Manual steering 21-item geometric error laser measurement system and method

Abstract

The invention provides a manual steering 21 geometric error laser measurement system and method, the system comprises a measurement unit, a light steering unit and a geometric error sensing unit, the light steering unit comprises a positioning device and a steering mirror, and the positioning device is used for positioning the steering mirror; the geometric error sensing unit comprises a first shell, a first connector, a second connector, a precise angle adjusting device, a coarse adjusting device and a fixing device; the measuring unit and the positioning device are respectively installed on a machine tool platform, and the geometric error sensing unit is installed beside a machine tool spindle through the first connector or the second connector, the precise angle adjusting device, the coarse adjusting device and the fixing device and does not rotate along with the machine tool spindle. The measuring unit and the geometric error sensing unit are mutually combined to measure X-axis, Y-axis and Z-axis six-degree-of-freedom errors and three-axis perpendicularity errors. According to the invention, the problems of high manufacturing difficulty, high cost, low measurement precision and the like of equipment adopted by an existing measurement system can be solved.

Description

Technical Field

[0001] This invention relates to the field of optical precision measurement technology, and more specifically, to a laser measurement system and method for manually steerable 21 geometric errors. Background Technology

[0002] Linear motion guides (linear axes) and rotary axes both have six degrees of freedom geometric motion errors during movement. Three-axis CNC machine tools / coordinate measuring machines have 21 geometric errors that need to be measured, while five-axis CNC machine tools have 42. The six degrees of freedom geometric errors refer to: in the XYZ coordinate system, taking the X-axis as an example, three linear errors: positioning error when moving along the X-axis; two-dimensional straightness errors in translation along the Y and Z axes; and three angular errors: roll angle, pitch angle, and yaw angle when rotating around the X, Y, and Z axes. The 21 geometric errors refer to: precision machining and measuring equipment such as CNC machine tools, machining centers, or coordinate measuring machines have three linear motion guides or linear motion tables, one of which has six degrees of freedom geometric errors, totaling 18 errors across the three axes; plus three perpendicularity errors between the three axes, totaling 3; therefore, there are 21 geometric errors.

[0003] For the measurement of CNC machine tool errors, the International Organization for Standardization has formulated a series of standards from ISO 230-1 to ISO 230-11. In addition to recommending simple tools and measuring instruments such as precision levels, right-angle rulers, straight edges, collimators, dial indicators, micrometers, high-precision spindles, multi-dimension dials, and autocollimators, the main recommended measuring instruments include: (1) Laser interferometer: used to measure the single-item errors of CNC machine tools, such as the errors of the five degrees of freedom of the linear axis (including position error, straightness error, pitch angle and yaw angle errors) and the perpendicularity error between the three axes; ISO 230-4 recommends the use of a laser interferometer. (1) Using volume measurement or diagonal measurement methods, individual errors are obtained through error identification; (2) Ball bar, plane grating, R-Test and other measuring instruments: the comprehensive error of CNC machine tools is obtained by using the trajectory method of circular motion, and various individual errors are obtained through analysis and identification; (3) ETVE spindle analyzer: mainly composed of high-precision non-contact sensors, temperature sensors, spindles and data acquisition systems, used to measure the spindle rotation error and thermal error of CNC machine tools; (4) Standard parts testing: using contact probes to test some standard workpieces; (5) Laser tracker: directly measuring the spatial error of CNC machine tools. Therefore, due to the wide variety of instruments, long measurement cycle and low measurement efficiency, the comprehensive measurement and compensation of CNC machine tool errors cannot be truly implemented.

[0004] The existing 21-item geometric error laser measurement system uses a linear guide rail and a rotary table for moving or rotating steering mirrors in its beam steering unit. This equipment is expensive and increases the cost of the instrument. The geometric error sensitive unit includes three mutually perpendicular six-degree-of-freedom error sensitive components, which are large in size, expensive to manufacture, and difficult to manufacture. In addition, in the six-degree-of-freedom error measurement for each axis, the roll angle is measured using the principle of double parallel beams. The parallelism of the double beams has a significant impact on the measurement results because parallelism is difficult to guarantee in actual manufacturing. As the distance between the measurement unit and the geometric error sensitive unit increases, the roll angle measurement accuracy will decrease.

[0005] To address the aforementioned problems, the present invention urgently needs to provide a laser measurement system and method for 21 geometric errors in manual steering. Summary of the Invention

[0006] In view of the above problems, the purpose of this invention is to provide a laser measurement system and method for 21 geometric errors in manual steering, so as to solve the problems of high equipment manufacturing difficulty and high cost and low measurement accuracy of existing geometric error laser measurement systems.

[0007] On one hand, the present invention provides a laser measurement system for 21 geometric errors in manual steering, comprising: a measurement unit, a beam steering unit, and a geometric error sensing unit, wherein,

[0008] The light-directing unit includes: a positioning device placed in the direction of the emitted light from the measuring unit, and a steering mirror for directing the emitted light from the measuring unit, wherein the positioning device is used to position the steering mirror.

[0009] The geometric error sensitive unit includes: a first housing, a first connector and a second connector disposed on the outer surface of the first housing, a precision angle adjustment device connected to the first connector or the second connector, a coarse adjustment device connected to the precision angle adjuster, and a fixing device connected to the coarse adjustment device;

[0010] The measuring unit and the positioning device are respectively installed on the machine tool platform. The geometric error sensitive unit is installed next to the machine tool spindle and in a position that does not rotate with the machine tool spindle through the first connector or the second connector, the precision angle adjustment device, the coarse adjustment device, and the fixing device. The measuring unit and the geometric error sensitive unit are combined to measure the six degrees of freedom error of the XYZ axes and the three-axis perpendicularity error.

[0011] One option is that the light-directing unit further includes a second housing for placing the steering mirror, wherein a positioning component is provided on the positioning device, and the steering mirror is mounted on the positioning component through the second housing;

[0012] When measuring the six degrees of freedom error of the X-axis, the steering mirror is located outside the optical path of the outgoing light of the measuring unit, and the outgoing light is emitted along the X-axis direction;

[0013] When measuring the six degrees of freedom error of the Y-axis, the steering mirror is placed on the positioning device, and the emitted light rays are emitted along the Y-axis direction after passing through the steering mirror;

[0014] When measuring the six degrees of freedom error of the Z-axis, the steering mirror is placed on the positioning device after being rotated, and the emitted light rays are emitted along the Z-axis direction after passing through the steering mirror.

[0015] The steering mirror is one of a pentagonal prism, a hollow pentagonal prism, or a pair of mirrors that form the reflecting surface of a pentagonal prism.

[0016] The positioning component is one of a positioning slot, a positioning post group, or a universal positioning device.

[0017] One option is that, when measuring the six degrees of freedom error of the X-axis and Y-axis, the geometric error sensitive unit is mounted on the precision angle adjustment device via the first connector;

[0018] When measuring the Z-axis six-degree-of-freedom error, the geometric error sensitive unit is mounted on the precision angle adjustment device via the second connector;

[0019] The fixing device is installed next to the machine tool spindle and in a position that does not rotate with the machine tool spindle;

[0020] The coarse adjustment device is used to adjust the position and orientation of the first housing so that the geometric error sensitive unit receives the emitted light and reflects the emitted light back to the measurement unit.

