Device and method for improving laser and electrolysis combined machining efficiency and stability

Abstract

The invention discloses a device and method for improving laser and electrolysis combined machining efficiency and stability. The method for improving the laser and electrolysis combined machining efficiency and stability comprises the steps that a laser light source, a power source and the device for improving the laser and electrolysis combined machining efficiency and stability are provided, a workpiece to be machined is placed at the outlet end of the combined tool electrode, and the power source is electrically connected with the combined tool electrode and the workpiece to be machined; a laser beam provided by a laser light source and an electrolyte provided by an electrolyte module cooperatively pass through the constraint capillary tube and the composite tool electrode in sequence to be conveyed to a machining area of a workpiece to be machined, and laser and electrolysis composite machining is conducted after a power source is switched on. According to the laser and electrolysis combined machining device provided by the embodiment of the invention, the conical constraint capillary tube is introduced, so that the influence of coupling errors on the laser coupling efficiency is reduced, the coupling range required by efficient laser conduction is expanded, and the laser coupling stability is improved.

Description

Technical Field

[0001] The present invention particularly relates to a device and method for improving the efficiency and stability of laser and electrolytic composite processing, belonging to the technical field of special processing. Background Art

[0002] Laser Beam Machining (LBM) focuses a high-energy-density laser beam through a focusing lens and acts on the surface of the material. The material in the spot irradiation area absorbs the laser energy, and the temperature rises rapidly to the melting point or boiling point, thereby achieving efficient removal of the processed material. As a non-contact processing method, laser processing has the characteristics of fast processing speed, high processing accuracy, and good material adaptability. It has been widely used in manufacturing industries such as aviation and aerospace. However, the depth processing capability of laser processing is limited. It has extremely high processing efficiency on the surface, but as the processing depth increases, the efficiency decreases, and the processing products and plasma are difficult to discharge, resulting in a decrease in laser efficiency, and there are processing tapers and heat accumulation effects. In addition, laser processing also has other defects such as heat-affected zone, recast layer, and microcracks. These defects will seriously affect the processing quality of parts, as well as the reliability and stability in use, and restrict the development and application of laser processing technology. Although ultrafast pulse laser can achieve processing without recast layer and heat influence, its material removal rate is low and the cost is expensive.

[0003] Composite machining technology combines the characteristics and coupling effects of different machining processes to achieve the machining of workpiece materials, giving full play to the advantages of each machining process while avoiding the problems of a single machining process. With the widespread use of difficult-to-machine materials, the requirements for machining surface quality and precision are gradually increasing. Composite machining technology, due to its own superior characteristics, has gradually become an irreplaceable machining process method in important fields such as extreme precision manufacturing and special machining manufacturing.

[0004] In order to solve the problems of recast layer, thermal influence, microcracks, etc. in micro-hole processing, the team previously proposed a laser and tube electrode electrochemical composite processing technology (Laser-STEM, Laser and Shaped Tube Electrochemical Machining) based on total reflection in the laser beam. After being focused, the laser beam enters the liquid core fiber tube electrode and is transmitted to the processing area by total reflection. Taking advantage of the characteristic that the tube electrode can be processed deep into the material, the laser beam can be synchronously intervened in the processing area with the feed of the composite tube electrode, realizing efficient and controllable coupling of the laser and electrochemical energy field in the processing area, thereby realizing deep laser intervention processing. The Laser-STEM process realizes the synchronous intervention of laser and electrochemical energy in the deep and small hole processing area, which can achieve efficient and precise material removal, and there is no thermal influence and recast layer defects on the processing surface.

[0005] However, in the Laser-STEM process, the laser needs to be precisely focused on the entrance center of the liquid core fiber tube electrode, which has problems such as difficulty in laser centering coupling, small coupling range, and laser coupling efficiency being greatly affected by coupling errors. Therefore, exploring an efficient laser coupling method with low requirements for laser coupling accuracy to improve the stability and ease of operation of the Laser-STEM process is still one of the technical problems that the industry needs to solve urgently. Summary of the invention

[0006] The main purpose of the present invention is to provide a device and method for improving the efficiency and stability of laser and electrolytic composite processing, thereby overcoming the deficiencies in the prior art.

