Auxiliary equipment for correcting and maintaining probe of probe card

Abstract

The invention relates to the field of chip Die test equipment, and discloses a probe card probe correction and maintenance auxiliary device which comprises a maintenance table, a position adjusting table and a correction observation mechanism which are arranged adjacently, a probe cleaning and limiting module, a probe correction and limiting module and a probe heat setting module are arranged on the maintenance table, and a three-axis position adjusting mechanism is arranged on the position adjusting table. The three-axis position adjusting mechanism is provided with an angle position adjusting mechanism capable of moving and positioning on the three-axis position adjusting mechanism in the horizontal longitudinal direction, the horizontal transverse direction and the vertical direction, the angle position adjusting mechanism is provided with a needle clamp fixing mechanism capable of rotating on the angle position adjusting mechanism in the vertical direction to adjust the angle, and the correction observation mechanism comprises a microscope and an observation position adjusting mechanism for adjusting the microscope to move relative to the maintenance table. Each maintenance action of the probe card is positioned and limited by means of an equipment structure, and the previous full-manual maintenance operation under a microscope is replaced, so that the maintenance difficulty is reduced, and the maintenance success rate and the maintenance efficiency are improved.

Description

Technical Field

[0001] The present invention relates to the field of chip Die testing equipment, and particularly to an auxiliary equipment for correcting and repairing needle card probes. Background Art

[0002] Existing finished chips are all packaged by single or several dies (semiconductor wafers). In order to ensure the quality and performance of the chips, batches of dies (semiconductor wafers) cut from wafers need to be tested to detect and eliminate possible defects or faults. The testing of semiconductor wafers generally uses a needle card (circuit board probe) to connect the tester and the chip, and the performance and functions of the wafer are tested by transmitting signals. When in use, the probes on the needle card are directly in contact with the test parts on the wafer for connection, and then combined with peripheral testing instruments and software control to achieve the purpose of automatic measurement.

[0003] The probe generally includes a probe base obliquely extending from the circuit board, a connecting portion having an angle with the base, and a tip at the end of the connecting portion. During the detection process, the tips of multiple probes on the circuit board need to be inserted into the corresponding detection positions on the semiconductor wafer for detection. During the testing process, the probes will elastically contact and conduct with the semiconductor wafer. Long-term detection will cause the probes to bend or shift, etc. At this time, the probes on the needle card need to be repaired. The existing repair of needle card probes is generally completed by manual operation under a microscope, holding it by hand and operating on the operation table. Due to the high precision of the probes, the operation requirements are high, and the repair personnel need to have a high operation level. The operation is prone to errors, and the success rate and repair efficiency of the repair are low. Summary of the Invention

[0004] The present invention provides an auxiliary equipment for correcting and repairing needle card probes, which solves the technical problems that the existing repair of needle card probes is generally completed by manual operation under a microscope, the operation is prone to errors, and the success rate and repair efficiency of the repair are low.

[0005] The technical solution adopted by the present invention to solve its technical problems is: an auxiliary equipment for correcting and repairing needle card probes, including an adjacent repair table, a positioning table, and a correction and observation mechanism. A probe cleaning and limiting module, a probe correction and limiting module, and a probe heat setting module are arranged on the repair table. A three-axis positioning mechanism is arranged on the positioning table. The three-axis positioning mechanism is provided with an angle positioning mechanism that can move and position horizontally longitudinally, horizontally transversely, and vertically thereon. The angle positioning mechanism is provided with a needle card fixing mechanism that can rotate and adjust the angle vertically thereon. The correction and observation mechanism includes a microscope and an observation positioning mechanism for adjusting the relative movement of the microscope to the repair table. By means of the equipment structure, each repair action of the needle card is positioned and limited, replacing the previous all-manual repair operation under the microscope, reducing the difficulty of the repair, and improving the success rate and repair efficiency of the repair.

[0006] Furthermore, a positioning module is provided on the repair table. A plurality of identical mounting grooves are arranged in parallel on the positioning module. The probe cleaning limit module, the probe correction limit module, and the probe heat setting module are detachably installed in the plurality of mounting grooves respectively. Multiple sets of the probe cleaning limit module, the probe correction limit module, and the probe heat setting module can be manufactured according to actual requirements and can be correspondingly replaced according to different types of the needle card, so the applicability of the equipment is strong.

