Aluminum-scandium alloy target material and preparation method thereof

Abstract

The invention belongs to the technical field of target material production, and discloses a preparation method of an aluminum-scandium alloy target material, which comprises the following steps: smelting metal aluminum and metal scandium in a crucible, casting into a casting mold, cooling to obtain a casting blank and a skull remaining on the inner wall of the crucible, horizontally cutting the casting blank into a first blank body and a second blank body, and carrying out heat treatment on the first blank body and the second blank body to obtain the aluminum-scandium alloy target material. The height ratio of the first green body to the second green body is (1-1.5): (1.5-2), then horizontally cutting the skull into a first shell and a second shell, and the height ratio of the first shell to the second shell is (1-1.5): (1.5-2); and the first green body, the second green body, the first shell and the second shell are sequentially put into a crucible according to the sequence of the first green body, the first shell, the second green body and the second shell to be smelted and poured into a casting mold to be cooled, and the aluminum-scandium alloy target material is obtained. The distribution uniformity degree of aluminum and scandium in the target material is effectively improved, the raw material loss in the preparation process of the aluminum-scandium alloy target material is reduced, and in addition, the invention further discloses the aluminum-scandium alloy target material.

Description

Technical Field

[0001] The present application relates to the technical field of target material production, and in particular to an aluminum-scandium alloy target material and a preparation method thereof. Background Art

[0002] ScAlN piezoelectric thin film has the advantages of high acoustic wave velocity, high thermal conductivity, low dielectric loss, excellent thermal stability, and compatibility with complementary metal oxide semiconductor (CMOS) processes, making it an ideal material for preparing high-frequency, high-power and highly integrated piezoelectric components. With the rapid development of science and technology, and the emphasis of various countries on the research of key materials for key fields, the demand for aluminum-scandium alloy target blanks as key materials required for the preparation of ScAlN piezoelectric thin films is growing.

[0003] Common methods for producing aluminum-scandium alloys include doping, molten salt electrolysis, thermal reduction and powder sintering. In order to prepare aluminum-scandium targets with higher purity, many studies have been conducted on the preparation of aluminum-scandium alloy targets by doping. The doping method, also known as the mixed melting method, is a traditional method for preparing aluminum-scandium alloys. Specifically, pure scandium and pure aluminum are used as raw materials, pure argon is used as a protective gas under vacuum, and metal aluminum and metal scandium are put into a crucible for smelting and then cast into a water-cooled mold to obtain an aluminum-scandium alloy. This method is simple, but it is prone to casting defects, such as uneven distribution of aluminum-scandium and low density of the alloy target.

[0004] Chinese patent application 202210574325.5 discloses a method for preparing an aluminum-scandium target, wherein metallic aluminum and metallic scandium are mixed and smelted in a certain proportion to obtain an aluminum-scandium alloy, wherein the scandium content in the aluminum-scandium alloy is 2at% or 43at%; the aluminum-scandium alloy is crushed to obtain an aluminum-scandium alloy powder; the aluminum-scandium alloy powder is mixed in a certain proportion to obtain a mixed aluminum-scandium alloy powder; under the protection of an argon atmosphere, the mixed aluminum-scandium alloy powder is hot-pressed to obtain an aluminum-scandium ingot; the aluminum-scandium ingot is processed to obtain an aluminum-scandium target. Among them, the aluminum-scandium alloy powder is not easy to oxidize compared to pure scandium powder and pure aluminum powder, and there is no need to consider the segregation of the aluminum-scandium alloy itself, which greatly improves the quality of the aluminum-scandium target. At the same time, by only producing aluminum-scandium alloys with a scandium content of 43at% and a scandium content of 2at%, and then mixing the two aluminum-scandium alloys with different scandium contents, an aluminum-scandium target with a scandium content of 2-43at% can be obtained, which can shorten the production time and improve efficiency.

[0005] However, it can be seen from the above scheme that the above scheme is to directly crush the aluminum-scandium alloys with different scandium contents, overlap and mix them, and then prepare the target material.

[0006] The problem to be solved by this scheme is: how to provide a method for preparing an aluminum-scandium alloy target material that is different from the prior art and has a good degree of component distribution uniformity. Summary of the invention

[0007] The purpose of the present application is to provide a method for preparing an aluminum-scandium alloy target material, which effectively improves the uniformity of aluminum-scandium distribution in the target material and reduces the raw material loss in the preparation process of the aluminum-scandium alloy target material by dividing and crushing the ingot obtained by eutectic melting of the aluminum-scandium alloy and the shell attached to the inner wall of the mold, and then re-mixing and eutectic melting.

