Continuous high-temperature cast ingot smelting equipment and processing method thereof

Abstract

The invention discloses continuous high-temperature cast ingot smelting equipment which comprises a feeding chamber, a processing chamber and a discharging chamber which are sequentially and continuously arranged together, the processing chamber comprises a cooling section and at least one transfer section, and the top of each transfer section is connected with at least one high-temperature smelting chamber; a crucible translation mechanism for controlling the crucible translation vehicle to translate from each transfer section to the cooling section is arranged in the processing chamber, and an ingot casting crucible is loaded on the crucible translation vehicle; each high-temperature smelting chamber comprises a smelting crucible, a heater, a material supplementing device and the like, a discharging opening is formed in the bottom of each smelting crucible, a plunger rod is arranged on the top of the furnace body, and a flow guide pipe is arranged at the bottom of each smelting crucible. Places required by high-temperature smelting and low-temperature cooling procedures are separated, and raw materials can be continuously smelted in the high-temperature smelting chamber, so that the energy loss is greatly reduced, the production cost is saved, and the single-furnace production time is shortened; and meanwhile, multi-furnace processing can be synchronously carried out, so that the production efficiency is multiplied. The invention further discloses a machining method of the equipment.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a continuous high-temperature ingot smelting device and a processing method thereof. Background Art

[0002] With the rapid development of the semiconductor industry, the demand for crystal materials is becoming more and more vigorous, and the production efficiency and cost of high-temperature heat treatment are increasingly valued by the industry. Existing high-temperature ingot melting equipment usually includes a furnace body, an insulation component arranged on the inner wall of the furnace body, a heater arranged in the insulation component, and a crucible for melting crystal materials. During operation, the crystal raw material is placed in the crucible, and then the crucible is sent into the furnace body, vacuumed, and the crucible is heated in stages according to the process requirements until the crystal raw material is melted; then the crucible is cooled in stages according to the process requirements, and then the furnace body is opened to take out the crucible to prepare for the next batch of crystal melting. During the whole process, the high-temperature ingot melting equipment is an intermittent equipment, which needs to be heated and cooled repeatedly. A large amount of heat is directly lost without acting on the impregnation of the workpiece, resulting in large energy consumption and high production costs; and repeated heating, cooling, vacuuming and other processes take a lot of time, resulting in a long production cycle and low output, which cannot meet the needs of large-scale and batch production. Summary of the invention

[0003] The technical problem to be solved by the present invention is to provide a continuous high-temperature ingot melting equipment in view of the problems of high energy consumption and long production cycle caused by repeated heating and cooling in the prior art continuous high-temperature ingot melting equipment.

[0004] The technical solution of the technical problem of the present invention is: construct a continuous high-temperature ingot smelting equipment, including a continuous high-temperature ingot smelting equipment, including a feeding chamber, a processing chamber and a discharging chamber which are arranged in sequence and continuously, the processing chamber includes a cooling section and at least one transfer section, each transfer section is provided with a feeding chamber, a feeding isolation door mechanism is provided between the transfer section and the feeding chamber; a discharging isolation door mechanism is provided between the cooling section and the discharging chamber, and a partition isolation door is provided between the cooling section and each transfer section; at least one high-temperature smelting chamber is connected to the top of each transfer section;

[0005] A crucible translation mechanism is provided in the processing chamber, and the crucible translation mechanism controls the crucible translation vehicle to translate from each of the transfer sections to the cooling section according to a preset trajectory, and the crucible translation vehicle carries an ingot crucible;

[0006] Each of the high-temperature smelting chambers comprises a furnace body fixed on the top of the transfer section, a heat preservation component arranged in the furnace body, a smelting crucible arranged at the center of the heat preservation component, a heater arranged between the smelting crucible and the heat preservation component, and a feeding device arranged outside the furnace body for adding crystal raw materials into the smelting crucible; a discharge port is provided at the bottom of the smelting crucible, a plunger rod is provided at the top of the furnace body and passes through the furnace body and the heat preservation component and matches the discharge port, and a guide pipe is provided at the bottom of the smelting crucible to extend the discharge port into the transfer section.

[0007] Furthermore, the high-temperature smelting chamber also includes a hydraulic lifting mechanism for controlling the lifting and lowering of the plunger rod.

