Spraying device and degumming machine

Abstract

The invention provides a spraying device and a degumming machine, and belongs to the field of silicon wafer processing, the spraying device comprises a spraying box body, a cover plate assembly, an inner support frame group, a pollution discharge assembly and a spraying assembly, the cover plate assembly is transversely arranged at the top of the spraying box body in a sliding control manner, and the spraying assembly is arranged in the spraying box body and close to two longitudinal side walls; the upper part, the middle part and the lower part of the silicon wafer material basket and the inner side wall of the spraying box body are sprayed and cleaned, and the spraying angles corresponding to the upper part, the middle part and the lower part are different. The spraying device is provided with the transversely sliding cover plate, the three sets of spraying pipe assemblies have different spraying angles, the spraying effect is optimized, occupied space and spraying liquid are saved, and the spraying device is convenient to apply and popularize in the fields of silicon wafer degumming, silicon wafer cleaning and the like in the semiconductor and photovoltaic industry.

Description

Technical Field

[0001] The invention relates to the field of silicon wafer processing or cleaning, and in particular to a spray device and a degumming machine. Background Art

[0002] In the process of silicon wafer preparation, the spray tank is an important mechanism. The single-layer silicon wafer is sliced ​​from the cut whole silicon rod or silicon ingot through heating degumming treatment. The single or single-layer silicon wafer is removed from the material holder to complete the degumming of the silicon wafer. Before degumming the single crystal silicon wafer, it needs to be cleaned in the spray tank to rinse off the silicon mud and silicon powder on the single silicon wafer. Manual washing is not only inefficient, but also has poor washing effect and high labor intensity for workers.

[0003] The existing spray tank has a single structure and usually has the following problems:

[0004] The opening and closing direction of the top trough cover of the spray trough is the same as that of the silicon wafer basket. The excessive longitudinal dimension causes the overall longitudinal space of the equipment to be too large, which is not conducive to the integrated design of multiple devices.

[0005] The spray pipe in the spray tank has a single control. The spray requirements of the upper, middle and lower parts of the entire silicon wafer basket are different, but the existing spray tank is not designed to meet the needs of each part, resulting in excessive total amount of spray liquid, too long spray time or poor spray cleaning effect. Summary of the invention

[0006] In order to overcome the deficiencies of the prior art, the object of the present invention is to provide a spraying device and a degumming machine, which can solve the above-mentioned problems.

[0007] Design plan: 1. The top cover of the spray tank adopts a horizontal design to reduce the space occupied by the device in the vertical direction; 2. The spray pipes in the spray tank have different spray designs corresponding to the upper, middle and lower parts of the silicon wafer basket.

[0008] A spray device comprises a spray box, a cover plate assembly, an inner support frame group, a sewage discharge assembly and a spray assembly, wherein the top of the spray box is open, and the cover plate assembly is arranged on the top of the spray box for horizontal sliding control; the inner support frame group is arranged in the spray box for supporting a longitudinally arranged silicon wafer basket; the sewage discharge assembly is arranged at the bottom of the spray box; the part of the spray assembly arranged in the spray box and close to the two longitudinal side walls sprays and cleans the upper, middle and lower parts of the silicon wafer basket and the inner wall of the spray box, and the spray angles corresponding to the upper, middle and lower parts are different.

[0009] Furthermore, the cover assembly includes a cover frame, a cover body and a cover drive assembly. The cover frame is composed of a plurality of groove rails with inner guide grooves. The cover body is laterally driven by the cover drive assembly to move horizontally in the inner guide grooves of the groove rails.

[0010] Furthermore, the cover plate driving assembly includes a transverse driver, a cover plate adapter and a transverse position sensor, the transverse driver is installed on the cover plate frame or the spray box body, and the cover plate adapter and the transverse position sensor are installed on the cover plate body.

