Rotating stand device for vacuum coating

Abstract

The invention relates to a rotating stand device for vacuum coating, which comprises a rotating stand body for assembling a tool clamp, a magnetofluid device and a driving mechanism, the magnetofluid device and the driving mechanism are positioned outside a coating chamber, and a mounting hole is formed in a chamber bottom plate of the coating chamber. The magnetofluid device comprises a magnetofluid body, an upper connecting shaft part and a lower connecting shaft part, the upper connecting shaft part and the lower connecting shaft part are arranged at the upper end and the lower end of the magnetofluid body respectively, the magnetofluid body is installed on the cavity bottom plate through an insulation sealing assembly, the upper connecting shaft part penetrates through the installation hole to be connected with the rotating frame body, and the lower connecting shaft part is in transmission connection with the driving mechanism. According to the scheme, the problem that the bearing in the magnetofluid device is prone to abrasion in the vacuum state can be solved, the service life of coating equipment is prolonged, and the reliability of the coating equipment is improved.

Description

Technical Field

[0001] The invention relates to the field of vacuum coating, and in particular to a rotating rack device for vacuum coating. Background Art

[0002] In the vacuum coating process, the workpiece is placed on a rotating rack in the vacuum coating equipment for coating. The rotating rack is connected to the driving mechanism outside the coating chamber by a magnetic fluid device, and the requirement of sealed rotation assembly is achieved by the magnetic fluid device. In traditional vacuum coating equipment, the magnetic fluid device is installed in the coating chamber. Since the coating environment in the coating chamber is generally a high-temperature vacuum environment, the installation of the magnetic fluid device requires a vacuum bearing, which is prone to wear and jamming in a high-temperature vacuum environment. In addition, when the weight of the workpiece to be coated is large, the bearing will bear a large load and the failure rate will increase further. Moreover, when the rotating rack is stuck, it will lead to an increase in the defective rate of the coated product and increase production costs. Therefore, it is necessary to solve this problem. Summary of the invention

[0003] The object of the present invention is to provide a rotary rack device for vacuum coating, which can solve the problem that traditional rotary rack devices are prone to failure and improve the reliability of the vacuum coating device.

[0004] To achieve the above object, the present invention is implemented according to the technical solution described below.

[0005] A turret device for vacuum coating, characterized in that it includes a turret body for assembling tooling fixtures, and a magnetic fluid device and a driving mechanism located outside the coating chamber, a mounting hole is provided on the chamber bottom plate of the coating chamber, the magnetic fluid device includes a magnetic fluid body and an upper connecting shaft portion and a lower connecting shaft portion respectively provided on the upper and lower ends of the magnetic fluid body, the magnetic fluid body is mounted on the chamber bottom plate through an insulating sealing assembly, the upper connecting shaft portion passes through the mounting hole and is connected to the turret body, and the lower connecting shaft portion is transmission-connected to the driving mechanism.

[0006] An A1 mounting plate is fixedly installed on the outside of the chamber bottom plate, an assembly part is provided on the magnetic fluid body, the insulating sealing assembly includes an insulating plate member located between the A1 mounting plate and the assembly part, A assembly holes are arranged on the assembly part along the circumference thereof at intervals, the assembly part, the insulating plate member and the A1 mounting plate are arranged in a superimposed manner, and assembly bolts for realizing a fixed connection between the magnetic fluid body and the A1 mounting plate are provided in the A assembly hole, and an insulating sleeve is provided on the assembly bolt.

[0007] The insulating sealing component also includes an insulating sleeve which is hollowly sleeved on the upper connecting shaft portion, the lower end of the insulating sleeve is fixedly assembled and connected with the insulating plate, and the upper end of the insulating sleeve is extended into the coating cavity.

[0008] The shaft body of the upper connecting shaft part located in the coating chamber is sleeved with a dust cover, and the dust cover is fixedly mounted on the bottom plate of the chamber.

