Planar motor with iron core structure

Abstract

The invention relates to the technical field of motors, and provides a planar motor with an iron core structure, the planar motor comprises a stator component, a rotor component and an air floatation component, the stator component comprises a permanent magnet array and a fixed plate, the fixed plate is arranged on one side of the permanent magnet array, and an air floatation surface is formed on the surface of one side, far away from the permanent magnet array, of the fixed plate; the mover part can be movably arranged on one side of the fixing plate along the air floating surface, the mover part comprises a coil and an iron core, and the coil is arranged outside the iron core in a sleeving mode; the air floatation component and the rotor component are relatively fixed, and the air floatation component carries out air floatation supporting on the rotor component. Through the arrangement, the iron core provides a magnetic conduction path, the magnetic flux of the permanent magnets and the coil is increased, the electromagnetic coupling strength is enhanced, the thrust performance of the planar motor is improved, the number of the permanent magnets is reduced, and the cost is reduced. And the magnetic attraction force exists between the iron core and the permanent magnet array, so that the preloading force can be provided for the air floatation component, the air floatation component is prevented from being configured with an independent preloading component, and the compactness of the planar motor is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of motors, and in particular to a planar motor with an iron core structure. Background Art

[0002] Planar motors, also known as two-dimensional linear motors or XY stages, are motor systems that provide precise motion control on a flat surface. Thrust performance and compactness are two very important characteristics of planar motors that directly affect the range and efficiency of planar motors. Thrust performance refers to the force of linear motion that a planar motor can generate, and compactness refers to whether the overall size of a planar motor is small relative to its output capacity.

[0003] In the related art, the planar motor includes a permanent magnet unit and a coil unit. When improving the thrust performance and compactness of the planar motor, it is mainly achieved by improving the structure of the permanent magnet unit, such as increasing the number of permanent magnets and cleverly arranging the permanent magnets. Although it can improve the magnetic field strength of the permanent magnet unit to a certain extent and improve the performance of the planar motor to a certain extent, increasing the number of permanent magnets will inevitably increase the cost of the planar motor, and the degree of improvement in the performance of the planar motor is limited.

[0004] Therefore, how to solve the high cost problem existing in the related art when improving the thrust performance and compactness of planar motors has become an important technical problem to be solved by those skilled in the art. Summary of the invention

[0005] The present invention provides a planar motor with an iron core structure, so as to solve the defect of high cost in the related art when improving the thrust performance and compactness of the planar motor.

[0006] The present invention provides a planar motor with an iron core structure, comprising: The stator component comprises a fixed permanent magnet array and a fixing plate, wherein the fixing plate is arranged on one side of the plane where the permanent magnet array is located, and a surface of the fixing plate on one side away from the permanent magnet array forms an air bearing surface; A mover component, which can be movably arranged along the air bearing surface on a side of the fixed plate away from the permanent magnet array, the mover component comprising a coil and an iron core, and the coil is sleeved on the outside of the iron core; The air-floating component is relatively fixed to the movable component, and the air-floating component is suitable for cooperating with the air-floating surface to provide air-floating support to the movable component.

[0007] According to a planar motor with an iron core structure provided by the present invention, the air floating component includes a plurality of air floating blocks, and the plurality of air floating blocks are arranged around the circumference of the moving component along the circumference of the moving component.

[0008] According to a planar motor with an iron core structure provided by the present invention, the outer contour of the cross section of the mover component is a rectangle, and the cross section of the mover component is parallel to the air bearing surface; There are four movable parts, which are surrounded by each other to form a square, and the four movable parts are distributed in rotational symmetry about the center of the square.

[0009] According to a planar motor with an iron core structure provided by the present invention, each of the moving components comprises: There are at least two iron cores, each of which is spaced apart along the length direction of the coil, and each of the coils is sleeved outside of each of the iron cores.

[0010] According to a planar motor with an iron core structure provided by the present invention, the mover component further includes: The separator is made of non-magnetic material, and the separator is correspondingly arranged between any two adjacent iron cores, and the separator is fixedly connected to the iron core; And / or, a first cooling mechanism, one first cooling mechanism is correspondingly arranged between any two adjacent iron cores, and the first cooling mechanism is suitable for heat exchange with the iron cores.

