Conveying processing method for OCAP abnormal area

Abstract

The invention provides a carrying processing method for an OCAP abnormal area, which constructs communication connection between an MCS system and an MES system, an ACC system, an AHMS system and a machine, and is characterized in that a carrying traffic control module and an abnormal area task automatic inspection module are arranged in the MCS system; the transportation traffic control module is used for implementing transportation traffic control to limit the execution state of a task in an abnormal area, and the abnormal area task automatic inspection module is used for automatically inspecting whether task materials in the abnormal area are abnormal or not and automatically generating a corresponding instruction according to an inspection result.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor production material conveying, and in particular to a conveying and processing method for an OCAP (out of control limit) abnormal area. Background Art

[0002] In semiconductor production, material handling usually adopts equipment automation production process. It is required to set up an abnormal area to conduct quality inspection on products with production abnormalities. The abnormal area supports two handling modes: one is manual unloading, ending the handling task, and then releasing the AGV (automatic guided vehicle); the other is to continue the task, and the AGV carries the material to the machine for production.

[0003] The handling of materials in the abnormal area is carried out through the MCS system (Material Handling Control System). For the MCS system, there is no need to determine the type of carrier. As long as the machine fails to read the code, the failure information must be provided to the MCS. According to the failure information, the task currently being executed is assigned. Figure 1 The figure shows the current abnormal area processing flow: 1. After the AGV carries the material into the machine, the machine scans and decodes the carrier: if the code is scanned successfully, the machine completes the material loading and unloading, ends the task, and releases the AGV; if the code is scanned unsuccessfully, the ACC system (adaptive cruise control system) provides a failure signal to the MCS, and the MCS finds the corresponding task and assigns the AGV to the abnormal area. The task provides the starting point, end point, and AGV number. 2. Abnormal area task inspection: If the inspection is successful, the manual task is selected to continue, and the AGV transports the material. If the inspection fails and a further in-depth inspection is required, the manual unloading task ends and the AGV is released.

[0004] The current abnormal area processing process mentioned above still has some shortcomings: (1) During the transportation process, it is necessary to manually check whether the materials are abnormal, and fully automatic transportation cannot be achieved; (2) The traffic control function is not implemented during the transportation process. When the previous batch of task AGVs stays at the abnormal point for a long time, if the next batch of task AGVs carry materials to the same abnormal point, it is easy to cause the risk of collision. Summary of the invention

[0005] In order to solve the above problems, the present invention aims to provide a method for handling the abnormal area of ​​OCAP.

[0006] To achieve the above object, the present invention adopts the following technical solution:

[0007] The present invention provides a method for handling transportation in an abnormal area of ​​OCAP, and constructs a communication connection between an MCS system and an MES system, an ACC system, an AHMS system, and a machine. The method is characterized in that a transportation traffic control module and an abnormal area task automatic inspection module are arranged in the MCS system, the transportation traffic control module is used to implement the execution status of transportation traffic control restriction tasks in the abnormal area, and the abnormal area task automatic inspection module is used to automatically inspect whether there are abnormalities in materials of abnormal area tasks, and automatically generate corresponding instructions according to the inspection results.

[0008] Furthermore, in the OCAP abnormal area transport processing method provided by the present invention, it can also have the following characteristics: wherein, the transport traffic control module includes: a task creation unit, used to create an OCAP to abnormal point task; an analysis and judgment unit, used to judge whether the number of real-time tasks at the abnormal point exceeds the number of configured tasks; a state setting unit, used to set the state of the transport task to "waiting" state or "continue" state; a task time sorting unit, used to sort the transport tasks in chronological order.

[0009] Furthermore, in the OCAP abnormal area transport processing method provided by the present invention, it can also have the following characteristics: wherein the transport traffic control module also includes: a configuration task number setting module, which is used to set the number of configuration tasks.

