An ultrasonic vibration modulated pulse abrasive microjet polishing system

Abstract

The present invention discloses an ultrasonic vibration modulated pulse abrasive micro jet polishing system, including an abrasive mixing device, an abrasive conveying device, an integrated control cabinet, a pulse jet polishing tool, an angle adjustment device, a workpiece rotating device, a three-axis moving module, a processing pool, a rack, a waste recovery device, and a gas injection device. The present invention uses the ultrasonic modulation principle to form a pulse jet, and improves the jet polishing efficiency by means of the water hammer effect generated by the fluid pulse; and actively controls the magnitude of the pulse jet intensity by adjusting the distance between the end of the amplitude change rod and the nozzle cavity outlet; realizes the stability of the abrasive flow components by monitoring the concentration and viscosity of the abrasive flow; monitors the pulse jet intensity in real time by means of an annular array sensor; avoids cavitation by means of the aeration cavitation reduction principle; and realizes full coverage precision polishing of complex curved flow channels by means of the coordinated movement of the three-axis motion module and the workpiece rotating device.

Description

Technical Field

[0001] The invention relates to the technical field of ultra-precision polishing processing, and more specifically, to an ultrasonic vibration modulated pulse abrasive micro-jet polishing system. Background Art

[0002] Microfluidic chips made of glass substrates are widely used in fields such as biomass testing. Microchannels are the main place for microfluidic chips to achieve fluid transport and detection and analysis. The smoothness of the inner wall of the microchannel directly determines the accuracy and stability of biochemical analysis of microfluidic chips. However, the microfluidic structure made of glass substrates, in addition to the difficult processing characteristics of hard and brittle materials, also has three processing difficulties: high channel depth-to-width ratio, obvious discontinuous surface features, and complex bending of the same chip channel.

[0003] From the perspective of the requirements for polishing the flow channels of microfluidic chips, jet polishing uses a very flexible fluid to drive fine abrasive particles to process the workpiece surface, which can effectively avoid deterioration of the processed layer and sub-surface damage. However, the traditional jet polishing method has low polishing efficiency and weak jet intensity when polishing the flow channels of microfluidic chips. Introducing the principle of ultrasonic vibration modulation into the jet can effectively improve the jet intensity. Ultrasonic vibration modulation refers to the emission of ultrasonic waves through an ultrasonic transducer, and focusing the sound waves on the fluid inside the nozzle through a variable amplitude rod, driving the fluid to vibrate periodically, thereby forcing the microjet ejected from the nozzle to undergo discontinuous pulse changes. When a discontinuous jet with a pulse change hits the wall, a water hammer effect can be formed, and the water hammer effect can effectively increase the impact force of the jet.

[0004] Due to the pollution-free and strong jet impact of the ultrasonic vibration modulation enhancement method, it has become one of the popular methods for improving the erosion and crushing ability of the pressure jet in recent years. However, the current ultrasonic modulation pulse device cannot be used for microchannel structure polishing. For example, the invention patent with patent number CN20141069807040.7 proposes a method for preparing NdFeB permanent magnet alloy powder. The invention forces the NdFeB particle material to be crushed by the water hammer action, water wedge-stretching action, cavitation action, friction shear action and strong impact collision between particles of high-power ultrasonic pulse jet, and finally prepares NdFeB alloy powder of suitable particle size. However, this method is only suitable for large-scale industrial production, improving the impact force on the crushing of material particles, improving the crushing effect and efficiency, and the high-intensity pulse jet and device used by it cannot be applied to the polishing of various complex curved microfluidic chip surface channels; and the currently popular ultrasonic cavitation enhanced jet polishing method is less efficient than the ultrasonic modulation pulse jet polishing, and the cavitation bubbles generated during polishing can easily cause more serious cavitation damage to the nozzle cavity and the channel wall. The invention patent of CN2019103060203030.X proposes an ultrasonic cavitation-assisted jet polishing system and polishing method. The invention combines ultrasonic waves and acoustic lenses to produce focal point cavitation, which effectively improves the efficiency of jet polishing. However, compared with the method and device for producing pulsed abrasive microjets by ultrasonic modulation, the acoustic wave vibration used in the invention produces cavitation, and the jet intensity is low. The large number of cavitation bubbles produced can easily cause cavitation corrosion to the nozzle and the inner wall of the jet cavity. Similarly, due to the small nozzle aperture, a large number of cavitation bubbles can easily clog the nozzle during the polishing process. Therefore, it is a very practical task to develop a pulsed microjet polishing system that can be used for polishing microchannel structures. Summary of the invention

[0005] The purpose of the present invention is to effectively apply the method of ultrasonic vibration modulated pulse jet to microjet polishing, so as to improve the erosion force and polishing efficiency of the jet. Therefore, an ultrasonic vibration modulated pulse abrasive microjet polishing system is proposed to complete efficient full-coverage fluid polishing of microstructures and complex curved microfluidic chip flow channels.

[0006] The present invention achieves the above-mentioned purpose through the following technical scheme: an ultrasonic vibration modulated pulse abrasive microjet polishing system, comprising an abrasive mixing device, an abrasive conveying device, an integrated control cabinet, a pulse jet polishing tool, an angle adjustment device, a workpiece rotating device, a three-axis moving module, a processing pool, a frame, a waste recovery device, and a gas injection device; the abrasive mixing device is connected to the abrasive flow pipeline of the abrasive conveying device through an abrasive flow outlet; the abrasive conveying device is connected to the abrasive flow injection port of the pulse jet polishing tool through an abrasive flow output pipeline; the integrated control cabinet controls the operation of the entire system; the pulse jet polishing tool is fixed by a clamp The angle adjustment device is fixed at the front end of the angle adjustment device; the angle adjustment device is fixed on the module in the three-axis moving module, and the angle adjustment device and the pulse jet polishing tool can be moved along the x, y, and z directions under the drive of the three-axis moving module; the workpiece rotating device is installed in the processing pool through the support rods at both ends; the three-axis moving module is installed on the frame; the processing pool is installed on the inner wall of the frame by bolts, and is located below the three-axis moving module; the waste recovery device is connected to the bottom outlet of the processing pool through a waste recovery pipe with a threaded structure, which is used to collect waste abrasive flow; the gas injection device is connected to the gas injection port of the pulse jet polishing tool through a gas injection pipe.

