Beam expander for replication device

Abstract

A system (100, 300) for adjusting the diameter of a photon beam (S ', S' ') comprises a first element (1) having a curved surface, the first element having first and second focal points (F1, F2) The system can be arranged such that the photon beam is focused into the first focal point (F1) such that the photon beam is focused onto the second focal point (F2) after reflection at the surface of the first element (1).

Description

1. Technical Field

[0001] The invention relates to a system for adjusting the diameter of a photon beam, a projection device, and a corresponding method and computer program. 2. Prior Art

[0002] For different optical applications, it may be helpful to adjust the diameter of an existing photon beam. For example, it may be helpful to scale the photon beam to a specific diameter. Adjustment of the diameter of the photon beam can be used, for example, in optical magnification systems (e.g., zoom systems, projection devices, replication devices, display devices, etc.). Typically, the optical magnification system can be implemented by a system with different optical lenses, wherein the photon beam passes through the lens so as to be set to a defined diameter. In order to adjust the diameter, it is usually necessary to precisely adjust or fine-tune one or more optical elements of the lens system (e.g., by a defined offset of one or more lenses). Depending on the complexity of the optical lens system and the technical requirements for the adjustment of the diameter, this may constitute a considerable technical challenge. This is even more difficult because in the case of lenses, optical imaging errors (i.e., aberrations) are usually unavoidable, which means that aberrations must either be tolerated or reduced by complex optical design.

[0003] Furthermore, optical magnification systems are also known which rely on reflective optical elements. In this case, the beam path of the photon beam can often have a complex deflection relative to the optical axis, since in such reflective magnification systems the adjustment of the diameter of the photon beam cannot usually take place in a defined manner along the optical axis as in the case of lens systems. Therefore, even for reflective magnification systems, high technical requirements often arise for adjusting the optical elements and for ensuring the optical quality.

[0004] It is therefore an object of the present invention to improve and / or simplify the adjustment of the diameter of a photon beam. 3. Summary of the invention

[0005] This object is achieved at least in part by various aspects of the present invention.

[0006] A first aspect relates to a system for adjusting the diameter of a photon beam. The system comprises a first element having a curved surface, the first element having a first and a second focus. The system is arranged so that the photon beam is focused into the first focus and so that the photon beam is focused onto the second focus after reflection at the surface of the first element.

[0007] Thus, the present invention allows a photon beam to be guided through a system for adjusting its diameter in a defined manner, since the photon beam focused on a first focal point is always output at the second focal point of the first element in a defined manner by its reflection at the first element. Thus, the first element can be understood as a reflective deflection unit of the photon beam in the system. The deflection of the photon beam can be performed accordingly without active adjustment of the first element, since the fact can be utilized in the system: the photon beam focused at the first focal point is always output as focused at the second focal point. Therefore, there is no need to specifically adjust or focus on the position of the second focal point. The present invention can accordingly make it possible to reduce the complexity of the system for adjusting the diameter of the photon beam. At the same time, the optical quality of the photon beam during the defined conduction or deflection can be ensured, since the first element can be configured so that no (significant) aberrations are introduced into the photon beam during the reflection of the photon beam at the first element. For example, in this regard, the present invention can avoid aberrations that are usually associated with passing / transmitting the photon beam through two media (e.g. in the case of a lens). Therefore, the optical quality of the photon beam focused at the first focal point can (substantially) correspond to the optical quality of the reflected photon beam at the second focal point. In one example, the first element can thus allow the wavefront of the photon beam to be transmitted from a first focus to a second focus without aberration, without the need for (e.g., complex) adjustment or correction, and at the same time, the curved surface can be designed such that the numerical aperture of the photon beam changes during reflection, thereby enabling a changed output diameter of the photon beam to be achieved after collimation (without the need for a movable collimator).

[0008] Thus, a system for adjusting the diameter of a photon beam can be provided which does not require lenses and which therefore has no significant aberrations. Thus, the system can be used over a large wavelength range without any aberrations occurring. The system can, for example, work with just a reflective element.

[0009] In one example, the curved surface of the first element may be at least partially concave, and the system may be arranged such that the photon beam is incident on the concave area. By focusing on the first focus, the photon beam may correspondingly be incident on a concave portion of the surface of the first element, which reflects or focuses the photon beam into a second focus of the first element. The curvature of the surface may, for example, be locally different or locally varying.

[0010] The curved surface may, for example, extend in a first plane, while the first element has no curvature along a second plane orthogonal thereto. The incident photon beam may, for example, be located in the first plane. In other examples, the curved surface is also curved in the second plane. The curvature in the second plane may, for example, substantially correspond to the curvature in the first plane.

[0011] In one example, the first element comprises an elliptical reflector. In this case, the elliptical reflector may have two foci corresponding to the first and second foci of the first element. In this case, the elliptical reflector may have a concave region along at least one plane. For example, the elliptical reflector may be described by an elliptical curve along only one plane. In another example, the elliptical reflector may have a concave region along each of two orthogonal planes. For example, the geometry of the surface of the reflector may be mathematically described by an ellipse (e.g., by an elliptical curve and / or an ellipsoid surface).

[0012] In one example, the system includes a first output coupler that collimates the photon beam to a first output diameter after reflection at the first output coupler. In this case, the photon beam collimated by the first output coupler may correspond to the photon beam previously reflected at the first element. The first output coupler may, for example, have a curved surface that receives the photon beam so that the photon beam is reflected at the curved surface so that after such reflection the photon beam is collimated to a (defined) first starting diameter. In one example, the curved surface of the first output coupler may include a concave region on which the incident photon beam is incident. The geometry of the curved surface may, for example, be locally different and / or mathematically described by a parabola (e.g., by a parabolic curve / parabolic surface). In one example, the first output coupler includes a parabolic reflector. In this case, the parabolic reflector may have a corresponding curvature at least along one axis. For example, the parabolic reflector may have a concave region only along one plane. In another example, the parabolic reflector may have a concave region along each of two orthogonal planes.

[0013] In one example, the output coupler is arranged after the second focus of the first element so that the photon beam incident on the output coupler is previously focused on the second focus of the first element. In this case, the photon beam diverging from the second focus can therefore be incident on the output coupler and collimated to the first output diameter.

[0014] In another example, the first output coupler includes an output coupler that collimates the photon beam to a first output diameter without reflection. In this example, the first output coupler may include, for example, a collimating lens, a collimating lens system, and / or a collimator, which does not necessarily have to include a reflective element.

[0015] In one example, the first element and the first output coupler are arranged relative to each other such that the focus of the first output coupler and the second focus of the first element are substantially in the same position. This can allow tuning of the first element with the first output coupler, since the photon beam is then focused not only into the second focus of the first element, but in this case also simultaneously into the focus of the first output coupler and is therefore always output as collimated without any other assistance.

[0016] In one example, the first element and the first output coupler can be arranged to be fixed in position relative to each other. Therefore, the first element and the first output coupler can be configured to be relatively fixed relative to each other, which means that there is no need to locally tune the two components (for example during adjustment of photon radiation), resulting in reduced system complexity.

