Multifunctional high-precision ultrasonic scanning microscope

Abstract

The invention provides a multifunctional high-precision ultrasonic scanning microscope, and relates to the technical field of ultrasonic scanning microscopes, the multifunctional high-precision ultrasonic scanning microscope comprises a connecting box, a supporting box is arranged at the top of the connecting box, a sliding groove is formed in the inner wall of the supporting box, an operation table is arranged in the supporting box, and a sliding block is slidably connected to the inner wall of the sliding groove; a motor is fixedly connected to one side of the sliding block, a first threaded rod is fixedly connected to the output end of the motor, and when the moving device is used, an operation table slides on the surface of the sliding rod manually, so that the operation table can be far away from the interior of the supporting box well, and then a second threaded rod is controlled to rotate; the thread directions of the surface of the second threaded rod are opposite from the middle to the two sides, so that a movable plate which is arranged on the surface of the second threaded rod in a threaded and sleeving manner moves towards the interior of the operation table at the same time, and a detected chip can be well limited at the top of the operation table.

Description

Technical Field

[0001] The invention relates to the technical field of ultrasonic scanning microscopes, in particular to a multifunctional and high-precision ultrasonic scanning microscope. Background Art

[0002] An ultrasonic scanning microscope is a device used to detect internal defects of semiconductor chips. When using an ultrasonic scanning microscope, the chip to be detected is set on the top of the operating table, and then the threaded rod is driven to rotate by a motor, and then the moving block is driven to move on the surface of the threaded rod under the action of the limit rod, and then the sliding block is squeezed by the cylinder to slide inside the slide groove, so that the ultrasonic generator set at the bottom of the moving block can be set on the top of the chip, and the image irradiated by the ultrasonic wave can be well displayed through the display screen, so that it is convenient to observe the defects inside the semiconductor chip through the display screen. Because the top of the operating table is relatively large, a slightly larger workpiece can also be set on the top of the operating table, which is convenient for detecting relatively large workpieces, so that multifunctional high-precision detection can be performed on different devices.

[0003] The inventors have found in their daily work that the ultrasonic scanning microscope still has at least the following problems: when using the ultrasonic scanning microscope, the chip to be inspected is set on the top of the operating table, and then the threaded rod is driven to rotate by a motor, and then the moving block is driven to move on the surface of the threaded rod under the action of the limit rod, and then the sliding block is squeezed by the cylinder to slide inside the slide groove, so that the ultrasonic generator set at the bottom of the moving block can be set on the top of the chip, and the image irradiated by the ultrasonic wave can be well displayed through the display screen, so that it is convenient to observe the defects inside the semiconductor chip through the display screen. However, in actual use, because the operating table is set inside the support box and the volume of the semiconductor chip is relatively small, the chip cannot be well set on the top of the operating table. Summary of the invention

[0004] The purpose of the present invention is to solve the shortcomings in the prior art and to propose a multifunctional and high-precision ultrasonic scanning microscope.

[0005] In order to achieve the above-mentioned purpose, the present invention adopts the following technical scheme: a multifunctional and high-precision ultrasonic scanning microscope, comprising a connecting box, a supporting box is arranged on the top of the connecting box, a sliding groove is opened on the inner wall of the supporting box, an operating table is arranged inside the supporting box, a sliding block is slidably connected to the inner wall of the sliding groove, a motor is fixedly connected to one side of the sliding block, a first threaded rod is fixedly connected to the output end of the motor, an end of the first threaded rod away from the motor is rotatably inserted on one side of another sliding block, a moving block is threadedly sleeved on the surface of the first threaded rod, a limiting rod is fixedly connected to one side of the sliding block, the limiting rod is slidably penetrated and inserted on one side of the moving block, an ultrasonic generator is arranged on the bottom of the moving block, a cylinder is arranged on one side of the sliding groove, an end of the cylinder away from the supporting box is fixedly connected to one side of the sliding block, and the connecting A support platform is provided on one side of the box, a display screen is provided on the top of the support platform, a connecting line is provided on one side of the display screen, an end of the connecting line away from the display screen is provided on one side of the connecting box, moving wheels are evenly provided on the bottom of the support platform, a moving device is provided on one side of the operating table, a limiting device is provided on one side of the connecting box, the moving device includes a sliding rod, a circular groove is evenly provided on one side of the operating table, the sliding rod is slidably connected to the inner wall of the circular groove, the end of the sliding rod away from the circular groove is fixedly connected to one side of the inner wall of the support box, a connecting groove is provided on the top of the operating table, a second threaded rod is rotatably inserted into the inner wall of the connecting groove, the thread direction of the surface of the second threaded rod is opposite from the middle to the sides, the thread sleeve on the surface of the second threaded rod is provided with a moving plate, and the moving plate is slidably connected to the inner wall of the connecting groove.

