Ultrasonic dust removal device

Abstract

An ultrasonic dust removal device, comprising: positive pressure cavities (10) and air blowing cavities (20) which are sequentially arranged in a first direction, wherein each air blowing cavity (20) comprises a communicating flow channel and at least two ultrasonic generating cavities (21) connected in series by means of the communicating flow channel, the air blowing cavity (20) is communicated with the corresponding positive pressure cavity (10) by means of the communicating flow channel, the portion of the communicating flow channel distant from the positive pressure cavity (10) forms an air blowing flow channel (22) capable of blowing air to the outside, and the ultrasonic generating cavities (21) expand outward with respect to the communicating flow channel in a second direction; and a negative pressure cavity (30) and an air suction hole (40) which are communicated with each other, wherein the air suction hole (40) and the air blowing flow channels (22) are located at the same end of the ultrasonic dust removal device in the first direction; the cavity wall of at least one ultrasonic generating cavity (21) comprised in each air blowing cavity (20) is recessed inward to form at least one first groove (50), and the positive pressure cavities (10), the air blowing cavities (20) and the first grooves (50) all extend in a third direction; and a first cross section of each first groove (50) is arc-shaped. The arc-shaped grooves in the ultrasonic generating cavities (21) are conducive to the movement of sound waves, reducing the sound wave energy loss caused by agitation, improving sound frequency effect, and thus saving gas flow.

Description

Ultrasonic dust removal device Technical Field

[0001] This application relates to the field of dust removal equipment technology, and in particular to an ultrasonic dust removal device. Background Technology

[0002] During the battery cell production process, dust, debris, and other impurities can easily fall onto the electrode sheets. If not cleaned in time, these impurities will affect battery quality and cause micro-short circuits inside the battery cell.

[0003] Currently, the lithium battery industry uses two main dust removal methods: brush dust removal and air knife dust removal. Brush dust removal is a contact dust removal method, which can negatively impact the surface quality and physical properties of the electrode itself. Furthermore, dust particles easily adhere to the brush, potentially causing secondary contamination of the electrode. While air knife dust removal is a non-contact method, the gas blown out by the air knife creates a stable flow field on the electrode surface, thus failing to effectively remove dust and other particulate matter from the viscous layer of air above the electrode, resulting in poor dust removal efficiency.

[0004] Existing ultrasonic dust removal systems suffer from unstable dust removal effects due to inadequate design of the ultrasonic generating chamber, and their dust removal performance still needs improvement. Summary of the Invention

[0005] Therefore, it is necessary to provide an ultrasonic dust removal device that can improve the dust removal performance of traditional ultrasonic dust removal systems, which suffers from poor dust removal performance.

[0006] An ultrasonic dust removal device includes:

[0007] A positive pressure chamber and an air blowing chamber are arranged sequentially in a first direction. The air blowing chamber includes a connecting channel and at least two ultrasonic generating chambers connected in series through the connecting channel. The air blowing chamber is connected to the positive pressure chamber through the connecting channel. The connecting channel away from the positive pressure chamber forms an air blowing channel that can blow air to the outside. The ultrasonic generating chamber expands outward relative to the connecting channel in a second direction.

[0008] The negative pressure chamber and the air intake are interconnected, and the air intake and the air blowing channel are located at the same end of the ultrasonic dust removal device in the first direction;

[0009] The wall of at least one of the ultrasonic generating cavities included in the air blowing cavity is recessed to form at least one first groove. The positive pressure cavity, the air blowing cavity, and the first groove all extend along a third direction. The shape of the first cross section of the first groove is arc-shaped. The first direction, the second direction, and the third direction intersect each other. The first direction and the second direction are both parallel to the first cross section.

[0010] In the aforementioned ultrasonic dust removal device, the arc-shaped groove in the ultrasonic generating chamber facilitates sound wave movement, reduces energy loss (sound wave energy generated by vibration), improves the sound frequency effect, and thus saves gas flow. Specifically, by creating an arc-shaped groove in the wall of the ultrasonic generating chamber, high-frequency noise and gas generation are further promoted, thereby ensuring stable dust removal performance and improving overall dust removal efficiency.

[0011] In one embodiment, the walls of all the ultrasonic generating cavities included in the blowing cavity are recessed to form at least one of the first grooves.

[0012] In one embodiment, the cavity wall of the ultrasonic generating cavity is recessed to form at least two mutually spaced first grooves.

[0013] In one embodiment, the first cross-section is semi-circular in shape, and the radius of the semi-circle is 0.2mm-0.8mm.

[0014] In one embodiment, the distance between any two adjacent ultrasonic generating cavities in the first direction is 2mm-3mm.

[0015] In one embodiment, the size of the airflow channel is 3mm-5mm in the first direction and 0.1mm-0.3mm in the second direction.

[0016] In one embodiment, the second cross-section of the ultrasonic generating cavity is rectangular in shape, the length direction of the rectangle is parallel to the second direction, and the rectangle has rounded corners; both the first direction and the second direction are parallel to the second cross-section.

