High-frequency coupling window based on internal cooling for high-power cyclotron

By adopting a combined design of air knife structure, conductor choke unit and ceramic coating in the coupling window of the high-power cyclotron, the problem of poor heat dissipation of the ceramic sheet is solved, efficient cooling and stable operation are achieved, and the temperature and burst risk of the ceramic sheet are reduced.

CN119584408AActive Publication Date: 2025-03-07CHINA INSTITUTE OF ATOMIC ENERGY

Patent Information

Application Number
CN202411760892.5
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-12-03
Publication Date
2025-03-07
Estimated Expiration
2044-12-03

AI Technical Summary

Technical Problem

The coupling window design of high-power cyclotron has the problem of low power efficiency and easy damage when feeding high-power signals, resulting in poor heat dissipation of the ceramic sheet and easy breakdown and fragmentation.

Method used

A high-frequency coupling window based on internal cooling is designed, using a wind knife structure and a conductor choke unit, combined with ceramic coating, to form an efficient heat dissipation and filtering circuit, reducing the power, heat and electronic bombardment risk of the ceramic sheet.

Benefits of technology

The cooling effect of the ceramic sheet is enhanced by the air knife structure, the TiN coating reduces secondary electron emission, and the conductor choke unit adjusts the inductance value, achieving stable operation of the coupling window under high duty cycle and high power conditions, reducing the surface temperature of the ceramic sheet and reducing the risk of explosion.

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Abstract

The invention discloses an internal-cooling-based high-frequency coupling window for a high-power cyclotron. The internal-cooling-based high-frequency coupling window is characterized in that an air knife structure is arranged at the atmosphere end of the internal-cooling-based high-frequency coupling window; two groups of conductor choke units with different lengths are arranged on two sides of a ceramic chip of the high-frequency coupling window based on internal cooling, and the two groups of conductor choke units with different lengths are equivalent to two groups of inductors and are used for forming a double-filter circuit of the high-frequency coupling window; a ceramic coating film is arranged on one side of the ceramic sheet of the high-frequency coupling window; according to the air knife structure, more heat on the surface of the ceramic chip is taken away through compressed air; on one hand, the filter unit and the conductor choke unit form a filter circuit of a high-frequency coupling window atmosphere end; according to the invention, the air knife structure is ingeniously utilized, and enhanced cooling is carried out on the ceramic wafer of the coupling window structure; the inductance value of the coupling window is adjusted by using the conductor choke unit, the standing-wave ratio coefficient of the coupling window is reduced, the surface temperature of the ceramic chip is reduced, and the risk of explosion of the coupling window is reduced.
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Description

Technical Field

[0001] The present invention belongs to the technical field of cyclotron accelerators, and more particularly, relates to a high-frequency coupling window based on internal cooling for a high-power cyclotron accelerator. Background Art

[0002] The coupling window is an important device for feeding power into the cyclotron.

[0003] The design difficulties of the high-frequency coupling window of a high-power cyclotron are: first, because it is a high-power cyclotron, the power fed into the cyclotron through the coupling window is very high, resulting in a relatively large amount of heat generated by the high power; second, the outer conductor of the high-power coupling window is easy to dissipate heat, but the ceramic sheet on the inner conductor is not easy to dissipate heat. The reason is that the ceramic sheet is located inside the coupling window. Since the coupling window is a fixed part, it is not easy to add a water cooling device inside once it is formed. Therefore, there is no feasible way to dissipate the heat of the ceramic sheet inside the coupling window.

[0004] The reason why the ceramic sheet inside the coupling window needs to dissipate heat is that when the transmitted power is too large, a large number of secondary electrons will escape from the ceramic surface of the coupling window under the influence of the secondary electron multiplication effect, causing the ceramic to be easily broken down. In addition, at the vacuum end of the ceramic window, where the ceramic sheet is connected to the inner and outer conductors, the metal vapor will quickly escape due to the occurrence of sparking and react on the surface of the ceramic sheet, causing the surface temperature of the ceramic sheet to rise, and the ceramic sheet will break due to uneven heating.

[0005] In the art, heat dissipation of high-power coupling windows is generally limited to dissipating heat to the outer conductor of the coupling window, indirectly dissipating heat to the inner conductor of the coupling window by dissipating heat to the outer conductor of the coupling window, or adopting natural cooling. These methods cannot achieve the ideal cooling effect of the ceramic sheet and effectively protect the ceramic sheet structure in the coupling window.