[0007] In order to achieve the above-mentioned invention object, the technical solution adopted by the present invention includes: A first aspect of an embodiment of the present invention provides a device for improving the efficiency and stability of laser and electrolytic composite processing, comprising: a composite laser processing head, the composite laser processing head comprising a laser coupling module, a composite tool electrode and a constrained capillary, the constrained capillary being arranged between the laser coupling module and the composite tool electrode, and the composite tool electrode having a through flow channel therein; The constraining capillary has a tapered lumen and a first port and a second port facing each other along its own axial direction, the lumen is connected with the first port and the second port, the first port faces the laser transmission module, and the second port faces the composite tool electrode, the laser transmission module is used to couple the laser beam provided by the laser source to the positive projection area of ​​the first port, the inner wall of the lumen of the constraining capillary can make the laser beam incident from the first port into the lumen and contacting the inner wall of the lumen to be totally reflected, the area of ​​the first port>the radial cross-sectional area of ​​the internal flow channel of the composite tool electrode>the area of ​​the second port>the radial cross-sectional area of ​​the laser beam coupled by the laser transmission module, and the area of ​​the second port<the radial cross-sectional area of ​​the internal flow channel of the composite tool electrode; The constraining capillary can pressurize the electrolyte entering its own lumen to form a high-speed water jet, and the water jet can cooperate with the laser beam entering the lumen of the constraining capillary to be transmitted to the composite tool electrode; The composite tool electrode is used to transmit the laser beam and the electrolyte to the workpiece to be processed. The composite tool electrode can form an electrolytic system with the workpiece to be processed, the power supply and the electrolyte.

[0008] A second aspect of an embodiment of the present invention provides a method for improving the efficiency and stability of laser and electrolytic composite processing, which includes: Provide a laser light source, a power supply and the device for improving the efficiency and stability of laser and electrolytic composite processing, place the workpiece to be processed at the outlet end of the composite tool electrode, and electrically connect the power supply to the composite tool electrode and the workpiece to be processed respectively; The laser beam provided by the laser light source and the electrolyte provided by the electrolyte module are cooperatively transported to the processing area of ​​the workpiece to be processed through the constrained capillary and the composite tool electrode in sequence, and laser and electrolytic composite processing is performed after the power is turned on.

[0009] Compared with the prior art, the advantages of the present invention include: A laser and electrolytic composite processing device provided by an embodiment of the present invention can reduce the difficulty of laser alignment and improve the reliability and stability of laser and electrolytic composite processing by synchronously coupling the laser and the water jet into a conical constrained capillary and using the first port of the conical constrained capillary whose size is several times the diameter of the laser focus as the coupling entrance of the laser beam.

[0010] In a laser and electrolysis composite processing device provided by an embodiment of the present invention, the size of the outlet of a tapered constrained capillary is much smaller than the size of the inlet, so that a high-speed capillary water jet can be formed. The laser power density inside the water jet is high. At the same time, the laser is transmitted from the large-end inlet to the small-end outlet through the total reflection effect on the inner wall of the constrained capillary, and is transmitted to the inside of the composite tool electrode and further to the processing area in coordination with the water jet. In the laminar section, the laser is still transmitted through total reflection at the water-gas interface. The laser energy loss is small and the transmission efficiency is high, which can meet the processing requirements of high-efficiency, high-precision and high-surface integrity removal of workpiece materials. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is a structural schematic diagram of a laser and electrolytic composite processing device provided in a typical implementation case of the present invention; Figure 2 It is a structural schematic diagram of a laser and electrolytic composite processing device provided in a typical implementation case of the present invention; Figure 3a , Figure 3b , Figure 3c They are respectively schematic diagrams of constrained capillary coupling transmission in which a laser beam is incident on a laser and electrolytic composite processing device in different ways in a typical embodiment of the present invention; Figure 4a , Figure 4b They are respectively schematic diagrams of optical simulation at the outlet of a constraining capillary of a laser and electrolytic composite processing device in a typical implementation case of the present invention. DETAILED DESCRIPTION

[0012] In view of the deficiencies in the prior art, the inventor of this case has proposed the technical solution of the present invention after long-term research and extensive practice. The technical solution, its implementation process and principle will be further explained as follows.

