Exhaust apparatus and semiconductor processing device

Abstract

The present application provides an exhaust apparatus and a semiconductor processing device. The apparatus comprises: an exhaust main body, an exhaust channel being provided in the exhaust main body, an air inlet of the exhaust channel being configured to be communicated with an exhaust port of a pressure-controlled component, an air outlet of the exhaust channel being configured to be communicated with a facility exhaust end, and the exhaust channel having a vertical channel section and an opening portion located at the bottom of the vertical channel section; an adjusting member relatively located in the vertical channel section and above the opening portion; and a connection limiting assembly connected to the adjusting member such that the two can move up and down relative to each other, and limiting the nearest position of the adjusting member to the opening portion, so that when the upward gas pressure exerted upon the adjusting member is larger than the gravity of the adjusting member, the adjusting member rises from the nearest position until the gas pressure and the gravity are balanced. The present solution can reduce the size of the exhaust apparatus, reduce the number of interfaces with facility exhaust ends, and makes the pressure of the pressure-controlled component in a stable state when switching between different air inlet modes.

Description

Exhaust device and semiconductor processing equipment TECHNICAL FIELD

[0001] The present application relates to the field of semiconductor manufacturing, in particular to an exhaust device and semiconductor processing equipment. BACKGROUND

[0002] In a semiconductor thermal processing equipment, a micro-environment system is one of the core components of the equipment, which mainly provides a stable area for wafer transmission, loading and unloading and transfer inside the equipment. The transmission, loading and unloading of the wafer before and after the process are carried out in the micro-environment, so the cleanliness, oxygen content, temperature and pressure in this area must meet the environmental requirements. Pressure control, as an important parameter of the micro-environment system, has an important influence on the final process performance of the product.

[0003] In the prior art, the exhaust device for realizing the pressure control of the micro-environment has a large size and a large number of interfaces with the factory exhaust end, and the micro-environment pressure is in an unstable state when different air intake modes are switched. SUMMARY

[0004] The present application aims to at least solve one of the technical problems existing in the prior art, and proposes an exhaust device and semiconductor processing equipment, which can solve the problems of large size of the exhaust device in the prior art, a large number of interfaces with the factory exhaust end, and the micro-environment pressure in an unstable state when different air intake modes are switched.

[0005] To achieve the purpose of the present application, an exhaust device is provided, which is applied to a semiconductor processing equipment, comprising:

[0006] An exhaust main body, wherein an exhaust passage is arranged in the exhaust main body, an air inlet of the exhaust passage is used to communicate with an air outlet of a controlled pressure component, and an air outlet of the exhaust passage is used to communicate with a factory exhaust end; the exhaust passage has a vertical passage section and an opening part located at the bottom of the vertical passage section;

[0007] An adjusting component is located oppositely in the vertical passage section and above the opening part; and

[0008] A connecting and limiting assembly is connected with the adjusting component in a relative lifting manner, and limits the closest position of the adjusting component to the opening part, so that the adjusting component rises from the closest position when the upward gas pressure received by the adjusting component is greater than its gravity, until the gas pressure and the gravity reach a balance.

[0009] In some embodiments, the adjusting component comprises a first sub-adjusting component and a second sub-adjusting component arranged above the first sub-adjusting component;

[0010] The connecting and limiting assembly is connected with the first and second sub-adjusting members which can be lifted relative to each other, and limits the closest positions of the first and second sub-adjusting members to the opening, and the closest position of the first sub-adjusting member to the opening is lower than that of the second sub-adjusting member.

[0011] When the upward gas pressure received by the first sub-adjusting member is greater than the sum of the gravity of the first and second sub-adjusting members, the first sub-adjusting member contacts the second sub-adjusting member and rises synchronously until the sum of the gas pressure and the gravity reaches equilibrium.

[0012] In some embodiments, the orthographic projection of the first sub-adjusting member on the radial cross section of the vertical channel segment completely covers the orthographic projection of the second sub-adjusting member on the radial cross section of the vertical channel segment.

[0013] In some embodiments, the connecting and limiting assembly comprises:

[0014] A connecting rod is vertically arranged in the vertical channel segment, a first connecting hole is arranged in the first sub-adjusting member, and the first sub-adjusting member is arranged on the connecting rod in a liftable manner through the first connecting hole; a second connecting hole is arranged in the second sub-adjusting member, and the second sub-adjusting member is arranged on the connecting rod in a liftable manner through the second connecting hole.

[0015] A first limiting portion is arranged on the connecting rod below the first sub-adjusting member, and is used for blocking the first sub-adjusting member from descending to limit the closest position of the first sub-adjusting member to the opening.

[0016] A second limiting portion is arranged on the connecting rod below the second sub-adjusting member, and is used for blocking the second sub-adjusting member from descending to limit the closest position of the second sub-adjusting member to the opening, and the second limiting portion can pass through the first connecting hole when the first sub-adjusting member is lifted.

[0017] In some embodiments, the connecting rod comprises a first rod portion and a second rod portion above the first rod portion, the diameter of the first rod portion is greater than that of the second rod portion, and a step surface formed between the first rod portion and the second rod portion is used as the second limiting portion.

[0018] The first connecting hole has a diameter larger than that of the first rod portion, the first sub-adjusting member is arranged around the first rod portion through the first connecting hole, and the first limiting portion is arranged on the first rod portion; the second connecting hole has a diameter smaller than that of the first rod portion and larger than that of the second rod portion, and the second sub-adjusting member is arranged around the second rod portion through the second connecting hole.

[0019] In some embodiments, the step surface is an annular conical surface, and the diameter of the annular conical surface increases from top to bottom.

[0020] In some embodiments, the position adjusting assembly is further connected with the connecting limiting assembly, and is used to enable the connecting limiting assembly to be lifted or lowered to adjust the nearest position of the first sub-adjusting member and the second sub-adjusting member to the opening portion.

[0021] In some embodiments, the position adjusting assembly comprises:

[0022] In some embodiments, the position adjusting assembly comprises:

[0023] In some embodiments, the position adjusting assembly further comprises a guide rod arranged in the vertical channel segment in a relative lifting manner, the guide rod is vertically arranged, and a lower end of the guide rod is connected with the connecting limiting assembly.

[0024] In some embodiments, the position adjusting assembly further comprises a limiting structure used to relatively fix the connecting limiting assembly and the exhaust body after the nearest position of the first sub-adjusting member and the second sub-adjusting member to the opening portion is adjusted.

[0025] In some embodiments, the limiting structure comprises a locking nut, an upper end of the guide rod penetrates through the exhaust body and extends to an outside of the exhaust body.

[0026] The guide rod has an external thread, the locking nut is matched with the external thread, and can be locked on an outer surface of the exhaust body to relatively fix the guide rod and the exhaust body.

[0027] In some embodiments, the position adjusting assembly further comprises a pneumatic cylinder arranged outside the exhaust body, a piston rod of the pneumatic cylinder is used as the connecting rod, and a lower end of the connecting rod penetrates through the exhaust body and extends to an inside of the vertical channel segment.

[0028] In some embodiments, the exhaust body comprises a closed adjusting box body, an inside of the adjusting box body constitutes the vertical channel segment, the opening portion is a first opening formed in a bottom wall of the adjusting box body, and the first opening is used to communicate with the exhaust port; a side wall of the adjusting box body further forms a second opening used to communicate with the factory exhaust end.

[0029] In some embodiments, a pressure balance assembly is further included, which is arranged on a side wall of the adjusting box body opposite to the second opening, and forms a balance opening with the side wall, the balance opening having an adjustable size and being in communication with the inside and outside of the adjusting box body.

[0030] In some embodiments, the side wall where the pressure balance assembly is arranged forms a plurality of first grid holes.

[0031] The pressure balance assembly includes a movable plate and a locking screw, the movable plate being movably stacked on the side wall, and the movable plate forming a plurality of second grid holes, each of the second grid holes being arranged in one-to-one correspondence with each of the first grid holes, so as to adjust the overlapping area of the first grid holes and the second grid holes when the movable plate is moved relative to the side wall.

