Fine metal mask grinding system and grinding method

Abstract

A fine metal mask grinding system, comprising a motion mechanism (100), a grinding platform (200), a measurement mechanism (300) and a grinding mechanism (400), wherein the motion mechanism (100) is arranged above the grinding platform (200), and the measurement mechanism (300) and the grinding mechanism (400) are mounted on the motion mechanism (100). The grinding platform (200) comprises a platform base (210), a transparent platform plate (220), a fixing assembly (230), a moving assembly (240) and a lifting assembly (250), wherein the upper portion of the platform base (210) is recessed inwards to form a groove (211); the transparent platform plate (220) is arranged in the middle of an opening of the groove (211), the fixing assembly (230) is arranged at the left end inside the groove (211), and the moving assembly (240) is arranged at the right end inside the groove (211) opposite the fixing assembly (230), and is transversely slidably connected to the groove (211); and the lifting assembly (250) is arranged between the fixing assembly (230) and the moving assembly (240), and is arranged across the transparent platform plate (220) and transversely slidably connected to the groove (211). By means of soft contact between a grinding head and a product, precision grinding of fine metal masks is realized. Further provided is a grinding method for the fine metal mask grinding system.

Description

Fine metal mask grinding system and grinding method Technical Field

[0001] The present invention relates to the technical field of mask grinding, and in particular to a fine metal mask grinding system and a grinding method. Background Art

[0002] Fine Metal Mask (FMM), a core consumable material used in OLED production, is only approximately 20µm thick. During the OLED vapor deposition process, the FMM adheres closely to the glass substrate. As the mask for RGB deposition, any bumps on the FMM surface (typically 5-50µm in diameter and less than 10µm in height) prevent the FMM from maintaining a tight fit with the glass substrate, leading to color mixing during the deposition of the organic light-emitting medium and resulting in product failure. Therefore, any bumps on the FMM surface must be completely removed.

[0003] At present, the main methods for removing protrusions are laser grinding and grinding belt grinding. The removal amount of laser grinding is difficult to control, which can easily cause excessive processing and produce pits, affecting product quality. When grinding with a grinding belt, the product is spread on a platform, and then the grinding head squeezes the product through the grinding belt. Since the grinding head and the product are in hard contact and the contact area with the product is small, the product is plastically deformed and a pit the size of the grinding head is pressed out, affecting product quality. In addition, there are currently no grinding heads specifically designed for FMM on the market. LCD grinding technology is basically used for grinding, and the grinding heads are generally cylindrical. Due to the huge difference in the material properties of LCD screens and FMMs, the grinding effect of the original grinding heads is limited, and the cylindrical grinding heads are also prone to damage non-grinding areas.

[0004] Summary of the Invention

[0005] The technical problem to be solved by the present invention is to overcome the deficiencies in the prior art and provide a fine metal mask grinding system and grinding method with a simple structural design, soft contact between the grinding head and the product, and precise grinding.

[0006] The technical solution adopted by the present invention to solve the technical problem is: a fine metal mask grinding system, including a motion mechanism, a grinding platform, a measuring mechanism and a grinding mechanism, the motion mechanism is arranged above the grinding platform, the measuring mechanism and the grinding mechanism are installed on the motion mechanism, the grinding platform includes

[0007] The upper part of the platform seat is concave to form a groove.

[0008] The transparent platform plate is set in the middle of the groove.

[0009] The fixing component is located at the left end of the groove.

[0010] The movable component is located at the right end of the groove relative to the fixed component and is connected to the groove in a transverse sliding manner.

[0011] The lifting component is arranged between the fixed component and the movable component, straddles the transparent platform plate, and is connected to the groove in a transverse sliding manner.

[0012] Furthermore, the fixed component includes a fixed bracket, a fixed suction cup, a linear bearing and a tension sensor, the fixed bracket is longitudinally installed in the groove, the fixed suction cup is arranged above the fixed bracket, and its front and rear ends are respectively connected to the fixed bracket through linear bearings, one end of the tension sensor is connected to the right end of the fixed bracket, and the other end is connected to the right end of the fixed suction cup; the moving component includes a first dual-drive longitudinal beam, a first moving frame, a moving suction cup and a first linear motor, the first dual-drive longitudinal beam is arranged at the notch of the groove and is located above the transparent platform plate, the front and rear ends of the first dual-drive longitudinal beam are respectively slidably connected to the bottom of the groove through the first moving frame, the moving suction cup is installed at the top of the first dual-drive longitudinal beam, The first linear motor is arranged in the groove for driving the first movable frame to move laterally; the jacking assembly includes a second dual-drive longitudinal beam, a jacking frame, a second movable frame, a jacking group, a jacking suction cup and a second linear motor; the second dual-drive longitudinal beam is arranged at the notch of the groove and is located above the transparent platform plate; the front and rear sides of the bottom end of the second dual-drive longitudinal beam are respectively connected to the top end of the jacking frame; the jacking frame is vertically slidably connected to the second movable frame; the bottom end of the second movable frame is horizontally slidably connected to the bottom of the groove; the jacking group is installed on the second movable frame for driving the jacking frame to move vertically; the jacking suction cup is installed at the top end of the second dual-drive longitudinal beam; and the second linear motor is arranged in the groove for driving the second movable frame to move laterally.

[0013] Furthermore, the measuring mechanism includes a mounting frame, a measuring head, a distance sensor and a backlight assembly. The rear end of the mounting frame is connected to the driving end of the motion mechanism. The measuring head and the distance sensor are installed horizontally in parallel at the front end of the mounting frame and are located on the left side of the grinding mechanism. The backlight assembly is arranged horizontally in the groove and is located below the transparent platform plate.

