Optical measurement device, optical scanning device, and rotation device

Abstract

The present invention provides an optical measurement device with which it is possible to easily adjust the positional relationship between a first support device and a second support device. The optical measurement device comprises: a first support device that has a support part supporting an optical member through which measurement light passes, and that is capable of rotating about a first axis extending in a first direction; a second support device that supports the first support device along a second axis intersecting the first axis; and an adjustment part that adjusts the relative angular relationship between the first axis and the second axis. The first support device has a cylindrical member which extends in a first direction, and a shaft part which is provided with the support part supporting the optical member, which is disposed inside the cylindrical member via bearings respectively provided on both sides in the first direction, and which rotates about the first axis in order to change the orientation of the optical member. The adjustment part connects the cylindrical member of the first support device to the second support device and is capable of adjusting the positional relationship between the cylindrical member of the first support device and the second support device.

Description

Optical measurement device, optical scanning device and rotation device

[0001] The present invention relates to an optical measurement device, an optical scanning device, and a rotation device.

[0002] As this type of device, a device having a laser tracker has been proposed (see, for example, Patent Document 1).

[0003] U.S. Patent No. 6,667,798

[0004] One aspect of the present invention is an optical measurement device that measures a measurement object by irradiating measurement light toward the measurement object, the optical measurement device comprising: a first support device having a support part that supports an optical element through which the measurement light passes and that is rotatable around a first axis extending in a first direction; a second support device that supports the first support device along a second axis that intersects with the first axis; and an adjustment part that adjusts the relative angular relationship between the first axis and the second axis, wherein the first support device has a cylindrical member extending in the first direction, and a shaft part that is provided with the support part that supports the optical element, is disposed inside the cylindrical member via bearings provided on both sides in the first direction, and rotates around the first axis to change the orientation of the optical element, and the adjustment part connects the cylindrical member of the first support device to the second support device, and is capable of adjusting the positional relationship between the cylindrical member of the first support device and the second support device.

[0005] One aspect of the present invention is an optical scanning device comprising: a first support device having a support portion for supporting an optical element through which light passes and rotatable around a first axis extending in a first direction; a second support device supporting the first support device along a second axis intersecting the first axis; and an adjustment portion for adjusting the relative angular relationship between the first axis and the second axis, wherein the first support device has a tubular member extending in the first direction and a shaft portion having a support portion for supporting the optical element, the shaft portion being disposed inside the tubular member via bearings provided on both sides in the first direction, and rotating around the first axis to change the orientation of the optical element, and the adjustment portion connects the tubular member of the first support device to the second support device and is capable of adjusting the positional relationship between the tubular member of the first support device and the second support device.

[0006] One aspect of the present invention is a rotating device comprising: a first support device having a support portion that supports a supported member and that is rotatable around a first axis extending in a first direction; a second support device that supports the first support device along a second axis that intersects the first axis; and an adjustment portion that adjusts the relative angular relationship between the first axis and the second axis, wherein the first support device has a tubular member extending in the first direction and a shaft portion that is provided with a support portion that supports the supported member and is positioned inside the tubular member via bearings provided on both sides in the first direction, and that rotates around the first axis to change the orientation of the supported member, and the adjustment portion connects the tubular member of the first support device to the second support device and is capable of adjusting the positional relationship between the tubular member of the first support device and the second support device.

[0007] 4 is a perspective view showing the appearance of an optical measurement device. A see-through view showing the internal structure of an optical measurement device. A perspective view showing main parts of the gimbal mechanism of the first embodiment. A cross-sectional view taken along line A-A in FIG. 3. A cross-sectional view taken along line B-B in FIG. 3. A cross-sectional view taken along line CC in FIG. 4. A perspective view of a bracket on which a sensor unit is provided. A diagram showing an assembly procedure for a first support device. A view of the first support device as seen from the -X side. A view of the first support device as seen from the +X side. A view of the second adjustment unit as seen from the +Y side. A diagram showing an example of the optical path of measurement light. A cross-sectional view showing main parts of the gimbal mechanism of the second embodiment. A plan view of the first flexure member and the second flexure member. A diagram showing an example of how the optical measurement device is used. A diagram showing an example of a reflector attached to a robot arm. A cross-sectional view showing a modified example of the optical measurement device (optical scanning device).

[0008] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an optical measurement device, an optical scanning device, and a rotation device according to embodiments of the present invention will be described with reference to FIGS.

[0009] In the following description, expressions indicating relative or absolute positions, such as "parallel," "orthogonal," "center," and "coaxial," not only refer to such positions or states exactly, but also include positions or states in which the positions are displaced relative to each other by an angle or distance to obtain a tolerance or the same function. In the drawings used in the following description, the scale of each element may be changed appropriately to make each element recognizable. Furthermore, terms such as "first" and "second" are used only to distinguish elements from each other and are not used to specify the order of elements. Spatially relative terms such as "lower," "below," "lower side," "upper," and "top" may be used to facilitate explanation when describing the relationship of an element or feature to another element or feature as shown in the drawings. It should be understood that spatially relative terms are intended to include different orientations in addition to the orientation shown in the drawings. For example, an element described as being "lower" or "below" another element or feature would be oriented "above" that element or feature if the object in the drawing were inverted. Thus, the exemplary term "below" can encompass both an upward and downward orientation, and if the object is otherwise oriented (e.g., rotated 90 degrees or at another orientation), the spatially relative descriptors used herein can be interpreted accordingly.

[0010] [Optical Measurement Device] Fig. 1 is a perspective view showing the appearance of an optical measurement device 1. Fig. 2 is a perspective view showing the internal configuration of the optical measurement device 1.

[0011] The optical measurement device 1 measures a measurement object by irradiating the measurement object with measurement light. As shown in Fig. 1, the optical measurement device 1 includes a main body 2 and a mirror housing 3 that houses a mirror (optical member) M through which the measurement light passes. The mirror housing 3 is rotatable around a φ-axis (see Fig. 3) that extends along the Z-axis.

[0012] As shown in Fig. 2, the main body 2 houses an optical engine unit 40 and a control unit 70. The optical engine unit 40 and the control unit 70 will be described in detail later. The optical measurement device 1 also includes a gimbal mechanism 10 including a mirror housing portion 3. The gimbal mechanism 10 may be referred to as a "rotation device." The Z-axis direction may be the direction of gravity.

[0013] The φ axis does not have to extend along the Z axis (for example, the direction of gravity). The φ axis may extend along the X axis, for example. A state in which the optical measurement device 1 is placed so that the φ axis extends along the Z axis (for example, the direction of gravity) (see FIG. 1) is referred to as "vertical placement." The optical measurement device 1 may also be "placed horizontally (for example, placed so that the φ axis extends along the X axis)."

[0014] [First Embodiment of Gimbal Mechanism] A first embodiment of the gimbal mechanism 10 will be described with reference to Figs. 3 to 6. Fig. 3 is a perspective view showing the main parts of the gimbal mechanism 10. Fig. 4 is a cross-sectional view taken along line A-A in Fig. 3. Fig. 5 is a cross-sectional view taken along line B-B in Fig. 3. Fig. 6 is a cross-sectional view taken along line C-C in Fig. 4.

[0015] As shown in FIG. 3, the gimbal mechanism 10 includes a first support device 20 that supports the mirror M rotatably around a θ axis (which may also be referred to as a “first axis” or “elevation axis”) extending in a direction intersecting the Z axis (in FIG. 3, a first direction along the X axis), a second support device 30 that supports the first support device 20 rotatably around a φ axis (which may also be referred to as a “second axis along the second direction” or “azimuth axis”) that intersects the θ axis, and an adjustment unit 50 that adjusts the relative angular relationship between the θ axis and the φ axis.

[0016] The second support device 30 includes a movable part 31 and a fixed part 32. The first support device 20 and the movable part 31 constitute a part of the mirror housing part 3. Since the first support device 20 is rotatable around the φ axis, the direction in which the θ axis extends (i.e., the direction intersecting with the Z axis) changes in accordance with the rotation of the first support device 20 around the φ axis.

[0017] As shown in Fig. 4, the movable part 31 has parts 31a and 31d. A cylindrical hollow part 37 that forms part of the optical path of the measurement light L is formed in the part 31a. As shown in Fig. 4, the fixed part 32 has parts 32a, 32b, and 32c. That is, the fixed part 32 has a part 32a that is arranged above the mirror M in Fig. 4, a part 32b that is arranged below the mirror M in Fig. 4, and a part 32c that connects the part 32a and the part 32c.

[0018] The portions 32a, 32b, and 32c may be arranged so that the fixing portion 32 is, for example, U-shaped or U-shaped. The portions 32a, 32b, and 32c may be arranged so that the fixing portion 32 is, for example, H-shaped. With this configuration, the strength of the fixing portion 32 can be improved.