[0006] The effect achieved by the above components is: when using the moving device, the operating table is manually slid on the surface of the sliding rod, so that the operating table can be well away from the inside of the support box, and then the second threaded rod is controlled to rotate. Because the thread direction on the surface of the second threaded rod is opposite from the middle to both sides, the moving plate threadedly sleeved on the surface of the second threaded rod moves toward the inside of the operating table at the same time, so that the detected chip can be well limited to the top of the operating table, so that the chip can be conveniently set on the top of the operating table.

[0007] Preferably, a storage groove is provided at the bottom of the operating table, and the inner wall of the storage groove is slidably connected with a rectangular plate, the top of the storage groove is fixedly connected with a fifth damping rod, the bottom of the fifth damping rod is fixedly connected to the top of the rectangular plate, the surface of the fifth damping rod is sleeved with a fifth spring, one end of the fifth spring is fixedly connected to the top of the storage groove, one end of the fifth spring close to the fifth damping rod is fixedly connected to the top of the rectangular plate, the inner wall of the bottom of the rectangular plate is fixedly connected with a rotating rod, the surface of the rotating rod is rotatably sleeved with a roller, one side of the support box is fixedly connected with a first damping rod, the end of the first damping rod away from the support box is fixedly connected with an L-shaped plate, the end of the L-shaped plate away from the first damping rod is arranged on the side of the operating table away from the support box, the surface of the first damping rod is sleeved with a first spring, one end of the first spring is fixedly connected to one side of the support box, and the end of the first spring close to the first damping rod is fixedly connected to one side of the L-shaped plate.

[0008] The effects achieved by the above components are as follows: when the operating table is completely slid out of the support box, the fifth spring squeezes the rectangular plate in the direction away from the storage slot, and then slides the rectangular plate into the inside of the storage slot, so that the operating table can be clamped on the outside of the support box by the rectangular plate, and when the operating table moves on the surface of the sliding rod, the roller is driven to move on the surface of the rotating rod, so that the operating table can slide out of the support box very well. After the operating table is slid into the inside of the support box, when the L-shaped plate is manually pulled toward the support box through the first spring, the end of the L-shaped plate away from the first damping rod is well restricted to the side of the operating table away from the support box, so that the operating table can be well set inside the support box.

[0009] Preferably, a round rod is rotatably inserted through one side of the movable plate, and the end of the round rod away from the movable plate is fixedly connected to the circular plate, and the side of the circular plate away from the round rod is fixedly connected to the second damping rod, and the end of the second damping rod away from the circular plate is fixedly connected to the extrusion plate, and a second spring is sleeved on the surface of the second damping rod, one end of the second spring is fixedly connected to one side of the circular plate, and the end of the second spring away from the second damping rod is fixedly connected to one side of the extrusion plate, and a rubber rod is evenly fixedly connected to one side of the extrusion plate close to the second damping rod, and the end of the rubber rod away from the extrusion plate is arranged on one side of the movable plate.

[0010] The effect achieved by the above components is: when the movable plate squeezes the chip, the part of the round rod close to the middle of the operating table squeezes the chip. When the chip angle needs to be changed, the round rod is manually controlled to rotate, and the squeezing plate is pulled toward the circular plate through the second spring, so that the rubber rod is squeezed on one side of the movable plate. In this way, the round rod can be well fixed inside the movable plate, making it easier to fix the chip at different angles.

[0011] Preferably, the top of the operating table is fixedly connected to a support frame, a connecting rod is rotatably inserted through the top of the support frame, the bottom of the connecting rod is fixedly connected to a second bevel gear, one end of the second threaded rod is fixedly connected to the first bevel gear, the first bevel gear and the second bevel gear are meshed with each other, and a bolt is threadedly inserted through one side of the support frame.

[0012] The effects achieved by the above components are: manually controlling the rotation of the connecting rod, and driving the second bevel gear to rotate through the connecting rod. Because the first bevel gear and the second bevel gear are meshed with each other, the second threaded rod can be driven to rotate through the connecting rod. When the second threaded rod rotates to a suitable position, the bolt is manually controlled to be squeezed on one side of the connecting rod, so that the connecting rod can be well restricted inside the support frame.

[0013] Preferably, the limiting device includes a rectangular rod, one side of the support platform is fixedly connected to one end of the rectangular rod, the end of the rectangular rod away from the support platform is slidably connected to a rectangular frame, the rectangular frame is fixedly connected to one side of the connecting box, one side of the rectangular rod is provided with a fixing groove, the inner wall of the fixing groove is slidably connected to a fixing rod, and the end of the fixing rod away from the fixing groove is fixedly connected to a connecting plate.

