Adsorption device, adsorption method, and maintenance method for adsorption device

By designing the adsorption execution unit, control unit, and management unit of the adsorption device, automatic adjustment of adsorption force and power failure/gas failure protection are achieved. This solves the problem of workpiece damage or falling caused by the inability of traditional tools to adjust the adsorption force. It is suitable for large workpiece loads and is easy to maintain regularly.

CN121536728APending Publication Date: 2026-02-17INSPUR SUZHOU INTELLIGENT TECH CO LTD
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Patent Information

Application Number
CN202610065856.X
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-01-19
Publication Date
2026-02-17

AI Technical Summary

Technical Problem

Traditional airbags and electric adsorption tools cannot adjust the adsorption force, which can cause workpiece damage or drop. They are also unsuitable for the load requirements of large workpieces and lack power outage and air supply protection and maintenance management.

Method used

An adsorption device was designed, comprising an adsorption execution unit, a control unit, and a management unit. By utilizing pressure and angle detection devices, combined with a process parameter library and a negative pressure adjustment module, the adsorption force can be automatically adjusted. It is also equipped with power failure and gas failure protection and component life management.

Benefits of technology

It achieves automatic adjustment of adsorption force according to workpiece parameters to avoid damage or falling off, has power failure and gas interruption protection, and is easy to maintain and manage regularly.

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Abstract

The invention discloses an adsorption device, an adsorption method and a maintenance method of the adsorption device, and relates to the technical field of adsorption, the adsorption device comprises an adsorption execution unit, an adsorption control unit and an adsorption management and control unit, and the adsorption execution unit comprises an adsorption part and a pressure detection part which are connected; the adsorption control unit comprises an industrial control part, a control part, a data acquisition module and a negative pressure adjusting module which are connected with one another; the adsorption management and control unit is connected with the industrial control and comprises a process parameter library of the workpiece; when the adsorption part adsorbs a workpiece, the pressure detection part detects adsorption pressure data of the adsorption part, the data acquisition module acquires the adsorption pressure data of the adsorption part and transmits the adsorption pressure data to the control part, and the industrial control part calls process parameters and transmits the process parameters to the control part; the control piece controls the negative pressure adjusting module to adjust the adsorption pressure of the adsorption piece according to the adsorption pressure data of the adsorption piece and the process parameters of the workpiece; therefore, the situation that the workpieces are difficult to release due to too large adsorption pressure and are traced or damaged is avoided, and the workpieces are prevented from falling off and being damaged due to too small adsorption pressure.
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Description

Technical Field

[0001] This application relates to the field of adsorption technology, and in particular to an adsorption device, an adsorption method, and a maintenance method for the adsorption device. Background Technology

[0002] In related technologies, the adsorption of workpieces is mainly achieved by human operation of traditional airbag adsorption tools and ordinary electric adsorption tools. This makes the assembly process relatively dependent on the skill level of the operator. In actual production assembly, different adsorption forces should be used for precision workpieces to avoid leaving marks or damage due to excessive adsorption force, or causing them to fall due to insufficient adsorption force.

[0003] Traditional airbag adsorption tools in related technologies rely primarily on manual pressure to achieve stable adsorption. However, the pressure varies depending on the size of the suction cup, making it difficult to control the pressure applied to the airbag. If the adsorption pressure is too low, the workpiece may fall off during movement, causing damage; if the adsorption pressure is too high, it is difficult to release the workpiece, also easily leading to damage.

[0004] Regarding the electric adsorption tools in related technologies, they are generally compact in structure and are only suitable for small workpiece scenarios. They cannot meet the load requirements of large workpieces and there is a risk of dropping the workpiece. Summary of the Invention

[0005] This application provides an adsorption device, an adsorption method, and a maintenance method for the adsorption device, so as to at least solve the problem in the related art that traditional airbag adsorption tools or electric adsorption tools leave marks or damage to the workpiece or cause the workpiece to fall and be damaged because the adsorption force cannot be adjusted.

