Six-degree-of-freedom flexible parallel active vibration isolation platform

Abstract

The invention discloses a six-degree-of-freedom flexible parallel active vibration isolation platform which comprises an effective load platform, a first decoupling actuation supporting leg, a second decoupling actuation supporting leg, an actuator and a lower platform arranged under the effective load platform. The three first decoupling actuation supporting legs are evenly distributed and transversely and fixedly arranged on the side wall of the effective load platform, and the tail ends of the first decoupling actuation supporting legs are fixedly connected with the corresponding positions of the lower platform. The three second decoupling actuation supporting legs are evenly distributed and transversely and fixedly arranged on the side wall of the effective load platform, and the first decoupling actuation supporting legs and the second decoupling actuation supporting legs are arranged at intervals. According to the invention, six groups of parallel straight plate flexible beams are used for guiding an actuator to carry out translation action so as to apply a load to the middle rigid body, and then the middle rigid body is used for respectively carrying out active control on micro vibration generated by the effective load platform on each No.1 folding flexible beam and each No.2 folding flexible beam.

Description

Technical Field

[0001] The invention relates to the field of vibration isolation technology, in particular to a six-degree-of-freedom flexible parallel active vibration isolation platform. Background Art

[0002] Vibration isolation technology is widely used in various fields of life, such as household appliances, automobiles, and precision engineering structures such as spacecraft. Vibration isolation technology can usually be divided into passive vibration isolation technology and active vibration isolation technology according to whether it needs to absorb energy from the outside world. Passive vibration isolation technology does not require any energy from the outside world. It only relies on passive vibration isolation elements such as springs, air springs, rubber, etc. to achieve vibration isolation. However, due to the particularity of precision objects, there are often higher requirements for the weight, flexibility, etc. of vibration isolation and vibration reduction devices, and there may be many disturbance sources, complex vibration source conditions, and uncertain disturbance directions and times. This requires the vibration isolation device to have wide bandwidth and multiple degrees of freedom. Passive control is mainly aimed at vibrations with higher frequencies, and is not applicable to low-frequency vibrations. Therefore, it cannot be applied to vibrations on precision objects with variable working conditions. Summary of the invention

[0003] The purpose of the present invention is to provide a six-degree-of-freedom flexible parallel active vibration isolation platform in order to actively isolate the tiny vibration problems generated by extreme manufacturing environments when facing precision objects.

[0004] The present invention achieves the above-mentioned purpose through the following technical solutions:

[0005] A six-degree-of-freedom flexible parallel active vibration isolation platform comprises a payload platform, a No. 1 decoupling actuating leg, a No. 2 decoupling actuating leg, an actuator and a lower platform, wherein the lower platform is arranged directly below the payload platform, and three No. 1 decoupling actuating legs are evenly distributed and laterally fixedly arranged on the side wall of the payload platform, and the ends of the No. 1 decoupling actuating legs are respectively fixedly connected to the corresponding positions of the lower platform; three No. 2 decoupling actuating legs are evenly distributed and laterally fixedly arranged on the side wall of the payload platform, and the No. 1 decoupling actuating leg and the No. 2 decoupling actuating leg are spaced apart, and the ends of the No. 2 decoupling actuating leg are respectively fixedly connected to the corresponding positions of the lower platform; the actuator is installed on both the No. 1 decoupling actuating leg and the No. 2 decoupling actuating leg.

[0006] Preferably, the decoupling actuating leg No. 1 includes: a folding flexible beam No. 1, an intermediate rigid body, a fixed rigid body and a straight flexible beam, one end of the folding flexible beam No. 1 is fixedly connected to the side wall of the payload platform, the other end of the folding flexible beam No. 1 is laterally fixedly provided with the intermediate rigid body, the straight flexible beam is laterally provided at both ends of the intermediate rigid body, a fixed rigid body is vertically provided between the ends of the straight flexible beam, and the fixed rigid bodies are respectively fixedly connected to the corresponding positions of the lower platform, by guiding the actuator to perform translational actuation through the arrangement of parallel straight flexible beams, a load can be applied to the intermediate rigid body, and the folding flexible beam No. 1 can be used to accurately control the tiny vibrations of the payload in the horizontal direction of the payload platform.

