Low-energy-consumption vacuum-pumping system of coating machine and operation method

Abstract

The low-energy-consumption vacuum-pumping system of the coating machine comprises a coating vacuum chamber, a fine suction pump assembly, a pre-suction pump assembly and a maintaining pump assembly, the coating vacuum chamber is provided with a vacuum-pumping opening and an inflation opening, the inflation opening is provided with an inflation valve, the fine suction pump assembly comprises a first molecular pump, and the pre-suction pump assembly comprises a second molecular pump. A high-pressure valve set used for controlling connection and disconnection is connected between the first air inlet end and the vacuumizing opening. A rough pumping valve set is connected between the second air inlet end and the vacuumizing opening, and a preceding-stage valve set is connected between the second air inlet end and the first exhaust end. The maintaining pump assembly comprises a second molecular pump and a maintaining pump body which are sequentially connected in the gas circulation direction, and the third gas inlet end communicates between the first gas exhaust end and the gas inlet side of the preceding-stage valve set. And the electric energy consumption is greatly saved.

Description

Technical Field

[0001] The present invention relates to the technical field of coating vacuum pumping, and particularly relates to a low-energy consumption coating machine vacuum pumping system and an operation method thereof. Background Art

[0002] Current vacuum coating machines all use a vacuum pumping system to pump the coating vacuum chamber. In order to improve the accuracy of vacuum pumping, the existing vacuum pumping system generally uses a molecular pump to precisely control and maintain the vacuum degree of the coating vacuum chamber. However, the start and stop of the molecular pump require a long time and can only be started and stopped after the pipeline vacuum degree reaches the set value. And in order to keep the molecular pump operating at an efficient power, multiple traditional mechanical pumps are generally configured to cooperate with the molecular pump for exhaust, and the mechanical pumps are all operating at a relatively high power, with high energy consumption, making it difficult to efficiently maintain the vacuum of the coating vacuum chamber at a specific vacuum degree, and during the intermittent feeding and discharging switching process of the vacuum coating machine, it is difficult to quickly pump the vacuum degree of the coating vacuum chamber to the set value. Summary of the Invention The purpose of the present invention is to provide a low-energy consumption coating machine vacuum pumping system and an operation method thereof to solve one or more technical problems existing in the prior art, and at least provide a beneficial choice or creation condition.

[0003] The technical solutions adopted to solve the above technical problems are as follows: The present invention provides a low-energy consumption coating machine vacuum pumping system, including: A coating vacuum chamber, provided with at least one vacuum pumping port and an inflation port, and the inflation port is provided with an inflation valve; A fine vacuum pump assembly, having a first intake end and a first exhaust end, the fine vacuum pump assembly includes at least one first molecular pump, and a high-pressure valve group for controlling on-off is connected between the first intake end and the vacuum pumping port; A rough vacuum pump assembly, having a second intake end and a second exhaust end, a rough vacuum valve group for controlling on-off is connected between the second intake end and the vacuum pumping port, and a pre-stage valve group for controlling on-off is connected between the second intake end and the first exhaust end; A maintenance pump assembly, having a third intake end and a fourth exhaust end, the maintenance pump assembly includes a second molecular pump and a maintenance pump body connected in sequence along the gas flow direction, and the third intake end communicates between the first exhaust end and the intake side of the pre-stage valve group.

[0004] The beneficial effects of the low-energy consumption coating machine vacuum pumping system of the present invention are: When the vacuum pumping system of the low-energy coating machine starts and runs, first open the rough pumping valve group, and use the preliminary pumping pump assembly to pump the coating vacuum chamber to make the internal vacuum degree of the coating vacuum chamber lower than the starting vacuum degree of the first molecular pump. At the same time, considering that the starting of the molecular pump requires set vacuum conditions and time, use the holding pump to pre-pump the first molecular pump and the second molecular pump to reach the starting vacuum degree of the first molecular pump and the second molecular pump, accelerate the starting time of the first molecular pump and the second molecular pump, and start the first molecular pump and the second molecular pump. When the internal vacuum degree of the coating vacuum chamber reaches the preset valve opening value of the high-pressure valve group, close the rough pumping valve group, open the fore-vacuum valve group and the high-pressure valve group. At this time, the preliminary pumping pump assembly and the second molecular pump are responsible for pumping to assist the exhaust of the first molecular pump, while the holding pump is responsible for accelerating the exhaust of the second molecular pump. The coating vacuum chamber is finely pumped to high vacuum by the first molecular pump. After the internal vacuum degree of the coating vacuum chamber reaches and stably maintains the set coating vacuum degree, close the fore-vacuum valve group and the preliminary pumping pump assembly, and keep the second molecular pump and the holding pump running. Under the high compression ratio pumping of the second molecular pump, to meet the exhaust volume of the first molecular pump under specific working conditions, so that the coating vacuum chamber stably maintains the vacuum degree required for work. The present invention completely adopts the exhaust assistance method of the holding pump + the second molecular pump to replace the traditional method of multiple traditional mechanical pumps, greatly saving electric energy consumption. When it is necessary to intermittently break the vacuum of the coating vacuum chamber, close the high-pressure valve group, and keep the first molecular pump, the second molecular pump and the holding pump running. When the coating vacuum chamber needs to re-establish the vacuum, open the rough pumping valve group, start the preliminary pumping pump assembly, perform rough pumping vacuum. After reaching the set vacuum degree, open the fore-vacuum valve group and the high-pressure valve group, close the rough pumping valve group, quickly pump the coating vacuum chamber to the vacuum degree required for work, and then close the fore-vacuum valve group and the preliminary pumping pump assembly.

