Focus compensation method, system and device and storage medium

By selecting the focus correction coefficient based on the temperature range of the optical lens and calculating the compensated focus position, the problem of focal position change caused by the deformation of the optical lens in high temperature environment is solved, and higher focal position accuracy and laser cutting accuracy are achieved. sex.

CN119457468APending Publication Date: 2025-02-18HANS LASER TECH IND GRP CO LTD +1
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Patent Information

Application Number
CN202411493702.8
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-10-24
Publication Date
2025-02-18

AI Technical Summary

Technical Problem

In high temperature environments, the deformation of the optical lens causes the focal position of the laser beam to change, affecting the accuracy and consistency of the cutting, and the focus compensation accuracy of the prior art is insufficient.

Method used

By obtaining the current temperature of the optical lens, selecting the corresponding focus correction coefficient according to different temperature intervals, using the focus compensation formula to calculate the compensated focus position, and adjusting the focus of the optical lens to the compensated position.

Benefits of technology

It realizes more precise adjustment of the focal position of the optical lens, and is more accurate after compensation of the focal position, improving the accuracy and consistency of laser cutting.

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Abstract

The invention discloses a focus compensation method, system and device, and a storage medium. The method comprises the following steps: obtaining the current temperature of an optical lens; according to the temperature interval where the current temperature of the optical lens is located, a corresponding focus correction coefficient is selected, and different temperature intervals correspond to different focus correction coefficients; calculating a compensated focus position according to a focus compensation formula; and adjusting the focus of the optical lens to the compensated focus position. According to the focus compensation method, the focus position of the optical lens can be more accurately compensated according to the temperature of the optical lens.
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Description

Technical Field

[0001] The present application relates to the technical field of groove processing, and in particular to a focus compensation method, system, device and storage medium. Background Art

[0002] With the development of the times, modern industry has higher and higher requirements for cutting efficiency and automation. In the field of laser cutting, laser power has rapidly increased from low power (such as 3kw, 6kw) to high power (such as 20kw, 30kw, 40kw), and is widely used in industries such as ships, steel structures, and engineering machinery, greatly improving production efficiency.

[0003] Since optical lenses are generally made of quartz, which will deform in high temperature environments, and optical lenses focus through the principle of refraction, the focus of the deformed optical lenses will be offset to a certain extent. The laser beam will form a focus after passing through the collimator and focusing lens. The collimator and focusing lens will deform when the temperature rises, and the position of the focus formed by the laser beam passing through the collimator and focusing lens will also change. When the focus position changes, the cutting position will also change, which will affect the cutting accuracy and consistency.

[0004] In the related art, although the focus is compensated according to the temperature of the optical lens, there is still the problem of insufficient compensation accuracy and inaccurate focus position. Summary of the invention

[0005] To this end, the present application proposes a focus compensation method that can more accurately compensate the focus position of an optical lens according to the temperature of the optical lens.

[0006] The present application also proposes a laser focus compensation system.

[0007] The application also proposes a laser processing device.

[0008] The present application also proposes a computer-readable storage medium.

[0009] According to the first aspect of the present application, the focus compensation method includes the following steps:

[0010] Get the current temperature of the optical lens;

[0011] Selecting a corresponding focus correction coefficient according to the temperature range of the current temperature of the optical lens, wherein different temperature ranges correspond to different focus correction coefficients;

[0012] Calculate the compensated focus position according to the focus compensation formula;

[0013] The focus of the optical lens is adjusted to a compensated focus position.

[0014] The focus compensation method according to the embodiment of the present application has at least the following beneficial effects: due to different temperature ranges, the deformation amount of the optical lens is different. By using different focus correction coefficients in different temperature ranges, the focus position of the optical lens can be adjusted more accurately, and the focus position is more accurate after compensation.

[0015] According to some embodiments of the present application, the focus compensation formula is: Among them, F is the focus position after compensation, f is the preset focus position, and A N is the focus correction coefficient corresponding to the Nth temperature interval, T is the current temperature of the optical lens, T minN is the minimum value of the Nth group of temperature intervals, T maxN is the maximum value of the Nth group of temperature intervals, and N is the ordinal number of the temperature interval.