[0006] In summary, the more mature cyclotron coupling window design in engineering practice is based on low-power coupling window design, while there is no precedent for high-power coupling window design; therefore, the design of the coupling window is subject to the dual limitations of low feed-in power efficiency and easy damage when feeding high-power signals, which greatly restricts the application scope of high-power cyclotron coupling windows and the improvement of their economic efficiency. Summary of the invention

[0007] In order to solve the problems existing in the prior art, the present invention proposes a high-frequency coupling window based on internal cooling for a high-power cyclotron accelerator, aiming to solve the dual limitations of the design of the coupling window in the prior art, namely, low efficiency of fed-in power and easy damage when fed-in high-power signals.

[0008] The present invention proposes the following technical solutions to solve the technical problems:

[0009] A high-frequency coupling window based on internal cooling for high-power cyclotron is proposed

[0010] A high-frequency coupling window based on internal cooling for a high-power cyclotron accelerator, characterized in that: a wind knife structure (2) is provided at the atmospheric end of the high-frequency coupling window based on internal cooling; two groups of conductor choke units with different lengths are provided on the outer conductor and inner conductor on both sides of the ceramic sheet (1-4) of the high-frequency coupling window based on internal cooling, and the two groups of inner conductor choke units (1-2) with different lengths are equivalent to two groups of inductors, and are used to form a double filtering circuit of the high-frequency coupling window; a ceramic coating (1-3) is provided on one side of the ceramic sheet (1-4) of the high-frequency coupling window based on internal cooling;

[0011] The wind knife structure (2) increases the air velocity on the surface of the ceramic sheet by compressing the air to remove more heat from the surface of the ceramic sheet; and together with the conductor choke unit, forms a filter circuit at the atmospheric end of the high-frequency coupling window, and further reduces the power heat absorbed by the high-frequency coupling window ceramic sheet (1-4) through the filter circuit at the atmospheric end.

[0012] The ceramic coating (1-3) is a ceramic coating with a set thickness, and the ceramic coating (1-3) with the set thickness can protect the ceramic from being bombarded by electrons and can accept as little high power as possible, thereby further reducing the power heat absorbed by the high-frequency coupling window ceramic sheet (1-4).

[0013] Furthermore, the high-frequency coupling window based on internal cooling comprises: a cylindrical high-frequency coupling window (1), a coupling window inner conductor (1-1) and a coupling window outer conductor (1-2) arranged along the axial direction of the cylindrical high-frequency coupling window, wherein the coupling window outer conductor (1-2) surrounds the coupling window inner conductor (1-1); a ceramic sheet (1-4) crosses and is perpendicular to the coupling window inner conductor (1-1) and the coupling window outer conductor (1-2); one side of the ceramic sheet (1-4) is a vacuum cavity, and the other side is an atmospheric cavity; a cylindrical wind knife structure (2) is connected to the outer end surface of the atmospheric cavity, wherein the wind knife structure (2) comprises a wind knife inner conductor (2-1), a wind knife outer conductor (2-2), and a wind knife slit structure (2-3) arranged between the wind knife inner conductor (2-1) and the wind knife outer conductor (2-2), wherein the wind knife slit structure (2-3) is arranged between the wind knife inner conductor (2-1) and the wind knife outer conductor (2-2), wherein the wind knife slit structure (2-3) is arranged between the wind knife inner conductor (2-1) and the wind knife outer conductor (2-2), wherein the wind knife slit structure (2-4) is a vacuum cavity. The slit structure (2-3) is welded on the inner surface of the wind knife outer conductor (2-2); the wind knife inner conductor (2-1) and the coupling window inner conductor (1-1) have the same diameter and are connected; the wind knife outer conductor (2-2) and the coupling window outer conductor (1-2) have the same diameter and are connected; the atmosphere enters from the wind knife air inlet (2-4), passes through the gap of the wind knife slit structure (2-3) to reach the wind knife structure inner conductor (2-1) and the coupling window inner conductor (1-1-1-1), then from the coupling window inner conductor (1-1-1-1) to the ceramic sheet (1-4), from the ceramic sheet (1-4) to the coupling window air outlet (1-5), and finally discharges the hot air into the atmosphere, thereby forming a heat dissipation channel from the wind knife air inlet (2-4) to the coupling window air outlet (1-5) for dissipating heat from the ceramic sheet (1-4).

[0014] Furthermore, the ceramic coating (1-3) of a set thickness is arranged on a side of the ceramic sheet (1-4) facing the vacuum chamber, and the ceramic coating (1-3) is not greater than TiN coating, which is not greater than The TiN coating can protect (1-5) from electron bombardment and minimize the amount of high power received, thereby further reducing the power heat absorbed by the high-frequency coupling window ceramic piece (1-4).