[0017] In one embodiment, the chamfer radius of the rounded corner is 0.2mm-0.8mm.

[0018] In one embodiment, the ratio of the dimension of the second cross-section of the ultrasonic generating cavity in the second direction to its dimension in the first direction is 1-2; both the first direction and the second direction are parallel to the second cross-section.

[0019] In one embodiment, the second cross-section of the ultrasonic wave generating cavity has a dimension of 2mm-3mm in the first direction;

[0020] Both the first direction and the second direction are parallel to the second cross section.

[0021] In one embodiment, the airflow channel extends in an arc shape along the first direction, and the end of the airflow channel away from the ultrasonic generating cavity is deflected toward the air intake hole.

[0022] The angle between the tangent formed by the arc formed by the airflow channel and the second plane is 45°-90°; the second plane is formed by intersecting the third direction through the second direction.

[0023] In one embodiment, the angle α between the tangent formed by the arc formed by the airflow channel and the second plane is 60°.

[0024] In one embodiment, the third cross-section of the wall of the positive pressure chamber is arc-shaped, and the dimension of the third cross-section of the positive pressure chamber in the second direction gradually decreases from one end away from the blowing chamber to the other end near the blowing chamber.

[0025] The positive pressure chamber has an inwardly recessed cavity wall forming a second groove extending in the third direction;

[0026] Both the first direction and the second direction are parallel to the third cross section.

[0027] In one embodiment, the ultrasonic dust removal device includes two sets of positive pressure chambers, each set of the positive pressure chambers including a positive pressure chamber and a blowing chamber that are interconnected.

[0028] The negative pressure chamber is located between the two sets of positive pressure chambers in the second direction, and the air intake is located between the two airflow channels in the second direction.

[0029] In one embodiment, the ultrasonic dust removal device includes a cover plate, a bottom plate, two splicing mechanisms, and two side plates;

[0030] The two splicing mechanisms are arranged at intervals in the second direction, the cover plate and the bottom plate are respectively installed at both ends of the two splicing mechanisms in the first direction, and the two side plates are respectively installed at both ends of the two splicing mechanisms in the third direction.

[0031] Each splicing mechanism and the two side plates together form a group of positive pressure chambers, or each splicing mechanism, the two side plates and the cover plate together form a group of positive pressure chambers. The two splicing mechanisms, the cover plate, the bottom plate and the two side plates together form a negative pressure chamber. The air intake hole is located on the bottom plate.

[0032] The splicing mechanism is formed by splicing together multiple structures.

[0033] In one embodiment, the splicing mechanism includes two splicing plates, which are spliced ​​together in the second direction, and the two splicing plates, the cover plate, and the two side plates together form the positive pressure chamber and the air blowing chamber.

[0034] In one embodiment, the splicing mechanism includes a first splicing plate, a second splicing plate, and a third splicing plate. The first splicing plate and the second splicing plate are spliced ​​in the second direction, and the third splicing plate is spliced ​​with the first splicing plate and the second splicing plate in the first direction. The first splicing plate, the second splicing plate, the cover plate, and the two side plates together form the positive pressure cavity and the ultrasonic wave generating cavity, and the airflow channel is disposed in the third splicing plate.

[0035] In one embodiment, the splicing mechanism includes a housing and at least two splicing panels;

[0036] The outer shell has an opening at one end near the air intake in the first direction, and the splicing plate is disposed inside the outer shell through the opening and spliced ​​in the first direction and / or the second direction;

[0037] The outer shell, the splicing plate, and the two side plates together form the positive pressure chamber and the air blowing chamber.

[0038] In one embodiment, the ultrasonic dust removal device is further provided with an air inlet, which is connected to the positive pressure chamber.

[0039] In one embodiment, the ultrasonic dust removal device is further provided with an air outlet, which is connected to the negative pressure chamber. Attached Figure Description

[0040] Figure 1 is a cross-sectional view of an ultrasonic dust removal device provided in an embodiment of this application;

[0041] Figure 2 is an enlarged view of point A of the ultrasonic dust removal device shown in Figure 1;

[0042] Figure 3 is a front view of the ultrasonic dust removal device shown in Figure 1;

[0043] Figure 4 is a side view of the ultrasonic dust removal device shown in Figure 1;

[0044] Figure 5 is a top view of the ultrasonic dust removal device shown in Figure 1;

[0045] Figure 6 is a cross-sectional view of an ultrasonic dust removal device provided in another embodiment of this application;

[0046] Figure 7 is a cross-sectional view of an ultrasonic dust removal device provided in another embodiment of this application;

[0047] Figure 8 is a front view of the ultrasonic dust removal device shown in Figure 7;

[0048] Figure 9 is a side view of the ultrasonic dust removal device shown in Figure 7;

[0049] Figure 10 is a top view of the ultrasonic dust removal device shown in Figure 7.