[0021] The precision angle adjustment device is used to precisely adjust the angle of the first housing so that before the measurement begins, the emitted light returns to the effective measurement range of the photodetector of the measurement unit.

[0022] One option is that the coarse adjustment device includes a rotating component that rotates along the one-dimensional moving component and around the moving direction of the one-dimensional moving component.

[0023] One option is that when the coarse adjustment device is a universal adjustment frame, the position and orientation of the first housing are changed by adjusting the universal adjustment frame to realize the measurement of the six degrees of freedom error along the X-axis, Y-axis and Z-axis respectively. The geometric error sensitive unit receives the emitted light and reflects the emitted light back to the measurement unit.

[0024] On the other hand, the present invention also provides a laser measurement method for 21 geometric errors in manual steering, characterized in that the above-mentioned laser measurement system for 21 geometric errors in manual steering is used to measure the six degrees of freedom geometric errors of the machine tool to be measured along the X-axis, and the method includes:

[0025] The measuring unit is mounted on the machine tool platform via a two-dimensional straightness and two-dimensional angle adjustment device, and the positioning device of the light beam turning unit is mounted on the machine tool platform;

[0026] The geometric error sensitive unit is mounted on the precision angle adjustment device via the first connector, the precision angle adjustment device is mounted on the coarse adjustment device, the coarse adjustment device is mounted on the fixing device, and the fixing device is mounted next to the machine tool spindle and in a position that does not rotate with the machine tool spindle;

[0027] Adjust the two-dimensional straightness and the two-dimensional angle of the two-dimensional angle adjustment device so that the emitted light rays from the measuring unit are parallel to the X-axis direction;

[0028] Adjust the two-dimensional straightness and the two-dimensional angle adjustment device, as well as the coarse adjustment device, so that the geometric error sensitive unit receives the emitted light and reflects the emitted light back to the measurement unit;

[0029] Adjust the precision angle adjustment device so that before the measurement begins, the emitted light returns to the effective measurement range of the photodetector in the measurement unit;

[0030] The machine tool spindle drives the geometric error sensing unit to move along the X-axis, so that the geometric error sensing unit receives the emitted light and reflects the emitted light back to the measuring unit;

[0031] The X-axis six-degree-of-freedom error is measured by the measurement unit and the geometric error sensing unit based on the received light.

[0032] On the other hand, the present invention also provides a laser measurement method for 21 geometric errors in manual steering, which uses the above-mentioned laser measurement system for 21 geometric errors in manual steering to measure the six degrees of freedom geometric errors of the machine tool to be measured along the Y-axis. The method includes:

[0033] The measuring unit is mounted on the machine tool platform via a two-dimensional straightness and two-dimensional angle adjustment device, and the positioning device of the light beam turning unit is mounted on the machine tool platform;

[0034] Place the steering mirror on the positioning device;

[0035] The geometric error sensitive unit is mounted on the precision angle adjustment device via the first connector, the precision angle adjustment device is mounted on the coarse adjustment device, the coarse adjustment device is mounted on the fixing device, and the fixing device is mounted next to the machine tool spindle and in a position that does not rotate with the machine tool spindle.

[0036] The outgoing light emitted by the measuring unit is redirected by the redirecting mirror, so that the redirected light is emitted along the Y-axis.

[0037] The coarse adjustment device drives the geometric error sensitive unit to rotate 90° around the Z-axis, so that the geometric error sensitive unit receives the emitted light and reflects the emitted light back to the measurement unit;

[0038] Adjust the precision angle adjustment device so that the emitted light returns to the effective measurement range of the photodetector of the measurement unit before the measurement begins;

[0039] The machine tool spindle drives the geometric error sensing unit to move along the Y-axis, so that the geometric error sensing unit receives the emitted light and reflects the emitted light back to the measuring unit;

[0040] The Y-axis six-degree-of-freedom error is measured by the measurement unit and the geometric error sensing unit based on the received light.

[0041] On the other hand, the present invention also provides a laser measurement method for 21 geometric errors in manual steering, which uses the above-mentioned laser measurement system for 21 geometric errors in manual steering to measure the six degrees of freedom geometric errors of the machine tool to be measured along the Z-axis. The method includes:

[0042] The measuring unit is mounted on the machine tool platform via a two-dimensional straightness and two-dimensional angle adjustment device, and the positioning device of the light beam turning unit is mounted on the machine tool platform;

[0043] The steering mirror is rotated 90° and then placed on the positioning device;

[0044] The geometric error sensitive unit is mounted on the precision angle adjustment device via a second connector, the precision angle adjustment device is mounted on the coarse adjustment device, the coarse adjustment device is mounted on the fixing device, and the fixing device is mounted next to the machine tool spindle and in a position that does not rotate with the machine tool spindle.

[0045] The outgoing light emitted by the measuring unit is redirected by the steering mirror, so that the redirected light is emitted along the Z-axis.

[0046] Adjust the coarse adjustment device so that the geometric error sensitive unit receives the emitted light and reflects the emitted light back to the measurement unit;

[0047] Adjust the precision angle adjustment device so that the emitted light returns to the effective measurement range of the photodetector of the measurement unit before the measurement begins;

[0048] The machine tool spindle drives the geometric error sensing unit to move along the Z-axis, so that the geometric error sensing unit receives the emitted light and reflects the emitted light back to the measuring unit;

[0049] The measurement unit and the geometric error sensing unit perform Z-axis six-degree-of-freedom error measurement based on the received light.

[0050] On the other hand, the present invention provides a laser measurement method for 21 geometric errors in manual steering, which uses the aforementioned laser measurement system for 21 geometric errors in manual steering to measure the six degrees of freedom geometric errors of the machine tool to be measured along the Z-axis. The method includes:

[0051] The measuring unit is mounted on the machine tool platform via a two-dimensional straightness and two-dimensional angle adjustment device, and the positioning device of the light beam turning unit is mounted on the machine tool platform;

[0052] The steering mirror is rotated 90° and then placed on the positioning device;

[0053] The geometric error sensitive unit is mounted on the precision angle adjustment device via the first connector, the precision angle adjustment device is mounted on the coarse adjustment device, the coarse adjustment device is mounted on the fixing device, and the fixing device is mounted next to the machine tool spindle and in a position that does not rotate with the main spindle.

[0054] The outgoing light emitted by the measuring unit is redirected by the steering mirror, so that the redirected light is emitted along the Z-axis.

[0055] Adjust the coarse adjustment device so that the geometric error sensitive unit receives the emitted light and reflects the emitted light back to the measurement unit;

[0056] Adjust the precision angle adjustment device so that the emitted light returns to the effective measurement range of the photodetector of the measurement unit before the measurement begins;

[0057] The machine tool spindle drives the geometric error sensing unit to move along the Z-axis, so that the geometric error sensing unit receives the emitted light and reflects the emitted light back to the measuring unit;

[0058] The measurement unit and the geometric error sensing unit perform Z-axis six-degree-of-freedom error measurement based on the received light.