[0007] The abrasive mixing device comprises a water inlet, a combined stirring blade, a stirring motor, a mixer frame, an abrasive flow outlet, and an abrasive mixing barrel; the water inlet is located at the left barrel mouth of the abrasive mixing barrel, and the flow rate can be adjusted in real time according to the abrasive concentration and viscosity data fed back by the sensor; the abrasive mixing barrel is installed in the center of the mixer frame, the stirring motor shaft is connected to the vertically arranged rotating main shaft through a rotating joint, and is connected to the combined stirring blade in the barrel through the hole below the abrasive mixing barrel; the combined stirring blade is divided into a propulsion blade and a two-blade inclined blade paddle, the propulsion blade is installed at the bottom of the abrasive mixing barrel, and the bottom abrasive is rolled upward, and the upper two-blade inclined blade paddle shears the abrasive circulation of the tank body, forming a strong turbulent disturbance, and the abrasive particles are refined by the strong turbulent effect, the contact probability is increased, and the overall circulation and mixing efficiency of the abrasive in the barrel are improved; the abrasive flow outlet is located on the right side wall of the middle part of the abrasive mixing barrel, and the abrasive flow outlet is connected to the abrasive flow pipeline.

[0008] The abrasive conveying device includes an abrasive flow pipeline, a self-priming pump, a filter plate, a flow switch, an abrasive flow pressure gauge, an electro-hydraulic servo valve, an abrasive flow output pipeline, an ultrasonic liquid viscosity sensor, and a particle concentration sensor. The abrasive flow pipeline is installed at the inlet of the self-priming pump; the outlet of the self-priming pump is connected to the filter plate, the flow switch, the abrasive flow pressure gauge, the electro-hydraulic servo valve, the ultrasonic liquid viscosity sensor, and the particle concentration sensor in sequence through the abrasive flow output pipeline; the ultrasonic liquid viscosity sensor and the particle concentration sensor are used to monitor the changes in the viscosity and concentration of the abrasive flow in real time.

[0009] The pulse jet polishing tool comprises an ultrasonic transducer, an horn, a flange, a flange sealing rubber layer, an abrasive flow injection port, a sealing rubber ring, a nozzle, a conical cavity, a gas injection port, and a jet sleeve. The ultrasonic transducer is located at the top of the entire pulse jet polishing tool; the top end of the horn is connected to the bottom of the ultrasonic transducer, and the end of the horn passes through the jet sleeve and the conical cavity in turn and extends into the nozzle; the middle end flange surface of the horn is clamped and assembled with the flange surface at the upper end of the jet sleeve through the flange; a flange sealing rubber layer is provided between the flange and the flange surface at the upper end of the jet sleeve; the abrasive flow injection port and the gas injection port are arranged obliquely on both sides of the jet sleeve to avoid direct impact on the horn; the nozzle is installed at the end of the conical cavity, and its overall material is tungsten steel. The material is made of ruby ​​material, and the inner core is made of ruby ​​material, so as to reduce the wear of the nozzle and increase the service life of the nozzle; the conical cavity is connected with the internal thread structure at the lower end of the jet sleeve through the external thread on the upper end face; the internal flow channel structure of the conical cavity is inverted cone, and the end of its external thread surface is provided with a right-angle end face; a sealing rubber ring with interchangeable thickness specifications is provided between the end face of the jet sleeve and the right-angle end face of the bottom of the external thread of the conical cavity, and the sealing rubber ring is tightened by the thread between the jet sleeve and the conical cavity to achieve the sealing effect of the sealing rubber ring; under different polishing requirements, the thickness specification of the sealing rubber ring can be changed to adjust the distance between the end of the amplitude change rod and the outlet of the nozzle cavity without changing the microjet process parameters, so as to actively control the size of the pulse jet intensity.

[0010] The angle adjustment device includes a clamp, a clamp support plate, and an angle adjustment plate. The upper and lower ends of the angle adjustment plate are provided with arc-shaped movable grooves with the same center, and the adjustable angle range is 0 to 60 degrees. When the jet angle needs to be adjusted, the clamp support plate is swung up and down to a suitable angle, and then the pulse jet polishing tool is locked by using screws passing through the arc groove and the screw holes on the clamp support plate; the inner ring of the clamp is provided with vibration isolation rubber to maintain the stability of the pulse jet polishing tool during operation.

[0011] The workpiece rotating device includes a clamp, a pressure sensor, a vertical servo motor, a waterproof isolation box, and two end support rods. The waterproof isolation box is installed on the inner wall of the processing pool through the two end support rods; the vertical servo motor is installed at the bottom of the waterproof isolation box; the rotating shaft of the vertical servo motor is connected to the clamp through a connector to control the periodic rotation of the clamp; a plurality of pressure sensors are arranged in an array along the circumferential direction inside the clamp to monitor the changes in pulse jet intensity in real time and ensure the stability of polishing intensity.

[0012] The three-axis movement module includes a guide rail, a linear slider pad, a module fixing plate, a Y-axis module, a Z-axis module, a horizontal lateral movement base plate, an X-axis module, and a horizontal movement base plate. The guide rail is installed on the left side of the frame, and a linear slider pad is installed on the upper end of the guide rail; a horizontal lateral movement base plate is installed on the upper end surface of the X-axis module, and the horizontal movement base plate is connected to the right side of the frame. The upper end surface of the linear slider pad is connected to the upper end surface of the horizontal lateral movement base plate by screws through the module fixing plate; the Y-axis module is installed on the front end surface of the module fixing plate, and the Z-axis module is installed on the front end surface of the Y-axis module. The whole can realize movement in the x, y, and z directions.

[0013] The waste recovery device comprises an abrasive flow waste pipeline and a waste recovery box. One end of the abrasive flow waste pipeline is connected to the bottom outlet of the processing pool; the other end of the abrasive flow waste pipeline is connected to the inlet of the waste recovery box.

[0014] The gas injection device comprises an air pump, a gas switch, a gas pressure gauge, a proportional valve, and a gas injection pipe. One end of the gas injection pipe is connected to the air outlet of the air pump, and the other end of the gas injection pipe is connected to the gas injection port of the pulse jet polishing tool. According to the flow direction of the gas, the gas switch, the gas pressure gauge and the proportional valve are sequentially arranged on the gas injection pipe. The gas generated by the air pump passes through the gas switch, the gas pressure gauge and the proportional valve in the gas injection pipe in sequence and then enters the conical cavity of the pulse jet polishing tool. The gas injection device injects the gas into the conical cavity to reduce or eliminate the cavitation damage to the conical cavity and the inner cavity of the nozzle caused by cavitation bubbles generated by ultrasonic vibration in the abrasive flow.