[0009] A transmission wheel A is arranged on the lower connecting shaft, the driving mechanism includes a driving motor, a transmission wheel B is arranged on the output shaft of the driving motor, the transmission wheel A and the transmission wheel B are connected in transmission, and the transmission wheel A is installed on the lower connecting shaft through an A insulating member, a pressure cover and a coupling.

[0010] The lower connecting shaft portion is a variable diameter shaft portion, including an A1 shaft segment and an A2 shaft segment arranged upper and lower, the outer diameter of the A1 shaft segment is larger than the outer diameter of the A2 shaft segment, the A transmission wheel is installed on the A1 shaft segment, and also includes a copper sleeve for power connection, the copper sleeve and the A2 shaft segment are concentric and rotationally contacted, the copper sleeve is installed on the power connection mounting bracket, and the power connection mounting bracket is fixedly installed on the chamber bottom plate.

[0011] The A transmission wheel and the B transmission wheel are connected through a transmission belt, and a guide mechanism for guiding the transmission belt is arranged between the driving motor and the magnetic fluid device.

[0012] The power connection mounting bracket includes a horizontal mounting plate arranged horizontally and a vertical mounting plate arranged vertically. The vertical mounting plate is located inside the transmission belt, and the vertical mounting plate is suspended on the chamber bottom plate. The horizontal mounting plate is fixedly mounted on the lower end of the vertical mounting plate. An insulating mounting plate is fixedly mounted on the horizontal mounting plate, and the lower end of the copper sleeve is fixedly mounted on the insulating mounting plate. A suspended induction switch bracket is also provided on the insulating mounting plate. The induction switch bracket is used to install the induction switch. An induction block is provided on the side of the induction switch, and the induction block is fixedly mounted on the lower end of the lower connecting shaft through an induction mounting piece.

[0013] The belt surface of the transmission belt is arranged vertically, and the guide mechanism includes two guide sub-units for guiding the belt bodies inside and outside the transmission belt respectively. The guide sub-unit includes upper guide rollers and lower guide rollers arranged correspondingly at the upper and lower ends of the upper mounting shaft and the lower mounting shaft respectively. The upper guide rollers and the lower guide rollers clamp and guide the belt body. The upper mounting shaft and the lower mounting shaft are fixedly installed on the guide bracket. The guide bracket is composed of a vertically arranged A1 connector and a horizontally arranged A2 connector. The guide bracket is fixedly installed on the chamber bottom plate through an A2 mounting plate.

[0014] The driving motor is fixedly mounted on the chamber bottom plate through a motor bracket, and a clamping piece for clamping the B driving wheel is arranged on the output shaft of the driving motor.

[0015] The above-mentioned scheme provided by the present invention moves the guiding and sealing structure of the magnetic fluid device from the vacuum end to the atmosphere end, thereby solving the problem of easy wear of the bearings inside the magnetic fluid device under vacuum conditions; the transmission structure is replaced from a traditional integrated structure to a combined structure, thereby not only transmitting the bias high-voltage current of the coating equipment directly to the inside of the vacuum chamber through the magnetic fluid device, but also enabling the driving motor to drive the magnetic fluid to rotate through the isolation of the insulating parts; adding a guiding structure can adjust the problem of the two transmission wheels not being in the same horizontal plane due to the uneven chamber bottom plate, the processing and assembly errors of the assembly, and the deflection of the synchronous belt caused by the wear in the later operation; thereby improving the service life and reliability of the coating equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the structure of the present invention.

[0017] Figure 2 for Figure 1 Schematic cross-sectional view of .

[0018] Figure 3 A cross-sectional view of the guide mechanism.

[0019] Figure 4 for Figure 2 Enlarged schematic diagram at point A in the middle.