[0007] Preferably, the No. 2 decoupling actuating leg comprises: a No. 2 folding flexible beam, an intermediate rigid body and a straight flexible beam, one end of the No. 2 folding flexible beam is fixedly connected to the side wall of the payload platform, the other end of the No. 2 folding flexible beam is laterally fixedly provided with the intermediate rigid body, both ends of the intermediate rigid body are laterally provided with straight flexible beams, and the ends of the straight flexible beams are respectively fixedly connected to the corresponding positions of the lower platform. By guiding the actuator to perform translational actuation through the arrangement of parallel straight flexible beams, a load can be applied to the intermediate rigid body, and the No. 2 folding flexible beam can be used to accurately control the tiny vibrations of the payload in the vertical direction of the payload platform.

[0008] Preferably, the actuator is one of a flat-plate voice coil motor, a piezoelectric stack or a piezoelectric sheet. Through this configuration, different types of actuators can be selected according to the vibration isolation frequency band of the vibration reduction object. When the vibration applied to the payload platform is a high-frequency vibration, a flat-plate voice coil motor is used for active control; when the vibration applied to the payload platform is a low-frequency vibration, a piezoelectric stack and a piezoelectric sheet are used for active control.

[0009] Preferably, the actuator is the piezoelectric sheet, two of the piezoelectric sheets are in a group, and one of the piezoelectric sheets is relatively mounted on the outer wall of the straight flexible beam at both ends of the intermediate rigid body. This arrangement facilitates the installation of the piezoelectric sheet, and when the piezoelectric sheet is used, it has a good active control effect on low-frequency vibrations.

[0010] Preferably, the actuator is the flat-plate voice coil motor or the piezoelectric stack, and the flat-plate voice coil motor or the piezoelectric stack is arranged between the straight flexible beams at both ends of the intermediate rigid body. Through this arrangement, different types of actuators can be selected according to the vibration isolation frequency band of the vibration reduction object. It has strong practicality and high reliability and can meet various usage requirements. When a flat-plate voice coil motor is used, it has a good active control effect on high-frequency vibrations; when a piezoelectric stack is used, it has a good active control effect on low-frequency vibrations.

[0011] Preferably, the intermediate rigid body and the fixed rigid body on the first decoupling actuating leg are respectively transversely fixed with actuator connecting parts, and the two ends of the flat-plate voice coil motor or the piezoelectric stack are respectively fixedly connected to one of the actuator connecting parts; the intermediate rigid body and the corresponding positions of the lower platform on the second decoupling actuating leg are respectively transversely fixed with actuator connecting parts, and the two ends of the flat-plate voice coil motor or the piezoelectric stack are respectively fixedly connected to one of the actuator connecting parts. This arrangement facilitates the installation of the flat-plate voice coil motor or the piezoelectric stack.

[0012] Preferably, it also includes a sensor and a controller, wherein the sensor is installed on the payload platform, the sensor is electrically connected to the controller, and the controller is electrically connected to the actuator. Through this arrangement, the sensor can detect the vibration of the payload platform and transmit the data to the controller. The controller analyzes the data and generates instructions through an active control algorithm and transmits them to the actuator. The actuator generates opposite vibrations according to the instructions to offset the original vibrations suffered by the payload platform.

[0013] Preferably, the payload platform, the first decoupling actuating leg, the second decoupling actuating leg and the lower platform are all made of 7075 aluminum alloy. This arrangement has high cost performance, is easy to process and has high reliability.

