Automatic charging of a crystal growing system

Abstract

The invention relates to a charge carrier for a crystal growing system, comprising: a growth cell receptacle for receiving a growth cell on the charge carrier; and a carrier centring means for centring the charge carrier on the crystal growing system, wherein the carrier centring means comprises at least one first centring element arranged on the charge carrier for centring the charge carrier on at least one centring element receptacle.

Description

[0001] Automatic Loading of a Crystal Growth System Description Field of the Invention The present invention relates in principle to the automatic loading of a crystal growth system, and specifically to a batch carrier for a crystal growth system, a crystal growth system, a method for loading a crystal growth system, a device for batch carrier centering, and an automated loading cart for automatically loading or unloading a crystal growth system. Background and General Description of the Invention A crystal growth system is typically loaded with an inoculum at the beginning of the growth process. The crystal gradually grows on this inoculum within a growth chamber during the growth process. Preparing and filling the growth chamber can be quite complex. Currently, the growth chamber is usually loaded manually with the inoculum by an operator.This means, however, that the area around the growth chamber, which may be designed as a safety zone, must be accessible to an operator, who must be present in the vicinity of the furnace or growth chamber before and, if necessary, after the process. Furthermore, the inoculum must be precisely aligned during the filling process, which may take longer. A key concept and one of the objectives of the present invention is to simplify the filling process of a crystal growth system. Therefore, improving or simplifying the alignment of the inoculum in or on the growth chamber is also a focus of the present invention. Another key concept of the present invention is to further develop crystal growth systems so that they can be filled automatically with the inoculum.The object of the present invention can therefore be seen as providing a device and a method with which known crystal growth systems can be further developed, particularly to make them easier to operate during the filling process and / or to enable automated filling. This problem is solved by the invention as defined in the independent claims. Dependent claims describe further developments and preferred embodiments of the invention. It has proven quite practical to mount the inoculum on a batch carrier. This batch carrier can simultaneously form part of the outer shell of the growth chamber. In one example, by mounting the batch carrier, the growth chamber can be hermetically sealed as soon as the batch carrier with the inoculum is attached and closed.In another example, the batch carrier can essentially comprise the crystal growth chamber. In other words, a crystal growth chamber, or at least a substantial part (more than 50%) of the crystal growth chamber, can be formed by the batch carrier, and the batch carrier or crystal growth chamber is inserted into the crystal growth system as described below. To solve one, several, or all of the presented aspects of the problem, a batch carrier for a crystal growth system is introduced. The batch carrier includes a growth cell receptacle for holding a growth cell on the batch carrier. In other words, the inoculation cell can be held on the batch carrier. The batch carrier can also comprise the crystal growth chamber for insertion into the crystal growth system. Furthermore, the batch carrier includes a carrier centering mechanism for centering the batch carrier on the crystal growth system.The carrier centering can be designed as a multi-stage carrier centering system, specifically as a centering cascade, in which various centering devices operate sequentially. These different centering devices can provide varying dimensional tolerances, with overall centering occurring gradually from a large to a small centering tolerance. In particular, the carrier centering is used to center the batch carrier at an opening of the crystal growth system. The carrier centering system comprises at least one first centering element arranged on the batch carrier for centering the batch carrier at at least one centering element receptacle. The first centering element can be designed as a coarse centering element for pre-centering the batch carrier at the at least one centering element receptacle.The carrier centering can further be implemented as a multi-stage carrier centering system. Preferably, the carrier centering system comprises a first fine centering element arranged on the batch carrier, which is positioned and / or configured so that it only engages with a fine centering element receptacle after the pre-centering by means of the coarse centering element has been completed. The batch carrier can be further designed by including a media coupling for the automatic connection of electrical and / or fluid-carrying connectors when the batch carrier is positioned at the opening. In other words, the media coupling is automatically coupled or connected simultaneously or in one step when the batch carrier is positioned at the (flange) opening. This eliminates the need for a complex, separate connection of the media. The media coupling of the batch carrier can be self-centering.For example, the self-centering of the media coupling can form a stage of the cascading centering process. Accordingly, media coupling centering can occur after coarse and fine centering. Media coupling centering may center the two coupling parts relative to each other; preferably, media coupling centering occurs in a relative movement with respect to the batch carrier on which one part of the media coupling is mounted. In other words, the media coupling is preferably floating relative to the batch carrier. For this floating mounting, the media coupling can, in particular, include a spring bearing for fine centering. Alternatively or cumulatively, the media coupling can have four spring-loaded connecting elements for a detachable connection to the batch carrier. The media coupling can also be designed or arranged such that it is co-centered by the multi-stage carrier centering process.The batch carrier can further be equipped with at least one underside loading trolley coupling, which is designed for mounting the batch carrier on a loading trolley. The loading trolley coupling can preferably be designed to center