Carrier plate device

Abstract

A carrier plate device, comprising a support frame (100) and at least one tray (200), wherein the tray (200) is mounted on the support frame (100). The tray (200) comprises a body (210) and support ribs (220) connected to the body (210), wherein a first side of the body (210) is configured to support a substrate; and the support ribs (220) are connected to a second side of the body (210), such that the first side of the body (210) is in the shape of an upwardly protruding arc.

Description

Board carrier

[0001] This application claims priority to the Chinese patent application filed with the China Patent Office on February 7, 2024, with application number 202410173117.3, the entire contents of which are incorporated by reference into this application. Technical Field

[0002] The present application relates to the field of semiconductor manufacturing technology, for example, to a carrier device. Background Art

[0003] The length of the effective wafer placement area on the carrier is generally a fixed value due to equipment limitations. However, the width of the effective wafer placement area can be adjusted by changing the center distance between two adjacent silicon wafer positions. The smaller the center distance, the more silicon wafers can be placed in the effective wafer placement area, and thus the larger the proportion of the silicon wafer on the carrier, and vice versa.

[0004] In the industry, the entire device for carrying silicon wafers for coating is usually called a carrier. The carrier includes a tray and a frame for placing the tray. The independent carrier used to load silicon wafers on the carrier is called a tray. The main beams on both sides of the frame are in contact with the transmission rollers, and the carrier is driven by the transmission rollers for transmission. First of all, in the actual working process, if you want to increase the proportion of the carrier and reduce the center distance between adjacent silicon wafer positions, then the ribs between the two adjacent hollow positions on the tray (the hollow positions are used to place substrates) will be very narrow, and the strength of the tray will deteriorate. After the tray is placed on the carrier, it will sag as a whole, thereby reducing the overall flatness of the carrier and causing an increase in abnormal automated wafer placement. Secondly, during the transmission process, if the frame vibrates during the transmission process, the vibration of the frame drives the tray to vibrate, causing the position of the silicon wafers placed on the tray to shift, affecting the uniformity of the coating, and may also cause an increase in abnormal automated wafer placement. Furthermore, during the coating process, the temperature of the tray increases, causing the tray to deform, which in turn causes the position of the silicon wafers placed on the tray to shift. After deformation, there is a gap between the tray and the silicon wafers, which affects the uniformity of the coating. The coated silicon wafers may be conductive on both the front and back sides, affecting the battery performance. Summary of the Invention

[0005] The present application proposes a plate carrier device, in which the plate carrier has a high proportion and the tray has a high strength, thereby ensuring the overall flatness of the plate carrier device and reducing the probability of abnormal automatic film placement.

[0006] The present application discloses a plate carrier device, comprising: a support frame; at least one tray, the tray being mounted on the support frame, the tray comprising a body and supporting ribs connected to the body, the first side of the body being configured to support a substrate, and the supporting ribs being connected to the second side of the body.

[0007] In some embodiments, the main body is provided with a plurality of placement positions, each of the placement positions is configured to carry one of the substrates, the plurality of placement positions are arranged in multiple rows and columns, and the support ribs are provided between two adjacent rows of the placement positions and extend along the row direction.

[0008] In some embodiments, the body has a fixed edge extending along its contour, the support frame includes a frame body and at least one support beam group connected to the frame body, and the fixed edge is connected to the support beam group through a connecting component.

[0009] In some embodiments, there are multiple connecting components, and the multiple connecting components are arranged at intervals along the contour line direction of the body.

[0010] In some embodiments, the connecting assembly includes: a limit block, which is installed on the first side of the main body and has a buffer gap with the pallet; a connecting bolt, which is passed through the support beam group and the main body and passes through the limit block; a connecting nut, which is installed on the connecting bolt; and a connecting gasket, which is sleeved on the connecting bolt and clamped between the connecting nut and the limit block.

[0011] In some embodiments, a mounting groove is provided on the main body, and the limit block includes an inserting portion and a stop portion, the inserting portion is inserted into the mounting groove, and the stop portion is connected to the inserting portion and abuts against the connecting gasket.

[0012] In some embodiments, the frame body includes: multiple first main beams, multiple first main beams are arranged in parallel, and each first main beam is extended along the first direction; second main beams, there are two second main beams, the second main beams are extended along the second direction, and the two second main beams are respectively connected to the two ends of the multiple first main beams, and there is a buffer area between the second main beam and the support beam group in the first direction.

[0013] In some embodiments, the frame body further includes a reinforcement beam disposed within at least one of the first main beam and the second main beam (112).