[0050] Explanation of reference numerals in the attached drawings: 100, ultrasonic dust removal device; 10, positive pressure chamber; 20, air blowing chamber; 21, ultrasonic generating chamber; 22, air blowing channel; 30, negative pressure chamber; 40, air intake hole; 50, first groove; 60, cover plate; 70, base plate; 80, splicing mechanism; 81, splicing plate; 81a, first splicing plate; 81b, second splicing plate; 81c, third splicing plate; 82, outer shell; 821, opening; 90, side plate; 110, air inlet; 120, air outlet; 130, second groove; 140, screw; 150, second plane; α, included angle; Z, first direction; X, second direction; Y, third direction. Detailed Implementation

[0051] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0052] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0053] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0054] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0055] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0056] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0057] Referring to Figure 1, one embodiment of this application provides an ultrasonic dust removal device 100 for generating ultrasonic waves to remove dust from a workpiece to be cleaned. Specifically, the ultrasonic dust removal device 100 is applied in equipment such as a die-cutting machine or a winding machine to remove dust from electrode sheets.

[0058] Of course, in some other embodiments, the type of equipment to which the ultrasonic dust removal device 100 is applied is not limited, and the type of part to be cleaned is not limited. That is, the ultrasonic dust removal device 100 can also be applied to other occasions to remove dust from other parts to be cleaned.

[0059] The following description uses the ultrasonic dust removal device 100 for removing dust from electrode sheets as an example to illustrate this application in detail. However, this description is merely an example and does not limit the scope of protection of this application.

[0060] The ultrasonic dust removal device 100 has a positive pressure chamber 10 and an air blowing chamber 20, which are arranged sequentially and connected to the positive pressure chamber 10 in the first direction Z. The air blowing chamber 20 includes a connecting channel and at least two ultrasonic generating chambers 21. The ultrasonic generating chambers 21 are connected to the positive pressure chamber 10 through the connecting channel, and the ultrasonic generating chambers 21 are arranged in series in the first direction Z. Every two adjacent ultrasonic generating chambers 21 are connected through the connecting channel. Referring to Figures 1 and 2, the connecting channel away from the positive pressure chamber 10 forms an air blowing channel 22 that can blow air to the outside. That is, in the direction of air flow, the connecting channel located at the downstream end is the air blowing channel 22. The ultrasonic generating chambers 21 expand outward relative to the connecting channel in the second direction X. That is, the ultrasonic generating chambers 21 expand outward relative to the connecting channel to form the expanded portion (or expanded part) of the air blowing chamber 20.

[0061] Thus, the high-pressure gas in the positive pressure chamber 10 can flow sequentially through each ultrasonic generating chamber 21 via the connecting flow channel, and finally flow to the outside via the blowing flow channel 22. Furthermore, the ultrasonic dust removal device 100 is also provided with an air inlet 110, through which the high-pressure gas can enter the positive pressure chamber 10.

[0062] In the above configuration, when the high-speed fluid passes through the high-pressure chamber, the fluid self-excites and oscillates to generate acoustic energy, resulting in a shedding vortex-acoustic wave-new shedding vortex-new acoustic wave phenomenon in the high-pressure chamber flow field. Furthermore, by using multiple ultrasonic generating cavities 21 connected in series, an acoustic-fluid resonance phenomenon (i.e., standing wave mode) occurs, thereby generating high-frequency noise and gas with frequencies reaching above 20kHz, which can be evaluated as ultrasound. Finally, the gas is blown out through the airflow channel 22. As the gas exits the airflow channel 22, the high-frequency vibrating gas continues to vibrate and vortex on the end face of the ultrasonic dust removal device 100 in the first direction Z, thereby acting on the electrode plate for dust removal.

[0063] Referring again to Figure 1, the ultrasonic dust removal device 100 also has a negative pressure chamber 30 and an air intake 40. The negative pressure chamber 30 is connected to the outside through the air intake 40. The air intake 40 and the air blowing channel 22 are located at the same end of the ultrasonic dust removal device 100 in the first direction Z, so that when the air blowing channel 22 blows gas towards the electrode, dust can be drawn into the negative pressure chamber 30 through the air intake 40, thereby achieving the purpose of dust removal.

[0064] Furthermore, the ultrasonic dust removal device 100 also includes an air outlet 120 connected to the negative pressure chamber 30. The air outlet 120 is used to connect to the negative pressure pipe, and the dust in the negative pressure chamber 30 can flow into the negative pressure pipe through the air outlet 120 to facilitate dust collection.

