Optoelectronic device

Abstract

The invention relates to an optoelectronic device (10) comprising a laser light-emitting component (100) and an optical component (200) having an optical waveguide (201). The laser light-emitting component (100) has, on a first end face (110), a light exit surface (120) for emitting the laser light and at least one first alignment structure (130). The optical component (200) has, on a second end face (210), a light entry surface (220), at which the laser light can be coupled into the optical waveguide (201), and at least one second alignment structure (230). The first and second alignment structures (130, 230) are complementary to one another in order to align the laser light-emitting component (100) with respect to the optical component (200) in such a way that the light exit surface (120) and the light entry surface (220) are opposite one another, as a result of which the laser light is coupled into the optical waveguide (201) in the case of the emission of laser light by the laser light-emitting component (100).

Description

[0001] Description

[0002] OPTOELECTRONIC DEVICE

[0003] The disclosure relates to an optoelectronic device comprising a light-emitting component, for example a laser component, and an optical component, for example a chip with a photonically integrated circuit, which are coupled together to transmit light.

[0004] In communication technology, the transmission of information via light signals is becoming increasingly important. For this purpose, light-emitting components, such as lasers, must be coupled with active or passive optical components. For example, an edge-emitting laser component / laser edge emitter (EEL) must be optically connected to an optical chip with a photonically integrated circuit in order to feed the emitted laser light into an optical waveguide of the optical component for further processing.

[0005] The mechanical alignment required for optical coupling must be so precise that the light emitted by the laser-emitting component is coupled into an optical waveguide of the optical component with minimal loss, so that it can be further processed, for example, by the photonically integrated circuit. For this to occur, the light-emitting surface or facet of the laser-emitting component must be precisely aligned with the light-entry surface or facet of the optical component. Therefore, an optoelectronic device is needed in which a laser-emitting component is efficiently connected to an optical component with respect to the light power to be transmitted.

[0006] Such an optoelectronic device, in which laser light can be transmitted between a laser light emitting component and an optical component with as little loss as possible, is specified in claim 1.

[0007] The optoelectronic device comprises a laser light-emitting component and an optical component with an optical waveguide. The laser light-emitting component has a first end face with a light-exit surface for emitting the laser light. The optical component has a second end face with a light-entry surface at which the laser light can be coupled into the optical waveguide. The laser light-emitting component is arranged relative to the optical component such that the first end face and the second end face are opposite each other.

[0008] The laser-emitting component has at least one first alignment structure on its first end face. The optical component has at least one second alignment structure on its second end face. The first and second alignment structures are complementary to each other in order to align the laser-emitting component with the optical component such that the light-exit surface and the light-intake surface are opposite each other, thereby coupling the laser light into the optical waveguide of the optical component when it is emitted by the laser-emitting component.The complementary structuring of the light-emitting surface or facet of the laser light-emitting component and the light-entry surface or facet of the optical component enables self-alignment or self-centering of the laser light-emitting component to the optical component by purely mechanical means. The proposed optoelectronic device concept thus allows for passive alignment of the light-emitting surface of the laser light-emitting component to the light-entry surface of the optical component by using complementary geometries of the first and second alignment structures on the first and second end faces, and therefore close to the light-emitting surface of the laser light-emitting component and the light-entry surface of the optical component.In contrast to a cost-intensive active alignment strategy, the proposed passive concept enables cost-effective self-centering of the light-emitting surface to the light-entry surface and thus an efficient and low-loss coupling of the laser light-emitting component to the optical component.

[0009] According to one possible embodiment of the optoelectronic device, the laser light-emitting component has an epitaxial stack of several layers. The multiple layers are arranged in a plane that extends in a first direction, for example, the x- or longitudinal direction of the optoelectronic device, in which the laser light is also transmitted, and a second direction, for example, the horizontal y-direction. The first direction (x- or longitudinal direction) is oriented perpendicular to the first end face of the laser light-emitting component. The second direction (y- or horizontal direction) lies within the plane of the first end face of the laser light-emitting component.

[0010] The multiple layers of the stack are arranged one above the other in a third direction, for example, a z- or vertical direction. This third direction is oriented perpendicular to the respective multiple layers of the stack. The first, second, and third directions are perpendicular to each other.

[0011] When the laser light emitting component is designed as an edge emitter with a so-called ridge waveguide structure, an active zone is created between p- and n-doped layers of the layer stack in a plane parallel to the epitaxial layer structure, in which an optical mode of the laser light is guided, for example, in the first direction (longitudinal direction, x-direction) and coupled out at the light exit surface on the first end face.

[0012] According to one possible embodiment of the optoelectronic device, the first and second alignment structures are designed such that they interlock when their end faces are opposite each other. During the manufacturing of the optoelectronic device, the laser-emitting component and the optical component are moved towards each other in the first direction, i.e., in the x- or longitudinal direction. When the first and second end faces are approached to within a small distance, the first and second alignment structures interlock. According to another possible embodiment, the first and second alignment structures are designed such that the first and second end faces are displaceable relative to each other in the second direction, i.e., the y- or horizontal direction, due to the interlocking of the first and second alignment structures.As the first and second end faces approach each other, the light exit surface is passively aligned with the light entry surface in a horizontal direction, thus aligning an optical axis of the laser light emitting component with an optical axis of the optical component.