[0011] Furthermore, a transverse guide assembly is provided at the two transversely arranged groove rails, the fixed end of the transverse guide assembly is fixedly connected to the cover plate body, and the guide portion abuts against the two groove rails.

[0012] Furthermore, the inner support frame group includes a longitudinal frame and a plurality of groove bottom guides, the longitudinal ends of the longitudinal frame are connected to the inner wall of the spray box, the bottom of the longitudinal frame is suspended, and the groove bottom guides are arranged on the bottom rod of the longitudinal frame.

[0013] Furthermore, the sewage discharge assembly includes a sewage trough, a sewage filter assembly and a sewage pipe group, wherein the sewage trough is formed by processing the bottom plate of the spray box body, the sewage filter assembly is covered on the sewage trough from the inner side of the spray box body, and the sewage pipe group is connected to the sewage trough from the outer side of the bottom of the spray box body.

[0014] Furthermore, the spray assembly includes an upper nozzle group, a middle nozzle group, a lower nozzle group and a spray drive assembly; wherein, the upper nozzle group sprays at a partial angle by swinging, the middle nozzle group sprays by rotating at 120°, 180° or 360°, and the lower nozzle group sprays at a fixed angle, and the spray drive assembly is used to drive the upper nozzle group, or the upper nozzle group and the middle nozzle group to move at a set angle.

[0015] Furthermore, the spray drive assembly includes a spray driver, a driver rod, a rotary drive rod, a transmission rod and a spray drive end seat, and the end of the nozzle to be driven extends out of the spray box and is supported by the spray drive end seat; both ends of the spray driver are movably connected with the driver rod, the end of the driver rod is movably hinged with one end of the rotary drive rod, the other end of the rotary drive rod is connected to the movable end of the transmission rod, and the fixed end of the transmission rod is fixedly connected to the end of the nozzle to be driven.

[0016] The present invention also provides a degumming machine, comprising a spraying device, a degumming device, a rinsing device, a degumming work line and a loading cart, wherein the loading cart and the spraying device are arranged at the loading end flow line of the degumming work line, and the degumming device and the rinsing device are arranged at the downstream flow line of the spraying device; a medicine adding box is also arranged at the degumming device.

[0017] Compared with the prior art, the beneficial effects of the present invention are: the spray device has a laterally sliding cover plate, and the three groups of nozzle assemblies have different spray angles, which optimize the spray effect, can not only clean the product but also clean the tank body, save space and spray liquid, and is convenient for promotion and application in the fields of degumming and cleaning of silicon wafers in the semiconductor and photovoltaic industries. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural schematic diagram of the spray device of the present invention;

[0019] Figure 2 is a schematic diagram of an inner support frame assembly;

[0020] Figure 3 It is a partial structural schematic diagram of the spray device;

[0021] Figure 4 A schematic diagram of the bottom plate of a spray box with a sewage tank;

[0022] Figure 5 is a schematic diagram of a spray drive assembly;

[0023] Figure 6 This is a schematic diagram of a degumming machine.

[0024] In the figure,

[0025] 1. Spray box;

[0026] 2. Cover assembly; 21. Groove rail; 22. Cover body; 23. Cover drive assembly; 231. Transverse drive; 232. Cover adapter; 233. Transverse in-position sensor; 24. Transverse guide assembly;

[0027] 3. Inner support frame assembly; 31. Longitudinal frame; 32. Groove bottom guide;

[0028] 4. Sewage discharge assembly; 41. Sewage discharge tank; 42. Sewage discharge filter assembly; 43. Sewage discharge pipe assembly;

[0029] 5. Spray assembly; 51. Upper spray pipe assembly; 52. Middle spray pipe assembly; 53. Lower spray pipe assembly; 54. Spray drive assembly; 541. Spray drive; 542. Drive rod; 543. Rotary drive rod; 544. Transmission rod; 545. Spray drive end seat;

[0030] 100. Spraying device;

[0031] 200, degumming device; 210, medicine adding box;

[0032] 300, rinsing device;

[0033] 400, degumming workflow;

[0034] 500. Loading car. DETAILED DESCRIPTION

[0035] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0036] A spraying device, see Figure 1-Figure 5 The spray device includes a spray box body 1, a cover plate assembly 2, an inner support frame assembly 3, a sewage discharge assembly 4 and a spray assembly 5.