[0006] In a first aspect, this application provides an adsorption device, including an adsorption execution unit, an adsorption control unit, and an adsorption management unit. The adsorption execution unit includes an adsorption element and a pressure detection element connected to each other. The adsorption control unit includes a workpiece control element, a control element, a data acquisition module, and a negative pressure adjustment module connected to each other. The adsorption element is used to adsorb workpieces and is connected to the negative pressure adjustment module. The pressure detection element is connected to the data acquisition module. The adsorption control unit is connected to the control unit and includes a process parameter library for the workpiece. The process parameter library contains process parameters for different workpieces, including the negative pressure parameters of the workpiece. When the adsorption element adsorbs the workpiece, the pressure detection element detects the adsorption pressure data of the adsorption element, the data acquisition module collects the adsorption pressure data of the adsorption element and transmits it to the control element, the process control element calls the corresponding process parameters of the workpiece in the process parameter library and transmits them to the control element, and the control element controls the negative pressure adjustment module to adjust the adsorption pressure of the adsorption element according to the adsorption pressure data of the adsorption element and the process parameters of the workpiece.

[0007] As a preferred embodiment of the above scheme, the adsorption execution unit also includes an angle detection device connected to the data acquisition module, and the process parameters also include the initial adsorption pressure parameter and adsorption angle parameter of the workpiece. When the adsorption element adsorbs the workpiece, the angle detection element detects the adsorption angle data of the adsorption element. The data acquisition module collects the adsorption angle data of the adsorption element and transmits it to the control element. The control element controls the start and stop of the negative pressure adjustment module based on the adsorption pressure data of the adsorption element, the initial adsorption pressure parameters of the workpiece, the adsorption angle data of the adsorption element, and the adsorption angle parameters of the workpiece.

[0008] As a preferred embodiment of the above scheme, the adsorption control unit further includes a control circuit module that supplies power to the control unit and the negative pressure regulation module. The control circuit module includes a power supply module, a power conversion module, a power-off switching module, and a rechargeable power supply. The power supply module is connected to the power conversion module, the power conversion module is connected to the power-off switching module, and the power-off switching module is connected to the rechargeable power supply.

[0009] As a preferred embodiment of the above scheme, the adsorption execution unit further includes a first housing, a first connector, a second connector, a buffer, and a first joint. The first housing includes a first cavity, and the pressure detection element, the second connector, and the buffer are disposed in the first cavity. One end of the first connector extends out of the first end of the first cavity to detachably connect to the adsorption element, and the first joint is connected to the second end of the first cavity and extends out of the first cavity. The first and second connectors have air passages that communicate with the adsorption element and the first cavity. The first end of the second connector is fixedly connected to the first connector and the second end is inserted into the pressure detection element. The buffer includes a connecting post and an elastic element. The first end of the connecting post is fixedly connected to the first connector and the second end is inserted into the pressure detection element. The elastic element is connected between the first connector and the pressure detection element. The adsorption control unit also includes a second housing, a second cover, a second connector, a signal cable, and a gas path cable. The second housing includes a partition and a second cavity and a third cavity divided by the partition. The second cover covers the second cavity and the third cavity. The signal cable and the gas path cable are connected between the first connector and the second connector. The negative pressure adjustment module is located in the second cavity. The control components and the data acquisition module are located in the third cavity. The control components are located in the second cover.

[0010] As a preferred embodiment of the above solution, the adsorption execution unit further includes a mode switching button, and the first housing further includes a first cover that covers the first cavity. The mode switching button is disposed on the first cover. The mode switching button includes a button body and a contactor connected to each other. The button body is disposed on the outer wall of the first cover. The contactor is connected to the control component through a signal cable. The signal cable passes through the first cavity, the first connector, the second connector, the second cavity, the partition, and the third cavity.

[0011] As a preferred embodiment of the above solution, the adsorption control unit further includes a vacuum breaking dual button and a buzzer tri-color light. The vacuum breaking dual button is connected to the control component, and the buzzer tri-color light is connected to the control component and the control component. The second housing also includes a second cover that covers the second cavity and the third cavity. The control component includes a host computer software and a display screen connected to it. The display screen, the vacuum breaking dual button, and the buzzer tri-color light are disposed on the outer wall of the second cover.

[0012] As a preferred embodiment of the above solution, the negative pressure regulation module includes an intake end, a vacuum pump, a vacuum solenoid valve, a vacuum breaker valve, and a negative pressure detection element. The intake end is connected to the vacuum pump and a second connector. The vacuum pump is connected to the vacuum solenoid valve, the vacuum breaker valve, and the negative pressure detection element. The vacuum solenoid valve is a power-on-off type. The negative pressure detection element is connected to the data acquisition module.