[0015] Furthermore, the wind knife structure (2) is made of Teflon material and is connected to the atmospheric end of the high-frequency coupling window by means of a flange structure and screws, so as to directly cool the coupling window ceramic sheet structure.

[0016] Furthermore, the wind knife slit structure (2-3) is composed of a slit structure upper layer (2-3-1) and a slit structure lower layer (2-3-2); the slit structure upper layer (2-3-1) and the slit structure lower layer (2-3-2) form a low-speed narrow zone (2-5-1), a dust adsorption zone (2-5-2), and a spacious acceleration zone (2-5-3) from the outside to the inside; the slit of the low-speed narrow zone (2-5-1) is relatively narrow and has a relatively high pressure, and the wind speed is relatively low; the dust adsorption zone (2-5-2) is provided with a downwardly concave O-ring groove, the O-ring groove is used to arrange an O-ring for blocking dust, and the top of the O-ring and the slit structure upper layer (2-3-1) form a slit zone with a relatively narrow slit; the spacious acceleration zone (2-5-3) is adjacent to the dust adsorption zone, and the spacious acceleration zone (2-5-3) is adjacent to the dust adsorption zone. The gap of the wide acceleration zone (2-5-2) changes from narrow to wide, so that the pressure in the area suddenly decreases and the wind speed suddenly increases. The bottom shape of the gap in the spacious acceleration zone (2-5-2) is a "boat" shape with both ends tilted upward. One end of the "boat" is connected to the dust adsorption zone, and the other end is matched with the tongue shape of the upper layer (2-3-1) of the slit structure to form an atmospheric passage vertically downward at the "stern". After the atmosphere enters the "boat" area from the dust adsorption zone, an upward vortex airflow is generated, and the vortex airflow then flows out from the atmospheric passage vertically downward at the "stern" and is vertically sprayed onto the conductor (2-1) in the wind knife structure, and cools the ceramic sheet (1-4) connected to the conductor (1-1-1) in the coupling window through the conductor (2-1) in the wind knife structure and the conductor (1-1-1) in the coupling window.

[0017] Furthermore, the two groups of conductor choke units of unequal lengths refer to the outer conductor choke unit and the inner conductor choke unit on the vacuum side of the ceramic sheet (1-4) being one group, and the outer conductor choke unit and the inner conductor choke unit on the atmosphere side of the ceramic sheet (1-4) being one group; the unequal lengths refer to the conductor choke unit on the inner conductor of each group of conductor choke units being inconsistent in length with the conductor choke unit on the outer conductor, but the outer conductor choke units on both sides of the ceramic sheet (1-4) being consistent in length, and the inner conductor choke units being consistent in length.

[0018] Furthermore, the length of the conductor choke unit on one side of the outer conductor is relatively long, 6 mm, and the length on one side of the inner conductor is relatively short, 4.49 mm.

[0019] Furthermore, the cylindrical high-frequency coupling window (1) is equivalent to a capacitor C2 located between the inner conductor (1-1) of the coupling window and the outer conductor (1-2) of the coupling window, and the cylindrical wind knife structure (2) is equivalent to a capacitor C1 located between the inner conductor (2-1) of the wind knife and the outer conductor (2-2) of the wind knife. After the wind knife structure (2) is added, it is equivalent to connecting a capacitor C1 in parallel after the capacitor C2 corresponding to the cylindrical high-frequency coupling window (1); the capacitor C1 and the first group of conductor choke units L1 and L3 form a first filtering circuit; the capacitor C2 and the second group of conductor choke units L2 and L4 form a second filtering circuit.

[0020] Advantages and effects of the present invention

[0021] The present invention cleverly utilizes the wind knife structure to enhance the cooling of the ceramic sheet of the coupling window structure; and uses the TiN coating on the vacuum side of the coupling window ceramic sheet to reduce the secondary electron emission coefficient, reducing the occurrence of the secondary electron multiplication effect, and adopts a simpler TiN coating thickness inspection method to realize the inspection of the TiN coating thickness; uses the conductor choke unit to adjust the coupling window inductance value, reduces the coupling window standing wave ratio coefficient, and finally realizes the stable operation of the coupling window under high duty cycle and high power conditions, reduces the surface temperature of the ceramic sheet, and reduces the risk of the coupling window bursting. The design goals of meeting the requirements of low loss, high transmission efficiency, and reduced temperature rise of the coupling window are achieved. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is an application effect diagram of the coupling window heat dissipation device of the present invention;

[0023] Figure 2 This is an outline diagram of the coupling window heat dissipation device of the present invention;

[0024] Figure 3 It is a cross-sectional view of the coupling window heat dissipation device of the present invention;

[0025] Figure 4 This is a cross-sectional view of the wind knife slit structure of the coupling window heat dissipation device of the present invention;

[0026] Figure 5 This is an equivalent circuit diagram of the coupling window heat dissipation device of the present invention.