[0008] To achieve the above-mentioned purpose, the present application discloses a method for preparing an aluminum-scandium alloy target, wherein metal aluminum and metal scandium are smelted in a crucible, then cast into a casting mold and cooled to obtain a casting blank and a solidified shell remaining on the inner wall of the crucible;

[0009] Then, the ingot is horizontally cut into a first ingot and a second ingot, and the height ratio of the first ingot to the second ingot is 1-1.5:1.5-2;

[0010] The solidified shell is horizontally cut into a first shell and a second shell, and the height ratio of the first shell to the second shell is 1-1.5:1.5-2, and the first blank, the second blank, the first shell, and the second shell are sequentially placed in a crucible in the order of the first blank, the first shell, the second blank, and the second shell for melting and poured into a casting mold for cooling to obtain an aluminum-scandium alloy target.

[0011] The problem of uneven component distribution may occur between the smelted green body and the shell, between different positions of the green body, and between different positions of the shell due to temperature difference, density of the raw materials themselves and other issues. Therefore, the green body and the shell are divided and then re-smelted to obtain the target material, which further suppresses the problem of uneven component distribution. At the same time, after a large number of experiments, we are pleasantly surprised to find that when the divided first green body, the second green body, the first shell, and the second shell are fed in a specific order, the uniformity of the component distribution of the target material can be further improved.

[0012] Preferably, the method specifically comprises the following steps:

[0013] Step 1: Melt metal aluminum and metal scandium in a crucible and pour into a casting mold for cooling to obtain an intermediate alloy;

[0014] Step 2: Turn the master alloy over and melt it in a crucible, then pour it into a casting mold and cool it to obtain a casting and a solidified shell remaining on the inner wall of the crucible;

[0015] Step 3: horizontally cutting the ingot into a first ingot and a second ingot, wherein the height ratio of the first ingot to the second ingot is 1-1.5:1.5-2;

[0016] Cutting the solidified shell horizontally into a first shell and a second shell, wherein the height ratio of the first shell to the second shell is 1-1.5:1.5-2;

[0017] Step 4: Place the first blank, the second blank, the first shell, and the second shell into a crucible in the order of the first blank, the first shell, the second blank, and the second shell for melting, and then pour them into a casting mold for cooling to obtain an aluminum-scandium alloy target.

[0018] Furthermore, an intermediate alloy is obtained by eutectic melting of metallic aluminum and metallic scandium. However, due to the difference in density and melting point between metallic aluminum and scandium, the temperature difference at different positions of the smelting crucible, and the different cooling rates at different positions during the cooling process, the aluminum and scandium in the intermediate alloy are inevitably unevenly distributed.

[0019] Subsequently, turning over the master alloy and remelting it reduced the uneven distribution of aluminum and scandium due to the difference in density and melting point to a certain extent. However, the component segregation problem caused by the temperature difference at different positions of the crucible during smelting and the different cooling rates at different positions during cooling was still difficult to alleviate.

[0020] Finally, by dividing the ingot and the solidified shell, and feeding the divided first ingot, the second ingot, the first shell, and the second shell in a specific order, the uniformity of the target material component distribution can be further improved.

[0021] Preferably, the mass ratio of metal aluminum to metal scandium is 70-90:10-30.

[0022] Preferably, the height ratio of the first blank to the second blank is 1.1-1.3:1.7-1.9;

[0023] The height ratio of the first shell to the second shell is 1.1-1.3:1.8-2.0.

[0024] Preferably, in step 4, the first green body, the second green body, the first shell and the second shell are added to the crucible in the form of particles, and the particle size of the first green body, the second green body, the first shell and the second shell is 30-50 mm.

[0025] Preferably, the particle size of the first green body and the second green body is 40-50 mm, and the particle size of the first shell and the second shell is 30-40 mm but does not include 40 mm.

[0026] Preferably, the operation in step 4 is specifically as follows: placing the first green body, the second green body, the first shell, and the second shell into a crucible in the order of the first green body, the first shell, the second green body, and the second shell, and then heating to 1180-1350° C. and keeping the temperature for 15-18 minutes to obtain a molten metal and pouring the molten metal into a casting mold;

[0027] Then, the melt is cooled to room temperature within 30 to 65 minutes to obtain an aluminum-scandium alloy target.