[0037] Layout relationship: the top of the spray box 1 is open, and the cover assembly 2 is arranged on the top of the spray box 1 with a horizontal sliding control; the inner support frame group 3 is arranged in the spray box 1, and is used to support the longitudinally arranged silicon wafer basket; the sewage discharge assembly 4 is arranged at the bottom of the spray box 1; the spray assembly 5 is arranged in the spray box 1 and close to the two longitudinal side walls, and sprays and cleans the upper, middle and lower parts of the silicon wafer basket and the inner wall of the spray box 1, and the spray angles corresponding to the upper, middle and lower parts are different.

[0038] The cover assembly 2 includes a cover frame, a cover body 22 and a cover drive assembly 23. The cover frame is composed of a plurality of groove rails 21 with inner guide grooves. The cover body 22 is laterally driven by the cover drive assembly to move horizontally in the inner guide grooves of the groove rails 21.

[0039] Furthermore, the cover driving assembly 23 includes a transverse driver 231, a cover adapter 232 and a transverse in-position sensor 233, the transverse driver 231 is installed on the cover frame or the spray box body 1, and the cover adapter 232 and the transverse in-position sensor 233 are installed on the cover body 22.

[0040] In a specific example, the transverse driver 231 adopts a cylinder, a hydraulic cylinder, an electric cylinder, etc., and the cylinder body is installed on the outer side of the cover frame or the outer wall of the spray box 1; the end of the piston rod is transferred to the cover body 22 through the cover adapter 232.

[0041] In one example, the transverse driver 231 is installed on two transversely arranged groove rails 21, and the piston rod is arranged in the same direction as the transverse movement direction of the cover plate body 22. In another example, not shown in the figure, the transverse driver 231 is installed on a longitudinal side wall of the outer wall of the spray box body 1, and is arranged obliquely or horizontally. In the case of the oblique arrangement, the cover plate body 22 is driven to move horizontally through the direction-changing drive assembly.

[0042] The cover plate adapter 232 can be in the form of an L-shaped or [-shaped buckle plate, etc., and is connected to a floating adapter at the end of a piston rod.

[0043] The lateral arrival sensor 233 is a photoelectric switch, a proximity switch, a micro switch, a distance measuring sensor, etc.

[0044] A transverse guide assembly 24 is provided at two transversely arranged groove rails 21 , a fixed end of the transverse guide assembly 24 is fixedly connected to the cover plate body 22 , and a guide portion abuts against the two groove rails 21 .

[0045] In a specific example, the lateral movement guide assembly 24 adopts a U-shaped roller assembly, the base of which is fixedly connected to the top surface of the cover plate body 22, and the U-shaped wheel of the U-shaped roller assembly is used as a guide portion to abut against the top rails of the two groove rails 21. The lateral movement of the cover plate body 22 is more stable through the lateral movement guide assembly 24.

[0046] A round steel is respectively arranged on the top of the two transversely arranged groove rails 21 as a top rail to cooperate with the U-shaped roller assembly.

[0047] Of course, the transverse guide assembly 24 can also be changed to other forms, such as setting rollers, guide bearings, etc. as guide parts at the two longitudinal ends of the cover body 22, and embedding them into the inner guide groove of the groove rail 21. The upper and lower surfaces of the inner guide groove roll against the outer surface of the guide part to play a guiding and supporting role.