[0019] As shown in FIG. 4 , the portion 32a has a surface 321 facing the first support device 20 and a surface 322 opposite to the surface 321. The portion 32a has a tapered surface 323 that widens from the surface 321 toward the surface 322. Similarly, the portion 32b has a surface 324 facing the first support device 20 and a surface 325 opposite to the surface 324. The portion 32b has a tapered surface 326 that widens from the surface 324 toward the surface 325. As shown in FIG. 5 , the portion 32c has a surface 327 facing the first support device 20 and a surface 328 opposite to the surface 327. The portion 32c has a tapered surface 329 that widens from the surface 327 toward the surface 328. It is noted that one or two of the portions 32a, 32b, and 32c may have tapered surfaces, and the remaining portions may not have tapered surfaces.

[0020] When tapered surfaces are formed on each of the portions 32a, 32b, and 32c, the chamfering angles of the tapered surfaces may be made the same. This has the advantage of reducing processing costs. Also, the tapered surfaces of the portions 32a, 32b, and 32c are smoothly connected (in other words, form a single surface), which has the advantage of improving the design of the optical measurement device 1.

[0021] 3, the fixed portion 32 supports both ends of the movable portion 31 in the direction along the φ axis. In order for the fixed portion 32 to support the movable portion 31 rotatably around the φ axis, bearing members B1 and B2 such as ball bearings shown in FIG. 4 are disposed between the fixed portion 32 and the movable portion 31.

[0022] For example, as shown in Fig. 4, the movable part 31 of the second support device 30 supports both ends of the first support device 20 in a direction along the θ axis (corresponding to line CC in Fig. 4). In order for the movable part 31 to support the first support device 20 rotatably around the θ axis, a bearing AB having a first bearing AB1 and a second bearing AB2 shown in Fig. 6 is disposed between the movable part 31 and the first support device 20. The bearing AB includes a pair of angular bearings. Details of the bearing AB will be described later.

[0023] When the movable part 31 of the second support device 30 rotates around the φ axis, the first support device 20 supported by the movable part 31 also rotates around the φ axis. As a result, the mirror M supported by the first support device 20 also rotates around the φ axis.

[0024] The second support device 30 has a motor (second drive unit) 133 that rotates the movable part 31 around the φ axis, and an encoder 34 that detects the rotation angle of the movable part 31. The encoder 34 has a sensor unit 34a and a wheel unit 34b attached to, for example, the portion 31a of the movable part 31. Note that various existing aspects can be applied to the encoder 34, and therefore detailed description thereof will be omitted. The encoder 34 may also be referred to as a rotational displacement sensor.

[0025] In the direction in which the φ axis extends (i.e., the Z-axis direction), the encoder 34 is disposed on one side (upper side) of the mirror M, and the motor 133 is disposed on the other side (lower side) of the mirror M. In other words, only the encoder 34 may be disposed on one side of the mirror M, and only the motor 133 may be disposed on the other side of the mirror M. In other words, the motor 133 and the encoder 34 may be disposed in positions that sandwich the mirror M. The second support device 30 further has resin members 35 and 36 for the purpose of dustproofing and drip-proofing. The resin members 35 and 36 may also be referred to as cover members. The cover members 35, 36 may be made of metal or resin.

[0026] The first support device 20 will be described with reference to Figures 6 to 11. As shown in Figures 6 to 11, the first support device 20 has a shaft portion 21, a cylindrical member 22, an encoder (rotational displacement sensor) 24, a first pressing member 25, a second pressing member 26, and a motor (first drive unit) 23 shown in Figure 4. The motor 23 is capable of driving the shaft portion 21 to rotate around the θ axis. The motor 23 is disposed on the -X side of the first support device 20.

[0027] The tubular member 22 has a cylindrical shape extending in the θ-axis direction. The tubular member 22 is connected to the movable portion 31 via an adjustment unit 50 (described later). The tubular member 22 is supported by the movable portion 31 via the adjustment unit 50. The tubular member 22 has a hole 22a and a tubular member protrusion 22b. The hole 22a is disposed at approximately the center of the tubular member 22 in the θ-axis direction. The hole 22a penetrates the tubular member 22 in the radial direction centered on the θ-axis. A plurality of the hole portions 22a (e.g., four at 90° intervals) are disposed at intervals in the circumferential direction centered on the θ-axis. Of the hole portions 22a, the hole portion 22a that communicates with the movable portion 31b (see FIGS. 3 and 6) is formed to a size that does not block the measurement light L within a beam steering range of ±45 degrees and does not block the returning light with an increased diameter. The cylindrical member protrusion 22b protrudes from the inner peripheral surface of the cylindrical member 22 radially inward about the θ axis at a position on the −X side in the θ axis direction relative to the support portion 21c, over the entire circumference.

[0028] The shaft portion 21 extends along the θ axis and has a first fitting shaft portion 21 a, a second fitting shaft portion 21 b, a support portion 21 c, a first protrusion portion 21 d, and a second protrusion portion 21 e.

[0029] The support portion 21c supports the mirror M. The support portion 21c is formed at the bottom of a recess 21f provided in approximately the center of the shaft portion 21 in the θ-axis direction. The recess 21f is recessed from the outer peripheral surface on the -Y side of the shaft portion 21 to the +Y side. The recess 21f penetrates the shaft portion 21 along the Z-axis. The support portion 21c is planar and perpendicular to the radial direction centered on the θ-axis (hereinafter simply referred to as the "radial direction"). The shaft portion 21 rotates around the θ-axis to change the orientation of the mirror M.

[0030] The first protrusion 21d protrudes radially outward from the outer circumferential surface of the shaft portion 21 at a position on the -X side of the support portion 21c. The first fitting shaft 21a is disposed on the -X side of the first protrusion 21d. The first fitting shaft 21a is located at the end of the shaft portion 21 on the -X side.

[0031] The second protrusion 21e protrudes radially outward from the outer circumferential surface of the shaft portion 21 at a position on the +X side of the support portion 21c. The second fitting shaft 21b is disposed on the +X side of the second protrusion 21e. The second fitting shaft 21b is located at the end of the shaft portion 21 on the +X side. The first fitting shaft 21a and the second fitting shaft 21b are cylindrical and extend along the θ axis.

[0032] The shaft portion 21 is disposed inside the cylindrical member 22 via bearings AB provided on both sides of the θ axis. The bearings AB include a first bearing AB1 and a second bearing AB2. The first bearing AB1 and the second bearing AB2 each include a pair of angular bearings. The pair of angular bearings are arranged in a back-to-back configuration and are pressurized in the θ axis direction.

[0033] The first bearing AB1 is disposed on the -X side, which is one side in the θ-axis direction, of the support portion 21c. The first bearing AB1 has a first outer ring G1 and a first inner ring N1. The outer peripheral surface of the first outer ring G1 is fitted radially into the inner peripheral surface of the cylindrical member 22 with a clearance fit. The first outer ring G1 is sandwiched in the θ-axis direction between the cylindrical member protrusion 22b and a first pressing member 25. The first pressing member 25 is an annular plate-like body centered on the θ-axis. The first pressing member 25 is fixed from the -X side to the end face of the cylindrical member 22 on the -X side in the front θ-axis direction by a mounting screw 25a (see FIG. 8).

[0034] The first inner ring N1 has a first pressing ring 27 fixed and fitted to its radially inner side by shrink fitting or the like. The first fitting shaft portion 21a is fitted to the radially inner side of the first pressing ring 27 via a gap. The outer peripheral surface of the first fitting shaft portion 21a is fitted radially to the inner peripheral surface of the first pressing ring 27 by a clearance fit. The first inner ring N1 is sandwiched between the first protrusion 21d and the second pressing member 26. The second pressing member 26 is fitted to the outer peripheral surface of the tip of the first fitting shaft portion 21a from the radially outer side, and is fixed to the -X side end face of the shaft portion 21 with a mounting screw 26a (see FIG. 8) from the -X side.

[0035] In the first bearing AB1, in which a pair of angular bearings are arranged back-to-back, when adjacent first outer rings G1 come into contact with each other in an un-clamped state, a gap is formed between adjacent first inner rings N1 in the θ-axis direction. When adjacent first inner rings N1 are sandwiched between the first protrusion 21d and the second holding member 26 in the θ-axis direction and come into contact with each other, a force (pressure) is applied to the adjacent first outer rings G1 in a direction that moves them away from each other in the θ-axis direction. Meanwhile, a reaction force against the force from the first outer rings G1 is generated in the cylindrical member protrusion 22b and the first holding member 25, which sandwich the adjacent first outer rings G1, in a direction that moves them closer to each other. This reaction force is generated between the cylindrical member protrusion 22b and the first holding member 25 in a closed state and is canceled out, thereby suppressing deformation, etc., of the shaft portion 21 in which the recess 21f is formed.