[0014] In some embodiments, the frame body further includes a blocking plate, and the blocking plate is used to set the buffer area.

[0015] In some embodiments, the support beam group includes: a plurality of first support beams, each of which extends along a first direction and is connected to the frame body; a plurality of second support beams, each of which extends along a second direction and has its two ends respectively connected to two parallel first support beams.

[0016] In some embodiments, the second support beam includes a crossbeam and a support head connected to both ends of the crossbeam, and the support head is connected to the first support beam through a locking assembly; wherein: the locking assembly includes a locking bolt, a locking washer and a locking nut, the locking bolt passes through the support head and the first support beam, the locking nut cooperates with the locking bolt, and the locking washer is installed on the locking bolt and clamped between the locking nut and the first support beam. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] FIG1 is a schematic structural diagram of a carrier device according to an embodiment of the present application;

[0018] FIG2 is a schematic structural diagram of a tray according to an embodiment of the present application;

[0019] FIG3 is a schematic structural diagram of a support frame of a carrier device according to an embodiment of the present application;

[0020] FIG4 is a cross-sectional view of the connection structure of the tray and the support frame according to an embodiment of the present application;

[0021] FIG5 is an enlarged schematic diagram of the partial structure of the support frame at the connection position between the blocking plate and the second main beam according to an embodiment of the present application;

[0022] FIG6 is an enlarged schematic diagram of a partial structure of the support frame at the connection position between the blocking plate and the second support beam according to an embodiment of the present application;

[0023] FIG7 is an enlarged schematic diagram of a partial structure of the support frame at the connection position between the first support beam and the second support beam according to an embodiment of the present application;

[0024] FIG8 is a cross-sectional view of the first main beam of the support frame according to an embodiment of the present application.

[0025] FIG9 is an enlarged view of a partial structure of the plate carrier device at two adjacent tray positions according to an embodiment of the present application;

[0026] Figure numerals: 100, support frame; 110, frame body; 111, first main beam; 1111, reinforcement beam; 112, second main beam; 113, blocking plate; 120, support beam group; 121, first support beam; 122, second support beam; 1221, support head; 1222, crossbeam; 200, tray; 210, body; 211, fixing edge; 2111, mounting groove; 212, placement position; 220, support rib; 300, connecting assembly; 310, limit block; 311, plug-in portion; 312, stop portion; 320, connecting bolt; 330, connecting nut; 340, connecting washer; 400, locking assembly; 410, locking bolt; 420, locking nut; 430, locking washer; 500, first mounting assembly; 510, first mounting bolt; 520, first mounting nut; 530, first mounting gasket; 600, second mounting assembly; 610, second mounting bolt; 620, second mounting nut; 630, third mounting gasket; 640, third mounting gasket; 700, fixing assembly; 710, fixing bolt; 720, fixing nut; 730, first fixing gasket; 740, second fixing gasket. DETAILED DESCRIPTION

[0027] The technical solution of this application is explained below with reference to the accompanying drawings and through specific implementation methods.

[0028] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0029] In addition, features defined as "first" or "second" may explicitly or implicitly include one or more of the features, and are used to distinguish and describe features, without distinction of order or importance. In the description of this application, unless otherwise specified, "plurality" means two or more.

[0030] In the description of this application, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to internal communication between two components. A person of ordinary skill in the art will be able to understand the meaning of the above terms in this application in a specific context.

[0031] The structure of the carrier device according to the embodiment of the present application will be described below with reference to FIG. 1 to FIG. 9 .

[0032] The present application discloses a plate carrier device, as shown in Figures 1 and 2. The plate carrier device includes a support frame 100 and at least one tray 200, which is mounted on the support frame 100. The tray 200 includes a body 210 and support ribs 220 connected to the body 210. The first side of the body 210 is configured to support a substrate. The support ribs 220 are connected to the second side of the body 210, and the first side of the body 210 is formed into an upwardly convex arc. It can be understood that since the tray 200 includes the body 210 and the support ribs 220 connected to the body 210, the support ribs 220 can enhance the strength of the entire tray 200 and reduce the deformation of the tray 200. Due to the strengthening effect of the support ribs 220, the width of the support ribs 220 between two adjacent hollow positions on the body 210 (the hollow positions are used to place substrates) can be made narrower, thereby ensuring the strength of the entire tray 200 while also increasing the carrier ratio of the plate carrier device. Furthermore, during the actual manufacturing process, the support ribs 220 are welded to the second side of the body 210, giving the first side of the body 210 an upwardly convex arc shape. When the tray 200 is mounted on the support frame 100, the upwardly convex deformation of the first side offsets the drooping deformation of the entire tray 200 caused by gravity, ensuring the overall flatness of the plate carrier assembly and reducing the chance of automated plate placement anomalies.