[0059] On the other hand, the present invention also provides a laser measurement method for 21 geometric errors of manual steering. The above-mentioned laser measurement system for 21 geometric errors of manual steering is used to measure the six degrees of freedom geometric errors of the machine tool to be measured along the X-axis, Z-axis and Z-axis respectively, and the X-axis six degrees of freedom error, Y-axis six degrees of freedom error and Z-axis six degrees of freedom error are measured respectively.

[0060] Based on the measured six-degree-of-freedom errors of the X-axis, Y-axis, and Z-axis, the perpendicularity errors between the three axes are calculated, achieving 21 geometric error measurements.

[0061] As can be seen from the above technical solution, the 21-item geometric error laser measurement system and method for manual steering provided by the present invention achieves light conversion by using a steering mirror in the light steering unit; achieves rapid positioning of the steering mirror during Y-axis and Z-axis measurements by using a positioning device; and achieves connection between the geometric error sensitive unit and the machine tool spindle by setting a first connector and a second connector, a precision angle adjustment device connected to the first connector or the second connector, a coarse adjustment device connected to the precision angle adjuster, and a fixing device connected to the coarse adjustment device on the outer surface of the geometric error sensitive unit. When measuring the six degrees of freedom errors of the X-axis and Y-axis, the geometric error sensitive unit is installed next to the machine tool spindle and at a position that does not rotate with the machine tool spindle through the first connector, the precision angle adjustment device, the coarse adjustment device, and the fixing device. When moving from measuring the X-axis to measuring the Y-axis, the machine tool spindle rotates 90° around the Z-axis, which drives the entire geometric error sensitive unit to rotate 90° around the Z-axis. The light emitted from the measurement unit along the Y-axis direction through the light steering unit is incident on the geometric error sensitive unit, thereby achieving the measurement of the six degrees of freedom errors of the Y-axis. When measuring the Z-axis, the geometric error sensitive unit is installed next to the machine tool spindle but not rotating with it via a second connector, a precision angle adjustment device, a coarse adjustment device, and a fixing device. In this invention, by setting a positioning device for rapid positioning of the steering mirror and by setting a connecting component, a precision angle adjustment device, a coarse adjustment device, and a fixing device for connecting the machine tool spindle and the geometric error sensitive unit, the six degrees of freedom error measurement is completed, thereby solving the problems of high equipment manufacturing difficulty, high cost, and low measurement accuracy in existing measurement systems.

[0062] To achieve the foregoing and related objectives, one or more aspects of the invention include the features that will be described in detail below. The following description and accompanying drawings illustrate certain exemplary aspects of the invention. However, these aspects indicate only a few of the various ways in which the principles of the invention can be used. Furthermore, the invention is intended to encompass all such aspects and their equivalents. Attached Figure Description

[0063] Other objects and results of the invention will become more apparent and readily understood with reference to the following description taken in conjunction with the accompanying drawings. In the drawings:

[0064] Figure 1 This is a schematic diagram of a dual-frequency laser transmission-type X-axis six-degree-of-freedom geometric error laser measurement system according to an embodiment of the present invention;

[0065] Figure 2 This is a schematic diagram of a Y-axis six-degree-of-freedom geometric error laser measurement system based on a dual-frequency laser transmission according to an embodiment of the present invention;

[0066] Figure 3 This is a schematic diagram of a dual-frequency laser reflection-based X-axis six-degree-of-freedom geometric error laser measurement system according to an embodiment of the present invention.

[0067] Figure 4 This is a schematic diagram of a single-frequency laser transmission-type X-axis six-degree-of-freedom geometric error laser measurement system according to an embodiment of the present invention;

[0068] Figure 5 This is a schematic diagram of the X-axis six-degree-of-freedom geometric error laser measurement system based on single-frequency laser reflection according to an embodiment of the present invention;

[0069] Figure 6 and Figure 7 These are schematic diagrams of a light-directing unit according to an embodiment of the present invention;

[0070] Figure 8 This is a schematic diagram of a geometric error sensitive unit according to an embodiment of the present invention;

[0071] Figure 9 This is a schematic diagram of the X-axis measurement state according to an embodiment of the present invention;

[0072] Figure 10 This is a schematic diagram of the Y-axis measurement state according to an embodiment of the present invention;

[0073] Figure 11 This is a schematic diagram of the Z-axis measurement state according to an embodiment of the present invention;

[0074] Figure 12 This is a schematic diagram of the X-axis rotation measurement state of the coarse adjustment device according to an embodiment of the present invention;

[0075] Figure 13 This is a schematic diagram of the coarse adjustment device rotating the Y-axis to measure the state according to an embodiment of the present invention;

[0076] Figure 14 This is a schematic diagram of the Z-axis rotation measurement state of the coarse adjustment device according to an embodiment of the present invention;

[0077] Figure 15 This is a schematic diagram of the installation structure of the measuring unit according to an embodiment of the present invention;

[0078] Figure 16 , Figure 17 , Figure 18 These are schematic flowcharts of the laser measurement method for 21 geometric errors in manual steering according to embodiments of the present invention.

[0079] The reference numerals in the figures include:

[0080] I. Measurement unit; II. Geometric error sensitive unit; III. Ray guide unit;

[0081] 1. Single-frequency laser; 2. First polarizing beam splitter; 3. Fixed corner cube prism; 6. First polarizer; 7. First unpolarized beam splitter; 8. First λ / 2 waveplate; 9. Focusing lens; 10. Beam splitter; 11. Moving reflector; 12. Second polarizing beam splitter; 13. Third λ / 4 waveplate; 14. Dual-frequency laser; 15. Third unpolarized beam splitter; 16. Second polarizer; 17. Second photodetector; 18. Fourth photodetector; 19. Fifth photodetector; 20. Sixth photodetector; 21. Seventh photodetector; 22. Beam splitter; 23. Dual-frequency interference. Length measuring module, 232, Single-frequency interferometric length measuring module, 24, First connector, 25, Second connector, 26, First housing, 27, Third photodetector, 28, Pentagonal prism, 29, Positioning device, 30, Second housing, 31, First photodetector, 32, First positioning post, 33, Second positioning post, 34, Third positioning post, 35, Fourth positioning post, 36, Fixing device, 37, Coarse adjustment device, 371, One-dimensional moving component, 372, Rotating component, 38, Precision scheduling and adjustment device, 39, Two-dimensional straightness and two-dimensional angle adjustment device, 40, Machine tool platform.

[0082] In all the accompanying drawings, the same reference numerals indicate similar or corresponding features or functions. Detailed Implementation

[0083] In the following description, numerous specific details are set forth for illustrative purposes and to provide a thorough understanding of one or more embodiments. However, it will be apparent that these embodiments may also be implemented without these specific details. In other instances, well-known structures and devices are shown in block diagram form for ease of description of one or more embodiments.

[0084] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0085] In view of the aforementioned problems of high equipment manufacturing difficulty, high cost, and low measurement accuracy in existing geometric error laser measurement systems, this invention provides a manual steering 21-item geometric error laser measurement system and method.

[0086] The specific embodiments of the present invention will now be described in detail with reference to the accompanying drawings.