[0007] Furthermore, the probe cleaning limit module includes a first base block. A first inclined surface is provided on the upper end surface of the first base block near the adjustment table side. A cleaning groove is provided on the first inclined surface of the first base block away from the adjustment table side. A first frame body extending upward in the vertical direction is provided at the upper end of the cleaning groove. A plurality of first limit grooves matching the bases of multiple probes on the needle card are provided on the first inclined surface. At the corresponding positions of the upper ends of the plurality of first limit grooves on the first frame body, first limit holes horizontally penetrating and matching the diameter of the connecting part of the probe are respectively connected. The depth of the first limit holes on the first frame body is less than the length of the connecting part of the probe. The angle between the first limit hole and the connected first limit groove is the same as the angle between the connecting part and the base of the corresponding probe. It can effectively avoid affecting the base and the connecting part of the probe, the operation can be more refined, the cleaning effect is good, and the probability of accidentally damaging the probe is low.

[0008] Furthermore, a dirt cleaning pipe is provided in the cleaning groove, and the dirt cleaning pipe is connected to a vacuum device. The cleaning process of the probe tip is more perfect, avoiding the influence of the operation environment of dirt and alcohol volatilization.

[0009] Furthermore, the probe correction limit module includes a second base block. A second inclined surface is provided on the upper end of the second base block near the adjustment table side. A plurality of second limit grooves matching the bases of multiple probes on the needle card are provided on the second inclined surface. At the corresponding positions of the upper ends of the plurality of second limit grooves on the upper end of the second base block, third limit grooves matching the connecting part of the probe are horizontally connected respectively. At the corresponding positions of the far ends of the plurality of third limit grooves on the upper end of the second base block away from the second limit grooves, fourth limit grooves matching the tip of the probe are connected respectively. The angle between the third limit groove and the connected second limit groove is the same as the angle between the connecting part and the base of the corresponding probe. The correction and repair accuracy is high, the effect is good, and the probability of accidentally damaging the probe is low.

[0010] Furthermore, the probe heat setting module includes a heating and setting module. On the side wall of the heating and setting module close to the positioning table, a plurality of first setting cavities corresponding to and matching the connection parts of multiple probes on the probe card are horizontally arranged. At one end of the first setting cavity away from the positioning table, a second setting cavity matching the tip of the probe is connected. The depth of the first setting cavity is less than the length of the probe connection part. A heating mechanism and a temperature monitoring mechanism are arranged in the heating and setting module, and the heating mechanism and the temperature monitoring mechanism are connected to a temperature control system. It has little influence on probe correction, high correction accuracy, and good effect.

[0011] Furthermore, the three-axis positioning mechanism includes a horizontal longitudinal positioning mechanism, a horizontal transverse positioning mechanism arranged on the horizontal longitudinal positioning mechanism and capable of horizontally and longitudinally sliding and positioning, and a vertical positioning mechanism arranged on the horizontal transverse positioning mechanism and capable of horizontally and transversely sliding and positioning. The angle positioning mechanism is arranged on the vertical positioning mechanism and can be vertically positioned and adjusted. It realizes high-precision alignment of the probes on the probe card with the probe cleaning and limiting module, the probe correction and limiting module, and the probe heat setting module.

[0012] Furthermore, the angle positioning mechanism includes a positioning substrate, a first bracket, an upper rotating shaft structure, a lower rotating shaft structure, a rotation limiting structure, an angle adjustment transmission structure, and an angle adjustment structure. The first bracket includes a vertical bracket, a first horizontal bracket, and a second horizontal bracket. The vertical bracket is vertically fixed on the side of the positioning substrate away from the maintenance table. The first horizontal bracket is horizontally fixed at the upper end of the vertical bracket and extends towards the maintenance table. The second horizontal bracket is horizontally and perpendicularly fixed at one end of the first horizontal bracket close to the maintenance table. The upper rotating shaft structure is vertically fixed on the lower end face of the second horizontal bracket. The upper end of the probe card fixing mechanism is fixed on the upper rotating shaft structure and can rotate vertically relative to the maintenance table. The lower end of the lower rotating shaft structure is fixed to the lower end of the probe card fixing mechanism. The lower rotating shaft structure is provided with lower rotating shaft rods protruding horizontally to both sides. The rotation limiting structure is fixed on the positioning substrate below the upper rotating shaft structure. The rotation limiting structure is provided with arc-shaped limiting grooves for limiting the arc-shaped movement trajectories of both ends of the lower rotating shaft rods when the probe card fixing mechanism rotates. The angle adjustment structure is fixedly arranged on the side of the positioning substrate away from the vertical bracket. The angle adjustment structure is connected to the lower rotating shaft rod through the angle adjustment transmission structure and indirectly drives the rotating shaft rod extending from the lower rotating shaft structure to move in the arc-shaped limiting groove. It realizes high-precision alignment of the probes on the probe card with the probe cleaning and limiting module, the probe correction and limiting module, and the probe heat setting module.