[0011] According to a planar motor with an iron core structure provided by the present invention, the iron core comprises: basal part; At least two core parts are provided, each of which is spaced apart along the width direction of the coil, and each of which extends along the length direction of the coil. Each of the core parts is fixedly connected to the base part, and the coil is sleeved on the outside of each core part.

[0012] According to a planar motor with an iron core structure provided by the present invention, at least two coils are sleeved outside each of the iron core parts, and the coils on two adjacent iron core parts are arranged side by side or partially overlapped; The mover component also includes: A second cooling mechanism is provided between any two adjacent coils on each of the core parts, and the second cooling mechanism is suitable for heat exchange with the coils.

[0013] According to a planar motor with an iron core structure provided by the present invention, the permanent magnet array comprises: A first permanent magnet is provided with multiple groups, each group of the first permanent magnets is spaced apart along a first direction, multiple groups of the first permanent magnets are spaced apart along a second direction, the first direction is perpendicular to the second direction, and the first direction and the second direction are both parallel to the air bearing surface, and the length direction of the mover component is parallel to the first direction or the second direction; A second permanent magnet, a group of the second permanent magnet is correspondingly arranged between two adjacent groups of the first permanent magnets, each group of the second permanent magnets is spaced apart along the first direction, any adjacent group of the first permanent magnets and any adjacent group of the second permanent magnets are staggered, the magnetization direction of the second permanent magnet is opposite to the magnetization direction of the first permanent magnet, and the magnetization direction of the first permanent magnet and the magnetization direction of the second permanent magnet are both perpendicular to the air floating surface.

[0014] According to a planar motor with an iron core structure provided by the present invention, the permanent magnet array further includes: A third permanent magnet is disposed between any adjacent first permanent magnets and second permanent magnets, the magnetization direction of the third permanent magnet is parallel to the air-floating surface, the magnetization direction of the first permanent magnet points to the air-floating surface, and the magnetization direction of the third permanent magnet points to the first permanent magnet adjacent to it.

[0015] According to a planar motor with an iron core structure provided by the present invention, the cross-sectional shape of the first permanent magnet is the same as the cross-sectional shape of the second permanent magnet, the cross-sectional shape of the first permanent magnet and the cross-sectional shape of the second permanent magnet are both parallel to the air bearing surface, and the cross-sectional shape of the first permanent magnet is circular or square.

[0016] According to a planar motor with an iron core structure provided by the present invention, along the width direction of the rotor component, the sum of the numbers of the first permanent magnets and the second permanent magnets corresponding to each of the iron cores is a first value, the number of the iron core parts arranged on each of the iron cores is a second value, the second value is a multiple of 3, and the absolute value of the difference between the first value and the second value is 1 or 2.

[0017] The planar motor with an iron core structure provided by the present invention comprises a stator component, a mover component and an air-floating component. The stator component comprises a permanent magnet array and a fixed plate. The positions of the permanent magnet array and the fixed plate are fixed. The fixed plate is arranged on one side of the plane where the permanent magnet array is located. The surface of the fixed plate on one side away from the permanent magnet array forms an air-floating surface. The mover component is arranged on the side of the fixed plate away from the permanent magnet array, and the mover component can move along the air-floating surface. The air-floating component is relatively fixed to the mover component, and the air-floating component can cooperate with the air-floating surface to provide air-floating support for the mover component. The mover component comprises a coil and an iron core, and the coil is sleeved on the outside of the iron core. In this arrangement, after the coil is energized, an Ampere force parallel to the air-floating surface is generated in the magnetic field generated by the permanent magnet array. The Ampere force can make the mover component move relative to the stator component along the air-floating surface, thereby realizing the output of the planar motor. The setting of the iron core provides a magnetic path, increases the magnetic flux between the permanent magnet array and the coil, enhances the electromagnetic coupling strength, improves the thrust performance of the planar motor, and is conducive to reducing the number of permanent magnets used in the permanent magnet array and reducing costs. In addition, there is magnetic attraction between the iron core and the permanent magnet array, which can provide a preload force for the air-floating component, avoid configuring a separate preload component for the air-floating component, reduce costs, avoid the space required for the preload component, and help improve the compactness of the planar motor, solving the high cost problem in related technologies when improving the thrust performance and compactness of the planar motor. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 It is a schematic structural diagram of a planar motor with an iron core structure provided by the present invention (only a partial structure of a stator housing is shown, and a fixing plate and a mover housing are not shown).