[0065] Referring again to Figure 2, the cavity wall of at least one ultrasonic generating cavity 21 included in the air blowing cavity 20 is recessed to form at least one first groove 50. The positive pressure cavity 10, the air blowing cavity 20, and the first groove 50 all extend longitudinally along the third direction Y. The first cross-section of the first groove 50 is arc-shaped, that is, the first groove 50 is an arc-shaped groove. The first direction Z and the second direction X are both parallel to the first cross-section, that is, the straight line extending along the first direction Z and the straight line extending along the second direction X are both located within the first cross-section. The first direction Z, the second direction X, and the third direction Y intersect each other. Specifically, the first direction Z, the second direction X, and the third direction Y are perpendicular to each other. In some specific embodiments, the ultrasonic dust removal device 100 is a hollow cuboid structure, and the first direction Z, the second direction X, and the third direction Y are the height direction, width direction, and length direction of the ultrasonic dust removal device 100, respectively. Of course, in other specific embodiments, the shape of the ultrasonic dust removal device 100 is not limited.

[0066] The ultrasonic dust removal device 100 provided in this application embodiment has an arc-shaped groove in the ultrasonic generating cavity 21 that facilitates sound wave movement, reduces energy loss (sound wave energy generated by excitation), improves the sound frequency effect, and thus saves gas flow. That is, by opening an arc-shaped groove in the cavity wall of the ultrasonic generating cavity 21, high-frequency noise and gas generation can be further promoted, thereby ensuring stable dust removal effect and improving dust removal performance.

[0067] In some embodiments, continuing to refer to Figure 1, the ultrasonic dust removal device 100 includes two sets of positive pressure chambers, each set comprising a positive pressure chamber 10 and a blowing chamber 20 that are interconnected. A negative pressure chamber 30 is located between the two sets of positive pressure chambers in the second direction X, and an air intake 40 is located between two blowing channels 22 in the second direction X. Thus, the ultrasonic dust removal device 100 as a whole adopts a design of positive pressure chamber 10-negative pressure chamber 30-positive pressure chamber 10, thereby completing the target action of ultrasonic vibration-dust suction-ultrasonic vibration, ensuring the dust removal effect.

[0068] Further referring to Figure 1, and Figures 3-5, the ultrasonic dust removal device 100 includes a cover plate 60, a base plate 70, two splicing mechanisms 80, and two side plates 90. The two splicing mechanisms 80 are spaced apart in the second direction X. The cover plate 60 and the base plate 70 are respectively installed at both ends of the two splicing mechanisms 80 in the first direction Z. The two side plates 90 are respectively installed at both ends of the two splicing mechanisms 80 in the third direction Y. The splicing mechanism 80 is formed by splicing multiple structures.

[0069] Optionally, each splicing mechanism 80 and the two side plates 90 together form a positive pressure chamber group. Alternatively, each splicing mechanism 80, the two side plates 90, and the cover plate 60 together form a positive pressure chamber group. The two splicing mechanisms 80, the cover plate 60, the base plate 70, and the two side plates 90 together form a negative pressure chamber 30, with an air intake 40 located on the base plate 70. Specifically, the air intake 40 includes multiple sub-holes located on the base plate 70 to ensure effective air intake. The side plates 90 are provided with air inlets 110 communicating with the positive pressure chamber 10, and the cover plate 60 is provided with air outlets 120 communicating with the negative pressure chamber 30. In this way, the ultrasonic dust removal device 100 is formed by assembling multiple structures, which facilitates disassembly and reduces maintenance costs.

[0070] It should be noted that the side plate 90 and the splicing mechanism 80, the cover plate 60 and the splicing mechanism 80, and the bottom plate 70 and the splicing mechanism 80 can all be fixedly connected with screws 140 for easy disassembly.

[0071] In some embodiments, one side plate 90 is provided with an air inlet 110 that communicates with two positive pressure chambers 10 respectively. In other embodiments, both side plates 90 are provided with air inlets 110 that communicate with two positive pressure chambers 10 respectively.

[0072] In some embodiments, continuing to refer to FIG1, the splicing mechanism 80 includes two splicing plates 81, which are spliced ​​together in the second direction X. The two splicing plates 81, the cover plate 60, and the two side plates 90 together form a positive pressure chamber 10 and an air blowing chamber 20. Specifically, screws 140 are inserted through the cover plate 60 and the splicing plate 81 in the first direction Z to fix them together, and screws 140 are inserted through the side plate 90 and the splicing plate 81 in the third direction Y to fix them together. In this way, the ultrasonic dust removal device 100 only needs two splicing plates 81 to form a positive pressure chamber 10, an air blowing chamber 20, and a negative pressure chamber 30, which is simple in structure.

[0073] In other embodiments, referring to FIG6, the splicing mechanism 80 includes three splicing plates 81, namely a first splicing plate 81a, a second splicing plate 81b, and a third splicing plate 81c. The first splicing plate 81a and the second splicing plate 81b are spliced ​​in the second direction X, and the third splicing plate 81c is spliced ​​with the first splicing plate 81a and the second splicing plate 81b in the first direction Z. The first splicing plate 81a, the second splicing plate 81b, the cover plate 60, and the two side plates 90 together form a positive pressure cavity 10 and an ultrasonic wave generating cavity 21, and the airflow channel 22 is opened in the third splicing plate 81c. Specifically, screws 140 pass through the cover plate 60 and the first splicing plate 81a along the first direction Z, and pass through the cover plate 60 and the second splicing plate 81b along the first direction Z to fix them. Screws 140 also pass through the side plate 90 and the splicing plate along the third direction Y to fix them. Thus, the airflow channel 22 is directly opened in the third splicing plate 81c, which ensures the dimensional stability of the airflow channel 22 compared to the method of splicing two splicing plates 81 to form the airflow channel 22.