[0013] A first aspect of an embodiment of the present invention provides a device for improving the efficiency and stability of laser and electrolytic composite processing, comprising: a composite laser processing head, the composite laser processing head comprising a laser coupling module, a composite tool electrode and a constrained capillary, the constrained capillary being arranged between the laser coupling module and the composite tool electrode, and the composite tool electrode having a through flow channel therein; The constraining capillary has a tapered lumen and a first port and a second port facing each other along its own axial direction, the lumen is connected with the first port and the second port, the first port faces the laser transmission module, and the second port faces the composite tool electrode, the laser transmission module is used to couple the laser beam provided by the laser source to the positive projection area of ​​the first port, the inner wall of the lumen of the constraining capillary can make the laser beam incident from the first port into the lumen and contacting the inner wall of the lumen to be totally reflected, the area of ​​the first port>the radial cross-sectional area of ​​the internal flow channel of the composite tool electrode>the area of ​​the second port>the radial cross-sectional area of ​​the laser beam coupled by the laser transmission module, and the area of ​​the second port<the radial cross-sectional area of ​​the internal flow channel of the composite tool electrode; The constraining capillary can pressurize the electrolyte entering its own lumen to form a high-speed water jet, and the water jet can cooperate with the laser beam entering the lumen of the constraining capillary to be transmitted to the composite tool electrode; The composite tool electrode is used to transmit the laser beam and the electrolyte to the workpiece to be processed. The composite tool electrode can form an electrolytic system with the workpiece to be processed, the power supply and the electrolyte.

[0014] Furthermore, by utilizing the constrained capillary, not only a high-speed water jet can be formed, but also the laser beam can be totally reflected inside it, so that the laser beam is coupled with the water jet. At the same time, the tapered lumen inside the constrained capillary can gradually constrain the internal laser beam to a smaller size range, thereby achieving the guidance of the laser beam.

[0015] Furthermore, the diameter of the first port is more than 1.5 times the diameter of the second port.

[0016] Furthermore, the light emitting surface of the laser coupling module is located above the first port of the lumen inside the constraining capillary.

[0017] Furthermore, the distance between the second port of the constraining capillary and the inlet end of the composite tool electrode is configured such that the laser and electrolyte jet output by the constraining capillary all enter the flow channel of the composite tool electrode from the inlet end of the composite tool electrode.

[0018] Further, the second end of the constraining capillary is coplanar with the inlet end of the composite tool electrode, or the second end of the constraining capillary extends into the flow channel inside the composite tool electrode.

[0019] Furthermore, the inner wall curve of the tube cavity satisfies that the angle between the normal line at each point of contact with the laser beam incident from the first port and the contacted laser beam meets the requirement of the total reflection theorem. Specifically, the curve parameters of the inner wall of the tube cavity are obtained through optical simulation-assisted design, and can be adjusted accordingly for different laser incident angles. The standard is the complementary angle of the incident laser divergence angle, and the normal line at the contact point with the inner wall of the tube cavity satisfies Snell's theorem.

[0020] Furthermore, the inner wall surface of the lumen is continuous and smooth.

[0021] Furthermore, the constraining capillary is coaxially arranged with the composite tool electrode, specifically, the lumen inside the constraining capillary is coaxially arranged with the flow channel inside the composite tool electrode.

[0022] It should be noted that the present invention adopts a constraining capillary with a tapered lumen, the refractive index of the material of the inner wall of the lumen is lower than the refractive index of the commonly used electrolyte solution, the laser beam is transmitted inside the lumen and in the electrolyte environment by the total reflection effect, and the large-diameter first port of the tapered lumen is used to align and focus the laser beam, thereby reducing the difficulty of coupling the laser beam into the constraining capillary. At the same time, the second port with a smaller lumen diameter outputs the laser beam, thereby ensuring the requirement for concentrated output of the laser beam energy.

[0023] In a more specific embodiment, the composite laser processing head also includes: a sealed first electrolyte chamber and a sealed second electrolyte chamber, the first port of the constrained capillary is arranged in the first electrolyte chamber, the second port is arranged in the second electrolyte chamber, and the inlet end of the composite tool electrode is arranged in the second electrolyte chamber. A part of the electrolyte provided by the electrolyte module enters the constrained capillary through the first electrolyte chamber, and then enters the second electrolyte chamber and the composite tool electrode through the constrained capillary, and another part of the electrolyte enters the composite tool electrode through the second electrolyte chamber, and the electrolyte is sprayed to the processing area of ​​the workpiece to be processed through the composite tool electrode.