[0020] Figure 2 It is a schematic diagram of the relative positions of the four movable components provided by the present invention.

[0021] Figure 3 It is a structural schematic diagram of a planar motor with an iron core structure when the mover component provided by the present invention has two iron cores.

[0022] Figure 4 It is a schematic diagram of the cross-sectional position of a planar motor with an iron core structure provided by the present invention.

[0023] Figure 5 The permanent magnet array provided by the present invention is Figure 4Schematic diagram of the relative positions of the first permanent magnet and the second permanent magnet and the iron core at the cross-sectional position shown.

[0024] Figure 6 It is a schematic structural diagram of the coils on two adjacent core parts provided by the present invention being arranged side by side.

[0025] Figure 7 It is a schematic structural diagram of the partially overlapping arrangement of coils on two adjacent core parts provided by the present invention.

[0026] Figure 8 It is a schematic diagram of the relative angles between the permanent magnet array and the mover component provided by the present invention.

[0027] Fig. 9 is a schematic diagram of the permanent magnet array provided by the present invention Figure 1 .

[0028] Fig.10 is a schematic diagram of the permanent magnet array provided by the present invention Figure 2 .

[0029] Fig.11 is a schematic diagram of the permanent magnet array provided by the present invention Figure 3 .

[0030] Reference numerals: 1. Permanent magnet array; 2. Mover component; 3. Coil; 4. Iron core; 5. Air floating component; 6. Air floating block; 7. Base; 8. Iron core; 9. First permanent magnet; 10. Second permanent magnet; 11. Third permanent magnet; 12. Stator housing; 13. First mover component; 14. Second mover component; 15. Third mover component; 16. Fourth mover component. DETAILED DESCRIPTION

[0031] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the drawings of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0032] Combine the following Figures 1 to 11 A planar motor with an iron core structure according to the present invention is described.

[0033] like Figures 1 to 11 As shown, the planar motor with an iron core structure provided by an embodiment of the present invention includes a stator component, a mover component 2 and an air floating component 5.

[0034] Specifically, the stator component includes a permanent magnet array 1 and a fixing plate, the positions of the permanent magnet array 1 and the fixing plate are fixed, the fixing plate is arranged on one side of the plane where the permanent magnet array 1 is located, and the surface of the fixing plate on the side away from the permanent magnet array 1 forms an air bearing surface. The flatness requirement for the surface of the fixing plate on the side away from the permanent magnet array 1 is relatively high, and specifically, a stainless steel sheet with high flatness can be selected as the fixing plate.

[0035] The mover component 2 is arranged on a side of the fixed plate away from the permanent magnet array 1, and the mover component 2 can move along the air bearing surface. The air bearing component 5 is relatively fixed to the mover component 2, and the air bearing component 5 can cooperate with the air bearing surface to provide air bearing support for the mover component 2.

[0036] The mover component 2 includes a coil 3 and an iron core 4, wherein the coil 3 is sleeved outside the iron core 4. The iron core 4 is made of soft magnetic material and is easily magnetized by the magnetic field generated by the coil 3, thereby generating a magnetic attraction between the iron core 4 and the permanent magnet array 1.

[0037] The stator component serves as the excitation source of the planar motor, and the coil 3 of the mover component 2 forms electromagnetic coupling with the stator excitation source to form the core electromagnetic structure of the planar motor. The thrust of the planar motor is mainly generated by the coil 3 of the mover component 2 and the permanent magnet array 1 of the stator component through electromagnetic coupling.