[0017] It should be mentioned that in another example, the first output coupler may also be finely adjusted in order to appropriately adjust the collimation of the first output diameter or calibrate the overlap of the second focus of the first element with the focus of the first output coupler (for example, this may occur by shifting / tilting the first output coupler, for example by a suitable positioner). However, importantly, calibration may not be required in normal operation, as the system may be arranged such that the optimal position between the first element and the first output coupler does not change even if, for example, the wavelength and / or magnification of the system changes.

[0018] In one example, the system is also configured such that the first output diameter depends on the numerical aperture of the photon beam focused into the first focus. Thus, the system can be purposefully designed such that a predetermined numerical aperture of the photon beam focused into the first focus can be determined for a desired first output diameter. Accordingly, a direct relationship can exist in the system between the numerical aperture of the photon beam focused into the first focus and the first output diameter. For example, the system can be designed such that there is a predetermined first output diameter based on a predetermined numerical aperture of the photon beam in the first focus. A defined application of numerical aperture can be produced in a predetermined manner, for example by designing different optical elements of the system, which guide the photon beam into the first focus of the first element in a predefined manner with a desired numerical aperture. An example of this is described below.

[0019] In one example, the system is also configured so that the first output diameter depends on the angle of incidence of the focused photon beam focused into the first focus. The system can be specifically designed accordingly so that a predetermined angle of incidence of the photon beam focused into the first focus can be determined for a desired first output diameter. In this case, the angle of incidence of the photon beam into the first focus can be defined relative to a line or plane of the first element. For example, the angle of incidence can be defined relative to a line generated by the connection of the first focus and the second focus of the first element (or the angle of incidence can also be related to a plane made to span the first and second focuses). The angle of incidence can be defined, for example, relative to a directional beam of the photon beam.

[0020] The inventors have thus recognized a system arrangement with which a direct relationship can exist between the angle of incidence of the photon beam at the first focus and the first output diameter, even when there is a (substantially) constant numerical aperture of the photon beam at the first focus. This is based on the fact that the system arrangement has the effect that the numerical aperture at the first focus (referred to herein as the first numerical aperture) also produces the numerical aperture of the photon beam at the second focus (referred to herein as the second numerical aperture). In this case, the system arrangement can be configured so that even in the case of a constant first numerical aperture, the angle of incidence at the first focus has a direct relationship with the size of the second numerical aperture. The system can accordingly allow the numerical aperture to be modulated. For example, in the case of a constant first numerical aperture, the second numerical aperture can be set specifically by varying or predetermining the angle of incidence. Depending on the angle of incidence, in this case, the second numerical aperture can be set differently from the first numerical aperture (e.g., greater than or less than or equal to the first numerical aperture). In this case, the system arrangement can further allow the size of the second numerical aperture to be directly related to the first output diameter. For example, depending on the size of the second numerical aperture of the photon beam, the first output coupler can produce a corresponding size of the first output diameter. Therefore, there is a system in which the angle of incidence of the focused photon beam into the first focus allows the second numerical aperture to be modulated, and the modulation of the second numerical aperture can then define the first output diameter. For example, the system can be designed so that there is a predetermined first output diameter based on a predetermined angle of incidence of the photon beam into the first focus. The defined application of the angle of incidence can be produced, for example, by designing different optical elements of the system, which guide the photon beam into the first focus of the first element at a desired angle of incidence in a predefined manner. An example of this situation is described below.

[0021] In one example, the system further has a device for changing the numerical aperture of the photon beam focused into the first focus and / or the incident angle at which the focused photon beam is focused into the first focus. As described herein, the dependence of the output diameter of the photon beam on the first numerical aperture and the incident angle can therefore not only be static, but can also be used variably during the operation of the system. The change can include at least two numerical apertures of the photon beam focused into the first focus that can be set for the operation of the system. In addition, the change can include at least two incident angles of the focused photon beam focused into the first focus that can be set for the operation of the system. Such a change can include, for example, a mode that produces a desired output diameter that can be specifically set in the system. Therefore, the change can include setting at least two output diameters of the photon beam. For example, the incident angle (and / or the first numerical aperture) can be set to one of at least two predetermined values. The operation of the system in the mode can then occur, for example, statically, so that the photon beam is output coupled with a set (constant) output diameter (for example, the first numerical aperture and / or the incident angle do not undergo further changes during the output coupling). However, in another example, it is also conceivable that the change occurs dynamically during the output coupling of the photon beam. In this case, the output diameter (or the first numerical aperture and / or the angle of incidence) may vary, for example, depending on the frequency.

[0022] For example, the system may have a user interface that allows the output diameter to be specified. The system may then automatically set the numerical aperture and / or angle of incidence to provide the specified output diameter.

[0023] In one example, the system also has a first input coupler. The system can be configured so that the photon beam is received in a collimated manner at the first input coupler, with an input diameter. The first input coupler can be configured so that when receiving collimated, the first input coupler focuses the photon beam to the first focus (of the first element) by reflection at the first input coupler. For example, the first input coupler, the first element, and the first output coupler can be understood as the parts of the first subsystem of the system. In this case, the collimated photon beam with the input diameter can be understood as the input (or input signal) of the first subsystem. In this case, the collimated photon beam with the first output diameter can be understood as the output (or output signal) of the first subsystem.

[0024] The first input coupler may, for example, have a curved and reflective surface that receives a collimated photon beam having an input diameter, such that the collimated photon beam is reflected at the curved surface of the first input coupler, such that the photon beam is focused onto a first focal point. In an example, the curved surface of the first input coupler may include a (locally different) concave area relative to the incident collimated photon beam. The geometry of the curved surface may be mathematically described, for example, by a parabola (e.g., by a parabolic curve / parabolic surface). In one example, the first input coupler includes a parabolic reflector. In this case, the parabolic reflector may have a concave area at least along one plane. For example, the parabolic reflector may have a concave area only along one plane. In another example, the parabolic reflector may have a concave area along each of two orthogonal planes.

[0025] In one example, the first element and the first input coupler are arranged relative to each other such that a focal point of the first input coupler and a first focal point of the first element are at substantially the same position.

[0026] In one example, the first element and the first input coupler can be arranged to be fixed in position relative to each other. Thus, the first element and the first input coupler can be configured to be relatively fixed relative to each other, which means that the complexity of the adjustment in the system for adjusting the photon radiation is reduced. This arrangement given by way of example can therefore allow the photon beam to be precisely steered into the first focus of the first element, and therefore also correspondingly precisely steered into the second focus of the first element, without requiring adjustment to implement this in this example.

[0027] It should be mentioned that in another example, the first input coupler may also be finely adjusted to appropriately adjust the focus to the first focal point or calibrate the overlap of the second focal point of the first element with the focal point of the first input coupler (e.g. this may occur by a shift / tilt of the first input coupler, e.g. by a suitable positioner). It is also important here that calibration may not be required in normal operation, as the system may be arranged such that the optimal position between the first element and the first input coupler does not change even if, for example, the wavelength and / or magnification of the system changes.

[0028] In another example, the system has a first input coupler, wherein the first input coupler is configured to collimate and receive a photon beam at an input diameter and focus the photon beam onto a first focal point without reflection. In one example, the first input coupler can include, for example, a focusing lens, a focusing lens system, and / or an optical focusing device.