[0005] As a further improvement of the above technical solution, a plurality of the first molecular pumps are provided, and the plurality of the first molecular pumps are connected in parallel between the first intake end and the first exhaust end.

[0006] As a further improvement of the above technical solution, the holding pump assembly further includes a holding valve connected between the second molecular pump and the holding pump body.

[0007] As a further improvement of the above technical solution, the preliminary pumping pump assembly includes a plurality of mechanical pumps, and the plurality of mechanical pumps are connected in parallel between the second intake end and the second exhaust end.

[0008] As a further improvement of the above technical solution, pre-pumping valves are respectively provided at the inlets of the plurality of mechanical pumps.

[0009] As a further improvement of the above technical solution, the preliminary pumping pump assembly further includes a Roots pump, and the Roots pump is connected between the second intake end and the inlets of the plurality of pre-pumping valves.

[0010] As a further improvement of the above technical solution, the preliminary evacuation pump assembly further includes a second vacuum sensor for detecting the vacuum degree between the roots pump and the plurality of mechanical pumps.

[0011] As a further improvement of the above technical solution, the fine evacuation pump assembly further includes a first vacuum sensor for detecting the vacuum degree between the outlet of the first molecular pump and the inlet of the second molecular pump.

[0012] As a further improvement of the above technical solution, the coating vacuum chamber is provided with a third vacuum sensor for detecting the internal vacuum degree of the coating vacuum chamber, and the evacuation port is provided with a throttle valve.

[0013] In addition, the present invention also proposes an operation method applicable to the evacuation system of the low-energy consumption coating machine. The operation method includes: Start the preliminary evacuation pump assembly and open the rough evacuation valve group to conduct rough evacuation of the coating vacuum chamber; Start the maintenance pump body to conduct preliminary evacuation of the first molecular pump and the second molecular pump; When the vacuum degrees inside the first molecular pump and the second molecular pump reach a first preset value, start the first molecular pump and the second molecular pump; When the vacuum degree inside the coating vacuum chamber reaches the preset valve opening value of the high-pressure valve group, close the rough evacuation valve group, open the fore-stage valve group and the high-pressure valve group, and conduct fine evacuation of the coating vacuum chamber; When the vacuum degree inside the coating vacuum chamber reaches a second preset value, close the fore-stage valve group and the preliminary evacuation pump assembly; When it is necessary to break the vacuum of the coating vacuum chamber, close the high-pressure valve group, open the inflation valve, and keep the first molecular pump, the second molecular pump and the maintenance pump body running; When the coating vacuum chamber has broken the vacuum and it is necessary to re-establish the vacuum, close the inflation valve, start the preliminary evacuation pump assembly, open the rough evacuation valve group, quickly evacuate the vacuum degree of the coating vacuum chamber to the preset valve opening value of the high-pressure valve group, then close the rough evacuation valve group, open the fore-stage valve group and the high-pressure valve group, and conduct fine evacuation of the coating vacuum chamber. When the vacuum degree inside the coating vacuum chamber reaches a second preset value, close the fore-stage valve group and the preliminary evacuation pump assembly.