[0036] The second bearing AB2 is disposed on the +X side of the support portion 21c. The second bearing AB2 is disposed on the +X side of the second cylindrical member protruding portion 22c, which protrudes radially inward from the inner peripheral surface of the cylindrical member 22 along the entire circumference at a position on the +X side of the support portion 21c. The second bearing AB2 has a second outer ring G2 and a second inner ring N2. The inner peripheral surface of the second inner ring N2 is fixedly fitted to the outer peripheral surface of the second fitting shaft portion 21b by shrink fitting or the like. The second inner ring N2 is sandwiched between the second protruding portion 21e and a third pressing member 28. The third pressing member 28 is fitted to the outer peripheral surface of the tip of the second fitting shaft portion 21b from the radial outside, and is fixed to the +X side end face of the shaft portion 21 from the +X side by a mounting screw or the like (not shown).

[0037] A retaining ring 29 is fixed and fitted to the radial outside of the second outer ring G2 by shrink fitting or the like. The retaining ring 29 is provided with a radial gap of several μm between it and the inner circumferential surface of the cylindrical member 22. In other words, the second outer ring G2 is provided so as not to be constrained in the radial direction or the θ-axis direction relative to the cylindrical member 22. By providing the second outer ring G2 including the second outer ring G2 so as not to be constrained in the radial direction or the θ-axis direction relative to the cylindrical member 22, it becomes possible to absorb the difference in thermal expansion between the shaft portion 21 and the cylindrical member 22.

[0038] The retaining ring 29 is pressurized radially inward by a pressurizing member, such as a ball plunger, which is provided on the cylindrical member 22 and has a biasing member, such as a spring. By applying pressure radially inward to the cylindrical member 22, the second outer ring G2 (second bearing AB2) is prevented from rattling in the radial direction.

[0039] In the second bearing AB2, in which a pair of angular bearings are arranged back-to-back, the second inner ring N2 is sandwiched between the second protrusion 21e and the third presser member 28 in the θ-axis direction, and as with the first bearing AB1, a force (pressure) is applied in a direction that moves the second inner rings N2 away from each other in the θ-axis direction when they come into contact. Meanwhile, a reaction force against the force from the second inner ring N2 is generated in the second protrusion 21e and the third presser member 28 that sandwich the second inner ring N2, in a direction that moves them closer to each other. This reaction force is generated between the second protrusion 21e and the third presser member 28 in a closed state and is canceled out, thereby suppressing deformation, etc., of the shaft portion 21 in which the recess 21f is formed.

[0040] Therefore, in the first support device 20 of this embodiment, the shaft portion 21 is provided on the tubular member 22 via the first bearing AB1 and the second bearing AB2, which are arranged in a back-to-back combination of angular bearings and to which a pre-load is applied. Therefore, even if a recess 21f is formed in the shaft portion 21 to mount the mirror M, deformation such as bending of the shaft portion 21 is suppressed, so that the shaft portion 21 to which the mirror M is mounted can be rotated at high speed with high precision while suppressing axial wobble.

[0041] The encoder 24 detects the rotational displacement of the shaft portion 21. The encoder 24 is disposed on the +X side of the first support device 20. By disposing the motor 23 on the −X side of the first support device 20 and disposing the encoder 24 on the +X side, it becomes easier to maintain a balance between the left and right masses of the first support device 20.

[0042] The encoder 24 has a sensor unit (rotational displacement sensor) 24a and a wheel unit 24b attached to, for example, the third holding member 28. The sensor units 24a are provided on both sides of the θ axis in the Z direction. The sensor units 24a are provided on a bracket 60. The bracket 60 is joined and fixed to the end face of the cylindrical member 22 on the +X side in the θ axis direction.

[0043] 7 is a perspective view of a bracket 60 provided with the sensor unit 24a. As shown in Fig. 7, the bracket 60 has an annular portion 61 that is provided in an annular shape in the circumferential direction about the θ axis, and a joint portion 62 that protrudes from the annular portion 61 to the -X side toward the end face of the tubular member 22 on the +X side.

[0044] The annular portion 61 has a holding portion 61a that holds the sensor portion 24a. The holding portion 61a is disposed on a third axis J3 that extends radially and passes through a first position in the circumferential direction centered on the θ axis. In this embodiment, the third axis J3 extends in the Z direction, and the holding portions 61a are disposed on the +Z side and the -Z side of the annular portion 61. Each holding portion 61a has a through hole 61b that penetrates the annular portion 61 in a direction along the third axis J3. The sensor portion 24a detects the rotational displacement of the shaft portion 21 via the through hole 61b. Since two sensor portions 24a are held by one bracket 60, the assembly of the sensor portions 24a can be improved.

[0045] The annular portion 61 has a first groove 61c and a second groove 61d formed at and near the holding portion 61a. The first groove 61c penetrates in the Y direction between the outer and inner peripheral surfaces of the annular portion 61, with the θ-axis as its center. The first groove 61c is formed on both sides of the annular portion 61 near the holding portion 61a, excluding the center portion in the Z direction.

[0046] By forming the first groove portion 61c in the holding portion 61a and in the vicinity of the holding portion 61a, the annular portion 61 is structured so that it can open and close structurally in the θ-axis direction at the first groove portion 61c, thereby absorbing the expansion and contraction of the sensor portion 24a and the dimensional tolerance of the sensor portion 24a itself.

[0047] The second grooves 61d penetrate in the θ-axis direction between the end faces of the annular portion 61 in the θ-axis direction. The second grooves 61d are arranged in pairs on both sides of the holding portion 61a in the Y-direction on the end faces of the annular portion 61. The second grooves 61d in each pair extend in the Z-direction. In each pair, the second grooves 61d that open on the outer circumferential surface and the second grooves 61d that open on the inner circumferential surface are arranged alternately.

[0048] By forming the second groove portion 61d in the holding portion 61a, the annular portion 61 is structured so that it can open and close in the Y direction (circumferential direction) at the second groove portion 61d, thereby absorbing the expansion and contraction of the sensor portion 24a and the dimensional tolerance of the sensor portion 24a itself.

[0049] Therefore, even if the annular portion 61 expands in at least one of the θ-axis direction and the Y direction (circumferential direction) due to heat generation from the sensor portion 24a, at least one of the first groove portion 61c and the second groove portion 61d structurally opens and closes, thereby preventing the expansion and contraction of the sensor portion 24a from being transmitted to the tubular member 22.

[0050] The joints 62 are locally arranged along a fourth axis J4 that extends radially and is perpendicular to the third axis J3. The joints 62 are arranged on the +Y and -Y sides of the annular portion 61, which has holding portions 61a arranged on the +Z and -Z sides. The bracket 60 is fixed by a mounting screw 62a, with the locally arranged joints 62 joined to a part of the end face of the tubular member 22 on the +X side.

[0051] Because the bracket 60 is fixed to the end face of the tubular member 22, the sensor unit 24a can be easily fixed to the tubular member 22. Furthermore, because the bracket 60 is fixed to the tubular member 22 at a position separated from the sensor unit 24a, expansion due to heat generation from the sensor unit 24a can be prevented from being transmitted to the tubular member 22.

[0052] 8 is a diagram showing an assembly procedure for the first support device 20. In assembling the first support device 20 configured as described above, the first bearing AB1 and the second bearing AB2 are disposed on either side of the cylindrical member protruding portion 22b and the second cylindrical member protruding portion 22c in the θ-axis direction. Therefore, the shaft portion 21 cannot be assembled into the cylindrical member 22 with the first bearing AB1 and the second bearing AB2 attached. Therefore, as shown in FIG. 8 , the first bearing AB1 is attached to the cylindrical member 22 in advance, and the shaft portion 21 with the second bearing AB2 attached is inserted into the cylindrical member 22 from the +X side, and the first fitting shaft portion 21a is fitted into the first pressing ring 27. Here, the first fitting shaft portion 21a and the first pressing ring 27 are loosely fitted with a relatively large clearance, allowing for smooth fitting.

[0053] Thereafter, the first holding member 25 is fixed to the tubular member 22 with the mounting screw 25a, and the second holding member 26 is fixed to the first fitting shaft portion 21a with the mounting screw 26a, thereby assembling the first support device 20.

[0054] The adjustment unit 50 adjusts the relative angular relationship between the θ axis and the φ axis. The adjustment unit 50 connects the cylindrical member 22 of the first support device 20 and the movable part 31 of the second support device 30, and is capable of adjusting the positional relationship between the cylindrical member 22 of the first support device 20 and the second support device 30.

[0055] The adjustment unit 50 includes a first adjustment unit 50A and a second adjustment unit 50B. The first adjustment unit 50A connects the tubular member 22 of the first support device 20 to the movable unit 31 of the second support device 30 on the −X side of the support unit 21c. The second adjustment unit 50B connects the tubular member 22 of the first support device 20 to the movable unit 31 of the second support device 30 on the +X side of the support unit 21c.