[0027] In the figure: 1: high-frequency coupling window; 1-1-1: inner conductor of coupling window; 1-1-2: outer conductor of coupling window; 1-2: inner conductor choke unit; 1-3: ceramic coating; 1-4: ceramic sheet; 1-5: coupling window air outlet; 2: wind knife structure; 2-1: inner conductor of wind knife; 2-2: outer conductor of wind knife; 2-3: wind knife slit structure; 2-3-1: upper layer of slit structure; 2-3-2: lower layer of slit structure; 2-4: wind knife air inlet; 2-5-1: low-speed narrow area; 2-5-2: dust adsorption area; 2-5-3: spacious acceleration area; DETAILED DESCRIPTION

[0028] The present invention will be further explained below in conjunction with the accompanying drawings.

[0029] Design principle of the present invention

[0030] 1. The innovation of the present invention: The innovation lies in the comprehensive consideration and coordinated solution of the various elements that cause heat inside the coupling window, including the heat caused when the coupling window feeds high power into the high-frequency cavity, the heat caused by the heating element (ceramic coating) inside the coupling window, and the heat caused by the power corresponding to the invalid electrical signal inside the coupling window. The relationship between reducing these three types of heat is interdependent. Any improper handling will cause the surface temperature of the ceramic sheet to rise and the heating will be uneven, causing the ceramic sheet to break. Assuming that only the wind knife structure 2 at the atmospheric end of the coupling window is added, and the compressed atmosphere is used to dissipate heat for the two inner conductors and the surface of the ceramic sheet, while ignoring the design of the thickness of the ceramic coating, the result will be even worse. Because the ceramic coating is directly coated on the ceramic sheet, and the ceramic coating is a metal heating element, the thicker the thickness of the heating element, the higher the heat generation. Assuming that only the problems of high-power heating and heating element heating are solved, but the high-power clutter signal is not effectively filtered, the wind knife heat dissipation and ceramic coating heat dissipation will be ineffective and fail to achieve the expected effect.

[0031] 2. Design principle of wind knife slit structure: The bottom shape of the spacious acceleration zone 2-5-2 of the wind knife slit structure 2-3 is a "boat" shape with both ends tilted upward. One end of the "boat" is connected to the dust adsorption area, and the other end is matched with the tongue shape of the upper layer 2-3-1 of the slit structure to form a downward vertical atmospheric channel at the "stern". The design principle of the "boat"-shaped gap and the downward vertical atmospheric channel is:

[0032] First, it plays a guiding role, fine-tuning the distribution and direction of compressed air to ensure that the gas flow rate is uniform and concentrated, thereby achieving a more efficient injection effect. This design can ensure that the airflow tangent is uniform and avoid the airflow from diffusing too quickly.

[0033] Second, this position is designed as a transition guide structure to reduce the turbulence of the airflow. Reducing turbulence helps to improve the stability and outlet speed of the airflow and improve the working efficiency of the wind knife. The part in the circle acts as an air rectifier, making the airflow form a laminar state at the outlet.

[0034] Third, by designing such a structure, the rigidity of the wind knife edge is strengthened, thereby avoiding deformation caused by vibration or airflow impact during long-term operation.

[0035] 3. Design principle of ceramic coating. The function of ceramic coating 1-3 is to protect ceramic sheets 1-4 from electron bombardment. If it is too thin, it cannot play a protective role. However, if it is too thick, it is very dangerous because it is a heating element and directly acts on ceramic sheets 1-4. The ceramic coating 1-3 of the present invention is not more than TiN coating, which is not greater than The TiN coating can protect 1-5 from electron bombardment and accept as little high power as possible, thereby further reducing the power heat absorbed by the high-frequency coupling window ceramic piece 1-4. The principle is as follows:

[0036] 1) Calculate the difference loss value within a reasonable range: Use a vector network analyzer to test the coupling window before and after the TiN coating, and the test results are shown in Table 1. The test in Table 1 proves that when the TiN coating is applied on the ceramic sheets 1-4, the TiN coating has ohmic loss, so the simple test method of measuring the resistance value of the ceramic sheet structure and the TiN coating to check whether the coating meets the design target is reasonable.