[0024] In a more specific embodiment, the device for improving the efficiency and stability of laser and electrolytic composite processing also includes: an electrolyte module, which is connected to the lumen of the constraining capillary and is at least used to provide electrolyte into the constraining capillary, and the refractive index of the inner wall of the lumen of the constraining capillary is lower than the refractive index of the electrolyte.

[0025] Furthermore, the electrolyte module is also connected to the flow channel of the composite tool electrode, and the electrolyte module is also used to provide electrolyte into the composite tool electrode.

[0026] Furthermore, the electrolyte module is communicated with the first electrolyte chamber and the second electrolyte chamber respectively.

[0027] Furthermore, the electrolyte module may include a pump and an infusion pipeline, etc., and the electrolyte is connected to the first electrolyte chamber and the second electrolyte chamber respectively through the pump and the infusion pipeline.

[0028] Furthermore, the laser coupling module may include optical elements such as a focusing lens.

[0029] In a more specific embodiment, the device for improving the efficiency and stability of laser and electrolytic composite processing also includes: a motion module, which is in transmission cooperation with the composite laser processing head and / or the workpiece to be processed, and is used to drive relative movement between the composite laser processing head and the workpiece to be processed.

[0030] A second aspect of an embodiment of the present invention provides a method for improving the efficiency and stability of laser and electrolytic composite processing, which includes: Provide a laser light source, a power supply and the device for improving the efficiency and stability of laser and electrolytic composite processing, place the workpiece to be processed at the outlet end of the composite tool electrode, and electrically connect the power supply to the composite tool electrode and the workpiece to be processed respectively; The laser beam provided by the laser light source and the electrolyte provided by the electrolyte module are cooperatively transported to the processing area of ​​the workpiece to be processed through the constrained capillary and the composite tool electrode in sequence, and laser and electrolytic composite processing is performed after the power is turned on.

[0031] In a more specific implementation, the method for improving the efficiency and stability of laser and electrolytic composite processing further includes: using a motion module to drive relative motion between the composite laser processing head and the workpiece to be processed.

[0032] The technical solution, its implementation process and principles, etc. will be further explained below in conjunction with the accompanying drawings and specific implementation cases. Unless otherwise specified, the laser source, focusing lens, composite tool electrode, pump, power supply, etc. used in the embodiments of the present invention are all known to those skilled in the art and can be purchased commercially.

[0033] In a more specific implementation, see Figure 1 and Figure 2 A laser and electrolysis composite processing device includes a laser / electrolysis composite processing head, a laser source, an electrolyte module, a power supply 7 and a motion module. The laser / electrolysis composite processing head is arranged between the laser source and the workpiece 8. The laser source is used to provide a laser beam 1 for processing the workpiece 8. The electrolyte module is connected to the laser / electrolysis composite processing head and is used to provide the electrolyte required for electrolytic processing of the workpiece 8. The laser / electrolysis composite processing head is used to couple and transport the laser beam 1 and the electrolyte to the processing area of ​​the workpiece 8. The power supply 7 is electrically connected to the laser / electrolysis composite processing head and the workpiece 8 respectively, and cooperates with the electrolyte to form an electrolytic system for electrolytic processing of the workpiece 8. The motion module is matched with the composite laser processing head and / or the workpiece 8 for transmission, and is used to drive the composite laser processing head and the workpiece 8 to generate relative movement.