the unit. In a preferred embodiment, the batch carrier is designed as a bottom flange of the crystal growth system. In other words, the batch carrier can be designed to hermetically seal the opening. Alternatively or cumulatively, the batch carrier can include a cover section, in particular designed as a flange cover, to cover the opening. In other words, the batch carrier spans the opening. In another embodiment, the batch carrier is designed as a crystal growth chamber that is inserted into the crystal growth system.In other words, the batch carrier can form a housing or be inserted into a housing, which is then inserted into the crystal growth system. The housing and / or the crystal growth system can then be closed with a separate component. In yet another embodiment, a separate closure is provided, so that the batch carrier is inserted into the crystal growth system and the crystal growth system is hermetically sealed by the separate closure. For example, the batch carrier can be inserted into the crystal growth system through the opening, and the opening can then be hermetically sealed by means of the closure. The coarse centering can comprise two centering pins, each arranged on opposite sides of the batch carrier. The centering pins can be oriented essentially perpendicularly.The term "perpendicularly projecting" can refer to the mounting surface on which the centering bolts are mounted. Alternatively or cumulatively, the centering bolts can have a conically tapered section. The batch carrier can further comprise a centering wing for receiving the first coarse centering element. The centering wing can be formed from a flat element that projects laterally from the batch carrier. Alternatively or cumulatively, the batch carrier can comprise a coupling wing for arranging a second coarse centering element and / or the media coupling on the coupling wing. The coupling wing can preferably be arranged on a side opposite the centering wing. The crystal growth system, in particular for growing silicon carbide single crystals, is also within the scope of this description.The crystal growth system comprises a growth chamber for cultivating a crystal, an opening, particularly on the underside of the growth chamber, configured for introducing a growth cell into the growth chamber, and a batch carrier, wherein the batch carrier has a first centering element and a media coupling. The batch carrier is preferably configured to be automatically hermetically sealed to the opening. Alternatively or cumulatively, the batch carrier can be arranged at the opening and seal the opening. Alternatively or cumulatively, an externally arranged centering wing can be included for receiving the centering element. Alternatively or cumulatively, an externally arranged coupling wing can be included, particularly arranged opposite the centering wing, for receiving the media coupling.Within the scope of this description, a method for loading a crystal growth system, in particular as described above, is also included, comprising the following steps: Loading a loading cart with a batch carrier, in particular as described above. The batch carrier includes a growth cell for insertion into the crystal growth system. The following steps are also carried out: automated movement of the loading cart to a loading position on the crystal growth system, where initial loading centering of the batch carrier relative to an opening of the crystal growth system takes place; positioning of the batch carrier against the crystal growth system until at least one centering element of the batch carrier interacts with a counter-centering element of the crystal growth system. In a further development of the method, the centering element can be a coarse centering element.Alternatively or cumulatively, the positioning can be carried out such that the batch carrier is coarsely centered at an opening of the crystal growth system. Alternatively or cumulatively, the step can include further positioning of the batch carrier at the opening such that, after completion of the coarse centering, a fine centering of the batch carrier at the opening is performed. After fine centering, a final positioning of the batch carrier at the opening can then take place until the batch carrier is held vacuum-tight at the opening. The process can also be configured in such a way that the loading centering has a loading tolerance. Loading centering describes the accuracy of centering the batch carrier using the loading cart. The coarse centering can also have a coarse tolerance.The fine centering can ultimately have a fine tolerance, where the loading tolerance is greater than the coarse tolerance and the coarse tolerance is greater than the fine tolerance. After the batch carrier is held at the opening, it can then be removed from the crystal growth system and moved with the loading cart to a starting position, a second batch carrier can be picked up at the carrier holder, a second loading position can be reached at a second crystal growth system, and the second batch carrier can be attached to the second crystal growth system. The first batch carrier and the second batch carrier can advantageously be designed to be interchangeable with each other, so that a plurality of crystal growth systems with a plurality of batch carriers can be combined with each other as desired. In other words, a batch carrier is designed so that it can be attached to a plurality of crystal growth systems.Within the scope of this description, an automated loading cart for the automatic loading or unloading of a crystal growth system and / or equipped for use with a crystal growth system, in particular as described above, is also included. The automated loading cart comprises a position detection system for automatically determining the position of the loading cart, in particular in relation to a loading position on the crystal growth system, a floatingly mounted batch carrier holder for receiving a batch carrier on the loading cart, wherein the loading cart is equipped to automatically approach the loading position with a loading tolerance and to automatically position the batch carrier against the crystal growth system. The automatic positioning of the batch carrier (10) against the crystal growth system can be further designed such that the batch carrier automatically centers itself on an opening flange.Alternatively or cumulatively, the batch carrier can be configured to seal the opening vacuum-tight when further positioned by the loading trolley. The position detection system can advantageously include