[0037] Table 1 Insertion loss value S before and after TiN coating 21

[0038]

[0039] The insertion loss value refers to the power loss of the input power signal at the coating due to the ohmic loss of the coating. When the input power is 40KW and the insertion loss value S21<-0.01dB, the power loss value is less than 400W, and the loss less than 400W is an acceptable loss in engineering practice. Therefore, we believe that when the measured insertion loss value S21<-0.01dB, the thickness of the TiN coating is an acceptable thickness in engineering practice.

[0040] 2) Calculate the thickness of ceramic coatings 1-4 by using the reasonable range of loss value S21<-0.01dB.

[0041] First, convert the measured S21 into a linear value. When the input power is 40KW, the power lost in the coating is 92W. It is known that the equivalent resistance of the coupling window structure is 50Ω, so it can be calculated that the current passing through the coating is about 28.28A. From the resistance calculation formula, it can be obtained that the resistance value of the coating is about 0.115Ω. The resistivity of the TiN material is about 0.2mΩ / m, the radius of the ceramic sheet is 61.99mm, and the effective coverage width is about 100mm. It is calculated that the coating thickness is about 6nm.

[0042] 4. Design principle of the conductor choke unit: The present invention designs the conductor choke unit to be asymmetric, and the asymmetry means that the length of the conductor choke unit of the inner conductor is inconsistent with that of the conductor choke unit of the outer conductor. The length of the conductor choke unit on one side of the outer conductor is relatively long, 6 mm, and the length on the inner conductor side is relatively short, 4.49 mm.

[0043] (1) The different positions and functions of the inner and outer conductors in the electromagnetic coupling window structure lead to significant differences in their electromagnetic environments. The electric field strength near the inner conductor is relatively high and the magnetic field strength is relatively low, so the conductor choke unit structure is required to have a lower inductance to reduce parasitic inductance; the electric field strength of the outer conductor is relatively low and the magnetic field strength is relatively high, so the outer conductor acts as a shell to suppress external interference signals and avoid signal leakage from the inner conductor, requiring a higher inductance to optimize the shielding effect of the magnetic field.

[0044] (2) In the coupling window structure, the asymmetric inductance design can better control the directionality of energy transmission. ① Reduce the reflection coefficient: The electromagnetic field coupling characteristics of the inner and outer conductors are adjusted by asymmetric inductance distribution, and the standing wave ratio is reduced, thereby improving the signal transmission efficiency. ② Optimize power distribution: The difference in internal and external inductance can achieve precise control of high-frequency power flow and reduce energy loss.

[0045] (3) The higher inductance of the outer conductor choke unit structure enables the coupling window to form a specific resonance point to suppress non-target frequency signals. The lower inductance of the inner conductor choke unit structure avoids resonance interference in the target frequency range, thereby improving the transmission quality of the target signal.

[0046] Based on the above principles, the present invention designs a high-frequency coupling window based on internal cooling for high-power cyclotron, such as Figure 1 , Figure 2 , Figure 3 As shown, the characteristics are: a wind knife structure 2 is provided at the atmospheric end of the high-frequency coupling window based on internal cooling; two groups of conductor choke units with different lengths are provided on the outer conductor and the inner conductor on both sides of the ceramic sheet 1-4 based on internal cooling, and the two groups of inner conductor choke units 1-2 with different lengths are equivalent to two groups of inductors, which are used to form a double filtering circuit of the high-frequency coupling window; a ceramic coating 1-3 is provided on one side of the ceramic sheet 1-4 based on internal cooling;

[0047] The wind knife structure 2, on the one hand, increases the air velocity on the surface of the ceramic sheet by compressing the air to take away more heat from the surface of the ceramic sheet; on the other hand, together with the conductor choke unit, it forms a filter circuit at the atmospheric end of the high-frequency coupling window, and further reduces the power heat absorbed by the high-frequency coupling window ceramic sheets 1-4 through the filter circuit at the atmospheric end;

[0048] The ceramic coating 1-3 is a ceramic coating with a set thickness. The ceramic coating 1-3 with the set thickness can protect the ceramic from being bombarded by electrons and can accept as little high power as possible, thereby further reducing the power heat absorbed by the high-frequency coupling window ceramic piece 1-4.

[0049] Supplementary Note 1

[0050] like Figure 1 As shown, in this embodiment, the high-frequency coupling window based on internal cooling is used to feed power into the high-frequency cavity of the cyclotron. A transmission line is provided between the high-frequency coupling window based on internal cooling and the high-frequency cavity, and high power is fed into the high-frequency cavity of the cyclotron through the transmission line.