[0014] Compared with the prior art, the present invention has the following beneficial effects:

[0015] 1. The present application uses six sets of mutually parallel straight flexible beams to guide the actuator to perform translational actuation to apply load to the middle rigid body, and then actively controls the tiny vibrations generated by the payload platform to each No. 1 folding flexible beam and each No. 2 folding flexible beam through the middle rigid body.

[0016] 2. The parallel platform used in this application not only has multiple degrees of freedom, high rigidity, and high load-bearing capacity, but can also remain stable without external energy input.

[0017] 3. The flexible mechanism of the present application transmits force and motion through the elastic deformation of the flexible unit, has the advantages of no friction, no assembly error and easy processing, and can be used as a precision vibration control mechanism.

[0018] 4. When the flat-plate voice coil motor is used in the present application, it has a good active control effect on high-frequency vibrations; when the piezoelectric stack and the piezoelectric sheet are used, it has a good active control effect on low-frequency vibrations. Through this setting, different types of actuators can be selected according to the vibration isolation frequency band of the vibration reduction object. It has strong practicality and high reliability and can meet a variety of usage requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0020] Figure 1 : is an isometric view of a vibration isolation platform in which the actuator of the present invention is a flat-type voice coil motor;

[0021] Figure 2 : is an isometric view of a vibration isolation platform in which the actuator of the present invention is a piezoelectric stack;

[0022] Figure 3 : is an isometric view of a vibration isolation platform in which the actuator of the present invention is a piezoelectric sheet;

[0023] Figure 4 : is a top view of a vibration isolation platform in which the actuator of the present invention is a flat-type voice coil motor;

[0024] Figure 5 : is a top view of the vibration isolation platform in which the actuator of the present invention is a piezoelectric stack;

[0025] Figure 6 : is a top view of the vibration isolation platform in which the actuator of the present invention is a piezoelectric sheet;

[0026] Figure 7 : is a front view of a vibration isolation platform in which the actuator of the present invention is a flat-type voice coil motor;

[0027] Figure 8 : is a front view of a vibration isolation platform in which the actuator of the present invention is a piezoelectric stack;

[0028] Fig. 9 : is a front view of a vibration isolation platform in which the actuator of the present invention is a piezoelectric sheet;

[0029] Fig.10 : is an axonometric view of the payload platform of the present invention;

[0030] Fig.11 : is an isometric view of the first folding flexible beam of the present invention;

[0031] Fig.12 : is an isometric view of the second folding flexible beam of the present invention;

[0032] Fig.13 : is an isometric view of the flat-plate voice coil motor of the present invention;

[0033] Fig.14 : is an isometric view of the piezoelectric stack of the present invention;

[0034] Fig.15 : is an isometric view of the piezoelectric sheet of the present invention;

[0035] Fig.16 : is an axonometric view of the lower platform of the present invention;

[0036] Fig.17 : is an isometric view of the actuator connecting member of the present invention;

[0037] Fig.18 : is a mounting position diagram of the piezoelectric sheet and the straight flexible beam corresponding to the No. 1 folding flexible beam of the present invention;

[0038] Fig.19 : This is a mounting position diagram of the piezoelectric sheet and the straight flexible beam corresponding to the No. 2 folding flexible beam described in the present invention.

[0039] The following are the descriptions of the reference numerals:

[0040] 1. Payload platform; 2. Folding flexible beam No. 1; 3. Folding flexible beam No. 2; 4. Intermediate rigid body; 5. Fixed rigid body; 6. Straight flexible beam; 7. Actuator; 8. Lower platform; 9. Actuator connector. DETAILED DESCRIPTION

[0041] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and the like are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", and the like may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0042] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood by specific circumstances.