[0074] In other embodiments, referring to Figures 7-10, the splicing mechanism 80 includes a housing 82 and at least two splicing plates 81. The housing 82 has an opening 821 at one end near the air intake 40 in the first direction Z. The splicing plates 81 are disposed within the housing 82 through the opening 821 and spliced ​​in the first direction Z. Alternatively, the splicing plates 81 are disposed within the housing 82 through the opening 821 and spliced ​​in the second direction X. Alternatively, the splicing plates 81 are disposed within the housing 82 through the opening 821 and spliced ​​in the first direction Z and the second direction X. The housing 82, the splicing plates 81, and the two side plates 90 together form a positive pressure chamber 10 and an air blowing chamber 20. With this arrangement, the screw 140 can pass through the housing 82 and the splicing plates 81 along the second direction X. When the positive pressure chamber 10 is filled with high-pressure gas, the axial extension of the screw 140 along the second direction X can improve the resistance to deformation to a certain extent, that is, reduce the tendency of the splicing plates 81 to separate from each other in the second direction X.

[0075] In some specific embodiments, continuing to refer to Figure 7, the splicing mechanism 80 includes two splicing plates 81, which are disposed in the outer casing 82 through an opening 821 and spliced ​​together in the second direction X. The outer casing 82, the two splicing plates 81, and the two side plates 90 together form a positive pressure cavity 10, and the two splicing plates 81 and the two side plates 90 together form an air blowing cavity 20. In other specific embodiments, the splicing mechanism 80 includes three splicing plates 81, which are disposed in the outer casing 82 through an opening 821. Two of the splicing plates 81 are spliced ​​together in the second direction X, and the third splicing plate 81 is spliced ​​together with the two splicing plates 81 above in the first direction Z. The outer casing 82, the two splicing plates 81 spliced ​​together in the second direction X, and the two side plates 90 together form the positive pressure cavity 10 and the ultrasonic wave generating cavity 21, and the air blowing channel 22 is directly opened on the other splicing plate 81.

[0076] In particular, the ultrasonic dust removal device 100 needs to ensure airtightness. The gaps between each plate need to be sealed with sealant or sealed with gaskets to ensure relatively stable air pressure in the cavity, thereby achieving stable ultrasonic output and dust removal effect.

[0077] The ultrasonic dust removal device 100 provided in this application embodiment can be hung upright (with the airflow channel 22 and suction port 40 facing downwards) or upside down (with the airflow channel 22 and suction port 40 facing upwards). Specifically, the base plate 70 needs to be kept within 5mm of the electrode to ensure the cleaning effect. More specifically, before using the ultrasonic dust removal device 100, the electrode needs to be electrostatically neutralized before ultrasonic dust removal.

[0078] The positive pressure chamber 10, the air blowing chamber 20, and the first groove 50 extend to the same length along the third direction Y. At this time, the first groove 50 and the ultrasonic wave generating chamber 21 extend to the same length along the third direction Y. This further facilitates sound wave movement, reduces energy loss, and improves the audio effect.

[0079] Furthermore, referring to Figures 1, 6, and 7, the negative pressure chamber 30 and the suction port 40 are arranged sequentially in the first direction Z, which facilitates the flow of dust from the suction port 40 to the negative pressure chamber 30. Simultaneously, the negative pressure chamber 30 and the positive pressure chamber 10 have the same extension length in the third direction Y, resulting in a larger volume for the negative pressure chamber 30, allowing more dust to flow into the negative pressure pipe.

[0080] In some embodiments, the third cross-section of the cavity wall of the positive pressure cavity 10 is arc-shaped. Specifically, the third cross-section has arc-shaped ends in the second direction X, and the dimension of the third cross-section of the positive pressure cavity 10 in the second direction X gradually decreases from the end away from the blowing cavity 20 to the end near the blowing cavity 20. The first direction Z and the second direction X are both parallel to the third cross-section. The cavity wall of the positive pressure cavity 10 is concave to form a second groove 130 extending along the third direction Y. When gas (such as compressed air) is filled into the positive pressure cavity 10, the gas volume and density inside the positive pressure cavity 10 will continuously increase. Therefore, the gas will exert pressure on the cavity wall of the positive pressure cavity 10, causing the cavity wall of the positive pressure cavity 10 to tend to expand outward, thereby increasing the load on the structure forming the positive pressure cavity 10 and reducing the reliability of the device. Furthermore, when the positive pressure cavity 10 is formed by splicing together in the second direction X, after the splicing plate 81 generates the aforementioned movement trend, and at the same time, due to the presence of the cover plate 60, the slit formed at the lower part of the positive pressure cavity 10 (i.e., the airflow channel 22) will generate a tendency to move closer to each other, causing the slit to become narrower and making it impossible to guarantee the theoretical parameters required by the design.