[0014] Furthermore, the backlight assembly includes a backlight source, a third movable frame, a servo motor and a transmission group. The bottom end of the backlight source is laterally slidably connected to the bottom of the groove through the third movable frame. The servo motor is installed at the left end of the groove, and its output end is connected to the middle of the bottom end of the backlight source through the transmission group.

[0015] Furthermore, the grinding mechanism includes a mounting base, a grinding belt assembly, a driving assembly, a spacing adjustment assembly and a grinding head assembly. The rear end of the mounting base is connected to the driving end of the motion mechanism. The grinding belt assembly is installed on the front side of the mounting base through the spacing adjustment assembly. The driving assembly is installed on the upper part of the mounting base to drive the grinding belt assembly to move. The grinding head assembly is installed on the lower part of the mounting base. A grinding opening is opened in the middle of the bottom end of the mounting base for the grinding head assembly to pass through.

[0016] The transmission gear of the present invention is connected with the transmission gear of the present invention to the transmission gear of the present invention, and the transmission gear of the present invention is connected with the transmission gear of the present invention to the transmission gear of the present invention.

[0017] Furthermore, the driving assembly includes a grinding motor, a pulley and a tensioning group, a driving shaft and a clutch gear. There are two grinding motors, which are arranged laterally at intervals. The grinding motor is longitudinally installed at the top of the mounting base. The output end of the grinding motor is connected to the rear end of the driving shaft through the pulley and the tensioning group. The driving shaft rotates and passes through the mounting base, and its front end is connected to the rear end of the rotating shaft through the clutch gear; the spacing adjustment assembly includes an adjusting motor, a cylindrical guide rail and a mounting lock. The adjusting motor is longitudinally installed in the middle of the mounting base, and its output end is connected to the mounting plate. The cylindrical guide rail is symmetrically installed in the middle of the left and right ends of the mounting base, and its front end passes through the mounting plate and is connected to the mounting lock.

[0018] Furthermore, the grinding head assembly includes a downward pressure motor, a slide, a pressure sensor, a grinding head, a compression spring, a compression rod, a compression wheel and a dust collector. The downward pressure motor is vertically installed in the middle of the rear end of the mounting base, and the slide is vertically slidably installed in the lower front end of the mounting base. The output end of the downward pressure motor is connected to the slide through the pressure sensor, and the grinding head is installed at the bottom end of the slide. The compression spring, compression rod and compression wheel are all installed at the front end of the slide. The top end of the compression spring is connected to the slide, and its bottom end is connected to the top end of the compression rod. The middle part of the compression rod is rotatably connected to the slide, and the compression wheel is rotatably installed at the bottom end of the compression rod. The dust collector is symmetrically installed on the left and right sides of the bottom end of the mounting base.

[0019] Furthermore, the grinding head includes a body and grinding beads, the top end of the body is connected to the bottom end of the slide, and the grinding beads are embedded in the middle of the bottom end of the body and partially protrude from the bottom surface of the body.

[0020] A grinding method based on the above-mentioned fine metal mask grinding system comprises the following steps:

[0021] S1. Suspended tension of the product

[0022] The two ends of the product are placed on the fixed component and the mobile component and are adsorbed by the fixed component and the mobile component. Then the mobile component moves laterally relative to the fixed component to achieve suspended tensioning of the product.

[0023] S2. Product Measurement

[0024] The motion mechanism drives the measuring mechanism to move directly above the area to be ground. During three-dimensional measurement, the lifting assembly moves horizontally to directly below the measuring head in the measuring mechanism. The lifting assembly is then lifted until it contacts the product, while the lifting suction cup in the lifting assembly holds the product. The measuring head in the measuring mechanism then performs three-dimensional measurement of the protrusions on the product. After the measurement is completed, the lifting assembly resets. During two-dimensional measurement, the backlight source in the measuring mechanism moves horizontally to directly below the measuring head. The backlight source is then turned on, and the light shines through the transparent platform plate onto the back of the product. The measuring head then performs two-dimensional measurement of the vapor deposition holes on the product. During distance measurement, the distance sensor in the measuring mechanism measures the distance between the product and the measuring head, and the distance between the product and the grinding head in the grinding mechanism.

[0025] S3. Grinding of products

[0026] The motion mechanism drives the grinding mechanism to precisely grind the area to be ground based on the data obtained by the measuring mechanism.

[0027] The beneficial effects of the present invention are:

[0028] (1) The present invention achieves suspended fixation of the product by adsorbing both ends of the product through a fixed component and a movable component, and then achieves tensioning of the product by lateral movement of the movable component relative to the fixed component, so that the grinding mechanism and the product are in soft contact during grinding. Compared with hard contact grinding, the generation of pits is avoided, and the grinding effect and product quality are guaranteed;

[0029] (2) The present invention realizes three-dimensional measurement of protrusions, two-dimensional measurement of vapor deposition holes, and distance measurement between the product and the measuring head, as well as between the product and the grinding head, by setting a measuring mechanism, thereby achieving precise measurement and grinding of protrusions, further ensuring grinding effect and product quality;

[0030] (3) The present invention provides a spacing adjustment component so that the grinding belt can be longitudinally moved and adjusted relative to the grinding head, so that the contact position between the grinding belt and the grinding head is adjustable, thereby realizing reciprocating grinding and repeated use of the grinding belt, thereby improving the utilization rate of the grinding belt and reducing the replacement frequency of the grinding belt;

[0031] (4) Compared with a cylindrical grinding head, the present invention reduces the contact area between the grinding belt and the product by setting the grinding beads, which is equivalent to point contact, thereby making the grinding more precise and avoiding damage to the non-grinding area. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] The present invention will be further described below with reference to the accompanying drawings and examples.