[0048] Among them, the inner support frame group 3 includes a longitudinal frame 31 and a plurality of groove bottom guides 32, the longitudinal end of the longitudinal frame 31 is connected to the inner wall surface of the spray box 1, the bottom of the longitudinal frame 31 is suspended, and the groove bottom guides 32 are arranged on the bottom rod of the longitudinal frame 31.

[0049] The reason why the bottom of the longitudinal frame 31 is suspended is to facilitate the sewage to be discharged from the bottom, and there is a sewage discharge space. The function of the bottom guide 32 of the trough is to facilitate the bottom guidance and positioning of the silicon chip basket, so as to achieve effective support and protection of the silicon chip basket.

[0050] Among them, the sewage discharge component 4 includes a sewage trough 41, a sewage filter assembly 42 and a sewage pipe group 43, wherein the sewage trough 41 is formed by processing the bottom plate of the spray box body 1, the sewage filter assembly 42 is covered on the sewage trough 41 from the inner side of the spray box body 1, and the sewage pipe group 43 is connected to the sewage trough 41 from the outer side of the bottom of the spray box body 1.

[0051] In a specific example, the sewage pipe group 43 includes a pipe joint, an elbow, a flange, etc., which are not specifically limited here.

[0052] Among them, the spray assembly 5 includes an upper nozzle group 51, a middle nozzle group 52, a lower nozzle group 53 and a spray drive assembly 54; wherein the upper nozzle group 51 is a partial angle swing spray, the middle nozzle group 52 is a 120°, 180° or 360° rotation spray, preferably 120°, the lower nozzle group 53 is a fixed angle spray, and the spray drive assembly 54 is used to drive the upper nozzle group 51, or the upper nozzle group 51 and the middle nozzle group 52 to move at a set angle.

[0053] In one example, a nozzle assembly is set on the upper spray pipe group 51 to enable the upper spray pipe to swing, and in this case, the spray drive assembly 54 is not required to drive the upper spray pipe to swing.

[0054] In another example, the nozzle assembly on the upper nozzle group 51 cannot make the nozzle swing, and the spray drive assembly 54 is required to drive it to swing.

[0055] No matter the upper nozzle group 51 is driven or driven to swing by the nozzle, its spraying angle should be able to cover at least one-half of the top surface of the silicon wafer basket, such as one-half, two-thirds, three-quarters, full coverage, etc., preferably full coverage of the top surface; and for the side surface of the flower basket frame on the adjacent side, the spraying angle should be able to cover one-fifth, one-quarter, one-third, etc. of the height of the side surface, preferably one-third.

[0056] The middle nozzle group 52 needs to be driven by the spray drive assembly 54, so that the nozzle assembly thereon rotates with the nozzle at 120°, 180° or 360°, preferably 120°, and can simultaneously spray and rinse the silicon wafers in the silicon wafer basket and the inner wall surface of the spray box 1 on the corresponding side. In the process of rotating spraying, the spray angle facing the side of the silicon wafer basket covers two-thirds, three-quarters, full coverage of the side, etc., preferably two-thirds.

[0057] The nozzle of the lower nozzle group 53 can be provided with a nozzle, or a spray hole corresponding to the spray direction can be directly processed on the nozzle. Of course, the lower nozzle group 53 can also be swung for spraying like the upper nozzle group 51. The spraying angle of the nozzle or the spray hole should cover at least one-half of the bottom surface of the silicon wafer basket, such as one-half, two-thirds, three-quarters, full coverage, etc., preferably full coverage of the bottom surface; and for the side of the flower basket frame adjacent to or facing the side, the spraying angle should be able to cover one-fifth, one-quarter, one-third, etc. of the height of the side, preferably one-third.

[0058] By setting up the three rows of spray pipe assemblies, not only the products in the silicon wafer basket are rinsed, but also the silicon powder slurry at part of the side walls and the bottom plate of the spray box 1, especially at the sewage filter assembly 42, can be rinsed.