[0008] Furthermore, the crucible translation mechanism is arranged at the inner bottom of the processing chamber, and the crucible translation mechanism includes a translation guide rail arranged according to a preset trajectory, a plurality of rollers rotatably arranged on the translation guide rail, a chain driving the plurality of rollers to rotate synchronously, and a translation motor driving the chain to rotate through a sprocket shaft, and the crucible translation carriage is mounted on the rollers.

[0009] Furthermore, the crucible translation vehicle includes an insulation tray made of insulation material and an insulation plate frame arranged at the bottom of the insulation tray; the ingot crucible is arranged on the upper surface of the insulation tray, the insulation plate frame is assumed to be on the roller of the crucible translation mechanism, and the insulation tray is embedded in the insulation plate frame.

[0010] Furthermore, a crucible lifting mechanism is provided at the bottom of the transfer section corresponding to each of the high-temperature smelting chambers, and the crucible lifting mechanism lifts the ingot crucible on the crucible translation vehicle to below the guide tube corresponding to the high-temperature smelting chamber or drops the ingot crucible from below the corresponding guide tube to the crucible translation vehicle according to a preset process.

[0011] Furthermore, the crucible lifting mechanism includes a lifting hydraulic cylinder arranged at the outer bottom of the processing chamber, and a lifting guide rod driven by the lifting hydraulic cylinder and passing through the bottom side wall of the processing chamber, and the lifting guide rod is arranged opposite to the guide tube.

[0012] Furthermore, the thermal insulation door mechanism includes a thermal insulation guide rail horizontally arranged on the top of the transfer section, a thermal insulation door that can seal and cover the opening of the high-temperature chamber furnace shell, a guide roller fixedly arranged on the end face of the thermal insulation door and slidably arranged in the thermal insulation guide rail, and a first driving mechanism that drives the thermal insulation door to slide back and forth.

[0013] Furthermore, the inner side wall of the transfer section is provided with a processing heat-insulating layer, and the partition isolation door is located above the crucible translation mechanism.

[0014] Furthermore, the feed chamber includes a feed chamber furnace shell and a feed chamber furnace door; the feed isolation door mechanism includes an isolation door shell provided between the feed chamber furnace shell and the transfer section, two thermal insulation isolation doors that can slide up and down are vertically provided in the isolation door shell, and an isolation door lifting mechanism is provided outside the feed chamber furnace shell.

[0015] Another technical problem to be solved by the present invention is that the processing method of continuous high-temperature ingot melting equipment in the prior art has the problems of high energy consumption and long production cycle due to repeated heating and cooling, and a processing method of continuous high-temperature ingot melting equipment is provided.

[0016] The technical solution of the technical problem of the present invention is: construct a processing method of a continuous high-temperature ingot melting equipment, comprising the following steps:

[0017] S10. Setting the continuous high temperature ingot melting equipment as described above;

[0018] S20. For all high-temperature melting chambers on the same transfer section, synchronously control the plunger rod to insert into the discharge port at the bottom of the melting crucible to seal the discharge port; put the raw material into the melting crucible in the corresponding high-temperature melting chamber through the feeding device, evacuate the high-temperature melting chamber and gradually heat it to the working temperature to melt the raw material;

[0019] S31. The ingot crucible is placed on a crucible translation vehicle located in the feed chamber;

[0020] S32. Open the feed isolation door mechanism, control the crucible translation mechanism to translate the crucible translation vehicle carrying the ingot crucible to the transfer section directly below the guide tube of the corresponding high-temperature smelting chamber;

[0021] S33. Repeat steps S31 and S32 according to the number of high-temperature smelting chambers on the corresponding transfer section until there is an ingot crucible under the guide tube of each high-temperature smelting chamber;

[0022] S40. After the raw material in the high-temperature melting chamber is completely melted, the plunger rod of the corresponding high-temperature melting chamber is controlled to lift and separate from the discharge port of the melting crucible, so that the raw material liquid in the melting crucible flows into the corresponding ingot crucible through the guide pipe;

[0023] S50. Open the partition isolation door corresponding to the transfer section, control all the crucible translation vehicles to move to the cooling section through the crucible translation mechanism, and then close the partition isolation door;

[0024] S60. Repeat steps S20 to S50

[0025] S70. Repeat steps S20 to S60 synchronously in other transfer segments;

[0026] S80. When the number of workpieces in the cooling section reaches a preset number, the discharge isolation door mechanism is opened, the crucible translation mechanism is controlled to transfer the workpieces that have completed cooling to the discharge chamber, and the discharge isolation door mechanism is closed.

