Cleaning device

Abstract

The present application discloses a cleaning device, comprising: a cleaning tank, wherein the cleaning tank comprises a first tank and a second tank, a cleaning space is defined in the first tank, the first tank is formed in the second tank, at least part of the tank wall of the first tank is spaced apart from at least part of the tank wall of the second tank to form a temporary storage space in the second tank, the first tank is provided with a drainage structure, the drainage structure is configured to selectively establish or block communication between the cleaning space and the temporary storage space, the second tank comprises an inner tank body and an outer tank body, the inner tank body is embedded in the outer tank body, and the inner tank body and the outer tank body are sealingly connected at a mating interface therebetween; and a spraying mechanism arranged in the cleaning tank and configured to spray cleaning fluid into the first tank. Two tank body structures of the second tank and the sealing arrangement between the two tank body structures improve the structural strength, corrosion impact resistance, and cold and thermal stress resistance of the second tank, improving the sealing effect of the second tank, and effectively solving the problem of fluid leakage caused by seal failures.

Description

Cleaning device

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This application claims priority to Chinese patent application No. 202420365718.X, filed on February 27, 2024, entitled “Cleaning Device,” the entire contents of which are incorporated herein by reference. Technical Field

[0003] The present application belongs to the field of crystal and semiconductor cleaning technology, and in particular relates to a cleaning device. Background Art

[0004] As semiconductors continue to shrink in size, they are increasingly sensitive to impurities. The semiconductor manufacturing process inevitably introduces contaminants such as particles, organic matter, metals, and oxides. To minimize the impact of impurities on chip yield, cleaning is required after almost every manufacturing step to remove residual particles, organic matter, metals, oxides, and other contaminants from the previous process. Wet cleaning is the most common cleaning method, and tank cleaning is the primary method. Tank cleaning typically uses a combination of chemical bath immersion and rapid-discharge cleaning tanks.

[0005] Existing rapid-discharge cleaning tanks are typically constructed from PVC (polyvinyl chloride) panels. Furthermore, they operate in a weak acid environment with alternating hot and cold water. Large amounts of cleaning fluid are discharged into the tank all at once, subjecting the bottom plate to long-term corrosion and thermal stress. This can easily cause gaps in the welds and lead to leakage.

[0006] Summary of the Invention

[0007] The embodiment of the present application provides a cleaning device to improve its ability to resist corrosion shock and cold and heat stress, and reduce the possibility of leakage.

[0008] An embodiment of the present application provides a cleaning device, which includes: a cleaning tank, the cleaning tank includes a first tank and a second tank; a cleaning space capable of accommodating objects to be cleaned is defined in the first tank, the first tank is arranged in the second tank, at least part of the tank wall of the first tank is spaced apart from at least part of the tank wall of the second tank to form a temporary storage space in the second tank; the first tank is provided with a drainage structure, and the drainage structure is configured to selectively connect or block the cleaning space and the temporary storage space; the second tank includes an inner tank body and an outer tank body, the inner tank body is embedded in the outer tank body, and the mating interface between the inner tank body and the outer tank body is sealed; and a spray mechanism, the spray mechanism is arranged in the cleaning tank and is configured to spray cleaning liquid into the first tank.

[0009] Optionally, the inner tank body is a polytetrafluoroethylene tank body, or the inner wall of the inner tank body is provided with a polytetrafluoroethylene layer.

[0010] Optionally, the inner layer tank body includes an inner layer bottom plate and at least one inner layer side plate, at least one inner layer side plate is connected to one side of the inner layer bottom plate along the first direction, and forms an internal space of the inner layer tank body with the inner layer bottom plate, the internal space includes a temporary storage space, and the inner layer tank body has an inner layer tank opening arranged opposite to the inner layer bottom plate along the first direction; the inner layer bottom plate and each inner layer side plate are polytetrafluoroethylene plates.

[0011] Optionally, the mating interface between the inner layer tank body and the outer layer tank body is sealed via a first sealing structure, and the first sealing structure is interference fit or welded to at least one of the inner layer tank body and the outer layer tank body.

[0012] Optionally, the inner layer trough body includes an inner layer bottom plate and four inner layer side plates, each inner layer side plate is connected to one side of the inner layer bottom plate along the first direction, two inner layer side plates are arranged opposite to each other along the second direction, and the other two inner layer side plates are arranged opposite to each other along the third direction. The four inner layer side plates are connected in sequence, and the first direction, the second direction and the third direction are perpendicular to each other; the spray mechanism includes a spray pipe, which extends along the third direction and is arranged on at least one of the two inner layer side plates arranged opposite to each other along the second direction.

[0013] Optionally, the outer trough body includes two outer side panels arranged opposite to each other along the second direction, and the two outer side panels are respectively adjacent to two inner side panels arranged opposite to each other along the second direction; the spray pipe is arranged adjacent to the top of the inner side panel, and the cleaning device also includes a water retaining bar, which is arranged on the top of the inner side panel provided with the spray pipe and the outer side panel adjacent to it, and covers the mating interface between the inner side panel provided with the spray pipe and the outer side panel adjacent to it.

[0014] Optionally, a support seat is provided on the inner wall of the inner side plate where the spray pipe is provided, and the spray pipe is supported on the inner wall of the inner side plate through the support seat.