[0051] like Figure 2 , Figure 3 As shown, the high-frequency coupling window based on internal cooling includes: a cylindrical high-frequency coupling window 1, a coupling window inner conductor 1-1-1 and a coupling window outer conductor 1-1-2 arranged along the axial direction of the cylindrical high-frequency coupling window, and the coupling window outer conductor 1-1-2 surrounds the coupling window inner conductor 1-1-1; a ceramic sheet 1-4 crosses and is perpendicular to the coupling window inner conductor 1-1-1 and the coupling window outer conductor 1-1-2; one side of the ceramic sheet 1-4 is a vacuum cavity, and the other side is an atmospheric cavity; a cylindrical wind knife structure 2 is connected to the outer end surface of the atmospheric cavity, and the wind knife structure 2 includes a wind knife inner conductor 2-1, a wind knife outer conductor 2-2, a wind knife slit structure 2-3 arranged between the wind knife inner conductor 2-1 and the wind knife outer conductor 2-2, and a wind knife inlet. The wind hole 2-4, the wind knife slit structure 2-3 is welded on the inner surface of the wind knife outer conductor 2-2; the wind knife inner conductor 2-1 and the coupling window inner conductor 1-1-1 have the same diameter and are connected, the wind knife outer conductor 2-2 and the coupling window outer conductor 1-1-2 have the same diameter and are connected, the atmosphere enters from the wind knife air inlet 2-4, passes through the gap of the wind knife slit structure 2-3 to reach the wind knife structure inner conductor 2-1 and the coupling window inner conductor 1-1-1, and then from the coupling window inner conductor 1-1-1 to the ceramic sheet 1-4, from the ceramic sheet 1-4 to the coupling window air outlet 1-5, and finally discharges the hot air into the atmosphere, thereby forming a heat dissipation channel from the wind knife air inlet 2-4 to the coupling window air outlet 1-5 specifically for dissipating the heat of the ceramic sheet 1-4.

[0052] like Figure 2 As shown, the ceramic coating 1-3 of set thickness is arranged on the side of the ceramic sheet 1-4 facing the vacuum chamber. The ceramic coating 1-3 is a TiN coating of no more than 6 mm. The TiN coating of no more than 6 mm can protect the ceramic sheet 1-4 from electron bombardment and minimize the acceptance of high power, thereby further reducing the power heat absorbed by the high-frequency coupling window ceramic sheet 1-4.

[0053] like Figure 2As shown, the wind knife structure 2 is made of Teflon material and is connected to the atmospheric end of the high-frequency coupling window by means of a flange structure through screws to directly cool the coupling window ceramic sheet structure.

[0054] like Figure 3 , Figure 4 As shown, the wind knife slit structure 2-3 is composed of a slit structure upper layer 2-3-1 and a slit structure lower layer 2-3-2; the slit structure upper layer 2-3-1 and the slit structure lower layer 2-3-2 form a low-speed narrow zone 2-5-1, a dust adsorption zone 2-5-2, and a spacious acceleration zone 2-5-3 from the outside to the inside; the gap of the low-speed narrow zone is relatively narrow and the pressure is relatively large, and the wind speed is relatively low; the dust adsorption zone 2-5-2 is provided with a downwardly concave O-ring groove, the O-ring groove is used to arrange the O-ring for blocking dust, and the top of the O-ring and the slit structure upper layer 2-3-1 form a gap area with the narrowest gap; the spacious acceleration zone 2-5-3 is adjacent to the dust adsorption zone 2-5-2, and the spacious acceleration zone The gap becomes wider from narrow, so that the pressure in this area suddenly decreases and the wind speed suddenly increases. The bottom shape of the gap in the spacious acceleration zone is a "boat" shape with both ends tilted upward. One end of the "boat shape" is connected to the dust adsorption area, and the other end cooperates with the tongue shape of the upper layer 2-3-1 of the slit structure to form a vertical downward atmospheric channel at the "stern"; after the atmosphere enters the "boat-shaped" area from the dust adsorption area, an upward vortex airflow is generated, and the vortex airflow then flows out from the vertical downward atmospheric channel at the "stern" and is vertically sprayed on the conductor 2-1 in the wind knife structure, and cools the ceramic sheet 1-4 connected to the conductor 1-1-1 in the coupling window through the conductor 2-1 in the wind knife structure and the conductor 1-1-1 in the coupling window.

[0055] like Figure 2 , Figure 5 As shown, the two groups of conductor choke units of unequal lengths refer to the outer conductor choke unit and the inner conductor choke unit on the vacuum side of the ceramic sheet 1-4 being one group, and the outer conductor choke unit and the inner conductor choke unit on the atmosphere side of the ceramic sheet 1-4 being one group; the unequal lengths mean that the lengths of the conductor choke units on the inner conductor and the conductor choke units on the outer conductor of each group of conductor choke units are inconsistent, but the lengths of the outer conductor choke units on both sides of the ceramic sheet 1-4 are consistent, and the lengths of the inner conductor choke units are consistent.

