Substrate Fixing Device

Abstract

The present invention relates to a substrate fixing device, comprising: an operating table portion, which is mounted on a rotating shaft portion and rotates, the operating table portion supports a substrate and is electrically connected to the rotating shaft portion; a plurality of fixing portions are mounted along the circumferential direction of the operating table portion, which fix the substrate and are electrically connected to the substrate; and a driving portion, which moves inside the operating table portion and rotates the fixing portion, and is electrically connected to the operating table portion. The substrate fixing device can quickly eliminate static electricity generated during substrate processing, thereby preventing substrate defects.

Description

Technical Field

[0001] The present invention relates to a substrate fixing device, and more particularly to a substrate fixing device capable of blocking static electricity generated during substrate processing to prevent substrate defects. Background Art

[0002] Typically, a substrate processing device used in the manufacturing process of a semiconductor device or a liquid crystal display device is provided with a cluster-type processing unit, which includes: a rotating clamp that supports the substrate almost horizontally to rotate it; and a nozzle for supplying a processing liquid to the substrate supported by the rotating clamp.

[0003] Furthermore, the processing unit for scrubbing and cleaning the substrate is provided with a brush for scrubbing and cleaning the substrate supported by the rotary clamp.

[0004] However, there has been a problem in the past that if static electricity is generated on a substrate during substrate processing, it may cause substrate defects. Therefore, there is a need to improve this problem.

[0005] Background technology of the present invention is disclosed in Korean Patent Publication No. 2015-0015346 (published on February 10, 2015, title of invention: substrate processing apparatus). Summary of the invention

[0006] Technical issues to be solved

[0007] The present invention is proposed to solve the above technical problems, and aims to provide a substrate fixing device which can block static electricity generated during substrate processing to prevent substrate defects.

[0008] Solutions to technical problems

[0009] The substrate fixing device according to the present invention is characterized in that it includes: an operating table portion, which is installed on a rotating shaft portion and rotates, the operating table portion supports the substrate and is energized with the rotating shaft portion; a plurality of fixing portions, which are installed along the circumferential direction of the operating table portion, fix the substrate and are energized with the substrate; and a driving portion, which moves inside the operating table portion and rotates the fixing portion, and is energized with the operating table portion.

[0010] The operating table portion is characterized in that it includes: a central operating table portion, which is combined with the rotating shaft portion; a lower operating table portion, which is combined with the central operating table portion; and an upper operating table portion, which is combined with the lower operating table portion to cover the upper part of the lower operating table portion; and a supporting operating table portion, which is arranged in plurality along the circumferential direction of the upper operating table portion and is used to place the substrate.

[0011] The fixing part is characterized in that it includes: a fixed rotating part, which is rotatably mounted on the operating table part and rotated by the linear movement of the driving part; and a fixed clamp part, which protrudes on the upper side of the fixed rotating part and is in close contact with or separated from the edge of the substrate as the fixed rotating part rotates.

[0012] The driving part is characterized in that it includes: a driving adjustment part, which is arranged on the rotating shaft part and can adjust the up and down length; a driving lifting part, which is installed on the operating table part and can move up and down through the driving adjustment part; a driving rotating part, which is installed on the operating table part in a rotatable manner and rotates through the up and down movement of the driving lifting part; and a driving connecting rod part, the two ends of which are connected to the driving rotating part and the fixed part, and as the driving rotating part rotates, the fixed part is pushed to rotate the fixed part.

[0013] The driving adjustment part is characterized in that it includes: an adjusting cylinder part, which is built into the rotating shaft part, and the length of the adjusting cylinder part is elongated or shortened along the up and down direction; and an adjusting pin part, which is formed as one or more on the upper side of the adjusting cylinder part and is inserted into the operating table part to move the driving lifting part up and down.

[0014] The driving lifting part is characterized in that it includes: a lifting lower plate part, which is built into the operating table part and moves upward by being inserted into the driving adjustment part of the operating table part; a lifting side plate part, which extends upward from the inner side of the lifting lower plate part; a lifting upper plate part, which extends laterally from the lifting side plate part and is arranged in a manner opposite to the lifting lower plate part; and a lifting recovery part, which is placed on the lifting lower plate part, penetrates the lifting upper plate part and elastically supports the operating table part.

