A pneumatic clamp for track-type film transfer of semiconductor packaging equipment

Abstract

The present invention relates to the field of clamping equipment, and in particular to a track-type pneumatic clamping device for semiconductor packaging equipment. The invention comprises a slide rail and a pneumatic clamping body, wherein a plurality of pneumatic clamping bodies are provided, and the plurality of pneumatic clamping bodies are arranged at linear intervals, and a plurality of sliding seats are provided on the slide rail, and the plurality of pneumatic clamping bodies are respectively mounted on the plurality of sliding seats, and the pneumatic clamping bodies are clamped and driven by a pneumatic driver to clamp a target. The output force of the pneumatic driver depends on the piston area and the pressure of the compressed gas, and has nothing to do with the stroke. Therefore, the pneumatic clamping body designed by utilizing the characteristics of the cylinder solves the problem of attenuation of the clamping force of the electromagnet due to different strokes of the clamping jaws being opened, and there is no defect of heat generation, aging and damage of the electromagnet coil due to long-term power-on. By integrating the cylinder structure with the clamping jaw, the structure is relatively flat, simple and can save more space.

Description

Technical Field

[0001] The invention relates to the field of clamping claw equipment, in particular to a track-transferring pneumatic clamping claw for semiconductor packaging equipment. Background Art

[0002] At present, the track-type film clamps used to clamp lead frame sheets on the market are mainly electromagnet-type. Due to the physical characteristics of electromagnets, the electromagnet-type track-type film clamps have the following defects:

[0003] 1. When the lead frame sheet is running in the sheet track, the lead frame sheet needs to be clamped by the electromagnet clamp for a long time. The long-term power supply of the electromagnet will cause the coil to heat up and easily cause the coil to age and damage.

[0004] 2. The clamping force output by the electromagnetic clamp varies greatly when the clamp is opened at different strokes. The clamping force output is the largest only when the magnetic plate is in contact with the electromagnet core. When the magnetic plate is separated from the electromagnet core, the clamping force will decay sharply. Summary of the invention

[0005] Based on this, it is necessary to provide a track-type pneumatic clamp for semiconductor packaging equipment to address the above-mentioned technical problems. The output force of the pneumatic driver depends on the piston area and the pressure of the compressed gas, and has nothing to do with the stroke. Therefore, the pneumatic clamp body designed using the characteristics of the cylinder solves the problem of attenuation of the clamping force of the electromagnet due to different strokes of the clamp opening, and there is no defect of heat, aging and damage caused by long-term power-on of the electromagnet coil.

[0006] The present invention provides a track-transfer pneumatic clamp for semiconductor packaging equipment, comprising a slide rail and a pneumatic clamp body, wherein a plurality of pneumatic clamp bodies are provided, and the plurality of pneumatic clamp bodies are linearly spaced, a plurality of sliding seats are provided on the slide rail, and the plurality of pneumatic clamp bodies are respectively mounted on the plurality of sliding seats, and the pneumatic clamp bodies are clamped and driven by a pneumatic driver to clamp a target.

[0007] In one embodiment, the clamp body includes a clamp seat, a lower clamp, an upper clamp, a second air pipe and an upper clamp; the rear end of the upper clamp is hinged at the rear end of the clamp seat, the upper clamp is installed at the front end of the upper clamp, and the lower clamp is installed at the front end of the clamp seat. The pneumatic driver is installed in the clamp seat, and the pneumatic driver is hinged to the upper clamp for pushing the upper clamp to rotate, thereby adjusting the opening size between the upper clamp and the lower clamp. The second air pipe is arranged on both sides of the clamp seat and is connected to the pneumatic driver for supplying air to the pneumatic driver.

[0008] In one embodiment, a wiring sheet metal is installed at the rear end of the clamping jaw seat, and a plurality of cable tie seats and a plurality of small wire ties are installed on the upper surface of the wiring sheet metal. The cable tie seat is located on the side of the upper surface of the wiring sheet metal away from the clamping jaw seat, and the small wire ties are located on the side of the upper surface of the wiring sheet metal close to the clamping jaw seat.

[0009] In one embodiment, the clamping jaw seat includes a folding frame, a first fixed block, a second fixed block and a third fixed block; one end of the folding frame is bent upward and connected to the wiring sheet metal, and the other end of the folding frame is tilted downward for installing the lower clamp, and two of the first fixed block and the second fixed block are provided, the first fixed block is located on one side of the upper surface of the folding frame close to the wiring sheet metal, the second fixed block is located on the other side and connected to the first fixed block, the third fixed block is located between the two second fixed blocks, and a first mounting hole is horizontally opened on the first fixed block.