[0032] The locking screw is used to relatively fix the movable plate and the side wall after adjusting the overlapping area of the first grid holes and the second grid holes.

[0033] In some embodiments, the exhaust body further includes an exhaust box body, which is sealingly connected with the side wall where the second opening of the adjusting box body is arranged; the exhaust channel has an exhaust channel section, the inside of the exhaust box body constituting the exhaust channel section; the air inlet end of the exhaust channel section is in communication with the second opening, and the air outlet end of the exhaust channel section is used to be in communication with the factory exhaust end.

[0034] An adjusting damper is arranged in the exhaust channel section, which is used to adjust the gas passing area of the exhaust channel section at the adjusting damper.

[0035] In some embodiments, a pressure detection port is further arranged on the exhaust box body.

[0036] As another technical solution, the application further provides a semiconductor processing equipment, which includes a micro-environment system, an air inlet device, and an exhaust device for controlling the micro-environment space of the micro-environment system, and the exhaust device adopts the above-mentioned exhaust device provided by the application.

[0037] The application has the following beneficial effects:

[0038] The exhaust device provided in the application is provided with a vertical passage segment and an opening part at the bottom of the vertical passage segment in the exhaust passage, and a regulating member is oppositely arranged above the opening part. The connecting limiting assembly is connected with the regulating member in a relative lifting manner, and limits the closest position of the regulating member from the opening part, so that the regulating member is lifted from the closest position when the upward gas pressure received by the regulating member is greater than the gravity of the regulating member, until the gas pressure and the gravity reach a balance. The distance between the regulating member and the opening part is different, and the gas flow passing through is different. In this case, the closest position of the regulating member from the opening part is limited by the connecting limiting assembly, so that the minimum gas flow corresponding to the closest position can be adapted to the current air intake mode, that is, different air intake modes can be adapted by setting different closest positions, and then only one flow passage can meet the requirements of different air intake modes on the exhaust flow, compared with the prior art, so that multiple flow passages do not need to be arranged, thereby being beneficial to reducing the size of the exhaust device, and the number of interfaces with the factory exhaust end can be reduced, so that the installation space can be reduced, and then the application scenarios with small installation space can be applied. On this basis, when different air intake modes are switched, the regulating member can be lifted with the change of the gas pressure received, until the gas pressure and the gravity of the regulating member reach a balance, so that the pressure of the controlled pressure part can be in a stable state when different air intake modes are switched.

[0039] The semiconductor processing equipment provided in the application can reduce the size of the exhaust device, reduce the number of interfaces with the factory exhaust end, and realize that the pressure of the controlled pressure part is in a stable state when different air intake modes are switched, by adopting the above-mentioned exhaust device. BRIEF DESCRIPTION OF DRAWINGS

[0040] FIG. 1 is a structure diagram of a micro-environment system of a semiconductor processing equipment in the related art;

[0041] FIGS. 2 to 4 are structure diagrams of an exhaust device in the related art in three different air intake modes, respectively;

[0042] FIG. 5 is an external structure diagram of an exhaust device provided in an embodiment of the application;

[0043] FIG. 6 is a sectional view of the exhaust device provided in the embodiment of the application;

[0044] FIG. 7 is a sectional view of the exhaust device provided in the embodiment of the application in an air mode;

[0045] FIG. 8 is a sectional view of a regulating member, a connecting limiting assembly and a position adjusting assembly in the embodiment of the application;

[0046] FIG. 9 is a process diagram of the regulating member in the embodiment of the application being lifted to different heights;

[0047] FIG. 10 is a sectional view of the exhaust device in a large flow nitrogen mode according to an embodiment of the present application;

[0048] FIG. 11 is a sectional view of the exhaust device in a small flow nitrogen mode according to an embodiment of the present application;

[0049] FIG. 12 is a sectional view of the regulating box provided with a pressure balance assembly according to an embodiment of the present application;

[0050] FIG. 13 is a process diagram of the pressure balance assembly reducing the balance opening from the largest state according to an embodiment of the present application;

[0051] FIG. 14 is a structural diagram of a micro-environment space, an air inlet device and an exhaust device of a micro-environment system of a semiconductor processing equipment according to an embodiment of the present application. DETAILED DESCRIPTION

[0052] In order to enable those skilled in the art to better understand the technical solutions of the present application, the exhaust device and the semiconductor processing equipment provided by the present application will be described in detail below with reference to the drawings.

[0053] As shown in FIG. 1, it is a structural diagram of a micro-environment system of a semiconductor processing equipment in the related art. The micro-environment system includes a micro-environment space 01, an air inlet device 02 and an exhaust device 03, wherein the air inlet device 02 includes a first air inlet pipeline 021 and a second air inlet pipeline 023, and a first valve 022 and a second valve 024 are respectively arranged on the first air inlet pipeline 021 and the second air inlet pipeline 023, wherein the first air inlet pipeline 021 and the second air inlet pipeline 023 are used to respectively introduce nitrogen and air into the micro-environment space 01, and the first valve 022 and the second valve 024 are used to realize the switching and regulating of the flow of nitrogen and air, so that different air inlet modes can be maintained in the micro-environment space 01, and the gas in the micro-environment space 01 under different air inlet modes is exhausted through the exhaust device 03, and the micro-environment space 01 is pressure controlled.

[0054] Specifically, as shown in FIGS. 2-4, the structure diagrams of the exhaust device 03 in the related art in three different air intake modes are shown respectively. The exhaust device 03 includes three exhaust pipelines, i.e., a first exhaust pipeline 031, a second exhaust pipeline 032, and a third exhaust pipeline 033, and the air passage cross-sectional areas (or pipe diameters) of the three exhaust pipelines decrease in turn. One end of each of the three exhaust pipelines is in communication with the micro-environment space 01, and the other end is in communication with a plant exhaust end (not shown in the figure), which is under negative pressure relative to atmospheric pressure, so as to ensure that the gas in the micro-environment space 01 is smoothly exhausted. Among them, the third exhaust pipeline 033 is in a normally open state, and the first exhaust pipeline 031 and the second exhaust pipeline 032 are respectively provided with a first on-off valve 034 and a second on-off valve 035, which are used to realize switching between different exhaust pipelines by controlling the on-off of the exhaust pipeline. In addition, a damper 036 is arranged in each exhaust pipeline, which is used to adjust the gas flow passing through the damper 036, so as to be able to adjust the gas pressure at the position when the exhaust device 03 is installed to different plant exhaust ends, so that the exhaust device 03 connected to plant exhaust ends with different negative pressures has consistent pressure in the exhaust pipeline.

[0055] Taking the air mode and the nitrogen mode as examples, the nitrogen mode further includes a large-flow nitrogen mode and a small-flow nitrogen mode, in the air mode, as shown in FIGS. 1 and 2, the second valve 024 is opened to introduce air into the micro-environment space 01, and a relatively large air intake flow is adopted, in this case, the first on-off valve 034 is opened, and the second on-off valve 035 is closed, at this time, the exhaust is carried out through the first exhaust pipeline 031 and the third exhaust pipeline 033, and the exhaust direction is shown by the arrows in FIG. 2. In the large-flow nitrogen mode, as shown in FIGS. 1 and 3, the first valve 022 is opened to introduce nitrogen into the micro-environment space 01, and the nitrogen intake flow is smaller than the air intake flow in the air mode, in this case, the second on-off valve 035 is opened, and the first on-off valve 034 is closed, at this time, the exhaust is carried out through the second exhaust pipeline 032 and the third exhaust pipeline 033, and the exhaust direction is shown by the arrows in FIG. 3. In the small-flow nitrogen mode, as shown in FIGS. 1 and 4, the first valve 022 is kept in an open state, and the first on-off valve 034 and the second on-off valve 035 are closed, at this time, the exhaust is carried out through the third exhaust pipeline 033, and the exhaust direction is shown by the arrows in FIG. 4.