[0038] In this way, after the coil 3 is energized, an Ampere force parallel to the air-floating surface is generated in the magnetic field generated by the permanent magnet array 1. The Ampere force can make the mover component 2 move along the air-floating surface relative to the stator component, thereby realizing the output of the planar motor. The arrangement of the iron core 4 provides a magnetic conductive path, increases the magnetic flux between the permanent magnet array 1 and the coil 3, enhances the electromagnetic coupling strength, improves the thrust performance of the planar motor, and is conducive to reducing the number of permanent magnets used in the permanent magnet array 1 and reducing costs. Moreover, since the air-floating component 5 requires a preload force to maintain stable air-floating, it is usually necessary to additionally provide a preload component between the air-floating component 5 and the air-floating surface in the prior art. In this embodiment, there is a magnetic attraction between the iron core 4 and the permanent magnet array 1, which can provide a preload force for the air-floating component 5, avoid configuring a separate preload component for the air-floating component 5, reduce costs, avoid the space required for the preload component, and help improve the compactness of the planar motor, solving the problem of high cost in the related art when improving the thrust performance and compactness of the planar motor.

[0039] It should be noted that both the stator component and the mover component 2 have a housing, and the housing of the stator component is a stator housing 12, so that the stator housing 12 and the fixed plate can be enclosed to form a structure with a cavity, and the permanent magnet array 1 is arranged in the cavity, and the bottom wall of the stator housing 12 is fixed to support the permanent magnet array 1. The above-mentioned stator housing 12 can be made of soft magnetic materials such as low-carbon steel, which can not only ensure the strength of the stator housing 12, but also improve the magnetic properties of the stator component. The housing of the mover component 2 is a mover housing, and the coil 3, the iron core 4 and the air flotation component 5 are all arranged inside the mover housing, and an avoidance hole for the air flotation component 5 to interact with the air flotation surface is provided on the mover housing. In order to show the structure of the permanent magnet array 1 and the coordination between the stator component and the mover component 2, the complete structure of the mover housing and the stator housing 12 is not shown in the various figures of the drawings of the specification of the present invention.

[0040] It should be noted that in the embodiment of the present invention, the position of the stator component is fixed, and the mover component 2 can be arranged above the stator component. Since there is a magnetic attraction between the iron core 4 of the mover component 2 and the permanent magnet array 1 of the stator component, the magnetic attraction can balance the gravity of the mover component 2, so the mover component 2 can also be arranged below the stator component. The planar motor provided in the embodiment of the present invention can be applied to different application scenarios and has strong adaptability.

[0041] In the embodiment of the present invention, the permanent magnet array 1 includes a first permanent magnet 9 and a second permanent magnet 10 .

[0042] The first permanent magnets 9 are provided in multiple groups, each group of first permanent magnets 9 is spaced apart along the first direction, and multiple groups of first permanent magnets 9 are spaced apart along the second direction. Figures 8 to 11 The direction indicated by X in the figure is Figures 8 to 11 In the direction indicated by Y, the first direction is perpendicular to the second direction, and both the first direction and the second direction are parallel to the air bearing surface.

[0043] The second permanent magnets 10 are also arranged in multiple groups, each group of second permanent magnets 10 is spaced apart along the first direction, and multiple groups of second permanent magnets 10 are spaced apart along the second direction. A group of second permanent magnets 10 is correspondingly arranged between each two adjacent groups of first permanent magnets 9, and any adjacent group of first permanent magnets 9 and a group of second permanent magnets 10 are arranged alternately. Fig. 9 and Fig.10 .

[0044] That is to say, the first permanent magnets 9 and the second permanent magnets 10 are distributed in rows and columns, the row direction is the first direction, and the column direction is the second direction. The distribution axis of each row of the second permanent magnets 10 is located between the distribution axes of the two adjacent rows of the first permanent magnets 9, and the distribution axis of each column of the second permanent magnets 10 is located between the distribution axes of the two adjacent rows of the first permanent magnets 9.

[0045] When arranging the first permanent magnet 9 and the second permanent magnet 10 , it is necessary to make the magnetization direction of the first permanent magnet 9 and the magnetization direction of the second permanent magnet 10 perpendicular to the air bearing surface, and ensure that the magnetization direction of the second permanent magnet 10 is opposite to the magnetization direction of the first permanent magnet 9 .