[0010] In one embodiment, the upper clamp includes a hinged portion, an abutment portion and a connecting portion connected in sequence; the hinged portion is clamped between the two first fixed blocks and is rotatably installed in the first mounting hole through a rotating rod, the abutment portion is located between the two second fixed blocks, the connecting portion is located on the side of the abutment portion away from the hinged portion, and the lower surface of the connecting portion is used to install the upper clamp.

[0011] In one embodiment, a mounting opening is provided on the folding frame, the pneumatic driver is arranged in the mounting opening, and the driving end of the pneumatic driver is connected to the lower surface of the abutting portion for pushing the abutting portion to move.

[0012] In one embodiment, side mounting channels are opened on both sides of the folding frame, and the mounting opening includes a third mounting hole, a fourth mounting hole and a fifth mounting hole; the third mounting hole passes through the upper surface and the lower surface of the folding frame, the fourth mounting hole is cross-arranged with the third mounting hole, and both ends of the fourth mounting hole respectively pass through both sides of the folding frame and are connected to the side mounting channels, and the fifth mounting hole is opened on the lower surface of the folding frame and partially overlaps with the third mounting hole.

[0013] In one embodiment, the pneumatic driver includes a cylinder piston, a piston pull rod and a cylinder end cover; the cylinder piston is arranged in the third mounting hole, the piston pull rod is rotatably mounted on the abutment portion and connected to the cylinder piston, and the cylinder end cover is arranged in the fifth mounting hole.

[0014] In one embodiment, an air pipe is provided in the side mounting tube, a mounting tube is installed in the fourth mounting hole, the mounting tube is communicated with the air pipe, and the fourth mounting hole is communicated with the air supply end of the cylinder piston.

[0015] In one embodiment, a rear installation channel is vertically opened on the surface of the folding frame on which the wiring sheet metal is installed, and the air pipe is located between the rear installation channel and the wiring sheet metal. A linear motor mover and a reader encoder are also provided under the wiring sheet metal to drive the pneumatic clamp body to move on the sliding seat of the slide rail.

[0016] The track-type pneumatic clamp of the semiconductor packaging equipment mentioned above, when in use, installs the pneumatic clamp body on the sliding seat of the slide rail. According to needs, multiple pneumatic clamp bodies can be expanded and installed on one slide rail to meet actual needs. When clamping the target, the pneumatic clamp body is driven by the sliding seat of the slide rail to move to the side of the target, and then the pneumatic driver is started and pushes the upper half structure of the pneumatic clamp body to change the opening size of the pneumatic clamp body. After the air supply is stopped, the opening shrinks, thereby clamping the target. The output force of the pneumatic driver depends on the piston area and the pressure of the compressed air, and has nothing to do with the stroke. Therefore, the pneumatic clamp body designed using the characteristics of the cylinder solves the problem of attenuation of the clamping force of the electromagnet due to different strokes of the clamp opening, and there is no defect of heat, aging and damage of the electromagnet coil due to long-term power-on. By integrating the cylinder structure with the clamp, the structure is relatively flat, simple and can save more space. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0018] Figure 1 A schematic diagram of the overall structure of the track-transfer pneumatic clamp provided by the present invention;

[0019] Figure 2 A schematic diagram of the three-dimensional structure of the pneumatic clamp body provided by the present invention;

[0020] Figure 3 A schematic diagram of the three-dimensional structure of the clamping jaw seat provided by the present invention;

[0021] Figure 4 A schematic cross-sectional structure diagram of the clamping jaw seat provided by the present invention;

[0022] Figure 5 A schematic diagram of the structure of the pneumatic actuator provided by the present invention;

[0023] Figure 6 This is a schematic cross-sectional structure diagram of the pneumatic clamp body provided by the present invention.

[0024] Reference numerals:

[0025] 100, slide rail; 200, pneumatic clamp body; 210, clamp seat; 211, folding frame; 212, first fixed block; 213, second fixed block; 214, third fixed block; 215, first mounting hole; 217, mounting opening; 2171, third mounting hole; 2172, fourth mounting hole; 2173, fifth mounting hole; 218, side mounting channel; 219, rear mounting channel; 220, lower clamp; 230, upper clamp; 231, hinged part; 232, abutment part; 233, connecting part; 234, rotating rod; 240, pneumatic driver; 241, cylinder piston; 242, piston pull rod; 243, cylinder end cover; 244, air pipe; 245, mounting pipe; 250, wiring sheet metal; 260, upper clamp. DETAILED DESCRIPTION

[0026] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0027] Combine the following Figures 1 to 6 The invention describes a track-type pneumatic clamp for semiconductor packaging equipment.