magnetic sensors or magnets for determining the loading position and / or orientation. Alternatively or cumulatively, the batch carrier holder can have at least two, preferably three, bearing supports. The batch carrier holder can be self-centering, in particular the bearing supports can be spring-loaded. Alternatively or cumulatively, the batch carrier holder can be configured to center itself on trolley centering bolts arranged on the underside of the batch carrier. The loading trolley can further be configured to automatically approach a plurality of at least two crystal growth systems sequentially in order to automatically attach or remove a batch carrier at each system.The invention is described in more detail below with reference to exemplary embodiments and the figures, whereby identical and similar elements are partially provided with the same reference numerals and the features of the different exemplary embodiments can be combined with one another. Brief description of the figures: Fig. 1 Top view of an embodiment of a batch carrier, Fig. 2 Side view of an embodiment of a media coupling for a batch carrier, Fig. 3 Perspective side view of an embodiment of a batch carrier, Fig. 4 Embodiment of a batch carrier mounted on an opening of a crystal growth system in perspective view, Fig. 5 Embodiment of a loading cart with a batch carrier mounted on it, Fig. 6 Further embodiment of a loading cart, Fig. 7 Loading cart according to the previous embodiment in loading position, Fig. 8 Loading of a crystal growth system using the loading cart, PVA TePla AG - 7 - 08.09.2025 pva-83WOP Fig. 9 Schematic process flow for loading a crystal growth system. Detailed description of the invention: Referring to Fig. 1, a first embodiment of a batch carrier 10 is shown, with a centering wing 40 on a first side of the batch carrier 10 and a coupling wing 50 on a second side of the batch carrier 10, which is opposite the first side. On the centering wing 40, the first coarse centering element 44 is arranged directly opposite or substantially opposite the second coarse centering element 52, which is arranged on the coupling wing 50, so that the batch carrier 10 with the flange cover 15 and the batch 14 is arranged substantially between the two coarse centering elements 44, 52. A media coupling 55 is arranged on the coupling wing 50 for connection with a mating coupling. Connections can be established via the media coupling 55.In the example shown, the batch carrier 10 forms a closed disc or flange cover 15 with which the opening can be closed. When the opening is closed with the batch carrier 10, the batch 14 is simultaneously positioned inside the crystal growth system. For further or alternative fine centering of the batch carrier 10 at the flange opening 94, the batch carrier 10 has a centering ring 17 with an externally arranged, beveled sealing flank 19. As soon as the batch carrier 10 has completed the coarse centering step by means of the coarse centering elements 44, 52 when approaching the flange opening 94, the flange cover can be brought close to the opening 94 with sufficient clearance. Further fine centering can then be achieved by the beveled sealing flank 19 on the side facing the opening 94 allowing the batch carrier 10 greater freedom of movement than on the side furthest from the opening 94.As the carrier approaches the flange opening 94 further, the available clearance decreases continuously, and the batch carrier is finely centered. This occurs, for example, when the centering is not sufficiently precise, the centering ring 17 makes contact with the inside of the flange opening 94 on one side. As the centering ring 17 is further inserted into the flange opening 94, the batch carrier 10 is moved into a central position. With reference to Fig. 2, a media coupling 55 is shown, by means of which one or more of the following can be connected simultaneously: electrical, magnetic, optical, acoustic, or fluid-carrying connectors. The media connections 62, 64 are electrical connectors in this example. The connector 63 serves to supply or discharge a medium, for example, a cooling medium. The media coupling 55 has centering pins. PVA TePla AG - 8 - 08.09.2025 pva-83WOP 59, which are designed to perform fine centering of the media coupling 55 and thus also of the batch carrier 10 when connecting the connector 55 to the mating connector 56. For this purpose, the centering pins 59 have a tapered tip that engages in a centering pin bushing and thereby centers the centering pin 59. An electrical connector 61 shown here can have its own connector centering mechanism. After completion of the centering step provided by the centering pins 59, the centering of the connector 61 can be further improved. The connector 61 has its own spring element for this purpose. Referring to Fig. 3, a batch carrier 10 is shown in a perspective side view. This embodiment of the batch carrier 10 also has the centering wing 40 and coupling wing 50 on opposite sides of its circumferential edge 12.The media coupling 55 is arranged on the coupling wing 50. Loading trolley couplings 32 for connection to a loading trolley are arranged on the underside of the flange cover 15. A material reinforcement 18 integrates the centering ring 17 into the surface of the flange cover 15. The media coupling 55 is floatingly mounted on the coupling wing 50 by four media coupling bearings 57, 58. The media coupling bearings 57, 58 are designed as spring bearings. The media coupling bearings 57, 58 improve the centering and thus also the hermeticity of the vacuum-tight connection of the batch carrier 10 to the crystal growth system 90. Figure 4 shows a batch carrier 10 connected to a lower part 92 of the process chamber of the crystal growth system 90. The coarse centering elements 44, 52 are inserted into centering bushings 76, 78. The opening 84 is hermetically sealed by the flange cover 15 of the batch carrier 10.The media coupling 55 is connected to the mating coupling piece 56. Figure 5 illustrates a functional loading trolley 80, which has a receptacle 85 for receiving three spring bearings 84. The bearing supports 82 can be coupled to the batch carrier 10, or the batch carrier 10 can be placed on the bearing supports 82 for transport and / or for coupling to the crystal growth system 90. An automated guided vehicle (AGV or AMR) can serve as the basis for a loading trolley 80. Figure 6 also schematically illustrates an alternative embodiment of a loading trolley 80 with a mounted batch carrier 10 and batch 14. The batch 14 can be transported on the batch