[0013] As a preferred embodiment of the above scheme, the adsorption device further includes a component maintenance unit connected to the control unit. The control unit monitors and statistically analyzes the usage time or number of changes of the components of the adsorption execution unit and the adsorption control unit. The component maintenance unit includes a component lifespan library and a maintenance task generation module connected to each other. The component lifespan library contains the theoretical lifespan, reliability lifespan, and reliability lifespan risk assessment coefficient of the components of the adsorption execution unit and the adsorption control unit. The reliability lifespan is a percentage of the theoretical lifespan. The maintenance task generation module generates a maintenance task based on the reliability lifespan, the reliability lifespan risk assessment coefficient, and the usage time or number of changes of the components of the adsorption execution unit and the adsorption control unit.

[0014] Secondly, an adsorption method is provided, applied to the adsorption device described above, and comprising the following steps: The adsorption component adsorbs the workpiece, while the pressure detection component detects the adsorption pressure data of the adsorption component. The data acquisition module collects the adsorption pressure data of the adsorption element and transmits it to the control element; The control component calls the corresponding workpiece's process parameters from the process parameter library and transmits them to the control component; The control unit adjusts the adsorption pressure of the adsorption unit based on the adsorption pressure data of the adsorption unit and the process parameters of the workpiece, using the negative pressure adjustment module.

[0015] Thirdly, a maintenance method for an adsorption device is provided, applicable to the adsorption device described above, and includes the following steps: The maintenance task order generation module configures the preset maintenance values ​​for the components of the adsorption execution unit and adsorption control unit, where the preset maintenance value is the product of the reliability life of the corresponding component and the reliability life risk assessment coefficient. The control unit monitors and statistically analyzes the usage time or number of changes of the components of the adsorption execution unit and the adsorption control unit respectively; When the usage time or number of changes is greater than or equal to the preset maintenance value, the maintenance task order generation module generates a maintenance task order for the corresponding component.

[0016] The adsorption device and method of this application, by setting up an adsorption execution unit 1, an adsorption control unit, and an adsorption management unit, pre-configures process parameters for different workpieces in the process parameter library of the adsorption management unit. The process parameters include the negative pressure parameters of the workpiece. When the adsorbent adsorbs the workpiece, the pressure detection unit detects the adsorption pressure data of the adsorbent, the data acquisition module collects the adsorption pressure data of the adsorbent and transmits it to the control unit, and the control unit calls the corresponding process parameters of the workpiece in the process parameter library and transmits them to the control unit. The control unit controls the negative pressure adjustment module to adjust the adsorption pressure of the adsorbent according to the adsorption pressure data of the adsorbent and the process parameters of the workpiece. Thus, the control unit can control the negative pressure adjustment module to adjust the adsorption pressure of the adsorbent according to the pre-configured process parameters of the workpiece and the real-time collected adsorption pressure data of the adsorbent, so that the adsorption pressure of the adsorbent corresponds to the process parameters of the workpiece when each workpiece is adsorbed by the adsorbent. This avoids the adsorption pressure being too high, making it difficult to release the workpiece, leaving marks or damage to the workpiece, and avoids the adsorption pressure being too low, causing the workpiece to fall and be damaged.

[0017] The maintenance method for the adsorption device of this application, by setting up a component maintenance unit connected to the control unit, includes a component lifespan library and a maintenance task order generation module. The component lifespan library is configured with the theoretical lifespan, reliability lifespan, and reliability lifespan risk assessment coefficient of the components of the adsorption execution unit and adsorption control unit, where the reliability lifespan is a percentage of the theoretical lifespan. The maintenance task order generation module is configured with the preset maintenance values ​​of the components of the adsorption execution unit and adsorption control unit, where the preset maintenance value is the product of the reliability lifespan and the reliability lifespan risk assessment coefficient of the corresponding component. The control unit monitors and statistically analyzes the usage time or number of changes of the components of the adsorption execution unit and adsorption control unit respectively. When a workpiece is picked up and placed, the control unit transmits the process statistics information to the maintenance task order generation module. The maintenance task order generation module calculates that when the usage time or number of changes is greater than or equal to the preset maintenance value, it automatically generates a maintenance task order for the corresponding component and gives it to the technician, who then performs the maintenance task for the corresponding component. Thus, the maintenance method for the adsorption device of this application facilitates the lifespan management of the components of the adsorption execution unit and adsorption control unit, and realizes the function of regular maintenance. Attached Figure Description

[0018] To more clearly illustrate the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the structure of the adsorption execution unit provided in the embodiments of this application; Figure 2 for Figure 1 Partial structural diagram; Figure 3 This is a schematic diagram of the adsorption control unit provided in an embodiment of this application; Figure 4 for Figure 3 Partial structural diagram; Figure 5 A schematic flowchart of the adsorption method provided in the embodiments of this application; Figure 6 A schematic flowchart illustrating the maintenance method for the adsorption device provided in this application embodiment.