[0056] Since the above-mentioned exhaust device 03 needs three exhaust pipelines, more exhaust pipelines increase the occupied space of the device and the number of interfaces with the plant exhaust end, so that the exhaust device 03 needs a larger installation space and cannot be applied to smaller installation space application scenarios, thereby limiting the use range of the exhaust device 03. Moreover, when different intake modes are switched, the switching between the pipelines will cause the pressure of the micro-environment space 01 to fluctuate, thereby causing the micro-environment pressure to be in an unstable state when different intake modes are switched.

[0057] To solve the above-mentioned problems, the embodiments of the present application provide an exhaust device, which solves the problems that the size of the exhaust device in the related art is large, the number of interfaces with the plant exhaust end is large, and the micro-environment pressure is in an unstable state when different intake modes are switched. Specifically, the exhaust device is applied to a semiconductor processing equipment, for example, a semiconductor thermal processing equipment, which includes a micro-environment system for providing a stable area (i.e., a micro-environment space) for the transportation, loading and unloading and transfer of wafers inside the equipment before and after the process treatment. Of course, the exhaust device provided by the embodiments of the present application can also be applied to other controlled pressure components of the semiconductor processing equipment which need to be controlled.

[0058] Please refer to FIGS. 5 and 6, the exhaust device 1 provided by the embodiments of the present application includes an exhaust main body 11, an adjusting component 12 and a connecting and limiting assembly 13, wherein the exhaust main body 11 is provided with an exhaust passage 14, the gas inlet of the exhaust passage 14 is used for communicating with the gas outlet of the controlled pressure component (for example, the micro-environment space of the micro-environment system), and the gas outlet of the exhaust passage 14 is used for communicating with the plant exhaust end (not shown in the figure). The plant exhaust end is used for recovering the gas discharged by the controlled pressure component and providing a negative pressure smaller than the atmospheric pressure to ensure the smooth discharge of the gas. Moreover, the exhaust passage 14 has a vertical passage segment 14a and an opening part 111 located at the bottom of the vertical passage segment 14a, the adjusting component 12 is located in the vertical passage segment 14a and above the opening part 111 in a relative manner; the connecting and limiting assembly 13 is connected with the adjusting component 12 in a relative lifting manner and limits the closest position of the adjusting component 12 from the opening part 111, so that the adjusting component 12 rises from the closest position when the upward gas pressure received by the adjusting component 12 is greater than its gravity until the gas pressure and the gravity reach a balance.

[0059] Specifically, since the adjusting member 12 is arranged above the opening part 111 in the vertical channel segment 14a, the distance between the adjusting member 12 and the opening part 111 is different, and the gas flow passing through is also different, that is, the closer the adjusting member 12 is to the opening part 111, the smaller the gas flow is; on the contrary, the farther the adjusting member 12 is from the opening part 111, the greater the gas flow is. Moreover, since the connecting and limiting assembly 13 is connected with the adjusting member 12 and can be lifted relatively, the adjusting member 12 will be subjected to upward gas pressure when gas passes through, and when the gas pressure is greater than the gravity of the adjusting member 12, the gas pressure will push the adjusting member 12 to move upward relative to the connecting and limiting assembly 13 until the gas pressure and the gravity reach balance, and the adjusting member 12 can be stable at a certain position without moving. Thus, when the gas pressure is less than or equal to the gravity of the adjusting member 12, the adjusting member 12 is at the closest position closest to the opening part 111, which limits the minimum gas flow passing between the adjusting member 12 and the opening part 111, and thus, by setting different closest positions, different minimum gas flows can be obtained to adapt to different air inlet modes. For example, in a large-flow air inlet mode, the closest position can be set so that the minimum distance between the adjusting member 12 and the opening part 111 is relatively large, so that the above-mentioned minimum gas flow is relatively large; in a small-flow air inlet mode, the closest position can be set so that the minimum distance between the adjusting member 12 and the opening part 111 is relatively small, so that the above-mentioned minimum gas flow is relatively small.

[0060] The exhaust device 1 provided by the embodiment of the present application can limit the closest position of the adjusting member 12 to the opening part 111 through the connecting and limiting assembly 13, so that the minimum gas flow corresponding to the closest position can adapt to the current air inlet mode, that is, different air inlet modes can be adapted by setting different closest positions. Taking the micro-environment space of the controlled pressure member as an example, the air inlet modes include an air mode and a nitrogen mode, the air mode is used for passing air into the micro-environment space through the air inlet device, and the nitrogen mode is used for passing nitrogen into the micro-environment space through the air inlet device, and the flow of the passed air is greater than the flow of the passed nitrogen. In this case, the closest position corresponding to the air mode is farther from the opening part 111 than the closest position corresponding to the nitrogen mode, so that the minimum gas flow corresponding to the air mode is greater than the minimum gas flow corresponding to the nitrogen mode. It is easy to understand that the above-mentioned closest position is the position of the adjusting member 12 when the gas pressure is less than or equal to the gravity of the adjusting member 12, and during the switching process of different air inlet modes, if the gas pressure is greater than the gravity of the adjusting member 12, the gas pressure will push the adjusting member 12 to move upward from the lowest position until the gas pressure and the gravity reach balance, that is, the adjusting member 12 is finally stable at a certain position without moving, and the position is usually farther from the opening part 111 than the lowest position corresponding to the current air inlet mode.

[0061] From the above, the embodiment of the application adopts the connection limiting assembly 13 to limit the lowest position of the adjusting member 12 and make the adjusting member 12 liftable, and only one flow channel needs to be arranged to meet the requirements of different intake modes on exhaust flow, compared with the prior art, multiple flow channels do not need to be arranged, thereby being conducive to reducing the size of the exhaust device 1, and the number of interfaces with the factory exhaust end can be reduced, thereby the installation space can be reduced, and then the application scenarios with smaller installation space can be applied to. On this basis, when different intake modes are switched, the adjusting member 12 can be lifted with the change of the gas pressure received until the gas pressure and the gravity of the adjusting member 12 reach balance, thereby the pressure of the controlled pressure member can be in a stable state when different intake modes are switched.

[0062] In some embodiments, the opening part 111, for example, includes an annular plate protruding from the inner wall of the vertical channel segment 14a, and the space 111a surrounded by the annular plate is the opening through which the gas can flow. The adjusting member 12, for example, includes an adjusting plate located above the annular plate and arranged opposite the space 111a surrounded by the annular plate, and the outer peripheral surface of the adjusting plate and the inner peripheral surface of the annular plate form an adjustable gas channel through which the gas can pass. The greater the distance between the adjusting plate and the annular plate, the greater the effective ventilation area of the adjustable gas channel; otherwise, the smaller the distance between the adjusting plate and the annular plate, the smaller the effective ventilation area of the adjustable gas channel. The shape of the outer peripheral surface of the adjusting plate is adapted to the shape of the inner peripheral surface of the annular plate, and the size of the outer peripheral surface of the adjusting plate can be equal to or slightly smaller than the size of the inner peripheral surface of the annular plate.

[0063] In some embodiments, as shown in FIGS. 7 and 8, the adjusting member 12 includes a first sub-adjusting member 12a and a second sub-adjusting member 12b arranged above the first sub-adjusting member 12a. The connection limiting assembly 13 is connected with the first sub-adjusting member 12a and the second sub-adjusting member 12b to be relatively liftable, and limits the closest position of the first sub-adjusting member 12a and the second sub-adjusting member 12b to the opening part 111, and the closest position A0 of the first sub-adjusting member 12a to the opening part 111 is lower than the closest position B0 of the second sub-adjusting member 12b to the opening part 111; and the first sub-adjusting member 12a contacts the second sub-adjusting member 12b and synchronously rises when the upward gas pressure received is greater than the sum of the gravity of the first sub-adjusting member 12a and the second sub-adjusting member 12b, until the sum of the gas pressure and the gravity reaches balance.