[0015] Optionally, the first trough includes a first bottom plate and at least one first side plate, the at least one first side plate is connected to one side of the first bottom plate along the first direction, and forms a cleaning space with the first bottom plate, and the first bottom plate and the inner bottom plate are arranged opposite to each other along the first direction; the drainage structure is provided on the first bottom plate, and is configured to selectively form a quick discharge port on the first bottom plate or block the quick discharge port, and the quick discharge port is connected to the temporary storage space.

[0016] Optionally, the inner layer tank body includes an inner layer bottom plate and at least one inner layer side plate, and the at least one inner layer side plate is connected to one side of the inner layer bottom plate along the first direction; the outer layer tank body includes an outer layer bottom plate and at least one outer layer side plate, and the at least one outer layer side plate is connected to one side of the outer layer bottom plate along the first direction; the inner layer bottom plate and the outer layer bottom plate are stacked along the first direction, and the cleaning tank also includes a drain outlet, an inner layer sealing structure and a drain valve, the drain outlet passes through the inner layer bottom plate and the outer layer bottom plate along the first direction, the inner layer sealing structure is sealed and plugged into the drain outlet, and covers the mating interface between the inner layer bottom plate and the outer layer bottom plate at the drain outlet, the drain valve is arranged at the drain outlet, and is configured to selectively open or close the drain outlet.

[0017] Optionally, the inner layer trough body includes an inner layer bottom plate and at least one inner layer side plate, at least one inner layer side plate is connected to one side of the inner layer bottom plate along the first direction, and forms an internal space of the inner layer trough body with the inner layer bottom plate, the internal space includes a temporary storage space, and the inner layer trough body has an inner layer trough opening arranged opposite to the inner layer bottom plate along the first direction; at least one inner layer side plate and the inner layer bottom plate are integrally formed, or at least one inner layer side plate is welded to the inner layer bottom plate.

[0018] The cleaning device provided in the embodiment of the present application includes a cleaning tank and a spray mechanism. The cleaning tank includes a first tank and a second tank. The first tank can provide a cleaning space, and the first tank is arranged in the second tank, and is spaced apart from at least part of the tank wall of the second tank to form a temporary storage space in the second tank. When the cleaning liquid in the first tank needs to be discharged quickly, the cleaning space and the temporary storage space are connected through the drainage structure of the first tank, so that the cleaning liquid in the cleaning space is quickly discharged to the temporary storage space at one time, and the fast-flowing cleaning liquid is used to improve the cleaning effect of the cleaned object. The second tank includes an inner tank body and an outer tank body, and the inner tank body is embedded in the outer tank body, which is equivalent to the second tank including an inner and outer tank body structure. The mating interface between the inner tank body and the outer tank body is sealed and connected, which can prevent the cleaning liquid from penetrating between the inner tank body and the outer tank body and corroding the inner tank body and the outer tank body at the same time. The double-layer trough structure of the second trough and the sealing setting between the double-layer trough structures greatly improve the structural strength, corrosion impact resistance and cold and heat stress resistance of the second trough, thereby improving the sealing effect of the second trough and effectively solving the problem of leakage caused by sealing failure.

[0019] The second tank utilizes a double-layer structure with an inner and outer tank body, which are sealed together. The inner and outer tank bodies can be made of different materials. The inner tank body directly contacts the cleaning fluid, so the material requirements for the inner tank body are higher, while the requirements for the outer tank body are lower. The inner tank body can be made of a material with good corrosion resistance, heat resistance, chemical stability, and mechanical properties. The outer tank body can be made of a less expensive material, or even existing PVC tank bodies can be used directly, reducing costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following briefly introduces the drawings required for use in the embodiments of the present application. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0021] FIG1 is a schematic structural diagram of a cleaning device provided in one embodiment of the present application.

[0022] FIG2 is a schematic structural diagram of the inner tank body of the cleaning device shown in FIG1 .

[0023] FIG3 is a schematic structural diagram of the first tank of the cleaning device shown in FIG1 .

[0024] FIG4 is a schematic structural diagram of the rapid discharge port formed by the drainage structure of the cleaning device shown in FIG1 .

[0025] FIG5 is a schematic structural diagram of the cleaning device shown in FIG1 with the drain outlet in an open state. DETAILED DESCRIPTION

[0026] The following embodiments of the technical solution of the present application will be described in detail with reference to the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the present application and are therefore only examples and are not intended to limit the scope of protection of the present application.

[0027] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art to which this application belongs; the terms used herein are only for the purpose of describing specific embodiments and are not intended to limit this application; the terms "including" and "having" and any variations thereof in the specification and claims of this application and the above-mentioned figure descriptions are intended to cover non-exclusive inclusions.

[0028] In the description of the embodiments of this application, the technical terms "first" and "second" are used only to distinguish different objects and should not be understood to indicate or imply relative importance or implicitly specify the quantity, specific order, or primary and secondary relationship of the indicated technical features. In the description of the embodiments of this application, the meaning of "plurality" is more than two, unless otherwise clearly and specifically defined.

[0029] References herein to "embodiments" mean that a particular feature, structure, or characteristic described in connection with the embodiments may be included in at least one embodiment of the present application. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor does it constitute an independent or alternative embodiment that is mutually exclusive of other embodiments. It is understood, both explicitly and implicitly, by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0030] In the description of the embodiments of this application, the term "and / or" is simply a description of the association relationship between associated objects, indicating that three relationships can exist. For example, m and / or n can represent: m exists alone, m and n exist simultaneously, and n exists alone. In addition, the character " / " in this document generally indicates that the associated objects are in an "or" relationship.