[0020] The above figures include the following reference numerals: Adsorption actuator 1; Adsorption component 11; Pressure detection component 12; Angle detection component 13; First housing 14; First cavity 141; First cover 142; First connector 15; Second connector 16; Air passage 161; Buffer component 17; Connecting post 171; Elastic component 172; First connector 18; Mode switching button 19; Adsorption control unit 2; Control component 21; Display screen 211; Control component 22; Data acquisition module 23; Negative pressure adjustment module 24; Inhalation end 241; Control circuit module 25; Power supply module 251; Power conversion module 252; Power failure switching module 253; Rechargeable power supply 254; Second housing 26; Second cover 261; Partition 262; Second cavity 263; Third cavity 264; Second connector 27; Vacuum breaking double button 28; Main power switch 29; Buzzer tri-color light 210. Detailed Implementation

[0021] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of this application.

[0022] It should be noted that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. The terms "installed," "connected," and "linked" should be interpreted broadly, for example, they can be fixed connections, detachable connections, or integral connections; they can be mechanical connections or electrical connections; they can be direct connections or indirect connections through an intermediate medium; they can be internal connections between two elements. The terms "parallel," "perpendicular," and "equal" include the described situation and situations similar to the described situation, the range of which is within an acceptable deviation range, wherein the acceptable deviation range is determined by those skilled in the art taking into account the measurement under discussion and the error associated with the measurement of a particular quantity (i.e., the limitations of the measurement system). For example, "parallel" includes absolute parallelism and approximate parallelism, where an acceptable deviation range for approximate parallelism can be, for example, within 5°; "perpendicular" includes absolute perpendicularity and approximate perpendicularity, where an acceptable deviation range for approximate perpendicularity can also be, for example, within 5°. "Equal" includes absolute equality and approximate equality, where an acceptable deviation range for approximate equality can be, for example, a difference between the two equal items being less than or equal to 5% of either one. Those skilled in the art will understand the specific meaning of the above terms in this application based on the specific circumstances.

[0023] As described in the background section, the adsorption of workpieces such as chips (CPUs) in related technologies is mainly achieved by human operation of traditional airbag adsorption tools and ordinary electric adsorption tools. This makes the assembly process relatively dependent on the skill level of the operator. In actual production assembly, precision workpieces require different adsorption forces to avoid leaving marks or damage due to excessive adsorption force, or causing them to fall due to insufficient adsorption force. Regarding traditional airbag adsorption tools in related technologies, stable adsorption is mainly achieved by human pressure on the airbag. Since the pressure varies depending on the size of the suction cup, it is difficult to control the pressure applied to the airbag. If the adsorption pressure is too low, the workpiece will fall during movement and be damaged; if the adsorption pressure is too high, it is difficult to release the workpiece, which can also easily cause damage.

[0024] Regarding the electric adsorption tools in related technologies, they are generally compact in structure and only suitable for small workpieces. They cannot meet the load requirements of large workpieces and pose a risk of dropping. Moreover, electric adsorption tools are battery-powered and lack power display and power failure protection functions. If the power is interrupted during adsorption, the workpiece will fall and be damaged.

[0025] In addition, the adsorption tools in the relevant technologies do not have power failure or gas interruption protection functions, lack judgment of successful pick-up and drop and process constraints. Operators rely solely on touch to control the pick-up and drop of workpieces, which cannot strictly prevent mistakes and leads to workpiece loss. Furthermore, there is no operational data management, making it inconvenient to carry out regular maintenance and management.

[0026] The adsorption device provided in this application can adjust the adsorption force according to the process parameters of the workpiece, avoiding excessive adsorption pressure that makes it difficult to release the workpiece, leaving marks or damage to the workpiece, and avoiding excessive adsorption pressure that causes the workpiece to fall and be damaged. At the same time, the adsorption device has power failure and gas failure protection functions to effectively prevent the workpiece from falling after adsorption. Furthermore, the adsorption process has judgment of successful pick-up and release, process constraints and operation data control, which can effectively prevent mistakes and facilitate regular maintenance and management.

