This invention discloses a
nozzle flow channel plate, its fabrication method, and an inkjet device. The
nozzle flow channel plate of this invention is used in inkjet devices. The
nozzle flow channel plate includes a
silicon substrate, which has a first surface and a second surface facing each other. Along the width direction of the
silicon substrate, a liquid inlet, a distribution hole, and a connecting hole are sequentially provided on the first surface, and a
liquid storage cavity and nozzles are provided on the second surface. The liquid inlet and the distribution hole are connected through the
liquid storage cavity, and the connecting hole and the nozzle are connected. There are multiple distribution holes and multiple connecting holes, which are spaced apart along the length direction of the
silicon substrate. The distribution holes and connecting holes are flush along the width direction of the silicon substrate. The nozzle flow channel plate provided by this invention eliminates the need for encapsulation between the flow channel plate and the nozzle plate in traditional processes, avoiding the surface
mount step, significantly improving product yield, while ensuring that the inkjet effect and quality are not affected. Its fabrication method is simple and has low
processing costs.