[0034] Specifically, the laser / electrolysis composite processing head includes a laser coupling module, a constrained capillary 3, a composite tool electrode 13 and an electrolyte container. The electrolyte container has a first sealed electrolyte chamber 9 and a second sealed electrolyte chamber 11. The first electrolyte chamber 9 is arranged above the second electrolyte chamber 11 along the axial direction of the laser / electrolysis composite processing head. The laser coupling module is fixedly arranged at the top of the electrolyte container along the axial direction of the laser / electrolysis composite processing head. The composite tool electrode 13 is fixedly arranged at the bottom of the electrolyte container along the axial direction of the laser / electrolysis composite processing head. The constrained capillary 3 is fixedly arranged at the bottom of the electrolyte container. Inside, the interior of the constraining capillary 3 has a conical first lumen and a first port and a second port facing each other along its own axial direction, the first lumen is connected with the first port and the second port, the first port of the constraining capillary 3 is located in the first electrolyte chamber 9, the second port is located in the second electrolyte chamber 11, the composite tool electrode 13 has a cylindrical second lumen and an inlet end and an outlet end connected with the second lumen, the inlet end of the composite tool electrode 13 is arranged in the second electrolyte chamber 11, the first port of the constraining capillary 3 faces the laser transmission module, and the second port faces the inlet end of the composite tool electrode 13; The laser coupling module is located on the optical path of the laser beam 1 emitted by the laser light source, and is used to focus the laser beam 1 provided by the laser light source to the orthographic projection area of ​​the first port of the constraining capillary 3 along its own axial direction. The laser beam 1 focused by the laser coupling module enters the constraining capillary 3 and the composite tool electrode 13 in sequence, and is reflected to the processing area of ​​the workpiece 8. The electrolyte module is respectively connected to the first injection port 10 of the first electrolyte chamber 9 and the second injection port 12 of the second electrolyte chamber 11. The electrolyte module respectively supplies electrolyte to the first electrolyte chamber 9 and the second electrolyte chamber 11. The electrolyte chamber 11 is simultaneously injected with an electrolyte with a certain pressure. The electrolyte in the first electrolyte chamber 9 is constrained in the capillary 3, and then enters the second electrolyte chamber 11 and the composite tool electrode 13 through the constrained capillary 3. The electrolyte in the second electrolyte chamber 11 enters the composite tool electrode 13, and finally the electrolyte is sprayed to the processing area of ​​the workpiece 8 through the composite tool electrode 13. By setting the upper and lower electrolyte chambers, the voltage stabilizing effect of the constrained capillary 3 and the composite tool electrode 13 can be achieved, thereby improving the stability of the electrolyte jet.

[0035] It can be understood that the first lumen inside the constraining capillary 3 and the second lumen inside the composite tool electrode 13 are both through structures.

[0036] Specifically, the laser coupling module, the constraining capillary 3, the composite tool electrode 13 and the electrolyte container are all sealed together. Exemplarily, a sealing ring can be arranged between the laser coupling module, the constraining capillary 3, the composite tool electrode 13 and the electrolyte container to prevent leakage of the electrolyte and ensure the stability of the electrolyte jet.

[0037] Specifically, the first lumen inside the constraining capillary 3 is a cone with a conical structure as a whole, the second lumen inside the composite tool electrode 13 is a cylinder, the axes of the constraining capillary 3, the composite tool electrode 13 and the focusing lens 2 are parallel, and the constraining capillary 3 and the composite tool electrode 13 are preferably coaxially arranged. The inner wall curve of the first lumen inside the constraining capillary 3 satisfies that the angle between the normal line at each point of contact with the laser beam and the contacted laser beam meets the requirements of the total reflection theorem, that is, the laser beam incident from the first port of the constraining capillary 3 is totally reflected in the constraining capillary 3 and finally emitted from the second port.

[0038] Specifically, the inner diameter of the first port of the capillary 3 is constrained d ii >Inner diameter of the second lumen inside the composite tool electrode 13 D i >Inner diameter of the second port d oi >The diameter of the radial cross section of the laser beam focused by the focusing lens 2, specifically, the inner diameter of the first port of the constraining capillary 3 dii is the inner diameter of the second port d oi 1.5 times or more the inner diameter of the first port of the constraining capillary 3 d ii The inner diameter of the second lumen inside the composite tool electrode 13 D i 1.5 times or more the outer diameter of the second port of the constraining capillary 3 d oo Smaller than the inner diameter of the second lumen inside the composite tool electrode 13 D i , constraining the outer diameter of the first port of capillary 3 d io Smaller than the outer diameter of the composite tool electrode 13. The focal length of the focusing lens 2 f , the axial length L of the constraining capillary 3 and the vertical distance between the second port of the constraining capillary 3 and the inlet end of the composite tool electrode 13 Δ The configuration is such that: the laser beam enters the composite tool electrode 13 from the light exiting surface of the focusing lens 2 through the constrained capillary 3 and cooperates with the electrolyte jet. The inner diameter of the second lumen inside the composite tool electrode 13 is D i The size is between the outer diameter of the second port of the constraining capillary 3 and the inner diameter of the first port. The ratio of the inner diameter of the second lumen inside the composite tool electrode 13 to the inner diameter of the first lumen inside the constraining capillary 3 determines its improvement in the focusing beam coupling performance, that is, the larger the ratio, the lower the coupling difficulty, the lower the sensitivity to the spatial position fluctuation of the laser beam caused by other factors, and the higher the reliability of the system.