[0027] To enable those skilled in the art to better understand the present application, the present application will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0028] Example 1 This application provides an adsorption device, such as... Figures 1 to 4 As shown, the device includes an adsorption execution unit 1, an adsorption control unit 2, and an adsorption management unit (not shown). The adsorption execution unit 1 includes an adsorption element 11, a pressure detection element 12, and an angle detection element 13 connected to each other. The adsorption control unit 2 includes a workpiece control element 21, a control element 22, a data acquisition module 23, and a negative pressure adjustment module 24 connected to each other. The adsorption element 11 is used to adsorb workpieces and is connected to the negative pressure adjustment module 24. The pressure detection element 12 is connected to the data acquisition module 23.

[0029] The adsorption component 11 can be a suction cup used for adsorption in related technologies. The pressure detection component 12 can be a small pressure sensor. The angle detection component 13 can be a small attitude sensor. The control unit 21 can be an integrated industrial control unit including connected host computer software (not shown) and a display screen 211. The integrated industrial control unit uses a small configuration and may not have direct data acquisition capabilities. It is mainly used to display the adsorption status and to call the negative pressure parameters in the process parameter library of the adsorption control unit and send them to the control unit 22 when the workpiece is picked up or placed. The control unit 22 can be a PLC. The PLC can control the opening and closing of various electric valves and the timing of each process action and transmit monitoring data. The data acquisition module 23 collects data from the pressure detection component 12, the angle detection component 13, etc., converts it, and transmits it to the control unit 22 for further processing. The negative pressure adjustment module 24 has vacuum suction and vacuum breaking functions to enable the adsorption component 11 to adsorb or release the workpiece.

[0030] The adsorption control unit is connected to the control unit 21 and includes a process parameter library for the workpiece. The process parameter library is configured with process parameters for different workpieces. The process parameters include the negative pressure parameter, weight parameter, initial adsorption pressure parameter, and adsorption angle parameter of the workpiece. The negative pressure parameter, weight parameter, initial adsorption pressure parameter, and adsorption angle parameter can all be adjusted. The negative pressure parameter corresponds to the weight parameter.

[0031] The adsorption control unit can be a MES (Manufacturing Execution System, a server-based manufacturing process control system on the production line, equipped with a database and barcode verification library). The MES can be set up at a station on the adsorption device (i.e., the MES workstation logged into by the operator during workpiece assembly). Each station is equipped with a barcode scanner connected to the adsorption control unit. During use, the barcode on the workpiece is scanned. Only after the station has the corresponding data can it release the adsorption control unit (i.e., the adsorption control unit can only be used after obtaining the corresponding workpiece data through barcode scanning). The adsorption control unit pre-establishes work center maintenance functions, trigger request functions, and a process parameter library for workpiece handling. In the process parameter library, different workpiece models correspond to a unique code (consistent with the assembly material file, PN, QN, or QR code are all acceptable) and are bound to corresponding negative pressure parameters, weight parameters, initial adsorption pressure parameters, and adsorption angle parameters. The work center maintenance function maintains the process parameters for each workpiece model; without maintenance, the trigger request function and the process parameter library cannot be accessed. The trigger request function uses a barcode scanner to scan a code to trigger the adsorption control unit to automatically call the process parameter data from the process parameter library, which is then processed by the host computer software of the control unit 21. The host computer software then adjusts the adsorption parameters.

[0032] like Figure 4As shown, the adsorption control unit 2 also includes a control circuit module 25 that supplies power to the control unit 21 and the negative pressure adjustment module 24. The control circuit module 25 includes a power supply module 251, a power conversion module 252, a power-off switching module 253, and a rechargeable power supply 254. The power supply module 251 is connected to the power conversion module 252, the power conversion module 252 is connected to the power-off switching module 253, and the power-off switching module 253 is connected to the rechargeable power supply 254. The power supply module 251 is connected to an external 220V supply to power the power conversion module 252. The power conversion module 252 converts the 220V input into 24V output to the power-down switching module 253. The power-down switching module 253 stores energy in its own energy storage section and the rechargeable power supply 254. At the same time, it supplies power to the control unit 21. When the power-down switching module 253 detects a power failure, the power supply circuit automatically switches the power-down switching module 253's own energy storage section and the rechargeable power supply 254 to discharge. The rechargeable power supply 254 continues the safe use for a certain period of time (2-3 hours is sufficient, estimated at 6-7Ah, to avoid the failure to detect the power failure during rest periods).