[0015] The driving rotating part is characterized in that it includes: a rotating support part installed on the operating table part; a rotating shaft part formed on the rotating support part; and a rotating conversion part installed on the rotating shaft part in a rotatable manner, which is rotated by the up and down movement of the driving lifting part, and the rotating conversion part guides the left and right movement of the driving connecting rod part.

[0016] The driving part is characterized in that it further includes: a driving holding part, which is built into the operating table part and restricts the driving link part so that the substrate is in a clamping state.

[0017] The driving holding portion is characterized in that it includes: a holding and fixing portion, which is installed on the operating table portion and is configured in a manner that straddles the driving link portion; a holding and rotating portion, the center portion of which is rotatably installed on the holding and fixing portion, and one end of the holding and rotating portion is connected to the driving link portion; and a holding and load-bearing portion, which is installed on the other end of the holding and rotating portion, and when the substrate rotates, the holding and rotating portion is rotated in one direction by centrifugal force.

[0018] Effects of the Invention

[0019] The substrate fixing device according to the present invention can quickly eliminate static electricity generated during substrate processing, thereby preventing substrate defects. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 FIG. 1 is a diagram briefly showing a substrate processing system according to an embodiment of the present invention.

[0021] Figure 2 FIG. 1 is a diagram briefly showing a transmission unit according to an embodiment of the present invention.

[0022] Figure 3 FIG. 1 is a diagram briefly showing a waiting unit according to an embodiment of the present invention.

[0023] Figure 4 FIG. 1 is a diagram schematically showing an antistatic portion according to an embodiment of the present invention.

[0024] Figure 5 The figure briefly shows a processing unit according to an embodiment of the present invention.

[0025] Figure 6 The figure is a three-dimensional view briefly showing an operating table according to an embodiment of the present invention.

[0026] Figure 7 The figure is a cross-sectional view briefly showing an operating table according to an embodiment of the present invention.

[0027] Figure 8 FIG. 1 is a diagram briefly showing a driving unit according to an embodiment of the present invention.

[0028] Fig. 9 The figure is an exploded perspective view of an operating table portion and a rotating shaft portion according to an embodiment of the present invention.

[0029] Fig.10 FIG. 1 is a cross-sectional view briefly showing a rotating shaft according to an embodiment of the present invention.

[0030] Fig.11 The figure is a top view briefly showing a substrate clamping state according to an embodiment of the present invention.

[0031] Fig.12The figure is a top view briefly showing a non-clamping state according to an embodiment of the present invention.

[0032] Description of Reference Numerals

[0033] 10: Transfer part; 11: Transfer body part; 12: Transfer working part; 13: Transfer holding part; 20: Waiting part; 21: Waiting base part; 22: Waiting bracket part; 23: Waiting support part; 30: Processing part; 40: Anti-static part; 50: Chamber part; 51: Chamber shell part; 52: Chamber base part; 60: Rotating shaft part; 70: Operating table part; 71: Central operating table part; 72: Lower operating table part; 73: Upper operating table part; 74: Supporting operating table part; 80: Fixed part; 81: Fixed rotating part; 82: Fixed clamp part; 90: Driving part; 91: Driving adjustment part; 92: Driving lifting part; 93: Driving rotating part; 94: Driving connecting rod part; 95: Driving holding part. DETAILED DESCRIPTION

[0034] Hereinafter, an embodiment of a substrate fixing device according to an embodiment of the present invention is described with reference to the accompanying drawings. In the process, for the clarity and convenience of the description, the thickness of multiple lines or the size of structural elements shown in the accompanying drawings may be exaggerated. In addition, multiple terms described below are defined in a manner taking into account the functions in the present invention, which may be different depending on the intention or convention of the user or application personnel. Therefore, these terms should be defined according to the full content of this specification.

[0035] Figure 1 FIG. 1 is a diagram briefly showing a substrate processing system according to an embodiment of the present invention. Figure 1 A substrate processing system according to an embodiment of the present invention includes a transfer unit 10 , a waiting unit 20 and a processing unit 30 .