[0064] Specifically, the connecting limiting assembly 13 can limit the first sub-adjusting member 12a and the second sub-adjusting member 12b to different nearest positions away from the opening part 111 respectively, and the first sub-adjusting member 12a at the nearest position A0 is closer to the opening part 111 than the second sub-adjusting member 12b at the nearest position B0, in which case, an adjustable gas passage is formed between the outer circumferential surface of the first sub-adjusting member 12a and the inner circumferential surface of the annular plate (i.e. the opening part 111), when the upward gas pressure on the first sub-adjusting member 12a is less than or equal to the gravity of the first sub-adjusting member 12a, as shown in FIGS. 7 and 8, the first sub-adjusting member 12a is at its lowest position A0, and the second sub-adjusting member 12b is at its lowest position B0, at which time the effective ventilation area of the adjustable gas passage is the smallest. When the upward gas pressure on the first sub-adjusting member 12a is greater than the gravity of the first sub-adjusting member 12a, and less than the sum of the gravities of the first sub-adjusting member 12a and the second sub-adjusting member 12b, the second sub-adjusting member 12b is at its lowest position B0, and the first sub-adjusting member 12a rises and falls with the change of the gas pressure until the gas pressure and the gravity of the first sub-adjusting member 12a reach equilibrium, at which time the first sub-adjusting member 12a is kept at a position higher than its lowest position A0 and lower than the lowest position B0 of the second sub-adjusting member 12b, for example, the position of the first sub-adjusting member 12a' shown by the dashed line in FIG. 9. When the upward gas pressure on the first sub-adjusting member 12a is greater than the sum of the gravities of the first sub-adjusting member 12a and the second sub-adjusting member 12b, the first sub-adjusting member 12a will move upwards and contact the second sub-adjusting member 12b, and then rise and fall with the change of the gas pressure together with the second sub-adjusting member 12b until the gas pressure and the sum of the gravities reach equilibrium, at which time the second sub-adjusting member 12b is kept at a position higher than its lowest position, for example, the position of the second sub-adjusting member 12b' shown by the dashed line in FIG. 9; and the first sub-adjusting member 12a is kept at a position in contact with the second sub-adjusting member 12b, for example, the position of the first sub-adjusting member 12a" shown by the dashed line in FIG. 9.

[0065] As can be seen from the above, the first sub-regulating member 12a can be moved alone in a height range between its lowest position A0 and the lowest position B0 of the second sub-regulating member 12b, and can be moved together with the second sub-regulating member 12b in a height range above the lowest position B0 of the second sub-regulating member 12b, i.e. the moving range of the first sub-regulating member 12a is the range H1 shown in Fig. 9. The second sub-regulating member 12b can be moved together with the first sub-regulating member 12a in a height range above its lowest position B0, i.e. the moving range of the second sub-regulating member 12b is the range H2 shown in Fig. 9. The purpose of such arrangement is to adapt to different intake flow rates in the same intake mode, for example, if a relatively small intake flow rate is used in the same intake mode, at this time the upward gas pressure on the first sub-regulating member 12a is greater than the gravity of the first sub-regulating member 12a, but less than the sum of the gravities of the first sub-regulating member 12a and the second sub-regulating member 12b, then the first sub-regulating member 12a is lifted alone until the gas pressure and its own gravity are balanced; if a relatively large intake flow rate is used, at this time the upward gas pressure on the first sub-regulating member 12a is greater than the sum of the gravities of the first sub-regulating member 12a and the second sub-regulating member 12b, then the first sub-regulating member 12a and the second sub-regulating member 12b are lifted together with the change of the gas pressure until the gas pressure and the sum of the gravities are balanced, so that the pressure of the controlled pressure member can be in a stable state under different intake flow rates in the same intake mode, thereby expanding the range of intake flow rates applicable in the same intake mode, so that the pressure of the controlled pressure member can be in a stable state under any intake flow rate in a larger range of intake flow rates, avoiding that the pressure of the controlled pressure member cannot be in a stable state after switching from a small intake flow rate to a large intake flow rate, or the pressure of the controlled pressure member cannot be in a stable state after switching from a large intake flow rate to a small intake flow rate. In actual applications, the gravities of the first sub-regulating member 12a and the second sub-regulating member 12b can be set according to specific needs. In addition, the regulating member 12 is not limited to including the first sub-regulating member 12a and the second sub-regulating member 12b, in actual applications, the regulating member 12 can also include a larger number of sub-regulating members, such as three, four or more than five, to satisfy the pressure of the controlled pressure member in a stable state under a larger range of intake flow rates.

[0066] In some embodiments, the orthographic projection of the first sub-adjusting member 12a on the radial section of the vertical channel segment 14a completely covers the orthographic projection of the second sub-adjusting member 12b on the radial section of the vertical channel segment 14a. In this way, most of the gas pressure can be applied to the first sub-adjusting member 12a, and the second sub-adjusting member 12b can not be subjected to or be subjected to very little upward gas pressure. In actual applications, the orthographic projection shapes of the first sub-adjusting member 12a and the second sub-adjusting member 12b on the radial section of the vertical channel segment 14a can be the same or different. In a specific embodiment, the first sub-adjusting member 12a and the second sub-adjusting member 12b are, for example, both adjusting plates with the same shape, coaxially arranged, and the profile size of the first sub-adjusting member 12a is larger than that of the second sub-adjusting member 12b.

[0067] The connection limiting assembly 13 for realizing the above functions can have various structures. In some embodiments, as shown in FIGS. 7 and 8, the connection limiting assembly 13 includes a connecting rod 131, a first limiting portion 13d and a second limiting portion 13c. The connecting rod 131 is vertically arranged in the vertical channel segment 14a. The first sub-adjusting member 12a is provided with a first connecting hole, and the first sub-adjusting member 12a is vertically sleeved on the connecting rod 131 through the first connecting hole. The second sub-adjusting member 12b is provided with a second connecting hole, and the second sub-adjusting member 12b is vertically sleeved on the connecting rod 131 through the second connecting hole. The first limiting portion 13d is arranged on the connecting rod 131 and located below the first sub-adjusting member 12a, and is used for blocking the first sub-adjusting member 12a from descending to limit the closest position of the first sub-adjusting member 12a to the opening portion 111. The second limiting portion 13c is arranged on the connecting rod 131 and located below the second sub-adjusting member 12b, and is used for blocking the second sub-adjusting member 12b from descending to limit the closest position of the second sub-adjusting member 12b to the opening portion 111. The second limiting portion 13c can pass through the first connecting hole when the first sub-adjusting member 12a is vertically moved.

[0068] Specifically, the first sub-adjusting member 12a and the second sub-adjusting member 12b are both capable of lifting relative to the connecting rod 131, and are respectively limited by the first limiting part 13d and the second limiting part 13c to their lowest positions, and the first sub-adjusting member 12a and the second sub-adjusting member 12b cannot fall off the connecting rod 131. Optionally, the first connecting hole is coaxial with the vertical center line of the first sub-adjusting member 12a, and the second connecting hole is coaxial with the vertical center line of the second sub-adjusting member 12b. In addition, by enabling the second limiting part 13c to pass through the first connecting hole when the first sub-adjusting member 12a is lifting, it can be ensured that the first sub-adjusting member 12a can smoothly rise to contact the second sub-adjusting member 12b and lift synchronously without motion interference with the second limiting part 13c, in the case that the upward gas pressure on the first sub-adjusting member 12a is greater than the sum of the gravity of the first sub-adjusting member 12a and the second sub-adjusting member 12b.

[0069] In some embodiments, as shown in FIG. 8, the connecting rod 131 includes a first rod part 13a and a second rod part 13b located above the first rod part 13a, the diameter of the first rod part 13a is greater than the diameter of the second rod part 13b, and the step surface formed between the first rod part 13a and the second rod part 13b serves as the second limiting part 13c; and the diameter of the first connecting hole is greater than the diameter of the first rod part 13a, the first sub-adjusting member 12a is sleeved on the first rod part 13a through the first connecting hole and is capable of lifting, and the first limiting part 13d is arranged on the first rod part 13a; the diameter of the second connecting hole is smaller than the diameter of the first rod part 13a and greater than the diameter of the second rod part 13b, and the second sub-adjusting member 12b is sleeved on the second rod part 13b through the second connecting hole and is capable of lifting.