[0031] In the description of the embodiments of the present application, the term "plurality" refers to more than two (including two).

[0032] In the description of the embodiments of the present application, the orientations or positional relationships indicated by technical terms such as "vertical", "horizontal", "top", "bottom", "inside", "outside", and "circumferential" are based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they cannot be understood as limitations on the embodiments of the present application.

[0033] In the description of the embodiments of the present application, unless otherwise expressly specified or limited, technical terms such as "installed," "connected," "connected," and "fixed" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integration; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; internal connections between two components or interactions between two components. Those skilled in the art can understand the specific meanings of the above terms in the embodiments of the present application based on specific circumstances.

[0034] In the embodiments of this application, "parallel" includes not only absolute parallelism but also approximately parallelism as commonly understood in engineering practice. Similarly, "perpendicular" also includes not only absolute perpendicularity but also approximately perpendicularity as commonly understood in engineering practice. For example, if the angle between two directions is 85°-90°, they are considered perpendicular; if the angle between two directions is 0°-5°, they are considered parallel.

[0035] The cleaning device provided in the embodiments of the present application can be used to clean components such as wafers, chips, and semiconductors to remove particulate impurities and residual chemical solutions attached to the components. The cleaning device can be a quick-drain rinse device that uses a quick-drain rinse (hereinafter referred to as HQDR cleaning) method to clean the components. Before performing HQDR cleaning, photoresist stripping and cleaning (hereinafter referred to as SPM cleaning) are usually required. HQDR cleaning can rinse away large particles that have been oxidized during the SPM cleaning process, as well as residual SPM liquid and dirty particles.

[0036] HQDR cleaning is more effective than room-temperature QDR cleaning, improving cleaning efficiency and results. HQDR cleaning primarily involves hot water inlet, room-temperature water inlet, overflow, bubbling, spraying, and rapid drain. The cleaning fluid used in HQDR cleaning can be ultrapure water or deionized water. A hot cleaning fluid can be used at the beginning of HQDR cleaning, with a temperature between 50°C and 90°C. Subsequent HQDR cleaning uses a room-temperature cleaning fluid, with a temperature between 20°C and 30°C.

[0037] Because HQDR cleaning involves alternating hot and cold water and rapid drainage, the cleaning tanks used in HQDR cleaning are subject to long-term corrosion, significant impact, and thermal stress, placing high demands on the tank's structural stability. Existing cleaning tanks constructed from spliced ​​PVC panels lack impact resistance, corrosion resistance, and welding process, making them difficult to withstand the workload of HQDR cleaning.

[0038] To this end, an embodiment of the present application provides a cleaning device, which can improve the cleaning tank's ability to resist corrosion impact and cold and heat stress, and reduce the possibility of liquid leakage.

[0039] The embodiments will be described in detail below with reference to the accompanying drawings. It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of this application can be combined with each other.

[0040] FIG1 is a schematic diagram of the structure of a cleaning device provided in an embodiment of the present application. Referring to FIG1 , the cleaning device 1 provided in an embodiment of the present application includes a cleaning tank 10 and a spray mechanism 20 .

[0041] The cleaning tank 10 includes a first tank 11 and a second tank 12. The first tank 11 defines a cleaning space 111 capable of accommodating objects to be cleaned. The first tank 11 is arranged in the second tank 12, and at least part of the tank wall of the first tank 11 is spaced apart from at least part of the tank wall of the second tank 12 to form a temporary storage space 121 in the second tank 12. The first tank 11 is provided with a drainage structure 112, and the drainage structure 112 is configured to selectively connect or block the cleaning space 111 and the temporary storage space 121. The second tank 12 includes an inner tank body 122 and an outer tank body 123, and the inner tank body 122 is embedded in the outer tank body 123, and the mating interface between the inner tank body 122 and the outer tank body 123 is sealed. The spray mechanism 20 is provided in the cleaning tank 10 and is configured to spray cleaning liquid into the first tank 11.

[0042] A placement platform for placing the objects to be cleaned may be provided in the cleaning space 111 . The size of the placement platform may be flexibly adjusted according to the size of the objects to be cleaned, so as to adapt to the cleaning process of objects of various specifications.

[0043] The cleaning space 111 can contain cleaning liquid. Optionally, the cleaning liquid can be deionized water or ultrapure water.

[0044] The first groove 11 may include multiple groove walls, and each groove wall of the first groove 11 may be spaced apart from the corresponding groove wall of the second groove 12, or part of the groove wall of the first groove 11 may be spaced apart from the corresponding groove wall of the second groove 12, as long as a temporary storage space for storing the cleaning liquid can be formed between the first groove 11 and the second groove 12.

[0045] The first tank 11 can be suspended in the second tank 12 so that the bottom plate of the first tank 11 and the bottom plate of the second tank 12 are spaced apart, which facilitates the opening of a quick discharge structure on the bottom plate of the first tank 11 that can quickly discharge the liquid in the cleaning space 111 to the temporary storage space 121.

[0046] Optionally, the sides of the second trough 12 may be provided with a plurality of support members for supporting the first trough 11. Each support member may be integrally formed with or connected to the side panels of the second trough 12. The first trough 11 is overlapped with the plurality of support members so as to be suspended within the second trough 12. The top surfaces of the support members are at the same height to ensure that the first trough 11 is horizontally overlapped with the plurality of support members.