[0015] Furthermore, the distance D between the end of the amplitude change rod and the outlet of the nozzle cavity and the diameter R of the end of the amplitude change rod are determined by combining the diameter of the flow channel, the preset jet intensity and the specifications of the nozzle through calculation using the Euler multinomial flow model.

[0016] Furthermore, the nozzle outlet aperture is selected between 0.1-0.5 mm based on the summary of multiple experimental data. The specific aperture of the nozzle is determined by the Finnie erosion model calculation based on the pulse microjet intensity and the pre-designed polishing time for different regions and channels with different curvatures.

[0017] Furthermore, in the abrasive mixing barrel, the combined stirring blades have a density of 1000 kg / m 3 distilled water and a volume fraction not exceeding 5% and a density of 3170 kg / m 3 The aluminum oxide abrasive is evenly stirred to form an abrasive flow.

[0018] Furthermore, the pressure sensor monitors the jet impact force in real time and transmits the data back to the integrated control cabinet. When the jet impact force fluctuates, the integrated control cabinet controls the amplitude of the amplitude transformer by adjusting the power of the ultrasonic transducer, so that the pulse jet intensity remains relatively stable during the entire polishing process.

[0019] Furthermore, the ultrasonic liquid viscosity sensor and particle concentration sensor monitor the viscosity and concentration of the abrasive flow in real time, and transmit the obtained data back to the integrated control cabinet. When the concentration or viscosity of the abrasive flow is higher or lower than the pre-designed value, the integrated control cabinet automatically adjusts the flow rate of the water inlet on the abrasive mixing barrel according to the specific situation, so as to realize the system's precise control of the mixing quality of the abrasive flow.

[0020] Furthermore, the three-axis moving module and the workpiece rotating device are both controlled by the integrated control cabinet, which can realize the coordinated movement of the three-axis moving module and the workpiece rotating device, and complete the full coverage and precise polishing of the complex curved flow channel.

[0021] Compared with the prior art, the present invention has the following advantages:

[0022] 1) The combined stirring blades of the present invention are divided into a propulsion blade and a two-blade pitched blade. The propulsion blade is installed at the bottom of the abrasive mixing barrel to roll the bottom abrasive upwards, and the upper two-blade pitched blade paddle shears the abrasive circulation in the tank to form a strong turbulent disturbance. The strong turbulent effect is used to refine the abrasive particles, increase the contact probability, and thus improve the overall circulation and mixing efficiency of the abrasive flow in the barrel.

[0023] 2) A water inlet is installed above the abrasive mixing barrel of the present invention, and the water inlet amount can be adjusted in real time according to the abrasive concentration and viscosity data fed back by the integrated control cabinet.

[0024] 3) The ultrasonic liquid viscosity sensor and particle concentration sensor of the present invention monitor the viscosity and concentration of the abrasive flow in real time, and transmit the obtained data back to the integrated control cabinet. When the viscosity or concentration of the abrasive flow is higher or lower than the pre-designed value, the integrated control cabinet automatically adjusts the flow rate of the water inlet on the abrasive mixing barrel according to the specific situation, so as to realize the system's precise control of the abrasive flow mixing quality.

[0025] 4) The aeration cavitation reduction technology adopted in the present invention is to set an aeration port on the side wall of the jet sleeve to mix air into the abrasive mixed flow, change the motion characteristics of the incoming flow, and form a three-phase flow of abrasive, water and air mixture with a certain compression, thereby reducing or eliminating the cavitation damage to the conical cavity and the inner cavity of the nozzle caused by cavitation bubbles generated by ultrasonic vibration in the abrasive flow.

[0026] 5) In the present invention, sealing rubber rings of various thicknesses are arranged between the conical cavity and the nut. By changing the thickness of the sealing rubber ring, the distance between the end of the amplitude change rod and the inner cavity of the nozzle can be adjusted without changing the microjet process parameters, thereby actively controlling the intensity of the pulse jet.

[0027] 6) The angle adjustment device of the present invention is coupled with the pulse jet polishing tool and the two are combined into one, so that the angle adjustment control of the jet beam during the entire polishing process is more flexible.

[0028] 7) The central interlayer of the clamp of the present invention is provided with a plurality of pressure sensors arranged in a circumferential array, which are used to monitor and feedback the real-time intensity change of the pulse jet. When the jet intensity is outside the set range, the pulse jet intensity is adjusted immediately.

[0029] 8) The present invention performs zone-by-zone polishing of the flow channel according to the flow channel diameter in combination with the pre-designed pulse jet intensity and pulse jet diameter, thereby achieving efficient full-coverage fluid polishing of the flow channel of the micro-structured and complex curved microfluidic chip with the cooperation of the three-axis moving module and the workpiece rotating device.

[0030] 9) The pressure sensor of the present invention monitors the jet impact force in real time and transmits the data back to the integrated control cabinet. When the jet impact force fluctuates, the integrated control cabinet controls the amplitude of the amplitude transformer by adjusting the power of the ultrasonic transducer, so that the pulse jet intensity remains relatively stable during the entire polishing process. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 It is a schematic diagram of an ultrasonic vibration modulated pulse abrasive microjet polishing device of the present invention.

[0032] Figure 2 It is a structural diagram of the abrasive mixing device of the present invention.

[0033] Figure 3 It is a schematic structural diagram of the abrasive transmission device of the present invention.

[0034] Figure 4 It is a schematic diagram of the pulse jet polishing tool of the present invention.

[0035] Figure 5 It is a schematic diagram of the cross-sectional structure of the pulse jet polishing tool of the present invention.

[0036] Figure 6 It is a structural schematic diagram of the angle adjustment device of the present invention.

[0037] Figure 7 It is a structural schematic diagram of the workpiece rotating device of the present invention.

[0038] Figure 8 This is a diagram of the circular array arrangement of the pressure sensors of the present invention.

[0039] Fig. 9 It is a structural schematic diagram of the three-axis mobile module of the present invention.

[0040] Fig.10 It is a schematic structural diagram of the waste recovery device of the present invention.