[0033] FIG1 is a schematic structural diagram of the present invention;

[0034] FIG2 is a schematic diagram of a grinding platform in the present invention;

[0035] FIG3 is a schematic diagram of a mobile assembly in the present invention;

[0036] FIG4 is a schematic diagram of a fixing assembly in the present invention;

[0037] FIG5 is a schematic diagram of a jacking assembly in the present invention;

[0038] FIG6 is a schematic diagram of the jacking group of the present invention;

[0039] FIG7 is a schematic diagram of a measuring mechanism of the present invention;

[0040] FIG8 is a schematic diagram of a grinding mechanism according to the present invention;

[0041] FIG9 is a schematic diagram of the grinding belt assembly of the present invention;

[0042] FIG10 is a schematic diagram of a grinding head assembly according to the present invention;

[0043] FIG11 is a schematic diagram of a downward pressure motor in the present invention;

[0044] FIG12 is a schematic diagram of the grinding head of the present invention.

[0045] In the figure: 100, motion mechanism; 200, grinding platform; 210, platform seat; 211, groove; 220, transparent platform plate; 230, fixed assembly; 231, fixed bracket; 232, fixed suction cup; 233, linear bearing; 234, tension sensor; 240, moving assembly; 241, first dual-drive longitudinal beam; 242, first moving frame; 243, moving suction cup; 244, first linear motor; 250, lifting assembly; 251, second dual-drive longitudinal beam; 2 52. Lifting frame; 253. Second moving frame; 254. Lifting group; 255. Lifting suction cup; 256. Second linear motor; 300. Measuring mechanism; 310. Mounting frame; 320. Measuring head; 330. Distance sensor; 340. Backlight assembly; 341. Backlight source; 342. Third moving frame; 343. Servo motor; 344. Transmission group; 400. Grinding mechanism; 410. Mounting base; 411. Grinding opening; 420. Grinding belt assembly; 421. Mounting plate; 422, cover plate; 423, cover plate lock; 424, belt box; 425, rotating shaft; 426, first guide wheel assembly; 427, second guide wheel assembly; 428, guide shaft assembly; 429, speed encoder; 4210, grinding belt; 4211, notch; 4212, pressing spring; 430, driving assembly; 431, grinding motor; 432, pulley and tensioning assembly; 433, driving shaft; 4 34. Clutch gear; 440. Spacing adjustment assembly; 441. Adjustment motor; 442. Cylindrical guide rail; 443. Mounting lock; 450. Grinding head assembly; 451. Pressing motor; 452. Slide; 453. Pressure sensor; 454. Grinding head; 4541. Main body; 4542. Grinding beads; 455. Compression spring; 456. Compression rod; 457. Compression wheel; 458. Dust collector. DETAILED DESCRIPTION

[0046] The present invention will now be further described with reference to the accompanying drawings and preferred embodiments. These drawings are simplified schematic diagrams, which only illustrate the basic structure of the present invention in a schematic manner, and therefore only show the components related to the present invention.

[0047] Example 1

[0048] As shown in Figures 1 and 2, a fine metal mask grinding system includes a motion mechanism 100, a grinding platform 200, a measuring mechanism 300 and a grinding mechanism 400. The motion mechanism 100 is arranged above the grinding platform 200, and the measuring mechanism 300 and the grinding mechanism 400 are installed on the motion mechanism 100. The grinding platform 200 includes a platform seat 210, a transparent platform plate 220, a fixed component 230, a movable component 240 and a lifting component 250. The upper part of the platform seat 210 is concave to form a groove 211. The transparent platform plate 220 is arranged in the middle of the notch of the groove 211. The fixed component 230 is arranged at the left end of the groove 211. The movable component 240 is arranged at the right end of the groove 211 relative to the fixed component 230 and is laterally slidably connected to the groove 211. The lifting component 250 is arranged between the fixed component 230 and the movable component 240, and is arranged across the transparent platform plate 220 and is laterally slidably connected to the groove 211. The fixed assembly 230 and the movable assembly 240 absorb the ends of the product, achieving a suspended fixation of the product. The movable assembly 240 then moves laterally relative to the fixed assembly 230 to tension the product. This allows for soft contact between the grinding mechanism 400 and the product during grinding. Compared to hard-contact grinding, this avoids the formation of pits, ensuring grinding results and product quality. Specifically, the motion mechanism 100 can achieve three-dimensional motion. This is prior art, and its specific structure will not be described in detail here.

[0049] As shown in Figures 2 and 4, the fixed assembly 230 includes a fixed bracket 231, a fixed suction cup 232, a linear bearing 233, and a tension sensor 234. The fixed bracket 231 is longitudinally installed in the groove 211. The fixed suction cup 232 is arranged above the fixed bracket 231, and its front and rear ends are respectively connected to the fixed bracket 231 through linear bearings 233. One end of the tension sensor 234 is connected to the right end of the fixed bracket 231, and the other end is connected to the right end of the fixed suction cup 232. The setting of the tension sensor 234 detects the tension generated by the relative movement between the fixed bracket 231 and the fixed suction cup 232 in real time. Specifically, the fixed suction cup 232 is a porous ceramic suction cup; the linear bearing 233 is a cross-stick linear bearing.