[0046] Specifically, the magnetization direction of the first permanent magnet 9 can be directed toward the air-floating surface, and the magnetization direction of the second permanent magnet 10 can be directed away from the air-floating surface, that is, the end of the first permanent magnet 9 close to the fixed plate is the N pole, and the end of the second permanent magnet 10 close to the fixed plate is the S pole. Fig. 9 and Fig.10 .

[0047] In a further embodiment, the permanent magnet array 1 further includes a third permanent magnet 11, and a third permanent magnet 11 is correspondingly arranged between any adjacent first permanent magnets 9 and second permanent magnets 10, and the magnetization direction of the third permanent magnet 11 is parallel to the air bearing surface, and the magnetization direction of the third permanent magnet 11 points to the first permanent magnet 9 adjacent thereto, Fig.11 , Fig.11 The arrow located on the third permanent magnet 11 in FIG. 1 indicates the magnetization direction of the third permanent magnet 11 .

[0048] Such a setting can significantly increase the thrust of the planar motor, reduce the thrust fluctuation of the planar motor, and is beneficial to improving the performance of the planar motor.

[0049] In this embodiment, the cross-sectional shape of the first permanent magnet 9 is the same as the cross-sectional shape of the second permanent magnet 10, and the cross-sectional shape of the first permanent magnet 9 and the cross-sectional shape of the second permanent magnet 10 are both parallel to the air bearing surface. There is no limitation on the cross-sectional shape of the first permanent magnet 9 and the cross-sectional shape of the second permanent magnet 10, and the cross-sectional shape of the first permanent magnet 9 can be, but not limited to, set to a circle or a square, that is, the first permanent magnet 9 can be, but not limited to, set to a cylindrical shape or a rectangular parallelepiped shape.

[0050] When the cross-sectional shapes of the first permanent magnet 9 and the second permanent magnet 10 are set to be squares, one diagonal line of the square is set along the first direction, and the other diagonal line of the square is set along the second direction.

[0051] In the embodiment of the present invention, the outer contour of the cross section of the moving part 2 is set to be a rectangle, and the cross section of the moving part 2 is parallel to the air bearing surface. The length direction of the moving part 2 is parallel to the first direction or the second direction. Figure 8 , the dotted line frame represents the movable component 2, and the length direction of the movable component 2 is parallel to the second direction.

[0052] Accordingly, the cross-sectional shape of the coil 3 is set to be a rectangle, the cross-sectional shape of the coil 3 is parallel to the air bearing surface, and the length direction of the coil 3 is the length direction of the mover component 2 .

[0053] In this embodiment, four mover components 2 are arranged on the stator component, and the four mover components 2 are relatively fixed. Figure 2 , wherein the length directions of two moving parts 2 are parallel to each other and perpendicular to the length directions of the other two moving parts 2. The four moving parts 2 are surrounded to form a square, and the four moving parts 2 are rotationally symmetrically distributed about the center of the square.

[0054] By controlling the energization of the coil 3, a force can be generated to drive the four movable components 2 to translate as a whole along the first direction, or a force can be generated to drive the four movable components 2 to translate as a whole along the second direction, or a torque can be generated to drive the four movable components 2 to rotate as a whole, thereby driving the four movable components 2 to move arbitrarily along the air bearing surface as a whole.

[0055] Specifically, the four mover components 2 are respectively a first mover component 13, a second mover component 14, a third mover component 15 and a fourth mover component 16. The positions of the first mover component 13, the second mover component 14, the third mover component 15 and the fourth mover component 16 are shown in FIG. Figure 2 .

[0056] To generate an upward force in the second direction, a positive current needs to be supplied to the coil 3 of the first mover component 13 and the coil 3 of the third mover component 15 , while the coil 3 of the second mover component 14 and the coil 3 of the fourth mover component 16 are not energized.

[0057] To generate a downward force in the second direction, reverse current needs to be passed through the coil 3 of the first mover component 13 and the coil 3 of the third mover component 15, while the coil 3 of the second mover component 14 and the coil 3 of the fourth mover component 16 are not energized.