[0033] It should be noted that during the manufacturing process of the pallet 200, the two ends of the main body 210 are placed on pads so that the main body 210 automatically droops, and then the support ribs 220 are welded to the main body 210. The support ribs 220 and the main body 210 have multiple welding points. The presence of the welding points can enable the main body 210 to form an upwardly protruding arch.

[0034] As shown in Figure 2 , the main body 210 is provided with a plurality of placement positions 212, each of which is configured to hold a substrate. The plurality of placement positions 212 are arranged in multiple rows and columns, and support ribs 220 are disposed between two adjacent rows of placement positions 212 and extend along the row direction. It will be appreciated that the plurality of rows and columns of placement positions 212 disposed on the main body 210, each of which can accommodate a substrate, increases the carrying capacity of the tray 200, thereby increasing the carrying capacity of the substrate carrier device. Furthermore, the placement of support ribs 220 between two adjacent rows of placement positions 212 can significantly enhance the strength of the main body 210, thereby enhancing the strength of the tray 200.

[0035] As shown in Figures 2 and 3 , the body 210 has a fixed edge 211 extending along its contour. The support frame 100 includes a frame body 110 and at least one support beam assembly 120 connected to the frame body 110. The fixed edge 211 is connected to the support beam assembly 120 via a connecting assembly 300. It will be appreciated that the body 210 is secured to the support frame 100 via the connection between the fixed edge 211 and the support beam assembly 120. The large contact area between the fixed edge 211 and the support frame 100 ensures stable support for the support frame 100.

[0036] 4 , the connection assembly 300 includes a stopper 310, a connecting bolt 320, a connecting nut 330, and a connecting washer 340. The stopper 310 is mounted on a first side of the fixed edge 211, and a buffer gap is maintained between the stopper 310 and the tray 200 in the horizontal and vertical directions. The connecting bolt 320 passes through the support beam assembly 120, the fixed edge 211, and the stopper 310. The connecting nut 330 is mounted on the connecting bolt 320. The connecting washer 340 is sleeved on the connecting bolt 320 and sandwiched between the connecting nut 330 and the stopper 310. It is understood that in actual operation, the stopper 310 is mounted on the first side of the body 210, and then the connecting bolt 320 is passed from bottom to top through the support beam assembly 120, the fixed edge 211, and the stopper 310. Then, the connecting washer 340 is mounted on the connecting bolt 320, and finally, the connecting nut 330 is used to tighten the connection. On the one hand, this connection method can improve the connection stability between the tray 200 and the support frame 100. On the other hand, it leaves a buffer gap in the vertical direction, which can effectively release the thermal expansion and contraction of the tray 200 during heating and cooling, and effectively solve the deformation problem of large-sized trays 200.

[0037] Optionally, as shown in FIG4 , a mounting groove 2111 is provided on the fixed edge 211. The stopper 310 includes a plug-in portion 311 and a stopper portion 312. The plug-in portion 311 is plugged into the mounting groove 2111, and the stopper portion 312 is connected to the plug-in portion 311 and abuts against the connection gasket 340. It is understood that the plug-in portion 311 is plugged into the mounting groove 2111, which allows for a buffer gap in both the horizontal and vertical directions. This effectively relieves the thermal expansion and contraction of the tray 200 during heating and cooling, effectively resolving the deformation problem of large-sized trays 200. Furthermore, the presence of the stopper 310 further ensures that the deformation of the tray 200 is limited to the same range, thereby ensuring that the deformation of the area on the tray 200 that supports the substrate and serves as a mask is close, thus avoiding the occurrence of a false mask, which can cause electrical continuity between the front and back sides of the cell after coating, affecting battery efficiency.

[0038] Optionally, there are multiple connection assemblies 300, which are spaced apart along the outline of the body 210. It is understood that multiple connection assemblies 300 can improve the connection stability between the fixed edge 211 and the support beam assembly 120, thereby improving the connection stability between the tray 200 and the support frame 100.