[0050] As shown in Figures 2 and 3, the moving assembly 240 includes a first dual-drive longitudinal beam 241, a first mobile frame 242, a mobile suction cup 243, and a first linear motor 244. The first dual-drive longitudinal beam 241 is set at the notch of the groove 211 and is located above the transparent platform plate 220. The front and rear ends of the first dual-drive longitudinal beam 241 are respectively slidably connected to the bottom of the groove 211 through the first mobile frame 242. The mobile suction cup 243 is installed at the top of the first dual-drive longitudinal beam 241. The first linear motor 244 is set in the groove 211 and is used to drive the first mobile frame 242 to move horizontally. When the product is stretched, the first linear motor 244 drives the first dual-drive longitudinal beam 241 to move horizontally relative to the fixed assembly 230 until the product is straightened. During the tensioning and grinding process, the tensile force in the product is transmitted through the fixed suction cup 232 to the linear bearing 233, and then to the tension sensor 234. The tension sensor 234 senses the product tension and further controls the movement of the first dual-drive longitudinal beam 241, thereby ensuring that the tension in the product remains stable at the set value. Specifically, the movable suction cup 243 is a porous ceramic suction cup.

[0051] As shown in Figures 2, 5 and 6, the jacking assembly 250 includes a second dual-drive longitudinal beam 251, a jacking frame 252, a second mobile frame 253, a jacking group 254, a jacking suction cup 255 and a second linear motor 256. The second dual-drive longitudinal beam 251 is arranged at the notch of the groove 211 and is located above the transparent platform plate 220. The front and rear sides of the bottom end of the second dual-drive longitudinal beam 251 are respectively connected to the top of the jacking frame 252, the jacking frame 252 is vertically slidingly connected to the second mobile frame 253, and the bottom end of the second mobile frame 253 is horizontally slidingly connected to the bottom of the groove 211. The jacking group 254 is installed on the second mobile frame 253 for driving the jacking frame 252 to move vertically, the jacking suction cup 255 is installed at the top of the second dual-drive longitudinal beam 251, and the second linear motor 256 is arranged in the groove 211 for driving the second mobile frame 253 to move horizontally. The setting of the lifting assembly 250, on the one hand, provides temporary support for the middle part of the product when it is placed on the fixed assembly 230 and the movable assembly 240 (the lifting suction cup 255 is not turned on at this time), preventing the middle part of the product from bending too much and causing creases before the product is stretched. On the other hand, it plays an auxiliary role in the subsequent three-dimensional measurement (the lifting suction cup 255 is turned on at this time), preventing the suspended product from affecting the measurement accuracy due to slight shaking. Before the product is stretched, the top surfaces of the fixed suction cup 232, the movable suction cup 243 and the lifting suction cup 255 are on the same horizontal plane; during the product stretching process, the lifting suction cup 255 is at the lowest end of the stroke and does not contact the product. Specifically, the lifting group 254 is a lifting cylinder; the lifting suction cup 255 is a porous ceramic suction cup.

[0052] As shown in Figures 1, 2 and 7, the measuring mechanism 300 includes a mounting frame 310, a measuring head 320, a distance sensor 330 and a backlight assembly 340. The rear end of the mounting frame 310 is connected to the driving end of the motion mechanism 100. The measuring head 320 and the distance sensor 330 are installed horizontally in parallel at the front end of the mounting frame 310 and are located on the left side of the grinding mechanism 400. The backlight assembly 340 is arranged horizontally in the groove 211 and is located below the transparent platform plate 220. Through the setting of the measuring mechanism 300, three-dimensional measurement of the protrusion, two-dimensional measurement of the evaporation hole, and distance measurement between the product and the measuring head 320 and between the product and the grinding head 454 are achieved, achieving accurate measurement and grinding of the protrusion, further ensuring the grinding effect and product quality. Among them, the two-dimensional measurement of the evaporation hole is used to determine whether the protrusion is located at the edge of the evaporation hole. According to the distance data obtained by the distance sensor 330, the adjustment of the measurement focal length is guided and collisions are prevented.

[0053] As shown in Figures 2 and 3, the backlight assembly 340 includes a backlight source 341, a third movable frame 342, a servo motor 343, and a transmission assembly 344. The bottom end of the backlight source 341 is laterally slidably connected to the bottom of the groove 211 via the third movable frame 342. The servo motor 343 is mounted at the left end of the groove 211, and its output end is connected to the middle of the bottom end of the backlight source 341 via the transmission assembly 344. During two-dimensional measurement, the servo motor 343 drives the backlight source 341 laterally through the transmission assembly 344 to move directly below the measuring head 320. Specifically, the transmission assembly 344 is a belt and pulley structure, which is conventional.

[0054] As shown in Figures 1 and 7-9, the grinding mechanism 400 includes a mounting base 410, a grinding belt assembly 420, a drive assembly 430, a spacing adjustment assembly 440, and a grinding head assembly 450. The rear end of the mounting base 410 is connected to the drive end of the motion mechanism 100. The grinding belt assembly 420 is mounted on the front side of the mounting base 410 via the spacing adjustment assembly 440. The drive assembly 430 is mounted on the upper part of the mounting base 410 to drive the grinding belt assembly 420 to move. The grinding head assembly 450 is mounted on the lower part of the mounting base 410. A grinding opening 411 is opened in the middle of the bottom end of the mounting base 410 for the grinding head assembly 450 to pass through. The spacing adjustment assembly 440 allows the grinding belt 4210 to be longitudinally moved and adjusted relative to the grinding head 454, so that the contact position between the grinding belt 4210 and the grinding head 454 is adjustable, thereby achieving reciprocating grinding and repeated use of the grinding belt 4210, thereby improving the utilization rate of the grinding belt 4210 and reducing the replacement frequency of the grinding belt 4210.