carrier 85 of the loading trolley 80, for example, in a form of the "hot zone" 22 shown, and inserted fully automatically into the crystal growth system 90. For the implementation of the load centering 125, the PVA TePla AG - 9 - 08.09.The 2025 pva-83WOP loading cart 80 is equipped with a positioning device 86 by means of which the loading cart 80 can assume a defined relative position to the crystal growth system 90. For example, a positioning lance can be provided on the crystal growth system 90, which engages with the positioning device 86 as the loading cart 80 approaches, thus defining the position of the positioning device 86 – and therefore also that of the loading cart 80 – along a first horizontal axis. The second horizontal axis, perpendicular to the first horizontal axis, can be defined, for example, by a depth stop for the positioning lance on the loading cart 80.When the loading trolley 80 is moved along the positioning lance towards the crystal growth system 90 and the approach stops upon reaching the depth stop on the loading trolley 80, a loading position is established at the crystal growth system 90, which may still be relatively imprecise – namely, one that corresponds only to the load centering 125. For vertically positioning the batch into the crystal growth system 90, the loading trolley 80 has a lifting device 88, comprising linear guides and a lifting platform 89, in which, for example, a ball screw is provided. Furthermore, the loading trolley 80 has a trolley enclosure 87 to protect the batch 14 from the ambient air, as well as to protect the surroundings from dust potentially emitted by the batch 14. The loading trolley enclosure 87, or skirt, is shown partially open in Fig. 7 to allow a view of, for example, the batch 14 and the batch carrier 10.A rear-mounted cart control unit 81 controls the loading cart 80. Figure 7 illustrates the position of the loading cart 80 at the crystal growth system 90. The loading cart 80 has assumed the loading position. The loading cart housing 87 is partially open for the loading process. Batch 14 can now be loaded vertically into the crystal growth system 90 using the lifting device 88 of the loading cart 80. As further shown in Figure 8, batch 14 can thus be completely inserted into the process chamber 91 of the crystal growth system 90, and the batch carrier 10, when assembled, forms the lower part 92 of the process chamber 91. During loading, the electrical and fluid connections are also automatically established. Referring to Figure 9, a method 100 for loading a crystal growth system 90 is shown schematically. First, a loading wagon 80 is loaded with a batch carrier 10.Once the batch carrier 10 is loaded onto the loading trolley 80, the loading trolley 80 can be automatically moved to a loading position at the crystal growth system 90 in step 120. Immediately upon or after assuming the loading position at the crystal growth system 90, the batch carrier 10 is centered 125 relative to the flange opening 94 of the crystal growth system 90. This centering 125 is achieved by precisely positioning the loading trolley 80. In the next step, the batch carrier 10 is positioned 130 against the crystal growth system 90 until at least a coarse centering element 44, 52 of the batch carrier 10 interacts with a counter-centering element 76, 78 of the crystal growth system 90 in such a way that the batch carrier 10 is coarsely centered at the flange opening 94 of the crystal growth system 90.The batch carrier 10 is then positioned 140 against the flange opening 94 by performing a fine centering 140 at the flange opening 94 after the coarse centering 130 has been completed. This fine centering 140 can be carried out, for example, using the media coupling 55. In other words, the batch carrier 10 can be finely centered using the media coupling 55. This ensures that the precise positioning of the connector 55 not only allows the electrical and fluid connections to be made, but also aligns the batch carrier 10 with respect to the flange opening 94. Finally, in step 150, the batch carrier 10 is positioned 140 against the flange opening 94 until it is held vacuum-tight.The overall system can thus achieve a charging tolerance of ± 10 mm or less, preferably ± 7 mm or less, and more preferably ± 5 mm or better, for example, using magnetic contacts. The coarse centering takes over the charging tolerance at the input side – i.e., it has an input tolerance range corresponding to the charging tolerance – and converts it into the coarse tolerance. This can be achieved, for example, with the help of the conically tapered sections 45, 53 on the coarse centering means 44, 52. The coarse tolerance is then ± 4 mm or less, preferably ± 3 mm, more preferably ± 2 mm, or even more preferably ± 1 mm or less. The fine centering, in turn, takes over the coarse tolerance at the input side and converts it into the fine tolerance. For example, it may be preferred to design the media coupling 55 such that it can be coupled with the coarse tolerance.During the coupling process of the media coupling 55, further centering, namely fine centering, can be performed by further and more precisely centering the batch carrier 10 during the coupling process of the media coupling 55. The fine tolerance can then be ± 2 mm or less, preferably ± 1 mm or less, more preferably ± 0.5 mm or less, or even ± 0.3 mm or less. For example, it may be advantageous if a fine tolerance of ± 0.5 mm or better can be maintained for the locking mechanism of the batch carrier 10 at the flange opening 94. The present description encompasses a multitude of aspects that, individually or together with others, can define essential aspects of the invention(s). PVA TePla AG - 11 - 08.09.2025 pva-83WOP It is evident to the person skilled in the art that the embodiments described above are to be understood as examples and that the invention is not limited to these, but can be varied in many ways without departing from the scope of the claims. Furthermore, it is evident that the features, regardless of whether they are disclosed in the description, the claims, the figures, or otherwise, also individually define essential components of the invention, even if they are described together with other features. In all figures, the same reference numerals represent the same objects, so that descriptions of objects that may be mentioned only in one figure, or at least not with respect to all figures, can also be applied to those figures and embodiments with respect to which the object is not explicitly described in the description.