[0039] Specifically, the laser beam 1 is focused and coupled to the first port of the constraining capillary 3 through the focusing lens 2. The laser beam 1 undergoes a total reflection effect in the first tube cavity of the constraining capillary 3, and is synchronously coupled into the second tube cavity of the composite tool electrode 13 with the electrolyte, and is further transmitted to the processing area of ​​the workpiece 8 by the total reflection effect.

[0040] Specifically, the laser light source can be a laser, etc. The laser beam 1 emitted by the laser light source can be a laser with a wavelength having a large absorption length in a liquid environment, preferably a green laser beam 1 with a wavelength of 532 nm. Specifically, the laser coupling module can include a collimating lens and a focusing lens 2 arranged in sequence, and the collimated laser beam 1 is irradiated on the axis position of the focusing lens 2. It should be noted that both the collimating lens and the focusing lens 2 can be purchased commercially, and the specific configuration between the two can be set according to specific needs, which is not limited here.

[0041] Specifically, the composite tool electrode 13 includes a low-refractive-index fluorine-containing polymer constraining layer 4, a metal composite tool electrode 13 coaxially sleeved on the outside of the low-refractive-index fluorine-containing polymer constraining layer 4, and an insulating coating 6 coated on the outer wall of the metal composite tool electrode 13. The metal composite tool electrode 13 is electrically connected to the negative pole of the power supply 7 through the electrode block 14.

[0042] Specifically, the electrolyte module may include a pump and an infusion pipeline, etc., and the electrolyte is connected to the first electrolyte chamber 9 and the second electrolyte chamber 11 through the pump and the infusion pipeline. Specifically, the electrolyte may be an acidic, alkaline or neutral chemical solution, such as a NaNO3 solution, a NaCl solution, a H2SO4 solution, etc. After being pressurized by the booster system, the electrolyte enters the first electrolyte chamber 9 and the second electrolyte chamber 11 through the pump and the infusion pipeline, and then flows through the constrained capillary 3 and the composite tool electrode 13 to the processing area of ​​the workpiece 8.

[0043] Specifically, the power supply 7 is one of a DC power supply, a DC pulse power supply and a bipolar pulse power supply; the motion module can be a three-axis motion platform, a four-axis motion platform or a five-axis motion platform. For example, the three-axis motion platform can include X-axis, Y-axis and Z-axis motion structures, and the workpiece 8 can be installed on the Y-axis motion structure. Figure 2 The mark 15 in the figure is the movement feeding direction of the laser / electrolysis composite processing head.

[0044] Specifically, the inner diameter of the first port of the constraining capillary 3 in the present invention is d ii >Inner diameter of the second port d oi >The diameter of the focus of the laser beam 1 (i.e., the diameter of the radial cross section of the laser beam 1), such as Figure 3a , Figure 3b , Figure 3c As shown, Figure 3a is the schematic diagram of the laser beam axial offset incident coupling transmission, Figure 3b is the schematic diagram of laser beam angle offset incident coupling transmission, Figure 3c This is a schematic diagram of the laser beam focus offset incident coupling transmission. It can be seen that the laser beam 1 is offset by different axial Δ X , Offset Angle Δ θ , Defocus Δ f , the incident coupling enters the constraining capillary 3. Due to the structural characteristics of the constraining capillary 3 that gradually decreases from the first port to the second port, the inner diameter of the first port of the constraining capillary 3 d iiThe first port is several times larger than the diameter of the focus of the laser beam 1. As the coupling entrance of the laser beam 1, the difficulty of laser alignment is reduced and the range of laser coupling transmission is expanded. The size of the entrance end of the constrained capillary is several times larger than the diameter of the laser focus, which reduces the laser coupling error and improves the stability and reliability of laser coupling.