[0058] To generate a leftward force along the first direction, a positive current needs to be supplied to the coil 3 of the second mover component 14 and the coil 3 of the fourth mover component 16 , while the coil 3 of the first mover component 13 and the coil 3 of the third mover component 15 are not energized.

[0059] To generate a force acting rightward in the first direction, reverse current needs to be passed through the coil 3 of the second mover component 14 and the coil 3 of the fourth mover component 16 , while the coil 3 of the first mover component 13 and the coil 3 of the third mover component 15 are not energized.

[0060] If a clockwise rotating torque is to be generated, it is necessary to make the first movable component 13 generate an upward force along the second direction, the second movable component 14 generate a force to the right along the first direction, the third movable component 15 generate a downward force along the second direction, and the fourth movable component 16 generate a force to the left along the first direction, and the amplitude values ​​of each force are consistent. Then, the total flat force is zero, and a pure torque is generated, thereby driving the four movable components 2 to rotate as a whole.

[0061] If a counterclockwise rotating torque is to be generated, the direction of energization of the coil 3 of each movable part 2 is opposite to the direction of energization of the coil 3 of each movable part 2 when a clockwise rotating torque is to be generated.

[0062] In the embodiment of the present invention, each moving part 2 includes at least two iron cores 4, each iron core 4 is spaced apart along the length direction of the coil 3, and each coil 3 is sleeved outside each iron core 4. Figure 3 . Figure 3 The dotted line in shows the path of the leakage magnetic flux lines. The leakage magnetic flux lines pass through the core 4 but not the coil 3, and only generate suction force but not the required driving force. Figure 3 The arrows in the figure represent effective magnetic lines of force, which pass through the iron core 4 and the coil 3 to generate driving force. By separating the iron cores 4 corresponding to each coil 3, the magnetic path of the magnetic lines of force represented by the dotted lines can be disconnected, and the leakage magnetic lines of force need to pass through the air to reach the other iron core 4, which reduces the leakage magnetic field and improves the thrust performance of the planar motor.

[0063] In this embodiment, the mover component 2 further includes at least one of a partition and a first cooling mechanism.

[0064] The separator is made of non-magnetic material and is disposed between any two adjacent iron cores 4 . The separator is fixedly connected to the iron cores 4 , and the iron cores 4 that are spaced apart are fixedly connected together, thereby improving the stability of the mover component 2 .

[0065] A first cooling mechanism is correspondingly arranged between any two adjacent iron cores 4. The first cooling mechanism is in contact with the iron core 4 and is fixedly connected to the iron core 4. The first cooling mechanism can not only support the iron core 4 to improve the stability of the movable component 2, but also perform heat exchange with the iron core 4 to improve the heat dissipation performance of the planar motor.

[0066] The first cooling mechanism may be, but is not limited to, a cooling plate.

[0067] A partition may be provided only between two adjacent cores 4, or a first cooling mechanism may be provided only between two adjacent cores 4, or both a partition and a first cooling mechanism may be provided between two adjacent cores 4, or a partition may be provided between a part of two adjacent cores 4 and a first cooling mechanism may be provided between another part of two adjacent cores 4, and no specific limitation is made here.

[0068] In this embodiment, each iron core 4 includes a base portion 7 and at least two iron core portions 8 .

[0069] The core parts 8 are spaced apart along the width direction of the coil 3, and extend along the length direction of the coil 3. The core parts 8 are fixedly connected to the base part 7. The coil 3 is sleeved on the outside of each core part 8. Each core 4 can correspond to multiple coils 3, and different coils 3 are sleeved on the outside of different core parts 8 of each core 4.

[0070] The iron cores 4 of each movable component 2 have the same structure, and the iron core parts 8 of each iron core 4 correspond to each other one by one, so that each coil 3 of the movable component 2 can be simultaneously mounted on the iron core parts 8 of different iron cores 4 .

[0071] Such an arrangement increases the number of coils 3 of each movable component 2, thereby increasing the Ampere force generated by each movable component 2 and improving the thrust performance of the planar motor.

[0072] In this embodiment, along the width direction of the mover component 2, the sum of the number of the first permanent magnets 9 and the second permanent magnets 10 corresponding to each core 4 is a first value. The number of the core parts 8 provided on each core 4 is a second value. The second value is a multiple of 3, and the absolute value of the difference between the first value and the second value is 1 or 2.