[0036] The plurality of transfer units 10 transfer the substrate 100 to an additional process or a subsequent process. The transfer unit 10 is electrically connected to the substrate 100 and can be grounded. As an example, the transfer unit 10 is composed of a material that can be electrically connected to the substrate 100, and the transfer unit 10 can be set on the ground and become a transfer robot in a grounded state.

[0037] The waiting section 20 is disposed between adjacent conveying sections 10. The substrate 100 waits in the waiting section 20 before being conveyed to the next conveying section 10. The waiting section 20 is electrically connected to the substrate 100 and can be grounded.

[0038] For example, the waiting section 20 may be formed of a material capable of conducting electricity with the substrate 100 , and the waiting section 20 may be provided on the ground and grounded. The number of the waiting sections 20 may be proportional to the number of the transfer sections 20 .

[0039] The processing unit 30 processes the substrate 100 introduced by the transfer unit 10 and is electrically connected to the substrate 100. The processing unit 30 can be grounded. For example, a plurality of processing units 30 can be arranged around the transfer unit 10, and the transfer unit 10 can supply the substrate 100 to each processing unit 30.

[0040] The processing unit 30 is composed of a material capable of conducting electricity with the substrate 100, and can be placed on the ground to be grounded. The processing unit 30 can clean and dry the substrate 100 using a chemical solution, cleaning water, gas, and the like.

[0041] Therefore, while the substrate 100 is being transferred and processed, the substrate 100 can be powered through the transfer unit 10, the waiting unit 20, and the processing unit 30, and even if static electricity is generated, it can be quickly eliminated. Therefore, defects of the substrate 100 caused by static electricity generated on the substrate 100 can be prevented.

[0042] Figure 2 FIG. 1 is a diagram schematically showing a transfer unit according to an embodiment of the present invention. Figure 2 The transfer unit 10 of one embodiment of the present invention includes a transfer body 11 , a transfer working unit 12 and a transfer holding unit 13 .

[0043] The transfer body 11 is grounded. As an example, the transfer body 11 is placed on the ground and may be composed of a material that can conduct electricity. A separate grounding wire may be connected to the transfer body 11 to be grounded.

[0044] The transfer work unit 12 is movably mounted on the transfer body 11. Such a transfer work unit 12 is electrically connected to the transfer body 11. As an example, the transfer work unit 12 can be mounted on the transfer body 11 and rotate or reciprocate, and the length can be changed according to the working environment.

[0045] The transfer gripping part 13 is attached to the transfer operation part 12 and grips the substrate 100. Such a transfer gripping part 13 is electrically connected to the transfer operation part 12. As an example, the transfer gripping part 13 may be composed of a material that can be electrically connected.

[0046] Therefore, if the transfer gripping part 13 , the transfer working part 12 , and the transfer main body 11 are kept electrically connected to each other, when the transfer gripping part 13 grips the substrate 100 , the substrate 100 will be grounded, thereby eliminating static electricity generated on the substrate 100 .

[0047] Figure 3 FIG. 1 is a diagram briefly showing a waiting unit according to an embodiment of the present invention. Figure 3 The waiting portion 20 of one embodiment of the present invention includes a waiting base portion 21 , a waiting bracket portion 22 and a waiting support portion 23 .

[0048] The waiting base 21 is grounded. As an example, the waiting base 21 may be placed on the ground and may be formed of a material that can conduct electricity. A separate grounding wire may be connected to the waiting base 21 to be grounded.

[0049] The waiting bracket 22 is connected to the upper side of the waiting base 21 and is electrically connected to the waiting base 21. As an example, the waiting bracket 22 is connected to the upper part of the waiting base 21 and can be formed as a frame with open front and rear surfaces. Such a waiting bracket 22 can be composed of a material that can be electrically connected.

[0050] The waiting support part 23 is connected to the waiting tray part 22 to support the substrate 100, and is electrically connected to the waiting tray part 22. As an example, a plurality of waiting support parts 23 may be arranged on the waiting tray part 22 in the vertical direction to stack the substrates 100.

[0051] Such a waiting support portion 23 is in contact with the substrate 100 and may be composed of a material that can conduct electricity.

[0052] Therefore, if the waiting support part 23, the waiting bracket part 22, and the waiting base part 21 are kept electrically connected to each other, when the transfer holding part 13 places the substrate 100 on the waiting support part 23, the substrate 100 is grounded, thereby eliminating the static electricity generated on the substrate 100.