[0056] The first adjustment unit 50A is capable of adjusting the position of the connection point of the movable part 31 in the second support device 30 to which the adjustment unit 50 is connected relative to the connection point of the tubular member 22 to which the adjustment unit 50 is connected in the Φ direction intersecting the θ direction.

[0057] 9 is a view of the movable portion 31 of the first supporting device 20 and the second supporting device 30 as viewed from the -X side. In FIG. 9, the inside of the tubular member 22 and the first pressing member 25 are not shown.

[0058] 9, a plurality of first adjustment units 50A are arranged at intervals in the circumferential direction around the θ axis. Three first adjustment units 50A are arranged at 120° intervals in the circumferential direction around the θ axis.

[0059] The first adjustment part 50A comprises a first part 51A located radially inside and capable of abutting against the connection point of the tubular member 22, a second part 52A located radially outside and capable of abutting against the connection point of the movable part 31 in the second support device 30, and a through part 53A that penetrates the first adjustment part 50A in the θ-axis direction.

[0060] The radially inner side of the first portion 51A is in contact with the outer peripheral surface of the tubular member 22. The first portion 51A is fixed to the tubular member 22 by screw members 58A arranged on both circumferential ends.

[0061] As an example, the second portion 52A is fixed to the movable portion 31 by a spherical seat bolt 54A having a spherical seat. The second portion 52A has a spherical surface (not shown) facing the spherical seat bolt 54A. The spherical seat of the spherical seat bolt 54A comes into contact with the spherical surface of the second portion 52A, so that the second portion 52A can be firmly fixed to the movable portion 31 even if, for example, the surface precision during manufacturing is low.

[0062] The through-holes 53A are open at both circumferential ends of the second portion 52A and include a pair of first through-holes 55A extending circumferentially inward, a pair of second through-holes 56A surrounding the first through-holes 55A from both radial sides and from the circumferential inside, and a pair of third through-holes 57A extending circumferentially and disposed on both radial sides of the pair of first through-holes 55A. The provision of the through-holes 53A in the first adjustment portion 50A allows the first portion 51A to move radially relative to the second portion 52A without changing the positional relationship between the shaft portion 21 and the bearing AB. In other words, the first adjustment portion 50A functions as a hinge that connects the cylindrical member 22 and the movable portion 31 so that they can move radially relative to each other.

[0063] Therefore, even if expansion displacement occurs in the tubular member 22 due to heat or the like, the provision of the through-hole 53A allows the first portion 51A to move radially relative to the second portion 52A, thereby absorbing the expansion displacement while maintaining the positional relationship between the shaft portion 21 and the bearing AB, and adjusting the radial positional relationship between the first support device 20 and the second support device 30. Note that a configuration in which the second portion 52A moves relative to the first portion 51A may also be used.

[0064] The second adjustment unit 50B is capable of adjusting the position of the connection point of the tubular member 22 to which the second adjustment unit 50B is connected relative to the connection point of the movable part 31 in the second support device 30 to which the second adjustment unit 50B is connected in the θ-axis direction.

[0065] 10 is a view of the movable portion 31 of the first support device 20 and the second support device 30 as viewed from the +X side. In FIG. 10, the inside of the cylindrical member 22 and the encoder 24 are not shown.

[0066] 10, a plurality of second adjustment units 50B are arranged at intervals in the circumferential direction. Three second adjustment units 50B are arranged at intervals of 120° in the circumferential direction around the θ axis.

[0067] The second adjustment part 50B comprises a first part 51B located radially inside and capable of abutting against the connection point of the tubular member 22, a second part 52B located radially outside and capable of abutting against the connection point of the movable part 31 in the second support device 30, and a through part 53B that penetrates the second adjustment part 50B in the circumferential direction (direction perpendicular to the radial direction).

[0068] The radially inner side of the first portion 51B contacts the outer peripheral surface of the tubular member 22. The first portion 51B is fixed to the tubular member 22 by screw members 158B arranged on both circumferential ends. The second portion 52B is fixed to the movable part 31 by bolts 154B.

[0069] Adjusting the fixed positions of the first adjustment unit 50A and the second adjustment unit 50B relative to the cylindrical member 22 and the movable part 31 makes it possible to adjust the relative angle (intersection angle) between the θ axis and the Φ axis, typically, the degree of orthogonality. For example, one of the first adjustment unit 50A and the second adjustment unit 50B is fixed to the cylindrical member 22 and the movable part 31, and the other of the first adjustment unit 50A and the second adjustment unit 50B is loosely and temporarily fixed to the cylindrical member 22 and the movable part 31. After adjusting the position of the cylindrical member 22 or the movable part 31 in the θ axis direction or the Φ axis direction, the other of the second adjustment unit 50B is fixed to the cylindrical member 22 and the movable part 31. This makes it possible to adjust the relative angle (typically the degree of orthogonality) between the θ axis and the Φ axis.

[0070] 11 is a view of the second adjustment unit 50B as viewed from the +Y side. As shown in FIG. 11, the through-hole 53B includes a first through-hole 54B and a second through-hole 55B. The first through-hole 54B includes a third through-hole 56B that opens on the +X side and extends in the θ-axis direction, a fourth through-hole 57B that extends radially inward from the −X-side end of the third through-hole 56B, a fifth through-hole 58B that extends in the θ-axis direction from the radially inner end of the fourth through-hole 57B to the +X side, and a sixth through-hole 59B that extends radially outward from the +X-side end of the fifth through-hole 58B.

[0071] The second through portion 55B includes a third through portion 56C that opens to the -X side at a position radially inward from the fifth through portion 58B and extends in the θ-axis direction, a fourth through portion 57C that is located on the +X side of the sixth through portion 59B and extends radially outward from the +X-side end of the third through portion 56C, a fifth through portion 58C that is located between the third through portion 56B and the sixth through portion 59B in the radial direction and extends in the θ-axis direction from the radially outer end of the fourth through portion 57C to the -X side, and a sixth through portion 59C that is located at the same position in the θ-axis direction as the sixth through portion 59B and extends radially inward from the -X-side end of the fifth through portion 58B. The radially inner end of the sixth through portion 59C is located radially outward from the sixth through portion 59B. The first portion 51B and the second portion 52B are connected in the form of a rib extending circumferentially between the sixth through portion 59B and the sixth through portion 59C. By providing the through portion 53B in the second adjustment portion 50B, the first portion 51B can move in the θ-axis direction relative to the second portion 52B without changing the positional relationship between the shaft portion 21 and the bearing AB. In other words, the second adjustment portion 50B acts as a hinge that connects the cylindrical member 22 and the movable portion 31 so that they can move relative to each other in the θ-axis direction.

[0072] Therefore, even if expansion displacement occurs in the tubular member 22 due to heat or the like, the provision of the through-hole 53B allows the first portion 51B to move in the θ-axis direction relative to the second portion 52B, thereby absorbing the expansion displacement while maintaining the positional relationship between the shaft portion 21 and the bearing AB and adjusting the positional relationship in the θ-axis direction between the first support device 20 and the second support device 30. Note that a configuration in which the second portion 52B moves relative to the first portion 51B may also be used.

[0073] In the optical measurement device 1 of this embodiment, by using the first adjustment unit 50A and the second adjustment unit 50B, it is possible to easily adjust the positional relationship in the radial direction and the θ-axis direction between the first support device 20 and the second support device 30. Furthermore, in the optical measurement device 1 of this embodiment, it is possible to adjust the positional relationship between the cylindrical member 22 of the first support device 20 and the movable part 31 of the second support device 30 without changing the positional relationship between the shaft part 21 and the bearing AB.

[0074] [Optical Engine Unit 40] The optical engine unit 40 will be described with reference to FIG. 2. In FIG. 2, the optical engine unit 40 includes a light source 41, an interferometer head 42, and a detector 43. The light source 41 may include a light-emitting element such as a laser diode. The interferometer head 42 may include an optical element such as a half mirror, and may emit a portion of the measurement light from the light source 41 and cause the other portion to interfere with the measurement light L returned from the measurement object. The detector 43 may include a photoelectric conversion element (which may also be referred to as a "light-receiving element") such as a photodiode, and may detect the interference light from the interferometer head 42. Here, the light source 41 of the optical engine unit 40 may include an optical comb light source capable of generating pulsed light (optical frequency comb) containing frequency components equally spaced on a frequency axis.

[0075] It should be noted that various existing aspects can be applied to the light source 41, the interferometer head 42, and the detection unit 43. Therefore, detailed description of the light source 41, the interferometer head 42, and the detection unit 43 will be omitted. The optical engine unit 40 may also be referred to as an irradiation optical system.