[0059] Furthermore, the spray drive assembly 54 includes a spray driver 541, a driver rod 542, a rotary drive rod 543, a transmission rod 544 and a spray drive end seat 545, and the end of the nozzle to be driven extends out of the spray box 1 and is supported by the spray drive end seat 545; both ends of the spray driver 541 are movably connected with the driver rod 542, and the end of the driver rod 542 is movably hinged with one end of the rotary drive rod 543, and the other end of the rotary drive rod 543 is connected to the movable end of the transmission rod 544, and the fixed end of the transmission rod 544 is fixedly connected to the end of the nozzle to be driven.

[0060] In a specific example, the spray driver 541 can adopt a driving mechanism such as a cylinder, a hydraulic cylinder, an electric cylinder, etc., and preferably a hydraulic cylinder.

[0061] Working principle: When the spray device is in use, the silicon wafer basket is placed inside the spray box 1, specifically on the inner support frame group 3. The spray assembly 5 is equipped with an external high-pressure water source at the end of the spray pipe, so that water sprays the silicon wafer basket through the nozzles or spray holes on the upper spray pipe group 51, the middle spray pipe group 52, and the lower spray pipe group 53. At the same time, in this process, by starting the spray drive assembly 54, the drive rods 542 at both ends of the spray drive 541 are simultaneously and uninterruptedly telescopically moved. At this time, the drive rod 542 drives the bottom end of the transmission rod 544 to move through the rotating drive rod 543, so that the transmission rod 544 drives the spray pipe to the spray drive end seat 545. During this process, the other end of the nozzle of the upper nozzle group 51 or the middle nozzle group 52 rotates inside the limit ring, so that the spraying angle of the nozzle assembly is constantly changed, and reciprocating spraying is performed on both sides of the silicon wafer basket. At the same time, the middle nozzle group 52 sprays and cleans the inner wall of the spray box 1. Finally, the waste water generated by the spraying enters the sewage trough 41 of the sewage discharge component 4 and is discharged to the outside through the sewage discharge pipe group 43. At the same time, the impurities washed off the surface of the silicon wafer basket remain on the upper surface of the sewage filter assembly 42, which is convenient for cleaning.

[0062] A degumming machine, see Figure 6 The degumming machine includes a spraying device 100, a degumming device 200, a rinsing device 300, a degumming work line 400 and a loading vehicle 500.

[0063] Layout relationship: The spray device 100 adopts the aforementioned spray device, the loading vehicle 500 and the spray device 100 are arranged at the loading end flow line of the degumming work flow line 400, the degumming device 200 and the rinsing device 300 are arranged at the downstream flow line of the spray device 100; a medicine adding box 210 is also arranged at the degumming device 200.

[0064] In a specific example, the degumming machine adopts a double-station streamline layout. Specifically, a group of spray devices 100, degumming devices 200, rinsing devices 300 and loading carts 500 are symmetrically arranged on both sides of the degumming work streamline 400 to improve efficiency.

[0065] Furthermore, a degumming effect monitoring unit and a liquid medicine monitoring unit are provided at the degumming device 200. The degumming effect monitoring unit is used to visually judge the degumming effect and determine whether to re-degumming through an algorithm; the liquid medicine monitoring unit monitors the concentration and liquid level of the medicine in the medicine adding box 210 online, and automatically adds and replenishes the medicine.

[0066] Among them, the loading cart 500 can be a manual cart, AGV transport cart, etc., and this solution prefers a manual cart.

[0067] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A spray device, comprising a spray box (1), a cover assembly (2), an inner support frame assembly (3), a sewage discharge assembly (4) and a spray assembly (5), characterized in that: in, The top of the spray box (1) is open, and the cover plate assembly (2) is arranged on the top of the spray box (1) in a lateral sliding control manner; the inner support frame assembly (3) is arranged in the spray box (1) for supporting the silicon wafer basket arranged longitudinally; the sewage discharge assembly (4) is arranged at the bottom of the spray box (1); the spray assembly (5) is arranged in the spray box (1) and close to the two longitudinal side walls, and sprays and cleans the upper, middle and lower parts of the silicon wafer basket and the inner wall of the spray box (1), and the spray angles corresponding to the upper, middle and lower parts are different.