[0053] Figure 4 FIG. 1 is a diagram briefly showing an antistatic part according to an embodiment of the present invention. Figure 4 The substrate processing system according to one embodiment of the present invention may further include an anti-static unit 40 .

[0054] The anti-static unit 40 sprays an anti-static medium onto the substrate 100 moved by the transfer unit 10 to prevent static electricity from being generated on the substrate 100. As an example, the anti-static unit 40 is disposed between the transfer unit 10 and the waiting unit 20, and can spray an anti-static medium onto the substrate 100 moved toward the waiting unit 20 by the transfer unit 10 to prevent static electricity from being generated on the substrate 100. In addition, the anti-static unit 40 can be disposed between the transfer unit 10 and the processing unit 30, and can spray an anti-static medium onto the substrate 100 moved toward the processing unit 30 by the transfer unit 10 to prevent static electricity from being generated on the substrate 100.

[0055] Figure 5 FIG. 1 is a diagram briefly showing a processing unit according to an embodiment of the present invention. Figure 5 The processing unit 30 according to one embodiment of the present invention includes a chamber unit 50 , a shaft unit 60 , an operating table unit 70 , a fixing unit 80 and a driving unit 90 .

[0056] The chamber 50 is grounded. For example, the chamber 50 is formed in a box shape with one side open, and the open side can be opened and closed by a door. Such a chamber 50 is composed of a material that can be electrified. A separate grounding wire connected to the chamber 50 can be grounded.

[0057] The rotation shaft 60 is attached to the chamber 50 and is energized with the chamber 50. As an example, the rotation shaft 60 is a structure that rotates an object when power is applied, and may be composed of a material that can be energized.

[0058] The operation table 70 is mounted on the shaft 60 to rotate, and is electrically connected to the shaft 60. As an example, the operation table 70 can be placed on the substrate 100, and can be composed of a material that can be electrically connected.

[0059] A plurality of fixing parts 80 are rotatably mounted along the circumferential direction of the operation table part 70, and are electrically connected to the substrate 100. For example, if no external force is applied to the fixing parts 80, the fixing parts 80 may be in a clamping state in which the fixing parts 80 are closely attached to the outer peripheral surface of the substrate 100 and fix the substrate 100. Furthermore, if an external force is applied to the fixing parts 80, the fixing parts 80 may be rotated and may be in a non-clamping state separated from the outer peripheral surface of the substrate 100.

[0060] The driving unit 90 rotates the fixing unit 80 and conducts electricity to the fixing unit 80. Such a driving unit 90 conducts electricity to the operation table unit 70. As an example, the driving unit 90 may be composed of a material that can conduct electricity, and may maintain a state of being connected to the operation table unit 70. Such a driving unit 90 may induce a rotational motion into a linear motion, thereby rotating the fixing unit 80.

[0061] The chamber portion 50 according to an embodiment of the present invention includes a chamber housing portion 51 and a chamber base portion 52 .

[0062] The chamber housing 51 is grounded. For example, the chamber housing 51 may be formed in a box shape with one side being openable and closable. Such a chamber housing 51 is made of a material that can conduct electricity, and can be grounded by connecting a separate grounding wire.

[0063] The chamber base 52 is attached to the chamber casing 51 and is coupled to the rotation shaft 60. As an example, the chamber base 52 is coupled to the inner side of the chamber casing 51 and may be composed of a material that can conduct electricity.

[0064] On the other hand, the rotation shaft portion 60 is coupled to the chamber base portion 52 and may be formed of a material that can conduct electricity.

[0065] Figure 6 To briefly illustrate a three-dimensional view of an operating table portion of an embodiment of the present invention, Figure 7To briefly illustrate a cross-sectional view of an operating table portion of an embodiment of the present invention, Figure 8 FIG. 1 is a diagram briefly showing a driving unit of an embodiment of the present invention. Fig. 9 This is an exploded perspective view of the operating table and the rotating shaft according to an embodiment of the present invention. Fig.10 A cross-sectional view briefly showing a rotating shaft portion of an embodiment of the present invention. Fig.11 To briefly illustrate a top view of a substrate clamping state according to an embodiment of the present invention, Fig.12 FIG. 1 is a top view briefly showing a non-clamping state of an embodiment of the present invention. Figures 5 to 12 The specific structures of the operating table part 70, the fixing part 80 and the driving part 90 are as follows.