[0029] In one example, the device for changing can be arranged so that it can direct the received collimated photon beam (in the input diameter) to different sections of the surface of the first input coupler. By directing the received collimated photon beam to different sections in this way, different angles of incidence of the photon beam incident on the first focus can be set. In this case, the predetermined section can be associated with a predetermined angle of incidence. The effect of setting the angle of incidence can occur during reflection at the first input coupler, because the received collimated photon radiation is focused independently of the illuminated section into the first focus of the first element. However, the spatial separation of the illuminated section results in a spatially offset starting point of the reflected edge beam of the photon radiation on the surface of the first input coupler. However, by focusing on the first focus, these (initial spatially offset) edge beams all converge into the first focus, so that different angles of incidence are generated for the differently illuminated sections. In this case, the device for changing can be arranged, for example, for directing the received collimated photon beam to different sections of the surface of the first input coupler by displacement (e.g., parallel displacement) of the first input coupler. This can be implemented, for example, using a movable reflector. In this case, the means for changing may comprise means for displacing the received collimated beam (e.g. a movable mirror, e.g. a plane mirror without curvature). For example, the movable mirror (as means for displacing) may be displaceable only along one axis, so that only a parallel displacement of the received collimated photon beam is possible and necessary to illuminate the sections of the first input coupler. This may enable particularly easy adjustment and structural design. In other examples, the means for displacing may be movable and / or pivotable on two axes and / or three axes.

[0030] In one example, the system is also configured such that the first output diameter is greater than or equal to the diameter of the input diameter. The system (as described herein) can be configured accordingly such that a collimated photon beam having an input diameter undergoes such an adjustment such that the first output diameter of the photon beam is a specific multiple higher than the input diameter. Thus, the system can be used as a beam expander. For example, this can be made possible by configuring or setting the system as described herein such that the second numerical aperture is greater than the first numerical aperture, which can be implemented, for example, by a suitable angle of incidence at the first focus.

[0031] In one example, the system is further configured such that at least two rates of increase of the first output diameter relative to the input diameter can be set. Thus, the system can operate in at least two amplification modes, each of which is accompanied by a specific amplification. The operation of the system in the amplification mode can occur, for example, statically, so that the photon beam is output coupled at a set (constant) amplification (e.g., the amplification does not change further during the output coupling). However, in another example, it is also conceivable that the amplification occurs dynamically during the output coupling of the photon beam. In this case, the amplification can be changed between different values, for example as the frequency changes.

[0032] In one example, the system is further configured such that the ratio of increase of the first output diameter relative to the input diameter comprises at least 1.4 times, preferably at least 1.7 times, more preferably at least 2.2 times, most preferably at least 3.2 times or at least 4 times. For example, the ratio of increase may also comprise a mathematical root of at least two, preferably at least three, more preferably at least five, most preferably at least ten. The system may be configured such that it may vary the magnification within a range from, for example, 1 to at least 3.2 or from, for example, 1 to at least 4 or from 1 to at least 10.

[0033] The system may be arranged to continuously change the magnification, for example within a specified range. Alternatively or additionally, it may also be arranged to allow at least two magnifications to be set to discrete values, for example it may be arranged to be able to discretely switch from at least one magnification value to at least one other magnification value which may be, for example, significantly larger or smaller.

[0034] In one example, the system is further configured such that the first output diameter is smaller than the diameter of the input diameter. The system (as described herein) can accordingly be configured such that a collimated photon beam having an input diameter undergoes such an adjustment such that the first output diameter of the photon beam is smaller than the input diameter by a specific multiple. Thus, the system can act as a beam reducer. For example, this can be made possible by configuring or setting the system as described herein such that the second numerical aperture is smaller than the first numerical aperture, which can be implemented, for example, by a suitable angle of incidence at the first focus.

[0035] In one example, the system is also configured so that at least two reduction rates of the first output diameter relative to the input diameter can be set. Thus, the system can operate in at least two reduction modes, each of which is accompanied by a specific reduction rate. The operation of the system in the reduction mode can occur, for example, statically, so that the photon beam is output coupled at a set (constant) reduction rate (e.g., the reduction rate does not change further during the output coupling). However, in another example, it is also conceivable that the reduction occurs dynamically during the output coupling of the photon beam. In this case, the reduction rate can change between different values, for example, as the frequency changes.

[0036] In one example, the system is further configured such that the reduction ratio of the first output diameter relative to the input diameter comprises at least 1.4 times, preferably at least 1.7 times, more preferably at least 2.2 times, most preferably at least 3.2 times or at least 4 times. For example, the reduction ratio may also comprise a mathematical root of at least two, preferably at least three, more preferably at least five, most preferably at least ten. The system may be configured such that it may vary the reduction ratio within a range from, for example, 1 to at least 3.2 or from, for example, 1 to at least 4 or from 1 to at least 10.

[0037] The system can be arranged to continuously change the reduction rate, for example within a specified range. Alternatively or additionally, it can also be arranged to allow at least two reduction rates to be set as discrete values, for example, it can be arranged to be able to switch discretely from at least one reduction rate value to at least one other reduction rate value that can be, for example, significantly larger or smaller.

[0038] In another example, the first input coupler and the first element and the first output coupler are arranged to be fixed in position relative to each other. In one example, in this case, the system can be controlled (only) by means of a device for shifting, which guides a received collimated photon beam having an input diameter to the first input coupler (as described herein). In the example, the input diameter of the received collimated photon beam can therefore be adjusted to one or more first output diameters by only parallel shifting of the device for shifting. Therefore, there is no need to implement complex mechanisms for adjusting the beam diameter, which can reduce control and calibration requirements, reduce system complexity and ensure the optical quality of the photon radiation in this case.

[0039] In one example, the system also includes a second element with a curved surface, the second element having a first focus and a second focus. The system can be arranged so that the photon beam reflected at the first element is focused into the first focus of the second element, so that the photon beam is focused on the second focus of the second element after the reflection at the surface of the second element. This example should be understood here to mean that the second element receives a photon beam that has been conducted or deflected by the first element (as described herein), that is, a photon beam that has previously been reflected at the first element. This example should also be understood here to mean that the photon beam between the first element and the second element can be exposed to further influences or one or more optical elements (such as the first output coupler). Therefore, the second element can be arranged behind the first element based on the beam direction of the path of the photon radiation. In this case, the characteristics (or features) of the second element can correspond to the characteristics (or features) of the first element described herein (and vice versa). In the example, the structure of the first element and the second element in the system is (substantially) the same. For example, the first element and the second element can be constructed in the same way, so that the first element and the second element can have the same optical properties. In this case, the second element can represent a second deflection unit in the system that conducts or deflects a photon beam from a first focus of the second element to a second focus of the second element. In one example, a photon beam having a first output diameter collimated by a first output coupler is focused into the first focus of the second element so that it is focused onto the second focus of the second element.

[0040] In one example, the system further comprises a second output coupler that collimates the photon beam to a second output diameter after reflection at the second element. In this case, the characteristics (or features) of the second output coupler may correspond to the characteristics (or features) of the first output coupler described herein (and vice versa). In one example, the structures of the first and second output couplers are (substantially) identical.

[0041] In another example, the second output coupler includes an output coupler that collimates the photon beam to a second output diameter without reflection. In this example, the second output coupler can include, for example, a collimating lens, a collimating lens system, and / or a collimator, which does not necessarily have to include a reflective element.

[0042] In one example, the second element and the second output coupler are arranged relative to each other such that a focal point of the second output coupler and a second focal point of the second element are at substantially the same position.