[0027] The implementation of the continuous high-temperature ingot smelting equipment and the processing method thereof described in the present invention has the following beneficial effects: by arranging a processing chamber including at least one transfer section, and each transfer section is connected to the top with at least one high-temperature smelting chamber, the high-temperature smelting chamber transports the molten raw material to the ingot crucible located on the crucible translation mechanism of the transfer section through the guide pipe, thereby separating the places required for high-temperature smelting and low-temperature cooling processes, and the raw material can be continuously smelted in the high-temperature smelting chamber, which greatly reduces the energy loss caused by repeated heating and cooling, saves production costs, and shortens the production time of a single furnace; at the same time, multiple high-temperature smelting chambers can be arranged on one transfer section, and multiple transfer sections can be arranged in the equipment, and multiple furnaces can be processed simultaneously, which doubles the production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a front view of a preferred embodiment of the continuous high-temperature ingot melting equipment of the present invention;

[0029] Figure 2 Shown Figure 1 A magnified view of part I;

[0030] Figure 3 It is a structural schematic diagram of the feed isolation door mechanism in a preferred embodiment of the continuous high-temperature ingot smelting equipment of the present invention;

[0031] Figure 4a It is a schematic structural diagram of a crucible translation mechanism in a preferred embodiment of the continuous high-temperature ingot melting equipment of the present invention;

[0032] Figure 4b It is a structural schematic diagram of another perspective of the crucible translation mechanism in the preferred embodiment of the continuous high-temperature ingot melting equipment of the present invention;

[0033] Figure 5a It is a schematic structural diagram of the crucible lifting mechanism after the ingot crucible is lowered in the preferred embodiment of the continuous high-temperature ingot smelting equipment of the present invention;

[0034] Figure 5b The figure shows a schematic structural diagram of the crucible lifting mechanism in a preferred embodiment of the continuous high-temperature ingot smelting equipment of the present invention after the ingot crucible rises to a preset position;

[0035] Figure 5c Shown Figure 5a Enlarged view of Part II. DETAILED DESCRIPTION

[0036] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0037] It should also be noted that the directions or positional relationships indicated by terms such as “upper”, “lower”, “front”, “back”, “left”, “right”, “vertical”, “horizontal”, “top”, “bottom”, “inside” and “outside” are based on the directions or positional relationships shown in the accompanying drawings and are only for the convenience of describing the present invention and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they should not be understood as limiting the present invention.

[0038] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art of the present invention. The terms used in the specification of the present invention herein are only for the purpose of describing specific embodiments and are not intended to limit the present invention.

[0039] like Figure 1 , 2 As shown in Figures 3, 4a, 4b, 5a, 5b, and 5c, in the preferred embodiment of the continuous high-temperature ingot smelting equipment of the present invention, it mainly includes a feed chamber 1, a processing chamber 10, and a discharge chamber 2 which are arranged in sequence and continuously. The processing chamber 10 includes a cooling section 12 and at least one transfer section 11. Each transfer section 11 is connected to the top with at least one high-temperature smelting chamber 20. In this preferred embodiment, two high-temperature smelting chambers are preferably arranged on the top of the transfer section. Among them, a feed isolation door mechanism 30 is provided between the transfer section 11 and the feed chamber 1, a discharge isolation door mechanism 40 is provided between the cooling section 12 and the discharge chamber 2, and a partition isolation door 50 is provided between the transfer section 11 and the cooling section 12. A crucible translation mechanism 60 is provided in the processing chamber 10, and the ingot crucible 4 is placed on the crucible translation vehicle 3. The crucible translation vehicle 3 is controlled by the crucible translation mechanism 60 and translates according to a preset trajectory.

[0040] like Figure 1 , 2As shown in Figure 3, in this preferred embodiment, the feed chamber 1 may include a feed chamber furnace shell 1a and a feed chamber furnace door 1b, wherein the feed chamber furnace door 1b may be arranged at the top or side of the feed chamber furnace shell 1a. The feed chamber furnace door 1b is opened, and the ingot crucible 4 can be placed in the corresponding crucible translation vehicle 3. In this preferred embodiment, it is preferred that the feed chamber 1 also includes a feed translation mechanism 1c, so as to send the crucible translation vehicle 3 carrying the ingot crucible 4 into the processing chamber 10. Specifically, the feed translation mechanism 1c may include a feed guide rail arranged in the feed chamber furnace shell 1a, a plurality of rollers arranged on the feed guide rail, a chain driving all rollers to rotate synchronously, a sprocket driving the chain to rotate, a sprocket shaft fixing the sprocket outside the feed chamber furnace shell 1a, and a feed drive motor driving the sprocket shaft to rotate. The drive motor drives the sprocket to rotate through the sprocket shaft, thereby driving the rollers on the chain to roll on the feed guide rail. When the crucible translation vehicle 3 is placed on the rollers of the feed translation mechanism 1 c , the crucible translation vehicle 3 is sent into the processing chamber 10 along the guide rail direction.