[0041] Fig.11 Schematic diagram of the gas injection device of the present invention.

[0042] Fig.12 It is a schematic diagram of the flow channel division area of ​​the present invention.

[0043] Fig.13 It is a schematic diagram of polishing the channel surface of the microfluidic chip in different regions according to the present invention.

[0044] Fig.14 It is a schematic diagram of the rotation of the curved flow channel of the present invention.

[0045] In the figure, 01-abrasive mixing device, 02-abrasive conveying device, 03-integrated control cabinet, 04-pulse jet polishing tool, 05-angle adjustment device, 06-workpiece rotating device, 07-three-axis moving module, 08-processing pool, 09-frame, 10-waste recovery device, 11-gas injection device, 0101-water inlet, 0102-combined stirring blade, 0103-stirring motor, 0104-mixer frame, 01 05-abrasive flow outlet, 0106-abrasive mixing barrel, 0201-abrasive flow pipeline, 0202-self-priming pump, 0203-filter plate, 0204-flow switch, 0205-abrasive flow pressure gauge, 0206-electro-hydraulic servo valve, 0207-abrasive flow output pipeline, 0208-ultrasonic liquid viscosity sensor, 0209-particle concentration sensor, 0401-ultrasonic transducer, 0402-amplifier, 0403-flange, 0 404-flange rubber sealing layer, 0405-abrasive flow injection port, 0406-sealing rubber ring, 0407-nozzle, 0408-conical cavity, 0409-gas injection port, 0411-jet sleeve, 0501-clamp, 0502-clamp support plate, 0503-angle adjustment plate, 0601-clamp, 0602-pressure sensor, 0603-vertical servo motor, 0604-waterproof isolation box, 0701-guide Rail, 0702-linear slider pad, 0703-module fixing plate, 0704-Y-axis module, 0705-Z-axis module, 0706-horizontal lateral moving base plate, 0707-X-axis module, 0708 horizontal moving base plate, 1001-abrasive flow waste pipeline, 1002-waste recycling box, 1101-air pump, 1102-gas switch, 1103-gas pressure gauge, 1104-proportional valve, 1105-gas injection pipe. DETAILED DESCRIPTION

[0046] In order to make the purpose, technical scheme and advantages of the present invention more clear, the following is a detailed description of the present invention in conjunction with specific examples and with reference to the attached drawings. Figures 1 to 14 The present invention is further described in detail. It should be understood that these descriptions are exemplary only and are not intended to limit the scope of the present invention. In addition, in the following description, the description of well-known structures and technologies is omitted to avoid unnecessary confusion of the concept of the present invention.

[0047] like Figures 1 to 14 As shown, the present invention achieves the above-mentioned purpose through the following technical solutions: an ultrasonic vibration modulated pulse abrasive microjet polishing system, comprising an abrasive mixing device 01, an abrasive conveying device 02, an integrated control cabinet 03, a pulse jet polishing tool 04, an angle adjustment device 05, a workpiece rotating device 06, a three-axis moving module 07, a processing pool 08, a frame 09, a waste recovery device 10, and a gas injection device 11; the abrasive mixing device 01 is connected to the abrasive flow pipeline 0201 of the abrasive conveying device 02 through an abrasive flow outlet 0105; the abrasive conveying device 02 is connected to the abrasive flow injection port 0405 of the pulse jet polishing tool 04 through an abrasive flow output pipeline 0207; the integrated control cabinet 03 controls the operation of the entire system; the pulse jet polishing tool 04 is connected to the abrasive flow injection port 0405 of the pulse jet polishing tool 04 through a clamp 05 01 is fixed on the front end of the angle adjustment device 05; the angle adjustment device 05 is fixed on the module in the three-axis moving module 07, and the angle adjustment device 05 and the pulse jet polishing tool 04 can be moved along the x, y, and z directions under the drive of the three-axis moving module 07; the workpiece rotating device 06 is installed in the processing pool 08 through the support rods 0605 at both ends; the three-axis moving module 07 is installed on the frame 09; the processing pool 08 is fixed to the inner wall of the frame 09 by bolts, and is located below the three-axis moving module 07; the waste recovery device 10 is connected to the bottom outlet of the processing pool 08 through the abrasive flow waste pipeline 1001 with a threaded structure, which is used to collect waste abrasive flow; the gas injection device 11 is connected to the gas injection port 0409 of the pulse jet polishing tool 04 through the gas injection pipe 1105.

[0048] like Figure 2As shown, the abrasive mixing device 01 includes a water inlet 0101, a combined stirring blade 0102, a stirring motor 0103, a mixer frame 0104, an abrasive outflow outlet 0105, and an abrasive mixing barrel 0106; the water inlet 0101 is located at the left barrel opening of the abrasive mixing barrel 0106, and the flow rate can be adjusted in real time according to the abrasive concentration and viscosity data fed back by the sensor; the abrasive mixing barrel 0106 is installed in the center of the mixer frame 0104, and the rotating shaft of the stirring motor 0103 is connected to the vertically arranged rotating main shaft through a rotating joint, and passes through the lower part of the abrasive mixing barrel 0106. The hole is connected to the combined stirring blade 0102 in the barrel; the combined stirring blade 0102 is divided into a propulsion blade and a two-blade inclined blade paddle. The propulsion blade is installed at the bottom of the abrasive mixing barrel 0106 to roll the bottom abrasive upwards, and the upper two-blade inclined blade paddle shears the abrasive circulation in the tank body to form a strong turbulent disturbance, and uses the strong turbulent effect to refine the abrasive particles, increase the contact probability, and thus improve the overall circulation and mixing efficiency of the abrasive in the barrel; the abrasive flow outlet 0105 is located on the middle right wall of the abrasive mixing barrel 0106, and the abrasive flow outlet 0105 is connected to the abrasive flow pipeline 0201.