[0055] As shown in Figures 7 to 11, the grinding tape assembly 420 includes a mounting plate 421, a cover plate 422, a cover plate lock 423, a tape box 424, a rotating shaft 425, a first guide wheel group 426, a second guide wheel group 427, a guide shaft group 428, a speed encoder 429 and a grinding tape 4210. The mounting plate 421 is mounted on the front side of the mounting base 410 through the spacing adjustment component 440, and a notch 4211 is opened in the middle of its bottom end to avoid the grinding head assembly 450. The cover plate 422 is mounted on the front end of the mounting plate 421, the top of the cover plate 422 is hinged to the top of the mounting plate 421, and the middle part is connected to the mounting plate 421 through the cover plate lock 423. The tape box 4210 is provided with a plurality of rotating shafts 425, 426, 427, 428, and a plurality of rotating shafts 426, 428, 429, and a plurality of rotating shafts 427, 428, 429, and a plurality of rotating shafts 427, 429, and a plurality of rotating shafts 428, 429, and a plurality of rotating shafts 429 ... 4. The rotating shaft 425, the first guide wheel group 426, and the second guide wheel group 427 are all disposed within the cavity enclosed by the mounting plate 421 and the cover plate 422. The tape cartridge 424 is disposed at the upper front end of the mounting plate 421, and its tape reel is connected to the drive assembly 430 via the rotating shaft 425. The first guide wheel group 426 and the second guide wheel group 427 are located at the lower front end of the mounting plate 421. The guide shaft group 428 is rotatably mounted within the grinding opening 411. A speed encoder 429 is mounted at the rear end of the guide shaft group 428. The grinding tape 4210 is driven and wound around the first guide wheel group 426, the second guide wheel group 427, and the guide shaft group 428, and is connected to the tape reel in the tape cartridge 424. The speed encoder 429 is mounted at the rear end of the guide shaft group 428 to provide feedback on the actual rotational speed of the guide shaft group 428, thereby obtaining the actual linear velocity of the grinding tape 4210. Specifically, the top of the cover plate 422 is connected to the top of the mounting plate 421 through a hinge; the first guide wheel group 426 and the second guide wheel group 427 are each composed of two guide wheels; the guide shaft group 428 is composed of two guide shafts, which are installed in parallel with each other in the grinding mouth 411, and the rear end of one of the guide shafts is connected to the speed encoder 429; a clamping spring 4212 is provided in the cover plate 422 to limit the belt box 424.

[0056] As shown in Figures 7-11, the drive assembly 430 includes a grinding motor 431, a pulley and tensioning assembly 432, a drive shaft 433, and a clutch gear 434. Two grinding motors 431 are spaced laterally apart and mounted longitudinally on the top of the mounting base 410. The output end of each grinding motor 431 is connected to the rear end of the drive shaft 433 via the pulley and tensioning assembly 432. The drive shaft 433 is rotatably mounted through the mounting base 410, and its front end is connected to the rear end of the rotating shaft 425 via the clutch gear 434. Specifically, one of the two grinding motors 431 rotates forward and the other rotates counterclockwise. Automatic encoders within the grinding motors 431 monitor the actual motor speed. The pulley and tensioning assembly 432 are conventional. During grinding, only one of the two grinding motors 431 is operating, while the other is in a relaxed state. Passive speed values ​​can also be obtained in this relaxed state. The alternating operation of the two grinding motors 431 enables reciprocating grinding.

[0057] By setting the encoders built into the two grinding motors 431 and the speed encoder 429, the linear speed of the grinding belt 4210 can be obtained and adjusted in real time to ensure the stability of grinding.

[0058] The calculation process of the linear velocity v1 of the grinding belt 4210 obtained according to the motor speed of the grinding motor 431 and the linear velocity v2 of the grinding belt 4210 obtained by the speed encoder 429 is as follows:

[0059] Assume that the radius of the reel driven by the forward-rotating grinding motor 431 is r1, the radius of the reel driven by the reverse-rotating grinding motor 431 is r2, and the radius of the guide shaft in the guide shaft group 428 is r3, where r1+r2=R, and R is a constant.

[0060] The encoders in the two grinding motors 431 respectively obtain the actual rotation speed of the motors, and convert the rotation speed of the corresponding drive shaft 433 through the pulley diameter of the pulley and the tensioning group 432, thereby obtaining the belt reel rotation speed w1 driven by the forward rotating grinding motor 431 and the belt reel rotation speed w2 driven by the reverse rotating grinding motor 431; the speed encoder 429 directly obtains the rotation speed w3 of the guide shaft.

[0061] Since the linear speed of the grinding belt 4210 on the two reels is consistent, that is, w1r1=w2r2, it can be calculated that Thus we get v2=w3r3.

[0062] The grinding linear speed of the grinding belt 4210 is set by controlling the forward-rotating grinding motor 431 to slowly accelerate from zero speed. During the acceleration process, the values ​​of v1 and v2 are calculated in real time to gradually accelerate the linear speed of the grinding belt 4210 and maintain it at the set speed.

[0063] Furthermore, during the grinding process, by comparing v1 and v2, it is possible to determine whether the grinding belt 4210 is broken or twisted. If the belt is broken or twisted, the speed of at least one of the forward grinding motor 431, the reverse grinding motor 431, and the speed encoder 429 will change significantly, resulting in a large difference between v1 and v2.

[0064] pass and The actual radius of the two reels can be obtained. By comparing the actual radius with the minimum radius, it can be determined whether the grinding tape 4210 on the reel is used up, and a replacement reminder can be given to avoid tape breakage after use up.