[0087] To illustrate the structure of the laser measurement system for 21 geometric errors in manual steering provided by this invention, Figures 1 to 14 The structure of a laser measurement system for 21 geometric errors in manual steering is illustrated exemplarily from different perspectives. Specifically, Figure 1 The structure of a transmission-type X-axis six-degree-of-freedom geometric error laser measurement system based on a dual-frequency laser, according to an embodiment of the present invention, is shown. Figure 2 The structure of a Y-axis six-degree-of-freedom geometric error laser measurement system based on a dual-frequency laser transmission according to an embodiment of the present invention is shown; Figure 3 The structure of a six-degree-of-freedom geometric error laser measurement system based on a dual-frequency laser reflection according to an embodiment of the present invention is shown. Figure 4 The structure of a single-frequency laser transmission-type X-axis six-degree-of-freedom geometric error laser measurement system based on an embodiment of the present invention is shown; Figure 5 The structure of a six-degree-of-freedom geometric error laser measurement system based on a single-frequency laser reflection according to an embodiment of the present invention is shown. Figure 6 and Figure 7 The light steering units according to embodiments of the present invention are shown respectively; Figure 8 A geometric error sensitive unit according to an embodiment of the present invention is shown; Figure 9 The X-axis measurement state according to an embodiment of the present invention is shown; Figure 10 The Y-axis measurement state according to an embodiment of the present invention is shown; Figure 11 The Z-axis measurement state according to an embodiment of the present invention is shown; Figure 12 The X-axis rotation measurement state of the coarse adjustment device according to an embodiment of the present invention is shown; Figure 12The measurement state of the coarse adjustment device rotating the Y-axis according to an embodiment of the present invention is shown; Figure 14 The Z-axis rotation measurement state of the coarse adjustment device according to an embodiment of the present invention is shown; Figure 15 A measurement unit mounting structure according to an embodiment of the present invention is shown.

[0088] like Figures 1 to 15 As shown in the figure, the 21-item geometric error laser measurement system for manual steering provided by the present invention includes: a measurement unit I, a light steering unit III, and a geometric error sensitive unit II. The light steering unit III includes: a positioning device 29 placed in the direction of the emitted light from the measurement unit I, and a pentagonal prism 28 for steering the emitted light from the measurement unit I, wherein the positioning device 29 is used to position the pentagonal prism 28. The geometric error sensitive unit II includes: a first housing 26, a second polarizing beam splitter 12 disposed inside the first housing 26, a beam splitter 10, a movable reflector 11, and two photodetectors, and a first connector 24 and a second connector 25 disposed on the outer surface of the first housing 26. The system includes a precision angle adjustment device 38 connected to the first connector 24 or the second connector 25, a coarse adjustment device 37 connected to the precision angle adjuster 38, and a fixing device 36 connected to the coarse adjustment device 37. The measuring unit I and the positioning device 29 are respectively installed on the machine tool platform. The geometric error sensitive unit II is installed next to the machine tool spindle but not rotating with the machine tool spindle via the first connector 24 or the second connector 25, the precision angle adjustment device 38, the coarse adjustment device 37, and the fixing device 36. The measuring unit I and the geometric error sensitive unit II combine to measure the six degrees of freedom errors of the X, Y, and Z axes, calculate the perpendicularity errors between the three axes, and realize 21 geometric error measurements.

[0089] In an embodiment of the present invention, a precision angle adjustment device 38 is mounted on the coarse adjustment device 37, the coarse adjustment device 37 is mounted on a fixing device 36, and the fixing device 36 is mounted next to the machine tool spindle and at a position that does not rotate with the machine tool spindle; wherein, the coarse adjustment device 37 includes a one-dimensional moving component 371 and a rotating component 372 that rotates about the moving direction of the one-dimensional moving component 371. The coarse adjustment device 37 is used to adjust the position and attitude of the first housing 29, so that the geometric error sensitive unit receives the emitted light and reflects the emitted light back to the measuring unit; the precision angle adjustment device 38 is used to precisely adjust the angle of the first housing 29, so that before the measurement begins, the emitted light returns to the effective measurement range of the photodetector of the measuring unit.

[0090] exist Figures 12 to 14In the illustrated embodiment, the two ends of the coarse adjustment device 37 are respectively connected to the fixing device 36 and the precision scheduling and adjustment device 38. The fixing device 36 is connected to the one-dimensional moving component 371 of the coarse adjustment device 37, and the precision scheduling and adjustment device 38 is connected to the moving component 372 of the coarse adjustment device 37. Figure 14 In the embodiment shown, the measuring unit is mounted on the machine tool platform 40 via a two-dimensional straightness and two-dimensional angle adjustment device 39.

[0091] In an embodiment of the present invention, a geometric adjustment component is added between the first / second connector and the spindle. This component is one of a three-dimensional adjustment frame, a five-dimensional adjustment frame, or a universal adjustment frame. When the coarse adjustment device is a universal adjustment frame, one of the first or second connectors can be omitted, and the position and orientation of the first housing can be changed only by adjusting the universal adjustment frame. When measuring the six degrees of freedom errors along the X, Y, and Z axes, the geometric error sensitive unit receives the emitted light rays and reflects them back to the measuring unit.

[0092] Among them, Figure 6 In the embodiment shown, the light-directing unit further includes a second housing 30 for placing the pentagonal prism 29. The second housing 30 is a cubic housing with a cutout on its surface that exposes the pentagonal prism 29. A positioning component is provided on the positioning device 29, and the pentagonal prism 29 is mounted on the positioning component via the second housing 30. Therefore, during Y-axis and Z-axis measurements, the positioning component of the positioning device 29 enables rapid positioning of the pentagonal prism 28.

[0093] Figure 7 In the illustrated embodiment, four positioning posts replace the positioning slots. The line connecting the first positioning post 32 and the second positioning post 33, and perpendicular to the line connecting the third positioning post 34 and the fourth positioning post 35, allows for rapid positioning of the pentagonal prism 28. In practical applications, any three of the four positioning posts can be used to achieve rapid positioning of the pentagonal prism 28. In this embodiment, the positioning component is one of a positioning slot, a group of positioning posts, or a universal positioning device. In practical applications, the appropriate structure of the positioning component is selected based on actual needs.

[0094] In the measurement of the X-axis six-degree-of-freedom error, the pentagonal prism 28 is positioned outside the optical path of the emitted light from the measuring unit, and the emitted light is emitted along the X-axis. In the measurement of the Y-axis six-degree-of-freedom error, the pentagonal prism 28 is placed on the positioning device 29, and the emitted light, after passing through the pentagonal prism 28, is emitted along the Y-axis. In the measurement of the Z-axis six-degree-of-freedom error, the pentagonal prism 28 is rotated and placed on the positioning device 29, and the emitted light, after passing through the pentagonal prism 28, is emitted along the Z-axis. In specific applications, depending on the actual situation, the turning mirror 28 can be a pentagonal prism, a hollow pentagonal prism, or a pair of mirrors forming the reflecting surface of a pentagonal prism.