[0013] Further: The angle adjustment structure includes an adjustment block, a driving block, a compression spring, and a driving rod mechanism. The upper end of the adjustment block is provided with a concave rectangular sliding groove. The driving block is limited to slide within the rectangular sliding groove. At both ends of the sliding direction of the driving block, a spring limiting cavity and a driving rod limiting cavity are respectively provided. A positioning threaded hole is horizontally penetrated through the corresponding position on the side of the adjustment block corresponding to the driving rod limiting cavity of the driving block. The driving rod mechanism includes a threaded rod matching the positioning threaded hole and a knob disk fixed at one end of the threaded rod. One end of the threaded rod is located outside the adjustment block, and the other end enters the interior of the rectangular sliding groove through the positioning threaded hole and abuts against the bottom of the driving rod limiting cavity. Both ends of the compression spring are elastically abutted against the spring limiting cavity and one end of the rectangular sliding groove corresponding to the spring limiting cavity respectively. A limiting sliding groove is horizontally penetrated through the side of the adjustment block close to the rotation limiting structure. A cylindrical connecting rod protruding into the limiting sliding groove and limited to move along the direction of the limiting sliding groove is horizontally fixed on the side of the driving block corresponding to the limiting sliding groove. Circular through holes are provided at both ends of the angle adjustment transmission structure and are respectively rotationally connected to the lower rotating shaft rod and the cylindrical connecting rod. The adjustment structure is simple and has high precision.

[0014] Further: The limiting structures for the probe connection part on the probe cleaning limiting module, the probe correction limiting module, and the probe heat setting module are located on the same horizontal plane. This improves the maintenance efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 is the front view schematic diagram of the present invention;

[0016] Figure 2 is the front view schematic diagram of the probe cleaning limiting module, the probe correction limiting module, and the probe heat setting module;

[0017] Figure 3 is the front view schematic diagram of the probe cleaning limiting module;

[0018] Figure 4 is the enlarged schematic diagram of the first limiting groove, the first limiting hole, and the probe;

[0019] Figure 5 is the front view schematic diagram of the probe correction limiting module;

[0020] Figure 6 is the enlarged schematic diagram of the second limiting groove, the third limiting groove, the fourth limiting groove, and the probe;

[0021] Figure 7 is the front view schematic diagram of the probe heat setting module;

[0022] Figure 8 is the enlarged schematic diagram of the first shaping cavity and the probe;

[0023] Figure 9 Schematic front view of the angle adjustment mechanism and the needle card fixing mechanism;

[0024] Figure 10 Schematic view of the upper rear side of the angle adjustment mechanism and the needle card fixing mechanism.

[0025] In the figure, the markings are: maintenance table 100, positioning module 101, probe cleaning limit module 110, first base block 111, first inclined surface 112, cleaning groove 113, first frame 114, first limit groove 115, first limit hole 116, probe correction limit module 120, second base block 121, second inclined surface 122, second limit groove 123, third limit groove 124, fourth limit groove 125, probe heat setting module 130, heating and setting module 131, first setting cavity 132, adjustment table 200, three-axis adjustment mechanism 210, angle adjustment mechanism 220, adjustment base plate 221, needle card fixing mechanism 230, needle card fixing frame 231, limit fixing press head structure 232, first bracket 240, vertical bracket 241, first horizontal bracket 242, second horizontal bracket 243, upper rotating shaft structure 250, lower rotating shaft structure 260, lower rotating shaft rod 261, rotation limit structure 270, arc limit groove 271, angle adjustment transmission structure 280, angle adjustment structure 290, adjustment block 291, drive block 292, compression spring 293, drive rod mechanism 294, knob disc 295. Specific embodiments

[0026] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0027] As shown in Figure 1 A needle card probe correction and maintenance auxiliary device, including an adjacent maintenance table 100, an adjustment table 200 and a correction observation mechanism. The maintenance table 100 is provided with a probe cleaning limit module 110, a probe correction limit module 120 and a probe heat setting module 130. The adjustment table 200 is provided with a three-axis adjustment mechanism 210. The three-axis adjustment mechanism 210 is provided with an angle adjustment mechanism 220 that can be positioned horizontally longitudinally, horizontally transversely and vertically thereon. The angle adjustment mechanism 220 is provided with a needle card fixing mechanism 230 that can be rotated and adjusted vertically thereon. The correction observation mechanism includes a microscope and an observation adjustment mechanism for adjusting the relative movement of the microscope to the maintenance table 100.