[0056] Furthermore, the length of the conductor choke unit on one side of the outer conductor is relatively long, 6 mm, and the length on one side of the inner conductor is relatively short, 4.49 mm.

[0057] like Figure 2 , Figure 5As shown, the cylindrical high-frequency coupling window 1 is equivalent to a capacitor C2 located between the inner conductor 1-1-1 of the coupling window and the outer conductor 1-1-2 of the coupling window, and the cylindrical wind knife structure 2 is equivalent to a capacitor C1 located between the inner conductor 2-1 of the wind knife and the outer conductor 2-2 of the wind knife; after adding the wind knife structure 2, it is equivalent to connecting a capacitor C1 in parallel after the capacitor C2 corresponding to the cylindrical high-frequency coupling window 1; the capacitor C1 and the first group of conductor choke units L1 and L3 form a first filtering circuit; the capacitor C2 and the second group of conductor choke units L2 and L4 form a second filtering circuit.

[0058] It should be emphasized that the above specific embodiments are merely explanations of the present invention, and they are not limitations of the present invention. After reading this specification, those skilled in the art can make modifications to the above embodiments without any creative contribution as needed, but as long as they are within the scope of the claims of the present invention, they are protected by patent law.

Claims

1. A high-frequency coupling window based on internal cooling for a high-power cyclotron, characterized in that: A wind knife structure (2) is provided at the atmospheric end of the high-frequency coupling window based on internal cooling; two groups of conductor choke units with different lengths are provided on the outer conductor and the inner conductor on both sides of the ceramic sheet (1-4) based on internal cooling, and the two groups of inner conductor choke units (1-2) with different lengths are equivalent to two groups of inductors, and are used to form a dual filtering circuit of the high-frequency coupling window; a ceramic coating (1-3) is provided on one side of the ceramic sheet (1-4) based on internal cooling; The wind knife structure (2) increases the air velocity on the surface of the ceramic sheet by compressing the air to remove more heat from the surface of the ceramic sheet; and together with the conductor choke unit, forms a filter circuit at the atmospheric end of the high-frequency coupling window, and further reduces the power heat absorbed by the high-frequency coupling window ceramic sheet (1-4) through the filter circuit at the atmospheric end. The ceramic coating (1-3) is a ceramic coating with a set thickness, and the ceramic coating (1-3) with the set thickness can protect the ceramic from being bombarded by electrons and can accept as little high power as possible, thereby further reducing the power heat absorbed by the high-frequency coupling window ceramic sheet (1-4).

2. A high-frequency coupling window based on internal cooling for a high-power cyclotron according to claim 1, characterized in that: The high-frequency coupling window based on internal cooling comprises: a cylindrical high-frequency coupling window (1), a coupling window inner conductor (1-1-1-1) and a coupling window outer conductor (1-1-2) arranged along the axial direction of the cylindrical high-frequency coupling window, wherein the coupling window outer conductor (1-1-2) surrounds the coupling window inner conductor (1-1-1-1); a ceramic sheet (1-4) crosses and is perpendicular to the coupling window inner conductor (1-1-1-1) and the coupling window outer conductor (1-1-2); one side of the ceramic sheet (1-4) is a vacuum cavity, and the other side is an atmospheric cavity; a cylindrical wind knife structure (2) is connected to the outer end surface of the atmospheric cavity, wherein the wind knife structure (2) comprises a wind knife inner conductor (2-1), a wind knife outer conductor (2-2), and a wind knife slit structure (2-3) arranged between the wind knife inner conductor (2-1) and the wind knife outer conductor (2-2). The wind knife slit structure (2-3) is welded on the inner surface of the wind knife outer conductor (2-2); the wind knife inner conductor (2-1) and the coupling window inner conductor (1-1-1-1) have the same diameter and are connected; the wind knife outer conductor (2-2) and the coupling window outer conductor (1-1-2) have the same diameter and are connected; the atmosphere enters from the wind knife air inlet (2-4), passes through the gap of the wind knife slit structure (2-3) to reach the wind knife structure inner conductor (2-1) and the coupling window inner conductor (1-1-1-1), then from the coupling window inner conductor (1-1-1-1) to the ceramic sheet (1-4), and from the ceramic sheet (1-4) to the coupling window air outlet (1-5), and finally the hot air is discharged, thereby forming a heat dissipation channel from the wind knife air inlet (2-4) to the coupling window air outlet (1-5) for dissipating heat from the ceramic sheet (1-4).