[0016] According to some embodiments of the present application, the optical lens includes a collimating lens or a focusing lens.

[0017] According to some embodiments of the present application, the step of “obtaining the current temperature of the optical lens” includes the step of “obtaining the current temperature of the collimating lens and the focusing lens”;

[0018] The “selecting a corresponding focus correction coefficient according to the temperature range of the current temperature of the optical lens, wherein different temperature ranges correspond to different focus correction coefficients” comprises the following steps:

[0019] Selecting a focus correction coefficient corresponding to the collimator according to the temperature interval of the current temperature of the collimator, wherein the focus correction coefficient of the collimator corresponds to different values ​​in different temperature intervals;

[0020] According to the temperature range in which the current temperature of the focusing mirror is located, a focus correction coefficient corresponding to the focusing mirror is selected, wherein the focus correction coefficient of the focusing mirror corresponds to different values ​​in different temperature ranges.

[0021] According to some embodiments of the present application, the focus compensation formula is:

[0022] ,

[0023] Among them, F is the focus position after compensation, f is the preset focus position, and A cN is the focus correction coefficient of the collimator in the Nth temperature interval, T c is the current temperature of the collimator mirror, T minN is the minimum value of the Nth group of temperature intervals, B fN is the focus correction coefficient of the focusing mirror in the Nth temperature interval, T fis the current temperature of the focusing mirror, T maxN is the maximum value of the Nth group of temperature intervals, and N is the ordinal number of the temperature interval.

[0024] According to some embodiments of the present application, when T min1 = 0 and T max1 =35, A c1 Satisfies the relationship 0 c1 ≤0.4, B f1 Satisfies the relationship 0 f1 ≤0.1; when T min2 =35 and T max2 =60, A c2 Satisfies the relationship 0.4 c1 ≤0.8, B f2 Satisfies the relationship 0.1 f2 ≤0.3; when T min3 =60 and T max3 =80, A c3 Satisfies the relationship 0.8 c1 ≤1.2, B f3 Satisfies the relationship 0.3 f3 ≤0.5.

[0025] According to some embodiments of the present application, when T min1 = 0 and T max1 =35, A c1 =0.2, B f1 =0.05; when T min2 =35 and T max2 =60, A c2 =0.6, B f2 =0.2; when T min3 =60 and T max3 =80, A c3 =1, B f3 =0.4.

[0026] According to the focus compensation system of the second aspect embodiment of the present application, it includes:

[0027] A temperature detection module is used to obtain the current temperature of the optical lens;

[0028] A coefficient selection module, used to select a corresponding focus correction coefficient according to the temperature range of the current temperature of the optical lens, wherein different temperature ranges correspond to different focus correction coefficients;

[0029] A calculation module, used for calculating the compensated focus position according to a focus compensation formula;

[0030] ​​​​​​An adjustment module is used to adjust the focus of the optical lens to a compensated focus position.

[0031] The focus compensation system according to the embodiment of the present application has at least the following beneficial effects: due to different temperature ranges, the deformation amount of the optical lens is different. By using different focus correction coefficients in different temperature ranges, the focus position of the optical lens can be adjusted more accurately, and the focus position is more accurate after compensation.

[0032] A laser processing device according to a third aspect of the present application includes:

[0033] a memory storing a computer program;

[0034] A processor, wherein the processor can implement the steps of the focus compensation method described above when executing the computer program.

[0035] The laser processing equipment according to the embodiment of the present application has at least the following beneficial effects: by using the above-mentioned focus compensation method, the focus position of the optical lens can be adjusted more accurately, the focus position is more accurate after compensation, and the processing accuracy and consistency of the laser processing equipment are better.

[0036] According to a computer-readable storage medium of the fourth aspect of the present application, a computer program is stored on the computer-readable storage medium, and when the computer program is executed by a processor, the steps of the above-mentioned focus compensation method are implemented.

[0037] The computer-readable storage medium according to the embodiment of the present application has at least the following beneficial effects: by using the above-mentioned focus compensation method, the focus position of the optical lens can be adjusted more accurately, and the focus position is more accurate after compensation.