[0039] As shown in Figure 3, the frame body 110 includes a plurality of first main beams 111 and a plurality of second main beams 112. The plurality of first main beams 111 are arranged in parallel, each extending in a first direction. There are two second main beams 112, each extending in a second direction, and the two second main beams 112 are respectively connected to the ends of the plurality of first main beams 111. The support beam group 120 includes a plurality of first support beams 121 and a plurality of second support beams 122. Each first support beam 121 extends in the first direction and is connected to the first main beam 111. Each second support beam 122 extends in the second direction and is respectively connected to two parallel first support beams 121 at both ends.

[0040] Furthermore, a buffer zone exists between the second main beam 112 and the support beam assembly 120 in the first direction. As the carrier is transported in the second direction, the second main beam 112 of the frame body 110 contacts the transport rollers, causing vibrations that can be transmitted to the tray 200, causing substrate displacement and uneven coating. Therefore, the buffer zone is provided to reduce vibration transmission to the tray 200.

[0041] Optionally, the frame body 110 further includes a blocking plate 113, and the blocking plate 113 is provided with the buffer area. The blocking plate 113 is connected to the second main beam 112 and the second support beam 122 on both sides along the first direction. Since the coating method adopts the upper and lower coating method, if the buffer area is set to be hollow, there is a plating around phenomenon, and therefore, it is necessary to add a blocking plate 113 for blocking. It can be understood that the frame body 110 includes a plurality of first main beams 111, second main beams 112 and blocking plates 113. On the one hand, it can make the strength of the frame body 110 higher, thereby ensuring the flatness of the carrier device. On the other hand, it can simplify the structure of the frame body 110, reduce the weight of the frame body 110, and facilitate transportation and handling. At the same time, the space inside the frame body 110 is divided into multiple parts by multiple first support beams 121 and multiple second support beams 122, and each part is used to place a tray 200, which can not only enhance the support effect on the tray 200 and ensure the stability of the tray 200 in the support frame 100, but also enhance the strength of the frame body 110 while preventing the phenomenon of circumferential plating during the coating process, thereby ensuring the flatness and coating uniformity of the entire carrier device.

[0042] 5 and 6 , the blocking plate 113 is connected to the second main beam 112 and the second support beam 122 on both sides along the first direction via a first mounting assembly 500 and a second mounting assembly 600, respectively. This facilitates installation and improves the stability of the connection between the blocking plate 113 and the second main beam 112 and the second support beam 122.

[0043] As shown in FIG5 , the first mounting assembly 500 includes a first mounting bolt 510, a first mounting nut 520, and a first mounting washer 530. The first mounting bolt 510 passes through the second main beam 112 and the blocking plate 113 from bottom to top. The first mounting nut 520 engages with the first mounting bolt 510. The first mounting washer 530 is mounted on the first mounting bolt 510 and sandwiched between the first mounting nut 520 and the blocking plate 113. Thus, the blocking plate 113 and the second main beam 112 are connected by the first mounting bolt 510 and the first mounting nut 520, simplifying installation and improving the connection strength between the blocking plate 113 and the second main beam 112. Furthermore, the addition of the first mounting washer 530 prevents the first mounting nut 520 from slipping during installation and removal.

[0044] As shown in FIG6 , the second mounting assembly 600 includes a second mounting bolt 610, a second mounting nut 620, a second mounting washer 630, and a third mounting washer 640. The second mounting bolt 610 passes through the second support beam 122 and the blocking plate 113 from bottom to top. The second mounting nut 620 engages with the second mounting bolt 610. The second mounting washer 630 and the third mounting washer 640 are mounted on the second mounting bolt 610 and sandwiched between the second mounting nut 620 and the blocking plate 113. Thus, the second mounting bolt 610 and the second mounting nut 620 connect the blocking plate 113 to the second support beam 122, simplifying installation and improving the connection strength between the blocking plate 113 and the second support beam 122. Furthermore, the second mounting washer 630 and the third mounting washer 640 prevent the second mounting nut 620 from slipping during installation and removal.

[0045] 7 , the second support beam 122 includes a crossbeam 1222 and support heads 1221 connected to both ends of the crossbeam 1222. The support heads 1221 are connected to the first support beam 121 via a locking assembly 400. The locking assembly 400 includes a locking bolt 410, a locking washer 430, and a locking nut 420. The locking bolt 410 passes through the support head 1221 and the first support beam 121, the locking nut 420 engages with the locking bolt 410, and the locking washer 430 is mounted on the locking bolt 410 and sandwiched between the locking nut 420 and the first support beam 121. It is understood that during the actual assembly process, the support head 1221 is welded to the crossbeam 1222, and then the locking bolt 410 is passed through the support head 1221 and the first support beam 121. The locking washer 430 can be installed on the locking bolt 410 from the bottom up through the support head 1221 and the first support beam 121, and then locked with the locking nut 420. This facilitates installation and improves the stability of the connection between the second support beam 122 and the first support beam 121.