[0073] Such an arrangement makes the planar motor a three-phase motor, which has the advantages of high efficiency, stable operation, high reliability, wide application range and strong adaptability.

[0074] In addition, according to the above-mentioned limitation on the first value and the second value, the coils 3 can be arranged freely and arbitrarily, and there are no special requirements for the series-parallel relationship between the coils 3, the number of coils 3 and the position of the coils 3.

[0075] In a specific embodiment, the second value can be set to 3 and the first value can be set to 4, that is, three core parts 8 are set on each core 4, and the sum of the number of first permanent magnets 9 and second permanent magnets 10 corresponding to each core 4 along the width direction of the movable component 2 is 4.

[0076] In this embodiment, at least two coils 3 may be sleeved outside each core portion 8 to increase the number of coils 3 of each mover component 2 .

[0077] The coils 3 on two adjacent core parts 8 can be arranged side by side, such as Figure 6 As shown, the coils 3 corresponding to different core parts 8 do not interfere with each other.

[0078] The coils 3 on two adjacent core parts 8 may also be partially overlapped. Figure 7 As shown, it is beneficial to reduce the distance between two adjacent core parts 8, making the structure more compact.

[0079] The current-carrying directions of the coils 3 sleeved on the same core portion 8 need to be kept consistent. The coils 3 sleeved on the same core portion 8 can be connected in series or in parallel.

[0080] In a further embodiment, the movable component 2 also includes a second cooling mechanism, and a second cooling mechanism is correspondingly arranged between any two adjacent coils 3 on each core portion 8. The second cooling mechanism is in contact with the coil 3. The second cooling mechanism can perform heat exchange with the coil 3 to improve the heat dissipation performance of the planar motor.

[0081] The second cooling mechanism may be, but is not limited to, a cooling plate.

[0082] In this embodiment, the air flotation component 5 includes a plurality of air flotation blocks 6, and the plurality of air flotation blocks 6 are arranged around the circumference of the moving component 2. Figure 2 A throttle hole or a tiny nozzle is provided on the side of the air flotation block 6 facing the air flotation surface, and compressed air is introduced into the air flotation block 6 so that the compressed air enters the gap between the air flotation block 6 and the air flotation surface at an appropriate pressure and flow rate, and a layer of air film is formed between the air flotation block 6 and the air flotation surface, so that the air flotation block 6 can drive the mover component 2 to float on the air flotation surface as a whole, so as to reduce the friction between the mover component 2 and the air flotation surface, and improve the output accuracy, speed and stability of the planar motor.

[0083] In this embodiment, corresponding air flotation blocks 6 are arranged on each surface of the peripheral side of the moving component 2, so that the moving component 2 can be subjected to a more uniform force, thereby achieving a better suspension effect of the moving component 2.

[0084] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A planar motor with an iron core structure, characterized in that: include: A stator component comprises a fixed permanent magnet array (1) and a fixing plate, wherein the fixing plate is arranged on one side of a plane where the permanent magnet array (1) is located, and a surface of the fixing plate on one side away from the permanent magnet array (1) forms an air bearing surface; A mover component (2) is movably arranged along the air bearing surface on a side of the fixed plate away from the permanent magnet array (1), the mover component (2) comprising a coil (3) and an iron core (4), the coil (3) being sleeved on the outside of the iron core (4); The air-floating component (5) is relatively fixed to the movable component (2), and the air-floating component (5) is suitable for cooperating with the air-floating surface to provide air-floating support for the movable component (2).

2. The planar motor with an iron core structure according to claim 1, characterized in that: The air flotation component (5) comprises a plurality of air flotation blocks (6), and the plurality of air flotation blocks (6) are arranged on the peripheral side of the mover component (2) along the circumferential direction of the mover component (2).

3. The planar motor with an iron core structure according to claim 1 or 2, characterized in that: The outer contour of the cross section of the mover component (2) is in the shape of a rectangle, and the cross section of the mover component (2) is parallel to the air bearing surface; Four movable components (2) are provided, the four movable components (2) are surrounded by each other to form a square, and the four movable components (2) are distributed in a rotationally symmetrical manner about the center of the square.