[0065] As shown in Figures 7, 8 and 11, the spacing adjustment assembly 440 includes an adjustment motor 441, a cylindrical guide rail 442 and a mounting lock 443. The adjustment motor 441 is longitudinally mounted in the middle of the mounting base 410, and its output end is connected to the mounting plate 421. The cylindrical guide rail 442 is symmetrically mounted in the middle of the left and right ends of the mounting base 410, and its front end passes through the mounting plate 421 and is connected to the mounting lock 443. The provision of the cylindrical guide rail 442 ensures the parallel movement of the mounting plate 421. The design of the mounting lock 443 allows the grinding tape assembly 420 to be removed separately for replacement of the tape box 424 without affecting the spacing adjustment, making it more convenient to use. The adjustment motor 441 drives the mounting plate 421 to move longitudinally, that is, in the width direction of the grinding tape 4210, to achieve adjustable contact position between the grinding tape 4210 and the grinding head 454. Specifically, the spacing adjustment range is ±1mm.

[0066] As shown in Figures 10 and 11, the grinding head assembly 450 includes a pressing motor 451, a slide 452, a pressure sensor 453, a grinding head 454, a pressing spring 455, a pressing rod 456, a pressing wheel 457 and a dust collector 458. The pressing motor 451 is vertically mounted at the middle of the rear end of the mounting base 410, and the slide 452 is vertically slidably mounted at the lower front end of the mounting base 410. The output end of the pressing motor 451 is connected to the slide 452 through the pressure sensor 453. The grinding head 454 is mounted on the bottom end of the slide 452. The compression spring 455, compression rod 456, and compression wheel 457 are all mounted on the front end of the slide 452. The top end of the compression spring 455 is connected to the slide 452, and its bottom end is connected to the top end of the compression rod 456. The middle part of the compression rod 456 is rotatably connected to the slide 452. The compression wheel 457 is rotatably mounted on the bottom end of the compression rod 456. The dust collector 458 is symmetrically mounted on the left and right sides of the bottom end of the mounting base 410. The pressure sensor 453 obtains the pressure exerted on the grinding head 454 in real time to sense the grinding force and the degree of contact between the grinding head 454 and the product. The feedback value of the pressure sensor 453 is used to accurately control the downward pressure of the downward pressure motor 451, thereby further ensuring the grinding effect and product quality. The arrangement of a compression spring 455, a compression rod 456, and a compression wheel 457 maintains constant pressure on the grinding belt 4210 against the guide shaft, preventing slippage between the grinding belt 4210 and the guide shaft. Specifically, the output end of the downward pressure motor 451 is connected to the pressure sensor 453 via a screw-nut structure; the grinding head 454 is located between the two guide shafts; the compression wheel 457 presses the grinding belt 4210 against one of the guide shafts; and the dust collector 458 removes dust generated during the grinding process through negative pressure suction.

[0067] By using the tension sensor 234 and the pressure sensor 453 in conjunction with each other, the grinding force during the grinding process and the internal tension of the product are kept stable, thereby ensuring the stability of the grinding.

[0068] As shown in Figure 12, the grinding head 454 includes a body 4541 and grinding beads 4542. The top of the body 4541 is connected to the bottom of the slide 452. The grinding beads 4542 are embedded in the middle of the bottom end of the body 4541 and partially protrude from the bottom surface of the body 4541. The provision of grinding beads 4542 reduces the contact area between the grinding belt 4210 and the product compared to a cylindrical grinding head, equivalent to point contact, making grinding more precise and easier to control, and avoiding damage to non-grinding areas, making it more suitable for the dimensional characteristics of the protrusions on FMM products. Specifically, the grinding beads 4542 are spherical, with only a small portion protruding from the body 4541. The diameter of the grinding beads 4542 is generally 0.2-1mm, and the height of the protruding portion is generally 0.05-0.2mm.

[0069] During grinding, the downward pressure motor 451 drives the grinding head 454 to press down, and the downward pressure is fed back through the pressure sensor 453 to determine whether the grinding belt 4210 contacts and presses the product. The grinding motor 431 drives the grinding belt 4210 to rotate forward, grinding for a certain time or grinding a certain length of the grinding belt 4210. After the grinding is completed, the downward pressure motor 451 drives the grinding head 454 to move up and reset, and the forward-rotating grinding motor 431 continues to work for a distance according to the current r1 value and then tightens the grinding belt 4210. During the grinding process, the product tension is adjusted in real time according to the feedback of the tension sensor 234 to ensure the stability of the tension in the product. It should be noted that the relative position of the grinding head 454 and the grinding belt 4210 can be adjusted after the grinding belt 4210 has completed a roll, so as to avoid frequent switching of the two grinding motors 431 in forward and reverse rotation.

[0070] Example 2

[0071] A grinding method based on the fine metal mask grinding system described in Example 1, comprising the following steps:

[0072] S1. Suspended tension of the product

[0073] The two ends of the product are placed on the fixed component 230 and the movable component 240 and are adsorbed by the fixed component 230 and the movable component 240. Then the movable component 240 moves laterally relative to the fixed component 230 to achieve suspended tensioning of the product.

[0074] S2. Product Measurement

[0075] Based on the grinding position provided by the AOI equipment (not shown), the motion mechanism 100 drives the measuring mechanism 300 to move directly above the grinding area. During three-dimensional measurement, the lifting assembly 250 moves horizontally to directly below the measuring head 320 in the measuring mechanism 300. The lifting assembly 250 is then lifted until it contacts the product. Simultaneously, the lifting suction cup 255 in the lifting assembly 250 holds the product. The measuring head 320 in the measuring mechanism 300 then performs three-dimensional measurement of the protrusions on the product. After the measurement is completed, the lifting assembly 250 returns to its original position. During two-dimensional measurement, the backlight source 341 in the measuring mechanism 300 moves horizontally to directly below the measuring head 320. The backlight source 341 is then turned on, and light passes through the transparent platform plate 220 to hit the back of the product. The measuring head 320 then performs two-dimensional measurement of the evaporation holes on the product. During distance measurement, the distance sensor 330 in the measuring mechanism 300 measures the distance between the product and the measuring head 320, and the distance between the product and the grinding head 454 in the grinding mechanism 400.