[0076] A portion of the measurement light L, such as laser light from the light source 41, passes through the interferometer head 42 and is incident on the mirror M via the interferometer head 42 and the hollow portion 37 formed in the movable portion 31 (specifically, portion 31a) of the second support device 30 shown in Figure 4.

[0077] At least a part of the portion 42a of the interferometer head 42 may be inserted into the hollow portion 37, as shown in Fig. 4, for example. In other words, the interferometer head 42 may have the portion 42a inserted into the hollow portion 37. In this case, an optical member such as a lens that transmits the measurement light L may be disposed as a supported member in the portion 42a.

[0078] The control unit 70 will be described with reference to FIG. 2. In FIG. 2, the control unit 70 includes a control unit 71, a motor driver 72, a power supply unit 73, and an exhaust fan 74. The control unit 71 may include, for example, an FPGA (Field Programmable Gate Array) board. The control unit 71 controls, for example, the optical engine unit 40 and the motor driver 72. The motor driver 72 controls the motors 23 and 133. The power supply unit 73 supplies power to, for example, the optical engine unit 40, the control unit 71, the motor driver 72, and the exhaust fan 74.

[0079] It should be noted that various existing aspects can be applied to the motor driver 72, the power supply unit 73, and the exhaust fan 74. Therefore, detailed descriptions of the motor driver 72, the power supply unit 73, and the exhaust fan 74 will be omitted.

[0080] The control unit 71 controls the motors 23 and 133 via the motor driver 72 to rotate the first support device 20 and the movable unit 31 of the second support device 30. The rotation of the first support device 20 and the movable unit 31 changes the posture of the mirror M. In other words, it can be said that the control unit 71 changes the posture of the mirror M by controlling the motors 23 and 133 via the motor driver 72.

[0081] The control unit 71 acquires signals output from the sensor unit 24a of the encoder 24 and the sensor unit 34a of the encoder 34. Based on the signals output from the sensor units 24a and 34a, the control unit 71 determines the rotation angle of the first support device 20 and the rotation angle of the movable unit 31 of the second support device 30. The control unit 71 may identify the attitude of the mirror M based on the rotation angle of the first support device 20 and the rotation angle of the movable unit 31.

[0082] A portion of the measurement light L from the light source 41 via the interferometer head 42 is incident on the mirror M. As shown in Fig. 12, the measurement light L passes through a first optical path OP1 extending along the φ axis and is incident on the mirror M. The measurement light L reflected by the mirror M passes through a second optical path OP2 extending along a direction intersecting both the direction in which the θ axis extends and the direction in which the φ axis extends, and proceeds toward the measurement object. In other words, the measurement light L reflected by the mirror M is irradiated onto the measurement object.

[0083] As described above, the posture of the mirror M is changed using the movable part 31 of the first support device 20 and the second support device 30. In other words, in the optical measurement device 1, the posture of the mirror M is changed using the first support device 20 and the second support device 30, and the measurement light L is reflected by the mirror M toward the measurement target. In other words, in the optical measurement device 1, the posture of the mirror M is changed using the first support device 20 and the second support device 30, and the direction in which the second optical path OP2 extends is changed. Also, as shown in FIG. 12 , the mirror M can be said to be disposed at the intersection of the first optical path OP1 and the second optical path OP2. A part of the optical path of the measurement light L (for example, the first optical path OP1) may be disposed on the φ axis. Note that the first optical path OP1 may pass through the hollow portion 37, or the first optical path OP1 does not have to pass through the hollow portion 37.

[0084] The measurement light reflected by the measurement object (which may also be referred to as "return light") travels along substantially the same path as the path taken by a portion of the measurement light L emitted from the light source 41 from the interferometer head 42 to the measurement object, and enters the interferometer head 42. Another portion of the measurement light L emitted from the light source 41 and the measurement light L reflected by the measurement object are incident on the detection unit 43.

[0085] The detection unit 43 outputs a signal generated due to another part of the measurement light L emitted from the light source 41 and the measurement light L reflected by the measurement object to the control unit 71. The control unit 71 calculates, for example, a phase difference between the measurement light L emitted from the light source 41 and the measurement light L reflected by the measurement object based on the signal output from the detection unit 43. The control unit 71 may calculate the distance from the optical measurement device 1 to the measurement object based on the calculated phase difference.

[0086] The control unit 71 may determine the spatial coordinates of the measurement object based on the distance from the optical measurement device 1 to the measurement object, the rotation angle of the first support device 20 determined based on the signal output from the sensor unit 24a of the encoder 24, and the rotation angle of the movable part 31 determined based on the signal output from the sensor unit 34a of the encoder 34. The spatial coordinates of the measurement object determined by the control unit 71 may be spatial coordinates in a coordinate system related to the optical measurement device 1.

[0087] The control unit 70 may have a tilt sensor for detecting the tilt of the optical measurement device 1. In this case, the control unit 71 may correct the spatial coordinates of the measurement object determined above based on the output of the tilt sensor. As described above, the optical measurement device 1 can irradiate the measurement object with measurement light L. For this reason, the optical measurement device 1 may be called an optical scanning device.

[0088] Furthermore, while the measurement object is moving, the control unit 71 may continue to irradiate the measurement light L onto the measurement object by changing the posture of the mirror M using the first support device 20 and the second support device 30 (specifically, by controlling the motor 23 that rotates the first support device 20 around the θ axis and the motor 133 that rotates the movable part 31 of the second support device 30 around the φ axis).

[0089] In addition, since the optical engine unit 40 can output the measurement light L and can receive light from the measurement object, it may be called a light transmitting and receiving optical system or a light receiving optical system.

[0090] As described above, in the optical measurement device 1 of this embodiment, by using the first adjustment unit 50A and the second adjustment unit 50B, it is possible to easily adjust the positional relationship in the radial direction and the θ-axis direction between the first support device 20 and the second support device 30. Furthermore, in the optical measurement device 1 of this embodiment, it is possible to adjust the positional relationship between the cylindrical member 22 of the first support device 20 and the movable part 31 of the second support device 30 without changing the positional relationship between the shaft part 21 and the bearing AB.

[0091] 6, the first embodiment has been described with reference to a configuration in which the first retaining ring 27, which is an inner collar, is fixed and fitted by shrink fitting or the like to the radially inner side of only the first bearing AB1 located on the -X side, but the present invention is not limited to this configuration. The second bearing AB2, which is located on the +X side (the encoder 24 side), may also have a configuration in which a retaining ring, which is an inner collar, is fixed and fitted by shrink fitting or the like to the radially inner side.

[0092] 6 , the first embodiment has been described with reference to a configuration in which the entire inner peripheral surface of the second inner ring N2 of the second bearing AB2 located on the +X side, i.e., the encoder 24 side, is in contact with the outer peripheral surface of the second fitting shaft portion 21b of the shaft portion 21. However, the present invention is not limited to this configuration. For example, the configuration may be such that only a portion of the inner peripheral surface of the second inner ring N2 is in contact with the outer peripheral surface of the second fitting shaft portion 21b of the shaft portion 21.

[0093] [Second Embodiment of Gimbal Mechanism] A second embodiment of the gimbal mechanism 10 will be described with reference to Figures 13 and 14. In these figures, elements that are the same as those in the first embodiment shown in Figures 1 to 12 are designated by the same reference numerals, and their description will be omitted. Also, in Figure 13, the encoder 24 is not shown.

[0094] The gimbal mechanism 10 of this embodiment differs from that of the first embodiment in the configuration of the first support device 20. Specifically, the configuration of the bearing AB and the configuration connecting the bearing AB to the cylindrical member 22 are different. This will be described in detail below.

[0095] 13, the shaft portion 21 has a third protrusion 21g and a fourth protrusion 21h. The third protrusion 21g protrudes radially outward from the outer peripheral surface of the shaft portion 21 at a position on the -X side of the support portion 21c. The fourth protrusion 21h protrudes radially outward from the outer peripheral surface of the shaft portion 21 at a position on the +X side of the support portion 21c.

[0096] The bearing AB includes a third bearing AB3 and a fourth bearing AB4. Each of the third bearing AB3 and the fourth bearing AB4 includes a pair of angular bearings. The pair of angular bearings are arranged in a back-to-back configuration and are preloaded in the θ-axis direction.

[0097] The third bearing AB3 is disposed on the −X side, which is one side in the θ-axis direction, of the support portion 21c. The third bearing AB3 has a third outer ring G3 and a third inner ring N3. The second retaining ring 27A is fixed and fitted to the radial outside of the third outer ring G3 by shrink fitting or the like.

[0098] In Figure 13, the second retaining ring 27A is shrink-fitted across the third outer ring G3 of the pair of angular bearings in the third bearing AB3, but it may also be configured to be shrink-fitted to at least one of the third outer rings G3 of the pair of angular bearings.