[0028] In specific implementation, the needle card is fixed on the needle card fixing mechanism 230. First, the needle card fixing mechanism 230 is roughly adjusted to the corresponding position of the probe cleaning limiting module 110 through the three-axis positioning mechanism 210. Then, the three-axis positioning mechanism 210 and / or the angle positioning mechanism 220 are used for fine adjustment to limit the probes on the needle card by the probe cleaning limiting module 110. Then, alcohol is sprayed on the tip of the probe to dissolve the adhered stains on the tip of the probe, and then a special brush is used for cleaning;

[0029] After the probe cleaning is completed, the three-axis positioning mechanism 210 and / or the angle positioning mechanism 220 are adjusted to move the probe out of the probe cleaning limiting module 110 and then move it into the probe correction limiting module 120 to correct the bending or offset of the probe at the preset position;

[0030] After the bending or offset correction of the probe is completed, the three-axis positioning mechanism 210 and / or the angle positioning mechanism 220 are adjusted to move the probe out of the probe correction limiting module 120 and then move it into the probe heat setting module 130. The probe heat setting module 130 heats the connecting part and the tip of the probe. The connecting part and the tip of the probe are further corrected as required in the probe heat setting module 130. After gradually reducing the temperature of the probe heat setting module 130, the connecting part and the tip of the probe are shaped into the preset shape and will not rebound again;

[0031] After the probe is heat set, the three-axis positioning mechanism 210 and / or the angle positioning mechanism 220 are adjusted to move the probe out of the probe heat setting module 130 and then move it into the probe correction limiting module 120 to recheck the heat-set probe. After confirming that the probe meets the correction requirements, the three-axis positioning mechanism 210 and / or the angle positioning mechanism 220 are adjusted to move the probe out of the probe correction limiting module 120, and then the needle card is taken out of the needle card fixing mechanism 230 to complete the entire maintenance process; if the probe is still unqualified during the recheck in the probe correction limiting module 120, the relevant equipment structures on the maintenance table 100 need to be overhauled;

[0032] During this process, the correction observation mechanism moves along with the needle card fixing mechanism 230 to observe the probe situation in real time. In this specific embodiment, the correction observation mechanism is an electron microscope mechanism with a moving structure on the existing test mechanism for the bare die of the test chip, and the moving structure is a high-precision slide rail assembly with real-time display of high-precision distance;

[0033] In this specific implementation, the needle card fixing mechanism 230 includes a needle card fixing frame 231 with an open end at one end and a limiting and fixing pressure head structure 232 located on the needle card fixing frame 231 for fixing the needle card within the needle card fixing frame 231 to achieve the fixation of the needle card;

[0034] The structure of the device is used to position and limit each maintenance action of the probe card, replacing the previous all-manual maintenance operation under the microscope, reducing the difficulty of maintenance, and improving the success rate and efficiency of maintenance.

[0035] On the above basis, as Figure 1 and Figure 2 shown, a positioning module 101 is provided on the maintenance table 100. A plurality of identical mounting grooves are arranged in parallel on the positioning module 101. The probe cleaning and limiting module 110, the probe correction and limiting module 120, and the probe heat setting module 130 are detachably installed in a plurality of mounting grooves respectively. In this specific embodiment, high-precision sliding grooves are provided on both sides of the mounting groove. Both sides of the probe cleaning and limiting module 110, the probe correction and limiting module 120, and the probe heat setting module 130 are provided with protruding sliders matching the sliding grooves. A fixing block extending to both sides is provided at the rear end of the slider, and the fixing block is fixed on the fixing block by bolts; in specific implementation, multiple sets of the probe cleaning and limiting module 110, the probe correction and limiting module 120, and the probe heat setting module 130 can be made according to actual needs, and corresponding replacements can be made according to different types of the needle card during implementation, and the applicability of the device is strong.

[0036] On the above basis, as Figure 1 to Figure 4 shown, the probe cleaning and limiting module 110 includes a first base block 111. A first inclined surface 112 is provided on the upper end surface of the first base block 111 near the adjustment table 200. A cleaning groove 113 is provided on the upper end of the first inclined surface 112 of the first base block 111 away from the adjustment table 200. A first frame body 114 extending upward in the vertical direction is provided at the upper end of the cleaning groove 113. A plurality of first limiting grooves 115 matching the bases of multiple probes on the needle card are provided on the first inclined surface 112. Horizontally penetrating first limiting holes 116 matching the diameters of the connecting parts of the probes are respectively connected at the corresponding positions at the upper ends of the plurality of first limiting grooves 115 on the first frame body 114. The depth of the first limiting holes 116 on the first frame body 114 is less than the length of the connecting parts of the probes. The angle between the first limiting holes 116 and the connected first limiting grooves 115 is the same as the angle between the connecting parts and the bases of the corresponding probes. In specific implementation, after the probes are limited on the probe cleaning and limiting module 110, the bases of multiple probes are respectively limited in a plurality of first limiting grooves 115, the connecting parts of the probes are limited in the first limiting holes 116, and the tips of the probes are located in the cleaning groove 113 after passing through the first limiting holes 116. At this time, manual cleaning operation can be carried out on the tips of the probes in the cleaning groove 113, effectively avoiding the influence on the bases and connecting parts of the probes, the operation can be more refined, the cleaning effect is good, and the probability of accidentally damaging the probes is low.