[0041] like Figure 1 , 2 As shown, in this preferred embodiment, the processing chamber 10 is preferably provided with a processing chamber furnace shell 13, and a partition isolation door 50 arranged in the processing chamber furnace shell 13, and the partition isolation door 50 divides the processing chamber into a transfer section 11 and a cooling section 12. In this preferred embodiment, a partition isolation door 50 is provided in each transfer section. Among them, a heat preservation layer 14 is provided on the inner side of the processing chamber furnace shell 13 of the transfer section, and a crucible lifting mechanism 80 is provided in the transfer section 11 corresponding to each high-temperature smelting chamber, and the crucible lifting mechanism 80 is located below the crucible translation mechanism 60.

[0042] like Figure 1 , 2As shown, in this preferred embodiment, the high-temperature smelting chamber 20 includes a furnace body 21 fixed on the top of the transfer section 11, a heat preservation assembly 22 arranged in the furnace body 21, a smelting crucible 24 arranged in the heat preservation assembly 22, a heating body 23 arranged between the smelting crucible 24 and the heat preservation assembly 22, and a feeding device 25 arranged outside the furnace body 21 and replenishing the crystal raw material into the smelting crucible 24. The heating body 23 is used to heat the smelting crucible 24 according to the process requirements. Specifically, a discharge port 24a is provided at the bottom of the smelting crucible, a plunger rod 26 is provided at the top of the furnace body, and a guide pipe 27 is provided at the bottom of the smelting crucible to extend the discharge port 24a to the inside of the transfer section. The bottom end of the plunger rod 26 matches the discharge port 24a, which can just block the discharge port; the top end of the plunger rod 26 passes through the furnace body 21 and the heat preservation assembly 22 and extends to the outside of the furnace body 21. It is preferred to set a hydraulic lifting mechanism 28 on the top of the furnace body of the high-temperature smelting chamber, and the hydraulic lifting mechanism 28 is connected to the top of the plunger rod 26, and can control the lifting and lowering of the plunger rod 26. When the hydraulic lifting mechanism 28 controls the plunger rod to lift, the plunger rod is separated from the discharge port, the discharge port is opened, and the raw material liquid in the smelting crucible can flow out from the discharge port of the smelting crucible, and is transported to the ingot crucible located in the transfer section of the processing chamber and directly below the flow guide pipe after passing through the flow guide pipe 27. When the hydraulic lifting mechanism 28 controls the plunger rod to descend, the plunger rod descends to the discharge port and blocks the discharge port, so that the discharge port is closed; at this time, the raw material can be replenished into the smelting crucible through the feeding device.

[0043] like Figure 1 , 2As shown in FIGS. 5a, 5b and 5c, in this preferred embodiment, a crucible lifting mechanism 80 is preferably provided at the bottom of the transfer section 11 corresponding to each guide tube 27, so as to lift the ingot crucible from the crucible translation mechanism 60 to the guide tube 27 at the bottom of the high-temperature smelting chamber 20, so as to prevent the raw material liquid from splashing around when it is discharged from the guide tube. The crucible lifting mechanism 80 is preferably provided to include a lifting hydraulic cylinder 81 and a lifting guide rod 82. The lifting hydraulic cylinder 81 is provided at the bottom position of the outer side of the furnace shell 13 of the processing chamber, and the lifting guide rod 82 is driven by the lifting hydraulic cylinder 81 and passes through the bottom side wall of the furnace shell 13 of the processing chamber and then extends to the bottom of the crucible translation mechanism 60. When the crucible translation vehicle slides to the right below the corresponding guide tube, the lifting hydraulic cylinder 81 drives the lifting guide rod 82 to lift, and the lifting guide rod passes through the crucible translation vehicle 3, and lifts the ingot crucible 4 located on the crucible translation vehicle 3 upward, so that the ingot crucible 4 is close to the guide tube 27 at the bottom of the corresponding high-temperature smelting chamber. Specifically, the crucible translation vehicle 3 may include a heat-insulating support plate 3a made of heat-insulating material and a heat-insulating plate frame 3b arranged at the bottom of the heat-insulating support plate 3a; wherein the ingot crucible 4 is arranged on the upper surface of the heat-insulating support plate 3a, the heat-insulating plate frame 3b is mounted on the roller 62 of the crucible translation mechanism, and the heat-insulating support plate 3a is embedded in the heat-insulating plate frame 3b and can be freely removed. When the lifting guide rod 82 of the crucible lifting mechanism passes through the heat-insulating plate frame 3b of the crucible translation vehicle, the lifting guide rod 82 can drive the heat-insulating support plate and the ingot crucible 4 to separate from the heat-insulating plate frame 3b and move upward toward the guide pipe 27.