[0081] When the third cross-section of the positive pressure chamber 10 is designed as an arc shape (i.e., the chamber wall of the positive pressure chamber 10 is an arc-shaped surface) and a second groove 130 is provided on the chamber wall, the gas pressure can be dispersed, thereby optimizing the load on the splicing plate 81, reducing the load on the screws fixing the cover plate 60 and the splicing plate 81, improving structural reliability, and relatively ensuring the dimensional parameters of the lower slit. In addition, designing the chamber wall of the positive pressure chamber 10 as an arc-shaped surface reduces air pressure loss to a certain extent compared to a rectangular cavity, thereby saving fluid flow and reducing the plant load.

[0082] In some embodiments, each positive pressure chamber 10 is provided with two second grooves 130, which are respectively provided on two different splicing plates 81 and are opposite to each other in the second direction X. It is conceivable that in other embodiments, the number and specific location of the second grooves 130 are not limited. For example, the number of second grooves 130 in each positive pressure chamber 10 can be one, three or more, and all the second grooves 130 can be provided on the same splicing plate 81.

[0083] Referring again to Figure 2, the second cross-section of the ultrasonic wave generating cavity 21 is rectangular, with its length parallel to the second direction X. The rectangle has rounded corners to ensure effective ultrasonic wave generation. Both the first direction Z and the second direction X are parallel to the second cross-section. That is, the first, second, and third cross-sections are mutually parallel. It should be understood that in some other embodiments, the shape of the second cross-section of the ultrasonic wave generating cavity 21 is not limited; it can also be circular, triangular, etc.

[0084] Specifically, the radius of the aforementioned rounded corner is 0.2mm-0.8mm. Thus, when the first groove 50 is provided in the ultrasonic generating cavity 21, the shape of the ultrasonic generating cavity 21 can be approximately circular, which helps the sound wave movement, reduces energy loss (sound wave energy generated by excitation), improves the sound frequency effect, and thus saves gas flow.

[0085] In the first direction Z, the distance between any two adjacent ultrasonic generating cavities 21 is 2mm-3mm. In the first direction Z, the size of the airflow channel 22 is 3mm-5mm; in the second direction X, the size of the airflow channel 22 is 0.1mm-0.3mm. This design ensures good ultrasonic wave generation performance.

[0086] Furthermore, the ratio of the dimension of the second cross-section of the ultrasonic generating cavity 21 in the second direction X to its dimension in the first direction Z is 1-2. The dimension of the second cross-section of the ultrasonic generating cavity 21 in the first direction Z is 2mm-3mm. This design ensures a better ultrasonic generation effect.

[0087] It should be noted that the dimensions of the second cross-section of the ultrasonic generating cavity 21 in both the second direction X and the first direction Z are the maximum dimensions in those directions. In some specific embodiments, when the shape of the second cross-section of the ultrasonic generating cavity 21 is rectangular, its dimension in the first direction Z is the width of the rectangle, and its dimension in the second direction X is the length of the rectangle. In this case, the ratio of the dimension in the length direction to the dimension in the width direction of the second cross-section of the ultrasonic generating cavity 21 is 1-2, and the dimension in the width direction is 2mm-3mm, then the dimension in the length direction is 2mm-6mm.

[0088] In some embodiments, continuing to refer to Figures 1 and 2, the walls of all ultrasonic generating chambers 21 included in the air blowing chamber 20 are concave to form first grooves 50. Specifically, the walls of each ultrasonic generating chamber 21 are concave to form at least two mutually spaced first grooves 50. Thus, when gas flows through each ultrasonic generating chamber 21, the first grooves 50 (arc-shaped grooves) within them facilitate sound wave movement and reduce energy loss. Simultaneously, the interaction of multiple arc-shaped grooves in each ultrasonic generating chamber 21 further reduces sound wave energy loss, improves sound wave performance, significantly reduces gas flow, and ensures effective dust removal.

[0089] In some specific embodiments, referring to Figure 2, the air blowing chamber 20 includes two ultrasonic generating chambers 21 connected in series, each ultrasonic generating chamber 21 having four first grooves 50. Specifically, two first grooves 50 are located on the top wall of the ultrasonic generating chamber 21 in the first direction Z, and two first grooves 50 are located on the bottom wall of the ultrasonic generating chamber 21 in the first direction Z, with the upper and lower first grooves 50 arranged opposite each other. Of course, in other embodiments, the number of ultrasonic generating chambers 21 included in the air blowing chamber 20 is not limited, nor is the number of first grooves 50 in each ultrasonic generating chamber 21 limited. For example, the air blowing chamber 20 may also include three, four, or more than four ultrasonic generating chambers 21 connected in series, or each ultrasonic generating chamber 21 may have one, two, three, or more than four first grooves 50.