[0038] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become apparent from the description below, or will be learned through the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] The present application is further described below with reference to the accompanying drawings and embodiments, wherein:

[0040] Figure 1 is a flow chart of a focus compensation method according to an embodiment of the present application;

[0041] Figure 2 is a schematic diagram of a collimating lens and a focusing lens;

[0042] Figure 3 A software interface diagram of the focus compensation method of the embodiment of the present application when being implemented;

[0043] Figure 4is a schematic diagram of a focus compensation system according to an embodiment of the present application;

[0044] Figure 5 A schematic diagram of a laser processing device according to an embodiment of the present application.

[0045] Reference numerals: optical lens 100, collimating lens 110, focusing lens 120;

[0046] Focus compensation system 200, temperature detection module 210, coefficient selection module 220, calculation module 230, adjustment module 240;

[0047] Laser processing equipment 300 , memory 310 , and processor 320 . DETAILED DESCRIPTION

[0048] The embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application.

[0049] In the description of the present application, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0050] In the description of this application, "several" means one or more than one, "more" means two or more than two, "greater than", "less than", "exceed", etc. are understood to exclude the number itself, and "above", "below", "within", etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0051] In the description of this application, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in this application based on the specific content of the technical solution.

[0052] In the description of the present application, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0053] Reference Figure 1 According to the focus compensation method of the first aspect of the present application, the method comprises the following steps:

[0054] S100, obtaining the current temperature of the optical lens 100;

[0055] S200, selecting a corresponding focus correction coefficient according to the temperature range of the current temperature of the optical lens 100, wherein different temperature ranges correspond to different focus correction coefficients;

[0056] S300, calculating the compensated focus position according to the focus compensation formula;

[0057] S400, adjusting the focus of the optical lens 100 to a compensated focal position.

[0058] The focus compensation method according to the embodiment of the present application has at least the following beneficial effects: due to different temperature ranges, the deformation amount of the optical lens 100 is different. By using different focus correction coefficients in different temperature ranges, the focus position of the optical lens 100 can be adjusted more accurately, and the focus position is more accurate after compensation.

[0059] It should be noted that in step S400, the focus of the optical lens 100 is adjusted to the compensated focal position, and the position of the optical lens 100 along the optical axis can be adjusted by a driving member (such as a motor-driven screw nut mechanism, a linear motor, etc.), thereby adjusting the focal position of the optical lens 100.

[0060] Reference Figure 2 In some embodiments of the present application, the focus compensation formula is Among them, F is the focus position after compensation, f is the preset focus position, and A N is the focus correction coefficient corresponding to the Nth temperature interval, T is the current temperature of the optical lens 100, T minN is the minimum value of the Nth group of temperature intervals, T maxN is the maximum value of the Nth group of temperature intervals, and N is the ordinal number of the temperature interval.

[0061] By matching different focus correction coefficients to different temperature ranges and weighting the focus correction coefficient with the current temperature of the optical lens 100 and the minimum value of the temperature range, it is helpful to accurately compensate for the focus position of the optical lens 100 at different temperatures.

[0062] In some embodiments of the present application, the optical lens 100 includes a collimating lens 110 or a focusing lens 120 .

[0063] By compensating the focal position of the collimating lens 110 or the focusing lens 120 , it is helpful to reduce the adverse effect of temperature on the focal position of the collimating lens 110 or the focusing lens 120 , thereby improving the accuracy of the focal position.

[0064] In some embodiments of the present application, “obtaining the current temperature of the optical lens 100 ” includes the step of “obtaining the current temperature of the collimating lens 110 and the focusing lens 120 ”;

[0065] “Selecting a corresponding focus correction coefficient according to the temperature range of the current temperature of the optical lens 100, wherein different temperature ranges correspond to different focus correction coefficients” includes the following steps:

[0066] Selecting a focus correction coefficient corresponding to the collimator 110 according to the temperature range in which the current temperature of the collimator 110 is located, wherein the focus correction coefficient of the collimator 110 corresponds to different values ​​in different temperature ranges;

[0067] According to the temperature range of the current temperature of the focusing mirror 120 , a corresponding focus correction coefficient of the focusing mirror 120 is selected, wherein the focus correction coefficient of the focusing mirror 120 corresponds to different values ​​in different temperature ranges.