[0076] S3. Grinding of products

[0077] The motion mechanism 100 drives the grinding mechanism 400 to precisely grind the area to be ground based on the data obtained by the measuring mechanism 300.

[0078] The above embodiments are only for illustrating the technical concept and features of the present invention. Their purpose is to enable people familiar with this technology to understand the content of the present invention and implement it. They are not intended to limit the scope of protection of the present invention. Any equivalent changes or modifications made according to the spirit of the present invention should be included in the scope of protection of the present invention.

Claims

1. A fine metal mask grinding system, comprising a motion mechanism (100), a grinding platform (200), a measuring mechanism (300) and a grinding mechanism (400), wherein the motion mechanism (100) is arranged above the grinding platform (200), and the measuring mechanism (300) and the grinding mechanism (400) are installed on the motion mechanism (100), characterized in that: The grinding platform (200) includes The platform seat (210) has an upper portion which is concave and has a groove (211). The transparent platform plate (220) is arranged in the middle of the notch of the groove (211). The fixing assembly (230) is disposed inside the left end of the groove (211). The movable component (240) is disposed at the right end of the groove (211) relative to the fixed component (230) and is connected to the groove (211) in a transverse sliding manner. The lifting assembly (250) is arranged between the fixed assembly (230) and the movable assembly (240), straddles the transparent platform plate (220), and is laterally slidably connected to the groove (211).

2. The fine metal mask grinding system according to claim 1, characterized in that: The fixing assembly (230) includes a fixing bracket (231), a fixing suction cup (232), a linear bearing (233) and a tension sensor (234). The fixing bracket (231) is longitudinally mounted in the groove (211). The fixing suction cup (232) is arranged above the fixing bracket (231), and its front and rear ends are respectively connected to the fixing bracket (231) through the linear bearing (233). One end of the tension sensor (234) is connected to the right end of the fixing bracket (231), and the other end is connected to the right end of the fixing suction cup (232). The moving assembly (240) comprises a first dual-drive longitudinal beam (241), a first moving frame (242), a moving suction cup (243) and a first linear motor (244); the first dual-drive longitudinal beam (241) is arranged at the notch of the groove (211) and is located above the transparent platform plate (220); the front and rear ends of the first dual-drive longitudinal beam (241) are respectively connected to the bottom of the groove (211) by sliding through the first moving frame (242); the moving suction cup (243) is installed at the top of the first dual-drive longitudinal beam (241); the first The linear motor (244) is arranged in the groove (211) and is used to drive the first moving frame (242) to move horizontally; the lifting assembly (250) includes a second dual-drive longitudinal beam (251), a lifting frame (252), a second moving frame (253), a lifting group (254), a lifting suction cup (255) and a second linear motor (256); the second dual-drive longitudinal beam (251) is arranged at the notch of the groove (211) and is located above the transparent platform plate (220); the front and rear sides of the bottom end of the second dual-drive longitudinal beam (251) are respectively connected to the lifting frame The top end of the second movable frame (252) is connected, the lifting frame (252) is vertically slidably connected to the second movable frame (253), the bottom end of the second movable frame (253) is horizontally slidably connected to the bottom of the groove (211), the lifting group (254) is installed on the second movable frame (253) and is used to drive the lifting frame (252) to move vertically, the lifting suction cup (255) is installed on the top end of the second dual-drive longitudinal beam (251), and the second linear motor (256) is set in the groove (211) and is used to drive the second movable frame (253) to move horizontally.

3. The fine metal mask grinding system according to claim 1, characterized in that: The measuring mechanism (300) comprises a mounting frame (310), a measuring head (320), a distance sensor (330) and a backlight assembly (340); the rear end of the mounting frame (310) is connected to the driving end of the motion mechanism (100); the measuring head (320) and the distance sensor (330) are installed laterally and in parallel at the front end of the mounting frame (310) and are located on the left side of the grinding mechanism (400); and the backlight assembly (340) is arranged laterally in the groove (211) and is located below the transparent platform plate (220).

4. The fine metal mask grinding system according to claim 3, characterized in that: The backlight assembly (340) comprises a backlight source (341), a third movable frame (342), a servo motor (343) and a transmission group (344); the bottom end of the backlight source (341) is connected to the bottom of the groove (211) in a transverse sliding manner via the third movable frame (342); the servo motor (343) is installed at the left end of the groove (211), and its output end is connected to the middle of the bottom end of the backlight source (341) via the transmission group (344).

5. The fine metal mask grinding system according to claim 1, characterized in that: The grinding mechanism (400) comprises a mounting base (410), a grinding belt assembly (420), a driving assembly (430), a spacing adjustment assembly (440) and a grinding head assembly (450). The rear end of the mounting base (410) is connected to the driving end of the motion mechanism (100). The grinding belt assembly (420) is mounted on the front side of the mounting base (410) through the spacing adjustment assembly (440). The driving assembly (430) is mounted on the upper part of the mounting base (410) and is used to drive the grinding belt assembly (420) to move. The grinding head assembly (450) is mounted on the lower part of the mounting base (410). A grinding opening (411) is provided in the middle of the bottom end of the mounting base (410) for the grinding head assembly (450) to pass through.