4. The planar motor with an iron core structure according to claim 3, characterized in that: Each of the movable components (2) comprises: At least two iron cores (4), each of the iron cores (4) being spaced apart along the length direction of the coil (3), and each of the coils (3) being sleeved outside of each of the iron cores (4).

5. The planar motor with an iron core structure according to claim 4, characterized in that: The mover component (2) further comprises: The separator is made of non-magnetic material, and the separator is correspondingly arranged between any two adjacent iron cores (4), and the separator is fixedly connected to the iron core (4); And / or, a first cooling mechanism, one first cooling mechanism is correspondingly arranged between any two adjacent iron cores (4), the first cooling mechanism being suitable for performing heat exchange with the iron core (4).

6. The planar motor with an iron core structure according to claim 3, characterized in that: The iron core (4) comprises: Basal part (7); At least two iron core parts (8), each of the iron core parts (8) is spaced apart along the width direction of the coil (3), the iron core parts (8) extend along the length direction of the coil (3), each of the iron core parts (8) is fixedly connected to the base part (7), and the coil (3) is sleeved on the outside of each of the iron core parts (8).

7. The planar motor with an iron core structure according to claim 6, characterized in that: At least two of the coils (3) are sleeved on the outside of each of the iron core parts (8), and the coils (3) on two adjacent iron core parts (8) are arranged side by side or partially overlapped; The mover component (2) further comprises: A second cooling mechanism, wherein one second cooling mechanism is correspondingly arranged between any two adjacent coils (3) on each of the iron core parts (8), and the second cooling mechanism is suitable for performing heat exchange with the coils (3).

8. The planar motor with an iron core structure according to claim 6, characterized in that: The permanent magnet array (1) comprises: A plurality of first permanent magnets (9) are provided, each group of the first permanent magnets (9) are spaced apart along a first direction, and a plurality of groups of the first permanent magnets (9) are spaced apart along a second direction, the first direction is perpendicular to the second direction, and the first direction and the second direction are both parallel to the air bearing surface, and the length direction of the mover component (2) is parallel to the first direction or the second direction; A second permanent magnet (10), a group of the second permanent magnet (10) is arranged correspondingly between two adjacent groups of the first permanent magnets (9), each group of the second permanent magnets (10) is spaced apart along the first direction, any adjacent group of the first permanent magnets (9) and any adjacent group of the second permanent magnets (10) are arranged alternately, the magnetization direction of the second permanent magnet (10) is opposite to the magnetization direction of the first permanent magnet (9), and the magnetization direction of the first permanent magnet (9) and the magnetization direction of the second permanent magnet (10) are both perpendicular to the air-bearing surface.

9. The planar motor with an iron core structure according to claim 8, characterized in that: The permanent magnet array (1) further comprises: A third permanent magnet (11), wherein one third permanent magnet (11) is correspondingly arranged between any adjacent first permanent magnet (9) and second permanent magnet (10), the magnetization direction of the third permanent magnet (11) is parallel to the air-floating surface, the magnetization direction of the first permanent magnet (9) points to the air-floating surface, and the magnetization direction of the third permanent magnet (11) points to the adjacent first permanent magnet (9).

10. The planar motor with an iron core structure according to claim 8 or 9, characterized in that: The cross-sectional shape of the first permanent magnet (9) is the same as the cross-sectional shape of the second permanent magnet (10); the cross-sectional shape of the first permanent magnet (9) and the cross-sectional shape of the second permanent magnet (10) are both parallel to the air bearing surface; the cross-sectional shape of the first permanent magnet (9) is circular or square.

11. The planar motor with an iron core structure according to claim 8, characterized in that: Along the width direction of the mover component (2), the sum of the number of the first permanent magnets (9) and the second permanent magnets (10) corresponding to each of the iron cores (4) is a first value, the number of the iron core parts (8) arranged on each of the iron cores (4) is a second value, the second value is a multiple of 3, and the absolute value of the difference between the first value and the second value is 1 or 2.

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