[0066] The operating table portion 70 according to an embodiment of the present invention includes a central operating table portion 71 , a lower operating table portion 72 , an upper operating table portion 73 , and a supporting operating table portion 74 .

[0067] The center console portion 71 is connected to the rotation shaft portion 60. As an example, the center console portion 71 is composed of a material that can conduct electricity, and can be rotated in the axial direction by the rotation shaft portion 60.

[0068] The lower operating table portion 72 is combined with the central operating table portion 71, and the upper operating table portion 73 is combined with the lower operating table portion 72 to cover the upper portion of the lower operating table portion 72. As an example, the lower operating table portion 72 and the upper operating table portion 73 may be composed of a material that can be energized. The inner circumference of the lower operating table portion 72 may be combined with the central operating table portion 71 and may rotate together with the central operating table portion 71. In addition, the upper operating table portion 73 may be directly combined with the central operating table portion 71.

[0069] A plurality of support platforms 74 are arranged along the circumferential direction of the upper platform 73 for placing the substrate 100. For example, the support platform 74 is made of a material that can conduct electricity, and can be connected to the upper side of the upper platform 73 and protrude upward. The substrate 100 can be placed on the upper end of such a support platform 74.

[0070] The fixing portion 80 according to an embodiment of the present invention includes a fixing rotating portion 81 and a fixing clamping portion 82 .

[0071] The fixed rotating part 81 is rotatably mounted on the operation table part 70, and rotates by the linear movement of the driving part 90. As an example, the fixed rotating part 81 is rotatably mounted on the edge of the lower operation table part 72, and can be exposed to the outside through the upper operation table part 73. The fixed rotating part 81 can be composed of a material that can conduct electricity.

[0072] The fixing clamp portion 82 protrudes from the upper side of the fixing rotating portion 81, and is closely attached to or separated from the edge of the substrate 100 as the fixing rotating portion 81 rotates. As an example, the fixing clamp portion 82 extends upward from the edge of the fixing rotating portion 81, and is composed of a material that can conduct electricity, and the fixing clamp portion 82 can directly contact the substrate 100.

[0073] The driving unit 90 of one embodiment of the present invention includes a driving adjustment unit 91, a driving lifting unit 92, a driving rotation unit 93, and a driving link unit 94. These components are made of materials that can be electrically connected to each other, and can be connected to the operation table unit 70 to maintain an electrically connected state.

[0074] The drive adjustment unit 91 is disposed on the shaft unit 60 and can adjust the vertical length. For example, the drive adjustment unit 91 can adjust the length by oil pressure or air pressure and can be built in the shaft unit 60 .

[0075] The driving lift 92 is mounted on the operation table 70 and can be moved up and down by the driving adjustment part 91. As an example, the driving lift 92 can be arranged between the lower operation table 72 and the upper operation table 73 and can be moved upward by the driving adjustment part 91.

[0076] The driving rotating part 93 is rotatably mounted on the operation table 70 and connected to the driving lifting part 92. The driving rotating part 93 rotates by the vertical movement of the driving lifting part 92. As an example, the driving rotating part 93 can convert the vertical movement into the rotational movement.

[0077] The two ends of the driving link part 94 are connected to the driving rotating part 93 and the fixed part 80, and as the driving rotating part 93 rotates, the fixed part 80 is pushed to rotate the fixed part 80. As an example, if the rotational motion is transmitted by the driving rotating part 93, the driving link part 94 can move left and right toward the fixed rotating part 81. In this case, since the driving link part 94 is connected to the outer peripheral surface of the fixed rotating part 81, the fixed rotating part 81 can be rotated by the left and right movement of the driving link part 94.

[0078] The driving adjustment portion 91 according to an embodiment of the present invention includes an adjustment cylinder portion 911 and an adjustment pin portion 912 .

[0079] The adjusting cylinder 911 is built into the shaft 60, and the length of the adjusting cylinder 911 is extended or shortened in the vertical direction. As an example, the adjusting cylinder 911 is formed into a tube shape and is arranged inside the shaft 60, and the length can be adjusted in the vertical direction by oil pressure or air pressure.