[0044] In this preferred embodiment, the crucible translation mechanism 60 translates the crucible translation vehicle 3 from the transfer section 11 to the cooling section 12 according to a preset trajectory. Figure 4a , 4b As shown, the crucible translation mechanism 60 is preferably provided to include a translation guide rail 61, a plurality of rollers 62 rotatably arranged on the translation guide rail 61, a chain 63 driving the plurality of rollers 62 to rotate synchronously, a sprocket shaft 65 driven by a translation motor 64, and a sprocket 66 arranged on the sprocket shaft 65. The crucible translation vehicle 4 is slidably arranged on the rollers 62 along the translation guide rail 61, and the sprocket 66 cooperates with the chain 63. The translation guide rail 61 extends from each transfer section 11 to the cooling section 12, and the translation motor 64 drives the sprocket shaft 65 to drive the sprocket 66 to rotate, and drives the rollers 62 to rotate through the chain 63, thereby driving the crucible translation vehicle 4 located on the rollers to move along the translation guide rail 61. It is preferred that the sprocket shaft 65 and the translation motor 64 are arranged outside the furnace shell 13 of the processing chamber, and the chain 63 extends to the inside of the furnace shell 13 of the processing chamber, so that the translation motor 64 does not need to be in a high temperature environment, thereby extending the service life of the entire crucible translation mechanism 60.

[0045] A plurality of transfer sections 11 may be arranged in the processing chamber shell 13 as required, each transfer section 11 is provided with the above-mentioned feeding chamber 1, and all transfer sections 11 are connected to the cooling section 12. In this way, multiple furnaces can be cast at high temperature at the same time, further improving production efficiency.

[0046] like Figure 1 , 2 As shown in Figure 3, in this preferred embodiment, the feed isolation door mechanism 30 is preferably provided, which includes a feed isolation door housing 31 provided between the feed chamber furnace shell 1a and the processing chamber furnace shell 13, two feed isolation doors 32 vertically slidably provided in the feed isolation door housing, and a first hydraulic cylinder 33 for driving the feed isolation door 32 to move up and down. When the feed isolation door 32 needs to be opened, the first hydraulic cylinder 33 is controlled to drive the two feed isolation doors 32 to slide in opposite directions, thereby opening the passage between the feed chamber 1 and the processing chamber 10, so as to send the crucible translation vehicle 3 from the feed chamber 1 into the processing chamber 10; when the feed isolation door 32 needs to be closed, the first hydraulic cylinder 33 is controlled to drive the two feed isolation doors 32 to slide in opposite directions until the gap between the two feed isolation doors 32 is closed, so that the passage between the feed chamber 1 and the processing chamber 10 is closed.

[0047] In the above embodiment, the discharge chamber 2 may include a discharge chamber furnace shell 2a and a discharge chamber furnace door 2b, and the discharge chamber furnace door 2b may be arranged on the top or side of the discharge chamber furnace shell 2a. It is preferred that the discharge chamber 2 further includes a discharge translation mechanism 2c, so as to deliver the crucible translation vehicle 3 containing the ingot crucible 4 from the cooling section 12 into the discharge chamber 2. The discharge translation mechanism 2c may be arranged with reference to the above-mentioned feed translation mechanism 1c.

[0048] In the above embodiment, the discharge isolation door mechanism 40 can also be set up with reference to the above-mentioned feed isolation door mechanism, that is, the discharge isolation door mechanism 40 includes a discharge isolation door shell arranged between the discharge chamber furnace shell and the processing chamber furnace shell 13, two discharge isolation doors vertically slidingly arranged in the discharge isolation door shell, and a second hydraulic cylinder for driving the discharge isolation door to move up and down.