[0028] In one embodiment, a track-type pneumatic clamp for semiconductor packaging equipment includes a slide rail 100 and a pneumatic clamp body 200. A plurality of pneumatic clamp bodies 200 are provided, and the plurality of pneumatic clamp bodies 200 are linearly spaced. A plurality of sliding seats are provided on the slide rail 100, and the plurality of pneumatic clamp bodies 200 are respectively mounted on the plurality of sliding seats. The pneumatic clamp body 200 is clamped and driven by a pneumatic driver 240 to clamp a target.

[0029] Specifically, when in use, the pneumatic clamp body 200 is installed on the sliding seat of the slide rail 100. According to needs, multiple pneumatic clamp bodies 200 can be installed on one slide rail 100 to meet actual needs. When clamping the target, the pneumatic clamp body 200 is driven by the sliding seat of the slide rail 100 to move to the side of the target, and then the pneumatic driver 240 is started and pushes the upper half structure of the pneumatic clamp body 200 to change the opening size of the pneumatic clamp body 200. After the air supply is stopped, the opening shrinks, thereby clamping the target.

[0030] The track-transfer pneumatic clamp of the semiconductor packaging equipment mentioned above, when in use, installs the pneumatic clamp body 200 on the sliding seat of the slide rail 100. According to needs, multiple pneumatic clamp bodies 200 can be expanded and installed on one slide rail 100 to meet actual needs. When clamping the target, the pneumatic clamp body 200 is driven by the sliding seat of the slide rail 100 to move to the side of the target, and then the pneumatic driver 240 is started and pushes the upper half structure of the pneumatic clamp body 200 to change the opening size of the pneumatic clamp body 200. After the air supply is stopped, the opening shrinks, thereby clamping the target. The output force of the pneumatic driver 240 depends on the piston area and the pressure of the compressed air, and has nothing to do with the stroke. Therefore, the pneumatic clamp body 200 designed using the characteristics of the cylinder solves the problem of attenuation of the clamping force of the electromagnet due to different strokes of the clamp opening, and there is no defect of long-term power-on heating, aging and damage of the electromagnet coil. By integrating the cylinder structure with the clamp, the structure is relatively flat, simple and can save more space.

[0031] In one embodiment, the clamp body includes a clamp seat 210, a lower clamp 220, an upper clamp plate 230, a second air pipe 244 and an upper clamp plate 260; the rear end of the upper clamp plate 230 is hinged to the rear end of the clamp seat 210, the upper clamp plate 260 is installed at the front end of the upper clamp plate 230, and the lower clamp plate 220 is installed at the front end of the clamp seat 210. The pneumatic driver 240 is installed in the clamp seat 210, and the pneumatic driver 240 is hinged to the upper clamp plate 230, which is used to push the upper clamp plate 230 to rotate, thereby adjusting the opening size between the upper clamp plate 260 and the lower clamp plate 220. The second air pipe 244 is arranged on both sides of the clamp seat 210 and is connected to the pneumatic driver 240, which is used to supply air to the pneumatic driver 240.

[0032] Specifically, a wiring sheet metal 250 is installed at the rear end of the clamping jaw seat 210, and multiple cable tie seats and multiple small wire ties are installed on the upper surface of the wiring sheet metal 250. The cable tie seat is located on the side of the upper surface of the wiring sheet metal 250 away from the clamping jaw seat 210, and the small wire ties are located on the side of the upper surface of the wiring sheet metal 250 close to the clamping jaw seat 210.

[0033] Furthermore, the clamping jaw seat 210 includes a folding frame 211, a first fixed block 212, a second fixed block 213 and a third fixed block 214; one end of the folding frame 211 is bent upward and connected to the wiring sheet metal 250, and the other end of the folding frame 211 is tilted downward for installing the lower clamp 220. Two first fixed blocks 212 and two second fixed blocks 213 are provided. The first fixed block 212 is located on one side of the upper surface of the folding frame 211 close to the wiring sheet metal 250, and the second fixed block 213 is located on the other side and connected to the first fixed block 212. The third fixed block 214 is located between the two second fixed blocks 213, and a first mounting hole 215 is horizontally opened on the first fixed block 212.