[0014] The effect achieved by the above components is: when using the limit device, the rectangular rod is manually controlled to slide into the inside of the rectangular frame, and then the fixed rod is controlled to slide into the inside of the fixed groove, so that the rectangular rod can be well limited inside the rectangular frame, so that the support platform can be well set on one side of the connecting box, which can to a certain extent avoid accidentally driving the support platform away from the connecting box, and thus avoid breaking the connecting line, which will affect the use of the ultrasonic scanning microscope to a certain extent.

[0015] Preferably, a third damping rod is evenly fixedly connected to one side of the rectangular frame, an end of the third damping rod away from the rectangular frame is fixedly connected to a side of the connecting plate close to the fixed rod, a third spring is sleeved on the surface of the third damping rod, one end of the third spring is fixedly connected to one side of the rectangular frame, and an end of the third spring close to the third damping rod is fixedly connected to one side of the connecting plate.

[0016] The effect achieved by the above components is: the connecting plate is pulled toward the direction close to the rectangular frame by the third spring, so that the fixing rod can be well restricted inside the fixing groove.

[0017] Preferably, the surface sliding sleeve of the rectangular rod is provided with a locking block, the inner wall sliding sleeve of the locking block is arranged on the surface of the rectangular frame, the inner wall of the locking block is provided with a limiting groove, the inner wall of the limiting groove is provided with a rubber block, and the bottom of the rubber block is fixedly connected to one side of the rectangular frame.

[0018] The effect achieved by the above components is: manually controlling the positioning block to slide on the surface of the rectangular rod, and then sliding the inner wall of the positioning block onto the surface of the rectangular frame, and then squeezing the rubber block into the inside of the limiting groove, so that the connecting plate can be well limited to one side of the rectangular frame.

[0019] Preferably, a positioning plate is fixedly connected to the surface of the rectangular rod, an end of the positioning plate away from the support platform is evenly fixedly connected to a fourth damping rod, an end of the fourth damping rod away from the positioning plate is fixedly connected to one side of the positioning block, a fourth spring is stepped on the surface of the fourth damping rod, one end of the fourth spring is fixedly connected to one side of the positioning plate, and an end of the fourth spring close to the fourth damping rod is fixedly connected to one side of the positioning block.

[0020] The effect achieved by the above components is: the blocking block is pressed in a direction away from the positioning plate by the fourth spring, so that the blocking block can be well restricted on the surface of the rectangular frame.

[0021] In the present invention, a moving device is provided. When the moving device is used, the operating table is manually slid on the surface of the sliding rod, so that the operating table can be well away from the interior of the support box, and then the second threaded rod is controlled to rotate. Because the thread direction on the surface of the second threaded rod is opposite from the middle to both sides, the moving plate threadedly sleeved on the surface of the second threaded rod moves toward the interior of the operating table at the same time, so that the chip to be detected can be well restricted to the top of the operating table, so that the chip can be conveniently set on the top of the operating table. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 A schematic diagram of the three-dimensional structure of a multifunctional and high-precision ultrasonic scanning microscope proposed by the present invention; Figure 2 A three-dimensional structural schematic diagram of a novel sliding rod proposed by the present invention; Figure 3 A three-dimensional structural schematic diagram of a novel movable plate proposed in the present invention; Figure 4 A schematic diagram of the three-dimensional structure of a novel L-shaped plate proposed in the present invention; Figure 5 A three-dimensional structural schematic diagram of a novel roller proposed by the present invention; Figure 6 A schematic diagram of the three-dimensional structure of a novel rectangular rod proposed by the present invention; Figure 7 A schematic diagram of the three-dimensional structure of a novel fixing rod proposed by the present invention; Figure 8 The present invention provides a three-dimensional structural schematic diagram of a novel rubber block.

[0023] Legend: 1. Connecting box; 2. Support box; 3. Operating table; 4. Slide; 5. Sliding block; 6. Motor; 7. First threaded rod; 8. Moving device; 801. Round groove; 802. Sliding rod; 803. Connecting groove; 804. Second threaded rod; 805. Moving plate; 806. First bevel gear; 807. Round rod; 808. Support frame; 809. Connecting rod; 810. Second bevel gear; 811. Bolt; 812. Round plate; 813. Second damping rod; 814. Second spring; 815. Extrusion plate; 816. Rubber rod; 817. First damping rod; 818. First spring; 819. L-shaped plate; 820. Collecting The groove; 821, the fifth damping rod; 822, the fifth spring; 823, the rectangular plate; 824, the rotating rod; 825, the roller; 9, the limiting device; 901, the rectangular rod; 902, the rectangular frame; 903, the connecting plate; 904, the fixing rod; 905, the fixing groove; 906, the third damping rod; 907, the third spring; 908, the positioning plate; 909, the fourth damping rod; 910, the fourth spring; 911, the positioning block; 912, the rubber block; 913, the limiting groove; 10, the limiting rod; 11, the moving block; 12, the cylinder; 13, the ultrasonic generator; 14, the supporting platform; 15, the display screen; 16, the connecting line; 17, the moving wheel. DETAILED DESCRIPTION