[0099] The inner peripheral surface of the third inner ring N3 is fixedly fitted to the outer peripheral surface of the first fitting shaft portion 21a by shrink fitting, etc. The third inner ring N3 is sandwiched in the θ-axis direction between the third protrusion 21g and the fourth pressing member 26A.

[0100] In the third bearing AB3, in which a pair of angular bearings are arranged back-to-back, the third inner ring N3 is sandwiched between the third protrusion 21g and the fourth presser member 26A in the θ-axis direction, and similarly to the second bearing AB2, a force (pressure) is applied in a direction that moves the third inner rings N3 away from each other in the θ-axis direction when they come into contact with each other. Meanwhile, a reaction force against the force from the third inner ring N3 is generated in the third protrusion 21g and the fourth presser member 26A that sandwich the third inner ring N3, in a direction that moves them closer to each other. This reaction force is generated between the third protrusion 21g and the fourth presser member 26A in a closed state and is canceled out, thereby suppressing deformation, etc., of the shaft portion 21 in which the recess 21f is formed.

[0101] The fourth bearing AB4 is disposed on the +X side of the support portion 21c. The fourth bearing AB4 has a fourth outer ring G4 and a fourth inner ring N4. The third retaining ring 29A is fixedly fitted to the radially outer side of the fourth outer ring G4 by shrink fitting or the like.

[0102] In Figure 13, the third retaining ring 29A is shrink-fitted across the fourth outer ring G4 of a pair of angular bearings in the fourth bearing AB4, but it may also be configured to be shrink-fitted to at least one of the fourth outer rings G4 of the pair of angular bearings.

[0103] The inner peripheral surface of the fourth inner ring N4 is fixedly fitted to the outer peripheral surface of the second fitting shaft portion 21b by shrink fitting or the like. The fourth inner ring N4 is sandwiched in the θ-axis direction between the fourth protrusion 21h and the fifth pressing member 28A.

[0104] In the fourth bearing AB4, in which a pair of angular bearings are arranged back-to-back, the fourth inner ring N4 is sandwiched between the fourth protrusion 21h and the fifth presser member 28A in the θ-axis direction, and as with the third bearing AB3, a force (pressure) is applied in a direction that moves the fourth inner rings N4 away from each other in the θ-axis direction when they come into contact. Meanwhile, a reaction force against the force from the fourth inner ring N4 is generated in the fourth protrusion 21h and the fifth presser member 28A that sandwich the fourth inner ring N4, in a direction that moves them closer to each other. This reaction force is generated between the fourth protrusion 21h and the fifth presser member 28A in a closed state and is canceled out, thereby suppressing deformation, etc., of the shaft portion 21 in which the recess 21f is formed.

[0105] The first support device 20 includes a connecting member 80 that connects the outer ring of the bearing AB and the cylindrical member 22. The connecting member 80 includes a flexure member that is elastically deformable so that the outer ring of the bearing AB and the cylindrical member 22 can move relative to each other in the θ-axis direction and the Φ-axis direction. The flexure member includes a first flexure member 80A and a second flexure member 80B.

[0106] First flexure member 80A is disposed on the −X side of support portion 21c. First flexure member 80A connects the −X side end face of tubular member 22 to second pressing ring 27A so that tubular member 22 and second pressing ring 27A are relatively movable in the θ-axis direction and in a direction intersecting the θ-axis direction.

[0107] First flexure member 80A is connected to and fixed to the -X side end face of tubular member 22 by a plurality of mounting screws 81A. First flexure member 80A is connected to and fixed to the -X side end face of second pressing ring 27A by a plurality of mounting screws 82A.

[0108] Second flexure member 80B is disposed on the +X side of support portion 21c. Second flexure member 80B connects the +X side end face of tubular member 22 to third pressing ring 29A so that tubular member 22 and third pressing ring 29A are relatively movable in the θ-axis direction and in a direction intersecting the θ-axis direction.

[0109] The second flexure member 80B is connected to and fixed to the +X side end face of the cylindrical member 22 by a plurality of mounting screws 81B. The second flexure member 80B is connected to and fixed to the +X side end face of the third pressing ring 29A by a plurality of mounting screws 82B.

[0110] Since the first flexure member 80A is fixed to the second retaining ring 27A and the second flexure member 80B is fixed to the third retaining ring 29A, the shaft portion 21 and the bearing AB are connected to the tubular member 22 without changing their positional relationship.

[0111] FIG. 14 is a plan view of the first flexure member 80A and the second flexure member 80B. As shown in FIG. 14, the first flexure member 80A and the second flexure member 80B are annular. The first flexure member 80A has a first fixing portion 83A and a second fixing portion 84A. The first fixing portion 83A is fixed to the tubular member 22 by a mounting screw 81A. The first fixing portion 83A is located at the outermost position in the radial direction. A plurality of first fixing portions 83A (12 in FIG. 14) are arranged at intervals in the circumferential direction. A through-hole that is circular in plan view and penetrates the first fixing portion 83A in the thickness direction is formed.

[0112] The second fixing portion 84A is a portion that is fixed to the second retaining ring 27A by the mounting screw 82A. The second fixing portion 84A is located at the innermost position in the radial direction. A plurality of second fixing portions 84A (six in FIG. 14 ) are arranged at intervals in the circumferential direction. The second fixing portion 84A has a through-hole that is circular in plan view and penetrates through the thickness direction.

[0113] A first slit 85A is formed in the first flexure member 80A between the first fixed portion 83A and the second fixed portion 84A in the radial direction. The first slit 85A extends in an arc shape in the circumferential direction. A plurality of first slits 85A are formed at intervals in the circumferential direction. A plurality of sets (three sets in FIG. 14 ) of first slits 85A are formed at different distances from the θ axis.

[0114] The first slits 85A are formed radially inward from the first fixing portion 83A at the circumferential position where the first fixing portion 83A is disposed, and the first slits 85A are formed radially outward from the second fixing portion 84A at the circumferential position where the second fixing portion 84A is disposed.

[0115] The first flexure member 80A always has a first slit 85A formed radially between a first fixing portion 83A fixed to the tubular member 22 by a mounting screw 81A and a second fixing portion 84A fixed to the second retaining ring 27A by a mounting screw 82A.

[0116] Therefore, when the first flexure member 80A elastically deforms via the first slit 85A, the first fixed portion 83A and the second fixed portion 84A become movable relative to each other in the θ-axis direction and in a direction intersecting the θ-axis direction. As a result, the second pressing ring 27A becomes movable relative to the tubular member 22 in the θ-axis direction and in a direction intersecting the θ-axis direction. The first flexure member 80A acts as a hinge that connects the second pressing ring 27A and the tubular member 22 so as to allow relative movement in the θ-axis direction and in a direction intersecting the θ-axis direction, without changing the positional relationship between the shaft portion 21 and the bearing AB.

[0117] The second flexure member 80B has a third fixing portion 83B and a fourth fixing portion 84B. The third fixing portion 83B is fixed to the tubular member 22 by the mounting screw 81B. The third fixing portion 83B is located at the outermost position in the radial direction. A plurality of third fixing portions 83B (12 in FIG. 14 ) are arranged at intervals in the circumferential direction. A through-hole that is circular in plan view and penetrates the third fixing portion 83B in the thickness direction is formed.

[0118] When the bracket 60 holding the sensor unit 24 is attached to the tubular member 22, if the mounting screw 62a and the third fixing portion 83B of the second flexure member 80B overlap, the bracket 60 and the second flexure member 80B are fastened together by the mounting screw 62a.

[0119] The fourth fixing portion 84B is a portion that is fixed to the third retaining ring 29A by the mounting screw 82B. The fourth fixing portion 84B is located at the innermost position in the radial direction. A plurality of fourth fixing portions 84B (six in FIG. 14 ) are arranged at intervals in the circumferential direction. The fourth fixing portion 84B has a through-hole that is circular in plan view and penetrates through the thickness direction.

[0120] A second slit 85B is formed in the second flexure member 80B between the third fixed portion 83B and the fourth fixed portion 84B in the radial direction. The second slit 85B extends in an arc shape in the circumferential direction. A plurality of second slits 85B are formed at intervals in the circumferential direction. A plurality of sets of second slits 85B (three sets in FIG. 14 ) are formed at different distances from the θ axis.

[0121] The second slits 85B are formed radially inward from the third fixing portion 83B at the circumferential position where the third fixing portion 83B is disposed, and the second slits 85B are formed radially outward from the fourth fixing portion 84B at the circumferential position where the fourth fixing portion 84B is disposed.

[0122] The second flexure member 80B always has a second slit 85B formed radially between a third fixing portion 83B fixed to the tubular member 22 by a mounting screw 81B and a fourth fixing portion 84B fixed to the third retaining ring 29A by a mounting screw 82B.