[0090] Optionally, the first cross-section of the first groove 50 is semi-circular in shape, with a radius of 0.2mm-0.8mm.

[0091] Referring again to Figure 2, the airflow channel 22 extends in an arc shape along the first direction Z, with one end of the airflow channel 22 away from the ultrasonic generating cavity 21 deflected towards the suction port 40. The angle α between the tangent line tangent to the arc formed by the airflow channel 22 and the second plane 150 is 45°-90°. The second plane 150 is formed by the intersection of the second direction X and the third direction Y.

[0092] When gas is blown out of the airflow channel 22 (also known as a slit), the high-frequency vibrating gas will continue to vibrate and vortex at the end face of the airflow port in the airflow channel 22. Parameter-wise, when the slit tangent angle is less than 45°, it will hinder gas flow, thus affecting the ultrasonic effect of the gas on the electrode surface; while when the slit tangent angle is greater than 90°, severe gas escape will occur. Setting the slit tangent angle to 45°-90° can reduce gas escape and simultaneously cause dust and other impurities to tend to move towards the suction port 40, improving the impurity collection rate and making it less likely for impurities to splash from the electrode surface into the equipment, reducing the possibility of secondary contamination.

[0093] In some specific embodiments, the end face where the air intake hole 40 or the air blowing port is located is parallel to the second plane 150, and the slit tangent angle is 60°. It is understood that in some other embodiments, the slit tangent angle is not specifically limited, and may be 65°, 70°, 75°, or 80°, etc.

[0094] It should be noted that the cross-sectional design and selection of various dimensions of the ultrasonic generating cavity 21 and the first groove 50 were derived using Design of Experiments (DOE). The specific process of DOE includes DOE planning, simulation analysis, data processing, mathematical modeling, mathematical model optimization, parameter optimization, theoretical optimal solution output, structural design, and prototype verification. Through the coordination of the various dimensions, stable ultrasonic output is facilitated, allowing dust and other impurities to move towards the suction port 40, ensuring effective dust removal. It is conceivable that in other embodiments, the cross-sectional shape of the ultrasonic generating cavity 21 and the first groove 50 are not limited, nor are the selection of various dimensions, as long as the ultrasonic dust removal device 100 can stably output ultrasonic waves.

[0095] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0096] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. An ultrasonic dust removal device, characterized in that, include: A positive pressure cavity (10) and an air blowing cavity (20) are arranged sequentially in the first direction (Z). The air blowing cavity (20) includes a connecting channel and at least two ultrasonic generating cavities (21) connected in series through the connecting channel. The air blowing cavity (20) is connected to the positive pressure cavity (10) through the connecting channel. The connecting channel away from the positive pressure cavity (10) forms an air blowing channel (22) that can blow air to the outside. The ultrasonic generating cavity (21) expands outward relative to the connecting channel in the second direction (X). The negative pressure chamber (30) and the suction port (40) are interconnected, and the suction port (40) and the blowing channel (22) are located at the same end of the ultrasonic dust removal device in the first direction (Z); The air blowing chamber (20) includes at least one ultrasonic generating chamber (21) whose cavity wall is recessed to form at least one first groove (50). The positive pressure chamber (10), the air blowing chamber (20) and the first groove (50) all extend along a third direction (Y). The first cross-section of the first groove (50) is arc-shaped. The first direction (Z), the second direction (X) and the third direction (Y) intersect each other. The first direction (Z) and the second direction (X) are both parallel to the first cross-section.

2. The ultrasonic dust removal device according to claim 1, characterized in that, The walls of all the ultrasonic generating cavities (21) included in the air blowing cavity (20) are recessed to form at least one of the first grooves (50).

3. The ultrasonic dust removal device according to claim 1, characterized in that, At least one of the ultrasonic generating cavities (21) has a concave cavity wall forming at least two mutually spaced first grooves (50).

4. The ultrasonic dust removal device according to claim 1, characterized in that, The first cross-section is semi-circular in shape, and the radius of the semi-circle is 0.2mm-0.8mm.

5. The ultrasonic dust removal device according to claim 1, characterized in that, In the first direction (Z), the distance between any two adjacent ultrasonic generating cavities (21) is 2mm-3mm.

6. The ultrasonic dust removal device according to claim 1 or 5, characterized in that, In the first direction (Z), the size of the airflow channel (22) is 3mm-5mm; in the second direction (X), the size of the airflow channel (22) is 0.1mm-0.3mm.

7. The ultrasonic dust removal device according to claim 1, characterized in that, The second cross-section of the ultrasonic generating cavity (21) is rectangular, with the length direction of the rectangle parallel to the second direction (X) and the rectangle having rounded corners; both the first direction (Z) and the second direction (X) are parallel to the second cross-section.