[0049] like Figure 3 As shown, the abrasive conveying device 02 includes an abrasive flow pipeline 0201, a self-priming pump 0202, a filter disc 0203, a flow switch 0204, an abrasive flow pressure gauge 0205, an electro-hydraulic servo valve 0206, an abrasive flow output pipeline 0207, an ultrasonic liquid viscosity sensor 0208, and a particle concentration sensor 0209. The abrasive flow pipeline 0201 is installed at the inlet of the self-priming pump 0202; the outlet of the self-priming pump 0202 is connected to the filter disc 0203, the flow switch 0204, the abrasive flow pressure gauge 0205, the electro-hydraulic servo valve 0206, the ultrasonic liquid viscosity sensor 0208 and the particle concentration sensor 0209 in sequence through the abrasive flow output pipeline 0207; the ultrasonic liquid viscosity sensor 0208 and the particle concentration sensor 0209 are used to monitor the changes in the viscosity and concentration of the abrasive flow in real time.

[0050] like Figure 4 and Figure 5As shown, the pulse jet polishing tool 04 includes an ultrasonic transducer 0401, a horn 0402, a flange 0403, a flange sealing rubber layer 0404, an abrasive flow injection port 0405, a sealing rubber ring 0406, a nozzle 0407, a conical cavity 0408, a gas injection port 0409, and a jet sleeve 0411. The ultrasonic transducer 0401 is located at the top of the entire pulse jet polishing tool 04; the top of the horn 0402 is connected to the bottom of the ultrasonic transducer 0401, and the horn 0402 is connected to the bottom of the ultrasonic transducer 0401. The end passes through the jet sleeve (0411), the conical cavity 0408 in sequence and extends into the nozzle 0407; the middle end flange surface of the horn 0402 is clamped and assembled with the flange surface of the upper end of the jet sleeve 0411 through the flange 0403; a flange sealing rubber layer 0404 is arranged between the flange 0403 and the flange surface of the upper end of the jet sleeve 0411; the abrasive flow injection port 0405 and the gas injection port 0409 are arranged obliquely on both sides of the jet sleeve 0411 to avoid direct impact on the horn 0402; the The nozzle 0407 is installed at the end of the conical cavity 0408. The whole material is made of tungsten steel material, and the inner core is made of ruby ​​material, so as to reduce the wear of the nozzle 0407 and increase the service life of the nozzle 0407; the conical cavity 0408 is connected with the internal thread structure at the lower end of the jet sleeve 0411 through the external thread of the upper end face; the internal flow channel structure of the conical cavity 0408 is inverted cone shape, and the end of the external thread surface is provided with a right angle end face; the end face of the jet sleeve 0411 is connected with the external thread bottom of the conical cavity 0408. A sealing rubber ring 0406 with an adjustable thickness is provided between the right-angle end faces of the parts, and the sealing rubber ring 0406 is tightened by the thread between the jet sleeve 0411 and the conical cavity 0408 to achieve the sealing effect of the sealing rubber ring 0406; under different polishing requirements, the thickness of the sealing rubber ring 0406 can be replaced to adjust the distance between the end of the variable amplitude rod 0402 and the inner cavity outlet of the nozzle (0407) without changing the microjet process parameters, thereby actively controlling the intensity of the pulse jet.

[0051] like Figure 6 As shown, the angle adjustment device 05 includes a clamp 0501, a clamp support plate 0502, and an angle adjustment plate 0503. The upper and lower ends of the angle adjustment plate 0503 are provided with arc-shaped movable grooves with the same center, and the adjustable angle range is 0 to 60 degrees. When the jet angle needs to be adjusted, the clamp support plate 0502 is swung up and down to a suitable angle, and then the pulse jet polishing tool 04 is locked by using screws to pass through the arc groove and the screw holes on the clamp support plate 0502; the inner ring of the clamp 0501 is provided with vibration isolation rubber to maintain the stability of the pulse jet polishing tool during operation.

[0052] like Figure 7 and Figure 8 As shown, the workpiece rotating device 06 includes a clamp 0601, a pressure sensor 0602, a vertical servo motor 0603, a waterproof isolation box 0604, and two end support rods 0605. The waterproof isolation box 0604 is installed on the inner wall of the processing pool 08 through the two end support rods 0605; the vertical servo motor 0603 is installed at the bottom of the waterproof isolation box 0604; the rotating shaft of the vertical servo motor 0603 is connected to the clamp 0601 through a connector to control the periodic rotation of the clamp 0601; a plurality of pressure sensors 0602 are arranged in an array along the circumferential direction inside the clamp 0601 to monitor the changes in pulse jet intensity in real time to ensure the stability of polishing intensity.

[0053] like Fig. 9 As shown, the three-axis moving module 07 includes a guide rail 0701, a linear slider pad 0702, a module fixing plate 0703, a Y-axis module 0704, a Z-axis module 0705, a horizontal lateral moving base plate 0706, an X-axis module 0707, and a horizontal moving base plate 0708. The guide rail 0701 is installed on the left side of the frame 09, and the upper end of the guide rail 0701 is installed with a linear slider pad 0702; the upper end surface of the X-axis module 0707 is installed with a horizontal lateral moving base plate 0706. The horizontal movable base plate 0706 is connected to the right side of the frame 09, and the upper end surface of the linear slider pad 0702 is connected to the upper end surface of the horizontal lateral movable base plate 0706 by screws through the module fixing plate 0703; the Y-axis module 0704 is installed on the front end surface of the module fixing plate 0703, and the Z-axis module 0705 is installed on the front end surface of the Y-axis module 0704, and the whole can realize movement in x, y, and z directions.

[0054] like Fig.10 As shown, the waste recovery device 10 includes an abrasive flow waste pipeline 1001 and a waste recovery box 1002. One end of the abrasive flow waste pipeline 1001 is connected to the bottom outlet of the processing pool 08; the other end of the abrasive flow waste pipeline 1001 is connected to the inlet of the waste recovery box 1002.

[0055] like Fig.11As shown, the gas injection device 11 includes an air pump 1101, a gas switch 1102, a gas pressure gauge 1103, a proportional valve 1104, and a gas injection pipe 1105. One end of the gas injection pipe 1105 is connected to the outlet of the air pump 1101, and the other end of the gas injection pipe 1105 is connected to the gas injection port 0409 of the pulse jet polishing tool 04. According to the flow direction of the gas, the gas switch 1102, the gas pressure gauge 1103 and the proportional valve 1104 are sequentially arranged on the gas injection pipe 1105. The gas generated by the air pump 1101 passes through the gas switch 1102, the gas pressure gauge 1103 and the proportional valve 1104 in the gas injection pipe 1105 in sequence and then enters the conical cavity 0408 of the pulse jet polishing tool 04. The added gas can reduce or eliminate the cavitation damage to the conical cavity 0408 and the inner wall of the nozzle 0407 caused by cavitation bubbles generated by ultrasonic vibration in the abrasive flow.