3. A high-frequency coupling window based on internal cooling for a high-power cyclotron according to claim 1, characterized in that: The ceramic coating (1-3) of a set thickness is arranged on the side of the ceramic sheet (1-4) facing the vacuum chamber. The ceramic coating (1-3) is a TiN coating of no more than 6 mm. The TiN coating of no more than 6 mm can protect (1-5) from being bombarded by electrons and can minimize the amount of high power received, thereby further reducing the power heat absorbed by the high-frequency coupling window ceramic sheet (1-4).

4. A high-frequency coupling window based on internal cooling for a high-power cyclotron according to claim 1, characterized in that: The wind knife structure (2) is made of Teflon material and is connected to the atmospheric end of the high-frequency coupling window by means of a flange structure and screws, so as to directly cool the ceramic sheet structure of the coupling window.

5. The heat dissipation device for a high-frequency coupling window of a high-power cyclotron according to claim 1, characterized in that: The wind knife slit structure (2-3) is composed of a slit structure upper layer (2-3-1) and a slit structure lower layer (2-3-2); the slit structure upper layer (2-3-1) and the slit structure lower layer (2-3-2) form a low-speed narrow zone (2-5-1), a dust adsorption zone (2-5-2), and a spacious acceleration zone (2-5-3) from outside to inside; the slit of the low-speed narrow zone (2-5-1) is relatively narrow and has a relatively high pressure, and the wind speed is relatively low; the dust adsorption zone (2-5-2) is provided with a downwardly concave O-ring groove, the O-ring groove is used to arrange an O-ring for blocking dust, and the top of the O-ring and the slit structure upper layer (2-3-1) form a slit zone with a relatively narrow slit; the spacious acceleration zone (2-5-3) is adjacent to the dust adsorption zone, and the spacious acceleration zone (2-5-3) is adjacent to the dust adsorption zone. -2) changes from narrow to wide, so that the pressure in the area suddenly decreases and the wind speed suddenly increases. The bottom shape of the gap in the spacious acceleration zone (2-5-2) is a "boat" shape with both ends tilted upward. One end of the "boat" is connected to the dust adsorption zone, and the other end is matched with the tongue shape of the upper layer (2-3-1) of the slit structure to form an atmospheric passage vertically downward at the "stern". After the atmosphere enters the "boat" area from the dust adsorption zone, an upward vortex airflow is generated, and the vortex airflow then flows out from the atmospheric passage vertically downward at the "stern" and is vertically sprayed onto the conductor (2-1) in the wind knife structure, and cools the ceramic sheet (1-4) connected to the conductor (1-1-1) in the coupling window through the conductor (2-1) in the wind knife structure and the conductor (1-1-1) in the coupling window.

6. The heat dissipation device for a high-frequency coupling window of a high-power cyclotron according to claim 1, characterized in that: The two groups of conductor choke units of unequal lengths refer to the outer conductor choke unit and the inner conductor choke unit on the vacuum side of the ceramic sheet (1-4) being one group, and the outer conductor choke unit and the inner conductor choke unit on the atmospheric side of the ceramic sheet (1-4) being one group; the unequal lengths refer to the conductor choke unit on the inner conductor of each group of conductor choke units being inconsistent in length with the conductor choke unit on the outer conductor, but the outer conductor choke units on both sides of the ceramic sheet (1-4) being consistent in length and the inner conductor choke units being consistent in length.

7. The heat dissipation device for a high-frequency coupling window of a high-power cyclotron according to claim 6, characterized in that: The length of the conductor choke unit on one side of the outer conductor is relatively long, 6 mm, and the length on one side of the inner conductor is relatively short, 4.49 mm.

8. The heat dissipation device for a high-frequency coupling window of a high-power cyclotron according to claim 2, characterized in that: The cylindrical high-frequency coupling window (1) is equivalent to a capacitor C2 located between the inner conductor (1-1-1) of the coupling window and the outer conductor (1-1-2) of the coupling window, and the cylindrical wind knife structure (2) is equivalent to a capacitor C1 located between the inner conductor (2-1) of the wind knife and the outer conductor (2-2) of the wind knife. After the wind knife structure (2) is added, it is equivalent to connecting a capacitor C1 in parallel after the capacitor C2 corresponding to the cylindrical high-frequency coupling window (1); the capacitor C1 and the first group of conductor choke units L1 and L3 form a first filtering circuit; the capacitor C2 and the second group of conductor choke units L2 and L4 form a second filtering circuit.

Citation Information

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