[0010] Furthermore, in the OCAP abnormal area transport processing method provided by the present invention, there may also be such a feature: wherein the execution process of transport traffic control is as follows:

[0011] 1) When the machine fails to read the code and reports NG to the MCS system, the task creation unit automatically creates an OCAP to abnormal point task;

[0012] 2) When the abnormal point is the same point, the analysis and judgment unit judges whether the number of real-time tasks of the abnormal point exceeds the number of configured tasks. When the judgment result is "yes", it proceeds to step 3); when the judgment result is "no", it proceeds to step 5);

[0013] 3) The state setting unit sets the current task to the "waiting" state, and the MCS system sends the waiting instruction to the AHMS system. The AHMS system receives the waiting instruction and controls the AVG to wait;

[0014] 4) After the previous task is completed, the state setting unit sets the transport task state from the "waiting" state to the "continue" state according to the time sorting of the task time sorting unit;

[0015] 5) The AHMS system receives the continue task instruction and controls the AVG to continue to execute the moving task.

[0016] Furthermore, in the OCAP abnormal area transportation processing method provided by the present invention, it can also have the following characteristics: wherein, the abnormal area task automatic inspection module includes: a material status calling module, which checks the MESOCAP process according to the material calling MES interface, and automatically determines whether the inspection is successful or failed; an inspection success execution module, which automatically generates a task continuation instruction when the material status calling module determines that the inspection is successful; and an inspection failure execution module, which automatically generates a task cancellation instruction when the material status calling module determines that the inspection is a failure.

[0017] Furthermore, in the OCAP abnormal area transport processing method provided by the present invention, there may also be such a feature: wherein, the abnormal area task automatic inspection process is as follows:

[0018] 1) After AVG reaches the abnormal area, the material status calling module automatically determines whether the inspection is successful or failed. If the inspection is successful, it goes to step 2); if the inspection fails, it goes to step 3);

[0019] 2) Check that the successful execution module automatically generates a task continuation instruction, and the MCS system sends the task continuation instruction to the AHMS system;

[0020] 3) The failed execution module automatically generates a task cancellation instruction, and the MCS system sends the task cancellation instruction to the AHMS system;

[0021] 4) The AHMS system receives instructions from the MCS system and controls the AGV to continue the transport task or release the AGV according to the instructions.

[0022] Furthermore, in the OCAP abnormal area transport processing method provided by the present invention, it can also have the following characteristics: wherein, the MCS system is also provided with an abnormal area task manual inspection module, and is provided with a manual click button for confirming task continuation and task cancellation, for the operator to manually confirm after manual inspection.

[0023] Compared with the prior art, the present invention has the following beneficial effects:

[0024] 1) The OCAP abnormal area transportation processing method of the present invention sets a transportation traffic control task restriction function for the abnormal point, so that when the previous task is not processed and completed, the tasks exceeding the number of tasks configured at the abnormal point are automatically set to a waiting state, and are subsequently sorted and transported, avoiding congestion and chaos caused by too many tasks at the abnormal point.

[0025] 2) The OCAP abnormal area transport processing method of the present invention sets an automatic abnormal area task inspection process to automatically determine whether the inspection is successful or failed, thereby reducing the manual processing process. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 This is the abnormal area processing flow in the prior art;

[0027] Figure 2 is a system block diagram in an embodiment of the present invention;

[0028] Figure 3 is a flow chart of transport traffic control in an embodiment of the present invention;

[0029] Figure 4 It is a material handling flow chart in an embodiment of the present invention. DETAILED DESCRIPTION

[0030] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the following embodiments are combined with the accompanying drawings to specifically illustrate the technical solutions of the present invention.

[0031] The embodiment of the present invention provides a method for handling an abnormal area of ​​OCAP, see Figure 2 , build the communication connection between MCS system and MES system, ACC system, AHMS system and machine. MES system is the production execution system of semiconductor. AMHS system is the automatic material handling system, which controls AVG.