[0028] Preferably, the cooling operation in step 4 is specifically: cooling the melt to room temperature at a cooling rate of 25-30° C. / min to obtain an aluminum-scandium alloy target.

[0029] In addition, the present application also discloses an aluminum-scandium alloy target material, which is prepared by the above-mentioned method for preparing the aluminum-scandium alloy target material, and the relative density of the aluminum-scandium alloy target material is not less than 99%.

[0030] The beneficial effects of this application are:

[0031] The present application provides a method for preparing an aluminum-scandium alloy target material. The method divides and crushes the ingot obtained by eutectic melting of the aluminum-scandium alloy and the shell attached to the inner wall of the crucible, and then remixes and eutectics, thereby effectively improving the uniformity of aluminum-scandium distribution in the target material and reducing the raw material loss in the preparation process of the aluminum-scandium alloy target material. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 Diagram for selecting test locations during the test process. DETAILED DESCRIPTION

[0033] The present invention will be described clearly and completely below in conjunction with the embodiments of the present invention. In the description of the present invention, it should be noted that, if no specific conditions are specified in the embodiments, the conditions are carried out according to conventional conditions or conditions recommended by the manufacturer. If the manufacturer of the reagents or instruments used is not specified, they are all conventional products that can be purchased commercially.

[0034] Example 1

[0035] Step 1: Mix metal aluminum and metal scandium in a mass ratio of 70:30, and smelt at 1350° C. for 20 minutes to obtain a master alloy;

[0036] Step 2: Turn the master alloy over and melt it in a crucible at 1350°C for 15 minutes, and cast it into a casting mold to obtain a casting billet and a solidified shell remaining on the inner wall of the crucible;

[0037] Step 3: horizontally cutting the ingot into a first ingot and a second ingot, wherein the height ratio of the first ingot to the second ingot is 1:2;

[0038] The solidified shell is horizontally cut into a first shell and a second shell, and the height ratio of the first shell to the second shell is 1:2;

[0039] Step 4: The first green body, the second green body, the first shell, and the second shell are crushed into particles of 47±2 mm, and are placed in a crucible in the order of the first green body, the first shell, the second green body, and the second shell, and smelted at 1350°C for 15 minutes. Then, the mixture is poured into a casting mold and the melt is cooled to room temperature in 62 minutes to obtain an aluminum-scandium alloy target.

[0040] Example 2

[0041] Step 1: Mix metal aluminum and metal scandium in a mass ratio of 80:20, and smelt at 1350° C. for 20 minutes to obtain a master alloy;

[0042] Step 2: Turn the master alloy over and melt it in a crucible at 1350°C for 15 minutes, and cast it into a casting mold to obtain a casting billet and a solidified shell remaining on the inner wall of the crucible;

[0043] Step 3: horizontally cutting the ingot into a first ingot and a second ingot, wherein the height ratio of the first ingot to the second ingot is 1.1:1.9;

[0044] The solidified shell is horizontally cut into a first shell and a second shell, and the height ratio of the first shell to the second shell is 1.1:2;

[0045] Step 4: The first green body, the second green body, the first shell, and the second shell are crushed into particles of 38±2 mm, and are placed in a crucible in the order of the first green body, the first shell, the second green body, and the second shell, and smelted at 1180°C for 18 minutes. Then, the mixture is poured into a casting mold and the melt is cooled to room temperature in 48 minutes to obtain an aluminum-scandium alloy target.

[0046] Example 3

[0047] Step 1: Mix metal aluminum and metal scandium in a mass ratio of 90:10, and smelt at 1350° C. for 20 minutes to obtain a master alloy;

[0048] Step 2: Turn the master alloy over and melt it in a crucible at 1350°C for 15 minutes, and cast it into a casting mold to obtain a casting billet and a solidified shell remaining on the inner wall of the crucible;

[0049] Step 3: horizontally cutting the ingot into a first ingot and a second ingot, wherein the height ratio of the first ingot to the second ingot is 1.3:1.7;

[0050] The solidified shell is horizontally cut into a first shell and a second shell, and the height ratio of the first shell to the second shell is 1.3:1.8;

[0051] Step 4: The first green body, the second green body, the first shell, and the second shell are crushed into particles of 32±2 mm, and are placed in a crucible in the order of the first green body, the first shell, the second green body, and the second shell, and smelted at 1250°C for 17 minutes. Then, they are poured into a casting mold and the melt is cooled to room temperature in 54 minutes to obtain an aluminum-scandium alloy target.