[0013] According to one possible embodiment of the optoelectronic device, the first end face, when viewed in a longitudinal section along the first direction (x- or longitudinal direction), i.e., a horizontal longitudinal section or a top view of the xy-plane, has a first region and a second region. The first region surrounds the light-emitting surface. The second region extends from the first region to an edge of the first end face. The entire second region of the first end face of the laser-emitting component can be configured as the first alignment structure. The first alignment structure thus extends along the first end face directly from an edge of the light-emitting surface to the edge of the first end face.

[0014] According to another embodiment of the optoelectronic device, the second end face of the optical component, when viewed in a longitudinal section along the first direction, has a first region, a second region, and a third region. The first region of the second end face extends from the light entrance surface of the optical component to the second region of the second end face. The second region of the second end face extends from the first region of the second end face to the third region of the second end face. The third region of the second end face extends from the second region of the second end face to an edge of the second end face. According to one possible embodiment of the optoelectronic device, the entire second region of the second end face can be configured as the second alignment structure.

[0015] According to one possible embodiment of the optoelectronic device, the second region of the first end face, when viewed in a longitudinal section through the optoelectronic device, extends obliquely or at an angle to the second direction along the first direction. Similarly, the second region of the second end face, when viewed in a longitudinal section through the optoelectronic device, can extend obliquely or at an angle to the second direction along the first direction.

[0016] When the first end face of the laser light emitting component is brought close to the second end face of the optical component during the assembly of the optoelectronic device, the inclined surface of the first alignment structure slides along the complementary inclined surface of the second alignment structure of the optical component, so that a passive self-alignment of the light exit surface to the light entry surface occurs when the first and second end faces are brought close together, so that the laser light generated by the laser light emitting component can be coupled into the optical waveguide of the optical component with minimal loss.According to another possible embodiment of the optoelectronic device, at least the second region of the first end face of the laser light-emitting component and / or the second region of the second end face of the optical area has a coating to reduce friction between the first and second end faces. By suitable coating of the first and / or second alignment structure, for example with an oxide such as silicon dioxide, the complementary surfaces of the first and second alignment structures slide particularly easily against each other during assembly, especially when the first and second end faces are brought close together, thus preventing damage and misalignment of the alignment structures during self-centering.

[0017] According to another possible embodiment of the optoelectronic device, the first alignment structure can be arranged on the first end face of the laser-emitting component, either symmetrically or asymmetrically with respect to the light-emitting surface. Likewise, the second alignment structure can be arranged on the second end face of the optical component, either symmetrically or asymmetrically with respect to the light-intake surface. Thus, the first and second alignment structures do not need to be perfectly symmetrical with respect to the respective optical axis of the laser-emitting component and the optical component, respectively.

[0018] According to another possible embodiment, the optoelectronic device includes a guide element for aligning the first end face of the laser light-emitting component parallel to the second end face of the optical component. The laser light-emitting component has a third end face opposite the first end face. According to one possible embodiment, the guide element can be positioned closer to the third end face than to the first end face of the laser light-emitting component. The guide element enables angular alignment of the laser light-emitting component with respect to the optical component. This prevents the first end face of the laser light-emitting component from tilting relative to the second end face of the optical component, thus ensuring that the first and second end faces are parallel to each other.

[0019] According to one possible embodiment, the optoelectronic device comprises a support element for aligning the first end face of the laser light-emitting component with the second end face of the optical component in the third direction, i.e., the z- or vertical direction. The support element can be arranged on the optical component.

[0020] During the assembly of the optoelectronic device, the laser light-emitting component is lowered, for example, in a third direction into a cavity of the optical component. The support element can be arranged at the bottom of the cavity, so that the lowering movement of the laser light-emitting component into the cavity of the optical component is stopped as soon as a lower side surface of the laser light-emitting component rests on the support element.

[0021] While the first and second alignment structures, which are arranged on the first and second end faces, mainly serve to align the light-exit surface of the laser light-emitting component to the light-intake surface of the optical component in the second direction, i.e. the y- or horizontal direction, the support element arranged on the optical component enables alignment of the light-exit surface of the laser light-emitting component to the light-intake surface of the optical component in the third direction, i.e. in the z- or vertical direction.

[0022] According to another embodiment of the optoelectronic device, a spacer element is arranged on the first end face of the laser light-emitting component and / or on the second end face of the optical component. The spacer element serves to align the first and second end faces in the first direction, i.e., the x-direction. This allows the distance between the first and second end faces, or between the light-exit surface and the light-intake surface, to be precisely adjusted.