[0043] The present invention will be further described below in conjunction with the accompanying drawings:

[0044] Example 1

[0045] like Figure 1-Figure 19 As shown, a six-degree-of-freedom flexible parallel active vibration isolation platform includes a payload platform 1, a No. 1 decoupling actuating leg, a No. 2 decoupling actuating leg, an actuator 7 and a lower platform 8. The lower platform 8 is arranged directly below the payload platform 1, and three No. 1 decoupling actuating legs are evenly distributed and laterally fixed on the side wall of the payload platform 1, and the ends of the No. 1 decoupling actuating legs are respectively fixedly connected to the corresponding positions of the lower platform 8; three No. 2 decoupling actuating legs are evenly distributed and laterally fixed on the side wall of the payload platform 1, and the No. 1 decoupling actuating leg and the No. 2 decoupling actuating leg are spaced apart, and the ends of the No. 2 decoupling actuating leg are respectively fixedly connected to the corresponding positions of the lower platform 8; the No. 1 decoupling actuating leg and the No. 2 decoupling actuating leg are both installed with actuators 7.

[0046] Preferably: the decoupling actuating leg No. 1 includes: a folding flexible beam No. 2, an intermediate rigid body 4, a fixed rigid body 5 and a straight flexible beam 6. One end of the folding flexible beam No. 2 is fixedly connected to the side wall of the payload platform 1, and the other end of the folding flexible beam No. 2 is laterally fixedly provided with an intermediate rigid body 4. Both ends of the intermediate rigid body 4 are laterally provided with straight flexible beams 6. A fixed rigid body 5 is vertically provided between the ends of the straight flexible beam 6, and the fixed rigid bodies 5 are fixedly connected to the corresponding positions of the lower platform 8 respectively. By guiding the actuator 7 to perform translational actuation through the parallel straight flexible beams 6, a load can be applied to the intermediate rigid body 4, and the small vibrations of the payload on the payload platform 1 in the horizontal direction can be accurately controlled by using the folding flexible beam No. 2.

[0047] The No. 2 decoupling actuating leg includes: a No. 2 folding flexible beam 3, an intermediate rigid body 4 and a straight flexible beam 6. One end of the No. 2 folding flexible beam 3 is fixedly connected to the side wall of the payload platform 1, and the other end of the No. 2 folding flexible beam 3 is laterally fixedly provided with an intermediate rigid body 4. Both ends of the intermediate rigid body 4 are laterally provided with straight flexible beams 6, and the ends of the straight flexible beams 6 are respectively fixedly connected to the corresponding positions of the lower platform 8. By guiding the actuator 7 to perform translational actuation through the parallel straight flexible beams 6, a load can be applied to the intermediate rigid body 4, and the No. 2 folding flexible beam 3 can be used to accurately control the tiny vibrations of the payload on the payload platform 1 in the vertical direction.

[0048] The actuator 7 is one of a flat-plate voice coil motor, a piezoelectric stack or a piezoelectric sheet. Through this setting, different types of actuators 7 can be selected according to the vibration isolation frequency band of the vibration reduction object. When the vibration applied to the payload platform 1 is a high-frequency vibration, a flat-plate voice coil motor is used for active control; when the vibration applied to the payload platform 1 is a low-frequency vibration, a piezoelectric stack and a piezoelectric sheet are used for active control.

[0049] The actuator 7 is a piezoelectric sheet, which is grouped into two pieces. A piezoelectric sheet is mounted on the outer wall of the straight flexible beam 6 at both ends of the middle rigid body 4. This arrangement facilitates the installation of the piezoelectric sheet. When the piezoelectric sheet is used, it has a good active control effect on low-frequency vibrations.

[0050] The actuator 7 is a flat-plate voice coil motor or a piezoelectric stack, which is arranged between the straight flexible beams 6 at both ends of the middle rigid body 4. Through this arrangement, different types of actuators 7 can be selected according to the vibration isolation frequency band of the vibration reduction object. It has strong practicality and high reliability and can meet various usage requirements. When a flat-plate voice coil motor is used, it has a good active control effect on high-frequency vibrations; when a piezoelectric stack is used, it has a good active control effect on low-frequency vibrations.