[0095] exist Figure 8 In the illustrated embodiment, a first connector 24 and a second connector 25 are provided on the outer surface of the first housing 26. When measuring the six degrees of freedom error of the X and Y axes, the geometric error sensing unit is mounted next to the machine tool spindle but not rotating with it, via the first connector 24, precision angle adjustment device 38, coarse adjustment device 37, and fixing device 36. When moving from measuring the X-axis to measuring the Y-axis, the spindle rotates 90° around the Z-axis, causing the entire geometric error sensing unit to rotate 90° around the Z-axis. The light emitted from the measuring unit, after passing through the light-directing unit along the Y-axis, is incident on the geometric error sensing unit, thus achieving six degrees of freedom error sensing of the Y-axis. When measuring the six degrees of freedom error of the Z-axis, the geometric error sensing unit is mounted next to the machine tool spindle but not rotating with it, via the second connector 25, precision angle adjustment device 38, coarse adjustment device 37, and fixing device 36.

[0096] In an embodiment of the present invention, the measurement unit includes a laser emission module, a beam splitter 22, a fixed reflector 3, a λ / 4 waveplate 13, a first photodetector 31 for receiving the split beam L111″, a fifth photodetector 19 for receiving the combined beam L3 after interference, and a second photodetector 17 for receiving the split beam L112 focused by the focusing lens 9.

[0097] The laser emission module generates an outgoing beam L1; the first polarizing beam splitter 2 splits the outgoing beam L1; the beam splitter 22 further splits the split beam L12 from the first polarizing beam splitter 2; the movable reflector 3 back-reflects the interference reference beam L121 transmitted or reflected by the beam splitter 22; and the λ / 4 waveplate 13 changes the polarization state of the split beam L11 from the first polarizing beam splitter 2. Figure 3 , Figure 5 In the illustrated embodiment, the movable reflector 3 is used to back-reflect the interference reference light L121 transmitted from the beam splitter 22; in Figure 1 , Figure 2 and Figure 4 In the illustrated embodiment, the movable reflector 3 is used to back-reflect the interference reference light L121 reflected by the beam splitter 22. The first photodetector 31 is used to measure the linearity error of the geometric error sensitive unit along the Y-axis and Z-axis; the fifth photodetector 19 is used in conjunction with the interferometric length measurement module to measure the positioning error of the geometric error sensitive unit along the X-axis; and the second photodetector 17 is used to measure the angular error of the geometric error sensitive unit rotating around the Y-axis and Z-axis.

[0098] In an embodiment of the present invention, the fixed reflector 23 is any one of a corner prism, a cat's eye mirror, a cube rear reflector composed of three mutually perpendicular reflective surfaces, a right-angle prism, and a reflector group composed of two plane mirrors, and the movable reflector is any one of a corner prism, a cat's eye mirror, and a cube rear reflector composed of three mutually perpendicular reflective surfaces.

[0099] In this invention, the specific functions of the second polarizing beam splitter 12, the semi-transparent mirror 10, the movable corner cube prism 11, and the two photodetectors disposed inside the first housing 26 of the geometric error sensitive unit II are as follows: The two photodetectors of the geometric error sensitive unit are the sixth photodetector 20 and the seventh photodetector 21; the second polarizing beam splitter 12 is used to further split the beam L122 separated by the beam splitter reflection of the split beam L12; the semi-transparent mirror 10 is used to reflect and transmit the split beam L11 after passing through the λ / 4 waveplate; the movable corner cube prism 11 is used to reflect and transmit the split beam L11 after being transmitted by the semi-transparent mirror 10. The beam L111 undergoes back reflection; the sixth photodetector 20 and the seventh photodetector 21 are used to receive the two measurement beams of the beam splitter L122, which are split by the second polarizing beam splitter 12, respectively; wherein, the beam splitter L111 is back reflected by the moving corner prism 11 and then re-split by the first polarizing beam splitter 2 into the interferometric measurement beam L111′ and the beam splitter L111″; the beam splitter L11 is reflected by the semi-transparent mirror 10 to become the beam splitter L112; the interference reference beam L121 is back reflected by the fixed corner prism 11 and then forms a combined beam L3 with the interferometric measurement beam L111′; the combined beam L3 interferes after passing through the first polarizer 6.

[0100] In the geometric error sensitive unit, the sixth photodetector 20 and the seventh photodetector 21 are preferably light intensity detectors used to measure the angular error of the geometric error sensitive unit's rotation around the X-axis. Specifically, the individual reflected light L122 is directed as an independent beam to the geometric error sensitive unit II. After being split by the second polarizing beam splitter 12, it is received by two light intensity detectors to achieve roll angle measurement. The second polarizing beam splitter 12 acts as the sensitive element for the roll angle. When the entire geometric error sensitive unit II has a roll angle, the first polarizing beam splitter 2 rotates accordingly, changing the polarization state of the passing measurement light L122, causing a change in the light intensity on the two light intensity detectors. The roll angle is calculated by using the change in light intensity.

[0101] In embodiments of the present invention, the laser emission module can be either a dual-frequency laser 14 or a single-frequency laser 1. The installation position of the interferometric length measurement module differs depending on whether a dual-frequency or single-frequency laser is used. The optical paths of different lasers also differ.

[0102] exist Figures 1 to 3 In the illustrated embodiment, the laser emission module is a dual-frequency laser 14; the interferometric length measurement module is a dual-frequency interferometric length measurement module 231, which is disposed between the laser emission module and the first polarizing beam splitter 2. The dual-frequency interferometric length measurement module 231 includes: a third unpolarized beam splitter 15, a second polarizer 16, and a fourth photodetector 18. The third unpolarized beam splitter 15 is used to split the emitted light L1 into a laser L2; the second polarizer 16 is used to cause interference of the laser L2; and the fourth photodetector 18 is used to receive the interference spot formed after the laser L2 passes through the second polarizer 16.

[0103] In a preferred embodiment of the present invention, the first photodetector, the second photodetector, and the third photodetector are all selected from QD, PSD, CCD, and CMOS; and / or, the fourth photodetector is selected from QD, PSD, CCD, CMOS, and pin. The sixth photodetector 20 and the seventh photodetector 21 are both selected from QD, PSD, CCD, CMOS, and pin; and / or, the fifth photodetector is selected from QD, PSD, CCD, and CMOS. In the embodiments of the present invention, the selection of each photodetector and the laser is appropriate according to the specific application and is not specifically limited here.

[0104] exist Figure 4 and Figure 5In the illustrated embodiment, the laser emission module is a single-frequency laser 1; the interferometric length measurement module is a single-frequency interferometric length measurement module 232 disposed between the first polarizing beam splitter 2 and the fifth photodetector 19. The single-frequency interferometric length measurement module 232 includes: a second unpolarized beam splitter 7, a first λ / 2 waveplate 8, and a third photodetector 27. The second unpolarized beam splitter 7 is used to split the combined beam L3 into transmitted light L31 and reflected light L32; the first λ / 2 waveplate 8 is used to delay the reflected light L32 by 90°; and the third photodetector 27 is used to receive the interference spot light formed by the reflected light L32 after passing through the first λ / 2 waveplate.