[0123] Therefore, elastic deformation of the second flexure member 80B via the second slits 85B enables relative movement between the third fixed portion 83B and the fourth fixed portion 84B in the θ-axis direction and in a direction intersecting the θ-axis direction. This enables relative movement of the third retaining ring 29A with respect to the tubular member 22 in the θ-axis direction and in a direction intersecting the θ-axis direction. The second flexure member 80B acts as a hinge that connects the third retaining ring 29A and the tubular member 22 so as to allow relative movement in the θ-axis direction and in a direction intersecting the θ-axis direction, without changing the positional relationship between the shaft portion 21 and the bearing AB.

[0124] In the optical measurement device 1 configured as described above, as in the first embodiment, for example, one of the first adjustment unit 50A and the second adjustment unit 50B is fixed to the cylindrical member 22 and the movable unit 31, and the other of the first adjustment unit 50A and the second adjustment unit 50B is loosely and temporarily fixed to the cylindrical member 22 and the movable unit 31, and after adjusting the position of the cylindrical member 22 or the movable unit 31 in the θ-axis direction or Φ-axis direction, the other of the second adjustment unit 50B is fixed to the cylindrical member 22 and the movable unit 31. This makes it possible to adjust the relative angle (typically, the orthogonality) between the θ-axis and the Φ-axis.

[0125] Furthermore, in the optical measurement device 1 configured as described above, when a difference in thermal expansion occurs between the shaft portion 21 and the cylindrical member 22, at least one of the first flexure member 80A and the second flexure member 80B elastically deforms in the θ-axis direction and in a direction intersecting the θ-axis direction (for example, a direction in which the θ-axis is tilted relative to the central axis of the cylindrical member 22), thereby absorbing the difference in thermal expansion.

[0126] In the optical measurement device 1 configured as described above, the bearing AB is connected to the cylindrical member 22 in a non-fitted manner, so there is no need to highly accurately control the concentricity, wall thickness, surface roughness, etc. of the cylindrical member 22. Therefore, in the optical measurement device 1 configured as described above, the cost of the cylindrical member 22 can be reduced, and the work of assembling the shaft portion 21 including the bearing AB and the cylindrical member 22 can be simplified.

[0127] As described above, the optical measurement device 1 of this embodiment not only achieves the same functions and effects as the first embodiment, but also contributes to reducing the cost of the cylindrical member 22 and simplifying the assembly work of the shaft portion 21 including the bearing AB and the cylindrical member 22.

[0128] [Example of Use] An example of use of the optical measurement device 1 will be described with reference to Fig. 15 and Fig. 16. The optical measurement device 1 may be used, for example, to measure the positions of a workpiece W and a robot 92 shown in Fig. 15. Here, the robot 92 may process a workpiece W held by a jig 90. The workpiece W may be a relatively large structure such as the fuselage of an aircraft.

[0129] The optical measurement device 1 may measure the position of the measurement object (corresponding to the "spatial coordinates" in the above-mentioned "control unit") by irradiating measurement light L onto a reflector (also referred to as a "probe") that is in contact with the measurement object. In Fig. 15, a reflector r11 is attached to a jig 90 that is the measurement object. Reflectors r12 and r13 are attached to a workpiece W that is the measurement object. Note that while no reflector may be attached to the workpiece W, at least three reflectors may be attached to the jig 90.

[0130] 16, a reflector module r2 including reflectors r21, r22, and r23 is attached to the robot arm 810 of the robot 92. The reflectors r11, r12, r13, r21, r22, and r23 may also be referred to as measurement targets.

[0131] The optical measurement device 1 may measure the position of each of the reflectors r11, r12, and r13 in the measurement coordinate system based on the measurement light L irradiated onto each of the reflectors r11, r12, and r13. The optical measurement device 1 may measure the position of each of the reflectors r21, r22, and r23 in the measurement coordinate system based on the measurement light L irradiated onto each of the reflectors r21, r22, and r23.

[0132] 2 may transmit, for example, position signals indicating the positions of the reflectors r11, r12, and r13 in the measurement coordinate system and the positions of the reflectors r21, r22, and r23 in the measurement coordinate system to the measurement control device 200. The measurement control device 200 is configured to be able to communicate with a processing control device 300 that controls the robot 92 via a network (not shown). The processing control device 300 controls the robot 92 under, for example, a robot coordinate system that is a coordinate system related to the robot 92. Specifically, the processing control device 300 sets a path along which a point on a robot arm 810 of the robot 92 moves under the robot coordinate system. The processing control device 300 controls the robot 92 so that the point on the robot arm 810 moves along the set path.

[0133] While the preferred embodiments of the present invention have been described above with reference to the accompanying drawings, it goes without saying that the present invention is not limited to these examples. The shapes and combinations of the components shown in the above examples are merely examples, and various modifications can be made based on design requirements, etc., without departing from the spirit of the present invention.

[0134] For example, in the above embodiment, the optical engine unit 40 may calculate the distance to the measurement object based on the reception result of the interference light by adopting an existing method using an interferometer as a rangefinder, such as the methods disclosed in U.S. Patent Publication No. 2024 / 0085759, European Patent Publication Nos. 4332667, 4318107, and 4296763. Furthermore, a TOF (Time of Flight) rangefinder may be used as the rangefinder. The TOF method may use intensity modulation or wavelength modulation. For example, the rangefinders described in U.S. Patent Nos. 8,687,173 and 7,139,446 may be used. Such an optical measurement device 1 may also be referred to as a localizer or laser tracker.

[0135] In addition, in the above embodiment, a configuration in which a mirror M that reflects the measurement light L is supported on the support portion 21c is exemplified, but this configuration is not limited to this, and the support portion 21c may also be configured to support an optical element through which the light passes.

[0136] FIG. 17 is a cross-sectional view showing a modified example of the optical measurement device (optical scanning device) 1 in which the support portion 21c supports an optical element. As shown in FIG. 17, a support hole 21j is formed in the support portion 21c of the shaft portion 21 in a direction intersecting the θ axis. A plurality of (two in FIG. 17) light transmitting and receiving optical systems 21k are supported in the support hole 21j at intervals along the support hole 21j. One end of an optical fiber F is fixed to the shaft portion 21 so as to face the support hole 21j. The optical fiber F forms an optical path through which the measurement light L and return light L1 pass as light. The other end of the optical fiber F is connected to an optical engine unit 40 including a light source 41, a detector 43, etc.

[0137] In this modified example, the measurement light L and the return light L1 are sent and received without using a mirror M, so it is possible to measure the position of the object to be measured with high accuracy without being affected by errors related to the installation accuracy of the mirror M and the optical accuracy of the reflective surface of the mirror M.

[0138] REFERENCE SIGNS LIST 1...optical measurement device, 10...gimbal mechanism (rotation device), 20...first support device, 21...shaft portion, 21a...first fitting shaft portion, 21b...second fitting shaft portion, 21c...support portion, 21d...first protrusion portion, 21e...second protrusion portion, 21f...recess, 21g...third protrusion portion, 21h...fourth protrusion portion, 22...tubular member, 22b...tubular member protrusion portion, 23...motor (first drive unit), 24a...sensor unit (rotational displacement sensor), 25...first pressing member, 26...second pressing member, 26A...fourth pressing member, 27...first pressing ring, 27A...second pressing ring, 28...third pressing member, 28A...fifth pressing member, 29A...third pressing ring, 30...second support device, 31...movable portion, 40...optical engine unit (irradiation optical system) , 50...adjustment portion, 60...bracket, 61...annular portion, 61a...holding portion, 61c...first groove portion, 61d...second groove portion, 62...joint portion, 71...control portion, 80...connecting member, 80A...first flexure member, 80B...second flexure member, 83A...first fixing portion, 83B...third fixing portion, 84A...second fixing portion, 84B...fourth fixing portion, 85A...first slip , 85B...second slit, 133...motor (second drive unit), AB...bearing, AB1...first bearing, AB2...second bearing, AB3...third bearing, AB4...fourth bearing, G1...first outer ring, G2...second outer ring, G3...third outer ring, G4...fourth outer ring, L...measurement light, M...optical member (mirror), N1...first inner ring, N2...second inner ring, N3...third inner ring, N4...fourth inner ring

Claims

1. An optical measurement device that measures a measurement object by irradiating measurement light toward the measurement object, comprising: a first support device having a support part that supports an optical element through which the measurement light passes and that is rotatable around a first axis extending in a first direction; a second support device that supports the first support device along a second axis that intersects with the first axis; and an adjustment part that adjusts the relative angular relationship between the first axis and the second axis, wherein the first support device has: a cylindrical member extending in the first direction; and a shaft part that is provided with the support part that supports the optical element, is disposed inside the cylindrical member via bearings provided on both sides in the first direction, and rotates around the first axis to change the orientation of the optical element, and the adjustment part connects the cylindrical member of the first support device to the second support device, and is capable of adjusting the positional relationship between the cylindrical member of the first support device and the second support device.