[0024] Embodiment 1, as Figure 1-8As shown, a multifunctional high-precision ultrasonic scanning microscope is provided, a supporting box 2 is provided on the top of a connecting box 1, a slide groove 4 is provided on the inner wall of the supporting box 2, an operating table 3 is provided inside the supporting box 2, a sliding block 5 is slidably connected to the inner wall of the slide groove 4, a motor 6 is fixedly connected to one side of the sliding block 5, a first threaded rod 7 is fixedly connected to the output end of the motor 6, an end of the first threaded rod 7 away from the motor 6 is rotatably inserted on one side of another sliding block 5, a moving block 11 is threadedly sleeved on the surface of the first threaded rod 7, a limiting rod 10 is fixedly connected to one side of the sliding block 5, the limiting rod 10 is slidably inserted through one side of the moving block 11, an ultrasonic generator 13 is provided at the bottom of the moving block 11, a cylinder 12 is provided on one side of the slide groove 4, the end of the cylinder 12 away from the supporting box 2 is fixedly connected to one side of the sliding block 5, a supporting platform 14 is provided on one side of the connecting box 1, a display screen 15 is provided on the top of the supporting platform 14, a connecting line 16 is provided on one side of the display screen 15, and the connecting line 16 is away from the display screen 15 One end of the support platform 14 is arranged on one side of the connection box 1, and moving wheels 17 are evenly arranged on the bottom of the support platform 14, a moving device 8 is arranged on one side of the operating table 3, and a limiting device 9 is arranged on one side of the connection box 1. When using the ultrasonic scanning microscope, the chip to be detected is set on the top of the operating table 3, and then the motor 6 drives the threaded rod to rotate, and then the moving block 11 is driven to move on the surface of the threaded rod under the action of the limiting rod 10, and then the sliding block 5 is squeezed by the cylinder 12 to slide inside the slide groove 4, so that the ultrasonic generator 13 arranged at the bottom of the moving block 11 can be set on the top of the chip, and the image irradiated by the ultrasonic wave can be well displayed through the display screen 15, so that it is convenient to observe the defects inside the semiconductor chip through the display screen 15. Because the top of the operating table 3 is relatively large, a slightly larger workpiece can also be set on the top of the operating table 3, which is convenient for detecting relatively large workpieces, so that multifunctional high-precision detection can be performed on different devices.