[0034] In one embodiment, the upper clamp 230 includes a hinged portion 231, an abutment portion 232 and a connecting portion 233 connected in sequence; the hinged portion 231 is clamped between the two first fixed blocks 212, and is rotatably installed in the first mounting hole 215 through a rotating rod 234, the abutment portion 232 is located between the two second fixed blocks 213, and the connecting portion 233 is located on the side of the abutment portion 232 away from the hinged portion 231, and the lower surface of the connecting portion 233 is used to install the upper clamp 260.

[0035] Specifically, the pneumatic clamp body 200 in this embodiment has a simple and compact structure, reliable operation, long service life, stable clamping force output, and relatively low requirements on motion control software and hardware.

[0036] In one embodiment, a mounting opening 217 is provided on the folding frame 211 , and a pneumatic driver 240 is disposed in the mounting opening 217 . A driving end of the pneumatic driver 240 is connected to a lower surface of the abutting portion 232 to push the abutting portion 232 to move.

[0037] In one embodiment, side mounting channels 218 are provided on both sides of the folding frame 211, and the mounting opening 217 includes a third mounting hole 2171, a fourth mounting hole 2172 and a fifth mounting hole 2173; the third mounting hole 2171 passes through the upper surface and the lower surface of the folding frame 211, the fourth mounting hole 2172 is cross-arranged with the third mounting hole 2171, and the two ends of the fourth mounting hole 2172 respectively pass through the two sides of the folding frame 211 and are connected to the side mounting channels 218, and the fifth mounting hole 2173 is provided on the lower surface of the folding frame 211 and partially overlaps with the third mounting hole 2171.

[0038] Specifically, the pneumatic driver 240 includes a cylinder piston 241, a piston pull rod 242 and a cylinder end cover 243; the cylinder piston 241 is arranged in the third mounting hole 2171, the piston pull rod 242 is rotatably mounted on the abutment portion 232 and connected to the cylinder piston 241, and the cylinder end cover 243 is arranged in the fifth mounting hole 2173.

[0039] In one embodiment, an air pipe 244 is disposed in the side mounting tube 245 , a mounting tube 245 is installed in the fourth mounting hole 2172 , the mounting tube 245 is communicated with the air pipe 244 , and the fourth mounting hole 2172 is communicated with the air supply end of the cylinder piston 241 .

[0040] Specifically, the two air pipes 244 of the pneumatic clamp body 200 are respectively connected to the normally closed output port and the normally open output port of the electromagnetic valve, and the electromagnetic valve can be operated by software to make the two air pipes 244 alternately open and close, and the compressed gas can realize the opening and closing of the clamp, so as to realize the clamping and releasing action of the lead frame.

[0041] In one embodiment, a rear installation channel 219 is vertically opened on one side of the folding frame 211 on which the wiring sheet metal 250 is installed, and the air pipe 244 is located between the rear installation channel 219 and the wiring sheet metal 250. A linear motor mover and a reader encoder are also provided under the wiring sheet metal 250 to drive the pneumatic clamp body 200 to move on the sliding seat of the slide rail 100.

[0042] Specifically, a plurality of pneumatic clamp bodies 200 are installed on the sliding seat of the slide rail 100 and driven by a linear motor mover, clamping the lead frame in the track of the film-passing mechanism and moving it, so that the lead frame can freely move to the corresponding process position in the film-passing track. The linear motor mover on the pneumatic clamp body 200 cooperates with the external linear motor stator magnet to drive the pneumatic clamp body 200 to reciprocate on the slide rail 100; the loosening and clamping of the clamp realizes the movement of the lead frame in the film-passing track and the function of handing over the lead frame between the two clamps.

[0043] In one embodiment, the interior of the clamping jaw seat 210 is hollow and has the same structure as the internal structure of the cylinder. Therefore, the clamping jaw seat 210 in this embodiment can also be called a cylinder body. A piston rod sealing ring is arranged in the sealing groove of the cylinder body, and an O-ring is arranged between the cylinder end cover 243 and the cylinder piston 241.

[0044] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0045] The above-mentioned embodiments only express several implementation methods of the present invention, and the description thereof is relatively specific and detailed, but it cannot be understood as limiting the scope of the patent of the present invention. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the present invention, which all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be subject to the attached claims.