[0045] Specifically, the inner diameter of the second port of the constrained capillary 3 is d oi Much smaller than the inner diameter of the first port d ii Moreover, with the first conical tube cavity inside, the electrolyte introduced into the tube cavity can be pressurized to form a high-speed water jet. The laser power density inside the water jet is higher, thereby improving the efficiency of laser processing. At the same time, Figure 4a , Figure 4b As shown, Figure 4a , Figure 4b is the optical simulation result at the second port of the constrained capillary, Figure 4a is the distribution diagram at the second port (i.e., the outlet end) of the laser beam confinement capillary, Figure 4b is the radiation intensity of the laser beam at the second port (i.e., the outlet end) of the laser beam confinement capillary. It can be seen that the radiation intensity of the laser at the second port of the confinement capillary is large, and the laser energy density is large, thus achieving efficient transmission of the laser.

[0046] The present invention can be used to improve the performance of the laser and electrolytic composite processing system. The laser light source can use a quasi-continuous or pulsed laser. After being focused by a focusing lens, it is transmitted to the second port of the constrained capillary through a low-refractive-index conical confined capillary whose diameter gradually decreases from the first port to the second port by using the total reflection effect. All laser energy can be focused on an area with a minimum diameter of 10 microns, and cooperate with the electrolyte jet to enter the internal flow channel of the composite tool electrode through the second port of the constrained capillary, and then transmitted to the workpiece processing area through the composite tool electrode. The average laser power can reach 200W, and the wavelength can be between 350nm and 1064nm, preferably a laser with a wavelength of 532nm, which is used to reduce the loss in the transmission process. The metal composite tool electrode is connected to the negative electrode of the power supply, and the workpiece is connected to the positive electrode of the power supply to realize the electroprocessing reaction. The synchronous action of the laser in the processing area has the effect of improving the electrolytic processing reaction efficiency and improving the processing accuracy.

[0047] A laser and electrolytic composite processing device provided by an embodiment of the present invention introduces a low-refractive-index conical constrained capillary whose diameter gradually decreases from a first port to a second port. The size of the first port is several times the diameter of the laser beam focus. As a coupling entrance of the laser beam, the difficulty of laser alignment can be reduced and the overall reliability and stability of the device can be improved.

[0048] A laser and electrolysis composite processing device provided by an embodiment of the present invention adopts a conical constraint capillary, the size of the second port as the inlet is much smaller than the size of the first port as the outlet, which can form a high-speed capillary water jet (i.e., an electrolyte water jet). The laser power density inside the water jet is high, which can meet the micro-processing requirements of different types of materials. In addition, the laser is transmitted from the large-end inlet to the small-end outlet through the total reflection effect on the inner wall of the constraint capillary, and is transmitted to the inside of the composite tool electrode and further to the processing area in coordination with the water jet. In the laminar section (the capillary constraint tube and the composite tool electrode are laminar water jets), the laser is still transmitted through total reflection at the water-gas interface, the laser energy loss is small, and the transmission efficiency is higher.

[0049] A laser and electrolytic composite processing device provided by an embodiment of the present invention introduces a tapered constraining capillary, which reduces the influence of coupling error on laser coupling efficiency, expands the coupling range required for efficient laser conduction, and improves the stability of laser coupling.

[0050] It should be understood that the above embodiments are only for illustrating the technical concept and features of the present invention, and their purpose is to enable people familiar with the technology to understand the content of the present invention and implement it accordingly, and they cannot be used to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit of the present invention should be included in the protection scope of the present invention.

Claims

1. A device for improving the efficiency and stability of laser and electrolytic composite processing, characterized in that: include: A composite laser processing head, the composite laser processing head comprising a laser coupling module, a composite tool electrode and a constraining capillary, the constraining capillary being arranged between the laser coupling module and the composite tool electrode, and the composite tool electrode having a through flow channel therein; The constraining capillary has a tapered lumen and a first port and a second port facing each other along its own axial direction, the lumen is connected with the first port and the second port, the first port faces the laser transmission module, and the second port faces the composite tool electrode, the laser transmission module is used to couple the laser beam provided by the laser source to the positive projection area of ​​the first port, the inner wall of the lumen of the constraining capillary can make the laser beam incident from the first port into the lumen and contacting the inner wall of the lumen to be totally reflected, the area of ​​the first port>the radial cross-sectional area of ​​the internal flow channel of the composite tool electrode>the area of ​​the second port>the radial cross-sectional area of ​​the laser beam coupled by the laser transmission module, and the area of ​​the second port<the radial cross-sectional area of ​​the internal flow channel of the composite tool electrode; The constraining capillary can pressurize the electrolyte entering its own lumen to form a high-speed water jet, and the water jet can cooperate with the laser beam entering the lumen of the constraining capillary to be transmitted to the composite tool electrode; The composite tool electrode is used to transmit the laser beam and the electrolyte to the workpiece to be processed. The composite tool electrode can form an electrolytic system with the workpiece to be processed, the power supply and the electrolyte.