[0033] like Figure 2 As shown, the adsorption execution unit 1 also includes a first housing 14, a first connector 15, a second connector 16, a buffer 17, and a first connector 18. The first housing 14 includes a first cavity 141, in which the pressure detection element 12, the second connector 16, and the buffer 17 are disposed. The pressure detection element 12 is fixed inside the first cavity 141. One end of the first connector 15 extends out of the first end of the first cavity 141 to detachably connect to the adsorption element 11. The adsorption element 11 can be quickly inserted into one end of the first connector 15. The first connector 18 is connected to the second end of the first cavity 141 and extends out of the first cavity 141. The pressure detection element 12 needs to be calibrated before use. Specifically, the pressure values ​​of the adsorption element 11, the first connector 15, the second connector 16, and the buffer 17 on the pressure detection element 12 are removed, and the control element 22 adjusts the value reference of the pressure detection element 12 after removal to zero.

[0034] like Figure 2As shown, the first connecting member 15 and the second connecting member 16 have air passage holes 161 that communicate with the adsorption member 11 and the first cavity 141, allowing air to pass through the middle of the pressure detection member 12. The first end of the second connecting member 16 is fixedly connected to the first connecting member 15, and the second end is inserted into the pressure detection member 12. The buffer member 17 includes a connecting post 171 and an elastic member 172. The first end of the connecting post 171 is fixedly connected to the first connecting member 15, and the second end is inserted into the pressure detection member 12. The elastic member 172 connects the first connecting member 15 and the pressure detection member 12. The buffer member 17 can be a spring, and it has an elastic buffering function. When the adsorption member 11 contacts the workpiece, the buffer member 17 can reduce the direct force on the pressure detection member 12, thus improving the service life of the pressure detection member 12.

[0035] like Figure 3 , Figure 4 As shown, the adsorption control unit 2 also includes a second housing 26, a second cover 261, a second connector 27, a signal cable (not shown), and a gas path cable (not shown). The second housing 26 includes a partition 262 and a second cavity 263 and a third cavity 264 divided by the partition 262. The partition 262 is used for isolation and protection. The second cover 261 covers the second cavity 263 and the third cavity 264. The signal cable and the gas path cable are connected between the first connector 18 and the second connector 27. The negative pressure adjustment module 24 is disposed in the second cavity 263. The control component 22, the data acquisition module 23, and the control circuit module 25 are disposed in the third cavity 264. The control component 21 is disposed on the second cover 261 directly above the third cavity 264. The power supply and signal connection between the adsorption execution unit 1 and the adsorption control unit 2 can be connected via the signal cable, and the negative pressure gas path can be connected via the gas path cable.

[0036] By setting the adsorption execution unit 1 and the adsorption control unit 2 as two separate units, and connecting the two units through signal cables and air cables, the operator only needs to operate the adsorption execution unit 1 to perform the adsorption operation during adsorption work. Compared with the common electric adsorption tools in related technologies that integrate the battery, controller and other components into one tool, this application greatly reduces the size of the adsorption execution components, making the operation more labor-saving and convenient for the operator.

[0037] like Figure 4As shown, the negative pressure regulation module 24 includes an intake end 241, a vacuum pump, a vacuum solenoid valve, a vacuum breaker valve, a negative pressure detection element, an air filter, and an exhaust channel. The intake end 241 is connected to the vacuum pump and the second connector 27, and then connected to the first connector 18 via a gas path cable. The vacuum pump is connected to the vacuum solenoid valve, the vacuum breaker valve, and the negative pressure detection element. The vacuum solenoid valve is a power-off retention type, thereby realizing gas cut-off protection in the event of a power failure. The negative pressure detection element is connected to the data acquisition module 23, and the exhaust channel is connected to the outside of the second housing 26. The vacuum pump, vacuum solenoid valve, and vacuum breaker valve are powered by the power switching module. The negative pressure detection element can be a negative pressure sensor, which detects the negative pressure data of the negative pressure regulation module 24. The data acquisition module 23 collects the negative pressure data, converts it, and transmits it to the control unit 22 for further processing. The vacuum pump can be a miniature vacuum pump, which can generate a vacuum and has forward and reverse rotation functions, i.e., vacuum suction and vacuum breaking functions. The vacuum solenoid valve controls the opening and closing of the gas path. When negative pressure occurs (during vacuum adsorption), the vacuum solenoid valve and vacuum pump (rotating forward) open, drawing away external gas from the adsorption element 11. Impurities are filtered through an air filter to prevent impact on the lifespan of the vacuum solenoid valve and vacuum pump. Since the lifespan of the vacuum pump is much shorter than that of the vacuum breaker valve, a double-safety mechanism is introduced by adding the vacuum breaker valve to prevent the vacuum from being broken if the vacuum pump fails. The vacuum breaker valve is connected to the air path of the vacuum pump and can introduce air from the exhaust channel, preventing the formation of a negative pressure environment.