[0056] The distance D between the end of the horn 0402 and the inner cavity outlet of the nozzle 0407 and the diameter R of the end of the horn 0402 in the present invention are determined by combining the diameter of the flow channel, the preset jet intensity and the specifications of the nozzle 0407 through calculation using the Euler multinomial flow model.

[0057] The outlet aperture of the nozzle 0407 in the present invention is selected between 0.1-0.5 mm based on the summary of multiple experimental data. The specific aperture of the nozzle 0407 is determined by the Finnie erosion model calculation based on the pulse microjet intensity and the pre-designed polishing time for different regions and channels with different curvatures.

[0058] In the abrasive mixing barrel 0106 of the present invention, the combined stirring blade 0102 is used to mix the abrasive with a density of 1000 kg / m 3 distilled water and a volume fraction not exceeding 5% and a density of 3170 kg / m 3 The aluminum oxide abrasive is evenly stirred to form an abrasive flow.

[0059] The pressure sensor 0602 in the present invention monitors the jet impact force in real time and transmits the data back to the integrated control cabinet 03. When the jet impact force fluctuates, the integrated control cabinet 03 controls the amplitude of the amplitude transformer 0402 by adjusting the power of the ultrasonic transducer 0401, so that the pulse jet intensity remains relatively stable during the entire polishing process.

[0060] The ultrasonic liquid viscosity sensor 0208 and the particle concentration sensor 0209 of the present invention monitor the viscosity and concentration of the abrasive flow in real time, and transmit the obtained data back to the integrated control cabinet 03. When the concentration or viscosity of the abrasive flow is higher or lower than the pre-designed value, the integrated control cabinet 03 automatically adjusts the flow rate of the water inlet 0101 on the abrasive mixing barrel 0106 according to the specific situation, so as to realize the system's precise control of the mixing quality of the abrasive flow.

[0061] The three-axis moving module 07 and the workpiece rotating device 06 of the present invention are both controlled by the integrated control cabinet 03, which can realize the coordinated movement of the three-axis moving module 07 and the workpiece rotating device 06, and complete the full coverage and precise polishing of the complex curved flow channel.

[0062] Preferred implementation scheme:

[0063] After starting the processing, the abrasive flow is first prepared in the abrasive mixing device 01. After being evenly mixed, the self-priming pump 0202 extracts the abrasive flow from the middle layer of the abrasive mixing barrel 0106. The abrasive flow is filtered through the filter disc 0203 of the self-priming pump 0202 and injected into the jet sleeve 0411 through the abrasive flow injection port 0405 under the monitoring of the ultrasonic liquid viscosity sensor 0208 and the particle concentration sensor 0209. After a certain amount of abrasive flow is injected, the ultrasonic generator in the integrated control cabinet 03 is started, and the electrical energy is converted into a high-frequency alternating current signal that matches the ultrasonic transducer 0401, driving the ultrasonic transducer 0401 to work and emit ultrasonic waves, and then the ultrasonic energy is focused through the amplitude rod 0402 to generate a high-density sound field inside the nozzle 0407 to act on the fluid inside the nozzle 0407 to force it to vibrate, and transmit the sinusoidal acoustic pressure to the fluid through the nozzle 0407, causing periodic changes in pressure before it is ejected, so that the outlet velocity of the jet also changes periodically, thereby modulating the fluid flow and forming a pulse jet. At the same time, in order to avoid the corrosion of the inner wall of the conical cavity 0408 and the nozzle 0407 by a large number of cavitation bubbles generated by ultrasonic vibration, the air pump 1101 mixes air into the abrasive flow through the gas injection port 0409 on the right wall of the jet sleeve 0411, changes the motion characteristics of the incoming flow, forms a three-phase flow of abrasive, water and air mixture with a certain compression, and reduces or eliminates the cavitation damage of the conical cavity 0408 and the inner wall of the nozzle 0407 by the cavitation bubbles generated by ultrasonic vibration in the abrasive flow. After the jet beam reaches the workpiece, the pressure sensors 0602 arranged in a circular array in the fixture 0601 collect the impact force data of the jet beam in real time. When the impact force intensity of the jet beam exceeds or is less than the preset intensity range value, the integrated control cabinet 03 immediately adjusts the power of the ultrasonic generator according to the change of the pulse jet impact force, changes the ultrasonic emission frequency of the ultrasonic transducer 0401, and keeps the pulse jet intensity relatively stable during the entire polishing process.

[0064] In the specific polishing process, first determine the nozzle 0407 aperture according to the workpiece material and the total width of the microchannel, and adjust the jet beam angle. Fig.12As shown in the figure, to protect the edge structure of the flow channel and prevent it from being damaged by excessive pulsed jets, while improving the polishing efficiency of the middle flow channel, the surface of the flow channel to be polished is evenly divided into three regions: ①, ②, and ③. Different pulsed jet intensities are set according to different regions. Smaller pulsed jet intensities A1 and A3 are set for the regions including the flow channel edge, and a stronger pulsed jet intensity A2 is set in the middle of the flow channel, that is, A1 = A3 < A2. After the polishing starts, as Fig.13 shown, the pulsed jet continues to move forward at a pre-designed speed and angle, and polishes region ① with the pulsed jet intensity A1. After the polishing of region ① is completed, the pulsed jet polishing tool 04 moves horizontally to the right by a and performs reverse processing on region ② with the pulsed jet intensity A2 for the same process. After the processing of region ② is completed, the pulsed jet polishing tool 04 continues to move horizontally to the right by b and polishes region ③ with the pulsed jet intensity A3. During the above polishing process, when encountering a curved flow channel, as Fig.14 shown, according to the bending condition of the flow channel, the workpiece rotates itself through the workpiece rotating device 06 to keep the pulsed jet always relatively parallel to the flow channel, and at the same time, the jet keeps moving forward at a constant speed.

[0065] The above implementation is only a preferred embodiment of the present invention and does not limit the technical solution of the present invention. Any technical solution that can be achieved on the basis of the above embodiment without creative labor shall be regarded as falling within the scope of the patent right protection of the present invention.