[0025] Reference Figures 2 to 5The moving device 8 includes a sliding rod 802, and a circular groove 801 is evenly opened on one side of the operating table 3. The sliding rod 802 is slidably connected to the inner wall of the circular groove 801. The end of the sliding rod 802 away from the circular groove 801 is fixedly connected to one side of the inner wall of the supporting box 2. A connecting groove 803 is opened on the top of the operating table 3. A second threaded rod 804 is rotatably inserted into the inner wall of the connecting groove 803. The thread direction of the surface of the second threaded rod 804 is opposite from the middle to the two sides. The thread sleeve on the surface of the second threaded rod 804 is provided with a moving plate 805. The moving plate 805 is slidably connected to the inner wall of the connecting groove 803. When the moving device 8 is used, the operating table 3 is manually slid on the surface of the sliding rod 802, so that the operating table 3 can be well moved. Away from the inside of the support box 2, and then control the second threaded rod 804 to rotate, because the thread direction on the surface of the second threaded rod 804 is opposite from the middle to both sides, so that the movable plate 805 threadedly sleeved on the surface of the second threaded rod 804 moves toward the inside of the operating table 3 at the same time, so that the detected chip can be well restricted on the top of the operating table 3, so that the chip can be conveniently set on the top of the operating table 3, and a storage groove 820 is provided at the bottom of the operating table 3, and a rectangular plate 823 is slidably connected to the inner wall of the storage groove 820, and the top of the storage groove 820 is fixedly connected to the fifth damping rod 821, and the bottom of the fifth damping rod 821 is fixedly connected to the top of the rectangular plate 823, and the surface of the fifth damping rod 821 is sleeved with a fifth spring 82 2, one end of the fifth spring 822 is fixedly connected to the top of the storage groove 820, one end of the fifth spring 822 close to the fifth damping rod 821 is fixedly connected to the top of the rectangular plate 823, the inner wall of the bottom of the rectangular plate 823 is fixedly connected with a rotating rod 824, and a roller 825 is rotatably sleeved on the surface of the rotating rod 824, and a first damping rod 817 is fixedly connected to one side of the support box 2, and an end of the first damping rod 817 away from the support box 2 is fixedly connected to an L-shaped plate 819, and an end of the L-shaped plate 819 away from the first damping rod 817 is arranged on a side of the operating table 3 away from the support box 2, and a first spring 818 is sleeved on the surface of the first damping rod 817, and one end of the first spring 818 is fixedly connected to one side of the support box 2, and the first spring 81 One end of 8 close to the first damping rod 817 is fixedly connected to one side of the L-shaped plate 819. When the operating table 3 is completely slid out of the supporting box 2, the fifth spring 822 presses the rectangular plate 823 in the direction away from the receiving groove 820, and then slides the rectangular plate 823 into the inside of the receiving groove 820, so that the operating table 3 can be clamped on the outside of the supporting box 2 through the rectangular plate 823, and when the operating table 3 moves on the surface of the sliding rod 802, the roller 825 is driven to move on the surface of the rotating rod 824, so that the operating table 3 can slide out of the supporting box 2 well. After the operating table 3 is slid into the supporting box 2, when the L-shaped plate 819 is manually pulled toward the supporting box 2 through the first spring 818,The end of the L-shaped plate 819 away from the first damping rod 817 is well restricted to the side of the operating table 3 away from the support box 2, so that the operating table 3 can be well set inside the support box 2. A round rod 807 is inserted and rotated through one side of the movable plate 805. The end of the round rod 807 away from the movable plate 805 is fixedly connected to the round plate 812. The side of the round plate 812 away from the round rod 807 is fixedly connected to the second damping rod 813. The end of the second damping rod 813 away from the round plate 812 is fixedly connected to the extrusion plate 815. The surface of the second damping rod 813 is sleeved with a second spring. 814, one end of the second spring 814 is fixedly connected to one side of the circular plate 812, one end of the second spring 814 away from the second damping rod 813 is fixedly connected to one side of the extrusion plate 815, and a rubber rod 816 is evenly fixedly connected to the side of the extrusion plate 815 close to the second damping rod 813, and one end of the rubber rod 816 away from the extrusion plate 815 is arranged on one side of the moving plate 805. When the moving plate 805 squeezes the chip, the round rod 807 squeezes the chip close to the middle part of the operating table 3. When the chip angle needs to be changed, the round rod 807 is manually controlled to rotate, and the second damping rod 813 is used to adjust the chip angle. The second spring 814 pulls the extrusion plate 815 toward the direction close to the circular plate 812, so that the rubber rod 816 is squeezed on one side of the movable plate 805, so that the circular rod 807 can be well fixed inside the movable plate 805, so as to facilitate the fixing of the chip at different angles. The top of the operating table 3 is fixedly connected to a support frame 808, and a connecting rod 809 is inserted through the top of the support frame 808. The bottom of the connecting rod 809 is fixedly connected to a second bevel gear 810, and one end of the second threaded rod 804 is fixedly connected to the first bevel gear 806. The first bevel gear 806 and The second bevel gear 810 is meshed with each other, and a bolt 811 is inserted through a thread on one side of the support frame 808. The connecting rod 809 is manually controlled to rotate, and the second bevel gear 810 is driven to rotate through the connecting rod 809. Because the first bevel gear 806 and the second bevel gear 810 are meshed with each other, the second threaded rod 804 can be driven to rotate through the connecting rod 809. When the second threaded rod 804 rotates to a suitable position, the bolt 811 is manually controlled to squeeze on one side of the connecting rod 809, so that the connecting rod 809 can be well restricted inside the support frame 808.