[0070] Specifically, by enabling the diameter of the second connecting hole to be smaller than the diameter of the first rod part 13a and greater than the diameter of the second rod part 13b, the step surface serving as the second limiting part 13c can limit the second sub-adjusting member 12b, and because the diameter of the first connecting hole is greater than the diameter of the first rod part 13a, the step surface can pass through the first connecting hole when the first sub-adjusting member 12a is lifting.

[0071] Further, in some embodiments, the step surface is an annular taper surface, and the diameter of the annular taper surface increases from top to bottom. The annular taper surface can make the diameter of the connecting rod 131 smoothly transition from the second rod part 13b to the first rod part 13a, so that the first sub-adjusting member 12a can be automatically centered during the falling process from the second rod part 13b to the first rod part 13a, and the first sub-adjusting member 12a is concentric with the annular taper surface during the falling process, so as to smoothly fall to its lowest position.

[0072] The first sub-adjusting member 12a and the second sub-adjusting member 12b can be adjusted to the closest position in various ways. For example, the exhaust device 1 further comprises a position adjusting assembly connected with the connecting limiting assembly 13, which is used to adjust the height of the connecting limiting assembly 13 relative to the opening part 111, so as to indirectly adjust the closest position of the first sub-adjusting member 12a and the second sub-adjusting member 12b relative to the opening part 111. That is, the height of the connecting limiting assembly 13 relative to the opening part 111 can be adjusted by the position adjusting assembly, so as to indirectly adjust the closest position of the first sub-adjusting member 12a and the second sub-adjusting member 12b relative to the opening part 111. Moreover, when the height of the connecting limiting assembly 13 relative to the opening part 111 is adjusted by the position adjusting assembly, the closest position of the first sub-adjusting member 12a and the second sub-adjusting member 12b relative to the opening part 111 is changed synchronously. This way of adjusting the closest position is more convenient and simpler in structure. Of course, in actual application, the closest position of the first sub-adjusting member 12a and the second sub-adjusting member 12b relative to the opening part 111 can also be adjusted in other ways. For example, a position adjusting assembly of other structure can be used to directly adjust the closest position of the first sub-adjusting member 12a and the second sub-adjusting member 12b relative to the opening part 111. In this case, the closest position of the first sub-adjusting member 12a and the second sub-adjusting member 12b relative to the opening part 111 can be adjusted individually or synchronously.

[0073] Taking the micro-environmental space of the micro-environmental system as an example, the air inlet mode includes an air mode and a nitrogen mode, the nitrogen mode includes a large-flow nitrogen mode and a small-flow nitrogen mode, the flow of air in the air mode is greater than the flow of nitrogen in the large-flow nitrogen mode, and the flow of nitrogen in the large-flow nitrogen mode is greater than the flow of nitrogen in the small-flow nitrogen mode. In this case, in the air mode, as shown in FIG. 7, the height of the connecting limiting assembly 13 relative to the opening part 111 can be adjusted by the position adjusting assembly, so that the closest position A0 of the first sub-adjusting member 12a and the closest position B0 of the second sub-adjusting member 12b are relatively far away from the opening part 111. When the upward gas pressure on the first sub-adjusting member 12a is greater than the sum of the gravity of the first sub-adjusting member 12a and the second sub-adjusting member 12b, the first sub-adjusting member 12a will move upward and contact the second sub-adjusting member 12b, and then move up and down with the second sub-adjusting member 12b along with the change of the gas pressure, until the gas pressure and the sum of the gravity are balanced, so as to realize the stable state of the pressure of the micro-environmental space.

[0074] In the case that nitrogen is needed to replace the air in the micro-environment space, during the process of switching from the air mode to the large-flow nitrogen mode, the inlet flow rate is reduced relative to the air mode, at this time the height of the connecting limiting assembly 13 relative to the opening part 111 can be adjusted by the position adjusting device to reduce the distance between the nearest position of the first and second sub-adjusting members 12a and 12b to the opening part 111, as shown in FIG. 10, the nearest position A0' of the first sub-adjusting member 12a and the nearest position B0' of the second sub-adjusting member 12b are lower than the nearest position A0 of the first sub-adjusting member 12a to the opening part 111 and the nearest position B0 of the second sub-adjusting member 12b to the opening part 111 shown in FIG. 7, respectively, in the large-flow nitrogen mode, since the upward gas pressure on the first sub-adjusting member 12a is not enough to push the first and second sub-adjusting members 12a and 12b to move upward together, at this time the first sub-adjusting member 12a alone rises and falls with the change of the gas pressure it receives until the gas pressure and the gravity of the first sub-adjusting member 12a reach equilibrium, at this time the first sub-adjusting member 12a is in the position shown in FIG. 10, thereby achieving that after switching from the air mode to the large-flow nitrogen mode, the exhaust flow rate through the adjustable gas passage between the adjusting member 12 and the opening part 111 is reduced, and at the same time the pressure in the micro-environment space is again in a stable state.

[0075] After the micro-environment space is filled with nitrogen, in order to save the consumption of nitrogen, it is needed to switch from the large-flow nitrogen mode to the small-flow nitrogen mode, during this process, the inlet flow rate is reduced relative to the large-flow nitrogen mode, as shown in FIG. 11, at this time the height of the connecting limiting assembly 13 relative to the opening part 111 remains unchanged, and in the small-flow nitrogen mode, since the upward gas pressure on the first sub-adjusting member 12a is not enough to push the first sub-adjusting member 12a to move upward, at this time the first sub-adjusting member 12a gradually falls back to its lowest position A0', thereby achieving that after switching from the large-flow nitrogen mode to the small-flow nitrogen mode, the exhaust flow rate through the adjustable gas passage between the adjusting member 12 and the opening part 111 is reduced, and at the same time the pressure in the micro-environment space is again in a stable state.

[0076] The position adjusting assembly for achieving the above functions can have various forms. For example, the position adjusting assembly can be adjusted in a manual manner or in an automatic control manner. As shown in FIG. 8, the position adjusting assembly includes, for example, a guide rod 16 and a limiting structure 161, wherein the guide rod 16 is arranged in the vertical passage segment 14a in a lifting manner, the guide rod 16 is vertically arranged, and the lower end of the guide rod 16 is connected with the connecting limiting assembly 13; the limiting structure 161 is used to fix the connecting limiting assembly 13 relative to the exhaust main body 11 after the closest positions of the first sub-adjusting member 12a and the second sub-adjusting member 12b to the opening part 111 are adjusted. By adjusting the height of the connecting limiting assembly 13, the pressure consistency among different controlled pressure members can be achieved when the pressures of the different controlled pressure members are inconsistent in the same intake mode.

[0077] Specifically, the guide rod 16 is connected with the connecting limiting assembly 13 through the lower end thereof, and the guide rod 16 can drive the connecting limiting assembly 13 to synchronously lift when the guide rod 16 lifts. The lifting movement of the guide rod 16 can be manually controlled or automatically controlled by setting a driving source. After the first sub-adjusting member 12a and the second sub-adjusting member 12b reach the closest positions to the opening part 111 by lifting the guide rod 16, the connecting limiting assembly 13 can be fixed relative to the exhaust main body 11 by the limiting structure 161, so as to lock the connecting limiting assembly 13 at the current height position, thereby ensuring that the lowest positions of the first sub-adjusting member 12a and the second sub-adjusting member 12b to the opening part 111 remain unchanged.