[0047] In other embodiments, a support member may be provided at the bottom of the second trough 12, and the support member may be integrally formed with or connected to the bottom plate of the second trough 12. The first trough 11 is placed above the support member so as to be suspended within the second trough 12. The first trough 11 may also be connected to the support member to improve the support stability of the first trough 11. The support member may be a columnar structure or a block structure to reduce the space it occupies. There may be multiple support members, and the top surfaces of the multiple support members are on the same horizontal plane to ensure that the first trough 11 is placed horizontally on the multiple support members.

[0048] The drainage structure 112 can selectively connect or block the cleaning space 111 and the temporary storage space 121. When the drainage structure 112 connects the cleaning space 111 and the temporary storage space 121, liquid in the cleaning space 111 can flow into the temporary storage space 121. When the drainage structure 112 blocks the cleaning space 111 and the temporary storage space 121, a fluid barrier is formed between the cleaning space 111 and the temporary storage space 121. Liquid in the cleaning space 111 will not flow into the temporary storage space 121, and liquid in the temporary storage space 121 will not flow back into the cleaning space 111.

[0049] The inner tank body 122 and the outer tank body 123 are separate tank structures that can be connected together by welding, bonding, or other methods. The walls of the inner tank body 122 can abut against the walls of the outer tank body 123, forming a mating interface between the inner tank body 122 and the outer tank body 123. This mating interface between the inner tank body 122 and the outer tank body 123 forms a seal, preventing fluid from entering the mating gap between the inner tank body 122 and the outer tank body 123.

[0050] The cleaning device 1 provided in the embodiment of the present application includes a cleaning tank 10 and a spray mechanism 20. The cleaning tank 10 includes a first tank 11 and a second tank 12. The first tank 11 can provide a cleaning space 111. The first tank 11 is arranged in the second tank 12 and is spaced apart from at least part of the tank wall of the second tank 12 to form a temporary storage space 121 in the second tank 12. When the cleaning liquid in the first tank 11 needs to be discharged quickly, the cleaning space 111 and the temporary storage space 121 are connected through the drainage structure 112 of the first tank 11, so that the cleaning liquid in the cleaning space 111 is quickly discharged to the temporary storage space 121 at one time. During the rapid discharge process, the fast-flowing cleaning liquid can carry away pollutants attached to the surface of the object being cleaned, thereby improving the cleaning effect of the object being cleaned. The second tank 12 includes an inner tank body 122 and an outer tank body 123. The inner tank body 122 is embedded in the outer tank body 123, which is equivalent to the second tank 12 including an inner and outer two-layer tank body structure. The sealed interface between the inner tank body 122 and the outer tank body 123 prevents cleaning fluid from penetrating between the inner tank body 122 and the outer tank body 123 and corroding the inner tank body 122 and the outer tank body 123. The double-layer tank structure of the second tank 12 and the sealing arrangement between the double-layer tank structures greatly improve the structural strength, corrosion impact resistance, and thermal stress resistance of the second tank 12, thereby improving the sealing effect of the second tank 12 and effectively solving the problem of leakage caused by seal failure.

[0051] Furthermore, the second tank 12 utilizes a sealed dual-layer structure consisting of an inner tank body 122 and an outer tank body 123. The inner tank body 122 and the outer tank body 123 can be made of different materials. The inner tank body 122 directly contacts the cleaning fluid, as well as particles and liquid chemicals carried by the objects being cleaned. Therefore, the material requirements for the inner tank body 122 are higher, while the material requirements for the outer tank body 123 are lower. The inner tank body 122 can be made of a material with excellent corrosion resistance, heat resistance, chemical stability, and mechanical properties. The outer tank body 123 can be made of a less expensive material, or can directly utilize existing PVC tank bodies, reducing costs.

[0052] In order to further improve the performance of the inner tank body 122 , the inventors analyzed and compared the properties of all plastic materials that can be used in wet cleaning processes and found that polytetrafluoroethylene has better comprehensive performance in terms of heat resistance, chemical stability, and mechanical properties.

[0053] To this end, in some embodiments, the inner tank body 122 is a polytetrafluoroethylene tank body. That is, the inner tank body 122 is entirely made of polytetrafluoroethylene. This further improves the second tank 12's resistance to impact, corrosion, and thermal stress, effectively reducing the likelihood of leakage from the cleaning device 1.

[0054] In other embodiments, a polytetrafluoroethylene layer is provided on the inner wall of the inner tank body 122. That is, the polytetrafluoroethylene layer can be provided only on the inner side of the inner tank body 122 that contacts the cleaning liquid, while the outer side of the inner tank body 122 can be made of other materials. This can also improve the impact resistance, corrosion resistance, and thermal stress resistance of the second tank 12 to a certain extent.

[0055] Figure 2 is a schematic structural diagram of the inner tank body of the cleaning device shown in Figure 1. Referring to Figures 1 and 2, in some embodiments, the inner tank body 122 includes an inner bottom plate 1221 and at least one inner side plate 1222. The at least one inner side plate 1222 is connected to one side of the inner bottom plate 1221 along a first direction X and, together with the inner bottom plate 1221, forms an interior space of the inner tank body 122. This interior space includes a temporary storage space 121. The inner tank body 122 has an inner tank opening 1223 disposed opposite the inner bottom plate 1221 along the first direction X. The inner bottom plate 1221 and each inner side plate 1222 are each made of polytetrafluoroethylene.