[0051] An actuator connector 9 is transversely fixedly provided on the middle rigid body 4 and the fixed rigid body 5 on the No. 1 decoupling actuating leg, and two ends of the flat voice coil motor or piezoelectric stack are respectively fixedly connected to an actuator connector 9; an actuator connector 9 is transversely fixedly provided at corresponding positions of the middle rigid body 4 and the lower platform 8 on the No. 2 decoupling actuating leg, and two ends of the flat voice coil motor or piezoelectric stack are respectively fixedly connected to an actuator connector 9. This arrangement facilitates the installation of the flat voice coil motor or piezoelectric stack.

[0052] It also includes a sensor and a controller. The sensor is installed on the payload platform 1. The sensor is electrically connected to the controller, and the controller is electrically connected to the actuator 7. Through this arrangement, the sensor can detect the vibration of the payload platform 1 and transmit the data to the controller. The controller analyzes the data and generates instructions through an active control algorithm and transmits them to the actuator 7. The actuator generates opposite vibrations according to the instructions to offset the original vibrations suffered by the payload platform.

[0053] The payload platform 1, the first decoupling actuating leg, the second decoupling actuating leg and the lower platform 8 are all made of 7075 aluminum alloy. This arrangement has high cost performance, is easy to process and has high reliability.

[0054] Working Principle: This application uses active vibration isolation technology, also known as active vibration isolation, which is a technology that offsets the original vibration by applying force or vibration in the opposite direction;

[0055] The present application relies on external energy to drive the actuator, i.e., the actuator 7, to produce opposite vibrations. The active vibration isolation system also includes three main parts: a sensor, a controller, and an actuator. The sensor uses an RS-485 spectrum-type vibration transmitter, and the controller uses TI's TMS320F28132 DSP chip as the control core. Both the sensor and the controller are purchased from existing technology products, and the specific parameters are not described in detail here. The sensor can detect the vibration of the payload platform 1 and transmit the data to the controller. The controller analyzes the data and generates instructions through an active control algorithm and transmits them to the actuator 7. The actuator 7 generates opposite vibrations according to the instructions.

[0056] At the same time, six groups of mutually parallel straight flexible beams 6 are used to guide the actuator 7 to perform translational actuation to apply load to the intermediate rigid body 4, and then the intermediate rigid body 4 can actively control the tiny vibrations generated by the payload platform 1 to each No. 1 folding flexible beam 2 and each No. 2 folding flexible beam 3, thereby offsetting the original vibrations received by the payload platform 1 and achieving the purpose of vibration reduction.

[0057] Moreover, the present application can select different types of actuators 7 according to the vibration isolation frequency band of the vibration reduction object, which is highly practical and reliable and can meet various usage requirements. When the vibration applied to the payload platform 1 is a high-frequency vibration, a flat-plate voice coil motor is used for active control, and the flat-plate voice coil motor has a relatively good active control effect on the high-frequency vibration; when the vibration applied to the payload platform 1 is a low-frequency vibration, a piezoelectric stack and a piezoelectric sheet are used for active control, and the piezoelectric stack and the piezoelectric sheet have a relatively good active control effect on the low-frequency vibration.

[0058] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments, and the above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, and these changes and improvements all fall within the scope of the present invention to be protected.

Claims

1. A six-degree-of-freedom flexible parallel active vibration isolation platform, comprising a payload platform (1), a first decoupling actuating leg, a second decoupling actuating leg, an actuator (7) and a lower platform (8), characterized in that: The lower platform (8) is arranged directly below the effective load platform (1), and the three No. 1 decoupling actuating legs are evenly distributed and laterally fixedly arranged on the side wall of the effective load platform (1), and the ends of the No. 1 decoupling actuating legs are respectively fixedly connected to the corresponding positions of the lower platform (8); the three No. 2 decoupling actuating legs are evenly distributed and laterally fixedly arranged on the side wall of the effective load platform (1), and the No. 1 decoupling actuating legs and the No. 2 decoupling actuating legs are spaced apart, and the ends of the No. 2 decoupling actuating legs are respectively fixedly connected to the corresponding positions of the lower platform (8); the actuator (7) is installed on both the No. 1 decoupling actuating leg and the No. 2 decoupling actuating leg.