2. The device for improving the efficiency and stability of laser and electrolytic composite processing according to claim 1, characterized in that: The diameter of the first port is 1.5 times or more the diameter of the second port.

3. The device for improving the efficiency and stability of laser and electrolytic composite processing according to claim 1 or 2, characterized in that: The light emitting surface of the laser coupling module is located above the first port of the lumen inside the constraining capillary.

4. The device for improving the efficiency and stability of laser and electrolytic composite processing according to claim 1, characterized in that: The distance between the second port of the constraining capillary and the inlet end of the composite tool electrode is configured such that the laser and the electrolyte jet output by the constraining capillary all enter the flow channel of the composite tool electrode from the inlet end of the composite tool electrode; Preferably, the second port of the constraining capillary is coplanar with the inlet end of the composite tool electrode, or the second port of the constraining capillary extends into the flow channel inside the composite tool electrode.

5. The device for improving the efficiency and stability of laser and electrolytic composite processing according to claim 1, characterized in that: The inner wall curve of the tube cavity satisfies that the angle between the normal line at each point of contact with the laser beam incident from the first port and the contacted laser beam meets the requirement of the total reflection theorem; Preferably, the inner wall surface of the lumen is continuous and smooth.

6. The device for improving the efficiency and stability of laser and electrolytic composite processing according to claim 1, characterized in that: The composite laser processing head also includes: A sealed first electrolyte chamber and a sealed second electrolyte chamber, the first port of the constrained capillary is arranged in the first electrolyte chamber, the second port is arranged in the second electrolyte chamber, the inlet end of the composite tool electrode is arranged in the second electrolyte chamber, a part of the electrolyte provided by the electrolyte module enters the constrained capillary through the first electrolyte chamber, and then enters the composite tool electrode through the constrained capillary, another part of the electrolyte provided by the electrolyte module enters the composite tool electrode through the second electrolyte chamber, and the electrolyte is sprayed to the processing area of ​​the workpiece to be processed through the composite tool electrode.

7. The device for improving the efficiency and stability of laser and electrolytic composite processing according to claim 6, characterized in that: Also includes: An electrolyte module, the electrolyte module is in communication with the lumen of the constraining capillary and is at least used to provide electrolyte into the constraining capillary, and the refractive index of the inner wall of the lumen of the constraining capillary is lower than the refractive index of the electrolyte; Preferably, the electrolyte module is also connected to the flow channel of the composite tool electrode, and the electrolyte module is also used to provide electrolyte into the composite tool electrode; Preferably, the electrolyte module is communicated with the first electrolyte chamber and the second electrolyte chamber respectively.

8. The device for improving the efficiency and stability of laser and electrolytic composite processing according to claim 6, characterized in that: Also includes: A motion module, wherein the motion module is in transmission cooperation with the composite laser processing head and / or the workpiece to be processed, and is used to drive the composite laser processing head and the workpiece to be processed to generate relative motion.

9. A method for improving the efficiency and stability of laser and electrolytic composite processing, characterized in that: include: Provide a laser light source, a power supply, and a device for improving the efficiency and stability of laser and electrolytic composite processing according to any one of claims 1 to 8, place a workpiece to be processed at the outlet end of the composite tool electrode, and electrically connect the power supply to the composite tool electrode and the workpiece to be processed respectively; The laser beam provided by the laser light source and the electrolyte provided by the electrolyte module are cooperatively transported to the processing area of ​​the workpiece to be processed through the constrained capillary and the composite tool electrode in sequence, and laser and electrolytic composite processing is performed after the power is turned on.

10. The method for improving the efficiency and stability of laser and electrolytic composite processing according to claim 9, characterized in that: Also includes: The motion module is used to drive the composite laser processing head and the workpiece to be processed to generate relative motion.

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