[0020] Explanation of the figure numbers: 10-chamber bottom plate, 11-rotating frame body, 20-magnetic fluid body, 21-assembly part, 22-insulating plate, 23-A1 mounting plate, 24-insulating sleeve, 25-dust cover, 26-assembly bolt, 27-insulating sleeve, 30-driving motor, 31-motor bracket, 32-B transmission wheel, 33-pressing piece, 34-A transmission wheel, 35-transmission belt, 41-vertical mounting plate, 42-horizontal mounting plate, 43-insulating mounting plate, 44-copper sleeve, 45-induction switch bracket, 46-induction block, 47-induction mounting piece, 48-pressure cover, 51-upper guide roller, 52-lower guide roller, 53-upper mounting shaft, 54-lower mounting shaft, 55-A1 connecting piece, 56-A2 connecting piece. DETAILED DESCRIPTION

[0021] In order to make the purpose and advantages of the present invention more clearly understood, the present invention is specifically described below in conjunction with embodiments. It should be understood that the following text is only used to describe one or several specific embodiments of the present invention, and does not strictly limit the scope of protection of the specific claims of the present invention.

[0022] As used herein, the terms "parallel," "perpendicular," and the like are not limited to their strict geometric definitions, but include tolerances for reasonable and inconsistent machining or human errors.

[0023] like Figures 1 to 3As shown, a turret device for vacuum coating includes a turret body 11 for assembling a fixture, a magnetic fluid device and a driving mechanism located outside the coating chamber, a mounting hole is provided on the chamber bottom plate 10 of the coating chamber, the magnetic fluid device includes a magnetic fluid body 20 and an upper connecting shaft and a lower connecting shaft respectively provided at the upper and lower ends of the magnetic fluid body 20, the magnetic fluid body 20 is installed on the chamber bottom plate 10 through an insulating sealing component, the upper connecting shaft passes through the mounting hole and is connected to the turret body 11, and the lower connecting shaft is connected to the driving mechanism in a transmission manner. The turret body 11 is installed on the top of the magnetic fluid device by bolts, and is used to carry a fixture or a workpiece carrier in a vacuum chamber. The upper connecting shaft extends into the vacuum chamber and is connected to the turret body 11, the bearing end in the magnetic fluid body 20 is installed outside the chamber, and the bearing inside the magnetic fluid body 20 is prevented from contacting the vacuum by sealing. A heat dissipation structure is also provided on the magnetic fluid device, and the heat dissipation structure can dissipate heat from the upper connecting shaft (magnetic fluid body 20) after it contacts high temperature.

[0024] The specific scheme is as follows: an A1 mounting plate 23 is fixedly mounted on the outside of the chamber bottom plate 10, an assembly portion 21 is provided on the magnetic fluid body 20, an insulating sealing assembly includes an insulating plate 22 located between the A1 mounting plate 23 and the assembly portion 21, and A assembly holes are arranged on the assembly portion 21 along its circumferential intervals. The assembly portion 21, the insulating plate 22 and the A1 mounting plate 23 are arranged in a superimposed manner, and an assembly bolt 26 for realizing a fixed connection between the magnetic fluid body 20 and the A1 mounting plate 23 is provided in the A assembly hole, and an insulating sleeve 27 is sleeved on the assembly bolt 26. The specific assembly portion 21 can be composed of a flange provided on the magnetic fluid body 20, and the A1 mounting plate 23 can be fixedly connected to the chamber bottom plate 10 by welding. The assembly bolt 26 is installed in the insulating sleeve 27 to prevent electrical conduction. The magnetic fluid body 20 is isolated by the insulating plate 22 to prevent the current of the magnetic fluid body 20 from being conducted to the vacuum chamber.

[0025] like Figure 2 , 4 As shown: the insulating sealing assembly also includes an insulating sleeve 27 tube 24 which is hollowly sleeved on the upper connecting shaft portion, the lower end of the insulating sleeve 27 tube 24 is fixedly assembled and connected to the insulating plate 22, and the upper end of the insulating sleeve 27 tube 24 extends into the coating chamber. Specifically, the insulating sleeve 27 tube 24 and the insulating plate 22 can be fixedly connected by a bolt assembly. A dust cover 25 is sleeved on the shaft body of the upper connecting shaft portion located in the coating chamber, and the dust cover 25 is fixedly mounted on the chamber bottom plate 10. The function of the dust cover 25 is to prevent dust from entering the gap between the insulating sleeve 27 tube 24 and the upper connecting shaft portion, and the dust cover 25 is fixed to the chamber bottom plate 10 by a bolt assembly.