6. The fine metal mask grinding system according to claim 5, characterized in that: The grinding belt assembly (420) includes a mounting plate (421), a cover plate (422), a cover plate lock (423), a belt box (424), a rotating shaft (425), a first guide wheel group (426), a second guide wheel group (427), a guide shaft group (428), a speed encoder (429) and a grinding belt (4210). The mounting plate (421) is mounted on the front side of the mounting base (410) through a spacing adjustment component (440), and a notch (4211) is provided in the middle of the bottom end thereof to avoid the grinding head assembly (450). The cover plate (422) is mounted on the front end of the mounting plate (421), the top end of the cover plate (422) is hinged to the top end of the mounting plate (421), and the middle part thereof is connected to the mounting plate (421) through the cover plate lock (423). The belt box (424), the rotating shaft (425), the first guide wheel group (426), the second guide wheel group (427), the guide shaft group (428), the speed encoder (429) and the grinding belt (4210). The shaft (425), the first guide wheel group (426) and the second guide wheel group (427) are all arranged in a cavity enclosed by the mounting plate (421) and the cover plate (422); the tape box (424) is arranged at the upper front end of the mounting plate (421), and its tape reel is connected to the driving component (430) through the rotating shaft (425); the first guide wheel group (426) and the second guide wheel group (427) are distributed at the lower front end of the mounting plate (421); the guide shaft group (428) is rotatably installed in the grinding port (411); the speed encoder (429) is installed at the rear end of the guide shaft group (428); the grinding belt (4210) is driven and wound around the first guide wheel group (426), the second guide wheel group (427) and the guide shaft group (428), and is connected to the tape reel in the tape box (424).

7. The fine metal mask grinding system according to claim 6, characterized in that: The driving assembly (430) includes a grinding motor (431), a pulley and a tensioning assembly (432), a driving shaft (433) and a clutch gear (434). The grinding motors (431) are two and are arranged at intervals in the transverse direction. The grinding motor (431) is longitudinally mounted on the top of the mounting base (410), and the output end of the grinding motor (431) is connected to the rear end of the driving shaft (433) through a pulley and a tensioning group (432). The driving shaft (433) is rotatably arranged through the mounting base (410), and its front end is connected to the rear end of the rotating shaft (425) through a clutch gear (434). The spacing adjustment component (440) includes an adjustment motor (441), a cylindrical guide rail (442) and a mounting lock (443). The adjustment motor (441) is longitudinally mounted in the middle of the mounting base (410), and its output end is connected to the mounting plate (421). The cylindrical guide rail (442) is symmetrically mounted in the middle of the left and right ends of the mounting base (410), and its front end passes through the mounting plate (421) and is connected to the mounting lock (443).

8. The fine metal mask grinding system according to claim 7, characterized in that: The grinding head assembly (450) includes a downward pressure motor (451), a slide (452), a pressure sensor (453), a grinding head (454), a compression spring (455), a compression rod (456), a compression wheel (457) and a dust collector (458). The downward pressure motor (451) is vertically mounted at the middle of the rear end of the mounting base (410). The slide (452) is vertically slidably mounted at the lower front end of the mounting base (410). The output end of the downward pressure motor (451) is connected to the slide (452) via the pressure sensor (453). The head (454) is installed at the bottom end of the slide (452), the clamping spring (455), the clamping rod (456) and the clamping wheel (457) are all installed at the front end of the slide (452), the top end of the clamping spring (455) is connected to the slide (452), and the bottom end thereof is connected to the top end of the clamping rod (456), the middle part of the clamping rod (456) is rotatably connected to the slide (452), the clamping wheel (457) is rotatably installed at the bottom end of the clamping rod (456), and the dust collector (458) is symmetrically installed on the left and right sides of the bottom end of the mounting base (410).

9. The fine metal mask grinding system according to claim 8, characterized in that: The grinding head (454) includes a body (4541) and grinding beads (4542). The top end of the body (4541) is connected to the bottom end of the slide (452). The grinding beads (4542) are embedded in the middle of the bottom end of the body (4541) and partially protrude from the bottom surface of the body (4541).

10. A grinding method based on the fine metal mask grinding system according to any one of claims 1 to 9, characterized in that: Here are the steps: S1. Suspended tension of the product The two ends of the product are placed on the fixed component (230) and the movable component (240) and are adsorbed by the fixed component (230) and the movable component (240), and then the movable component (240) moves laterally relative to the fixed component (230) to achieve suspended tensioning of the product; S2. Product Measurement The motion mechanism (100) drives the measuring mechanism (300) to move to the top of the area to be ground. During three-dimensional measurement, the lifting assembly (250) moves horizontally to the bottom of the measuring head (320) in the measuring mechanism (300). Then, the lifting assembly (250) is lifted to contact the product. At the same time, the lifting suction cup (255) in the lifting assembly (250) absorbs the product. Then, the measuring head (320) in the measuring mechanism (300) performs three-dimensional measurement on the protrusion on the product. After the measurement is completed, the lifting assembly (250) is reset. During dimensional measurement, the backlight source (341) in the measuring mechanism (300) moves horizontally to the position directly below the measuring head (320), and then the backlight source (341) is turned on, and the light passes through the transparent platform plate (220) and hits the back of the product, and then the measuring head (320) performs two-dimensional measurement of the evaporation holes on the product; during distance measurement, the distance sensor (330) in the measuring mechanism (300) measures the distance between the product and the measuring head (320) and the distance between the product and the grinding head (454) in the grinding mechanism (400). S3. Grinding of products The motion mechanism (100) drives the grinding mechanism (400) to precisely grind the area to be ground based on the data acquired by the measuring mechanism (300).

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