[0068] By compensating the focal positions of the collimating mirror 110 and the focusing mirror 120 at the same time and compensating the focal positions of the collimating mirror 110 and the focusing mirror 120 according to the temperature difference, it is helpful to reduce the adverse effect of temperature on the focal positions of the collimating mirror 110 and the focusing mirror 120, thereby improving the accuracy of the focal positions.

[0069] In some embodiments of the present application, the focus compensation formula is:

[0070] ,

[0071] Among them, F is the focus position after compensation, f is the preset focus position, and A cN is the focus correction coefficient of the collimator 110 in the Nth temperature range, T c is the current temperature of the collimating mirror 110, T minN is the minimum value of the Nth group of temperature intervals, B fNis the focus correction coefficient of the focusing mirror 120 in the Nth temperature range, T f is the current temperature of the focusing mirror 120, T maxN is the maximum value of the Nth group of temperature intervals, and N is the ordinal number of the temperature interval.

[0072] By matching different focus correction coefficients with different temperature intervals, weighting the focus correction coefficient of the collimating lens 110 with the minimum value of the temperature interval and the current temperature of the collimating lens 110, and weighting the focus correction coefficient of the focusing lens 120 with the minimum value of the temperature interval and the current temperature of the collimating lens 110, it is helpful to accurately compensate for the focal position of the collimating lens 110 and the focusing lens 120 after the joint action at different temperatures.

[0073] In the improved solution of the above embodiment, when T min1 = 0 and T max1 =35, A c1 Satisfies the relationship 0 c1 ≤0.4, B f1 Satisfies the relationship 0 f1 ≤0.1; when T min2 =35 and T max2 =60, A c2 Satisfies the relationship 0.4 c1 ≤0.8, B f2 Satisfies the relationship 0.1 f2 ≤0.3; when T min3 =60 and T max3 =80, A c3 Satisfies the relationship 0.8 c1 ≤1.2, B f3 Satisfies the relationship 0.3 f3 ≤0.5.

[0074] For the collimating lens 110 and focusing lens 120 made of conventional quartz material, after the temperature is divided into the above three temperature intervals and the corresponding focus correction coefficients are matched, the focus position can be compensated more accurately, thereby improving the focus position accuracy.

[0075] In the improved solution of the above embodiment, when T min1 = 0 and T max1 =35, A c1 =0.2, B f1 =0.05; when T min2 =35 and T max2 =60, A c2 =0.6, B f2 =0.2; when T min3 =60 and T max3 =80, A​​​​​​c3 =1, B f3 =0.4.

[0076] In different temperature ranges, a focus correction coefficient with a better focus position compensation effect is correspondingly selected, which is beneficial to further accurately compensate the focus position, thereby improving the focus position accuracy.

[0077] Reference Figure 3 , Figure 3 The software interface diagram of the focus compensation method of the embodiment of the present application is implemented, wherein the temperature of the collimator 110 is 30.78°C, and the temperature of the focusing lens 120 is 30.46°C. At this time, the temperature of the collimator 110 and the focusing lens 120 is the temperature before the laser processing equipment 300 starts working. At this time, the preset focus position is -5, and the actual focus position after supplementation is -6.99.

[0078] According to the focus compensation system 200 of the second aspect embodiment of the present application, it includes a temperature detection module 210, a coefficient selection module 220, a calculation module 230 and an adjustment module 240. The temperature detection module 210 is used to obtain the current temperature of the optical lens 100. The coefficient selection module 220 is used to select the corresponding focus correction coefficient according to the temperature range in which the current temperature of the optical lens 100 is located, wherein different temperature ranges correspond to different focus correction coefficients. The calculation module 230 is used to calculate the compensated focal position according to the focus compensation formula. The adjustment module 240 is used to adjust the focus of the optical lens 100 to the compensated focal position.

[0079] The focus compensation system according to the embodiment of the present application has at least the following beneficial effects: due to different temperature ranges, the deformation amount of the optical lens 100 is different. By using different focus correction coefficients in different temperature ranges, the focus position of the optical lens 100 can be adjusted more accurately, and the focus position is more accurate after compensation.