[0052] Example 4

[0053] The method is basically the same as Example 1, except that step 3 specifically comprises: horizontally cutting the cast billet into a first billet and a second billet, and the height ratio of the first billet to the second billet is 1.5:1.5;

[0054] The solidified shell is horizontally cut into a first shell and a second shell, and the height ratio of the first shell to the second shell is 1.5:1.5.

[0055] Example 5

[0056] It is basically the same as Example 1, except that step 4 is specifically as follows: the first green body, the second green body, the first shell, and the second shell are crushed into particles of 47±2 mm, and are placed in a crucible in the order of the first green body, the first shell, the second green body, and the second shell, and are smelted at 1350°C for 15 min, and then poured into a casting mold and the melt is cooled to room temperature at a cooling rate of 21±0.5°C / min to obtain an aluminum-scandium alloy target.

[0057] Example 6

[0058] It is basically the same as Example 1, except that, step 4 is specifically as follows: the first green body, the second green body, the first shell, and the second shell are crushed into particles of 47±2 mm, and are placed in a crucible in the order of the first green body, the first shell, the second green body, and the second shell, and are smelted at 1350°C for 15 min, and then poured into a casting mold and the melt is cooled to room temperature at a cooling rate of 15±0.5°C / min to obtain an aluminum-scandium alloy target.

[0059] Example 7

[0060] It is basically the same as Example 1, except that step 4 is specifically as follows: the first green body and the second green body are crushed into particles of 47±2 mm, the first shell and the second shell are crushed into particles of 37±2 mm, and the first green body, the first shell, the second green body, and the second shell are placed in a crucible in this order and smelted at 1350°C for 15 min, then poured into a casting mold and the melt is cooled to room temperature in 62 min to obtain an aluminum-scandium alloy target.

[0061] Example 8

[0062] It is basically the same as Example 1, except that step 4 is specifically as follows: the first green body and the second green body are crushed into particles of 37±2 mm, the first shell and the second shell are crushed into particles of 47±2 mm, and the first green body, the first shell, the second green body, and the second shell are placed in a crucible in this order and smelted at 1350°C for 15 min, then poured into a casting mold and the melt is cooled to room temperature in 62 min to obtain an aluminum-scandium alloy target.

[0063] Example 9

[0064] Step 1: Metal aluminum and metal scandium are mixed in a mass ratio of 70:30 and smelted in a crucible at 1350° C. for 35 minutes, and a casting blank and a solidified shell attached to the inner wall of the crucible are obtained after casting;

[0065] Step 2: horizontally cutting the ingot into a first ingot and a second ingot, wherein the height ratio of the first ingot to the second ingot is 1:2;

[0066] The solidified shell is horizontally cut into a first shell and a second shell, and the height ratio of the first shell to the second shell is 1:2;

[0067] Step 3: The first green body, the second green body, the first shell, and the second shell are crushed into particles of 47±2 mm, and are placed in a crucible in the order of the first green body, the first shell, the second green body, and the second shell, and smelted at 1350°C for 15 minutes. Then, the mixture is poured into a casting mold and the melt is cooled to room temperature in 62 minutes to obtain an aluminum-scandium alloy target.

[0068] Comparative Example 1

[0069] It is basically the same as Example 1, except that step 4 is specifically as follows: the first green body, the second green body, the first shell, and the second shell are crushed into particles of 47±2 mm, and the first green body, the second green body, the first shell, and the second shell are put into a crucible in this order, and smelted at 1350°C for 15 min, and then the melt is cooled to room temperature within 62 min to obtain an aluminum-scandium alloy target.

[0070] Comparative Example 2

[0071] It is basically the same as Example 1, except that step 4 is specifically as follows: the first blank, the second blank, the first shell, and the second shell are crushed into particles of 47±2 mm, and are put into a crucible in the order of the second shell, the second blank, the first shell, and the first blank, and are smelted at 1350°C for 15 minutes, and then the melt is cooled to room temperature within 62 minutes to obtain an aluminum-scandium alloy target.

