method for detecting a probe tip according to claim 1, characterized in that: The step of determining a plurality of needle tip perpendicular lines in the direction of the probe under test from the first image comprises: Selecting two points to be measured from each of the probes to be measured in the first image, and calculating the direction slope of the probes to be measured according to the coordinates of the two points to be measured; Calculating the vertical slope of the needle tip based on the directional slope; A plurality of needle tip perpendicular lines are determined along the direction of the perpendicular line slope.

7. The method for detecting a probe tip according to claim 1, characterized in that: After obtaining the probe tip detection result based on the needle tip shape and the needle tip position, the method further includes: If the probe tip detection result indicates that the tip of the probe under test is deformed, an alarm signal is issued; Alternatively, if the probe tip detection result indicates that the tip of the probe under test exceeds a preset puncture range, an alarm signal is issued; wherein the preset puncture range is a range within which the tip of the probe under test can detect the target electronic component and obtain a detection result.

8. A probe tip detection system, characterized in that: The system comprises: The needle-piercing image acquisition module is used to acquire a first image taken when the probe under test is piercing the electronic component, and select the needle-piercing image of the target electronic component from the first image; An alignment module, used for aligning the needle-piercing image with a reference template; wherein the reference template is obtained by selecting the target electronic component in the second image; and the second image is obtained by photographing the target electronic component when it is not pierced by the probe under test; A needle tip shape determination module, used to establish a gray matrix for the needle sticking diagram and the reference template, and determine the needle tip shape of the probe under test according to the gray matrix; a needle tip position determination module, used to determine a plurality of needle tip vertical lines in the direction of the probe under test from the first image, and to perform line-by-line detection according to the plurality of needle tip vertical lines until a target grayscale point is detected, and to use the position of the target grayscale point as the needle tip position; The probe tip detection result acquisition module is used to obtain the probe tip detection result based on the needle tip shape and the needle tip position.

9. An electronic device, characterized in that: The electronic device comprises a memory and a processor, the memory stores a computer program, and the processor implements the method for detecting a probe tip according to any one of claims 1 to 7 when executing the computer program.

10. A computer-readable storage medium storing a computer program, characterized in that: When the computer program is executed by a processor, the method for detecting a probe tip according to any one of claims 1 to 7 is implemented.

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