2. The optical measuring device according to claim 1, wherein the adjustment unit is capable of adjusting the position of the connection point of the second support device to which the adjustment unit is connected relative to the connection point of the cylindrical member to which the adjustment unit is connected in a second direction intersecting with the first direction.

3. An optical measurement device according to claim 1 or 2, wherein the adjustment unit is capable of adjusting the position of the connection point of the tubular member to which the adjustment unit is connected relative to the connection point of the second support device to which the adjustment unit is connected in the first direction.

4. An optical measuring device according to claim 2 or 3, wherein the adjustment unit comprises a first part that can abut against the connection point of the cylindrical member and a second part that can abut against the connection point of the second support device, and the second part is movable relative to the first part, or the first part is movable relative to the second part.

5. An optical measurement device according to any one of claims 1 to 4, wherein the first support device comprises a connecting member that connects the outer ring of the bearing and the cylindrical member.

6. The optical measurement device according to claim 5, wherein the connecting member comprises a flexure member that elastically deforms so that the outer ring of the bearing and the cylindrical member are relatively movable in the first direction and a second direction intersecting the first direction.

7. An optical measurement device according to claim 6, wherein the flexure member comprises: a first fixed portion fixed to the cylindrical member; and a second fixed portion located closer to the first axis than the first fixed portion and connected to the outer ring of the bearing; and a slit extending in a circumferential direction centered on the first axis is formed between the first fixed portion and the second fixed portion of the flexure member.

8. An optical measurement device according to any one of claims 1 to 7, wherein the bearings include a pair of angular bearings arranged in back-to-back combination and pressurized in the first direction.

9. The optical measurement device according to claim 8, wherein the bearing has a first bearing arranged on one side in the first direction and a second bearing arranged on the other side in the first direction, wherein the preload is applied to a first outer ring of the first bearing by being sandwiched between a cylindrical member protruding portion that protrudes radially inward from the inner peripheral surface of the cylindrical member at a position on the one side in the first direction relative to the support portion and a first pressing member fixed to an end face of the cylindrical member on one side in the first direction, and wherein the preload is applied to a first inner ring of the first bearing by being sandwiched between a first protruding portion that protrudes radially outward from the outer peripheral surface of the shaft portion at a position on the one side in the first direction relative to the support portion and a second pressing member fixed to an end face of the shaft portion on one side in the first direction.

10. An optical measurement device as described in claim 9, wherein a first retaining ring is fixed and fitted to the inside of the first inner ring in the radial direction, and the shaft portion has a first fitting shaft portion on one side of the first protrusion in the first direction, and the first fitting shaft portion fits to the inside of the first retaining ring in the radial direction via a gap.

11. An optical measurement device as described in claim 9 or 10, wherein the second inner ring of the second bearing is clamped between a second protruding portion that protrudes radially outward from the outer circumferential surface of the shaft portion at a position on the other side in the first direction of the support portion, and a third pressing member fixed to the end face of the shaft portion on the other side in the first direction, and the pressurized state is applied to the second inner ring of the second bearing.

12. The optical measurement device according to claim 11, wherein the shaft portion has a second fitting shaft portion on the other side of the second protrusion in the first direction, the second inner ring is fitted with the second fitting shaft portion fixed to the inside in the radial direction, and the second outer ring of the second bearing is provided in a non-constrained manner relative to the cylindrical member.

13. The optical measurement device according to claim 8, wherein the bearing has a third bearing arranged on one side in the first direction and a fourth bearing arranged on the other side in the first direction, wherein a third inner ring of the third bearing is sandwiched between a third protrusion that protrudes radially outward from the outer circumferential surface of the shaft section at a position on the one side in the first direction relative to the support section, and a fourth presser member fixed to an end face of the shaft section on one side in the first direction, to apply the preload, and wherein a fourth inner ring of the fourth bearing is sandwiched between a fourth protrusion that protrudes radially outward from the outer circumferential surface of the shaft section at a position on the other side in the first direction relative to the support section, and a fifth presser member fixed to an end face of the shaft section on the other side in the first direction, to apply the preload.

14. The optical measurement device according to claim 13, comprising: a third outer ring of the third bearing having a second retaining ring fixed to and fitted on the radially outer side thereof; a fourth outer ring of the fourth bearing having a third retaining ring fixed to and fitted on the radially outer side thereof; an elastically deformable first flexure member connecting an end face of the cylindrical member on one side in the first direction to the second retaining ring so that the cylindrical member and the second retaining ring are relatively movable in the first direction and in a direction intersecting the first direction; and an elastically deformable second flexure member connecting an end face of the cylindrical member on the other side in the first direction to the third retaining ring so that the cylindrical member and the third retaining ring are relatively movable in the first direction and in a direction intersecting the first direction.

15. The optical measurement device described in claim 14, wherein the first flexure member comprises: a first fixed portion fixed to the cylindrical member; and a second fixed portion located radially inward from the first fixed portion and fixed to the second retaining ring, a first slit extending in a circumferential direction centered on the first axis is formed between the first fixed portion and the second fixed portion in the radial direction; and the second flexure member comprises: a third fixed portion fixed to the cylindrical member; and a fourth fixed portion located radially inward from the third fixed portion and fixed to the third retaining ring, a second slit extending in the circumferential direction is formed between the third fixed portion and the fourth fixed portion in the radial direction.

16. An optical measurement device according to any one of claims 1 to 15, further comprising a rotational displacement sensor that detects rotational displacement of the shaft portion, the rotational displacement sensor being provided on a bracket that is joined and fixed to the end face of the cylindrical member in the first direction.

17. The optical measurement device according to claim 16, wherein the bracket is joined to a part of the end face of the cylindrical member in the first direction.

18. The optical measurement device described in claim 17, wherein the bracket has an annular portion provided in a ring shape in a circumferential direction centered on the first axis, and a joint portion protruding from the annular portion in the first direction toward the end face of the cylindrical member, the annular portion having a holding portion that holds the rotational displacement sensor on a third axis that extends in a radial direction centered on the first axis and passes through a first position in the circumferential direction, and the joint portion is locally arranged along a fourth axis that extends in the radial direction and is perpendicular to the third axis.

19. The optical measurement device according to claim 18, wherein the annular portion is formed with a first groove portion provided in the holding portion and extending in a direction intersecting the first direction, and a second groove portion extending in a direction intersecting the circumferential direction.

20. An optical measurement device according to any one of claims 1 to 19, wherein the second support device has a movable part connected to the outer ring of the bearing, and the movable part supports the first support device and is rotatable around the second axis.

21. An optical measurement device according to any one of claims 1 to 20, wherein when the positional relationship between the cylindrical member of the first support device and the second support device is changed, the positional relationship between the shaft portion and the bearing is not changed.

22. An optical measurement device according to any one of claims 1 to 21, comprising: an irradiation optical system capable of outputting the measurement light; a first drive unit capable of driving the shaft portion to rotate around the first axis; and a second drive unit capable of driving the second support device to rotate around the second axis, wherein the measurement light from the irradiation optical system is irradiated onto the measurement object via the optical member.

23. The optical measurement device according to claim 22, further comprising: a control unit that controls the first driving unit and the second driving unit to measure the position of the measurement object based on the result of irradiating the measurement object with the measurement light.

24. The optical measurement device according to claim 22 or 23, wherein the optical member includes a mirror that is supported by the support portion and reflects the measurement light.

25. An optical scanning device comprising: a first support device having a support portion for supporting an optical element through which light passes, and rotatable around a first axis extending in a first direction; a second support device supporting the first support device along a second axis intersecting the first axis; and an adjustment portion for adjusting the relative angular relationship between the first axis and the second axis, wherein the first support device comprises: a cylindrical member extending in the first direction; and a shaft portion having a support portion for supporting the optical element, the shaft portion being disposed inside the cylindrical member via bearings provided on both sides in the first direction, and rotating around the first axis to change the orientation of the optical element, and the adjustment portion connects the cylindrical member of the first support device to the second support device, and is capable of adjusting the positional relationship between the cylindrical member of the first support device and the second support device.

26. A rotating device comprising: a first support device having a support portion that supports a supported member and that is rotatable around a first axis extending in a first direction; a second support device that supports the first support device along a second axis that intersects with the first axis; and an adjustment portion that adjusts the relative angular relationship between the first axis and the second axis, wherein the first support device comprises: a tubular member extending in the first direction; and a shaft portion that is provided with support portions that support the supported member and is disposed inside the tubular member via bearings provided on both sides in the first direction, and that rotates around the first axis to change the orientation of the supported member, and the adjustment portion connects the tubular member of the first support device to the second support device, and is capable of adjusting the positional relationship between the tubular member of the first support device and the second support device.

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