[0043] In one example, the system further comprises a second input coupler, wherein the second input coupler is configured to receive the photon beam collimated by the first output coupler and to focus the photon beam onto the first focal point of the second element by reflection at the second input coupler. The characteristics (or features) of the second input coupler may correspond to the characteristics (or features) of the first input coupler described herein (or vice versa). In one example, the structures of the first and second input couplers are (substantially) identical.

[0044] In this case, the second input coupler, the second element, and the second output coupler can be understood as the parts of the second subsystem of the system. In this case, the collimated photon beam with the first output diameter can be understood as the input (or input signal) of the second subsystem, for example. In this case, the collimated photon beam with the second output diameter can be understood as the output (or output signal) of the second subsystem. In this case, the output of the second subsystem can serve as the output of the system. In one example, the parts of the second subsystem can correspond to the parts of the same structure of the first subsystem.

[0045] In this case, the second subsystem (or one or more parts of the second subsystem) can play the functions described herein for the parts of the first subsystem. Therefore, the second subsystem can be used to further adjust the collimated photon beam to have a first output diameter according to the mechanism of the first subsystem. For example, the second subsystem can further increase the first output diameter so that the second output diameter is larger than the first output diameter. The total magnification of the first subsystem and the second subsystem can be generated, for example, by multiplying the magnification of the first subsystem by the magnification of the second subsystem. In another example, the second subsystem can also be configured only as a deflection unit without a magnification function.

[0046] Splitting the magnification between two subsystems can, for example, reduce the production requirements of the first or (if necessary identical) second element. For example, a smaller curvature may be sufficient.

[0047] In one example, the second element may be arranged to at least partially compensate for the asymmetric light distribution of the photon beam reflected by the first element. For example, depending on the angle of incidence at the first focus of the first element, a specific asymmetric light distribution of the partial beams of the photon beam reflected by the first element (i.e., the partial beams of the beam of the photon beam reflected by the first element) may occur. This may be caused by the different reflection angles of the partial beams of the photon beam at the first element, so that the distance of the partial beams changes on the photon beam after the reflection at the first element. This may happen, for example, if the second numerical aperture (at the second focus of the first element) is different from the first numerical aperture (at the first focus of the first element). The inventors have recognized that when a photon beam with an asymmetric light distribution is focused and reflected again at an element having similar reflection characteristics as the first element, this actual parasitic effect in the reflection of the photon beam at the first element can be specifically used for compensation. According to the invention, the reflection at the second element can be used for this purpose. For this purpose, it may be helpful that the system is arranged so that the arrangement of the edge beams of the photon beam when focused on the second element is opposite to the arrangement of the edge beams when focused on the first element. A marginal beam which is closer to its second focus during reflection at the first element can, for example, be further away from the second focus during reflection at the second element. In this way, it can be ensured that the effect described in the reflection of the photon beam at the second element drives together the partial beams of the photon beam, which are at a greater distance from each other due to the asymmetry. In addition, it can also be ensured in this case that the partial beams of the photon beam which are at a relatively small distance from each other due to the asymmetry are driven apart. The end result is that the light distribution of the photon beam which has been reflected at the first and second elements can include a (substantially) symmetrical light distribution of the partial beams, or the asymmetric light distribution can be significantly compensated to a certain extent. In addition, the system can be arranged so that the photon beam is guided onto an area of ​​the first or second element having a similar curvature, so that the compensation is optimized. It should also be noted that if the arrangement of the marginal beams in the system is not opposite - as explained, the asymmetric light distribution caused by the reflection at the first element during reflection at the second element can be further enhanced. The use of the second element as means for compensating for an asymmetric light distribution may accordingly make it possible to provide a system for adjusting the diameter of a photon radiation which has no significant distortion properties and which can also be controlled with low complexity.

[0048] In some examples, it can be arranged that the elements of the second subsystem are several times larger than the corresponding elements of the first subsystem, but have the same form in other respects. This multiple can, for example, correspond to the medium magnification achievable by the first subsystem. For example, if the first subsystem can achieve a certain maximum magnification Vmax, the elements of the second subsystem can, for example, be made Vmax / 2 times larger. When the magnification Vmax / 2 is used in the first subsystem, the photon beam can then pass through the correspondingly magnified mirror surface in the second subsystem (where it is magnified by Vmax / 2) in the same way, but the shift in the symmetry of the light distribution can actually be compensated in the same way.

[0049] In other examples, more than two of the mentioned subsystems can also be used. These may in each case increase the size of the corresponding element.

[0050] A second aspect relates to a device for projecting using a system according to one of the examples described herein. The device may include, for example, a copying device, an exposure device, a printer, and / or some other projection device. A photon beam with a first output diameter and / or a photon beam with a second output diameter may, for example, correspond to a field point or a portion of an image intended to be depicted in a plane by the device. For this purpose, the device may have a corresponding light source, the collimated beam of which may then be adjusted in diameter. Alternatively or additionally, the device may have one or more (movable) reflective elements so as to be able to scan the photon beam, for example, along one or two orthogonal directions. The device may also have one or more parabolic reflectors to guide the scanned beam whose diameter has been adjusted into a desired plane.

[0051] As described herein, the system can avoid aberrations that are typically associated with the passage / transmission of a photon beam through two media (e.g. in the case of a lens). For example, corresponding aberrations in a device for projection comprising the system can thus also be avoided. For example, color errors (e.g. chromatic aberrations) can be avoided so that the device for projection can function reliably for different wavelengths of photon radiation. For example, the replication device can operate without (significant) color errors. For example, there can be substantially no aberrations in the wavelength range from 400 nm to 800 nm (and / or in another wavelength range as described herein).

[0052] A third aspect relates to a method for adjusting the diameter of a photon beam, comprising: directing an incident photon beam onto a first element comprising a curved surface, wherein the first element has a first and a second focus. The directing occurs so that the received photon beam is focused into the first focus of the first element, wherein the directed photon beam is output as focused at the second focus after reflection at the surface of the first element. The method may also include collimating the photon beam reflected at the first element to a first output diameter. In this case, the method may be performed with a system according to one of the examples of the first aspect described herein.

[0053] In one example of the method, the incident photon beam includes a collimated photon beam having a first input diameter, wherein the guiding further includes: changing the numerical aperture of the photon beam focused into the first focus and / or the incident angle of the focused photon beam focused into the first focus so that the first output diameter changes.

[0054] A fourth aspect relates to a computer program comprising instructions which, when executed by a computer, a system according to the first aspect, and / or an apparatus according to the second aspect, cause the computer, the system, or the apparatus to perform the method according to the third aspect.

[0055] Alternatively or additionally, the computer program may have instructions for performing additional method steps described herein or for performing or implementing the functionality of the apparatus described herein. For example, the computer program may cause a particular optical element of the system to be displaced (e.g., a component of a means for displacing) to obtain an optical magnification or zoom factor selected in the program for the system or apparatus. Thus, the system may be controlled based on the interface of the computer program and its optical elements.