[0026] like Figure 2As shown: A transmission wheel 34 is arranged on the lower connecting shaft, the driving mechanism includes a driving motor 30, and a B transmission wheel 32 is arranged on the output shaft of the driving motor 30. The A transmission wheel 34 is connected to the B transmission wheel 32 in a transmission manner, and the A transmission wheel 34 is installed on the lower connecting shaft through the A insulating member, the pressure cap 48 and the coupling. In detail, the coupling is connected to the lower connecting shaft through a flat key, and the coupling is fixedly connected to the A insulating member and the A transmission wheel 34 through bolts, and then fixed to the step of the lower connecting shaft by the pressure cap 48. Through the isolation of the A insulating member, the high voltage current of the magnetic fluid body 20 can be isolated. The lower connecting shaft portion is a variable diameter shaft portion, including an A1 shaft segment and an A2 shaft segment arranged upper and lower, the outer diameter of the A1 shaft segment is larger than the outer diameter of the A2 shaft segment, the A transmission wheel 34 is installed on the A1 shaft segment, and also includes a copper sleeve 44 for power connection, the copper sleeve 44 and the A2 shaft segment are concentric and rotationally contacted, the copper sleeve 44 is installed on the power connection mounting bracket, and the power connection mounting bracket is fixedly installed on the chamber bottom plate 10.

[0027] like Figure 3 As shown: A drive wheel 34 and B drive wheel 32 are connected through a transmission belt 35, and a guide mechanism for guiding the transmission belt 35 is provided between the drive motor 30 and the magnetic fluid device. A drive wheel 34 and B drive wheel 32 are connected through a transmission belt 35 (synchronous belt). The advantages of the transmission belt 35 are accurate and smooth transmission, small error, and low noise; the transmission belt 35 is made of high-strength, wear-resistant non-metallic materials, good durability and insulation; no assembly and splicing are required, and the installation and adjustment are simple and easy to maintain. The guide mechanism installed on the running path of the transmission belt 35 prevents the synchronous belt from being deflected due to excessive horizontality of the master and driven wheels and wear in the later operation. The power connection mounting bracket includes a horizontal mounting plate 42 arranged horizontally and a vertical mounting plate 41 arranged vertically. The vertical mounting plate 41 is located in the transmission belt 35 and is suspended on the chamber bottom plate 10. The horizontal mounting plate 42 is fixedly mounted on the lower end of the vertical mounting plate 41. An insulating mounting plate 43 is fixedly mounted on the horizontal mounting plate 42. The lower end of the copper sleeve 44 is fixedly mounted on the insulating mounting plate 43. The insulating mounting plate 43 is also provided with a suspended induction switch bracket 45. The induction switch bracket 45 is used to install the induction switch. A sensing block 46 is provided on the side of the induction switch. The sensing block 46 is fixedly mounted on the lower end of the lower connecting shaft through an induction mounting member 47. The vertical mounting plate 41 in the power connection mounting bracket is fixed on the A2 mounting plate by bolts. The insulating mounting plate 43 is connected to the horizontal mounting plate 42 and the copper sleeve 44 by bolts. The insulating mounting plate 43 plays the role of isolating the current of the copper sleeve 44. The copper sleeve 44 fits in contact with the magnetic fluid body 20 and is used to power the magnetic fluid device. The induction switch bracket 45 is installed at the bottom of the insulating mounting plate 43, and the induction block 46 and the mounting piece are fixed at the bottom of the magnetic fluid body 20 and rotate with the magnetic fluid body 20. The induction switch (photoelectric sensor) installed on the induction switch bracket 45 can detect the position and count.