[0023] According to another possible embodiment of the optoelectronic device, the laser-emitting component is designed such that an optical mode spreads out along the first direction (i.e., the x- or longitudinal direction) towards the light-emitting surface of the component in the second direction (i.e., the y- or horizontal direction). Similarly, the optical component is designed such that a mode guided in the optical waveguide, for example, an intrinsic mode, spreads out along the first direction (x-direction) towards the light-entry surface of the optical component in the second direction (y- or horizontal direction). By spreading the laser light or laser mode generated in the active zone of the layer stack of the laser-emitting component, the alignment tolerance is increased in the second direction (i.e., the y- or horizontal direction).

[0024] According to one possible embodiment of the optoelectronic device, the laser light-emitting component has a layer formed as a ridge, a so-called laser ridge, in one of the several layers of the layer stack. The ridge can, for example, be formed as the uppermost or lowermost layer of the layer stack when viewed from the top of the first end face of the laser light-emitting component in the second direction / y-direction.

[0025] In this embodiment, the laser light-emitting component is designed with a ridge waveguide structure. Lateral waveguiding is achieved such that a light mode in the active zone is guided beneath the ridge. The ridge widens along the first direction (x-direction) towards the light-emitting surface in the second direction (y-direction, or horizontal direction). Accordingly, the optical component is designed such that the optical waveguide widens along the first direction (x-direction) towards the light-emitting surface in the second direction (y-direction, or horizontal direction).

[0026] This causes the light mode transmitted in the active zone along the optical axis of the laser-emitting component to expand towards the light-emitting surface. Since the optical waveguide on the optical component is also expanded towards the light-intake surface, the horizontal alignment tolerance of the laser-emitting component relative to the optical component is advantageously increased. According to one possible embodiment of the optoelectronic device, the laser-emitting component can be a laser edge emitter and the optical component an optoelectronic component with a photonically integrated circuit.

[0027] Various implementation forms of the optoelectronic device are described below using figures.

[0028] They show:

[0029] Figure 1A shows a top view of an optoelectronic device with a laser light emitting component and an optical component, as well as cross-sections through the laser light emitting component and the optical component, each with a guide for a eigenmode;

[0030] Figure 1B shows the coupling efficiency of the light coupled from a laser light-emitting component into an optical waveguide of an optical component as a function of a horizontal or vertical offset of a light exit facet of the laser light-emitting component and a light entry facet of the optical component;

[0031] Figure 2A shows a laser light-emitting component with a first end face and a first alignment structure and an optical component with a second end face and a second alignment structure at a distance from each other; Figure 2B shows an optoelectronic device with a laser light-emitting component aligned to an optical component of the optoelectronic device;

[0032] Figures 3A to 3F show different embodiments of a first alignment structure on a first end face of a laser light emitting component and a second alignment structure on a second end face of an optical component of an optoelectronic device;

[0033] Figure 4 shows another embodiment of a first alignment structure on a first end face of a laser light emitting component;

[0034] Figure 5A shows an embodiment of an optoelectronic device with a guide element and a support element for aligning the respective end faces of a laser light emitting component and an optical component;

[0035] Figure 5B shows another embodiment of an optoelectronic device with a guide element and a support element for aligning the respective end faces of a laser light emitting component and an optical component;

[0036] Figure 6 shows an embodiment of an optoelectronic device with a laser light emitting component with an expansion of a ridge waveguide structure and with an optical component with an expansion of an optical waveguide; and Figure 7 shows an embodiment of an optoelectronic device as an RGB emitter with alignment structures of laser light emitting components and an optical component that are complementary to each other.

[0037] In the examples and figures, identical, similar, or similarly functioning elements may each be provided with the same reference symbols. The depicted elements and their relative sizes are not to be considered to scale; rather, individual elements, such as components, building elements, and areas, may be exaggeratedly large for better illustration and / or understanding.

[0038] Figure 1A shows a top view in a first direction, i.e., in the z- or vertical direction, of a laser light-emitting component 100, which is coupled to an optical component 200 for the transmission of laser light. The laser light-emitting component 100 can, for example, be configured as a laser edge emitter. The optical component 200 can be configured as an optical chip with a photonically integrated circuit.

[0039] The laser-emitting component 100 has an epitaxial stack of several layers. The several layers are arranged in a plane that extends in a first direction (x-direction or longitudinal direction, or transverse direction) and in a second direction (y-direction, horizontal or lateral direction). The first direction (x-direction / longitudinal direction) is oriented perpendicular to an end face 110 of the laser-emitting component. The second direction (y-direction / horizontal / lateral direction) lies in the plane of the end face 110. The several layers of the stack are arranged one above the other in a third direction (z-direction or vertical direction). The third direction is oriented perpendicular to the respective layers of the stack.The first (x-, longitudinal) direction, the second (y-, horizontal) direction, and the third (z-, vertical) direction are perpendicular to each other. These three directions are maintained in the description of the subsequent figures.