[0080] Reference Figure 5 According to a third aspect of the present application, a laser processing device 300 includes a memory 310 and a processor 320. The memory 310 stores a computer program. When the processor 320 executes the computer program, the steps of the focus compensation method described above can be implemented.

[0081] According to the laser processing equipment 300 of the embodiment of the present application, there are at least the following beneficial effects: by using the above-mentioned focus compensation method, the focus position of the optical lens 100 can be adjusted more accurately, the focus position is more accurate after compensation, and the processing accuracy and consistency of the laser processing equipment 300 are better.

[0082] The memory 310 includes at least one type of readable storage medium, and the readable storage medium includes flash memory, hard disk, multimedia card, card-type memory (such as SD or DX memory, etc.), random access memory (RAM), static random access memory (SRAM), read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), programmable read-only memory (PROM), magnetic memory, magnetic disk, optical disk, etc. In some embodiments, the memory 310 can be an internal storage unit of the laser processing device 300, such as a hard disk or memory of the laser processing device 300. In other embodiments, the memory 310 can also be an external storage device of the laser processing device 300, such as a plug-in hard disk equipped on the laser processing device 300, a smart memory card (Smart Media Card, SMC), a secure digital (Secure Digital, SD) card, a flash card (FlashCard), etc. Of course, the memory 310 can also include both the internal storage unit of the laser processing device 300 and its external storage device. In this embodiment, the memory 310 is generally used to store the operating system and various application software installed in the laser processing device 300, such as the program code of the method for smoothing the corners of arcs, etc. In addition, the memory 310 can also be used to temporarily store various data that have been output or will be output.

[0083] The processor 320 may be a central processing unit (CPU), a controller, a microcontroller, a microprocessor, or other data processing chips in some embodiments. The processor 320 is generally used to control the overall operation of the laser processing device 300. In this embodiment, the processor 320 is used to run the program code stored in the memory 310 or process data, such as running the program code of the smoothing method of the corners of the arcs.

[0084] In addition, the laser processing equipment 300 generally includes a display, a communication interface and a bus. The memory 310, the processor 320, the display and the communication interface can communicate with each other through the bus. The display screen is configured to display the user operation interface preset in the initial setting mode, and the display screen can also display the process control window. The communication interface may include a wireless network interface or a wired network interface.

[0085] According to a computer-readable storage medium of the fourth aspect of the present application, a computer program is stored on the computer-readable storage medium, and when the computer program is executed by a processor, the steps of the above-mentioned focus compensation method are implemented.

[0086] The computer-readable storage medium according to the embodiment of the present application has at least the following beneficial effects: by using the above-mentioned focus compensation method, the focus position of the optical lens 100 can be adjusted more accurately, and the focus position is more accurate after compensation.

[0087] The computer-readable storage medium provided in the embodiments of the present application may be a USB flash drive, but is not limited to electrical, magnetic, optical, electromagnetic, infrared, or semiconductor systems, systems or devices, or any combination thereof. More specific embodiments of computer-readable storage media may include, but are not limited to: an electrical connection with one or more wires, a portable computer disk, a hard disk, a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber, a portable compact disk read-only memory (CD-ROM), an optical storage device or a magnetic storage device, or any suitable combination thereof.

[0088] In this embodiment, the computer readable storage medium can be any tangible medium containing or storing a program that can be used by or in conjunction with an instruction execution system, system, or device. The program code contained on the computer readable storage medium can be transmitted using any appropriate medium, including but not limited to: wires, optical cables, RF (radio frequency), etc., or any suitable combination of the above.

[0089] The computer-readable storage medium may be included in the electronic device, or may exist independently without being loaded into the electronic device.

[0090] The computer program for executing the present application can be written in one or more programming languages ​​or a combination thereof, including object-oriented programming languages, such as Java, Smalltalk, C++, and conventional procedural programming languages, such as "C" or similar programming languages. The program code can be executed entirely on the user's computer, partially on the user's computer, as a separate software package, partially on the user's computer and partially on a remote computer, or entirely on a remote computer or server. In the case of a remote computer, the remote computer can be connected to the user's computer through any type of network, including a local area network (LAN) or a wide area network (WAN), or can be connected to an external computer (e.g., using an Internet service provider to connect through the Internet).