[0049] In a preferred embodiment of the processing method of the continuous high-temperature ingot melting equipment of the present invention, the following steps are included:

[0050] S10. Setting the continuous high temperature ingot melting equipment as described above;

[0051] S20. For all high-temperature melting chambers on the same transfer section, synchronously control the plunger rod to insert into the discharge port at the bottom of the melting crucible to seal the discharge port; put the raw material into the melting crucible in the corresponding high-temperature melting chamber through the feeding device, evacuate the high-temperature melting chamber and gradually heat it to the working temperature to melt the raw material;

[0052] S31. The ingot crucible is placed on a crucible translation vehicle located in the feed chamber;

[0053] S32. Open the feed isolation door mechanism, control the crucible translation mechanism to translate the crucible translation vehicle carrying the ingot crucible to the transfer section directly below the guide tube of the corresponding high-temperature smelting chamber;

[0054] S33. Repeat steps S31 and S32 according to the number of high-temperature smelting chambers on the corresponding transfer section until there is an ingot crucible under the guide tube of each high-temperature smelting chamber;

[0055] S40. After the raw material in the high-temperature melting chamber is completely melted, the plunger rod of the corresponding high-temperature melting chamber is controlled to lift and separate from the discharge port of the melting crucible, so that the raw material liquid in the melting crucible flows into the corresponding ingot crucible through the guide pipe;

[0056] S50. Open the partition isolation door corresponding to the transfer section, control all the crucible translation vehicles to move to the cooling section through the crucible translation mechanism, and then close the partition isolation door;

[0057] S60. Repeat steps S20 to S50

[0058] S70. Repeat steps S20 to S60 synchronously in other transfer segments;

[0059] S80. When the number of workpieces in the cooling section reaches a preset number, the discharge isolation door mechanism is opened, the crucible translation mechanism is controlled to transfer the workpieces that have completed cooling to the discharge chamber, and the discharge isolation door mechanism is closed.

[0060] In step S10, the equipment may also be provided to include a crucible lifting mechanism, and step S34 may be included between step S33 and step S40. The crucible lifting mechanism may be controlled to rise, and the ingot crucible may be lifted to the bottom of the corresponding guide tube; and step S41 may be included between step S40 and step S50. The crucible lifting mechanism may be controlled to drive the ingot crucible to descend to the corresponding crucible translation vehicle.

[0061] Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in the field without making any creative work, any modifications, equivalent substitutions, improvements, etc. made should be included in the protection scope of the present invention.

Claims

1. A continuous high-temperature ingot melting equipment, characterized in that: It comprises a feeding chamber, a processing chamber and a discharging chamber which are arranged successively in sequence, the processing chamber comprises a cooling section and at least one transfer section, one feeding chamber is provided for each transfer section, a feeding isolation door mechanism is provided between the transfer section and the feeding chamber; a discharging isolation door mechanism is provided between the cooling section and the discharging chamber, and a partition isolation door is provided between the cooling section and each transfer section; at least one high-temperature smelting chamber is connected to the top of each transfer section; A crucible translation mechanism is provided in the processing chamber, and the crucible translation mechanism controls the crucible translation vehicle to translate from each of the transfer sections to the cooling section according to a preset trajectory, and the crucible translation vehicle carries an ingot crucible; Each of the high-temperature smelting chambers comprises a furnace body fixed on the top of the transfer section, a heat preservation component arranged in the furnace body, a smelting crucible arranged at the center of the heat preservation component, a heater arranged between the smelting crucible and the heat preservation component, and a feeding device arranged outside the furnace body for adding crystal raw materials into the smelting crucible; a discharge port is provided at the bottom of the smelting crucible, a plunger rod is provided at the top of the furnace body and passes through the furnace body and the heat preservation component and matches the discharge port, and a guide pipe is provided at the bottom of the smelting crucible to extend the discharge port into the transfer section.

2. The continuous high-temperature ingot melting equipment according to claim 1, characterized in that: The high-temperature smelting chamber also includes a hydraulic lifting mechanism for controlling the lifting and lowering of the plunger rod.