[0040] As mentioned at the outset, the laser light-emitting component 100 has a vertical layer structure comprising a sequence of epitaxially fabricated layers. The epitaxial layer stack includes, in particular, a p-waveguide layer and an n-waveguide layer, between which an active zone forms. When a voltage is applied to contact layers of the layer stack, a light mode is guided within this zone. Lateral guidance of the light mode in the x-direction can be achieved by appropriately etching one of the outer layers 102 of the layer stack to create a ridge, or (laser) ridge 101, with a width w.

[0041] In the laser-emitting component 100 shown in Figure 1A, the light mode is generated in the active zone below the ridge 101 when the component 100 is energized. The light mode is guided in the x-direction between the front end face 110 and a mirrored rear end face 140 in the active zone. The laser light is extracted at a light exit surface / facet 120 on the end face 110 of the component 100.

[0042] The optical component 200 has a stack of layers with different refractive indices. In the embodiment of the optical component 200 shown as an example in Figure 1A, a layer with a higher refractive index, for example a silicon nitride layer, is arranged between surrounding layers of a material with a lower refractive index, for example silicon dioxide. By appropriately structuring the layers, as shown, for example, in the lower right image of Figure 1A, an optical waveguide 201 can be realized in which a waveguide mode can propagate in the x-direction.

[0043] Figure 1A shows in the lower left image the guidance of a transverse light mode (Eigenmode) in the active zone of the laser-emitting component below the ridge 101. The vertical mode profile in the z-direction is determined by the structure of the epitaxial layer stack. The horizontal mode profile in the y-direction is determined in particular by the width w of the ridge 101, which is approximately 1.8 pm for blue light, for example.

[0044] For optical coupling of the laser light-emitting component 100 with the optical component 200, the two components are brought close together so that the end face 110 of the laser light-emitting component 100 and the end face 210 of the optical component 200 are positioned close to each other. The optical coupling efficiency depends in particular on the spatial overlap of the optical mode guided in the active zone of the laser light-emitting component 100 and the waveguide mode guided in the optical waveguide 201.

[0045] Figure 1B shows the light coupling efficiency as a function of the orientation of the light exit surface / facet 120 of the laser light emitting component 100 relative to the light entrance surface 220 of the optical component 200. As can be seen from the diagram, even a small offset in the vertical direction (z-direction) leads to a large decrease in the coupling efficiency. In the horizontal / lateral direction (y-direction), the offset or tolerance required to achieve the same coupling efficiency as in the vertical, z-direction is somewhat larger. The alignment tolerance in the longitudinal direction, that is, the tolerance with respect to the distance between the light exit facet 120 and the light entry facet 220, depends in particular on the diffraction of the laser light between the light exit facet 110 and the light entry facet 220.The diffraction of the laser light in turn depends on the lateral extent of the optical mode, the wavelength and the medium between the two facets 120 and 220.

[0046] For example, to achieve a coupling efficiency of 90% of the maximum possible coupling efficiency for blue light, the offset between the light-emitting surface 120 of the laser light emitting component and the light-intake surface 220 of the optical component 200 should be less than 100 nm in the vertical (z-direction) and less than 400 nm in the horizontal / lateral (y-direction). The distance between the two end faces 110 and 210 should be less than 500 nm in the x-direction. Figure 2A shows the laser light emitting component 100 with the ridge 101 and the active zone 102 for guiding a laser light mode in the transverse and longitudinal (x-direction) directions, respectively. The laser light emitting component further has an end face 110 with a light exit surface f 120 for emitting the generated laser light at an edge of the component 100.The laser light emitting component 100 can in particular be designed as a laser edge emitter.

[0047] The optical component 200 comprises an optical waveguide 201 for guiding the laser light coupled into the optical component 200 from the laser light-emitting component 100. The optical component 200 further comprises an end face 210 with a light-entry surface 220, at which the laser light emitted by the component 100 can be coupled into the optical waveguide 201. In addition to the optical waveguide 201, the optical component may have a photonically integrated circuit connected to the waveguide 201 to implement its intended functions. The laser light-emitting component 100 is arranged relative to the optical component 200 such that the two end faces 110 and 210 face each other.

[0048] To precisely align the light-emitting surface 120 with the light-intake surface 220, so that light from the laser-emitting component 100 can be coupled into the optical waveguide 201 of the optical component 200 with low loss and thus high coupling efficiency, the laser-emitting component 100 has at least one alignment structure 130 on its end face 110. The optical component 200 also has at least one alignment structure 230 on its end face 210. The two alignment structures 130 and 230 are designed to be complementary to each other in order to align the laser light emitting component 100 to the optical component 200 in such a way that the light exit surface 120 is opposite the light entry surface 220 in such a way that the laser light is coupled into the optical waveguide 201 in the case of emission of laser light by the laser light emitting component 100.In particular, the complementary design of the two alignment structures 130 and 230 ensures that the light exit surface 120 and the light entry surface 220 are aligned with a horizontal / lateral offset in the y-direction of less than 400 nm, so that the laser light emitted by the laser light emitting component 100 can be coupled into the optical waveguide 201 of the optical component 200 with minimal loss.