[0105] In an embodiment of the present invention, using the second polarizing beam splitter as a reference, the measurement light L11 is divided into transmission and reflection structures, such as... Figure 1 As shown, in the optical path of the transmission structure, the transmitted light from the second polarizing beam splitter 12 is the measurement light L11, measuring the error of 5 degrees of freedom. The light L12 reflected by the second polarizing beam splitter is the light L122 reflected by the unpolarizing beam splitter, measuring the roll angle. Figure 3 As shown, in the optical path of the reflective structure, the reflected light from the second polarizing beam splitter 12 is the measurement light L11, used to measure the 5-degree-of-freedom error. The transmitted light L12 from the second polarizing beam splitter and the reflected light L122 from the non-polarizing beam splitter are used to measure the roll angle.

[0106] As a preferred embodiment of the present invention, the second polarizing beam splitter 12 can be any one of a cubic polarizing beam splitter, a Lochte polarizer, or a Glan polarizing prism. However, the placement of the two light intensity detectors will differ for different polarizing beam splitters, which will not be described in detail here.

[0107] Furthermore, in embodiments of the present invention, the semi-transparent and semi-reflective mirror 10 can be replaced by a surface-coated semi-transparent and semi-reflective film, or by a beam splitter or beam splitter film with other beam splitting ratios. The focusing lens 9 can also be replaced by a focusing lens group. The pentagonal prism can be replaced by a hollow pentagonal prism or a pair of reflecting mirrors constituting the reflecting surface of the pentagonal prism. In practical applications, appropriate devices are selected according to actual conditions, and no specific limitations are made here.

[0108] In the embodiments of the present invention, the above-mentioned measurement system can measure not only three-axis CNC machine tools, but also machining centers or coordinate measuring machines. Meanwhile, the geometric error sensitive unit is installed on the tool clamping component.

[0109] In this invention, a pentagonal prism is used in the light-directing unit to convert light rays; and a positioning component of the positioning device enables rapid positioning of the pentagonal prism during Y-axis and Z-axis measurements. A first connector and a second connector, a precision angle adjustment device connected to the first or second connector, a coarse adjustment device connected to the precision angle adjuster, and a fixing device connected to the coarse adjustment device are provided on the outer surface of the geometric error sensitive unit to connect the geometric error sensitive unit to the machine tool spindle. When measuring the six degrees of freedom error of the X-axis and Y-axis, the geometric error sensitive unit is installed next to the machine tool spindle but not rotating with it, via the first connector, the precision angle adjustment device, the coarse adjustment device, and the fixing device. When moving from measuring the X-axis to measuring the Y-axis, the machine tool spindle rotates 90° around the Z-axis, causing the entire geometric error sensitive unit to rotate 90° around the Z-axis. The light rays emitted along the X-axis pass through the light-directing unit and then exit and enter the geometric error sensitive unit along the Y-axis, thus achieving the measurement of the six degrees of freedom error of the Y-axis. When measuring the Z-axis, the geometric error sensitive unit is installed next to the machine tool spindle but not rotating with it via a second connector, a precision angle adjustment device, a coarse adjustment device, and a fixing device. In this invention, the Z-axis six-degree-of-freedom error is measured by setting a positioning device for rapid positioning of the pentagonal prism and by setting a connecting component for connecting the machine tool spindle and the geometric error sensitive unit.

[0110] Corresponding to the above measurement system, the present invention also provides a laser measurement method for 21 geometric errors in manual steering. Figures 16 to 18 A flowchart of a laser measurement method for 21 geometric errors in manual steering according to an embodiment of the present invention is shown.

[0111] like Figures 16 to 18 As shown, the laser measurement method for 21 geometric errors in manual steering provided by this invention uses the aforementioned laser measurement system for 21 geometric errors in manual steering to perform six-degree-of-freedom geometric error measurements on the machine tool spindle to be measured. The method includes: X-axis six-degree-of-freedom error measurement, Y-axis six-degree-of-freedom error measurement, and Z-axis six-degree-of-freedom error measurement. Specifically,

[0112] Figure 16 As shown, the X-axis six-degree-of-freedom error measurement method includes:

[0113] S110: The measuring unit is mounted on the machine tool platform via a two-dimensional straightness and two-dimensional angle adjustment device, and the positioning device of the light beam turning unit is mounted on the machine tool platform;

[0114] S120: The geometric error sensitive unit is mounted on the precision angle adjustment device via the first connector, the precision angle adjustment device is mounted on the coarse adjustment device, the coarse adjustment device is mounted on the fixing device, and the fixing device is mounted next to the machine tool spindle and at a position that does not rotate with the machine tool spindle;

[0115] S130: Adjust the two-dimensional straightness and the two-dimensional angle of the two-dimensional angle adjustment device so that the emitted light from the measuring unit is parallel to the X-axis direction;

[0116] S140: Adjust the two-dimensional straightness of the two-dimensional straightness and the two-dimensional angle adjustment device, as well as the coarse adjustment device, so that the geometric error sensitive unit receives the emitted light and reflects the emitted light back to the measurement unit;

[0117] S150: Adjust the precision angle adjustment device so that before the measurement begins, the emitted light returns to the effective measurement range of the photodetector of the measurement unit;

[0118] S160: The machine tool spindle drives the geometric error sensing unit to move along the X-axis, so that the geometric error sensing unit receives the emitted light and reflects the emitted light back to the measuring unit;

[0119] S170: The X-axis six-degree-of-freedom error is measured by the measurement unit and the geometric error sensitive unit based on the received light.

[0120] like Figure 17 As shown, the Y-axis six-degree-of-freedom error measurement method includes:

[0121] S210: The measuring unit is mounted on the machine tool platform via a two-dimensional straightness and two-dimensional angle adjustment device, and the positioning device of the light beam turning unit is mounted on the machine tool platform;

[0122] S220: Place the steering mirror on the positioning device;

[0123] S230: The geometric error sensitive unit is mounted on the precision angle adjustment device via the first connector, the precision angle adjustment device is mounted on the coarse adjustment device, the coarse adjustment device is mounted on the fixing device, and the fixing device is mounted next to the machine tool spindle and at a position that does not rotate with the machine tool spindle;

[0124] S240: The outgoing light emitted by the measuring unit is redirected by the redirecting mirror, so that the redirected light is emitted along the Y-axis direction;

[0125] S250: The coarse adjustment device drives the geometric error sensitive unit to rotate 90° around the Z-axis, so that the geometric error sensitive unit receives the emitted light and reflects the emitted light back to the measurement unit;

[0126] S260: Adjust the precision angle adjustment device so that the emitted light returns to the effective measurement range of the photodetector of the measurement unit before the measurement begins;

[0127] S270: The machine tool spindle drives the geometric error sensing unit to move along the Y-axis, so that the geometric error sensing unit receives the emitted light and reflects the emitted light back to the measuring unit;

[0128] S280: The Y-axis six-degree-of-freedom error is measured by the measurement unit and the geometric error sensitive unit based on the received light.