[0014] Other features and advantages of the present invention will be described in the following specification, and will be partially obvious from the specification, or will be understood by implementing the present invention. Description of the Drawings

[0015] The following further describes the present invention in conjunction with the drawings and embodiments; Figure 1It is a schematic diagram of pipeline connection of a low - energy consumption coating machine vacuum pumping system provided by the present invention in one embodiment; Figure 2 It is a schematic structural diagram of a low - energy consumption coating machine vacuum pumping system provided by the present invention in one embodiment; Figure 3 It is a side view of a low - energy consumption coating machine vacuum pumping system provided by the present invention in one embodiment; Figure 4 It is a schematic flow diagram of an operation method provided by the present invention in one embodiment; Reference numerals in the drawings: Coating vacuum chamber 100; Vacuum pumping port 110; Throttle valve 111; Inflation port 120; Inflation valve 121; Third vacuum sensor 130; Fine - pumping pump assembly 200; First molecular pump 210; High - pressure valve group 220; First vacuum sensor 230; Pre - pumping pump assembly 300; Rough - pumping valve group 310; Front - stage valve group 320; Mechanical pump 330; Pre - pumping valve 340; Roots pump 350; Second vacuum sensor 360; Maintenance pump assembly 400; Second molecular pump 410; Maintenance pump body 420; Maintenance valve 430. Detailed implementation manners

[0016] The embodiments of the present invention will be described in detail below. Examples of the embodiments are shown in the drawings, where the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the drawings are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

[0017] In the description of the present invention, it should be understood that for the orientation description, such as up, down, etc., the orientation or positional relationship indicated is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention.

[0018] In the description of the present invention, "a plurality of" refers to more than two. If there is a description of the first and the second, it is only for the purpose of distinguishing technical features and should not be construed as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features or implicitly indicating the sequence of the indicated technical features.

[0019] In the description of the present invention, unless otherwise clearly defined, words such as "set", "installed", "connected", etc. should be understood in a broad sense. Those skilled in the art can reasonably determine the specific meanings of the above words in the present invention in combination with the specific content of the technical solution.

[0020] The technical solution of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the embodiments described below are some embodiments of the present invention, not all embodiments.

[0021] As Figure 1 、 Figure 2 and Figure 3 shown, the low-energy consumption coating machine vacuum pumping system of the present invention includes: a coating vacuum chamber 100, a fine vacuum pump assembly 200, a rough vacuum pump assembly 300, and a maintenance pump assembly 400.

[0022] Among them, the coating vacuum chamber 100 is provided with at least one vacuum pumping port 110 and an inflation port 120. The number of vacuum pumping ports 110 is determined according to the actual situation, and two or three can be set. The inflation port 120 is used to connect the outside to the inside of the coating vacuum chamber 100. The inflation port 120 is provided with an inflation valve 121, and the coating vacuum chamber 100 is broken into vacuum by opening the inflation valve 121.

[0023] The fine vacuum pump assembly 200 has a first intake end and a first exhaust end. The first intake end is responsible for intake, and the first exhaust end is responsible for exhaust. The fine vacuum pump assembly 200 includes at least one first molecular pump 210. The inlet of the first molecular pump 210 is connected to the first intake end, or the inlet of the first molecular pump 210 serves as the first intake end, and the outlet of the first molecular pump 210 is connected to the first exhaust end. The first intake end is connected to the vacuum pumping port 110, and a high-pressure valve group 220 for controlling on / off is connected between the first intake end and the vacuum pumping port 110. The high-pressure valve group 220 includes at least one high-pressure valve body, and the high-pressure valve body is installed at the inlet of the first molecular pump 210.

[0024] The rough vacuum pump assembly 300 has a second intake end and a second exhaust end. The functions of the second intake end and the second exhaust end are the same as those of the above-mentioned first intake end and first exhaust end. The second intake end is connected to the vacuum pumping port 110, and a rough vacuum valve group 310 for controlling on / off is connected between the second intake end and the vacuum pumping port 110. The second intake end is connected to the first exhaust end, and a pre-stage valve group 320 for controlling on / off is connected between the second intake end and the first exhaust end.

[0025] The maintenance pump assembly 400 of this embodiment has a third intake end and a fourth exhaust end. The functions of the third intake end and the fourth exhaust end are the same as those of the above-mentioned first intake end and first exhaust end. The maintenance pump assembly 400 of this embodiment includes a second molecular pump 410 and a maintenance pump body 420 connected in sequence along the gas flow direction. It can be understood that the inlet of the second molecular pump 410 is connected to the third intake end, and the outlet of the maintenance pump body 420 is connected to the fourth exhaust end. The third intake end is connected between the first exhaust end and the intake side of the pre-stage valve group 320.