[0072] Comparative Example 3

[0073] It is basically the same as Example 1, except that step 4 is specifically as follows: the first green body, the second green body, the first shell, and the second shell are all crushed into particles of 47±2 mm, and are put into a crucible in the order of the first shell, the first green body, the second shell, and the second green body, and are smelted at 1350°C for 15 minutes, and then the melt is cooled to room temperature within 62 minutes to obtain an aluminum-scandium alloy target.

[0074] Comparative Example 4

[0075] It is basically the same as Example 1, except that the height ratio of the first blank to the second blank is 3:1, and the height ratio of the first shell to the second shell is 3:1.

[0076] Comparative Example 5

[0077] It is basically the same as Example 1, except that the height ratio of the first blank to the second blank is 1:3, and the height ratio of the first shell to the second shell is 1:3.

[0078] Performance Testing

[0079] refer to Figure 1 , cut the target material and detect it separately Figure 1 The scandium content of the nine positions shown is recorded (it should be noted that the positions in the actual test process are different from Figure 1 There is a slight deviation, but the site selection during the test follows the following rules: 3 points on the top of the target, 3 points on the middle section of the target, and 3 points on the bottom of the target. The unit of scandium content is (wt%):

[0080] Table 1

[0081]

[0082] Result analysis:

[0083] 1. It can be seen from Examples 1-4 that as the height ratio between the first green body and the second green body and the height ratio between the first shell and the second shell changes, the uniformity of the scandium content distribution of Examples 1-4 fluctuates to a certain extent. By observing Table 1 and calculating, it can be seen that the difference between the maximum and minimum scandium content of Example 1 is 0.48, 0.17% for Example 2, 0.15% for Example 3, and 0.43% for Example 6. It can be seen that the relevant parameters of Examples 2 and 3 are more conducive to the uniform distribution of aluminum scandium;

[0084] 2. It can be seen from Examples 1 and 5 that, with further optimization of the cooling rate, the uniformity of scandium distribution is improved compared with that of Example 1 in which the cooling rate is not uniform. From Table 1, it can be seen that the difference between the maximum and minimum scandium content in Example 5 is 0.25%, which is improved to a certain extent compared with Example 1.

[0085] Further observation of Example 6 shows that when the temperature is lowered at an excessively low cooling rate, the difference between the maximum and minimum scandium contents in the target material obtained in Example 6 reaches 0.77%, which is further lower than that in Example 1.

[0086] 3. It can be seen from Example 1 and Example 7 that when the particle sizes of the first green body and the second green body are prepared to be relatively larger, the uniformity of scandium distribution in Example 7 has a certain improvement trend relative to that in Example 1. By calculating the scandium content in Example 7, the difference between the maximum and minimum values ​​is 0.08%;

[0087] Further observation of Example 8 shows that when the particle sizes of the first green body and the second green body are relatively smaller, the uniformity of the scandium content distribution in Example 8 does not show a significant difference compared with Example 1;

[0088] 4. It can be seen from Examples 1 and 9 that when the step of remelting the master alloy is omitted, the difference between the maximum and minimum scandium content in Example 9 reaches 0.7%, which is a certain improvement over Example 1. It can be seen that after omitting this step, the uniformity of scandium distribution shows a certain downward trend;

[0089] 5. It can be seen from Example 1 and Comparative Examples 1-3 that when the order of adding the first green body, the second green body, the first shell, and the second shell is changed, the uniformity of the scandium content distribution in Comparative Examples 1-3 decreases significantly, wherein the maximum and minimum values ​​of Comparative Example 1 are 1.13%, Comparative Example 2 is 1.87%, and Comparative Example 3 is 1.68%;

[0090] It can be seen that when the first blank, the second blank, the first shell, and the second shell are added in the order of the first blank, the first shell, the second blank, and the second shell, the target material has a more excellent component distribution uniformity. The reason for this phenomenon may be that there is a difference between the scandium and aluminum contents of the first blank, the first shell, the second blank, and the second shell. When processing in this order, it is more suitable for further uniform diffusion of aluminum and scandium, which leads to an improvement in the uniformity of aluminum-scandium distribution in Example 1.