[0129] like Figure 18 As shown, the Z-axis six-degree-of-freedom error measurement method, the first method includes:

[0130] S310: The measuring unit is mounted on the machine tool platform via a two-dimensional straightness and two-dimensional angle adjustment device, and the positioning device of the light beam turning unit is mounted on the machine tool platform;

[0131] S320: Rotate the steering mirror 90° and place it on the positioning device;

[0132] S330: The geometric error sensitive unit is mounted on the precision angle adjustment device via the first connector, the precision angle adjustment device is mounted on the coarse adjustment device, the coarse adjustment device is mounted on the fixing device, and the fixing device is mounted next to the machine tool spindle and in a position that does not rotate with the main spindle;

[0133] S340: The outgoing light emitted by the measuring unit is redirected by the turning mirror, so that the redirected light is emitted along the Z-axis direction;

[0134] S350: Adjust the coarse adjustment device so that the geometric error sensitive unit receives the emitted light and reflects the emitted light back to the measurement unit;

[0135] S360: Adjust the precision angle adjustment device so that the emitted light returns to the effective measurement range of the photodetector of the measurement unit before the measurement begins;

[0136] S370: The machine tool spindle drives the geometric error sensing unit to move along the Z-axis, so that the geometric error sensing unit receives the emitted light and reflects the emitted light back to the measuring unit;

[0137] S380: The measurement unit and the geometric error sensing unit complete the Z-axis six-degree-of-freedom error measurement based on the received light.

[0138] In addition, the second method for measuring the six degrees of freedom error of the Z-axis includes:

[0139] The measuring unit is mounted on the machine tool platform via a two-dimensional straightness and two-dimensional angle adjustment device, and the positioning device of the light beam turning unit is mounted on the machine tool platform;

[0140] The steering mirror is rotated 90° and then placed on the positioning device;

[0141] The geometric error sensitive unit is mounted on the precision angle adjustment device via a second connector, the precision angle adjustment device is mounted on the coarse adjustment device, the coarse adjustment device is mounted on the fixing device, and the fixing device is mounted next to the machine tool spindle and in a position that does not rotate with the machine tool spindle.

[0142] The outgoing light emitted by the measuring unit is redirected by the steering mirror, so that the redirected light is emitted along the Z-axis.

[0143] Adjust the coarse adjustment device so that the geometric error sensitive unit receives the emitted light and reflects the emitted light back to the measurement unit;

[0144] Adjust the precision angle adjustment device so that the emitted light returns to the effective measurement range of the photodetector of the measurement unit before the measurement begins;

[0145] The machine tool spindle drives the geometric error sensing unit to move along the Z-axis, so that the geometric error sensing unit receives the emitted light and reflects the emitted light back to the measuring unit;

[0146] The measurement unit and the geometric error sensing unit perform Z-axis six-degree-of-freedom error measurement based on the received light.

[0147] Of these two methods, the first method uses a universal joint as a coarse adjustment mechanism, which does not require replacing the connector.

[0148] In an embodiment of the present invention, a 21-item geometric error laser measurement system for manual steering performs six-degree-of-freedom geometric error measurements on the machine tool to be measured along the X-axis, Z-axis, and Z-axis respectively, measuring the six-degree-of-freedom errors of the X-axis, Y-axis, and Z-axis respectively; based on the measured six-degree-of-freedom errors of the X-axis, Y-axis, and Z-axis, the perpendicularity error between the three axes is calculated, thus realizing the measurement of 21 geometric errors.

[0149] It should be noted that the embodiments of the present invention are described in the order that the initial direction of the emitted light from the measuring unit is parallel to the X-axis direction, and the six degrees of freedom of the X-axis are measured first, followed by the six degrees of freedom of the Y-axis and the six degrees of freedom of the Z-axis. In reality, ① the measurement order of the three linear axes is not fixed, as long as the installation method and working state of the steering unit and the geometric error sensitive unit correspond one-to-one with the measurement state of the three axes of motion; ② the emitted light from the measuring unit can be made parallel to the Y-axis direction, and the measurement of 21 errors in the three axes can be achieved simply by changing the installation method of the instrument, and the present invention does not impose any particular limitation on this.

[0150] The specific structure of the apparatus in the method of the present invention is as described in the foregoing embodiments. Since the method adopts all the technical solutions of all the foregoing embodiments, it has at least all the beneficial effects brought about by the technical solutions of the foregoing embodiments, which will not be described in detail here.

[0151] The above description is merely an optional embodiment of the present invention and does not limit the patent scope of the present invention. Any equivalent structural transformations made under the concept of the present invention using the description and drawings of the present invention, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present invention.

Claims

1. A laser measurement system for 21 geometric errors in manual steering, comprising: The measurement unit, the light-directing unit, and the geometric error-sensitive unit are characterized in that, The light-directing unit includes: a positioning device placed in the direction of the emitted light from the measuring unit, and a steering mirror for directing the emitted light from the measuring unit, wherein the positioning device is used to position the steering mirror. The geometric error sensitive unit includes: a first housing, a first connector and a second connector disposed on the outer surface of the first housing, a precision angle adjustment device connected to the first connector or the second connector, a coarse adjustment device connected to the precision angle adjuster, and a fixing device connected to the coarse adjustment device; The measuring unit and the positioning device are respectively installed on the machine tool platform. The geometric error sensitive unit is installed next to the machine tool spindle and in a position that does not rotate with the machine tool spindle through the first connector or the second connector, the precision angle adjustment device, the coarse adjustment device, and the fixing device. The measuring unit and the geometric error sensitive unit are combined to measure the six degrees of freedom error of the XYZ axes and the three-axis perpendicularity error.

2. The laser measurement system for 21 geometric errors in manual steering according to claim 1, characterized in that, The light-directing unit further includes a second housing for placing the steering mirror, wherein a positioning component is provided on the positioning device, and the steering mirror is mounted on the positioning component through the second housing; When measuring the six degrees of freedom error of the X-axis, the steering mirror is located outside the optical path of the outgoing light of the measuring unit, and the outgoing light is emitted along the X-axis direction; When measuring the six degrees of freedom error of the Y-axis, the steering mirror is placed on the positioning device, and the emitted light rays are emitted along the Y-axis direction after passing through the steering mirror; When measuring the six degrees of freedom error of the Z-axis, the steering mirror is placed on the positioning device after being rotated, and the emitted light rays are emitted along the Z-axis direction after passing through the steering mirror. The steering mirror is one of a pentagonal prism, a hollow pentagonal prism, or a pair of mirrors that form the reflecting surface of a pentagonal prism. The positioning component is one of the following: a positioning slot, a positioning post group, or a universal positioning device.

3. The laser measurement system for 21 geometric errors in manual steering according to claim 1, characterized in that, When measuring the six degrees of freedom error of the X and Y axes, the geometric error sensing unit is mounted on the precision angle adjustment device via the first connector; when measuring the six degrees of freedom error of the Z axis, the geometric error sensing unit is mounted on the precision angle adjustment device via the second connector; the fixing device is mounted next to the machine tool spindle and in a position that does not rotate with the machine tool spindle; The coarse adjustment device is used to adjust the position and orientation of the first housing so that the geometric error sensitive unit receives the emitted light and reflects the emitted light back to the measurement unit. The precision angle adjustment device is used to precisely adjust the angle of the first housing so that before the measurement begins, the emitted light returns to the effective measurement range of the photodetector of the measurement unit.