[0028] The belt surface of the transmission belt 35 is arranged vertically, and the guide mechanism includes two guide sub-units for guiding the belt bodies inside and outside the transmission belt 35 respectively. The guide sub-unit includes an upper guide roller 51 and a lower guide roller 52 arranged correspondingly at the upper and lower ends of the upper mounting shaft 53 and the lower mounting shaft 54, respectively. The upper guide roller 51 and the lower guide roller 52 sandwich and guide the belt body. The upper mounting shaft 53 and the lower mounting shaft 54 ​​are fixedly mounted on the guide bracket, and the guide bracket is composed of a vertically arranged A1 connector 55 and a horizontally arranged A2 connector 56. The guide bracket is fixedly mounted on the chamber bottom plate 10 through an A2 mounting plate. The A2 mounting plate can be fixedly mounted on the chamber bottom plate 10 by welding. The guide mechanism is fixedly connected to the A2 mounting plate by bolts, and the upper mounting shaft 53, the lower mounting shaft 54, the upper guide roller 51, the lower guide roller 52, the upper mounting shaft 53, the lower mounting shaft 54, the A1 connecting member 55, and the A2 connecting member 56 are fixed by bolts, and the upper guide roller 51 and the lower guide roller 52 are close to the side of the transmission belt 35. The drive motor 30 is fixedly mounted on the chamber bottom plate 10 through the motor bracket 31, and a clamping member 33 for clamping the B transmission wheel 32 is provided on the output shaft of the drive motor 30. Specifically, the drive motor 30 is fixed on the A3 mounting plate, and the A3 mounting plate is fixedly mounted on the chamber bottom plate 10 by welding. The motor bracket 31 is fixed to the A3 mounting plate by bolts. The B transmission wheel 32 is connected to the output shaft of the drive motor 30 by a key. If the load of the rotating frame body 11 is heavy, the belt size needs to be set larger, resulting in the B transmission wheel 32 being larger than the output shaft of the driving motor 30 , so a clamping member 33 is installed on the upper end of the B transmission wheel 32 for tightening.

[0029] The above scheme moves the guiding and sealing structure of the magnetic fluid device from the vacuum end to the atmospheric end, which can solve the problem of easy wear of the internal bearings of the magnetic fluid device under vacuum conditions; the transmission structure is replaced from a traditional integrated structure to a combined structure, which can not only directly transmit the bias high-voltage current of the coating equipment to the inside of the vacuum chamber through the magnetic fluid device, but also enable the drive motor 30 to drive the magnetic fluid to rotate through the isolation of the insulating parts; adding a guiding structure can adjust the problem of synchronous belt deflection caused by the unevenness of the chamber bottom plate 10, the two transmission wheels not being in the same horizontal plane due to the processing and assembly errors of the assembly, and the later operation wear; thereby improving the service life and reliability of the coating equipment.

[0030] The above is only a preferred embodiment of the present invention. It should be noted that, for those skilled in the art, several improvements and modifications can be made without departing from the principles of the present invention, and these improvements and modifications should also be considered as the protection scope of the present invention. The structures, devices and operating methods not specifically described and explained in the present invention shall be implemented according to the conventional means in the art unless otherwise specified and limited.

Claims

1. A rotating rack device for vacuum coating, characterized in that: It includes a turret body for assembling tooling fixtures, and a magnetic fluid device and a driving mechanism located outside the coating chamber. A mounting hole is provided on the chamber bottom plate of the coating chamber. The magnetic fluid device includes a magnetic fluid body and an upper connecting shaft and a lower connecting shaft respectively provided at the upper and lower ends of the magnetic fluid body. The magnetic fluid body is installed on the chamber bottom plate through an insulating sealing component. The upper connecting shaft passes through the mounting hole and is connected to the turret body, and the lower connecting shaft is connected to the driving mechanism in a transmission manner.