[0026] Since the molecular pump rotates too fast, both the start-up and stop times of the molecular pump require a pre-set time. Moreover, the molecular pump needs to be started after the vacuum degree is lower than the set value. Specifically, the first molecular pump 210 and the second molecular pump 410 in this embodiment need to be started after the vacuum degree is lower than 1 Pa.

[0027] When the vacuum pumping system of the low-energy consumption coating machine starts to operate, first open the rough pumping valve group 310, and use the rough pumping pump assembly 300 to conduct rough vacuum pumping on the coating vacuum chamber 100, so that the internal vacuum degree of the coating vacuum chamber 100 is lower than the start-up vacuum degree of the first molecular pump 210. At the same time, considering that the start-up of the molecular pump requires set vacuum conditions and time, use the maintenance pump body 420 to conduct pre-vacuum pumping on the first molecular pump 210 and the second molecular pump 410 to reach the start-up vacuum degree of the first molecular pump 210 and the second molecular pump 410, accelerate the start-up time of the first molecular pump 210 and the second molecular pump 410, and start the first molecular pump 210 and the second molecular pump 410. When the internal vacuum degree of the coating vacuum chamber 100 reaches the preset valve opening value of the high-pressure valve group 220, close the rough pumping valve group 310, open the fore-vacuum valve group 320 and the high-pressure valve group 220. At this time, the rough pumping pump assembly 300 and the second molecular pump 410 are responsible for pumping to assist the exhaust of the first molecular pump 210, while the maintenance pump body 420 is responsible for pumping to assist the exhaust of the second molecular pump 410. Use the first molecular pump 210 to conduct fine vacuum pumping on the coating vacuum chamber 100 to make the internal vacuum degree of the coating vacuum chamber 100 reach and stably maintain at the set coating vacuum degree, then close the fore-vacuum valve group 320 and the rough pumping pump assembly 300, and keep the second molecular pump 410 and the maintenance pump body 420 running. Under the high compression ratio pumping of the second molecular pump 410, to meet the exhaust volume of the first molecular pump 210 under specific working conditions, so that the coating vacuum chamber 100 stably maintains the vacuum degree required for work.

[0028] The present invention completely adopts the exhaust assistance method of maintaining the pump body 420 + the second molecular pump 410 to replace the traditional method of multiple traditional mechanical pumps 330, greatly saving the electric energy consumption. When it is necessary to intermittently break the vacuum of the coating vacuum chamber 100, the high-pressure valve group 220 is closed, while the first molecular pump 210, the second molecular pump 410, and the maintaining pump body 420 keep running. When the coating vacuum chamber 100 needs to re-establish the vacuum, the roughing valve group 310 is opened, and the roughing pump assembly 300 is started to conduct roughing vacuum. After reaching the preset valve opening value of the high-pressure valve group 220, the roughing valve group 310 is closed, and the fore-vacuum valve group 320 and the high-pressure valve group 220 are opened. At this time, the roughing pump assembly 300 extracts the exhaust of the first molecular pump 210 to improve the pumping force of the vacuum pumping system. After quickly pumping the coating vacuum chamber 100 to the required vacuum degree for work, the fore-vacuum valve group 320 and the roughing pump assembly 300 are closed. Then, through the operation of the first molecular pump 210, the second molecular pump 410, and the maintaining pump body 420, the coating vacuum chamber 100 is accurately maintained at the set vacuum degree.

[0029] There are multiple first molecular pumps 210 in this embodiment. The multiple first molecular pumps 210 are connected in parallel between the first intake end and the first exhaust end. The multiple first molecular pumps 210 can increase the gas pumping volume to improve the control accuracy of the coating vacuum degree of the coating vacuum chamber 100.

[0030] The maintaining pump assembly 400 further includes a maintaining valve 430 connected between the second molecular pump 410 and the maintaining pump body 420. The maintaining valve 430 is used to control the on-off between the second molecular pump 410 and the maintaining pump body 420. When it is necessary to pump the vacuum or exhaust the second molecular pump 410, the maintaining valve 430 is opened.

[0031] Furthermore, the roughing pump assembly 300 in this embodiment includes multiple mechanical pumps 330. The multiple mechanical pumps 330 are connected in parallel between the second intake end and the second exhaust end. The pumping capacity of the roughing pump assembly 300 is improved through the multiple mechanical pumps 330.

[0032] The inlets of the multiple mechanical pumps 330 are respectively provided with roughing valves 340. When the mechanical pumps 330 are started, the corresponding roughing valves 340 are opened.