[0078] The limiting structure 161 for achieving the above functions includes, for example, a locking nut. As shown in FIGS. 6 and 8, the upper end of the guide rod 16 penetrates the exhaust main body 11 and extends to the outside of the exhaust main body 11. The guide rod 16 penetrates, for example, the top wall of the adjusting box body 112 constituting the vertical passage end 14a. The guide rod 16 has an external thread, and the locking nut (i.e., the limiting structure 161) cooperates with the external thread and can be locked to the outer surface (e.g., the top wall of the adjusting box body 112) of the exhaust main body 11, so as to fix the guide rod 16 relative to the exhaust main body 11. Specifically, before the locking nut is tightened, the guide rod 16 can lift relative to the exhaust main body 11 to adjust the height of the lower end thereof, thereby indirectly adjusting the height of the connecting limiting assembly 13 (e.g., the connecting rod 131) connected with the guide rod 16. After the adjustment is completed, the locking nut is tightened to the outer surface (e.g., the top wall of the adjusting box body 112) of the exhaust main body 11, thereby locking the current height position of the guide rod 16.

[0079] In some embodiments, as shown in FIG. 8, the lower end of the guide rod 16 is fixedly connected with the connecting rod 131 through a horizontal rod 162, specifically, one end of the horizontal rod 162 is fixedly connected with the lower end of the guide rod 16, for example, connected as a whole or fixedly connected through welding. The other end of the horizontal rod 162 is provided with a fastening part 163 having an internal thread, the connecting rod 131 has a first rod part 13a and a second rod part 13b located above the first rod part 13a, and a connecting rod part located above the second rod part 13b, wherein the lower part of the connecting rod part is provided with an external thread, for example, the fixed connection between the connecting rod part and the fastening part 163 is achieved through the cooperation between the internal thread and the external thread, but the embodiments of the present application are not limited thereto, in actual application, the connecting rod part and the fastening part 163 can also be fixedly connected through welding, bonding, clamping, riveting and the like. The upper end of the second rod part 13b is fixedly connected with the horizontal rod 162, for example, connected as a whole or fixedly connected through welding.

[0080] In some embodiments, the position adjusting assembly can be adjusted in an automatic control manner. In this case, the position adjusting assembly further comprises a pneumatic cylinder 15 arranged outside the exhaust body 11, for example fixed to the top wall of the adjusting box body 112. The piston rod 151 of the pneumatic cylinder 15 is used as part of the connecting rod 131, and the lower end of the connecting rod 131 penetrates through the exhaust body 11 (for example the top wall of the adjusting box body 112) and extends into the interior of the vertical channel segment 14a to be connected with the first sub-adjusting piece 12a and the second sub-adjusting piece 12b which can be relatively lifted and lowered. Specifically, in the embodiment in which the connecting rod 131 has the first rod portion 13a, the second rod portion 13b and the connecting rod portion, the connecting rod portion is used as the piston rod 151 of the pneumatic cylinder 15, and the lower end of the piston rod 151 penetrates through the exhaust body 11 and extends into the interior of the vertical channel segment 14a and is connected with the second rod portion 13b located in the interior of the vertical channel segment 14a. It should be noted that since the piston rod 151 of the pneumatic cylinder 15 can only stop at the start position and the end position of the stroke, but cannot stop in the middle, by the arrangement of the guide rod 16 and the limiting structure 161, combined with the use of the pneumatic cylinder 15, the height of the connecting rod 131 can be automatically controlled, and the current height position of the connecting rod 131 can be locked. For example, as shown in FIG. 7, in order to make the first sub-adjusting piece 12a be located at the closest position A0 from the opening portion 111, and the second sub-adjusting piece 12b be located at the closest position B0 from the opening portion 111, the piston rod 151 of the pneumatic cylinder 15 is at the start position of the stroke, i.e. the piston rod 151 is at the limit position of retraction, at this time, the guide rod 16 and the limiting structure 161 are not needed for locking. As shown in FIG. 10, in order to make the first sub-adjusting piece 12a be located at the closest position A0' from the opening portion 111, and the second sub-adjusting piece 12b be located at the closest position B0' from the opening portion 111, the piston rod 151 of the pneumatic cylinder 15 is extended from the start position to the position shown in FIG. 10, at this time, the piston rod 151 is located between the start position and the end position of the stroke, and the guide rod 16 and the limiting structure 161 are needed for locking.

[0081] In some embodiments, as shown in FIG. 6, the exhaust body 11 comprises a closed adjusting box body 112, the interior of the adjusting box body 112 constitutes the vertical channel segment 14a, the opening portion 111 is formed in the bottom wall of the adjusting box body 112, for example an annular plate, the space 111a surrounded by the annular plate is a first opening for communicating with the exhaust port of the controlled pressure piece; the side wall of the adjusting box body 112 further forms a second opening 111b for communicating with the plant exhaust end.

[0082] Specifically, the adjusting member 12 is located in the adjusting box 112 and above the first opening (i.e. the space 111a surrounded by the annular plate), and is for example an adjusting plate (e.g. including a first sub-adjusting member 12a and a second sub-adjusting member 12b) whose outer circumferential surface and the inner circumferential surface of the annular plate form an adjustable gas passage, and the distance between the adjusting plate (i.e. the first sub-adjusting member 12a) and the annular plate is greater, the effective gas passage area of the adjustable gas passage is greater; otherwise, the distance between the adjusting plate and the annular plate is smaller, the effective gas passage area of the adjustable gas passage is smaller.

[0083] In actual applications, the first opening can be directly connected with the exhaust port of the controlled pressure device, or can be connected with the exhaust port of the controlled pressure device through other channel components. In a specific embodiment, as shown in FIG. 6, the exhaust body 11 further includes an air inlet box 113 located below the adjusting box 112 and fixedly and sealingly connected with the bottom wall (e.g. the annular plate) of the adjusting box 112, and the exhaust passage 14 has an air inlet passage segment 14b, the inside of the air inlet box 113 constitutes the air inlet passage segment 14b, the air inlet end of the air inlet passage segment 14b is for example provided on the side wall of the air inlet box 113 and used for communicating with the exhaust port of the controlled pressure device, and the air outlet end of the air inlet passage segment 14b is provided on the top wall of the air inlet box 113 and used for communicating with the first opening.

[0084] In some embodiments, as shown in FIGS. 5, 12 and 13, the exhaust device 1 further includes a pressure balance assembly 17 provided on the side wall 112a of the adjusting box 112 opposite to the second opening 111b, and the pressure balance assembly 17 and the side wall 112a where it is located form a balance opening with an adjustable size, which communicates the inside of the adjusting box 112 with the outside. By adjusting the size of the balance opening formed by the pressure balance assembly 17 and the side wall 112a where it is located, the influence of the fluctuation of the negative pressure at the factory exhaust end on the pressure of the controlled pressure device can be eliminated.

[0085] Specifically, in the absence of the pressure balance assembly 17, the plant exhaust end is under negative pressure, the gas pressure flowing into the vertical passage segment 14a from the first opening of the self-adjusting box 112 is positive, and during the process of the gas flow passing through the vertical passage segment 14a and being discharged from the second opening 111b of the adjusting box 112 into the plant exhaust end, the gas flow will flow from the high-pressure side to the low-pressure side due to the pressure difference, i.e., the gas flow is discharged from the first opening and the second opening 111b to the plant exhaust end. In this case, the pressure fluctuation of the plant exhaust end will be transmitted to the inside of the adjusting box 112, causing the pressure difference between the inside of the adjusting box 112 and the pressure of the plant exhaust end to become larger or smaller, which will further be transmitted to the inside of the controlled pressure device, causing the pressure of the controlled pressure device to be affected. To solve this problem, by adjusting the size of the above-mentioned balance opening, the pressure of the balance opening can be kept in a critical state where the gas flow inside the adjusting box 112 needs to overcome the resistance of the side wall where the balance opening is located when being discharged to the outside of the adjusting box 112, and in the above-mentioned critical state, the negative pressure value of the discharge direction is not enough to overcome the resistance here. If the pressure of the plant exhaust end fluctuates, causing the pressure difference between the inside of the adjusting box 112 and the pressure of the plant exhaust end to become larger, the gas outside the box can overcome the resistance of the side wall where the balance opening is located to enter the inside of the adjusting box 112, thereby avoiding the large pressure difference from being transmitted to the inside of the controlled pressure device, causing the pressure of the controlled pressure device to be affected. If the pressure of the plant exhaust end fluctuates, causing the pressure difference between the inside of the adjusting box 112 and the pressure of the plant exhaust end to become smaller, the gas flow from the first opening to the second opening 111b will also be hindered, causing part of the gas in the adjusting box 112 to overcome the resistance of the side wall where the balance opening is located and be discharged to the outside of the adjusting box 112, thereby avoiding the small pressure difference from being transmitted to the inside of the controlled pressure device, causing the pressure of the controlled pressure device to be affected.