[0080] One or more adjusting pins 912 are formed on the upper side of the adjusting cylinder 911, and are inserted into the operation platform 70 to drive the lifting and lowering portion 92 to move up and down. As an example, three or more adjusting pins 912 may be arranged at equal intervals along the circumferential surface of the upper end of the adjusting cylinder 911. Such an adjusting pin 912 can push the lifting and lowering portion 92 upward by penetrating the lower operation platform 72.

[0081] The driving lifting part 92 of one embodiment of the present invention includes a lifting lower plate part 921, a lifting side plate part 922, a lifting upper plate part 923 and a lifting recovery part 924. Such a driving lifting part 92 may be composed of a material that can conduct electricity.

[0082] The lifting lower plate portion 921 is built into the operation table portion 70 and moves upward by the driving adjustment portion 91 inserted into the operation table portion 70. As an example, the lifting lower plate portion 921 may be formed in a circular belt shape and placed on the central operation table portion 71, and a central hole portion 711 may be formed in the central operation table portion 71 so that the adjustment pin portion 912 passes through.

[0083] The lifting side plate portion 922 extends upward from the inner side of the lifting lower plate portion 921, and the lifting upper plate portion 923 extends laterally from the lifting side plate portion 922 and is arranged opposite to the lifting lower plate portion 921. As an example, the lifting lower plate portion 921, the lifting side plate portion 922, and the lifting upper plate portion 923 are integrally formed to form a shape open to the outside.

[0084] The lifting and lowering restoring part 924 is placed on the lifting and lowering plate part 921, and passes through the lifting and upper plate part 923 to elastically support the operation platform part 70. As an example, the lifting and lowering restoring part 924 is formed into a coil spring, and the upper end can support the bottom surface of the upper operation platform part 73, and the lower end can support the upper side surface of the lifting and lowering plate part 921. Such a lifting and lowering restoring part 924 can provide a restoring force in a manner that eliminates the external force driving the lifting and lowering part 92 to move downward.

[0085] The driving rotating part 93 according to an embodiment of the present invention includes a rotation support part 931, a rotation shaft part 932, and a rotation conversion part 933. Such a driving rotating part 93 may be composed of a material that can conduct electricity.

[0086] The rotation support part 931 is attached to the operation platform part 70. As an example, a plurality of rotation support parts 931 may be arranged along the outer peripheral surface of the driving lifting part 92, and may be connected to the lower operation platform part 72 or the upper operation platform part 73.

[0087] The rotation shaft portion 932 is formed on the rotation support portion 931. As an example, the rotation shaft portion 932 may protrude toward the side of the rotation support portion 931.

[0088] The rotation conversion part 933 can be rotatably mounted on the rotation shaft part 932, and rotated by driving the lifting part 92 to move up and down, thereby guiding the left and right movement of the driving link part 94. As an example, the rotation conversion part 933 may include: a first conversion part 9331, which rotates by connecting the central part to the rotation shaft part 932; a second conversion part 9332, which extends from the first conversion part 9331 toward the side and is inserted into the driving lifting part 92 to be rotatably mounted; and a third conversion part 9333, which extends upward from the first conversion part 9331 and is connected to the driving link part 94.

[0089] The driving link portion 94 of one embodiment of the present invention may include a link rod body portion 941 and a link stop portion 942. The link rod body portion 941 may be rotatably mounted at one end on the third conversion portion 9333, and may be rotatably mounted at the other end on the outer circumferential surface of the fixed rotating portion 81. The link stop portion 942 is mounted on the link rod body portion 941, and may limit the movement of the link rod body portion 941 by being clamped on the inner side of the operating table portion 70. Such a driving link portion 94 may be composed of a material that can be energized.

[0090] The driving part 90 of one embodiment of the present invention may further include a driving holding part 95. The driving holding part 95 is built into the operation table part 70 to limit the movement of the driving link part 94 in a way that the substrate 100 is in a clamping state when the driving adjustment part 91 is not activated. Such a driving holding part 95 may be composed of a material that can be energized.

[0091] More specifically, the drive holding portion 95 includes a holding fixing portion 951 , a holding rotating portion 952 , and a holding load portion 953 .