[0026] Reference Figures 6 to 8The limiting device 9 includes a rectangular rod 901, one side of the support platform 14 is fixedly connected to one end of the rectangular rod 901, the end of the rectangular rod 901 away from the support platform 14 is slidably connected to a rectangular frame 902, the rectangular frame 902 is fixedly connected to one side of the connection box 1, one side of the rectangular rod 901 is provided with a fixing groove 905, the inner wall of the fixing groove 905 is slidably connected to a fixing rod 904, and the end of the fixing rod 904 away from the fixing groove 905 is fixedly connected to a connecting plate 903. When the limiting device 9 is used, the rectangular rod 901 is manually controlled to slide into the inside of the rectangular frame 902, and then the fixing rod 904 is controlled to slide into the inside of the fixing groove 905, so that the rectangular rod 901 can be well limited to the inside of the rectangular frame 902, so that The support platform 14 is well arranged on one side of the connection box 1, which can avoid accidentally driving the support platform 14 away from the connection box 1 to a certain extent, thereby avoiding the breakage of the connecting line 16, which will affect the use of the ultrasonic scanning microscope to a certain extent. A third damping rod 906 is evenly fixedly connected to one side of the rectangular frame 902, and one end of the third damping rod 906 away from the rectangular frame 902 is fixedly connected to a side of the connecting plate 903 close to the fixed rod 904. A third spring 907 is sleeved on the surface of the third damping rod 906, and one end of the third spring 907 is fixedly connected to one side of the rectangular frame 902, and one end of the third spring 907 close to the third damping rod 906 is fixedly connected to one side of the connecting plate 903. 7 Pull the connecting plate 903 in the direction close to the rectangular frame 902, so that the fixing rod 904 can be well restricted inside the fixing groove 905, the surface of the rectangular rod 901 is slidably sleeved with a positioning block 911, the inner wall of the positioning block 911 is slidably sleeved on the surface of the rectangular frame 902, the inner wall of the positioning block 911 is provided with a limiting groove 913, the inner wall of the limiting groove 913 is provided with a rubber block 912, the bottom of the rubber block 912 is fixedly connected to one side of the rectangular frame 902, the positioning block 911 is manually controlled to slide on the surface of the rectangular rod 901, and then the inner wall of the positioning block 911 is slidably sleeved on the surface of the rectangular frame 902, and then the rubber block 912 is squeezed into the inside of the limiting groove 913, so that the connecting plate 904 can be well restricted inside the fixing groove 905. 03 is limited to one side of the rectangular frame 902, a positioning plate 908 is fixedly connected to the surface of the rectangular rod 901, and the end of the positioning plate 908 away from the support platform 14 is evenly fixedly connected to the fourth damping rod 909, and the end of the fourth damping rod 909 away from the positioning plate 908 is fixedly connected to one side of the positioning block 911, and a fourth spring 910 is stepped on the surface of the fourth damping rod 909, and one end of the fourth spring 910 is fixedly connected to one side of the positioning plate 908, and the end of the fourth spring 910 close to the fourth damping rod 909 is fixedly connected to one side of the positioning block 911, and the positioning block 911 is squeezed in the direction away from the positioning plate 908 by the fourth spring 910, so that the positioning block 911 can be well limited to the surface of the rectangular frame 902.

[0027] Working principle: when using an ultrasonic scanning microscope, the chip to be inspected is set on the top of the operating table 3, and then the motor 6 is used to drive the threaded rod to rotate, and then the moving block 11 is driven to move on the surface of the threaded rod under the action of the limit rod 10, and then the sliding block 5 is squeezed by the cylinder 12 to slide inside the slide groove 4, so that the ultrasonic generator 13 set at the bottom of the moving block 11 can be set on the top of the chip, and the image irradiated by the ultrasonic wave can be well displayed through the display screen 15, so that it is convenient to observe the defects inside the semiconductor chip through the display screen 15. Because the top of the operating table 3 is relatively large, a slightly larger workpiece can also be set on the top of the operating table 3, which is convenient for detecting relatively large workpieces, so that Different devices are used for multifunctional high-precision detection. When the moving device 8 is used, the operating platform 3 is manually slid on the surface of the sliding rod 802, so that the operating platform 3 can be well away from the inside of the supporting box 2. When the operating platform 3 is completely slid to the outside of the supporting box 2, the fifth spring 822 presses the rectangular plate 823 in the direction away from the storage groove 820, and then slides the rectangular plate 823 to the inside of the storage groove 820. In this way, the operating platform 3 can be clamped on the outside of the supporting box 2 through the rectangular plate 823, and when the operating platform 3 moves on the surface of the sliding rod 802, the roller 825 is driven to move on the surface of the rotating rod 824, so that the operating platform 3 can be well slid out of the inside of the supporting box 2, and the connecting rod 809 is manually controlled to rotate , the second bevel gear 810 is driven to rotate through the connecting rod 809. Because the first bevel gear 806 and the second bevel gear 810 are meshed with each other, the second threaded rod 804 can be driven to rotate through the connecting rod 809. Because the thread direction on the surface of the second threaded rod 804 is opposite from the middle to both sides, the movable plate 805 threadedly sleeved on the surface of the second threaded rod 804 moves toward the inside of the operating table 3 at the same time. When the second threaded rod 804 rotates to a suitable position, the manual control bolt 811 is squeezed on one side of the connecting rod 809, so that the connecting rod 809 can be well restricted inside the support frame 808, and then the detected chip can be well restricted on the top of the operating table 3, and then the operating table 3 is slid into the inner part of the support box 2. When the operating table 3 is slid into the supporting box 2, the L-shaped plate 819 is manually pulled toward the supporting box 2 by the first spring 818, so that the end of the L-shaped plate 819 away from the first damping rod 817 is well restricted to the side of the operating table 3 away from the supporting box 2. When the movable plate 805 squeezes the chip, the round rod 807 squeezes the chip near the middle of the operating table 3. When the chip angle needs to be changed, the round rod 807 is manually controlled to rotate, and the squeezing plate 815 is pulled toward the circular plate 812 by the second spring 814, so that the rubber rod 816 is squeezed on one side of the movable plate 805. In this way, the round rod 807 can be well fixed inside the movable plate 805, so as to facilitate fixing the chip at different angles.In this way, the operating table 3 can be well set inside the supporting box 2, so that the chip can be conveniently set on the top of the operating table 3. When using the limiting device 9, the rectangular rod 901 is manually controlled to slide into the inside of the rectangular frame 902, and then the fixing rod 904 is controlled to slide into the inside of the fixing groove 905. The connecting plate 903 is pulled toward the direction close to the rectangular frame 902 by the third spring 907. In this way, the fixing rod 904 can be well restricted in the inside of the fixing groove 905. In this way, the rectangular rod 901 can be well restricted in the inside of the rectangular frame 902. The positioning block 911 is manually controlled to slide on the surface of the rectangular rod 901, and then the positioning block The inner wall of 911 is slidably sleeved on the surface of the rectangular frame 902, thereby squeezing the rubber block 912 into the interior of the limiting groove 913, and squeezing the positioning block 911 in the direction away from the positioning plate 908 through the fourth spring 910, so that the positioning block 911 can be well limited to the surface of the rectangular frame 902, so that the connecting plate 903 can be well limited to one side of the rectangular frame 902, so that the support platform 14 can be well set on one side of the connecting box 1, so that it can avoid accidentally driving the support platform 14 away from the connecting box 1 to a certain extent, and thus avoid the connection line 16 from breaking, which will affect the use of the ultrasonic scanning microscope to a certain extent.