[0056] Optionally, the number of the inner side plate 1222 can be one, the inner side plate 1222 can be an annular plate, the inner bottom plate 1221 can be a circular plate, and the inner side plate 1222 and the inner bottom plate 1221 form a cylindrical inner tank body 122 .

[0057] Optionally, there may be multiple inner side panels 1222 , each inner side panel 1222 being a flat plate, and the multiple inner side panels 1222 and the inner bottom panel 1221 form a prismatic inner tank body 122 .

[0058] The first direction X can be a vertical direction. At least one inner side plate 1222 is connected to the upper side of the inner bottom plate 1221. The inner bottom plate 1221 serves as a load-bearing plate and is formed at the bottom of the inner tank body 122. The inner tank opening 1223 can be located at the top of the inner tank body 122. The first tank 11 is installed inside the second tank 12 through the inner tank opening 1223.

[0059] The inner space enclosed by the at least one inner side plate 1222 and the inner bottom plate 1221 may include the space occupied by the first tank 11 and the temporary storage space 121 .

[0060] The inner bottom plate 1221 and each inner side plate 1222 are made of polytetrafluoroethylene, which facilitates the connection between the inner bottom plate 1221 and each inner side plate 1222 and helps to form a seal between the inner bottom plate 1221 and each inner side plate 1222. The inner bottom plate 1221 and the inner side plates 1222 have strong impact resistance, corrosion resistance, and resistance to cold and hot stress, further improving the performance of the second tank 12.

[0061] In some embodiments, at least one inner side panel 1222 and the inner bottom panel 1221 are integrally formed, which has a simple molding process and high manufacturing efficiency.

[0062] In other embodiments, at least one inner side plate 1222 is welded to the inner bottom plate 1221 , which reduces the difficulty of the molding process.

[0063] In some embodiments, the mating interface between the inner layer tank body 122 and the outer layer tank body 123 is sealed via a first sealing structure 124 , and the first sealing structure 124 is interference fit or welded to at least one of the inner layer tank body 122 and the outer layer tank body 123 .

[0064] After the inner and outer tank bodies 122, 123 are assembled, a certain gap is inevitably formed at the interface between the inner and outer tank bodies 122, 123. The second tank 12 typically includes a liquid drainage structure, such as a drain port. When liquid is drained, it may seep into the gap between the inner and outer tank bodies 122, 123. This liquid, if left in the gap for a long time, could corrode the inner and outer tank bodies 122, 123.

[0065] In the embodiment of the present application, a first sealing structure 124 is provided at the mating interface between the inner layer tank body 122 and the outer layer tank body 123. The mating interface between the inner layer tank body 122 and the outer layer tank body 123 can be sealed and connected by the first sealing structure 124, thereby preventing the fluid from entering the mating interface between the inner layer tank body 122 and the outer layer tank body 123, thereby improving the sealing effect.

[0066] Optionally, the first sealing structure 124 can be a sealing strip, a sealing plate, or a flexible sealing member. After the inner and outer tank bodies 122 and 123 are assembled, the first sealing structure 124 can be sealed and connected to the outer tank wall of the inner tank body 122 or the inner tank wall of the outer tank body 123 by an interference fit, or can be sealed and connected to both the outer tank wall of the inner tank body 122 and the inner tank wall of the outer tank body 123 by an interference fit. The first sealing structure 124 can be appropriately compressed and deformed to improve the sealing effect.

[0067] Alternatively, the first sealing structure 124 may be a thermoplastic welding rod and may be welded to the outer wall of the inner tank body 122 , the inner wall of the outer tank body 123 , or both.

[0068] The first sealing structure 124 may be provided at all mating interfaces between the inner tank body 122 and the outer tank body 123, or may be provided at some mating interfaces between the inner tank body 122 and the outer tank body 123. Optionally, in order to reduce the usage area of ​​the first sealing structure 124 and lower costs, the first sealing structure 124 may be provided only at the mating interfaces where the plates of the inner tank body 122 and the outer tank body 123 are adjacent to each other.

[0069] In some embodiments, the inner tank body 122 includes an inner bottom plate 1221 and four inner side plates 1222. Each inner side plate 1222 is connected to one side of the inner bottom plate 1221 along the first direction X, two inner side plates 1222 are arranged opposite each other along the second direction Y, and the other two inner side plates 1222 are arranged opposite each other along the third direction Z. The four inner side plates 1222 are connected in sequence, and the first direction X, the second direction Y, and the third direction Z are perpendicular to each other.

[0070] Specifically, the inner bottom plate 1221 and the four inner side plates 1222 can be connected to form an inner tank body 122 that is a square.

[0071] Optionally, the first direction X may be a vertical direction, and the second direction Y and the third direction Z are both parallel to the horizontal direction and perpendicular to each other.

[0072] Furthermore, the spray mechanism 20 includes a spray pipe 21 , which extends along the third direction Z and is provided on at least one of the two inner side plates 1222 that are oppositely arranged along the second direction Y.