[0037] On the basis described above, as Figures 1 to 4 shown, a dirt cleaning pipe is arranged in the cleaning groove 113, and the dirt cleaning pipe is connected with a vacuum device. The cleaning process of the probe tip is more perfect, avoiding the influence of the operation environment of dirt and alcohol volatilization.

[0038] On the basis described above, as Figure 1 , Figure 2 , Figure 5 and Figure 6 shown, the probe correction and limiting module 120 includes a second base block 121. A second inclined surface 122 is arranged on the upper end of the second base block 121 close to one side of the position adjustment table 200. A plurality of second limiting grooves 123 matching the bases of multiple probes on the needle card are arranged on the second inclined surface 122. At the corresponding positions of the upper ends of the plurality of second limiting grooves 123 on the upper end of the second base block 121, third limiting grooves 124 matching the connecting parts of the probes are horizontally connected respectively. At the corresponding positions of the ends, away from the second limiting grooves 123, of the plurality of third limiting grooves 124 on the upper end of the second base block 121, fourth limiting grooves 125 matching the tips of the probes are connected respectively. The angle between the third limiting groove 124 and the connected second limiting groove 123 is the same as the included angle between the connecting part and the base of the corresponding probe. In a specific implementation, after the probes are limited on the probe correction and limiting module 120, the bases of the multiple probes are respectively limited in the plurality of second limiting grooves 123, the connecting parts of the probes are limited in the third limiting grooves 124, and the tips of the probes are limited in the fourth limiting grooves 125. At this time, manual operations can be carried out to perform corresponding comparison and reference correction operations on the bases, connecting parts and tips of the probes in the second limiting grooves 123, third limiting grooves 124 and fourth limiting grooves 125. The operations can be more refined, with limiting comparison and reference, high precision in correction and repair, good effects, and a low probability of accidentally damaging the probes.

[0039] On the basis described above, as Figure 1 , Figure 2 , Figure 7 and Figure 8As shown, the probe heat shaping module 130 includes a heating shaping module 131, and a plurality of first shaping cavities 132 corresponding to and matching the plurality of probe connecting parts on the needle card are horizontally arranged on the side wall of the heating shaping module 131 close to the positioning platform 200. The first shaping cavity 132 is connected to a second shaping cavity matching the probe tip at one end away from the positioning platform 200, and the depth of the first shaping cavity 132 is less than the length of the probe connecting part. A heating mechanism and a temperature monitoring mechanism are arranged in the heating shaping module 131, and the heating mechanism and the temperature monitoring mechanism are connected to a temperature control system. The probe heat setting module 130 heats the connecting part and the tip of the probe in the first setting cavity 132 and the second setting cavity, and the connecting part and the tip of the probe are further corrected as required in the probe heat setting module 130. After gradually lowering the temperature of the probe heat setting module 130, the connecting part and the tip of the probe are fixed to the preset shape and will not rebound again. In the entire probe heat setting process, the needle card is accurately fixed in the corresponding position, which has little impact on the probe correction, high correction accuracy and good effect.

[0040] On the basis of the above, if Figure 1 As shown, the three-axis positioning mechanism 210 includes a horizontal longitudinal positioning mechanism, a horizontal transverse positioning mechanism arranged on the horizontal longitudinal positioning mechanism and capable of horizontal longitudinal sliding and positioning, and a vertical positioning mechanism arranged on the horizontal transverse positioning mechanism and capable of horizontal transverse sliding and positioning. The angle adjustment mechanism 220 is arranged on the vertical adjustment mechanism and can be adjusted and positioned in the vertical direction. In this specific embodiment, the horizontal longitudinal positioning mechanism and the horizontal longitudinal positioning mechanism both include two parallel high-precision slide rails, and the two parallel high-precision slide rails are equipped with multiple matching high-precision sliders, and the high-precision sliders on the two parallel high-precision slide rails are provided with sliding base plates, and a positioning bar is provided between the two parallel high-precision slide rails, and the positioning bar is provided with a positioning structure that cooperates with the sliding base plate to perform positioning through bolt interference; the vertical positioning mechanism includes a sliding rod and a sliding sleeve fixed in the vertical direction, as well as a spring, a movable base plate and an adjusting bolt, the sliding rod and the sliding sleeve are located on the sliding base plate and the movable base plate respectively located on the horizontal transverse positioning mechanism, and are used to limit the vertical movement of the movable base plate, the spring is located between the sliding base plate and the movable base plate on the horizontal transverse positioning mechanism, so that the movable base plate moves vertically away from the sliding base plate on the horizontal transverse positioning mechanism, and the adjusting bolt is used to adjust the distance between the sliding base plate and the movable base plate on the horizontal transverse positioning mechanism, so as to control the height of the fine-tuning movable base plate. High-precision alignment of the probe on the needle card with the probe cleaning limit module 110 , the probe correction limit module 120 and the probe thermal setting module 130 is achieved.