[0086] The structure of the pressure balance assembly 17 can be various, for example, as shown in FIG. 13, the side wall 112a where the pressure balance assembly 17 is located is formed with a plurality of first grid holes 112a1; the pressure balance assembly 17 comprises a moving plate 172 and a locking screw 173, the moving plate 172 is movably stacked on the side wall 112a, and the moving plate 172 is formed with a plurality of second grid holes 171, each second grid hole 171 is arranged one-to-one corresponding to each first grid hole 112a1, so as to adjust the overlapping area of the first grid hole 112a1 and the second grid hole 171 when the moving plate 172 moves relative to the side wall 112a. For example, as shown in FIG. 13, (a) is the state when the overlapping area of the first grid hole 112a1 and the second grid hole 171 is the largest, at this time the balance opening is in the largest state. When it is needed to reduce the balance opening (i.e. the overlapping area), the moving plate 172 can be moved to the right relative to the side wall 112a, (b) is the state after moving, the overlapping area of the first grid hole 112a1 and the second grid hole 171 is reduced, at this time the balance opening is reduced. If the moving plate 172 continues to move to the right relative to the side wall 112a, the overlapping area of the first grid hole 112a1 and the second grid hole 171 can be reduced to 0, at this time the balance opening is closed.

[0087] The locking screw 173 is used to relatively fix the moving plate 172 and the side wall 112a after adjusting the overlapping area of the first grid hole 112a1 and the second grid hole 171. The shapes and sizes of the above-mentioned first grid hole 112a1 and the second grid hole 171 are the same, for example, they are both strip-shaped through holes, which are used to enable the side wall where the strip-shaped through hole is located to generate a certain resistance when the gas passes through. The strip-shaped through hole includes, for example, straight line through hole, wavy line through hole, zigzag line through hole, etc.

[0088] By adjusting the overlapping area of the first gate hole 112a1 and the second gate hole 171, the size of the balance opening formed by the overlapping part of the first gate hole 112a1 and the second gate hole 171 can be adjusted. For example, by moving the moving plate 172 relative to the side wall 112a along the direction perpendicular to the length direction of the strip-shaped through hole, the above-mentioned overlapping area is adjusted. Further, in some embodiments, a long hole 174 is provided on the moving plate 172, the length direction of the long hole 174 is consistent with the moving direction of the moving plate 172, and a threaded hole (not shown in the figure) is provided on the side wall 112a of the adjusting box 112 and at a position corresponding to the long hole 174. The locking screw 173 passes through the long hole 174 and is screwed with the threaded hole. When adjusting, the locking screw 173 can be in a loosened state, and at this time, the moving plate 172 can be moved relative to the side wall between the two ends of the length direction of the long hole 174 to adjust the above-mentioned overlapping area. In actual application, the number of long holes 174 can be multiple, and multiple long holes 174 are arranged at intervals around the moving plate 172 to improve the moving and fixing reliability of the moving plate 172. Taking the rectangular moving plate 172 as an example, the number of long holes 174 can be four, and the long holes 174 are respectively arranged at the four corners of the rectangular moving plate 172. The number of threaded holes on the side wall is the same as the number of long holes 174, and is arranged one by one. The number of locking screws 173 is the same as the number of long holes 174, and is arranged one by one.

[0089] In some embodiments, as shown in FIG. 5 and FIG. 6, the exhaust main body 11 further comprises an exhaust box 114, which is sealingly connected with the side wall where the second opening 111b of the adjusting box 112 is located; the exhaust passage 14 has an exhaust passage section 14c, the inside of the exhaust box 114 constitutes the exhaust passage section 14c; the air inlet end of the exhaust passage section 14c communicates with the second opening 111b, and the air outlet end of the exhaust passage section 14c is used to communicate with the factory exhaust end. The gas flowing out of the second opening 111b can flow into the factory exhaust end through the exhaust passage section 14c. On this basis, an adjusting damper 18 is arranged in the exhaust passage section 14c, which is used to adjust the gas passing area of the exhaust passage section 14c at the adjusting damper 18. By means of the adjusting damper 18, when the negative pressure provided by the factory exhaust end is different, the gas passing area of the exhaust passage section 14c at the adjusting damper 18, i.e. the opening degree of the adjusting damper 18, can be adjusted to ensure that the gas pressures in the exhaust passage sections 14c connected by different factory exhaust ends are consistent. In actual application, the shape and size of the exhaust box 114 can be designed according to the installation space between the factory exhaust end and the second opening 111b.

[0090] Further, in some embodiments, the exhaust box 114 is further provided with a pressure detection port 181. Through the pressure detection port 181, the gas pressure of the exhaust passage section 14c can be detected by using a pressure sensor, so as to control the adjusting damper 18 to adjust the gas passing area of the exhaust passage section 14c at the adjusting damper 18 according to the detected actual gas pressure and the preset target gas pressure, so as to realize the consistency of the actual gas pressure and the preset target gas pressure. The adjusting damper 18 can be manually adjusted or automatically adjusted.

[0091] In summary, the exhaust device 1 provided by the embodiments of the present application only needs to be provided with one flow passage to meet the requirements of different intake modes on exhaust flow, which, compared with the prior art, does not need to be provided with multiple flow passages, thereby being conducive to reducing the size of the exhaust device 1, and can reduce the number of interfaces with the factory exhaust end, thereby reducing the installation space, and further can be applied to application scenarios with smaller installation space. On this basis, when different intake modes are switched, the adjusting member 12 can be lifted or lowered with the change of the gas pressure received thereby until the gas pressure and the gravity thereof reach a balance, thereby realizing that the pressure of the controlled pressure member is in a stable state when different intake modes are switched.

[0092] As another technical solution, the embodiments of the present application further provide a semiconductor processing equipment, which comprises a micro-environment system and an exhaust device 1 for controlling a micro-environment space 100 of the micro-environment system, and the exhaust device 1 adopts the above-mentioned exhaust device 1 provided by the embodiments of the present application.

[0093] The semiconductor processing equipment is, for example, a semiconductor heat treatment equipment.

[0094] The micro-environment system is used to provide a stable area (i.e., the micro-environment space 100) for the transmission, loading and unloading and transfer of wafers inside the equipment, and the transmission, loading and unloading of the wafers before and after the process treatment are all performed in the micro-environment space.

[0095] In some embodiments, the semiconductor processing equipment further comprises a gas inlet device 2 for introducing at least one of a plurality of different gases into the micro-environment space 100, the gas inlet device 2 comprising, for example, a first gas inlet pipe 21 and a second gas inlet pipe 23, and a first valve 22 and a second valve 24 arranged on the first gas inlet pipe 21 and the second gas inlet pipe 23 respectively, wherein the first gas inlet pipe 21 and the second gas inlet pipe 23 are used for introducing nitrogen and air into the micro-environment space 100 respectively, and the first valve 22 and the second valve 24 are used for switching between nitrogen and air and adjusting the flow rate of the gas, so that different gas inlet modes can be maintained in the micro-environment space 100, the gas in the micro-environment space 100 in different gas inlet modes is discharged through the gas outlet device 1, and the pressure of the micro-environment space 100 is controlled. In this case, the gas inlet modes include, for example, an air mode and a nitrogen mode, the air mode is used for introducing air into the micro-environment space through the gas inlet device, and the nitrogen mode is used for introducing nitrogen into the micro-environment space through the gas inlet device, and the flow rate of the introduced air is greater than that of the introduced nitrogen.