[0046] 8 , the frame body 110 further includes a reinforcing beam 1111 disposed within the first main beam 111. It is understood that the additional reinforcing beam 1111 can enhance the strength of the first main beam 111, thereby enhancing the strength of the frame body 110.

[0047] As shown in FIG9 , a fixing assembly 700 is provided between the gaps between two adjacent trays 200. The fixing assembly 700 includes a fixing bolt 710, a fixing nut 720, a first fixing washer 730, and a second fixing washer 740. The fixing bolt 710 is passed through the second support beam 122, and the fixing nut 720, the first fixing washer 730, and the second fixing washer 740 are mounted on the fixing bolt 710. The second fixing washer 740 abuts against the two adjacent trays 200. Thus, the fixing assembly 700 can press the two trays 200 against the second support beam 122, thereby further improving the connection stability of the trays 200 on the support frame 100.

[0048] Example:

[0049] As shown in Figures 1 to 9, the plate carrier device includes a support frame 100 and four trays 200. The support frame 100 includes a frame body 110 and two support beam groups 120 connected to the frame body 110. The frame body 110 includes three first main beams 111, two second main beams 112, and two blocking plates 113. The three first main beams 111 are arranged in parallel, each extending in a first direction. There are two second main beams 112, each extending in a second direction. The two second main beams 112 are respectively connected to the ends of the plurality of first main beams 111. Each first main beam 111 is provided with a reinforcement beam 1111. Each support beam group 120 includes two first support beams 121 and three second support beams 122. Each first support beam 121 extends in the first direction and is connected to the first main beam 111. Each second support beam 122 extends in the second direction and has its ends connected to two parallel first support beams 121. The second support beam 122 includes a crossbeam 1222 and support heads 1221 connected to both ends of the crossbeam 1222. The support heads 1221 are connected to the first support beam 121 via a locking assembly 400. The locking assembly 400 includes a locking bolt 410, a locking washer 430, and a locking nut 420. The locking bolt 410 passes through the support head 1221 and the first support beam 121, the locking nut 420 engages with the locking bolt 410, and the locking washer 430 is mounted on the locking bolt 410 and sandwiched between the locking nut 420 and the first support beam 121. Each blocking plate 113 is connected to the second main beam 112 and the second support beam 122 via a first mounting assembly 500 and a second mounting assembly 600. The first mounting assembly 500 includes a first mounting bolt 510, a first mounting nut 520, and a first mounting washer 530. The first mounting bolt 510 passes through the second main beam 112 and the blocking plate 113 from bottom to top. The first mounting nut 520 is engaged with the first mounting bolt 510. The first mounting washer 530 is mounted on the first mounting bolt 510 and sandwiched between the first mounting nut 520 and the blocking plate 113. The second mounting assembly 600 includes a second mounting bolt 610, a second mounting nut 620, a second mounting washer 630, and a third mounting washer 640. The second mounting bolt 610 passes through the second support beam 122 and the blocking plate 113 from bottom to top. The second mounting nut 620 is engaged with the second mounting bolt 610. The second mounting washer 630 and the third mounting washer 640 are mounted on the second mounting bolt 610 and sandwiched between the second mounting nut 620 and the blocking plate 113.

[0050] The tray 200 is mounted on the support frame 100 and includes a main body 210 and support ribs 220 connected to the main body 210. The main body 210 is provided with forty placement positions 212, each of which is configured to hold a substrate. The placement positions 212 are arranged in eight rows and five columns. The support ribs 220 are located between two adjacent rows of placement positions 212 and extend along the rows. The main body 210 has a fixed edge 211 extending along its contour. The fixed edge 211 is connected to the two first support beams 121 and the two second support beams 122 via a connecting assembly 300. The connection assembly 300 includes a stopper 310, a connecting bolt 320, a connecting nut 330, and a connecting washer 340. The stopper 310 is mounted on a first side of the fixed edge 211. A portion of the connecting bolts 320 of the connection assembly 300 passes through the support beam assembly 120 (the first support beam 121 or the two second support beams 122), the fixed edge 211, and the stopper 310, from bottom to top. The connecting nut 330 is mounted on the connecting bolt 320, and the connecting washer 340 is sleeved on the connecting bolt 320 and sandwiched between the connecting nut 330 and the stopper 310. The fixed edge 211 is provided with a mounting slot 2111. The stopper 310 includes an inserting portion 311 and a stopper 312. The inserting portion 311 is inserted into the mounting slot 2111, and the stopper 312 is connected to the inserting portion 311 and abuts against the connecting washer 340. A fixing assembly 700 is provided between the gaps of two adjacent pallets 200. The fixing assembly 700 includes a fixing bolt 710, a fixing nut 720, a first fixing gasket 730 and a second fixing gasket 740. The fixing bolt 710 is passed through the second support beam 122. The fixing nut 720, the first fixing gasket 730 and the second fixing gasket 740 are installed on the fixing bolt 710. The second fixing gasket 740 stops at the two adjacent pallets 200.