[0092] The holding and fixing portion 951 is attached to the operation platform portion 70 and is arranged so as to straddle the driving link portion 94. As an example, the holding and fixing portion 951 may be attached to the lower operation platform portion 72 or the upper operation platform portion 73 at both ends.

[0093] The holding rotating part 952 is rotatably mounted on the holding fixed part 951 at the center, and one end is connected to the driving link part 94. As an example, the holding rotating part 952 is arranged to face the holding fixed part 951, and can rotate with the linear movement of the driving link part 94. That is, when the driving link part 94 moves toward the fixed part 80, the holding rotating part 952 can rotate in the clockwise direction. Moreover, when the driving link part 94 moves toward the driving lifting part 92, the holding rotating part 952 can rotate in the counterclockwise direction.

[0094] The holding load portion 953 is installed at the other end of the holding rotation portion 952. If the substrate 100 rotates, the holding rotation portion 952 is rotated in one direction by centrifugal force. As an example, as the substrate 100 rotates, the centrifugal force acts on the holding load portion 953, so that the holding rotation portion 952 can be rotated in the counterclockwise direction. However, even if the holding rotation portion 952 does not rotate due to interference with the operating table portion 70, the holding rotation portion 952 is connected to the driving link portion 94, thereby blocking the driving link portion 94 from moving toward the fixing portion 80. Thus, during the rotation of the substrate 100, the fixing portion 80 can keep the substrate 100 in a clamped state.

[0095] Hereinafter, a processing process and a power-on process of the substrate 100 of the present invention will be described.

[0096] First, one of the transfer units 10 holds the substrates 100 and stacks the substrates 100 in the waiting unit 20 . Then, the other transfer unit 10 supplies the substrates 100 waiting in the waiting unit 20 to each processing unit 30 .

[0097] In this case, the transfer unit 10 itself can be powered on the substrate 100, and can eliminate static electricity generated on the substrate 100 by maintaining a grounded state with the ground. In addition, the waiting unit 20 itself can be powered on the substrate 100, and can eliminate static electricity generated on the substrate 100 by maintaining a grounded state with the ground.

[0098] Furthermore, if an antistatic unit 40 is disposed between the transfer unit 10 and the waiting unit 20 to spray an antistatic medium, static electricity can be blocked from being generated on the substrate 100 held and moved by the transfer unit 10. Such an antistatic unit 40 may also be disposed between the transfer unit 10 and the processing unit 30.

[0099] Furthermore, the processing unit 30 grounds the chamber unit 50, the shaft unit 60 mounted on the chamber unit 50 is energized with the chamber unit 50, and the operation table unit 70 mounted on the shaft unit 60 and on which the substrate 100 is placed is energized with the shaft unit 60. Furthermore, the fixing unit 80 rotatably mounted on the operation table unit 70 guides the clamping state or the non-clamping state of the substrate 100, and the driving unit 90 energized with the fixing unit 80 is energized with the operation table unit 70. Thus, static electricity generated on the substrate 100 itself can be quickly eliminated during the processing of the substrate 100.

[0100] On the other hand, if the drive adjustment part 91 built into the rotating shaft part 60 does not work, the drive lifting part 92 will be arranged at a low position by the restoring force. In addition, the fixing part 80 forms a clamping state for fixing the substrate 100 by closely contacting the edge of the substrate 100 (refer to Fig.11 ).

[0101] If the rotating shaft portion 60 is driven in the above state, the substrate 100 itself can be rotated by rotating the stage portion 70. Then, the substrate 100 processing step is performed by spraying the processing medium onto the rotating substrate 100.

[0102] In this case, as the substrate 100 rotates, centrifugal force acts on the drive holding portion 95 , and the drive link portion 94 connected to the drive holding portion 95 is restricted from moving, so that the clamped state of the substrate 100 can be stably maintained.

[0103] In order to make the substrate 100 in a non-clamped state after the substrate 100 stops rotating, the length of the driving adjustment part 91 is increased. If the length of the driving adjustment part 91 is increased, the driving lifting part 92 is pushed by the driving adjustment part 91 and moves upward, and as the driving rotating part 93 connected to the driving lifting part 92 rotates, the driving link part 94 moves toward the fixing part 80. Thus, the restriction on the substrate 100 is released by rotating the fixing part 80 (see Fig.12 ).