[0002] PVA TePla AG - 12 - 08.09.2025 pva-83WOP Reference List 10 Batch Carrier 12 Circumferential Edge of Batch Carrier 13 Growth Cell Receptacle 14 Batch or Inoculation Part 22 Hot Zone 15 Flange Cover 17 Centering Ring 18 Reinforcement 19 Sealing Flank 32 Loading Wagon Coupling 40 Centering Wing 44 First Coarse Centering Element 45 Conically Tapered Section of the Coarse Centering Element 50 Coupling Wing 52 Second Coarse Centering Element 53 Conically Tapered Section 55 Media Coupling 56 Counter Coupling Piece 57 Media Coupling Bearing 58 Media Coupling Bearing 59 Centering Pin 61 Centering Connector 62 Media Connection 63 Media Connection 64 Media Connection 65 Media Line 76 Centering Bushing 78 Centering Bushing 80 Loading Wagon 81 Wagon Control 82 Bearing Support 83 Loading trolley transport device 84 Spring bearing 85 Mounting 86 Centering device of the loading trolley 87 Loading trolley housing 88 Lifting device 89 Lifting platform 90 Crystal growth system 91 Process chamber 92 Lower part of the process chamber 94Flange opening 100 Loading procedure 110 Loading a loading trolley 120 Loading trolley operation 125 Load centering 130 Coarse centering 140 Fine centering 150 Vacuum-tight sealing