[0073] The spray pipe 21 extends along the third direction Z and may be provided with a plurality of nozzles 22 spaced apart along the third direction Z to simultaneously rinse different areas of the object being cleaned along the third direction Z. Each nozzle 22 may be rotatable relative to the spray pipe 21 to adjust the spray angle of the nozzle 22 .

[0074] Optionally, the number of the spray pipe 21 may be one, and the spray pipe 21 is provided on any one of the two inner side plates 1222 that are arranged opposite to each other along the second direction Y.

[0075] Optionally, there may be two spray pipes 21 , which are respectively arranged on two inner side plates 1222 arranged opposite to each other along the second direction Y, thereby flushing the objects to be cleaned on both sides of the second direction Y at the same time.

[0076] The spray pipe 21 may be communicated with an infusion pipeline, and the infusion pipeline may extend from the outside of the second tank 12 to the inside of the second tank 12 and communicate with the spray pipe 21 .

[0077] In some embodiments, the outer tank body 123 includes two outer side panels 1232 disposed opposite each other along the second direction Y. The two outer side panels 1232 are respectively adjacent to the two inner side panels 1222 disposed opposite each other along the second direction Y. Here, adjacent means adjacent to and connected to each other. Optionally, the two outer side panels 1232 can be respectively superimposed on the two inner side panels 1222 disposed opposite each other along the second direction Y.

[0078] Furthermore, the spray pipe 21 is disposed adjacent to the top of the inner side plate 1222 to increase the spraying range of the spray pipe 21 .

[0079] Since the spray pipe 21 is adjacent to the top of the inner side panel 1222, the cleaning liquid sprayed from the spray pipe 21 may splash onto the top of the inner side panel 1222. To this end, in some embodiments, the cleaning device 1 further includes a water retaining bar 30, which is provided on the top of the inner side panel 1222 provided with the spray pipe 21 and the outer side panel 1232 adjacent thereto, and covers the mating interface between the inner side panel 1222 provided with the spray pipe 21 and the outer side panel 1232 adjacent thereto. Thus, the water retaining bar 30 can cover the mating interface between the inner side panel 1222 provided with the spray pipe 21 and the outer side panel 1232 adjacent thereto, preventing the cleaning liquid from splashing into the mating gap between the two and penetrating downward, thereby further improving the sealing effect between the inner tank body 122 and the outer tank body 123.

[0080] Optionally, the water retaining strip 30 may be made of a waterproof material.

[0081] The water retaining strip 30 may include a first water retaining portion 31 perpendicular to the first direction X and a second water retaining portion 32 perpendicular to the second direction Y. The first water retaining portion 31 and the second water retaining portion 32 are perpendicular to each other, and the water retaining strip 30 may be a strip-shaped component with an L-shaped cross-section. The first water retaining portion 31 at least covers the mating interface between the inner side plate 1222 provided with the spray pipe 21 and the outer side plate 1232 adjacent thereto. Preferably, the first water retaining portion 31 covers the entire inner side plate 1222. The second water retaining portion 32 is located on the outside of the outer side plate 1232 to improve its waterproof effect and facilitate installation.

[0082] In some embodiments, a support seat 1224 is provided on the inner wall of the inner side plate 1222 where the spray pipe 21 is provided, and the spray pipe 21 is supported on the inner wall of the inner side plate 1222 through the support seat 1224 .

[0083] The support seat 1224 may be provided with a mounting hole that passes through the support seat 1224 along the third direction Z, and the spray pipe 21 is passed through the mounting hole.

[0084] A plurality of support seats 1224 may be provided on each inner side plate 1222 . The plurality of support seats 1224 are spaced apart along the third direction Z to support different positions of the spray pipe 21 , thereby improving the installation stability of the spray pipe 21 .

[0085] The embodiment of the present application supports the spray pipe 21 through the support seat 1224 located on the inner side of the inner side plate 1222, which simplifies the structure of the outside of the cleaning tank 10. The support seat 1224 occupies a small space and will not cause structural interference with the first tank 11.

[0086] Figure 3 is a schematic diagram of the structure of the first tank of the cleaning device shown in Figure 1. In some embodiments, the first tank 11 includes a first bottom plate 113 and at least one first side plate 114. The at least one first side plate 114 is connected to one side of the first bottom plate 113 along the first direction X and, together with the first bottom plate 113, encloses a cleaning space 111. The first bottom plate 113 and the inner bottom plate 1221 are arranged opposite each other along the first direction X.

[0087] Optionally, there may be one first side plate 114 , the first side plate 114 may be an annular plate, the first bottom plate 113 may be a circular plate, and the first side plate 114 and the first bottom plate 113 may form a cylindrical first groove 11 .

[0088] Optionally, there may be multiple first side plates 114 , each of which is a flat plate. The multiple first side plates 114 and the first bottom plate 113 form a prismatic first groove 11 .

[0089] The first tank 11 may have a notch disposed opposite to the first bottom plate 113 along the first direction X, so that the cleaning liquid sprayed by the spray mechanism 20 is sprayed into the cleaning space 111 through the notch of the first tank 11 .

[0090] The first bottom plate 113 can be spaced apart from the inner bottom plate 1221 , and each first side plate 114 and the corresponding inner side plate 1222 can also be spaced apart to form a temporary storage space 121 between the first bottom plate 113 and the inner bottom plate 1221 , and between each first side plate 114 and the corresponding inner side plate 1222 .