3. The continuous high-temperature ingot melting equipment according to claim 1, characterized in that: The crucible translation mechanism is arranged at the inner bottom of the processing chamber, and the crucible translation mechanism includes a translation guide rail arranged according to a preset trajectory, a plurality of rollers rotatably arranged on the translation guide rail, a chain driving the plurality of rollers to rotate synchronously, and a translation motor driving the chain to rotate through a sprocket shaft, and the crucible translation vehicle frame is arranged on the rollers.

4. The continuous high-temperature ingot melting equipment according to claim 1, characterized in that: The crucible translation vehicle includes an insulation support plate made of insulation material and an insulation plate frame arranged at the bottom of the insulation support plate; the ingot crucible is arranged on the upper surface of the insulation support plate, the insulation plate frame is mounted on the rollers of the crucible translation mechanism, and the insulation support plate is embedded in the insulation plate frame.

5. The continuous high-temperature ingot melting equipment according to claim 4, characterized in that: A crucible lifting mechanism is provided at the bottom of the transfer section corresponding to each of the high-temperature smelting chambers. The crucible lifting mechanism lifts the ingot crucible on the crucible translation vehicle to below the guide pipe corresponding to the high-temperature smelting chamber or drops the ingot crucible from below the guide pipe corresponding to the high-temperature smelting chamber onto the crucible translation vehicle according to a preset process.

6. The continuous high-temperature ingot melting equipment according to claim 5, characterized in that: The crucible lifting mechanism includes a lifting hydraulic cylinder arranged at the outer bottom of the processing chamber, and a lifting guide rod driven by the lifting hydraulic cylinder and passing through the bottom side wall of the processing chamber, and the lifting guide rod is arranged opposite to the guide pipe.

7. The continuous high-temperature ingot melting equipment according to claim 1, characterized in that: The thermal insulation door mechanism includes a thermal insulation guide rail horizontally arranged on the top of the transfer section, a thermal insulation door that can seal and cover the opening of the high-temperature chamber furnace shell, a guide roller fixedly arranged on the end face of the thermal insulation door and slidably arranged in the thermal insulation guide rail, and a first driving mechanism that drives the thermal insulation door to slide back and forth.

8. The continuous high-temperature ingot melting equipment according to claim 1, characterized in that: The inner side wall of the transfer section is provided with a processing heat-insulating layer, and the partition isolation door is located above the crucible translation mechanism.

9. The continuous high-temperature ingot melting equipment according to claim 8, characterized in that: The feeding chamber includes a feeding chamber furnace shell and a feeding chamber furnace door; the feeding isolation door mechanism includes an isolation door shell arranged between the feeding chamber furnace shell and the transfer section, two thermal insulation isolation doors that can slide up and down are vertically arranged in the isolation door shell, and an isolation door lifting mechanism is arranged outside the feeding chamber furnace shell.

10. A processing method for a continuous high-temperature ingot melting equipment, characterized in that: The following steps are involved: S10. A continuous high-temperature ingot smelting device as described in any one of claims 1 to 9 is provided; S20. For all high-temperature melting chambers on the same transfer section, synchronously control the plunger rod to insert into the discharge port at the bottom of the melting crucible to seal the discharge port; put the raw material into the melting crucible in the corresponding high-temperature melting chamber through the feeding device, evacuate the high-temperature melting chamber and gradually heat it to the working temperature to melt the raw material; S31. The ingot crucible is placed on a crucible translation vehicle located in the feed chamber; S32. Open the feed isolation door mechanism, control the crucible translation mechanism to translate the crucible translation vehicle carrying the ingot crucible to the transfer section directly below the guide tube of the corresponding high-temperature smelting chamber; S33. Repeat steps S31 and S32 according to the number of high-temperature smelting chambers on the corresponding transfer section until there is an ingot crucible under the guide tube of each high-temperature smelting chamber; S40. After the raw material in the high-temperature melting chamber is completely melted, the plunger rod of the corresponding high-temperature melting chamber is controlled to lift and separate from the discharge port of the melting crucible, so that the raw material liquid in the melting crucible flows into the corresponding ingot crucible through the guide pipe; S50. Open the partition isolation door corresponding to the transfer section, control all the crucible translation vehicles to move to the cooling section through the crucible translation mechanism, and then close the partition isolation door; S60. Repeat steps S20 to S50 S70. Repeat steps S20 to S60 synchronously in other transfer segments; S80. When the number of workpieces in the cooling section reaches a preset number, the discharge isolation door mechanism is opened, the crucible translation mechanism is controlled to transfer the workpieces that have completed cooling to the discharge chamber, and the discharge isolation door mechanism is closed.

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