[0032] The OCAP abnormal area transportation processing method of the embodiment of the present invention is to set a transportation traffic control module and an abnormal area task automatic inspection module in the MCS system. The transportation traffic control module is used to implement the execution status of the transportation traffic control restriction task in the abnormal area, and the abnormal area task automatic inspection module is used to automatically check whether there is any abnormality in the abnormal area task material, and automatically generate corresponding instructions according to the inspection results.

[0033] The transport traffic control module includes: a task creation unit, an analysis and judgment unit, a state setting unit, a task time sorting unit, and a configuration task number setting module. The task creation unit is used to create an OCAP to abnormal point task. The analysis and judgment unit is used to determine whether the number of real-time tasks at the abnormal point exceeds the number of configured tasks. The state setting unit is used to set the state of the transport task to "wait" or "continue". The task time sorting unit is used to sort the transport tasks in chronological order. The configuration task number setting module is used to set the number of configured tasks, and the number of configured tasks can be modified according to actual conditions.

[0034] See also Figure 3 The implementation process of transport traffic control is as follows:

[0035] 1) When the machine fails to read the code and reports NG to the MCS system, the task creation unit automatically creates an OCAP to abnormal point task;

[0036] 2) When the abnormal point is the same point, the analysis and judgment unit judges whether the number of real-time tasks of the abnormal point exceeds the number of configured tasks. When the judgment result is "yes", it proceeds to step 3); when the judgment result is "no", it proceeds to step 5);

[0037] 3) The state setting unit sets the current task to the "waiting" state, and the MCS system sends the waiting instruction to the AHMS system. The AHMS system receives the waiting instruction and controls the AVG to wait;

[0038] 4) After the previous task is completed, the state setting unit sets the transport task state from the "waiting" state to the "continue" state according to the time sorting of the task time sorting unit;

[0039] 5) The AHMS system receives the continue task instruction and controls the AVG to continue to execute the moving task.

[0040] The abnormal area task automatic inspection module includes: material situation calling module, inspection success execution module, and inspection failure execution module. The material situation calling module checks the MES OCAP process according to the material calling MES interface, and automatically determines whether the inspection is successful or failed. The inspection success execution module automatically generates a task continuation instruction when the material situation calling module determines that the inspection is successful. The inspection failure execution module automatically generates a task cancellation instruction when the material situation calling module determines that the inspection is failed.

[0041] See also Figure 4 , the material handling process is as follows:

[0042] 1. The MES system sends a material loading request to the MCS system.

[0043] 2. After receiving the loading request, the MCS system sends the transport task to the AMHS system.

[0044] 3. The AMHS system controls the AGV to pick up the material and place the carrier in the machine, and the material placement is completed.

[0045] 4. When the machine fails to read the code, the ACC system creates a transport task and sends it to the MCS system.

[0046] 5. The MCS system sends the transport task to the AMHS system. The transport task includes AGV information, the starting point is the abnormal area, and the destination is the target board receiver.

[0047] 6. The AMHS system controls the AGV to reach the abnormal area, and the vehicle stays in the abnormal area for inspection.

[0048] The MCS system of the embodiment of the present invention can implement manual inspection and automatic inspection processes.

[0049] The MCS system of the embodiment of the present invention retains a manual inspection module for abnormal area tasks, and is provided with a manual click button for confirming task continuation and task cancellation. The staff can also implement manual process sampling, and the operator manually confirms by manually clicking a button in the MCS system. When the sampling result is successful, the AHMS system will control the AGV to continue the transport task. When the sampling result fails, the AHMS system will release the AGV and cancel the task.

[0050] The process of automatically checking abnormal area tasks by the MCS system of the embodiment of the present invention is as follows:

[0051] 1) After AVG reaches the abnormal area, the material status calling module automatically determines whether the inspection is successful or failed. If the inspection is successful, it goes to step 2); if the inspection fails, it goes to step 3);

[0052] 2) Check that the successful execution module automatically generates a task continuation instruction, and the MCS system sends the task continuation instruction to the AHMS system;

[0053] 3) The failed execution module automatically generates a task cancellation instruction, and the MCS system sends the task cancellation instruction to the AHMS system;

[0054] 4) The AHMS system receives instructions from the MCS system, controls the AGV to continue the transport task or releases the AGV according to the instructions, and feeds back the task execution status to the MCS system.