8. The ultrasonic dust removal device according to claim 7, characterized in that, The chamfer radius of the rounded corner is 0.2mm-0.8mm.

9. The ultrasonic dust removal device according to claim 1, characterized in that, The ratio of the dimension of the second cross section of the ultrasonic generating cavity (21) in the second direction (X) to the dimension in the first direction (Z) is 1-2; both the first direction (Z) and the second direction (X) are parallel to the second cross section.

10. The ultrasonic dust removal device according to claim 1 or 9, characterized in that, The second cross section of the ultrasonic generating cavity (21) has a dimension of 2mm-3mm in the first direction (Z); Both the first direction (Z) and the second direction (X) are parallel to the second cross section.

11. The ultrasonic dust removal device according to claim 1, characterized in that, The airflow channel (22) extends in an arc shape along the first direction (Z), and the end of the airflow channel (22) away from the ultrasonic generating cavity (21) is deflected towards the air intake hole (40); The angle α between the tangent formed by the arc formed by the airflow channel (22) and the second plane is 45°-90°; the second plane is formed by the intersection of the second direction (X) and the third direction (Y).

12. The ultrasonic dust removal device according to claim 11, characterized in that, The angle α between the tangent formed by the arc formed by the airflow channel (22) and the second plane is 60°.

13. The ultrasonic dust removal device according to claim 1, characterized in that, The third cross-section of the wall of the positive pressure chamber (10) is arc-shaped, and the dimension of the third cross-section of the positive pressure chamber (10) in the second direction gradually decreases from one end away from the blowing chamber (20) to the other end close to the blowing chamber (20). The cavity wall of the positive pressure cavity (10) is recessed to form a second groove (130) extending along the third direction (Y); Both the first direction (Z) and the second direction (X) are parallel to the third cross section.

14. The ultrasonic dust removal device according to any one of claims 1-13, characterized in that, The ultrasonic dust removal device includes two sets of positive pressure chambers, each set of positive pressure chambers including a positive pressure chamber (10) and a blowing chamber (20) that are interconnected. The negative pressure chamber (30) is located between the two sets of positive pressure chambers in the second direction (X), and the air intake (40) is located between the two airflow channels (22) in the second direction (X).

15. The ultrasonic dust removal device according to claim 14, characterized in that, The ultrasonic dust removal device includes a cover plate (60), a base plate (70), two splicing mechanisms (80), and two side plates (90); The two splicing mechanisms (80) are arranged at intervals in the second direction (X), the cover plate (60) and the bottom plate (70) are respectively installed at both ends of the two splicing mechanisms (80) in the first direction (Z), and the two side plates (90) are respectively installed at both ends of the two splicing mechanisms (80) in the third direction (Y). Each splicing mechanism (80) and the two side plates (90) together form a group of positive pressure chambers, or each splicing mechanism (80), the two side plates (90) and the cover plate (60) together form a group of positive pressure chambers. The two splicing mechanisms (80), the cover plate (60), the bottom plate (70) and the two side plates (90) together form a negative pressure chamber (30). The air intake hole (40) is provided on the bottom plate (70). The splicing mechanism (80) is formed by splicing multiple structures.

16. The ultrasonic dust removal device according to claim 15, characterized in that, The splicing mechanism (80) includes two splicing plates (81), which are spliced ​​together in the second direction (X), and the two splicing plates (81), the cover plate (60) and the two side plates (90) together form the positive pressure chamber (10) and the air blowing chamber (20).

17. The ultrasonic dust removal device according to claim 15, characterized in that, The splicing mechanism (80) includes a first splicing plate (81a), a second splicing plate (81b), and a third splicing plate (81c). The first splicing plate (81a) and the second splicing plate (81b) are spliced ​​in the second direction (X), and the third splicing plate (81c) is spliced ​​with the first splicing plate (81a) and the second splicing plate (81b) in the first direction (Z). The first splicing plate (81a), the second splicing plate (81b), the cover plate (60), and the two side plates (90) together form the positive pressure cavity (10) and the ultrasonic wave generating cavity (21). The airflow channel (22) is located in the third splicing plate (81c).

18. The ultrasonic dust removal device according to claim 15, characterized in that, The splicing mechanism (80) includes a housing (82) and at least two splicing plates (81); The outer shell (82) has an opening (821) at one end in the first direction (Z) near the air intake (40), and the splicing plate (81) is disposed inside the outer shell (82) through the opening (821) and spliced ​​in the first direction (Z) and / or the second direction (X); The outer shell (82), the splicing plate (81), and the two side plates (90) together form the positive pressure chamber (10) and the air blowing chamber (20).

19. The ultrasonic dust removal device according to claim 1, characterized in that, The ultrasonic dust removal device is also provided with an air inlet (110), which is connected to the positive pressure chamber (10).

20. The ultrasonic dust removal device according to claim 1, characterized in that, The ultrasonic dust removal device is also provided with an air outlet (120), which is connected to the negative pressure chamber (30).

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