[0091] 6. It can be seen from Example 1 and Comparative Examples 4-5 that when the height ratio of the first blank to the second blank, and the height ratio of the first shell to the second shell are too large or too small, the uniformity of the scandium distribution in Comparative Examples 4-5 declines, wherein the difference between the maximum and minimum values ​​of Comparative Example 4 is 1.77, and that of Comparative Example 5 is 1.60, which is significantly improved compared with that of Example 1. The reason may be that the excessively large or small height ratio leads to excessive differences in the scandium content between blanks and between shells, making it difficult to correct the distribution of scandium in the subsequent repair process.

[0092] The above embodiments are preferred implementation modes of the present invention, but the implementation modes of the present invention are not limited to the above embodiments. Any other changes, modifications, substitutions, combinations, and simplifications made without departing from the spirit and principles of the present invention shall be equivalent replacement methods and shall be included in the protection scope of the present invention.

Claims

1. A method for preparing an aluminum-scandium alloy target, characterized in that: Metal aluminum and metal scandium are melted in a crucible, then cast into a casting mold and cooled to obtain a casting billet and a solidified shell remaining on the inner wall of the crucible; Then, the ingot is horizontally cut into a first ingot and a second ingot, and the height ratio of the first ingot to the second ingot is 1-1.5:1.5-2; The solidified shell is horizontally cut into a first shell and a second shell, and the height ratio of the first shell to the second shell is 1-1.5:1.5-2, and the first blank, the second blank, the first shell, and the second shell are sequentially placed in a crucible in the order of the first blank, the first shell, the second blank, and the second shell for melting and poured into a casting mold for cooling to obtain an aluminum-scandium alloy target.

2. The method for preparing an aluminum-scandium alloy target according to claim 1, characterized in that: The specific steps include: Step 1: Melt metal aluminum and metal scandium in a crucible and pour into a casting mold for cooling to obtain an intermediate alloy; Step 2: Turn the master alloy over and melt it in a crucible, then pour it into a casting mold and cool it to obtain a casting and a solidified shell remaining on the inner wall of the crucible; Step 3: horizontally cutting the ingot into a first ingot and a second ingot, wherein the height ratio of the first ingot to the second ingot is 1-1.5:1.5-2; Cutting the solidified shell horizontally into a first shell and a second shell, wherein the height ratio of the first shell to the second shell is 1-1.5:1.5-2; Step 4: Place the first blank, the second blank, the first shell, and the second shell into a crucible in the order of the first blank, the first shell, the second blank, and the second shell for melting, and then pour them into a casting mold for cooling to obtain an aluminum-scandium alloy target.

3. The method for preparing an aluminum-scandium alloy target according to claim 1, characterized in that: The mass ratio of metal aluminum to metal scandium is 70-90:10-30.

4. The method for preparing an aluminum-scandium alloy target according to claim 1, characterized in that: The height ratio of the first blank to the second blank is 1.1-1.3:1.7-1.9; The height ratio of the first shell to the second shell is 1.1-1.3:1.8-2.

0.

5. The method for preparing an aluminum-scandium alloy target according to claim 2, characterized in that: In step 4, the first green body, the second green body, the first shell and the second shell are added into the crucible in the form of particles, and the particle size of the first green body, the second green body, the first shell and the second shell is 30-50 mm.

6. The method for preparing an aluminum-scandium alloy target according to claim 5, characterized in that: The particle sizes of the first green body and the second green body are 40-50 mm, and the particle sizes of the first shell and the second shell are 30-40 mm and do not include 40 mm.

7. The method for preparing an aluminum-scandium alloy target according to claim 2, characterized in that: The operation in step 4 is specifically as follows: placing the first green body, the second green body, the first shell, and the second shell into a crucible in the order of the first green body, the first shell, the second green body, and the second shell, and then heating to 1180-1350° C. and keeping the temperature for 15-18 minutes to obtain a molten liquid and pouring it into a casting mold; Then, the melt is cooled to room temperature within 30 to 65 minutes to obtain an aluminum-scandium alloy target.

8. The method for preparing an aluminum-scandium alloy target according to claim 7, characterized in that: The cooling operation in step 4 is specifically as follows: cooling the melt to room temperature at a cooling rate of 25-30°C / min to obtain an aluminum-scandium alloy target.

9. An aluminum-scandium alloy target, characterized in that: The aluminum-scandium alloy target is prepared by the preparation method of the aluminum-scandium alloy target described in any one of claims 1 to 8, and the relative density of the aluminum-scandium alloy target is not less than 99%.

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