Claims

1. An ultrasonic vibration modulated pulse abrasive microjet polishing system, characterized in that: The invention comprises an abrasive mixing device (01), an abrasive conveying device (02), an integrated control cabinet (03), a pulse jet polishing tool (04), an angle adjustment device (05), a workpiece rotating device (06), a three-axis moving module (07), a processing pool (08), a frame (09), a waste recovery device (10), and a gas injection device (11); the abrasive mixing device (01) is connected to an abrasive flow pipeline (0201) of the abrasive conveying device (02) through an abrasive flow outlet (0105); the abrasive conveying device (02) is connected to an abrasive flow injection port (0405) of the pulse jet polishing tool (04) through an abrasive flow output pipeline (0207); the integrated control cabinet (03) controls the operation of the entire system; the pulse jet polishing tool (04) is fixed to the front end of the angle adjustment device (05) through a clamp (0501); The angle adjustment device (05) is fixed on the module in the three-axis moving module (07), and the angle adjustment device (05) and the pulse jet polishing tool (04) can be moved along the x, y, and z directions under the drive of the three-axis moving module (07); the workpiece rotating device (06) is installed in the processing pool (08) through the support rods (0605) at both ends; the three-axis moving module (07) is installed on the frame (09); the processing pool (08) is fixed to the inner wall of the frame (09) by bolts and is located below the three-axis moving module (07); the waste recovery device (10) is connected to the bottom outlet of the processing pool (08) through the abrasive flow waste pipeline (1001) with a threaded structure, and is used to collect waste abrasive flow; the gas injection device (11) is connected to the gas injection port (0409) of the pulse jet polishing tool (04) through the gas injection pipe (1105); The abrasive mixing device (01) comprises a water inlet (0101), a combined stirring blade (0102), a stirring motor (0103), a mixer frame (0104), an abrasive flow outlet (0105), and an abrasive mixing barrel (0106); the water inlet (0101) is located at the left barrel opening of the abrasive mixing barrel (0106), and the flow rate can be adjusted in real time according to the abrasive concentration and viscosity data fed back by the sensor; the abrasive mixing barrel (0106) is installed in the center of the mixer frame (0104), and the rotating shaft of the stirring motor (0103) is connected to the vertically arranged rotating main shaft through a rotating joint, and passes through the abrasive mixing barrel (0106). 6) The hole at the bottom is connected to the combined stirring blade (0102) in the barrel; the combined stirring blade (0102) is divided into a propulsion blade and a two-blade inclined blade paddle, the propulsion blade is installed at the bottom of the abrasive mixing barrel (0106), and the bottom abrasive is rolled upward, and the upper two-blade inclined blade paddle shears the abrasive circulation in the tank body, forming a strong turbulent disturbance, and the strong turbulent effect is used to refine the abrasive particles, increase the contact probability, and thus improve the overall circulation and mixing efficiency of the abrasive in the barrel; the abrasive flow outlet (0105) is located on the right side wall of the middle part of the abrasive mixing barrel (0106), and the abrasive flow outlet (0105) is connected to the abrasive flow pipeline (0201); The abrasive conveying device (02) comprises an abrasive flow pipeline (0201), a self-priming pump (0202), a filter disc (0203), a flow switch (0204), an abrasive flow pressure gauge (0205), an electro-hydraulic servo valve (0206), an abrasive flow output pipeline (0207), an ultrasonic liquid viscosity sensor (0208), and a particle concentration sensor (0209); the abrasive flow pipeline (0201) is installed at the inlet of the self-priming pump (0202); the outlet of the self-priming pump (0202) is connected to the filter disc (0203), the flow switch (0204), the abrasive flow pressure gauge (0205), the electro-hydraulic servo valve (0206), the ultrasonic liquid viscosity sensor (0208), and the particle concentration sensor (0209) in sequence through the abrasive flow output pipeline (0207); the ultrasonic liquid viscosity sensor (0208) and the particle concentration sensor (0209) are used to monitor the changes in the viscosity and concentration of the abrasive flow in real time; The pulse jet polishing tool (04) comprises an ultrasonic transducer (0401), an horn (0402), a flange (0403), a flange sealing rubber layer (0404), an abrasive flow injection port (0405), a sealing rubber ring (0406), a nozzle (0407), a conical cavity (0408), a gas injection port (0409), and a jet sleeve (0411). The ultrasonic transducer (0401) is located at the top of the entire pulse jet polishing tool (04); the top of the horn (0402) is connected to the bottom of the ultrasonic transducer (0401), and the horn (0403) is connected to the bottom of the ultrasonic transducer (0401). The end of the jet sleeve (0402) passes through the jet sleeve (0411) and the conical cavity (0408) in sequence and extends into the nozzle (0407); the middle end flange surface of the amplitude change rod (0402) is clamped and assembled with the flange surface of the upper end of the jet sleeve (0411) through the flange plate (0403); a flange plate sealing rubber layer (0404) is arranged between the flange plate (0403) and the flange surface of the upper end of the jet sleeve (0411); the abrasive flow injection port (0405) and the gas injection port (0409) are arranged obliquely on both sides of the jet sleeve (0411), so as to avoid direct impact on the amplitude change rod (0402). 02); the nozzle (0407) is installed at the end of the conical cavity (0408), the whole material of which is made of tungsten steel material, the inner core is made of ruby ​​material, and the outlet aperture is reduced to reduce the wear of the abrasive on the nozzle (0407) and increase the service life of the nozzle (0407); the conical cavity (0408) is connected with the internal thread structure at the lower end of the jet sleeve (0411) through the external thread on the upper end face; the internal flow channel structure of the conical cavity (0408) is inverted cone shape, and the end of the external thread surface is provided with a right angle end face; the end face of the jet sleeve (0411) is connected with the conical cavity ( A sealing rubber ring (0406) with an interchangeable thickness specification is arranged between the right-angle end faces at the bottom of the external thread (0408), and the sealing rubber ring (0406) is tightened through the thread between the jet sleeve (0411) and the conical cavity (0408) to achieve the sealing effect of the sealing rubber ring (0406); under different polishing requirements, the thickness specification of the sealing rubber ring (0406) can be changed to adjust the distance between the end of the amplitude change rod (0402) and the inner cavity outlet of the nozzle (0407) without changing the microjet process parameters, so as to actively control the magnitude of the pulse jet intensity; The angle adjustment device (05) comprises a clamp (0501), a clamp support plate (0502), and an angle adjustment plate (0503); the upper and lower ends of the angle adjustment plate (0503) are provided with arc-shaped movable grooves with the same center, and the adjustable angle range is 0 to 60 degrees. When the jet angle needs to be adjusted, the clamp support plate (0502) is swung up and down to a suitable angle, and then the pulse jet polishing tool (04) is locked by using screws passing through the arc groove and the screw holes on the clamp support plate (0502); the inner ring of the clamp (0501) is provided with vibration isolation rubber to maintain the stability of the pulse jet polishing tool during operation.