[0028] It should be noted that all damping rods in this case are retractable dampers that can absorb energy during the retraction process.

Claims

1. A multifunctional high-precision ultrasonic scanning microscope, comprising a connection box (1), characterized in that: A support box (2) is arranged on the top of the connection box (1), a slide groove (4) is provided on the inner wall of the support box (2), an operating table (3) is arranged inside the support box (2), a sliding block (5) is slidably connected to the inner wall of the slide groove (4), a motor (6) is fixedly connected to one side of the sliding block (5), a first threaded rod (7) is fixedly connected to the output end of the motor (6), an end of the first threaded rod (7) away from the motor (6) is rotatably inserted on one side of another sliding block (5), and a threaded sleeve is provided on the surface of the first threaded rod (7) A moving block (11), one side of the sliding block (5) is fixedly connected to a limiting rod (10), the limiting rod (10) is slidably inserted into one side of the moving block (11), an ultrasonic generator (13) is arranged at the bottom of the moving block (11), a cylinder (12) is arranged at one side of the slide groove (4), an end of the cylinder (12) away from the support box (2) is fixedly connected to one side of the sliding block (5), a support platform (14) is arranged at one side of the connection box (1), a display screen (15) is arranged on the top of the support platform (14), and the A connecting line (16) is arranged on one side of the display screen (15); an end of the connecting line (16) away from the display screen (15) is arranged on one side of the connection box (1); moving wheels (17) are evenly arranged on the bottom of the support platform (14); a moving device (8) is arranged on one side of the operating table (3); a limiting device (9) is arranged on one side of the connection box (1); the moving device (8) includes a sliding rod (802); a circular groove (801) is evenly opened on one side of the operating table (3); the sliding rod (802) and the circular groove (801) are in contact with each other. The inner wall of the supporting box (2) is slidably connected, one end of the sliding rod (802) away from the circular groove (801) is fixedly connected to one side of the inner wall of the supporting box (2), the top of the operating table (3) is provided with a connecting groove (803), the inner wall of the connecting groove (803) is rotatably inserted with a second threaded rod (804), the thread direction of the surface of the second threaded rod (804) is opposite from the middle to the two sides, the thread sleeve on the surface of the second threaded rod (804) is provided with a movable plate (805), and the movable plate (805) is slidably connected to the inner wall of the connecting groove (803).