[0033] In order to further improve the vacuum pumping capacity and speed of the preliminary pumping component 300, the preliminary pumping component 300 further includes a Roots pump 350. The Roots pump 350 is connected between the second air inlet end and the inlets of multiple preliminary pumping valves 340. The Roots pump 350 can only be started after the vacuum degree is lower than the set value. In this embodiment, it is set that the Roots pump 350 needs to be started after the vacuum degree is lower than 500 Pa, while the mechanical pump 330 can be directly started in the atmospheric state. Therefore, during the startup of the preliminary pumping component 300, the mechanical pump 330 is started first to pump the vacuum of the coating vacuum chamber 100. When the vacuum degree between the mechanical pump 330 and the Roots pump 350 reaches the startup vacuum degree of the Roots pump 350, the Roots pump 350 is started to increase the air extraction rate.

[0034] Furthermore, the preliminary pumping component 300 of this embodiment further includes a second vacuum sensor 360. The second vacuum sensor 360 is used to detect the vacuum degree between the Roots pump 350 and multiple mechanical pumps 330, and the startup vacuum degree of the Roots pump 350 is detected and identified through the second vacuum sensor.

[0035] In addition, the fine pumping component 200 of this embodiment further includes a first vacuum sensor 230. The first vacuum sensor 230 is used to detect the vacuum degree between the outlet of the first molecular pump 210 and the inlet of the second molecular pump 410. In this embodiment, the startup vacuum degrees of the outlet of the first molecular pump 210 and the second molecular pump 410 are detected and identified through the first vacuum sensor 230.

[0036] The coating vacuum chamber 100 of this embodiment is provided with a third vacuum sensor 130 for detecting the internal vacuum degree of the coating vacuum chamber 100 to realize the detection of the vacuum degree of the coating vacuum chamber 100, and a throttle valve 111 is provided at the vacuum pumping port 110. The throttle valve 111 is mainly used to control the size of the air flow for pumping.

[0037] In addition, as Figure 4 shown, the present invention also proposes an operation method applicable to the vacuum pumping system of the low-energy consumption coating machine. The operation method includes the following steps: Step S100: Start the preliminary pumping component 300 and open the rough pumping valve group 310 to conduct rough vacuum pumping on the coating vacuum chamber 100; Step S200: Start the maintenance pump body 420 to conduct preliminary vacuum pumping on the first molecular pump 210 and the second molecular pump 410; Step S300: When the vacuum degrees inside the first molecular pump 210 and the second molecular pump 410 reach the first preset value, start the first molecular pump 210 and the second molecular pump 410; Step S400: When the vacuum degree inside the coating vacuum chamber 100 reaches the preset valve opening value of the high-pressure valve group 220, close the rough pumping valve group 310, open the pre-stage valve group 320 and the high-pressure valve group 220, and conduct fine vacuum pumping on the coating vacuum chamber 100; Step S500: After the vacuum degree inside the coating vacuum chamber 100 reaches the second preset value, close the foreline valve group 320 and the roughing pump assembly 300; Step S600: When it is necessary to break the vacuum of the coating vacuum chamber 100, close the high-pressure valve group 220, open the inflation valve 121, and keep the first molecular pump 210, the second molecular pump 410 and the maintenance pump body 420 running; Step S700: When the coating vacuum chamber 100 has broken the vacuum and needs to re-establish the vacuum, close the inflation valve 121, start the roughing pump assembly 300, open the roughing valve group 310, quickly pump the vacuum degree of the coating vacuum chamber 100 to the preset valve opening value of the high-pressure valve group 220, then close the roughing valve group 310, open the foreline valve group 320 and the high-pressure valve group 220, and conduct fine vacuum pumping on the coating vacuum chamber 100. After the vacuum degree inside the coating vacuum chamber 100 reaches the second preset value, close the foreline valve group 320 and the roughing pump assembly 300.

[0038] Among them, during the process of starting the roughing pump assembly 300, first start the mechanical pump 330 to pump the vacuum of the coating vacuum chamber 100. When the vacuum degree between the mechanical pump 330 and the roots pump 350 reaches the starting vacuum degree of the roots pump 350, the roots pump 350 starts to increase the pumping rate.

[0039] Among them, the first preset value is lower than the starting vacuum degree of the molecular pump, and the second preset value is the vacuum degree required for the coating process.

[0040] In the description of this specification, the descriptions with reference to the terms "one embodiment", "some embodiments", "schematic embodiments", "examples", "specific examples", or "some examples", etc. mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples.