[0055] The above embodiments are only preferred embodiments of the present invention and are not intended to limit the scope of protection of the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention are included in the scope of protection of the present invention.

Claims

1. A method for handling transport in an OCAP abnormal area, establishing a communication connection between the MCS system and the MES system, ACC system, AHMS system, and machine, characterized in that: A transport traffic control module and an abnormal area task automatic inspection module are set in the MCS system. The transport traffic control module is used to implement the execution status of the transport traffic control restriction task in the abnormal area, and the abnormal area task automatic inspection module is used to automatically check whether there are any abnormalities in the abnormal area task materials, and automatically generate corresponding instructions according to the inspection results.

2. The OCAP abnormal area transport processing method according to claim 1, Features: in, The transport traffic control module includes: Task creation unit, used to create OCAP to abnormal point tasks; An analysis and judgment unit, used to judge whether the number of real-time tasks at the abnormal point exceeds the number of configured tasks; A status setting unit, used to set the status of the transport task to a "waiting" state or a "continuing" state; The task time sorting unit is used to sort the transport tasks in chronological order.

3. The method for handling OCAP abnormal area transport as claimed in claim 2, characterized in that: in, The transport traffic control module also includes: The configuration task number setting module is used to set the number of configuration tasks.

4. The method for handling OCAP abnormal area transport as claimed in claim 3, characterized in that: in, The implementation process of transport traffic control is as follows: 1) When the machine fails to read the code and reports NG to the MCS system, the task creation unit automatically creates an OCAP to abnormal point task; 2) When the abnormal point is the same point, the analysis and judgment unit judges whether the number of real-time tasks of the abnormal point exceeds the number of configured tasks, and when the judgment result is "yes", proceed to step 3); when the judgment result is "no", proceed to step 5); 3) The state setting unit sets the current task to the "waiting" state, and the MCS system sends the waiting instruction to the AHMS system, and the AHMS system receives the waiting instruction to control the AVG to wait; 4) After the previous task is completed, the state setting unit sets the transport task state from the "waiting" state to the "continue" state according to the time sorting of the task time sorting unit; 5) The AHMS system receives the task-continue instruction and controls the AVG to continue executing the moving task.

5. The OCAP abnormal area transport processing method according to claim 1, Features: in, The abnormal area task automatic inspection module includes: The material status calling module checks the MESOCAP process based on the material calling MES interface, and automatically determines whether the inspection is successful or failed; The inspection success execution module automatically generates a task continuation instruction when the material condition calling module determines that the inspection is successful; The inspection failure execution module automatically generates a task cancellation instruction when the material situation calling module determines that the inspection has failed.

6. The method for handling OCAP abnormal area transfer as claimed in claim 5, characterized in that: in, The process of automatic inspection of abnormal area tasks is as follows: 1) After the AVG reaches the abnormal area, the material situation calling module automatically determines whether the inspection is successful or failed. If the inspection is successful, it goes to step 2); if the inspection fails, it goes to step 3); 2) The inspection successful execution module automatically generates a task continuation instruction, and the MCS system sends the task continuation instruction to the AHMS system; 3) The inspection failure execution module automatically generates a task cancellation instruction, and the MCS system sends the task cancellation instruction to the AHMS system; 4) The AHMS system receives the instruction from the MCS system, and controls the AGV to continue the transport task or releases the AGV according to the instruction.

7. The method for handling OCAP abnormal area transfer as claimed in claim 1, characterized in that: in, The MCS system is also provided with a manual inspection module for abnormal area tasks, and is provided with manual click buttons for confirming task continuation and task cancellation, for operators to manually confirm after manual inspection.

Images