2. A six-degree-of-freedom flexible parallel active vibration isolation platform according to claim 1, characterized in that: The decoupled actuating leg No. 1 comprises: a folding flexible beam No. 1 (2), an intermediate rigid body (4), a fixed rigid body (5) and a straight flexible beam (6); one end of the folding flexible beam No. 1 (2) is fixedly connected to the side wall of the payload platform (1); the other end of the folding flexible beam No. 1 (2) is laterally fixedly provided with the intermediate rigid body (4); the straight flexible beam (6) is laterally provided at both ends of the intermediate rigid body (4); a fixed rigid body (5) is vertically provided between the ends of the straight flexible beam (6); and the fixed rigid bodies (5) are respectively fixedly connected to corresponding positions of the lower platform (8).

3. The six-degree-of-freedom flexible parallel active vibration isolation platform according to claim 2, characterized in that: The No. 2 decoupling actuating support leg comprises: a No. 2 folding flexible beam (3), an intermediate rigid body (4) and a straight flexible beam (6); one end of the No. 2 folding flexible beam (3) is fixedly connected to the side wall of the payload platform (1); the other end of the No. 2 folding flexible beam (3) is transversely fixedly provided with the intermediate rigid body (4); both ends of the intermediate rigid body (4) are transversely provided with straight flexible beams (6); the ends of the straight flexible beams (6) are respectively fixedly connected to corresponding positions of the lower platform (8).

4. The six-degree-of-freedom flexible parallel active vibration isolation platform according to claim 3, characterized in that: The actuator (7) is one of a flat voice coil motor, a piezoelectric stack or a piezoelectric sheet.

5. The six-degree-of-freedom flexible parallel active vibration isolation platform according to claim 4, characterized in that: The actuator (7) is the piezoelectric sheet, two of the piezoelectric sheets form a group, and one of the piezoelectric sheets is respectively mounted on the outer wall of the straight flexible beam (6) at both ends of the intermediate rigid body (4) in a relative manner.

6. The six-degree-of-freedom flexible parallel active vibration isolation platform according to claim 4, characterized in that: The actuator (7) is the flat-plate voice coil motor or the piezoelectric stack, and the flat-plate voice coil motor or the piezoelectric stack is arranged between the straight flexible beams (6) at both ends of the intermediate rigid body (4).

7. The six-degree-of-freedom flexible parallel active vibration isolation platform according to claim 6, characterized in that: The intermediate rigid body (4) and the fixed rigid body (5) on the first decoupling actuating leg are respectively transversely fixedly provided with actuator connecting parts (9), and the two ends of the flat-plate voice coil motor or the piezoelectric stack are respectively fixedly connected to one of the actuator connecting parts (9); the intermediate rigid body (4) and the lower platform (8) on the second decoupling actuating leg are respectively transversely fixedly provided with actuator connecting parts (9) at corresponding positions, and the two ends of the flat-plate voice coil motor or the piezoelectric stack are respectively fixedly connected to one of the actuator connecting parts (9).

8. The six-degree-of-freedom flexible parallel active vibration isolation platform according to claim 1, characterized in that: It also includes a sensor and a controller, wherein the sensor is mounted on the payload platform (1), the sensor is electrically connected to the controller, and the controller is electrically connected to the actuator (7).

9. The six-degree-of-freedom flexible parallel active vibration isolation platform according to claim 1, characterized in that: The material of the payload platform (1), the first decoupling actuating leg, the second decoupling actuating leg and the lower platform (8) are all 7075 aluminum alloy.

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