[0091] The first side plate 114 is provided with an overflow port 1141 , which is located on a side of the first side plate 114 opposite to the first bottom plate 113 along the first direction X. The cleaning liquid in the cleaning space 111 can overflow into the temporary storage space 121 through the overflow port 1141 .

[0092] Figure 4 is a schematic diagram of the structure of the quick discharge port formed by the drainage structure of the cleaning device shown in Figure 1. Furthermore, the drainage structure 112 is provided on the first bottom plate 113 and is configured to selectively form a quick discharge port 115 on the first bottom plate 113 or block the quick discharge port 115. The quick discharge port 115 is connected to the temporary storage space 121.

[0093] When the drainage structure 112 forms the quick discharge port 115, the cleaning space 111 can communicate with the temporary storage space 121 through the quick discharge port 115. When the drainage structure 112 blocks the quick discharge port 115, the cleaning space 111 and the temporary storage space 121 are fluidically isolated.

[0094] Optionally, the drainage structure 112 may include two drain plates rotatably connected to the first base plate 113. When both drain plates are rotated to form a predetermined angle with the first base plate 113, a quick drain port 115 is formed between the two drain plates. When both drain plates are rotated to be flush with the first base plate 113, the two drain plates are sealed and butted together, thereby blocking the quick drain port 115. The rotation angle of the drain plates is adjustable, thereby adjusting the size of the quick drain port 115 and, in turn, the rate at which the cleaning fluid is discharged.

[0095] Optionally, the drainage structure 112 may also be a drainage valve, and the quick discharge port 115 is provided on the first bottom plate 113 . The drainage valve may block the quick discharge port 115 or open the quick discharge port 115 .

[0096] In some embodiments, the inner tank body 122 includes an inner bottom plate 1221 and at least one inner side plate 1222, wherein the at least one inner side plate 1222 is connected to one side of the inner bottom plate 1221 along the first direction X. The outer tank body 123 includes an outer bottom plate 1231 and at least one outer side plate 1232, wherein the at least one outer side plate 1232 is connected to one side of the outer bottom plate 1231 along the first direction X. The inner bottom plate 1221 and the outer bottom plate 1231 are stacked along the first direction X. The cleaning tank 10 also includes a drain port 125, an inner sealing structure 126, and a drain valve 127. FIG5 is a schematic structural diagram of the cleaning device shown in FIG1 with the drain port in an open state. 1 and 5 , the drain outlet 125 penetrates the inner bottom plate 1221 and the outer bottom plate 1231 along the first direction X. The inner sealing structure 126 is sealed and plugged into the drain outlet 125 , and covers the mating interface between the inner bottom plate 1221 and the outer bottom plate 1231 at the drain outlet 125 . The drain valve 127 is provided at the drain outlet 125 and is configured to selectively open or close the drain outlet 125 .

[0097] The number of inner side panels 1222 and outer side panels 1232 can be the same to facilitate sealing between the inner and outer tank bodies 122, 123. Alternatively, there can be only one inner side panel 1222 and one outer side panel 1232, both of which are circular. Alternatively, there can be multiple inner side panels 1222 and multiple outer side panels 1232, with multiple inner side panels 1222 and multiple outer side panels 1232 stacked in a one-to-one correspondence. A first sealing structure 124 is provided between each inner side panel 1222 and its corresponding outer side panel 1232.

[0098] An inner slot opening 1223 is formed on the other side of the inner slot body 122 along the first direction X. The inner slot opening 1223 is disposed opposite to the inner bottom plate 1221 along the first direction X. An outer slot opening is formed on the other side of the outer slot body 123 along the first direction X. The outer slot opening is disposed opposite to the outer bottom plate 1231 along the first direction X.

[0099] The inner bottom plate 1221 and the outer bottom plate 1231 are stacked along the first direction X. A first sealing structure 124 may be provided between the inner bottom plate 1221 and the outer bottom plate 1231. The first sealing structure 124 may be in extrusion contact with the inner bottom plate 1221 and the outer bottom plate 1231. The first sealing structure 124 may also be welded to at least one of the inner bottom plate 1221 and the outer bottom plate 1231.

[0100] Since the drain port 125 penetrates the inner bottom plate 1221 and the outer bottom plate 1231 along the first direction X, the fitting gap between the inner bottom plate 1221 and the outer bottom plate 1231 is connected to the drain port 125. Liquid flowing out through the drain port 125 may penetrate into the fitting gap between the inner bottom plate 1221 and the outer bottom plate 1231, thereby corroding the inner bottom plate 1221 and the outer bottom plate 1231. To this end, in the embodiment of the present application, an inner sealing structure 126 is sealed and inserted into the drain port 125. The inner sealing structure 126 can be attached to the inner wall of the drain port 125 along the circumference of the drain port 125, thereby blocking the fitting gap between the inner bottom plate 1221 and the outer bottom plate 1231, effectively preventing liquid from penetrating into the fitting gap between the inner bottom plate 1221 and the outer bottom plate 1231.

[0101] The drain port 125 can be connected to an external drain pipe. When the drain valve 127 opens the drain port 125, the liquid in the temporary storage space 121 can flow through the drain port 125 to the drain pipe, thereby being discharged from the cleaning device 1.

[0102] When the drain valve 127 closes the drain port 125 , a fluid seal is formed between the drain valve 127 and the inner sealing structure 126 .

[0103] Optionally, the drain valve may be a mechanical valve or an electrically controlled valve.