Claims

PVA TePla AG - 13 - 08.09.2025 pva-83WOP Patent Claims 1. Batch carrier (10) for a crystal growth system (90), comprising a growth cell receptacle (13) for receiving a growth cell (14) on the batch carrier, a carrier centering device for centering the batch carrier on an opening (94) of the crystal growth system, wherein the carrier centering device comprises at least one first centering element (17, 44, 52, 59) arranged on the batch carrier for centering the batch carrier on at least one centering element receptacle (76, 78).

2. Batch carrier (10) according to the preceding claim, wherein the first centering element (17, 44, 52, 59) is designed as a coarse centering element for pre-centering the batch carrier on the at least one centering element receptacle (76, 78), and / or wherein the carrier centering is designed as a multi-stage carrier centering. 3.Batch carrier according to one of the preceding claims, further comprising a first fine centering element (17, 59) arranged on the batch carrier, which is arranged and / or configured such that it only engages with a fine centering element receptacle after the pre-centering by means of the coarse centering element has been completed.

4. Batch carrier (10) according to one of the preceding claims, further comprising a media coupling (55) for automatically connecting connectors (61, 62, 63, 64) together with the arrangement of the batch carrier at the opening (94), wherein the media coupling has at least one or a combination of the following connectors: electrical, magnetic, optical, acoustic, or fluid-carrying connectors. 5.Batch carrier (10) according to the preceding claim, wherein the media coupling (55) is self-centering, and / or wherein the media coupling (55) is configured and / or arranged such that it is co-centered by the multi-stage carrier centering.

6. Batch carrier (10) according to any one of the preceding claims, further comprising at least one underside loading trolley receptacle (32) configured for mounting the batch carrier on a loading trolley (80). PVA TePla AG - 14 - 08.09.2025 pva-83WOP wherein the loading trolley receptacle is designed to be centered.

7. Batch carrier (10) according to one of the preceding claims, designed as a base flange of the crystal growth system (90), and / or having a cover section (15), designed in particular as a flange cover, for covering the opening (94), and / or designed to hermetically seal the opening (94).

8. Batch carrier (10) according to one of the preceding claims, wherein the media coupling (55) is floatingly mounted, in particular comprising a spring bearing (57, 58) for fine centering of the media coupling, and / or wherein tolerance deviations in a further dimension are compensated.

9. Batch carrier (10) according to one of the preceding claims, wherein the media coupling (55) has at least two spring-loaded connecting means (61) for detachable connection to the batch carrier. 10.Batch carrier (10) according to one of the preceding claims, comprising a coarse centering element comprising at least two centering pins (44, 52), each arranged radially and / or on opposite sides of the batch carrier.

11. Batch carrier (10) according to the preceding claim, wherein the centering pins (44, 52) are oriented substantially perpendicularly, and / or wherein the centering pins (44, 52) have a conically tapered section (45, 53).

12. Batch carrier (10) according to one of the preceding claims further comprising a centering wing (40) for receiving the first coarse centering element (44), and / or a coupling wing (50) for arranging a second coarse centering element (52) and / or the media coupling (55) on the coupling wing, wherein the coupling wing is arranged, in particular, on a side opposite the centering wing. 13.Crystal growth apparatus (90), in particular for the growth of silicon carbide single crystals, comprising a growth chamber for growing a crystal. PVA TePla AG - 15 - 08.09.2025 pva-83WOP 14. Crystal growth system (90) according to the preceding claim, wherein the batch carrier is arranged at the opening (94) and closes the opening.