[0096] The semiconductor processing equipment provided by the embodiments of the present application can reduce the size of the gas outlet device 1, reduce the number of interfaces with the factory exhaust end, and keep the pressure of the controlled pressure component stable when different gas inlet modes are switched.

[0097] It can be understood that the above embodiments are only exemplary embodiments for illustrating the principles of the present application, and the present application is not limited thereto. Various modifications and improvements can be made by those skilled in the art without departing from the spirit and essence of the present application, and these modifications and improvements are also considered to be within the protection scope of the present application.

Claims

1. An exhaust device applied to a semiconductor processing apparatus, characterized by, The utility model relates to a kind of exhaust systems, comprising: Exhaust main body, exhaust passage is arranged in the exhaust main body, the air inlet of the exhaust passage is used to communicate with the exhaust port of pressure control piece, the air outlet of the exhaust passage is used to communicate with plant exhaust end;The exhaust passage has vertical channel section and opening portion located at the bottom of the vertical channel section; Adjusting piece, oppositely located in the vertical channel section, above the opening portion; And Connecting limiting component, relative to the adjusting piece with the connecting of lifting, and limiting the nearest position of the adjusting piece distance the opening portion, so that the adjusting piece rises from the nearest position when the gas pressure received is greater than its gravity, until the gas pressure and the gravity reach balance.

2. The exhaust apparatus according to claim 1, characterized by The adjusting piece includes first sub-adjusting piece and second sub-adjusting piece arranged above the first sub-adjusting piece; The connecting limiting component is relative to the first sub-adjusting piece and the second sub-adjusting piece with the connecting of lifting, and limiting the nearest position of the first sub-adjusting piece and the second sub-adjusting piece distance the opening portion, and the nearest position of the first sub-adjusting piece distance the opening portion is lower than the nearest position of the second sub-adjusting piece distance the opening portion; The first sub-adjusting piece contacts the second sub-adjusting piece and rises synchronously when the gas pressure received is greater than the sum of the gravity of the first sub-adjusting piece and the second sub-adjusting piece, until the gas pressure and the sum of the gravity reach balance.

3. The exhaust apparatus according to claim 2, characterized by The orthographic projection of the first sub-adjusting piece on the radial cross section of the vertical channel section completely covers the orthographic projection of the second sub-adjusting piece on the radial cross section of the vertical channel section.

4. The exhaust apparatus according to claim 2, characterized by The connecting limiting component includes: Connecting rod, vertically arranged in the vertical channel section, first connecting hole is arranged in the first sub-adjusting piece, the first sub-adjusting piece is arranged on the connecting rod with the connecting of lifting through the first connecting hole;Second connecting hole is arranged in the second sub-adjusting piece, the second sub-adjusting piece is arranged on the connecting rod with the connecting of lifting through the second connecting hole; First limiting portion, arranged in the connecting rod, below the first sub-adjusting piece, for blocking the first sub-adjusting piece to descend, to limit the nearest position of the first sub-adjusting piece distance the opening portion; Second limiting portion, arranged in the connecting rod, below the second sub-adjusting piece, for blocking the second sub-adjusting piece to descend, to limit the nearest position of the second sub-adjusting piece distance the opening portion, the second limiting portion can pass through the first connecting hole when the first sub-adjusting piece rises.

5. The exhaust apparatus according to claim 4, characterized by The connecting rod includes first rod portion and second rod portion located above the first rod portion, the diameter of the first rod portion is greater than the diameter of the second rod portion, and the step surface formed between the first rod portion and the second rod portion is used as the second limiting portion. The first connecting hole has a diameter larger than that of the first rod portion, the first sub-adjusting member is arranged on the first rod portion in a lifting manner through the first connecting hole, and the first limiting portion is arranged on the first rod portion; the second connecting hole has a diameter smaller than that of the first rod portion and larger than that of the second rod portion, and the second sub-adjusting member is arranged on the second rod portion in a lifting manner through the second connecting hole.

6. The exhaust apparatus according to claim 5, characterized by The stepped surface is an annular conical surface, and the diameter of the annular conical surface increases from top to bottom.

7. The exhaust apparatus according to any one of claims 2 to 6, characterized by Further comprising: A position adjusting assembly connected with the connecting and limiting assembly, and used for lifting the connecting and limiting assembly to adjust the closest positions of the first sub-adjusting member and the second sub-adjusting member to the opening portion.

8. The exhaust apparatus according to claim 7, characterized by The position adjusting assembly comprises: A guide rod arranged in the vertical channel segment in a lifting manner, the guide rod is vertically arranged, and a lower end of the guide rod is connected with the connecting and limiting assembly; A limiting structure used for relatively fixing the connecting and limiting assembly to the exhaust main body after the closest positions of the first sub-adjusting member and the second sub-adjusting member to the opening portion are adjusted.

9. The exhaust apparatus according to claim 8, characterized by The limiting structure comprises a locking nut, an upper end of the guide rod penetrates through the exhaust main body and extends to the outside of the exhaust main body; The guide rod has an external thread, the locking nut is matched with the external thread, and can be locked to the outer surface of the exhaust main body to relatively fix the guide rod to the exhaust main body.

10. The exhaust apparatus according to claim 8, characterized by The position adjusting assembly further comprises a pneumatic cylinder, the pneumatic cylinder is arranged outside the exhaust main body, a piston rod of the pneumatic cylinder is used as the connecting rod, and a lower end of the connecting rod penetrates through the exhaust main body and extends to the inside of the vertical channel segment.

11. The exhaust apparatus according to any one of claims 1 to 6, characterized by The exhaust main body comprises a closed adjusting box body, the inside of the adjusting box body constitutes the vertical channel segment, the opening portion is a first opening formed in a bottom wall of the adjusting box body, and the first opening is used for communicating with the exhaust port; a side wall of the adjusting box body further forms a second opening used for communicating with the factory exhaust end.

12. The exhaust apparatus according to claim 11, characterized by Further comprising a pressure balance assembly arranged on a side wall of the adjusting box body opposite to the second opening, and the pressure balance assembly and the side wall where the pressure balance assembly is arranged constitute a balance opening with an adjustable size, and the balance opening communicates the inside of the adjusting box body with the outside.

13. The exhaust apparatus of claim 12, wherein The side wall where the pressure balance assembly is arranged forms a plurality of first grid holes; The pressure balance assembly comprises a moving plate and a locking screw, the moving plate is movably stacked on the side wall, and a plurality of second grid holes are formed on the moving plate, each of the second grid holes is arranged in one-to-one correspondence with each of the first grid holes to adjust the overlapping area of the first grid holes and the second grid holes when the moving plate moves relative to the side wall; The locking screw is used for relatively fixing the moving plate to the side wall after the overlapping area of the first grid holes and the second grid holes is adjusted.

14. The exhaust apparatus of claim 11, wherein The exhaust main body further comprises an exhaust box body, which is sealingly connected with the side wall where the second opening of the adjusting box body is located; the exhaust passage has an exhaust passage section, the inside of the exhaust box body constituting the exhaust passage section; the air inlet end of the exhaust passage section is in communication with the second opening, and the air outlet end of the exhaust passage section is used to be in communication with the factory exhaust end; An adjusting damper is arranged in the exhaust passage section, which is used to adjust the gas passing area of the exhaust passage section at the adjusting damper.

15. The exhaust apparatus of claim 14, wherein A pressure detection port is further arranged on the exhaust box body.

16. A semiconductor processing apparatus comprising a micro-environment system, a gas inlet device and an exhaust device for controlling the micro-environment space of the micro-environment system, characterized in that, The exhaust device adopts the exhaust device according to any one of claims 1-15.

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