[0049] Figure 2B shows an optoelectronic device 10 with the laser light-emitting component 100 and the optical component 200, which are optically coupled. During assembly of the optoelectronic device 10, the laser light-emitting component 100 and the optical component 200 are moved towards each other. For example, the laser light-emitting component 100 can be moved towards the optical component 200 until the end faces 110 and 210 are opposite each other.

[0050] The laser light-emitting component 100 can be soldered to the optical component 200 at its underside. For example, a substrate of the optical component 200 can have a cavity in which the laser light-emitting component is inserted and fixed to the optical component 200 at the bottom surface of the cavity. During soldering, a tensile force is generated in the vertical (z-direction) as well as in the longitudinal (x-direction), which moves the laser light-emitting component 100 with its end face 110 onto the end face 210 of the optical component in the direction of the arrow shown in Figure 2B.

[0051] The alignment structures 130 and 230 are designed such that they interlock when the two end faces 110 and 210 approach each other. In particular, the alignment structures 130 and 230 are designed such that the end faces 110 and 210 are aligned parallel to each other when the alignment structures 130 and 230 interlock. Accordingly, the light-emitting surface 120 and the light-intake surface 220 are also aligned parallel to each other.

[0052] Furthermore, the two alignment structures 130 and 230 are designed such that, during the assembly of the optoelectronic device, the end face 110 of the laser light emitting component 100 and the end face 210 of the optical component 200 can be displaced relative to each other in the second direction, i.e. the horizontal y-direction, by the interlocking of the two alignment structures 130 and 230. The complementary geometries of the alignment structure 130 of the laser light emitting component 100 and the alignment structure 230 of the optical component 200 enable a self-alignment of the light exit surface 120 to the light entry surface 220 and thus a self-centering of the optical axes of the laser light emitting component 100 and the optical component 200, especially in the horizontal y-direction.The alignment structure 130 of the laser light-emitting component 100 is arranged on the end face 110, where the light-exit surface 120 is also located. The alignment structure 130 is, for example, arranged in the horizontal plane in which the light-exit surface 120 is also located. The alignment structure 130 is thus arranged vertically at the height of the optical axis of the laser light-emitting component 100. The alignment structure 230 of the optical component 200 is arranged on the end face 210, where the light-entry surface 220 is located in the optical waveguide 201. The alignment structure 230 is, for example, arranged in the horizontal plane in which the light-entry surface 220 is also located. The alignment structure 230 is thus arranged in a vertical direction at the height of the optical axis of the optical waveguide 201 of the optical component 200.

[0053] The alignment structures 130 and 230 are located on the end faces 110 and 210, preferably in the immediate vicinity of the light emission facet 120 and the light entry facet 220, respectively. This allows for very precise alignment of the light emission surface 120 with the light entry surface 220.

[0054] To produce the alignment structure 130, the end face 110 of the laser light-emitting component 100 can be etched to a sufficient depth, starting from the side of the epitaxial layer stack on which the ridge or laser ridge structure 101 is located. It is therefore not necessary to etch the entire layer stack on the end face 110 in the vertical z-direction. The alignment structure 230, which is provided complementary to the alignment structure 130 on the end face 210 of the optical component 200, can be etched to a corresponding depth, so that complete removal of the material is also not required in the area of ​​the end face 210 of the optical component 200.

[0055] Figures 3A to 3F show, in a longitudinal section through the optoelectronic device 10 along the x-direction, exemplary possible embodiments of the alignment structure 130 of the laser light-emitting component 100 on the end face 110 and complementary embodiments of the alignment structure 230 of the optical component 200 on the end face 210. It should be noted that further embodiments are possible.

[0056] In the embodiments shown in Figures 3A and 3C to 3F, the end face 110 has a region 111 surrounding the light emission surface 120 and a region 112 extending from region 111 to an edge of the end face 110. In the embodiments of Figures 3A, 3C, 3D, and 3F, the entire region 112 of the end face 110 is configured as the alignment structure 130. In the embodiment shown in Figure 3B, the end face 110 additionally has a region 113 extending from region 112 to an edge of the end face 110. The area 112, which forms the alignment structure 130 on the end face 110, extends obliquely or at an angle, i.e. not parallel, to the horizontal y-direction in the longitudinal section through the optoelectronic device shown in Figures 3A to 3F.

[0057] The end face 210 has a region 211 extending from the light-entry surface 220 to a region 212 of the end face 220. Region 212 of the end face 210 extends from region 211 to a region 213 of the end face 210. Region 213 of the end face 210 extends from region 212 to an edge of the end face 210. The entire region 212 of the end face 210 is configured as the alignment structure 230 in the embodiments shown in Figures 3A to 3F.