4. The laser measurement system for 21 geometric errors in manual steering according to claim 3, characterized in that, The coarse adjustment device includes a one-dimensional moving component and a rotating component that rotates about the moving direction of the one-dimensional moving component.

5. The laser measurement system for 21 geometric errors in manual steering according to claim 3, characterized in that, When the coarse adjustment device is a universal adjustment frame, the position and orientation of the first housing are changed by adjusting the universal adjustment frame to realize the measurement of the six degrees of freedom error along the X-axis, Y-axis and Z-axis respectively. The geometric error sensitive unit receives the emitted light and reflects the emitted light back to the measurement unit.

6. A laser measurement method for 21 geometric errors in manual steering, characterized in that, The method involves using a laser measurement system for 21 geometric errors with manual steering as described in any one of claims 1-5 to measure the six degrees of freedom geometric errors of a machine tool under test along the X-axis. The measuring unit is mounted on the machine tool platform via a two-dimensional straightness and two-dimensional angle adjustment device, and the positioning device of the light beam turning unit is mounted on the machine tool platform; The geometric error sensitive unit is mounted on the precision angle adjustment device via the first connector, the precision angle adjustment device is mounted on the coarse adjustment device, the coarse adjustment device is mounted on the fixing device, and the fixing device is mounted next to the machine tool spindle and in a position that does not rotate with the machine tool spindle; Adjust the two-dimensional straightness and the two-dimensional angle of the two-dimensional angle adjustment device so that the emitted light rays from the measuring unit are parallel to the X-axis direction; Adjust the two-dimensional straightness and the two-dimensional angle adjustment device, as well as the coarse adjustment device, so that the geometric error sensitive unit receives the emitted light and reflects the emitted light back to the measurement unit; Adjust the precision angle adjustment device so that before the measurement begins, the emitted light returns to the effective measurement range of the photodetector in the measurement unit; The machine tool spindle drives the geometric error sensing unit to move along the X-axis, so that the geometric error sensing unit receives the emitted light and reflects the emitted light back to the measuring unit; The X-axis six-degree-of-freedom error is measured by the measurement unit and the geometric error sensing unit based on the received light.

7. A laser measurement method for 21 geometric errors in manual steering, characterized in that, The method involves using a laser measurement system for 21 geometric errors with manual steering as described in any one of claims 1-5 to measure the six degrees of freedom geometric errors of a machine tool under test along the Y-axis. The measuring unit is mounted on the machine tool platform via a two-dimensional straightness and two-dimensional angle adjustment device, and the positioning device of the light beam turning unit is mounted on the machine tool platform; Place the steering mirror on the positioning device; The geometric error sensitive unit is mounted on the precision angle adjustment device via the first connector, the precision angle adjustment device is mounted on the coarse adjustment device, the coarse adjustment device is mounted on the fixing device, and the fixing device is mounted next to the machine tool spindle and in a position that does not rotate with the machine tool spindle. The outgoing light emitted by the measuring unit is redirected by the redirecting mirror, so that the redirected light is emitted along the Y-axis. The coarse adjustment device drives the geometric error sensitive unit to rotate 90° around the Z-axis, so that the geometric error sensitive unit receives the emitted light and reflects the emitted light back to the measurement unit; Adjust the precision angle adjustment device so that the emitted light returns to the effective measurement range of the photodetector of the measurement unit before the measurement begins; The machine tool spindle drives the geometric error sensing unit to move along the Y-axis, so that the geometric error sensing unit receives the emitted light and reflects the emitted light back to the measuring unit; The Y-axis six-degree-of-freedom error is measured by the measurement unit and the geometric error sensing unit based on the received light.

8. A laser measurement method for 21 geometric errors in manual steering, characterized in that, The method involves using a laser measurement system for 21 geometric errors with manual steering as described in any one of claims 1-4 to measure the six degrees of freedom geometric errors of a machine tool under test along the Z-axis. The measuring unit is mounted on the machine tool platform via a two-dimensional straightness and two-dimensional angle adjustment device, and the positioning device of the light beam turning unit is mounted on the machine tool platform; The steering mirror is rotated 90° and then placed on the positioning device; The geometric error sensitive unit is mounted on the precision angle adjustment device via a second connector, the precision angle adjustment device is mounted on the coarse adjustment device, the coarse adjustment device is mounted on the fixing device, and the fixing device is mounted next to the machine tool spindle and in a position that does not rotate with the machine tool spindle. The outgoing light emitted by the measuring unit is redirected by the steering mirror, so that the redirected light is emitted along the Z-axis. Adjust the coarse adjustment device so that the geometric error sensitive unit receives the emitted light and reflects the emitted light back to the measurement unit; Adjust the precision angle adjustment device so that the emitted light returns to the effective measurement range of the photodetector of the measurement unit before the measurement begins; The machine tool spindle drives the geometric error sensing unit to move along the Z-axis, so that the geometric error sensing unit receives the emitted light and reflects the emitted light back to the measuring unit; The measurement unit and the geometric error sensing unit perform Z-axis six-degree-of-freedom error measurement based on the received light.

9. A laser measurement method for 21 geometric errors in manual steering, characterized in that, The method employs a laser measurement system for 21 geometric errors with manual steering as described in any one of claims 1, 3, and 5 to measure the six degrees of freedom geometric errors of the machine tool to be measured along the Z-axis. The method includes: The measuring unit is mounted on the machine tool platform via a two-dimensional straightness and two-dimensional angle adjustment device, and the positioning device of the light beam turning unit is mounted on the machine tool platform; The steering mirror is rotated 90° and then placed on the positioning device; The geometric error sensitive unit is mounted on the precision angle adjustment device via the first connector, the precision angle adjustment device is mounted on the coarse adjustment device, the coarse adjustment device is mounted on the fixing device, and the fixing device is mounted next to the machine tool spindle and in a position that does not rotate with the main spindle. The outgoing light emitted by the measuring unit is redirected by the steering mirror, so that the redirected light is emitted along the Z-axis. Adjust the coarse adjustment device so that the geometric error sensitive unit receives the emitted light and reflects the emitted light back to the measurement unit; Adjust the precision angle adjustment device so that the emitted light returns to the effective measurement range of the photodetector of the measurement unit before the measurement begins; The machine tool spindle drives the geometric error sensing unit to move along the Z-axis, so that the geometric error sensing unit receives the emitted light and reflects the emitted light back to the measuring unit; The measurement unit and the geometric error sensing unit perform Z-axis six-degree-of-freedom error measurement based on the received light.

10. A laser measurement method for 21 geometric errors in manual steering, characterized in that, The laser measurement system for 21 geometric errors of manual steering as described in any one of claims 1-5 is used to measure the six degrees of freedom geometric errors of the machine tool to be measured along the X-axis, Z-axis and Z-axis respectively, and the X-axis six degrees of freedom error, Y-axis six degrees of freedom error and Z-axis six degrees of freedom error are measured respectively. Based on the measured six-degree-of-freedom errors of the X-axis, Y-axis, and Z-axis, the perpendicularity errors between the three axes are calculated, achieving 21 geometric error measurements.

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