[0041] On the basis of the above, if Figure 1 , Figure 9 and Figure 10As shown, the angle adjustment mechanism 220 includes an adjustment base plate 221, a first bracket 240, an upper rotating shaft structure 250, a lower rotating shaft structure 260, a rotation limiting structure 270, an angle adjustment transmission structure 280, and an angle adjustment structure 290. The first bracket 240 includes a vertical bracket 241, a first horizontal bracket 242, and a second horizontal bracket 243. The vertical bracket 241 is vertically fixed on the side of the adjustment base plate 221 away from the maintenance table 100. The first horizontal bracket 242 is horizontally fixed at the upper end of the vertical bracket 241 and extends toward the maintenance table 100. The second horizontal bracket 243 is horizontally and perpendicularly fixed at one end of the first horizontal bracket 242 close to the maintenance table 100. The upper rotating shaft structure 250 is vertically fixed on the lower end surface of the second horizontal bracket 243. The upper end of the needle card fixing mechanism 230 is fixed on the upper rotating shaft structure 250 and can rotate in the vertical direction relative to the maintenance table 100. The lower end of the lower rotating shaft structure 260 is fixed to the upper end of the needle card fixing mechanism 230. The lower rotating shaft structure 260 is provided with a lower rotating shaft rod 261 that protrudes horizontally to both sides. The rotation limiting structure 270 is fixed on the adjustment base plate 221 below the upper rotating shaft structure 250. The rotation limiting structure 270 is provided with an arc-shaped limiting groove 271 that limits the arc-shaped movement trajectory of both ends of the lower rotating shaft rod 261 when the needle card fixing mechanism 230 rotates. The angle adjustment structure 290 is fixedly arranged on the side of the adjustment base plate 221 away from the vertical bracket 241. The angle adjustment structure 290 is connected to the lower rotating shaft rod 261 through the angle adjustment transmission structure 280 and indirectly drives the rotating shaft rod extending from the lower rotating shaft structure 260 to move in the arc-shaped limiting groove. The structure of the first bracket 240 ensures that the needle card does not collide with it during installation. By adjusting the angle of the needle card through the angle adjustment structure 290, high-precision alignment of the probes on the needle card with the probe cleaning limiting module 110, the probe correction limiting module 120, and the probe heat setting module 130 is achieved.

[0042] On the basis of the above, as Figure 1 , Figure 9 and Figure 10As shown, the angle adjustment structure 290 includes an adjustment block 291, a driving block 292, a compression spring 293, and a driving rod mechanism 294. The upper end of the adjustment block 291 is provided with a concave rectangular sliding groove. The driving block 292 is limited to slide within the rectangular sliding groove. At both ends of the sliding direction of the driving block 292, a spring limiting cavity and a driving rod limiting cavity are respectively provided. A positioning threaded hole is horizontally penetrated through the corresponding position on the side of the adjustment block 291 corresponding to the driving rod limiting cavity of the driving block 292. The driving rod mechanism 294 includes a threaded rod matching the positioning threaded hole and a knob disk 295 fixed at one end of the threaded rod. One end of the threaded rod is located outside the adjustment block 291, and the other end enters the interior of the rectangular sliding groove through the positioning threaded hole and abuts against the bottom of the driving rod limiting cavity. The two ends of the compression spring 293 are elastically abutted against the spring limiting cavity and one end of the rectangular sliding groove corresponding to the spring limiting cavity respectively. A horizontally penetrated limiting sliding groove is provided on the side of the adjustment block 291 close to the rotation limiting structure 270. A cylindrical connecting rod that protrudes into the limiting sliding groove and is limited to move along the direction of the limiting sliding groove is horizontally fixed on the side of the driving block 292 corresponding to the limiting sliding groove. Circular through holes are provided at both ends of the angle adjustment transmission structure 280 and are respectively rotationally connected to the lower rotating shaft rod 261 and the cylindrical connecting rod. The adjustment structure is simple and has high precision.

