The present invention provides a method of preparing a sample using a device with at least one
charged particle beam, said device comprising at least one column with a
charged particle source producing charged particles and with elements for forming and directing charged particles into a
charged particle beam, which is connected to a chamber comprising a stage for placing at least one substrate, a
manipulator for transferring the sample, a device for mounting a sample holder, a sample holder for holding the sample placed in the device for mounting the sample holder, wherein the device optionally further comprises at least one device generating a
photon beam connected to the chamber, a substrate with at least one sample placed on the stage, and an evaluation unit, the method comprising the following sequentially performed steps: - obtaining an image of the
manipulator using the device with at least one
charged particle beam, - moving the
manipulator to a distance of at least 0 μm and at most 50 μm from the sample, - creating a connection between the manipulator and the sample using material deposition or redeposition, - separating the sample from the substrate, - removing the sample from the substrate using the manipulator, - transferring the sample to a distance of at least 0 μm and at most 50 μm from the sample holder, using the manipulator, - creating a connection between the sample and the sample holder using material deposition or redeposition, - separating the manipulator from the sample using a beam of charged particles or optionally using a
photon beam, characterized in that the step of separating the manipulator from the sample using a beam of charged particles or optionally a
photon beam comprises the following steps: - obtaining an image of the sample connected to the manipulator using the device with at least one
charged particle beam, - comparing the image of the manipulator with the image of the sample connected to the manipulator, using an evaluation unit, - determining the edge of the manipulator adjacent to the sample, using the evaluation unit, based on the result of comparing the image of the manipulator with the image of the sample connected to the manipulator, - separating the manipulator from the sample using a beam of charged particles or optionally a
photon beam guided along the edge of the manipulator adjacent to the sample determined in the preceding step.