[0104] In some embodiments, the cleaning device 1 further comprises a gas bubbling device for discharging gas from the first tank 11, thereby producing bubbles and improving the cleaning effect of the object being cleaned. The gas discharged by the gas bubbling device can be nitrogen or an inert gas.

[0105] The above description is merely a specific embodiment of the present application, but the scope of protection of the present application is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in the present application, and such modifications or substitutions should be included in the scope of protection of the present application. Therefore, the scope of protection of the present application should be based on the scope of protection of the claims.

Claims

1. A cleaning device comprising: A cleaning tank, the cleaning tank comprising a first tank and a second tank; the first tank defines a cleaning space capable of accommodating objects to be cleaned, the first tank is arranged in the second tank, at least a portion of the tank wall of the first tank is spaced apart from at least a portion of the tank wall of the second tank to form a temporary storage space in the second tank; the first tank is provided with a drainage structure, the drainage structure is configured to selectively connect or block the cleaning space and the temporary storage space; the second tank comprises an inner tank body and an outer tank body, the inner tank body is embedded in the outer tank body, and the mating interface between the inner tank body and the outer tank body is sealed; and A spray mechanism is provided in the cleaning tank and is configured to spray cleaning liquid into the first tank.

2. The cleaning device according to claim 1, wherein The inner layer tank body is a polytetrafluoroethylene tank body, or the inner wall of the inner layer tank body is provided with a polytetrafluoroethylene layer.

3. The cleaning device according to claim 1, wherein The inner layer tank body includes an inner layer bottom plate and at least one inner layer side plate, wherein the at least one inner layer side plate is connected to one side of the inner layer bottom plate along a first direction and forms an inner space of the inner layer tank body together with the inner layer bottom plate, wherein the inner space includes the temporary storage space, and the inner layer tank body has an inner layer tank opening arranged opposite to the inner layer bottom plate along the first direction; The inner bottom plate and each inner side plate are polytetrafluoroethylene plates.

4. The cleaning device according to claim 1, wherein The mating interface between the inner layer tank body and the outer layer tank body is sealed via a first sealing structure, and the first sealing structure is interference fit or welded to at least one of the inner layer tank body and the outer layer tank body.

5. The cleaning device according to claim 1, wherein The inner layer tank body includes an inner layer bottom plate and four inner layer side plates, each of the inner layer side plates is connected to one side of the inner layer bottom plate along the first direction, two of the inner layer side plates are arranged opposite to each other along the second direction, and the other two inner layer side plates are arranged opposite to each other along the third direction, and the four inner layer side plates are connected in sequence, and the first direction, the second direction and the third direction are perpendicular to each other; The spray mechanism includes a spray pipe extending along the third direction and provided on at least one of the two inner side plates arranged opposite to each other along the second direction.

6. The cleaning device according to claim 5, wherein The outer tank body includes two outer side plates arranged opposite to each other along the second direction, and the two outer side plates are respectively adjacent to the two inner side plates arranged opposite to each other along the second direction; The spray pipe is arranged adjacent to the top of the inner side panel, and the cleaning device also includes a water retaining bar, which is arranged on the top of the inner side panel provided with the spray pipe and the outer side panel adjacent to it, and covers the mating interface between the inner side panel provided with the spray pipe and the outer side panel adjacent to it.

7. The cleaning device according to claim 5, wherein The inner wall of the inner side plate on which the spray pipe is provided is provided with a support seat, and the spray pipe is supported on the inner wall of the inner side plate through the support seat.

8. The cleaning device according to claim 1, wherein The first tank includes a first bottom plate and at least one first side plate, wherein the at least one first side plate is connected to one side of the first bottom plate along the first direction and encloses the cleaning space together with the first bottom plate; The drainage structure is provided on the first bottom plate and is configured to selectively form a quick discharge port on the first bottom plate or block the quick discharge port, wherein the quick discharge port is communicated with the temporary storage space.

9. The cleaning device according to claim 1, wherein The inner layer tank body includes an inner layer bottom plate and at least one inner layer side plate, wherein the at least one inner layer side plate is connected to one side of the inner layer bottom plate along the first direction; the outer layer tank body includes an outer layer bottom plate and at least one outer layer side plate, wherein the at least one outer layer side plate is connected to one side of the outer layer bottom plate along the first direction; The inner bottom plate and the outer bottom plate are stacked along the first direction, and the cleaning tank also includes a drain outlet, an inner sealing structure and a drain valve. The drain outlet passes through the inner bottom plate and the outer bottom plate along the first direction, and the inner sealing structure is sealed and plugged into the drain outlet, and covers the mating interface between the inner bottom plate and the outer bottom plate at the drain outlet. The drain valve is arranged at the drain outlet and is configured to selectively open or close the drain outlet.

10. The cleaning device according to claim 1, wherein The inner layer tank body includes an inner layer bottom plate and at least one inner layer side plate, wherein the at least one inner layer side plate is connected to one side of the inner layer bottom plate along a first direction and forms an inner space of the inner layer tank body together with the inner layer bottom plate, wherein the inner space includes the temporary storage space, and the inner layer tank body has an inner layer tank opening arranged opposite to the inner layer bottom plate along the first direction; The at least one inner layer side plate and the inner layer bottom plate are integrally formed, or the at least one inner layer side plate is welded to the inner layer bottom plate.

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