[0041] The embodiments of the present invention have been described in detail above in conjunction with the accompanying drawings. However, the present invention is not limited to the above embodiments. Without departing from the spirit of the present invention, various changes can be made within the scope of knowledge possessed by those of ordinary skill in the art.

Claims

1. A vacuum pumping system for a low-energy coating machine, characterized in that: include: The coating vacuum chamber is provided with at least one vacuum port and an air filling port, and the air filling port is provided with an air filling valve; A fine pump assembly, having a first air inlet end and a first exhaust end, the fine pump assembly comprising at least one first molecular pump, a high-pressure valve group for controlling on and off being connected between the first air inlet end and the vacuum port; A pre-pump assembly, comprising a second air inlet end and a second air outlet end, a roughing valve group for controlling on-off is connected between the second air inlet end and the vacuum port, and a front-stage valve group for controlling on-off is connected between the second air inlet end and the first air outlet end; The maintenance pump assembly has a third air inlet end and a fourth air outlet end. The maintenance pump assembly includes a second molecular pump and a maintenance pump body connected in sequence along the gas flow direction. The third air inlet end is connected between the first air outlet end and the air inlet side of the front stage valve group.

2. The vacuum pumping system for a low-energy coating machine according to claim 1, characterized in that: A plurality of the first molecular pumps are provided, and the plurality of the first molecular pumps are connected in parallel to the first air inlet end and the first air outlet end.

3. The vacuum pumping system of the low energy consumption coating machine according to claim 1, characterized in that: The maintenance pump assembly further includes a maintenance valve connected between the second molecular pump and the maintenance pump body.

4. The vacuum pumping system for a low-energy coating machine according to claim 1, characterized in that: The pre-pump assembly includes a plurality of mechanical pumps, and the plurality of mechanical pumps are connected in parallel between the second air inlet end and the second air outlet end.

5. The vacuum pumping system for a low-energy coating machine according to claim 4, characterized in that: The inlets of the plurality of mechanical pumps are respectively provided with pre-pumping valves.

6. The vacuum pumping system for a low-energy coating machine according to claim 5, characterized in that: The pre-pump assembly further includes a Roots pump connected between the second air inlet end and the inlets of the plurality of pre-pump valves.

7. The vacuum pumping system for a low-energy coating machine according to claim 6, characterized in that: The pre-pump assembly further includes a second vacuum sensor, which is used to detect the vacuum degree between the Roots pump and the plurality of mechanical pumps.

8. The vacuum pumping system for a low-energy coating machine according to claim 1, characterized in that: The fine pump assembly further includes a first vacuum sensor, which is used to detect the vacuum degree between the outlet of the first molecular pump and the inlet of the second molecular pump.

9. The vacuum pumping system for a low-energy coating machine according to claim 1, characterized in that: The coating vacuum chamber is provided with a third vacuum sensor for detecting the vacuum degree inside the coating vacuum chamber, and the vacuum port is provided with a throttle valve.

10. An operating method, characterized in that: Applicable to the vacuum pumping system of the low-energy coating machine as claimed in any one of claims 1 to 9, the operating method comprises: Start the pre-pump assembly and open the rough pump valve group to roughly evacuate the coating vacuum chamber; Start the maintenance pump body to pre-evacuate the first molecular pump and the second molecular pump; When the vacuum degree inside the first molecular pump and the second molecular pump reaches a first preset value, the first molecular pump and the second molecular pump are started; When the vacuum degree inside the coating vacuum chamber reaches the preset opening value of the high-pressure valve group, the roughing valve group is closed, and the front valve group and the high-pressure valve group are opened to perform fine vacuuming on the coating vacuum chamber; When the vacuum degree inside the coating vacuum chamber reaches a second preset value, the front stage valve group and the pre-pump assembly are closed; When the coating vacuum chamber needs to be broken, the high-pressure valve group is closed, the charging valve is opened, and the first molecular pump, the second molecular pump and the pump body are kept running; When the vacuum in the coating vacuum chamber is broken and needs to be re-established, close the inflation valve, start the pre-pump assembly, open the roughing valve group, quickly pump the vacuum degree of the coating vacuum chamber to the preset opening value of the high-pressure valve group, then close the roughing valve group, open the front-stage valve group and the high-pressure valve group, and finely evacuate the coating vacuum chamber. When the vacuum degree inside the coating vacuum chamber reaches the second preset value, close the front-stage valve group and the pre-pump assembly.

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