The invention discloses a multi-
wavelength light-induced photoelectron
charge compensation device and method for SIMS analysis, and the device comprises an adjustable
wavelength light source which is used for generating light of which the
wavelength is adjustable in a range from
ultraviolet to visible light; the optical
system is used for guiding the light generated by the adjustable wavelength
light source to the surface of a sample bombarded by an SIMS primary
ion beam, and ensuring that a
photon beam spot is accurately overlapped with an
ion beam bombarded area; and the
control unit is used for dynamically adjusting the wavelength and the
light intensity of the adjustable wavelength
light source according to the stability of the SIMS secondary
ion signal so as to optimize photoelectron emission and realize charge
neutralization. The invention has the following beneficial effects: the technical scheme avoids physical damage of the
electron gun to the sample and damage to the vacuum environment; the wavelength can be adjusted to cover
ultraviolet light to visible light, and the device is suitable for various materials.