[0056] A further aspect relates to the mentioned system and / or device having a memory including the computer program. The system and / or device may also have means for executing the computer program. Alternatively, the computer program may also be stored elsewhere (e.g. in the cloud) and the device only has means for receiving instructions resulting from the execution of the program elsewhere. In either way, it is possible, for example, to enable the method to be run in an automatic or autonomous manner within the system and / or device. Thus, intervention (e.g. by means of manual adjustment) may be minimized, so that the complexity involved in the adjustment of the beam diameter may be reduced.

[0057] The features (and also examples) of the methods specified herein may also be applied or adapted to the systems (or devices and / or computer programs) mentioned herein. Similarly, the features (and also examples) of the systems or devices specified herein may also be applied or adapted to the methods or computer programs described herein. 4. Description of the drawings

[0058] The following detailed description describes background information and exemplary embodiments of the present invention with reference to the accompanying drawings, which show the following:

[0059] Figure 1 The system of the invention for adjusting the diameter of a photon radiation, shown by way of example, is schematically illustrated in a side view.

[0060] Figure 2 Schematically shown is the beam distribution of photon radiation as it passes through the system of the invention shown by way of example.

[0061] Figure 3 Another system of the invention shown by way of example is schematically illustrated in a side view. 5. Specific implementation methods

[0062] Figure 1 A system 100 for adjusting the diameter of photon radiation, shown by way of example, is schematically shown in a side view. In this case, the system 100 can be designed to adjust photon radiation having any wavelength. For example, the photon radiation can include a light range visible to humans. For example, in this case, the photon radiation can be located within a wavelength range of 400nm to 800nm ​​(which includes the RGB color space). However, it is also conceivable that the system 100 and the concepts or features of the present invention mentioned herein can also be applied to photon radiation in the (E and / or D) UV range and / or (near) infrared range. It is only necessary to provide the reflectivity of the corresponding reflective surface of the system in the corresponding wavelength range. Regardless of the corresponding wavelength range, the photon beam can, for example, be provided as a laser beam. The use of the word "beam" does not mean that it can be a continuous wave beam. Both continuous wave photon beams and, for example, pulsed photon beams can be used.

[0063] Figure 1 The system 100 in may include a first element 1 for conditioning photon radiation. In this case, the first element 1 may have a first focus F1 and a second focus F2. In an example, the first focus F1 and the second focus F2 may be designed such that photon radiation emitted from one focus and reflected at the first element 1 subsequently enters the other focus. The photon radiation from one focus may thus be projected onto the other focus. In an example, the first element 1 includes an elliptical reflector, wherein the first focus F1 and the second focus F2 correspond to two foci of the elliptical reflector. In this case, the elliptical reflector may include a portion of a geometric ellipse, i.e., the ellipse of the elliptical reflector does not have to be geometrically completely formed. This may be, for example, Figure 1 As can be seen in FIG. 1 , the first element 1 represents an elliptical reflector which is formed by a partial portion of an ellipse represented by a dotted line.

[0064] The system 100 may further include a first input coupler E1. The first input coupler E1 may be used to receive a photon beam and focus it onto a first focal point F1 of the first element 1. The photon beam received at the first input coupler E1 may also be understood as an input of the system 100. In an example, the first input coupler E1 may be configured to receive a collimated photon beam that is collimated to a defined diameter, and the diameter may also be referred to as an input diameter. For the description of the system 100, reference is first made by way of example to a beam path of a first photon beam S' that is incident on the first input coupler E1 with the input diameter. In this case, the first photon beam S' may include a radiation beam that includes a plurality of partial beams, wherein an edge beam and a directional beam are located in a region of the radiation beam. Figure 1 In this case, the first photon beam S' is first incident on the first input coupler E1 as a collimated input beam with an input diameter. The first input coupler E1 may include, for example, a parabolic reflector (such as Figure 1 ). The parabolic reflector may comprise a portion of a geometric parabola, i.e., the parabola of the parabolic reflector need not be geometrically completely formed. This may be done, for example, Figure 1 , where the first input coupler E1 represents a parabolic reflector, which is composed of a partial part of a parabola represented by a dotted line. In order to focus the received photon radiation S', the first input coupler E1 (for example a parabolic reflector) can have a focus that is aligned with the first focus F1 of the first element. The position of the focus of the first input coupler E1 can basically correspond to the position of the first focus F1 of the first element, so that these foci completely (or at least partially) overlap in space. In the case of a parabolic reflector as the first input coupler E1, it should be mentioned that an axially parallel beam, i.e. a beam incident parallel to the ordinate (or symmetry axis or guide line) of a geometrically / mathematically definable parabola, enters the focus of the parabolic reflector after reflection at the parabolic reflector. The system 100 can be arranged accordingly so that when formed as a parabolic reflector, the first input coupler E1 receives the collimated first photon radiation S' with an input diameter in such a way that it is parallel to the axis, so that the received photon radiation is (mainly) diverted into the focus of the parabolic reflector. In this case, the first photon radiation S' coupled input parallel to the axis may include a plane wavefront. Since the focus of the first input coupler E1 (or the focus of its parabolic reflector) is located at the same position as the first focus F1 of the first element, the first photon radiation S' is automatically focused onto the first focus F1 of the first element 1 with the input diameter. The photon radiation can then be reflected at the first element 1 and then focused into the second focus F2 of the first element 1. Therefore, this defined "refocusing" can be used to deflect the photon radiation in the system 100 or the system of the present invention.

[0065] The system 100 may also include a first output coupler A1. In this case, the first output coupler A1 may include, for example, a parabolic reflector (e.g., Figure 1 ). The parabolic reflector may comprise a portion of a geometric parabola, i.e., the parabola of the parabolic reflector need not be geometrically completely formed. This may be done, for example, Figure 1 , where the first output coupler A1 represents a parabolic reflector, which is composed of a partial part of a parabola represented by a dotted line. The first output coupler A1 can be arranged to receive radiation focused by the first element 1 at the second focus F2 and collimate it to a first output diameter. For this purpose, the first output coupler A1 (for example, configured as a parabolic reflector) can have a focus aligned with the second focus F2 of the first element. In this case, the position of the focus of the first output coupler A1 can substantially correspond to the position of the second focus F2 of the first element, so that these foci completely (or at least partially) overlap in space. In the case of a parabolic reflector as the first output coupler A1, it should be mentioned that the focused beam, i.e. the beam emitted from the focus of the parabola and incident on the surface of the parabolic reflector, is coupled out from the parabolic reflector parallel to the axis after reflection at the parabolic reflector. Therefore, the overlap of the second focus F2 and the focus of the first output coupler A1 allows to ensure such axially parallel output coupling. As can be seen in Figure 1 As can be seen in FIG. 1 , this makes it possible to “convert” the first photon beam S′ again into a collimated beam and couple it out as a collimated output beam having a first output diameter. In this case, the first photon radiation coupled out parallel to the axis may comprise a plane wavefront.

[0066] exist Figure 1 In the example of , the first output diameter of the first photon beam S' is in this case equal to the input diameter of the photon beam S'. This is achieved by the fact that the photon beam S' is incident substantially symmetrically on a region around the minor axis of the ellipse of the first element 1 .

[0067] It should also be mentioned that, in one example, the parabolic reflector of the first input coupler E1 and the parabolic reflector of the first output coupler A1 can be described by the same parabola, but different parts of the parabola (e.g., different segments of the parabola) are used for the first input coupler E1 and the first output coupler A1. The first input coupler E1 and the first output coupler A1 can be arranged symmetrically with respect to the first element 1. For example, the first input coupler E1 and the first output coupler can be arranged symmetrically about the minor axis or the major axis of the ellipse defined by the elliptical reflector of the first element 1.