[0058] The area 212 of the end face 210, forming the alignment structure 230, extends obliquely or at an angle, as does the area 112 of the end face 110, forming the alignment structure 110, and thus not parallel to the horizontal y-direction. When the two end faces 110 and 210 approach each other during the assembly of the optoelectronic device, the surface of area 112 of the end face 110 slides on the surface of area 212 of the end face 210 due to the complementary angles, so that a passive self-alignment occurs between the laser light-emitting component 100 and the optical component 200, in which the optical axes of the laser light-emitting component and the optical component 200 are aligned with each other.

[0059] As shown by way of example in Figure 2A, the region 112 of the end face 110 and / or the region 212 of the end face 210 can, according to an advantageous embodiment of the optoelectronic device, have a coating 300 to reduce friction between the two end faces 110 and 210. This facilitates the sliding of the surfaces of the two alignment structures 130 and 230 against each other and thus the passive self-alignment of the two components 100 and 200. Figures 3C and 3D show embodiments of the optoelectronic device in which a spacer element 600 is arranged on at least one of the end faces 110 and / or 210.By providing such a spacer element 600, the distance between the light-emitting surface 120 and the light-intake surface 220, and thus the distance between the laser-emitting component 100 and the optical component 200 in the x-direction, can be precisely adjusted so that the light-emitting surface 120 and the light-intake surface 220 are, for example, less than 500 nm apart. This prevents mechanical damage in the facet area during self-alignment and simultaneously minimizes losses due to diffraction in the narrow gap between the light-emitting surface 120 and the light-intake surface 220 during light coupling.

[0060] Figure 3E shows an embodiment of the laser light emitting component 100 and the optical component 200, in which the alignment structures 130 and 230 are arranged as triangular projections or complementary recesses in the area 111 of the end face 110 or the area 211 of the end face 230 respectively.

[0061] The alignment structures 130 and 230 can be arranged symmetrically to the light emission surface 120 and the light entry surface 220, respectively, as shown in the embodiments shown in Figures 3A to 3E. According to another possible embodiment, as shown by way of example in Figure 3F, the two alignment structures 130 and 230 can also be arranged asymmetrically to the light emission surface 120 and the light entry surface 220, respectively. Figure 4 shows another possible embodiment of the laser light-emitting component 100, in which the alignment structure 130 extends along the front face 110 in the vertical, z-direction.The alignment structure 130 runs obliquely to the z-direction, so that with a correspondingly complementary design of the alignment structure 230 the end faces of the laser light emitting component 100 and the optical component 200 slide towards each other during the approach in the x-direction and thus an alignment of the light exit surface 120 to the light entry surface 220 can take place.

[0062] Figures 5A, 5B, and 6 show embodiments of the optoelectronic device 10, in which the laser light-emitting component 100 is arranged in a cavity 250 of the optical component 200. To fix the laser light-emitting component 100 to the optical component 200, a solder material can be arranged between the bottom of the cavity 250 and an underside of the laser light-emitting component. During the liquefaction and subsequent cooling of the solder material, a vertical (soldering) tensile force occurs in the z-direction, which can also have a force component in the longitudinal or x-direction, causing the laser light-emitting component 100 to move towards the optical component 200 in the direction of the arrow shown in Figure 2B.

[0063] As a result of the movement of the laser light emitting component in the direction of the optical component, the alignment structures 130 and 230 interlock and, in particular due to their complementary beveled geometries, cause a horizontal self-alignment of the light exit surface 120 to the light entry surface 220 and thus a centering of the optical axes of the laser light emitting component 100 and the optical component 200.

[0064] As shown in Figures 5A and 5B, a guide element 400 can be provided to align the end face 110 parallel to the end face 210. The guide element 400 is, for example, arranged close to the end face 140 opposite the end face 110. The guide element 400 prevents the end face 110 from tilting laterally in the horizontal y-direction relative to the end face 210 when the end face 110 of the laser light-emitting component 100 is moved towards the end face 210 of the optical component 200.

[0065] The guide element 400 can, for example, have legs 401 that project from the cavity 250. The laser light-emitting component 100 is arranged between the legs 401 of the guide element 400. During the manufacture of the optoelectronic device, the legs 401 enable the laser light-emitting component 100 to be guided longitudinally onto the optical component 200 in such a way that tilting of the end faces 110 and 210 is prevented.

[0066] In the embodiment shown in Figure 5B, the guide element 400 has pins 402 that extend vertically, in the z-direction, from the bottom of the cavity 250 into recesses or through-holes 150 of the laser light-emitting component 100. Due to the chamfered geometry of the pins 402 of the guide element 400, this embodiment also ensures an angular alignment of the laser light-emitting component 100 with respect to the optical component 200, thus preventing tilting or misalignment of the two end faces 110 and 210 in the horizontal direction. A support element 500, arranged on the optical component 200, can be provided to align the light-exit surface 110 with the light-intake surface 210 in the vertical, z-direction. Figures 5A and 5B show an example of a support element 500 in the form of base elements arranged in the cavity 250 of the optical component 200.The laser light emitting component 100 rests with its underside on the base elements, the height of which determines the orientation of the light exit surface of the laser light emitting component to the light entry surface of the optical component in the vertical, z-direction.