[0038] like Figure 1 As shown, the adsorption execution unit 1 also includes a mode switching button 19, and the first housing 14 also includes a first cover 142 that covers the first cavity 141. The mode switching button 19 is disposed on the first cover 142 and includes a button body (not shown) and a contactor (not shown) connected to each other. The button body is disposed on the outer wall of the first cover 142, and the contactor is connected to the control component 22 via a signal cable. The signal cable passes through the first cavity 141, the first connector 18, the second connector 27, the second cavity 263, the partition 262, and the third cavity 264. When the button is turned to one side, the contactor outputs a positive signal to the control component 22; when the button is turned to the other side, the contactor outputs a negative signal to the control component 22. The control component 22 then detects whether other conditions are met and controls the negative pressure adjustment module 24 to perform vacuum suction or vacuum breaking operations.

[0039] like Figure 3 , Figure 4As shown, the adsorption control unit 2 also includes a vacuum breaking double button 28, a main power switch 29, and a buzzer tri-color light 210. The vacuum breaking double button 28 is connected to the control component 22, and the buzzer tri-color light 210 is connected to the control component 21 and the control component 22. The second housing 26 also includes a second cover 261 that covers the second cavity 263 and the third cavity 264. The display screen 211, the vacuum breaking double button 28, and the buzzer tri-color light 210 are disposed on the outer wall of the second cover 261.

[0040] The dual vacuum release button 28 is used to release negative pressure when the adsorption device is powered off. The dual vacuum release button 28 prevents accidental activation by a single button. When both vacuum release buttons 28 are pressed simultaneously, the control unit 22 receives a vacuum release signal and controls the vacuum breaking valve to switch, introducing air from the exhaust channel into the vacuum pump's air path to perform the vacuum release operation. The main power switch 29 is connected to the control circuit module 25. The tri-color buzzer light 210 is powered by the power conversion module 252 and its status is adjusted by the control unit 22. The tri-color buzzer light 210 can be installed in the corner of the second cover 261, providing a tri-color display and a buzzer alarm: green indicates operability, yellow indicates standby, and red indicates an alarm.

[0041] The adsorption device also includes a component maintenance unit (not shown) connected to the control unit 22. The control unit 22 monitors and statistically analyzes the usage time or number of changes of the components of the adsorption execution unit 1 and the adsorption control unit 2. The component maintenance unit includes a component lifespan library and a maintenance task generation module connected to each other. The component lifespan library contains the theoretical lifespan, reliability lifespan, and reliability lifespan risk assessment coefficient of the components of the adsorption execution unit 1 and the adsorption control unit 2. The reliability lifespan is a percentage of the theoretical lifespan. The maintenance task generation module generates a maintenance task based on the reliability lifespan, the reliability lifespan risk assessment coefficient, and the usage time or number of changes of the components of the adsorption execution unit 1 and the adsorption control unit 2.

[0042] The component maintenance unit can be an EMS (Equipment Maintenance Management System). Each adsorption device (adsorption execution unit 1, adsorption control unit 2) has a unique corresponding code (RFID (Radio Frequency Identification)). This code is entered into the EMS during use, and the EMS maintains the theoretical lifespan of each component of the adsorption device. Upon completion of a workpiece pick-up and drop, the control unit 22 synchronously transmits process information to the EMS. The control unit 22 monitors and statistically analyzes the usage time or number of changes for each component. Specifically, it monitors and statistically analyzes the usage time of the vacuum pump, vacuum solenoid valve, vacuum breaker valve, etc. For normally open components such as the work control 21, the control unit 22 itself, the negative pressure sensor, and the air filter, the usage time can be statistically analyzed based on the power-on operating time. The mode switching button 19 and the buzzer tri-color light 210 can be statistically analyzed based on the number of changes.