2. The rotating rack device for vacuum coating according to claim 1, characterized in that: An A1 mounting plate is fixedly installed on the outside of the chamber bottom plate, an assembly part is provided on the magnetic fluid body, the insulating sealing assembly includes an insulating plate member located between the A1 mounting plate and the assembly part, A assembly holes are arranged on the assembly part along the circumference thereof at intervals, the assembly part, the insulating plate member and the A1 mounting plate are arranged in a superimposed manner, and assembly bolts for realizing a fixed connection between the magnetic fluid body and the A1 mounting plate are provided in the A assembly hole, and an insulating sleeve is provided on the assembly bolt.

3. The rotating rack device for vacuum coating according to claim 2, characterized in that: The insulating sealing component also includes an insulating sleeve which is hollowly sleeved on the upper connecting shaft portion, the lower end of the insulating sleeve is fixedly assembled and connected with the insulating plate, and the upper end of the insulating sleeve is extended into the coating cavity.

4. The rotating rack device for vacuum coating according to claim 2, characterized in that: The shaft body of the upper connecting shaft part located in the coating chamber is sleeved with a dust cover, and the dust cover is fixedly mounted on the bottom plate of the chamber.

5. The rotating rack device for vacuum coating according to claim 1, characterized in that: A transmission wheel A is arranged on the lower connecting shaft, the driving mechanism includes a driving motor, a transmission wheel B is arranged on the output shaft of the driving motor, the transmission wheel A and the transmission wheel B are connected in transmission, and the transmission wheel A is installed on the lower connecting shaft through an A insulating member, a pressure cover and a coupling.

6. The rotating rack device for vacuum coating according to claim 5, characterized in that: The lower connecting shaft portion is a variable diameter shaft portion, including an A1 shaft segment and an A2 shaft segment arranged upper and lower, the outer diameter of the A1 shaft segment is larger than the outer diameter of the A2 shaft segment, the A transmission wheel is installed on the A1 shaft segment, and also includes a copper sleeve for power connection, the copper sleeve and the A2 shaft segment are concentric and rotationally contacted, the copper sleeve is installed on the power connection mounting bracket, and the power connection mounting bracket is fixedly installed on the chamber bottom plate.

7. The rotating rack device for vacuum coating according to claim 5 or 6, characterized in that: The A transmission wheel and the B transmission wheel are connected through a transmission belt, and a guide mechanism for guiding the transmission belt is arranged between the driving motor and the magnetic fluid device.

8. The rotating rack device for vacuum coating according to claim 6, characterized in that: The power connection mounting bracket includes a horizontal mounting plate arranged horizontally and a vertical mounting plate arranged vertically. The vertical mounting plate is located inside the transmission belt, and the vertical mounting plate is suspended on the chamber bottom plate. The horizontal mounting plate is fixedly mounted on the lower end of the vertical mounting plate. An insulating mounting plate is fixedly mounted on the horizontal mounting plate, and the lower end of the copper sleeve is fixedly mounted on the insulating mounting plate. A suspended induction switch bracket is also provided on the insulating mounting plate. The induction switch bracket is used to install the induction switch. An induction block is provided on the side of the induction switch, and the induction block is fixedly mounted on the lower end of the lower connecting shaft through an induction mounting piece.

9. The rotating rack device for vacuum coating according to claim 7, characterized in that: The belt surface of the transmission belt is arranged vertically, and the guide mechanism includes two guide sub-units for guiding the belt bodies inside and outside the transmission belt respectively. The guide sub-unit includes upper guide rollers and lower guide rollers arranged correspondingly at the upper and lower ends of the upper mounting shaft and the lower mounting shaft respectively. The upper guide rollers and the lower guide rollers clamp and guide the belt body. The upper mounting shaft and the lower mounting shaft are fixedly installed on the guide bracket. The guide bracket is composed of a vertically arranged A1 connector and a horizontally arranged A2 connector. The guide bracket is fixedly installed on the chamber bottom plate through an A2 mounting plate.

10. The rotating rack device for vacuum coating according to claim 1, characterized in that: The driving motor is fixedly mounted on the chamber bottom plate through a motor bracket, and a clamping piece for clamping the B driving wheel is arranged on the output shaft of the driving motor.

Images