[0067] To increase the alignment tolerance in the horizontal y-direction, the laser light-emitting component 100 can be designed such that an optical mode spreads out in the horizontal y-direction along the x-direction, or longitudinal direction, of the laser light-emitting component and thus along an optically active zone of the epitaxial layer stack towards the light exit surface 120. Similarly, the optical component 200 can be designed such that an optical mode (waveguide mode) guided in the optical waveguide 201 spreads out in the horizontal y-direction along the x-direction towards the light entrance surface 220. Due to the widening of the optical modes in the horizontal direction in the area of ​​the light exit surface 120 and the light entry surface 220, the horizontal zonal alignment tolerance of the components 100 and 200 can be increased.

[0068] If the laser light-emitting component 100 is one that leads to a

[0069] The optical component 200 has a layer 102 formed by a bridge / (laser) ridge 101, which serves for mode guiding. The bridge or ridge 101 can widen in the y-direction along the x-direction towards the light exit surface 120. Similarly, the optical component 200 can be designed such that the optical waveguide 201 widens in the y-direction along the x-direction towards the light entrance surface 220.

[0070] One such embodiment of the optoelectronic device is shown in Figure 6. The ridge 101 is narrow at the rear end face 140 for guiding a single mode, for example with a width of 1.8 pm. The ridge 101 can widen along the x-direction and thus towards the light exit surface 120, for example to a width of more than 1.8 pm up to 20 pm, in particular to a width between 5 pm and 20 pm. Correspondingly, the optical waveguide 201 of the optical component 200 is also widened at the light entrance surface 220 and tapers with increasing distance from the light entrance surface 220. Due to the narrow width of the ridge 101, a single transverse mode spreads in the active zone of the laser light emitting component 100, which widens towards the light exit surface 120 in the horizontal / y-direction.Due to the also widened optical waveguide mode at the light entry surface 220 into the optical component, the horizontal alignment tolerance of the laser light emitting component 100 to the optical component 200 can be increased.

[0071] Figure 7 shows a possible application of the proposed concept, in which the optoelectronic device 10 is configured as an RGB beam combiner. The optical component 200 has optical waveguides 201a, 201b, and 201c into which laser light of different wavelengths is fed by the laser light-emitting components 100a, 100b, and 100c. The laser light-emitting components 100a, 100b, and 100c have alignment structures on their end faces in the region of the respective light-exit surface. These alignment structures engage with complementary alignment structures on the light-intake surfaces of the optical component 200, thus enabling self-alignment or self-centering of the respective light-exit surfaces relative to the light-intake surfaces.To increase the alignment tolerance in the horizontal direction, the laser light-emitting components 100a, 100b, and 100c are structured such that the respective transmitted light mode is widened in the horizontal y-direction in the area of ​​the light-emitting surface. For this purpose, the laser light-emitting components 100a, 100b, and 100c can each have a ridge structure that widens in cross-section in the y-direction towards the respective light-emitting surfaces / facets.

[0072] The optoelectronic device comprising the laser-emitting component and the optical component is not limited to the description provided in the exemplary embodiments. Rather, the disclosed subject matter encompasses every new feature and every combination of features, which in particular includes every combination of features in the claims, even if that feature or combination is not explicitly specified in the claims or exemplary embodiments. For example, the laser-emitting component may also have multiple (laser) ridges and thus multiple separately addressable light-exit facets and correspondingly multiple alignment structures. Likewise, the optical component may also have a corresponding plurality of optical waveguides. The patent application claims priority from German patent application DE 102024115244.3, the disclosure content of which is hereby incorporated by reference.

[0073] Reference character list

[0074] 10 optoelectronic device

[0075] 100 laser light emitting component

[0076] 101 Bridge / (Laser-) Ridge

[0077] 102nd shift

[0078] 110 Front surface

[0079] 120 light emission area

[0080] 130 Alignment structure

[0081] 140 Front surface

[0082] 150 Recess / Through hole

[0083] 200 optical components

[0084] 201 optical fibers

[0085] 210 Front surface

[0086] 220 light entry area

[0087] 230 alignment structure

[0088] 300 coating

[0089] 400 guide element

[0090] 500 support element

[0091] 600 spacer element

Claims

Patent claims 1. Optoelectronic device comprising: - a laser light emitting component (100) , - an optical component (200) with an optical waveguide (201) , - wherein the laser light emitting component (100) has a first end face (110) with a light exit surface (120) for emitting the laser light, - wherein the optical component (200) has a second end face (210) with a light entry surface (220) at which the laser light can be coupled into the optical waveguide (201), - wherein the laser light emitting component (100) is arranged relative to the optical component (200) such that the first and second end faces (110, 210) are opposite each other, - wherein the laser light emitting component (100) has at least one first alignment structure (130) on the first end face (110) and the optical component (200) has at least one second alignment structure (230) on the second end face (210), - wherein the first and second alignment structure (130, 230) are designed to be complementary to each other in order to align the laser light emitting component (100) to the optical component (200) such that the light exit surface (120) and the light entry surface (220) are opposite each other, whereby the laser light is coupled into the optical waveguide (201) in the case of emission of laser light by the laser light emitting component (100).