Claims

1. A pneumatic clamp for track-transfer film of semiconductor packaging equipment, characterized in that: It comprises a slide rail and a pneumatic clamp body, wherein a plurality of pneumatic clamp bodies are provided, and the plurality of pneumatic clamp bodies are arranged at linear intervals, a plurality of sliding seats are provided on the slide rail, and the plurality of pneumatic clamp bodies are respectively mounted on the plurality of sliding seats, and the pneumatic clamp body is clamped and driven by a pneumatic driver to clamp a target; when clamping a target, the pneumatic clamp body is driven by the sliding seat of the slide rail to move to one side of the target, and then the pneumatic driver is started and pushes the upper half structure of the pneumatic clamp body to change the opening size of the pneumatic clamp body, and after the air supply is stopped, the opening is reduced, thereby clamping the target; The clamp body comprises a clamp seat, a lower clamp, an upper clamp, an air pipe and an upper clamp; the tail end of the upper clamp is hinged to the tail end of the clamp seat, the head end of the upper clamp is mounted with the upper clamp, the head end of the clamp seat is mounted with the lower clamp, the pneumatic driver is mounted in the clamp seat, and the pneumatic driver is hinged with the upper clamp for driving the upper clamp to rotate, so as to adjust the size of the opening between the upper clamp and the lower clamp, the air pipe is arranged on both sides of the clamp seat, and is connected with the pneumatic driver for conveying air to the pneumatic driver; A wiring sheet metal is installed at the tail end of the clamping claw seat, and a plurality of cable tie seats and a plurality of small cable ties are installed on the upper surface of the wiring sheet metal. The cable tie seat is located on a side of the upper surface of the wiring sheet metal away from the clamping claw seat, and the small cable ties are located on a side of the upper surface of the wiring sheet metal close to the clamping claw seat; The clamping claw seat includes a folding frame, a first fixing block, a second fixing block and a third fixing block; one end of the folding frame is bent upward and connected to the wiring sheet metal, and the other end of the folding frame is tilted downward for mounting the lower clamping piece, and two of the first fixing block and the second fixing block are provided, the first fixing block is located on one side of the upper surface of the folding frame close to the wiring sheet metal, the second fixing block is located on the other side and connected to the first fixing block, the third fixing block is located between the two second fixing blocks, and a first mounting hole is horizontally opened on the first fixing block; The upper clamping plate comprises a hinged portion, an abutting portion and a connecting portion connected in sequence; the hinged portion is clamped between the two first fixing blocks and is rotatably installed in the first mounting hole through a rotating rod, the abutting portion is located between the two second fixing blocks, the connecting portion is located on a side of the abutting portion away from the hinged portion, and the lower surface of the connecting portion is used for installing the upper clamping piece; The folding frame is provided with a mounting opening, the pneumatic driver is arranged in the mounting opening, and the driving end of the pneumatic driver is connected to the lower surface of the abutting part for pushing the abutting part to move.

2. The track-type pneumatic clamp for semiconductor packaging equipment according to claim 1, characterized in that: Side mounting channels are provided on both sides of the folding frame, and the mounting opening includes a third mounting hole, a fourth mounting hole and a fifth mounting hole; the third mounting hole passes through the upper surface and the lower surface of the folding frame, the fourth mounting hole is cross-arranged with the third mounting hole, and both ends of the fourth mounting hole respectively pass through both sides of the folding frame and are connected to the side mounting channels, and the fifth mounting hole is provided on the lower surface of the folding frame and partially overlaps with the third mounting hole.

3. The track-type pneumatic clamp for semiconductor packaging equipment according to claim 2, characterized in that: The pneumatic driver includes a cylinder piston, a piston pull rod and a cylinder end cover; the cylinder piston is arranged in the third mounting hole, the piston pull rod is rotatably mounted on the abutment portion and connected to the cylinder piston, and the cylinder end cover is arranged in the fifth mounting hole.

4. The track-type pneumatic clamp for semiconductor packaging equipment according to claim 3, characterized in that: A mounting tube is installed in the fourth mounting hole, the mounting tube is communicated with the air pipe, and the fourth mounting hole is communicated with the air supply end of the cylinder piston.

5. The track-type pneumatic clamp for semiconductor packaging equipment according to claim 4, characterized in that: A rear installation channel is vertically opened on one side of the folding frame where the wiring sheet metal is installed, and the air pipe is located between the rear installation channel and the wiring sheet metal. A linear motor mover and a reader encoder are also provided under the wiring sheet metal to drive the pneumatic clamp body to move on the sliding seat of the slide rail.

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