[0068] As described, the system 100 accordingly makes it possible to steer photon radiation in a targeted manner without the need for complex adjustments, by the beam being transformed from a collimated state to a focused state, subsequently focused with a spatial offset, and then returned to a defined collimated state. The conversion of such a deflection unit by a reflective element (e.g., wherein an elliptical reflector is used as the first element 1, a parabolic reflector is used as the first input coupler E1, and / or a parabolic reflector is used as the first output coupler A1) can also make it possible to avoid light transmission through two media when the photon radiation undergoes deflection in the system 100, so that corresponding aberrations are also avoided (e.g., monochromatic aberrations and / or chromatic aberrations associated with the lens can be avoided).

[0069] For another example, a possible mechanism for adjusting the diameter of the photon radiation in the system 100 is explained. The system 100 can, for example, be configured or used so that a first output diameter of the photon beam coupled out at the first output coupler is larger than an input diameter of the photon beam coupled in at the first input coupler E1. For this amplification effect, reference is now made to Figure 1 The beam path of the second photon beam S" is shown, wherein an amplification effect occurs compared to the first photon beam S'. In this case, the second photon beam S" may comprise a radiation beam comprising a plurality of partial beams, while Figure 1The first edge beam S1, the second edge beam S2, and the directional beam S3 are marked in . In this case, the second photon beam S" which is parallel to the parabolic reflector axis of the first input coupler is radiated onto the surface segment of the parabolic reflector of the first input coupler E1, so that the second photon beam S" is focused onto the first focus F1 of the first element at a specific incident angle α. In the case of the second photon beam S", the irradiated segment of the first input coupler E1 is different from the irradiated segment in the case of the first photon beam S'. Therefore, a specific incident angle α is obtained for the second photon beam S", which is different from the incident angle of the first photon beam S' in which there is no amplification effect. In this example, the incident angle can be defined as the angle between the directional beam of the photon beam and the line connecting the first and second foci of the first element (i.e., the major axis of the ellipse, but other definitions are also possible). The incident angle α produces a beam path that is further defined by reflection of the second photon beam S" at the first element 1 and focusing onto the second focal point F2. Due to the size of the incident angle and boundary conditions during reflection at the first element 1, it is found that the numerical aperture NA2" of the second photon beam S" at the second focal point F2 is larger than the numerical aperture NA1" of the second photon beam S" at the first focal point F1. This larger second numerical aperture NA2" is then incident on the surface of the first output coupler. The first output coupler A1 then collimates the second photon beam S" to a first output diameter. By increasing the numerical aperture NA2" at the second focus, it is generally shown in this example that the collimated output beam of the second photon beam S" has a larger diameter than its collimated input beam.

[0070] In contrast, it should be mentioned that in the case of the first photon beam S', no amplification effect occurs in the system 100, since the numerical aperture does not change during the reflection at the first element 1. Although the first (axially parallel) photon beam S' has the same input diameter as the second photon beam S", the first photon beam S' illuminates different sections of the parabolic reflector of the first input coupler E1, resulting in different angles of incidence at the first focus F1, which specifically does not cause any change in the numerical aperture at the second focus. For the first photon beam S', the numerical aperture NA1' at the first focus F1 is therefore equal to the numerical aperture NA2' at the second focus F2. It should be noted that for the first photon beam S', the angle of incidence is in this case chosen so that the directed beam S3 of the second photon beam S" is incident on the vertex of the minor axis of the ellipse formed by the elliptical reflector of the first element 1. Therefore, the resulting beam path of the first photon beam S' is symmetrical about the two foci F1 and F2 (or the minor axis), so that the numerical aperture does not change at the foci F1 and F2. It should also be mentioned that in Figure 1In the example of , the first input coupler E1 and the first output coupler A1 are arranged symmetrically about the minor axis of the ellipse, so that with the same numerical apertures NA1' and NA2' of the first photon beam S', its input diameter is directly transformed into the first output diameter. In other words, the amplification effect is caused by the "oblique" incidence of the second photon beam into the first element 1 so that the beam path no longer occurs symmetrically along the minor axis of the ellipse. Therefore, the concomitant change of the numerical aperture at the focal points F1 and F2 can be used to increase the output diameter of the photon beam relative to the input diameter.

[0071] By "parallel shifting" of the incident photon beam (eg by means of a mirror movable along an axis), the magnification of the system can thus be varied.

[0072] It should be noted that zoom systems are usually limited to magnifications from 1 / m to m. The zoom factor can be defined as: Γ = m max / m min =m 2 , where m max and m min are typically the longest and shortest focal lengths of a zoom lens. In one example, the magnification of system 100 can reach values ​​exceeding the root of 10, such as greater than 4 (as already described herein). By the typical definition of a zoom lens, this corresponds to a magnification m greater than the root of 10 (i.e., m is at least ≈ 3.16), where the zoom factor m 2 So at least m 2 = 10. In other examples, the zoom factor of system 100 is at least 2x, 3x, 5x, or at least 20x.

[0073] However, if Figure 1 As indicated in , the amplification in the case of the second photon beam S" results in an asymmetric light distribution of the partial beams S1, S2, S3. Thus, it is indicated that the distance between the partial beams S2 and S3 at the collimated output diameter is greater than the distance between the partial beams S1 and S2. In the system 100, although the amplification is performed accordingly in the case of the second photon beam S', an asymmetric light distribution of the partial beams is introduced thereby, which can, for example, represent a distortion. It should be mentioned here that for the partial beams S1, S2, S3, there are different reflection angles at the first element 1. Thus, for example, the edge beam S2 has the shortest distance of the partial beams from the second focus F2 after reflection at the first element 1 and is therefore "strongly" focused on the second focus F2. The edge beam S1 has the longest distance of the partial beams from the second focus after reflection at the first element 1 and is therefore "weakly" focused on the second focus F2.

[0074] exist Figure 2 The effect of asymmetric light distribution under magnification is explained in more detail in . Figure 2Schematically illustrated is a beam distribution of photon radiation when it passes through the system 100 of the present invention shown by way of example. In this case, the beam distribution or arrangement of the individual partial beams of the second photon beam S" is schematically shown based on simulation results. On the one hand, an input beam distribution 201 of a collimated input beam of the second photon beam S" before input coupling into the system 100 is shown. In this case, the input beam distribution 201 is shown in the x and y directions, while the paths of the individual partial beams in the system 100 are shown in the z and y directions. The input beam distribution 201 can, for example, correspond to the beam distribution of a uniform light source, which is used as the source of the second photon beam S". In this example, the input diameter of the collimated input beam is 3.2 mm, wherein the beam cross-section is circular. It is also conceivable here to use any other form of beam cross-section (e.g. rectangular, square, elliptical, etc.) and any other (maximum) input diameter (e.g. at least 0.5 mm, at least 1 mm, at least 2 mm, at least 5 mm, and / or less than 10 mm, less than 5 mm, less than 2 mm, etc.). In this case, the collimated output beam of the second photon beam S" is shown in the x and y directions after passing through the system 100 having a first element 1, an input coupler E1, and an output coupler A1 (which can be as described with respect to Figure 1 1) after the first output diameter is approximately 30 mm, while the beam cross-section is circular, similar to the input beam. Thus, by way of example, this shows that magnification has occurred in the system 100 in both the x and y directions. Figure 2 In the example in , input coupling (as described herein) occurs accordingly such that an amplification factor of approximately ten times occurs.