2. Optoelectronic device according to claim 1, - wherein the laser light emitting component (100) has an epitaxial stack of several layers, - wherein the multiple layers are arranged in a respective plane extending in a first direction (x) and a second direction (y), - wherein the first direction (x) is oriented perpendicular to the first end face (110), - where the second direction (y) lies in the plane of the first end face (110), - wherein the multiple layers are arranged one above the other in a third direction (z), wherein the third direction (z) is oriented perpendicular to the respective multiple layers of the layer stack, - where the first, second and third directions (x, y, z) are perpendicular to each other.

3. Optoelectronic device according to claim 2, wherein the first alignment structure (130) and the second alignment structure (230) are designed such that the first and second end faces (110, 210) are displaceable relative to each other in the second direction (y) by the interlocking of the first and second alignment structures (130, 230).

4. Optoelectronic device according to one of claims 2 or 3, - wherein the first end face (110) in a longitudinal section through the optoelectronic device (10) along the first direction (x) has a first region (111) surrounding the light emission surface (120) and a second region (112) extending from the first region (111) to an edge of the first end face (110), - wherein the second area (112) of the first end face (110) is formed as the first alignment structure (130).

5. Optoelectronic device according to claim 4, wherein the second area (112) of the first end face (110) extends in a longitudinal section through the optoelectronic device (10) along the first direction (x) obliquely to the second direction (y).

6. Optoelectronic device according to any one of claims 2 to 5, - wherein the second end face (210) has a first region (211), a second region (212) and a third region (213) when viewed in a longitudinal section through the optoelectronic device (10) along the first direction (x), - wherein the first area (211) of the second end face (210) extends from the light entry surface (220) to the second area (212) of the second end face (220), - wherein the second area (212) of the second end face (210) extends from the first area (211) of the second end face (210) to the third area (213) of the second end face (210), - wherein the third area (213) of the second end face (210) extends from the second area (212) of the second end face (210) to an edge of the second end face (210), - wherein the second area (212) of the second end face (210) is formed as the second alignment structure (230).

7. Optoelectronic device according to claim 6, wherein the second region (212) of the second end face (210) extends in a longitudinal section through the optoelectronic device (10) along the first direction (x) obliquely to the second direction (y).

8. Optoelectronic device according to one of claims 6 or 7, wherein at least the second area (112) of the first end face (110) and / or the second area (212) of the second end face (210) has a coating (300) to reduce friction between the first end face (110) and the second end face (210).

9. Optoelectronic device according to any one of claims 1 to 8 , - wherein the first alignment structure (130) is arranged symmetrically or asymmetrically on both sides of the first end face (110) with respect to the light emission surface (120), - wherein the second alignment structure (230) is arranged symmetrically or asymmetrically on both sides of the second end face (210) relative to the light entry surface (220).

10. Optoelectronic device according to any one of claims 1 to 9, comprising: - a guide element (400) for aligning the first end face (110) parallel to the second end face (210) , - wherein the laser light emitting component has a third end face (140) opposite the first end face (110), - wherein the guide element (400) is arranged closer to the third end face (140) than to the first end face (110).

11. Optoelectronic device according to any one of claims 1 to 10, comprising: - a support element (500) for aligning the first end face (110) in the third direction (z) to the second end face (210) , - wherein the support element (500) is arranged on the optical component (200).

12. Optoelectronic device according to any one of claims 1 to 11, - wherein the laser light emitting component (100) is designed such that an optical mode widens along the first direction (x) towards the light exit surface (120) in the second direction (y), - wherein the optical component (200) is designed such that an optical mode guided in the optical waveguide (201) widens in the second direction (y) along the first direction (x) towards the light entry surface (220).

13. Optoelectronic device according to any one of claims 1 to 12, - wherein the laser light emitting component (100) has a layer (102) formed into a bridge (101) in one of the several layers of the layer stack, - wherein the bridge (101) widens along the first direction (x) towards the light emission surface (120) in the second direction (y), - wherein the optical component (200) is designed such that the optical waveguide (201) widens along the first direction (x) towards the light entry surface (220) in the second direction (y).

14. Optoelectronic device according to one of claims 1 to 13, wherein a spacer element (600) is arranged on the first end face (110) and / or on the second end face (210).

15. Optoelectronic device according to any one of claims 1 to 14, - wherein the laser light emitting component (100) is designed as a laser edge emitter, - wherein the optical component (200) is an optoelectronic The component is formed with a photonically integrated circuit.

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