[0091] The embodiments of the present application are described in detail above in conjunction with the accompanying drawings, but the present application is not limited to the above embodiments. Various changes can be made within the knowledge of ordinary technicians in the relevant technical field without departing from the purpose of the present application. In addition, the embodiments of the present application and the features in the embodiments can be combined with each other without conflict.

Claims

1. A focus compensation method, characterized in that: The following steps are involved: Get the current temperature of the optical lens; Selecting a corresponding focus correction coefficient according to the temperature range of the current temperature of the optical lens, wherein different temperature ranges correspond to different focus correction coefficients; Calculate the compensated focus position according to the focus compensation formula; The focus of the optical lens is adjusted to a compensated focus position.

2. The focus compensation method according to claim 1, characterized in that: The focus compensation formula is: Among them, F is the focus position after compensation, f is the preset focus position, and A N is the focus correction coefficient corresponding to the Nth temperature interval, T is the current temperature of the optical lens, T minN is the minimum value of the Nth group of temperature intervals, T maxN is the maximum value of the Nth temperature interval, and N is the ordinal number of the temperature interval.

3. The focus compensation method according to claim 2, characterized in that: The optical lens includes a collimating lens or a focusing lens.

4. The focus compensation method according to claim 1, characterized in that: The step of “obtaining the current temperature of the optical lens” includes the step of “obtaining the current temperature of the collimating lens and the focusing lens”; The “selecting a corresponding focus correction coefficient according to the temperature range of the current temperature of the optical lens, wherein different temperature ranges correspond to different focus correction coefficients” includes the following steps: Selecting a focus correction coefficient corresponding to the collimator according to the temperature interval of the current temperature of the collimator, wherein the focus correction coefficient of the collimator corresponds to different values ​​in different temperature intervals; According to the temperature range in which the current temperature of the focusing mirror is located, a focus correction coefficient corresponding to the focusing mirror is selected, wherein the focus correction coefficient of the focusing mirror corresponds to different values ​​in different temperature ranges.

5. The focus compensation method according to claim 4, characterized in that: The focus compensation formula is: , Among them, F is the focus position after compensation, f is the preset focus position, and A cN is the focus correction coefficient of the collimator in the Nth temperature interval, T c is the current temperature of the collimator mirror, T minN is the minimum value of the Nth group of temperature intervals, B fN is the focus correction coefficient of the focusing mirror in the Nth temperature interval, T f is the current temperature of the focusing mirror, T maxN is the maximum value of the Nth temperature interval, and N is the ordinal number of the temperature interval.

6. The focus compensation method according to claim 5, characterized in that: When T min1 = 0 and T max1 =35, A c1 Satisfies the relationship 0 c1 ≤0.4, B f1 Satisfies the relationship 0 f1 ≤0.1; when T min2 =35 and T max2 =60, A c2 Satisfies the relationship 0.4 c1 ≤0.8, B f2 Satisfies the relationship 0.1 f2 ≤0.3; when T min3 =60 and T max3 =80, A c3 Satisfies the relationship 0.8 c1 ≤1.2, B f3 Satisfies the relationship 0.3 f3 ≤0.5.​​​​​​ 7. The focus compensation method according to claim 6, characterized in that: When T min1 = 0 and T max1 =35, A c1 =0.2, B f1 =0.05; when T min2 =35 and T max2 =60, A c2 =0.6, B f2 =0.2; when T min3 =60 and T max3 =80, A c3 =1, B f3 =0.

4.

8. A focus compensation system, characterized in that: include: A temperature detection module is used to obtain the current temperature of the optical lens; A coefficient selection module, used to select a corresponding focus correction coefficient according to the temperature range of the current temperature of the optical lens, wherein different temperature ranges correspond to different focus correction coefficients; A calculation module, used for calculating the compensated focus position according to a focus compensation formula; An adjustment module is used to adjust the focus of the optical lens to a compensated focus position.

9. A laser processing device, characterized in that: include: a memory storing a computer program; A processor, wherein when executing the computer program, the processor can implement the steps of the focus compensation method according to any one of claims 1 to 7.

10. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores a computer program, and when the computer program is executed by a processor, the steps of the focus compensation method according to any one of claims 1 to 7 are implemented.

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