[0075] In an alternative example, the magnification can also occur only along one axis (e.g., the y-axis). For this purpose, for example, the reflectors of the first input coupler E1, the first element 1, and / or the first output coupler A1 can be produced to be bent in only one dimension, so that the light is magnified only in one dimension (e.g., the y-axis). For example, in this case, the output beam is as wide in the x-direction as the input beam in the x-direction, while the diameter of the output beam in the y-direction is, for example, about ten times larger than the diameter of the input beam in the y-direction (the magnification of the system 100 is about ten times). For this purpose, reference should also be made in advance to Figure 3 The beam profile 302 in FIG. 1 represents the corresponding beam profile if the magnification occurs only along one axis. It can be seen that the envelope form of the beam profile 302 substantially represents an ellipse. Figure 2 In the system shown, by limiting the magnification along one axis (eg, the y-axis), an output beam profile can be generated whose envelope substantially represents an ellipse.

[0076] It should be noted that according to the present disclosure, a (substantially) symmetric beam magnification can thus be generated (e.g., equal magnification along the x and y axes). Also according to the present disclosure, a (substantially) asymmetric beam magnification can be generated (e.g., magnification only along the y axis).

[0077] For certain applications, it may be desirable, for example, to generate a symmetrical beam magnification. For example, it may be technically desirable that the output beam be symmetrically magnified (as described herein). If, for example, the input beam has an intensity distribution with a (substantially) circular envelope, it may be desirable, for example, that the output beam also has a (substantially) circular envelope.

[0078] However, for specific applications it may also be necessary, for example, to generate an asymmetric beam magnification. For example, it may be technically desirable that the output beam is asymmetrically magnified (as described herein). If, for example, the input beam has an intensity distribution with a (substantially) circular envelope, it may be desirable, for example, that the output beam has a (substantially) elliptical envelope. This may, for example, ensure a higher light intensity of the output radiation, since the radiation is (in contrast) distributed over a smaller area than in the case of a symmetrical magnification. For example, when the system is used in a projection device, an asymmetric magnification may be advantageous, while, for example, the elliptical output radiation may be further manipulated by the projection device. For example, the elliptical output radiation from the projection direction may be rasterized along a line.

[0079] Asymmetric light distribution of partial beams (for symmetric magnification along the x- and y-axes) can also be obtained from Figure 2 Readout, as can be seen from the greater distance of the partial beams at higher y values ​​and the reduced distance of the partial beams at lower y values. Also shown is the beam profile of ten partial beams in the yz plane, wherein the asymmetry of the distances of the partial beams can likewise be seen schematically. No significant asymmetry can be seen here along the x axis (due to the optical structure). This can be ensured, for example, by the fact that the beam path is formed symmetrically with respect to the yz plane.

[0080] Figure 3 Another system 300 of the present invention is schematically shown in side view by way of example, which can compensate for or minimize the reference Figure 2 The system 100 described herein can in this case be included as a subsystem in the system 300. Figure 3In the figure, firstly a photon beam input Si can be seen, which is deflected to a first shift mirror M2 via a first deflection mirror M1. In this case, the first shift mirror M2 can be shifted along the depicted y-axis. The first shift mirror M2 can be used to guide the photon beam input SI in a defined manner into a first subsystem G1, which first subsystem can correspond to the system 100 in terms of structure and function. In this example, the first shift mirror M2 can introduce the photon beam input Si into the first subsystem G1 so that, depending on the position of the first shift mirror M2, a first photon radiation S' and also a second photon radiation S" can be generated. The shift mirror can therefore be understood as a device for changing, wherein more than two positions of the first shift mirror M2 are conceivable, while at the same time different photon radiations with different angles of incidence and therefore different magnifications can be set for the first subsystem G1. In this respect, in Figure 3 1 , a first input coupler E1, a first element 1, and a first output coupler A1 of a first subsystem G1 (similar to system 100) can be seen. From the first subsystem G1, a photon beam S' (slightly amplified) or a photon beam S" (larger amplified, but also with a more asymmetric light distribution) can be coupled out with a first output diameter.

[0081] exist Figure 3 In the example of , the coupled-out photon radiation is then deflected via a second deflection mirror M3 to a second displacement mirror M4. The second displacement mirror M4 can be used to guide the photon radiation coupled out in a defined manner from the first subsystem G1 into the second subsystem G2 of the system 300. The second subsystem G2 can correspond to the system 100 in terms of structure and function. In this respect, Figure 3 In the figure, one can see the second input coupler E2, the second element 2, and the second output coupler A2 of the second subsystem G2 (similar to system 100 and subsystem G1). In particular, here the second shift mirror M4 can also adjust the radiation coupled out from the first subsystem G1 so that it is incident on different sections of the surface of the second input coupler E2, so that different incident angles and therefore the accompanying magnifications can be introduced into the photon radiation in the system 300 (as described herein). In one example, the second shift mirror M4 and the first shift mirror M2 can be coupled to each other. In this case, the coupling can be designed so that the first and second shift mirrors M2, M4 for each subsystem G1, G2 produce the same magnification. In Figure 3In the example shown, in this case, the coupling can be such that the second shift mirror M4 always moves in the same direction as the first shift mirror M2, for example so that the photon beam is directed to a section of the second input coupler E2 that corresponds to the section of the first input coupler E1 to which the photon beam is directed. However, in this case, the second shift mirror M4 can travel a distance that is several times greater than the first shift mirror M2 (e.g. Figure 3 As shown, the shift mirror M4 of the photon beam S" is shifted farther relative to the mirror position than the shift mirror M2 in order to steer the photon beam S'). For example, when the first shift mirror M2 is shifted, the distance traveled by the second shift mirror M4 can be a specific multiple of the distance traveled by the first shift mirror M2. Therefore, the zoom factor of the system 300 can be set on a single degree of freedom of movement and can also be changed over a large range (at almost any wavelength) with essentially no aberrations.

[0082] Thus, the total magnification of the system 300 can be obtained by multiplying the magnification introduced at the first subsystem G1 by the magnification introduced at the second subsystem G2. Thus, the second subsystem G2 can be considered as another magnification unit. The total magnification of the system 300 can include, for example, at least 5 times, at least 10 times, or at least 20 times, but higher total magnifications are also conceivable. It is also conceivable that the system 300 includes a zoom factor of at least 2 times, preferably at least 10 times, more preferably at least 50 times, and most preferably at least 100 times.