[0104] Although the present invention is described with reference to the embodiments shown in the accompanying drawings, this is only illustrative, and a person skilled in the art will understand that various modifications and equivalent embodiments may be implemented. Therefore, the true technical protection scope of the present invention should be defined according to the attached claims.

Claims

1. A substrate processing power supply device, characterized in that: include: An operating table portion is mounted on the rotating shaft portion and rotates, the operating table portion supports the substrate and is electrically connected to the rotating shaft portion; A plurality of fixing parts are installed along the circumferential direction of the operating table part, fixing the substrate and conducting electricity to the substrate; as well as a driving unit that moves inside the operating table portion and rotates the fixing unit and is electrically connected to the operating table portion, The driving part includes a driving adjustment part, which is arranged on the rotating shaft part and can adjust the upper and lower lengths of the driving adjustment part. The driving adjustment part includes an adjustment cylinder part, the adjustment cylinder part is built in the rotating shaft part and the length of the adjustment cylinder part is extended or shortened along the up-down direction.

2. The substrate processing power supply device according to claim 1, characterized in that: The operating platform portion comprises: A central operating table portion, combined with the rotating shaft portion; a lower operating table portion, coupled to the central operating table portion; and The upper operating platform portion is combined with the lower operating platform portion to cover the upper portion of the lower operating platform portion.

3. The substrate processing power supply device according to claim 2, characterized in that: The operating platform also includes: A plurality of supporting operation tables are arranged along the circumferential direction of the upper operation table and are used to place the substrate.

4. The substrate processing power supply device according to claim 1, characterized in that: The fixing portion comprises: a fixed rotating part rotatably mounted on the operating table and rotated by the linear movement of the driving part; and The fixed clamp part protrudes from the upper side of the fixed rotating part and comes into close contact with or is separated from the edge of the substrate as the fixed rotating part rotates.

5. The substrate processing power supply device according to claim 1, characterized in that: The driving unit comprises: A driving lifting part, which is installed on the operating table and can be moved up and down by the driving adjusting part; a driving rotating part which is rotatably mounted on the operating table and rotated by the up-and-down movement of the driving lifting part; and The driving link part has both ends connected to the driving rotating part and the fixing part, and pushes the fixing part to rotate as the driving rotating part rotates.

6. The substrate processing power supply device according to claim 5, characterized in that: The drive adjustment unit comprises: The adjusting pin portion is formed in one or more pieces on the upper side of the adjusting cylinder portion, and is inserted into the operating table portion to cause the driving lifting portion to move up and down.

7. The substrate processing power supply device according to claim 5, characterized in that: The driving lifting part comprises: A lifting lower plate portion is built into the operating table portion and moves upward by being inserted into the driving adjustment portion of the operating table portion; A lifting side plate portion extending upward from the inner side of the lifting lower plate portion; an upper lift plate portion extending laterally from the side lift plate portion and arranged to be opposite to the lower lift plate portion; and The lifting and lowering restoring part is placed on the lifting and lowering plate part, passes through the lifting and upper plate part and elastically supports the operating platform part.

8. The substrate processing power supply device according to claim 5, characterized in that: The driving rotating part comprises: A rotating support portion, mounted on the operating table portion; a rotating shaft portion formed on the rotating support portion; and The rotation conversion unit is rotatably mounted on the rotation shaft unit and rotated by the vertical movement of the driving lifting unit. The rotation conversion unit guides the horizontal movement of the driving link unit.

9. The substrate processing power supply device according to claim 5, characterized in that: The driving unit further includes: The driving holding portion is built into the operation table portion and restricts the driving link portion so that the substrate is in a clamping state.

10. The substrate processing power supply device according to claim 9, characterized in that: The drive holding unit comprises: A holding and fixing portion, mounted on the operating table portion and arranged in a manner of straddling the driving link portion; a holding rotating portion, a central portion of which is rotatably mounted on the holding fixed portion, and one end of which is connected to the driving link portion; and The holding load part is installed at the other end of the holding rotation part, and when the substrate rotates, the holding rotation part is rotated in one direction by centrifugal force.

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