[0051] Throughout this specification, references to "some embodiments," "other embodiments," and the like indicate that the features, structures, materials, or characteristics described in connection with that embodiment or example are included in at least one embodiment or example of the present application. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the described features, structures, materials, or characteristics may be combined in any suitable manner in any one or more embodiments or examples.

Claims

1. A carrier device, comprising: Support frame (100); At least one tray (200), the tray (200) is mounted on the support frame (100), the tray (200) comprises a body (210) and support ribs (220) connected to the body (210), a first side of the body (210) is configured as a support substrate, and the support ribs (220) are connected to a second side of the body (210).

2. The board carrier device according to claim 1, wherein: The body (210) is provided with a plurality of placement positions (212), each of the placement positions (212) being configured to carry one substrate, the plurality of placement positions (212) being arranged in multiple rows and columns, and the supporting ribs (220) being provided between two adjacent rows of the placement positions (212) and extending along the row direction.

3. The board carrier device according to claim 1, wherein: The body (210) has a fixed edge (211) extending along its outline, the support frame (100) includes a frame body (110) and at least one support beam group (120) connected to the frame body (110), and the fixed edge (211) is connected to the support beam group (120) via a connecting assembly (300).

4. The board carrier device according to claim 3, wherein: There are a plurality of connection components (300), and the plurality of connection components (300) are arranged at intervals along the contour line direction of the body (210).

5. The board carrier device according to claim 4, wherein: The connection assembly (300) comprises: a limiting block (310), the limiting block (310) being installed on a first side of the body (210) and having a buffer gap with the tray (200); a connecting bolt (320), the connecting bolt (320) being passed through the support beam assembly (120) and the body (210), and passing through the limiting block (310); a connecting nut (330), the connecting nut (330) being mounted on the connecting bolt (320); A connecting gasket (340) is sleeved on the connecting bolt (320) and clamped between the connecting nut (330) and the limiting block (310).

6. The board carrier device according to claim 5, wherein: The body (210) is provided with a mounting groove (2111), and the limit block (310) comprises a plug-in portion (311) and a stop portion (312), wherein the plug-in portion (311) is plugged into the mounting groove (2111), and the stop portion (312) is connected to the plug-in portion (311) and abuts against the connection gasket (340).

7. The board carrier device according to claim 3, wherein: The frame body (110) comprises: A plurality of first main beams (111), wherein the plurality of first main beams (111) are arranged in parallel, and each of the first main beams (111) is extended along a first direction; The second main beams (112) are two in number, the second main beams (112) are extended along a second direction, the two second main beams (112) are respectively connected to two ends of the plurality of first main beams (111), and a buffer area exists between the second main beams (112) and the support beam group (120) in the first direction.

8. The board carrier device according to claim 7, wherein: The frame body (110) further includes a reinforcing beam (1111) provided in at least one of the first main beam (111) and the second main beam (112).

9. The board carrier device according to claim 7, wherein: The frame body (110) further includes a blocking plate (113), and the blocking plate (113) sets the buffer area.

10. The board carrier device according to claim 3, wherein: The support beam group (120) includes: a plurality of first support beams (121), each of the first support beams (121) extending along a first direction and connected to the frame body (110); a plurality of second support beams (122), each of the second support beams (122) extending along a second direction, and having two ends respectively connected to two parallel first support beams (121); The second support beam (122) comprises a crossbeam (1222) and support heads (1221) connected to both ends of the crossbeam (1222), and the support heads (1221) are connected to the first support beam (121) via a locking assembly (400); wherein: The locking assembly (400) includes a locking bolt (410), a locking washer (430) and a locking nut (420); the locking bolt (410) is passed through the support head (1221) and the first support beam (121); the locking nut (420) is matched with the locking bolt (410); and the locking washer (430) is installed on the locking bolt (410) and clamped between the locking nut (420) and the first support beam (121).

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