[0083] In addition, the second subsystem G2 can also (simultaneously) compensate for asymmetries in the light distribution that can occur with the amplification of the photon beam in the first subsystem G1 (as described herein). It should be mentioned that, for this purpose, the components in the system 300 should be configured for beam paths in which the arrangement of the edge beams S1, S2 in the second subsystem G2 is opposite to the arrangement of the edge beams S1, S2 in the first subsystem G1. In this case, the arrangement of the edge beams can be considered to be opposite with respect to the input coupling of the edge beams into the corresponding subsystem. This is in Figure 3, in which the edge beams S1 and S2 are marked. In the first subsystem G1, the edge beam S1 is located in the portion between the focus of the first input coupler E1 and its reflection point at the first element 1, on the side of the photon beam S" facing the first element 1. On the other hand, in the second subsystem G2, the edge beam S2 is located in the portion between the focus of the second input coupler E2 and its reflection point at the second element 2, on the side of the photon beam S" facing the second element 2. This reversal of the edge beams S1, S2 when entering the second subsystem G2 can, for example, be explained by the fact that due to the beam path of the system 300, the photon radiation is mirrored when entering the second subsystem G2 compared to when entering the first subsystem G1. This type of configuration can make it possible for the effect of the asymmetric light distribution of the first subsystem G1 to be compensated (at least partially) by the second subsystem G2. This can be explained by the fact that the effect of the asymmetry of the distribution of the partial beams due to the reflection of the photon radiation acts in the opposite direction in the second subsystem G2, so that the asymmetry of the distribution of the partial beams is minimized after passing through the second subsystem G2. If the mentioned compensation does not take place, the parasitic effects described in this article will further increase the asymmetry of the light distribution.

[0084] The system 300 further comprises a third shifting mirror M5 after the second subsystem G2, which is shiftable along the z direction. Thus, the third shifting mirror can adjust the position of the photon beam coupled out from the second subsystem G2 on a plane. In this case, the photon beam coupled out from the system 300 can also be referred to as a photon beam output SO. For example, depending on the magnification caused by the system 300, the third shifting mirror M5 can take such a position that the photon beam output SO emitted by the system 300 appears to be concentrated on one point regardless of the magnification.

[0085] In this case, possible photon beam outputs SO of the system 300 are given by way of example as beam profile 301 and beam profile 302 .

[0086] Beam profile 301 indicates the beam profile if the photon beam input SI is amplified and compensated in the x and y directions by the system 300. Thus, there is symmetric beam amplification (as described herein) for beam profile 301. Symmetric beam amplification may, for example, exist in the two subsystems so that the photon beam output SO thus has symmetric beam amplification.

[0087] In this case, beam profile 302 indicates the beam profile if the photon beam input SI is amplified and compensated by the system in only the y-direction. Thus, for beam profile 302, there is asymmetric beam amplification (as described herein). Thus, it can be seen that the envelope of beam profile 302 has an elliptical form (as opposed to the circular distribution of radiation of photon beam input SI, which is indicated by the darker color). Asymmetric beam amplification can exist in both subsystems, so that the photon beam output SO therefore has asymmetric beam amplification.

Claims

1. A system (100, 300) for adjusting the diameter of a photon beam (S', S"), comprising: A first element (1) having a curved surface, the first element having first and second focal points (F1, F2); The system is configured so that the photon beam is focused into the first focus (F1) and so that the photon beam is focused onto the second focus (F2) after reflection at the surface of the first element (1).

2. The system of claim 1, wherein: The system also includes a first output coupler (A1) that collimates the photon beam to a first output diameter after reflection at the first output coupler.

3. The system of claim 2, wherein: The first element and the first output coupler are arranged relative to each other such that a focal point of the first output coupler (A1) and a second focal point (F2) of the first element (1) are substantially at the same position.

4. A system as claimed in any one of claims 2 and 3, wherein: The first element (1) and the first output coupler (A1) are arranged to be positionally fixed relative to each other.

5. The system according to any one of claims 2 to 4, wherein: The system is also arranged so that the first output diameter depends on the numerical aperture (NA1', NA1") of the photon beam (S', S") focused into the first focal point (F1).

6. The system according to any one of claims 2 to 5, wherein: The system is also arranged so that the first output diameter depends on the angle of incidence (α) of the focused photon beam (S") into the first focal point (F1).

7. A system as claimed in any one of claims 5 and 6, wherein: The system also has means for changing the numerical aperture of the photon beam focused into the first focal point and / or the angle of incidence of the focused photon beam focused into the first focal point.

8. The system as claimed in one of claims 1 to 7, further comprising a first input coupler (E1), wherein: The first input coupler is arranged such that when reception is collimated, the first input coupler focuses the photon beam having an input diameter onto the first focal point (F1) by reflection at the first input coupler.

9. The system of claim 8, wherein: The system is arranged such that a received collimated beam of photons can be directed onto different sections of the surface of the first input coupler.

10. A system as claimed in claim 8 or 9 as dependent upon any of the preceding claims 2 to 7, wherein: The system is also configured such that the first output diameter is larger than the input diameter.

11. The system of claim 10, wherein: The system is also arranged such that at least two rates of increase of the first output diameter relative to the input diameter can be set.

12. The system of any one of claims 10 and 11, wherein: The system is further configured such that the ratio of increase of the first output diameter relative to the input diameter comprises at least 1.4 times, preferably at least 1.7 times, more preferably at least 2.2 times, most preferably at least 3.2 times.

13. The system of any one of claims 8 to 12, wherein: The first element (1) and the first input coupler (E1) are arranged to be positionally fixed relative to each other.

14. The system according to any one of claims 1 to 13, wherein: The first element (1) comprises an elliptical reflector.

15. The system (300) of any one of claims 1 to 14, wherein: The system also includes a second element (2) having a curved surface, the second element having a first focus and a second focus; The system is configured so that the photon beam reflected at the first element (1) is focused into the first focus of the second element (2), and so that the photon beam is focused onto the second focus of the second element after reflection at the surface of the second element.

16. The system of claim 15, wherein: The system also has a second output coupler (A2) which collimates the photon beam to a second output diameter after reflection at the second element.

17. The system of claim 16, wherein: The second element (2) and the second output coupler (A2) are arranged relative to each other so that the focus of the second output coupler and the second focus of the second element are substantially at the same position.

18. The system of any one of claims 15 to 17, wherein: The system also has a second input coupler (E2), wherein the second input coupler is arranged to receive the photon beam collimated by the first output coupler (A1) and to focus the photon beam onto the first focal point of the second element (2) by reflection at the second input coupler (E2).

19. The system of any one of claims 15 to 18, wherein: The second element (2) is arranged to at least partially compensate for the asymmetric light distribution of the photon beam reflected by the first element (1).

20. A device (400) for projection using a system (100, 300) as claimed in any one of claims 1 to 19.

21. A method for adjusting the diameter of a photon beam, comprising: directing an incident photon beam onto a first element (1) comprising a curved surface, wherein the first element has first and second focal points (F1, F2); Therein, the guiding occurs such that the received photon beam is focused into a first focus (F1) of the first element, wherein the guided photon beam is output to be focused at the second focus (F2) after reflection at the surface of the first element.

22. The method of claim 21, further comprising: collimating the photon beam reflected at the first element (1) to a first output diameter; wherein the incident photon beam comprises a collimated photon beam having a first input diameter, and wherein the directing further comprises: The numerical aperture (NA1', NA1") of the photon beam focused into the first focal point (F1) and / or the incident angle (α) of the focused photon beam focused into the first focal point are changed so that the first output diameter changes.

23. A computer program comprising instructions which, when executed by a computer, a system (100, 300) as claimed in any one of claims 1 to 19, and / or a device (400) as claimed in claim 20, cause the computer, the system, and / or the device to perform a method as claimed in any one of claims 21 and 22.

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