[0043] On the basis of the above, as Figure 1 and Figure 2 shown, the limiting structures for the probe connection part on the probe cleaning and limiting module 110, the probe correction and limiting module 120, and the probe heat setting module 130 are located on the same horizontal plane. In a specific implementation, the limiting structures for the probe connection part are at the same horizontal structural height. After the height and angle of the needle card are precisely adjusted for the first time, the height and angle of the needle card do not need to be adjusted anymore, and only horizontal lateral and longitudinal adjustments are required, which improves the maintenance efficiency.

[0044] In the above specific embodiments, the purpose, technical solution, and beneficial effects of the present invention are further described in detail. It should be understood that the above are only specific embodiments of the present invention and are not used to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A needle card probe correction and maintenance auxiliary equipment, characterized in that: The invention comprises a maintenance platform (100), a positioning platform (200) and a correction observation mechanism which are arranged adjacent to each other. The maintenance platform (100) is provided with a probe cleaning limit module (110), a probe correction limit module (120) and a probe heat setting module (130). The positioning platform (200) is provided with a three-axis positioning mechanism (210). The three-axis positioning mechanism (210) is provided with an angle positioning mechanism (220) which can be moved and positioned in the horizontal longitudinal direction, the horizontal transverse direction and the vertical direction. The angle positioning mechanism (220) is provided with a needle card fixing mechanism (230) which can be rotated in the vertical direction to adjust the angle. The correction observation mechanism comprises a microscope and an observation positioning mechanism for adjusting the movement of the microscope relative to the maintenance platform (100).

2. The needle card probe correction and maintenance auxiliary equipment according to claim 1 is characterized by: The maintenance platform (100) is provided with a positioning module (101), and a plurality of identical installation slots are arranged in parallel on the positioning module (101); the probe cleaning limit module (110), the probe correction limit module (120) and the probe heat setting module (130) are detachably installed in the plurality of installation slots respectively.

3. The needle card probe correction and maintenance auxiliary equipment according to claim 1 is characterized in that: The probe cleaning limit module (110) comprises a first base block (111); a first inclined surface (112) is arranged on the upper end surface of the first base block (111) close to the positioning platform (200); a cleaning groove (113) is arranged on the upper end surface of the first base block (111) away from the positioning platform (200); a first frame (114) extending vertically upward is arranged on the upper end of the cleaning groove (113); and a base (114) for contacting with a plurality of probes on the needle card is arranged on the first inclined surface (112). A plurality of matching first limiting grooves (115) are provided, and corresponding positions on the upper ends of the plurality of first limiting grooves (115) on the first frame body (114) are respectively connected with first limiting holes (116) penetrating in the horizontal direction and matching the diameter of the connecting part of the probe. The depth of the first limiting holes (116) on the first frame body (114) is less than the length of the connecting part of the probe, and the angle between the first limiting hole (116) and the connected first limiting groove (115) is the same as the angle between the connecting part and the base of the corresponding probe.

4. The needle card probe correction and maintenance auxiliary equipment according to claim 3 is characterized by: A cleaning pipe is provided in the cleaning groove (113), and the cleaning pipe is connected to a vacuum device.

5. The needle card probe correction and maintenance auxiliary equipment according to claim 1 is characterized by: The probe correction limiting module (120) comprises a second base block (121); a second inclined surface (122) is arranged on the upper end of the second base block (121) near the side of the positioning platform (200); a plurality of second limiting grooves (123) matching the bases of a plurality of probes on the needle card are arranged on the second inclined surface (122); third limiting grooves (124) matching the connecting parts of the probes are horizontally connected to the corresponding positions of the upper ends of the plurality of second limiting grooves (123) on the upper end of the second base block (121); fourth limiting grooves (125) matching the tip of the probe are connected to the corresponding positions of the third limiting grooves (124) on the upper end of the second base block (121) away from the second limiting grooves (123); and the angle between the third limiting grooves (124) and the connected second limiting grooves (123) is the same as the angle between the connecting part and the base of the corresponding probe.

6. The needle card probe correction and maintenance auxiliary equipment according to claim 1, characterized in that: The probe heat shaping module (130) comprises a heating shaping module (131); a plurality of first shaping cavities (132) corresponding to and matching the plurality of probe connecting parts on the needle card are horizontally arranged on a side wall of the heating shaping module (131) close to the positioning platform (200); a second shaping cavity matching the probe tip is connected to the first shaping cavity (132) at one end away from the positioning platform (200); the depth of the first shaping cavity (132) is less than the length of the probe connecting part; a heating mechanism and a temperature monitoring mechanism are arranged in the heating shaping module (131); and the heating mechanism and the temperature monitoring mechanism are connected to a temperature control system.