2. The multifunctional high-precision ultrasonic scanning microscope according to claim 1, characterized in that: The bottom of the operating table (3) is provided with a storage groove (820), the inner wall of the storage groove (820) is slidably connected to a rectangular plate (823), the top of the storage groove (820) is fixedly connected to a fifth damping rod (821), the bottom of the fifth damping rod (821) is fixedly connected to the top of the rectangular plate (823), a fifth spring (822) is sleeved on the surface of the fifth damping rod (821), one end of the fifth spring (822) is fixedly connected to the top of the storage groove (820), one end of the fifth spring (822) close to the fifth damping rod (821) is fixedly connected to the top of the rectangular plate (823), and the inner wall of the bottom of the rectangular plate (823) is fixedly connected to a rotating rod (82 4), a roller (825) is rotatably sleeved on the surface of the rotating rod (824), a first damping rod (817) is fixedly connected to one side of the support box (2), an end of the first damping rod (817) away from the support box (2) is fixedly connected to an L-shaped plate (819), an end of the L-shaped plate (819) away from the first damping rod (817) is arranged on a side of the operating table (3) away from the support box (2), a first spring (818) is sleeved on the surface of the first damping rod (817), one end of the first spring (818) is fixedly connected to one side of the support box (2), and an end of the first spring (818) close to the first damping rod (817) is fixedly connected to one side of the L-shaped plate (819).

3. The multifunctional high-precision ultrasonic scanning microscope according to claim 1, characterized in that: A round rod (807) is rotatably inserted through one side of the movable plate (805); one end of the round rod (807) away from the movable plate (805) is fixedly connected to a round plate (812); one side of the round plate (812) away from the round rod (807) is fixedly connected to a second damping rod (813); one end of the second damping rod (813) away from the round plate (812) is fixedly connected to an extrusion plate (815); a second spring (814) is sleeved on the surface of the second damping rod (813); one end of the second spring (814) is fixedly connected to one side of the round plate (812); one end of the second spring (814) away from the second damping rod (813) is fixedly connected to one side of the extrusion plate (815); a rubber rod (816) is evenly fixedly connected to one side of the extrusion plate (815) close to the second damping rod (813); one end of the rubber rod (816) away from the extrusion plate (815) is arranged on one side of the movable plate (805).

4. The multifunctional high-precision ultrasonic scanning microscope according to claim 1, characterized in that: The top of the operating table (3) is fixedly connected to a support frame (808), a connecting rod (809) is rotatably inserted through the top of the support frame (808), a second bevel gear (810) is fixedly connected to the bottom of the connecting rod (809), one end of the second threaded rod (804) is fixedly connected to the first bevel gear (806), the first bevel gear (806) and the second bevel gear (810) are meshed with each other, and a bolt (811) is threadedly inserted through one side of the support frame (808).

5. The multifunctional high-precision ultrasonic scanning microscope according to claim 1, characterized in that: The limiting device (9) comprises a rectangular rod (901), one side of the support platform (14) and one end of the rectangular rod (901) are fixedly connected, one end of the rectangular rod (901) away from the support platform (14) is slidably connected to a rectangular frame (902), the rectangular frame (902) and one side of the connection box (1) are fixedly connected, one side of the rectangular rod (901) is provided with a fixing groove (905), the inner wall of the fixing groove (905) is slidably connected to a fixing rod (904), and one end of the fixing rod (904) away from the fixing groove (905) is fixedly connected to a connecting plate (903).

6. The multifunctional high-precision ultrasonic scanning microscope according to claim 5, characterized in that: A third damping rod (906) is evenly and fixedly connected to one side of the rectangular frame (902); one end of the third damping rod (906) away from the rectangular frame (902) is fixedly connected to a side of the connecting plate (903) close to the fixed rod (904); a third spring (907) is sleeved on the surface of the third damping rod (906); one end of the third spring (907) is fixedly connected to one side of the rectangular frame (902); and one end of the third spring (907) close to the third damping rod (906) is fixedly connected to one side of the connecting plate (903).

7. The multifunctional high-precision ultrasonic scanning microscope according to claim 5, characterized in that: A locking block (911) is slidably sleeved on the surface of the rectangular rod (901), and an inner wall of the locking block (911) is slidably sleeved on the surface of the rectangular frame (902).

8. The multifunctional high-precision ultrasonic scanning microscope according to claim 7, characterized in that: A limiting groove (913) is provided on the inner wall of the positioning block (911), a rubber block (912) is provided on the inner wall of the limiting groove (913), and the bottom of the rubber block (912) is fixedly connected to one side of the rectangular frame (902).

9. The multifunctional high-precision ultrasonic scanning microscope according to claim 8, characterized in that: A positioning plate (908) is fixedly connected to the surface of the rectangular rod (901); one end of the positioning plate (908) away from the support platform (14) is evenly fixedly connected to a fourth damping rod (909); one end of the fourth damping rod (909) away from the positioning plate (908) is fixedly connected to one side of a positioning block (911); and a fourth spring (910) is projected on the surface of the fourth damping rod (909).

10. The multifunctional high-precision ultrasonic scanning microscope according to claim 9, characterized in that: One end of the fourth spring (910) is fixedly connected to one side of the positioning plate (908), and one end of the fourth spring (910) close to the fourth damping rod (909) is fixedly connected to one side of the locking block (911).

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