2. The spray device according to claim 1, characterized in that: The cover plate assembly (2) comprises a cover plate frame, a cover plate body (22) and a cover plate driving assembly (23); the cover plate frame is composed of a plurality of groove rails (21) with inner guide grooves; the cover plate body (22) is driven laterally by the cover plate driving assembly to move horizontally in the inner guide grooves of the groove rails (21).

3. The spray device according to claim 2, characterized in that: The cover plate driving assembly (23) comprises a transverse driver (231), a cover plate adapter (232) and a transverse in-position sensor (233); the transverse driver (231) is mounted on the cover plate frame or the spray box body (1); and the cover plate adapter (232) and the transverse in-position sensor (233) are mounted on the cover plate body (22).

4. The spray device according to claim 2, characterized in that: A transverse guide assembly (24) is provided at two transversely arranged groove rails (21); a fixed end of the transverse guide assembly (24) is fixedly connected to the cover plate body (22), and a guide portion abuts against the two groove rails (21).

5. The spray device according to claim 1, characterized in that: The inner support frame group (3) comprises a longitudinal frame (31) and a plurality of groove bottom guide members (32); the longitudinal end of the longitudinal frame (31) is connected to the inner wall surface of the spray box (1); the bottom of the longitudinal frame (31) is suspended in the air; and the groove bottom guide members (32) are arranged on the bottom rod of the longitudinal frame (31).

6. The spray device according to claim 1, characterized in that: The sewage discharge assembly (4) comprises a sewage discharge trough (41), a sewage discharge filter assembly (42) and a sewage discharge pipe assembly (43), wherein the sewage discharge trough (41) is formed by processing the bottom plate of the spray box (1), the sewage discharge filter assembly (42) is arranged on the sewage discharge trough (41) from the inner side of the spray box (1) and covers the sewage discharge trough (41), and the sewage discharge pipe assembly (43) is connected to the sewage discharge trough (41) from the outer side of the bottom of the spray box (1).

7. The spray device according to claim 1, characterized in that: The spray assembly (5) comprises an upper spray pipe group (51), a middle spray pipe group (52), a lower spray pipe group (53) and a spray drive assembly (54); wherein the upper spray pipe group (51) performs partial-angle swing spraying, the middle spray pipe group (52) performs 360-degree rotation spraying, and the lower spray pipe group (53) performs fixed-angle spraying, and the spray drive assembly (54) is used to drive the upper spray pipe group (51), or the upper spray pipe group (51) and the middle spray pipe group (52) to move at a set angle.

8. The spray device according to claim 7, characterized in that: The spray drive assembly (54) comprises a spray drive (541), a drive rod (542), a rotary drive rod (543), a transmission rod (544) and a spray drive end seat (545); the end of the nozzle to be driven extends out of the spray box (1) and is supported by the spray drive end seat (545); both ends of the spray drive (541) are movably connected with the drive rod (542), the end of the drive rod (542) is movably hinged with one end of the rotary drive rod (543), the other end of the rotary drive rod (543) is connected to the movable end of the transmission rod (544), and the fixed end of the transmission rod (544) is fixedly connected to the end of the nozzle to be driven.

9. A degumming machine, comprising a spraying device (100), a degumming device (200), a rinsing device (300), a degumming work line (400) and a loading vehicle (500), characterized in that: The spray device (100) adopts the spray device described in any one of claims 1 to 8, the loading vehicle (500) and the spray device (100) are arranged at the loading end flow line of the degumming work flow line (400), the degumming device (200) and the rinsing device (300) are arranged at the downstream flow line of the spray device (100); and a drug adding box (210) is also arranged at the degumming device (200).

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