7. The needle card probe correction and maintenance auxiliary equipment according to claim 1 is characterized by: The three-axis positioning mechanism (210) comprises a horizontal longitudinal positioning mechanism, a horizontal transverse positioning mechanism arranged on the horizontal longitudinal positioning mechanism and capable of horizontal longitudinal sliding and positioning, and a vertical positioning mechanism arranged on the horizontal transverse positioning mechanism and capable of horizontal transverse sliding and positioning. The angle positioning mechanism (220) is arranged on the vertical positioning mechanism and capable of vertical adjustment and positioning.

8. The needle card probe correction and maintenance auxiliary equipment according to claim 1 is characterized by: The angle adjustment mechanism (220) comprises an adjustment substrate (221), a first bracket (240), an upper rotating shaft structure (250), a lower rotating shaft structure (260), a rotation limiting structure (270), an angle adjustment transmission structure (280) and an angle adjustment structure (290); the first bracket (240) comprises a vertical bracket (241), a first horizontal bracket (242) and a second horizontal bracket (243); the vertical bracket (241) is vertically fixed on the adjustment substrate (221) at a side away from the maintenance platform (100); the first horizontal bracket (242) is horizontally fixed on the upper end of the vertical bracket (241) and extends toward one side of the maintenance platform (100); the second horizontal bracket (243) is horizontally and vertically fixed on an end of the first horizontal bracket (242) close to the maintenance platform (100); the upper rotating shaft structure (250) is vertically fixed on the lower end surface of the second horizontal bracket (243); the upper end of the needle card fixing mechanism (230) The lower rotating shaft structure (260) is fixed on the upper rotating shaft structure (250) and can rotate vertically relative to the maintenance platform (100); the upper end of the lower rotating shaft structure (260) is fixed to the lower end of the needle card fixing mechanism (230); the lower rotating shaft structure (260) is provided with a lower rotating shaft rod (261) protruding horizontally to both sides; the rotation limiting structure (270) is fixed below the upper rotating shaft structure (250) on the positioning substrate (221); the rotation limiting structure (270) is provided with The two ends of the lower rotating shaft rod (261) are limited in arc-shaped limiting grooves (271) on the arc-shaped moving trajectory when the needle card fixing mechanism (230) rotates. The angle adjustment structure (290) is fixedly arranged on the side of the adjusting substrate (221) away from the vertical bracket (241). The angle adjustment structure (290) is connected to the lower rotating shaft rod (261) through the angle adjustment transmission structure (280), and indirectly drives the rotating shaft rod extending from the lower rotating shaft structure (260) to move in the arc-shaped limiting groove.

9. The needle card probe correction and maintenance auxiliary equipment according to claim 8, characterized in that: The angle adjustment structure (290) comprises an adjustment block (291), a driving block (292), a compression spring (293) and a driving rod mechanism (294); the upper end of the adjustment block (291) is provided with a concave rectangular slide groove; the driving block (292) is located in the rectangular slide groove for limited sliding; the two ends of the driving block (292) in the sliding direction are respectively provided with a spring limit cavity and a driving rod limit cavity; the adjustment block (291) and the driving rod limit cavity of the driving block (292) are provided with an adjustment threaded hole horizontally penetrating the corresponding position on the corresponding side; the driving rod mechanism (294) comprises a threaded rod matching the adjustment threaded hole and a knob disk (295) fixed at one end of the threaded rod; one end of the threaded rod is located at The outer side of the adjustment block (291) and the other end thereof rotate into the interior of the rectangular slide groove through the adjustment threaded hole and then abut against the bottom of the driving rod limit cavity. The two ends of the clamping spring (293) respectively elastically abut against the spring limit cavity and one end of the rectangular slide groove corresponding to the spring limit cavity. The adjustment block (291) is provided with a limit slide groove penetrating in the horizontal direction on one side close to the rotation limit structure (270). The driving block (292) is horizontally fixedly provided with a cylindrical connecting rod protruding into the limit slide groove and limited by the limit slide groove to move along the direction of the limit slide groove on one side corresponding to the limit slide groove. Both ends of the angle adjustment transmission structure (280) are provided with circular through holes and are respectively rotationally connected to the lower rotating shaft rod (261) and the cylindrical connecting rod.

10. The needle card probe correction and maintenance auxiliary equipment according to claim 1, characterized in that: The limiting structures for the probe connection parts on the probe cleaning limiting module (110), the probe correcting limiting module (120) and the probe thermal setting module (130) are located on the same horizontal plane.

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