2. The ultrasonic vibration modulated pulse abrasive microjet polishing system according to claim 1, characterized in that: The workpiece rotating device (06) includes a clamp (0601), a pressure sensor (0602), a vertical servo motor (0603), a waterproof isolation box (0604), and two end support rods (0605). The waterproof isolation box (0604) is installed on the inner wall of the processing pool (08) through the two end support rods (0605); the vertical servo motor (0603) is installed at the bottom of the waterproof isolation box (0604); the rotating shaft of the vertical servo motor (0603) is connected to the clamp (0601) through a connector to control the periodic rotation of the clamp (0601); a plurality of pressure sensors (0602) are arranged in an array along the circumferential direction inside the clamp (0601) to monitor the changes in pulse jet intensity in real time to ensure the stability of polishing intensity.

3. The ultrasonic vibration modulated pulse abrasive microjet polishing system according to claim 1, characterized in that: The three-axis moving module (07) comprises a guide rail (0701), a linear slider pad (0702), a module fixing plate (0703), a Y-axis module (0704), a Z-axis module (0705), a horizontal lateral moving base plate (0706), an X-axis module (0707), and a horizontal moving base plate (0708). The guide rail (0701) is installed on the left side of the frame (09), and the upper end of the guide rail (0701) is installed with a linear slider pad (0702); the upper end surface of the X-axis module (0707) is installed with The horizontally movable base plate (0706) is connected to the right side of the frame (09); the upper end surface of the linear slider pad (0702) is connected to the upper end surface of the horizontally movable base plate (0706) by screws through the module fixing plate (0703); the Y-axis module (0704) is installed on the front end surface of the module fixing plate (0703), and the Z-axis module (0705) is installed on the front end surface of the Y-axis module (0704), and the whole can realize movement in the x, y, and z directions.

4. The ultrasonic vibration modulated pulse abrasive microjet polishing system according to claim 1, characterized in that: The waste recovery device (10) comprises an abrasive flow waste pipeline (1001) and a waste recovery box (1002), wherein one end of the abrasive flow waste pipeline (1001) is connected to the bottom outlet of the processing pool (08); and the other end of the abrasive flow waste pipeline (1001) is connected to the inlet of the waste recovery box (1002).

5. The ultrasonic vibration modulated pulse abrasive microjet polishing system according to claim 1, characterized in that: The gas injection device (11) comprises an air pump (1101), a gas switch (1102), a gas pressure gauge (1103), a proportional valve (1104), and a gas injection pipe (1105). One end of the gas injection pipe (1105) is connected to the outlet of the air pump (1101), and the other end of the gas injection pipe (1105) is connected to the gas injection port (0409) of the pulse jet polishing tool (04). The gas switch (1102) is sequentially arranged on the gas injection pipe (1105) according to the flow direction of the gas. 102), a gas pressure gauge (1103) and a proportional valve (1104), the gas generated by the air pump (1101) passes through the gas switch (1102), the gas pressure gauge (1103) and the proportional valve (1104) in the gas injection pipe (1105) in sequence and then enters the conical cavity (0408) of the pulse jet polishing tool (04), and the added gas can reduce or eliminate the cavitation damage to the inner wall of the conical cavity (0408) and the nozzle (0407) caused by cavitation bubbles generated by ultrasonic vibration in the abrasive flow.

6. The ultrasonic vibration modulated pulse abrasive microjet polishing system according to claim 1, characterized in that: The three-axis moving module (07) and the workpiece rotating device (06) are both controlled by the integrated control cabinet (03), which can realize the coordinated movement of the three-axis moving module (07) and the workpiece rotating device (06) to complete the full coverage and precise polishing of the complex curved flow channel.

7. The ultrasonic vibration modulated pulse abrasive microjet polishing system according to claim 1, characterized in that: In the abrasive mixing barrel (0106), the combined stirring blade (0102) is used to mix the abrasive with a density of 1000 kg / m 3 distilled water and a volume fraction not exceeding 5% and a density of 3170 kg / m 3 The aluminum oxide abrasive is evenly stirred to form an abrasive flow.

8. The ultrasonic vibration modulated pulse abrasive microjet polishing system according to claim 1, characterized in that: The ultrasonic liquid viscosity sensor (0208) and the particle concentration sensor (0209) monitor the viscosity and concentration of the abrasive flow in real time, and transmit the obtained data back to the integrated control cabinet (03); when the concentration or viscosity of the abrasive flow is higher or lower than the pre-designed value, the integrated control cabinet (03) automatically adjusts the flow rate of the water inlet (0101) on the abrasive mixing barrel (0106) according to the specific situation, so as to realize the system's precise control of the abrasive flow mixing quality.

9. The ultrasonic vibration modulated pulse abrasive microjet polishing system according to claim 1, characterized in that: The outlet aperture of the nozzle (0407) is selected between 0.1-0.5 mm based on the summary of multiple experimental data; the specific aperture of the nozzle (0407) is determined by Finnie erosion model calculation in combination with the pulse microjet intensity and the pre-designed polishing time for different areas and channels with different degrees of curvature; the distance D between the end of the variable amplitude rod (0402) and the inner cavity outlet of the nozzle (0407) and the diameter R of the end of the variable amplitude rod (0402) are determined by Euler multiphase flow model calculation in combination with the diameter of the channel, the preset jet intensity and the specifications of the nozzle (0407).

10. The ultrasonic vibration modulated pulse abrasive microjet polishing system according to claim 2, characterized in that: The pressure sensor (0602) monitors the jet impact force in real time and transmits the data back to the integrated control cabinet (03). When the jet impact force fluctuates, the integrated control cabinet (03) controls the amplitude of the amplitude transformer (0402) by adjusting the power of the ultrasonic transducer (0401), so that the pulse jet intensity remains relatively stable during the entire polishing process.

Images