15. Crystal growth system (90) according to one of the two preceding claims, wherein the batch carrier (10) is arranged to be automatically hermetically sealed with the opening (94).

16. Crystal growth apparatus (90) according to one of the three preceding claims, further comprising an externally arranged centering wing (40) for receiving the centering element (17, 44, 52, 59). 17.Crystal growth system (90) according to one of the four preceding claims, further comprising an externally arranged coupling wing (50), in particular arranged opposite the centering wing, for receiving the media coupling (55). 18.Method (100) for loading a crystal growth system (90), in particular according to one of the preceding claims, comprising the following steps: loading (110) a loading trolley (80) with a batch carrier (10), in particular according to one of the preceding claims, the batch carrier comprising a growth cell (14) for insertion into the crystal growth system, automated method (120) of the loading trolley to a loading position on the crystal growth system, at which a first loading centering of the batch carrier relative to an opening (94) of the crystal growth system takes place, positioning (130) of the batch carrier against the crystal growth system until at least one centering means (17, 44, 52, 59) of the batch carrier cooperates with a counter-centering means (76, 78) of the crystal growth system.

19. Method (100) according to the preceding claim, wherein the centering means (17, 44, 52, 59) is a coarse centering means, and / or. PVA TePla AG - 16 - 08.09.2025 pva-83WOP wherein the positioning (130) is carried out such that a coarse centering of the batch carrier (10) is performed at the opening (94) of the crystal growth system (90).

20. Method (100) according to one of the two preceding claims, further comprising the steps of further positioning (140) of the batch carrier (10) at the opening (94) such that, after completion of a coarse centering, a fine centering of the batch carrier at the opening is performed.

21. Method (100) according to the preceding claim, further comprising the steps of, after fine centering, final positioning (150) of the batch carrier (10) at the opening (94) until the batch carrier is held vacuum-tight at the opening. 22.Method (100) according to any one of the four preceding claims, wherein the loading centering (125) has a loading tolerance, wherein the coarse centering (130) has a coarse tolerance, and wherein the fine centering (140) has a fine tolerance, wherein the loading tolerance is greater than the coarse tolerance and the coarse tolerance is greater than the fine tolerance.

23. Method (100) according to any one of the five preceding claims, after the batch carrier (10) is held at the flange opening (94), removed from the crystal growth system (90) and moved with the loading trolley (80) to a starting position, picked up a second batch carrier at the carrier receptacle (85), moved to a second loading position at a second crystal growth system and attached the second batch carrier to the second crystal growth system. 24.Method (100) according to one of the six preceding claims, wherein the first batch carrier (10) and the second batch carrier are interchangeable with each other, so that a plurality of crystal growth systems (90) can be combined with a plurality of batch carriers as desired.

25. Automated loading trolley (80) for automatically loading or unloading a crystal growth system (90) and / or configured for coupling to a carrier centering device according to one of the preceding claims and / or for use with a crystal growth system (90) according to one of the preceding claims. PVA TePla AG - 17 - 08.09.2025 pva-83WOP A position detection system for automatically determining the position of the loading cart, in particular in relation to a loading position on the crystal growth system, a floatingly mounted batch carrier receptacle (85) for receiving a batch carrier (10) on the loading cart, wherein the loading cart is configured to automatically move to the loading position with a loading tolerance, and to automatically position the batch carrier against the crystal growth system.

26. Loading cart (80) according to the preceding claim, wherein the automatic positioning of the batch carrier (10) against the crystal growth system (90) is designed such that the batch carrier automatically centers itself at an opening (94) and, upon further positioning by means of the loading cart, closes the opening there in a vacuum-tight manner.

27. Loading trolley (80) according to one of the two preceding claims, the position detection system comprising magnets for aligning the loading position. 28.Loading trolley (80) according to one of the preceding claims, wherein the batch carrier holder (85) has at least two, preferably three, bearing supports (86), and / or wherein the batch carrier holder is self-centering, in particular the bearing supports are spring-mounted (84), and / or wherein the batch carrier holder (85) is configured to center itself on trolley centering bolts (32) arranged on the underside of the batch carrier (10).

29. Loading trolley (80) according to one of the preceding claims, configured to automatically approach a plurality of at least two crystal growth systems (90) successively in order to automatically attach or remove a batch carrier (10) at each of them.

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