[0043] The maintenance task order generation module configures the preset maintenance values ​​for the components of adsorption execution unit 1 and adsorption control unit 2. Two-thirds of the theoretical lifespan is taken as the reliability lifespan, and the preset maintenance value is calculated as the reliability lifespan risk assessment coefficient multiplied by the reliability lifespan. The reliability lifespan risk assessment coefficient is ≥1. The system adjusts it as needed based on faults and product reliability. For most components with high reliability, the initial default value can be 1. For newly selected components in the initial design phase, the initial default value can be 2. However, for example, the mode switching button 19 may experience multiple accidental touches during a single pick-up and drop operation (estimated 4-6 times per pick-up and drop operation), so a larger reliability lifespan risk assessment coefficient, such as 6, is recommended for mode switching button 19. Furthermore, if a component has failed before its scheduled maintenance time, the reliability lifespan risk assessment coefficient can be doubled. When the usage time or number of changes is greater than or equal to the preset maintenance value, the maintenance task order generation module generates a maintenance task order for the corresponding component. It should be noted that when the adsorption execution unit 1 and the adsorption control unit 2 malfunction, the fault information is simultaneously recorded in the host computer software of the control unit 21 and transmitted to the EMS. The maintenance task order generation module automatically generates an on-site fault handling task order for the technician to handle the fault in a timely manner.

[0044] When the adsorption device of this application is in use, the adsorption control unit 2 can interact with the MES and EMS via the host computer software of the control unit 21 through the TCP / IP protocol. When the operation is not triggered by barcode scanning or parameter adjustment, the buzzer tri-color light 210 lights up yellow, and the host computer software on the display screen 211 of the control unit 21 displays a status indicating "waiting for trigger." The barcode on the workpiece to be adsorbed is scanned using a barcode scanning device. If the trigger fails due to network or equipment issues, it can be retried by entering the barcode at the station after inspection. At this time, the adsorption execution unit 1 cannot perform vacuum suction or vacuum breaking via the mode switching button 19, i.e., it is in a malfunctioning state.

[0045] When the scanning is triggered during the operation, the buzzer tri-color light 210 turns yellow, and the host computer software displays the parameters to be sent. The host computer software processes the adsorption control parameters and transmits them to the control unit 22. After the transmission is completed, the buzzer tri-color light 210 turns green, and the host computer software displays that the adsorption action can be performed. When the three-color buzzer 210 turns green, the adsorption component 11 is initially adsorbed onto the workpiece using its own adsorption force. At this time, the vacuum cannot be immediately drawn or broken through the mode switching button 19. The pressure detection component 12 detects the adsorption pressure data of the adsorption component 11, and the angle detection component 13 detects the adsorption angle data of the adsorption component 11. The data acquisition module 23 collects the adsorption pressure data and adsorption angle data of the adsorption component 11 and transmits them to the control component 22. The control component 22 determines that when the adsorption pressure data reaches the initial adsorption pressure parameter and the adsorption angle data is ≤ the adsorption angle parameter (±3°), it means that the assembly action meets the standard. Only then can the control component 22 allow the negative pressure adjustment module 24 to be powered on to start the vacuum work. That is, after the trigger is met and the assembly action is detected to meet the standard, the control component 22 finally releases the instruction to draw or break the vacuum through the mode switching button 19 to activate the negative pressure adjustment module 24.

[0046] Before vacuuming, the vacuum solenoid valve, vacuum breaker valve, and vacuum pump are in the closed state. During vacuuming, the vacuum solenoid valve and vacuum pump (rotating forward) open simultaneously, resulting in tighter contact between the suction element 11 and the workpiece. When the control element 22 determines that the pressure value of the negative pressure detection element reaches the negative pressure parameter (e.g., range -100kPa~0kPa, reaching -30kPa; the specific pressure value matches the workpiece weight parameter; the negative pressure setting can be taken as 1.67 times the safety factor (can be tested and adjusted). Negative pressure (kPa) = 1.67 × suction cup contact area (m^2) × workpiece weight (kg) × g, where g is taken as 10N / m^2), the vacuum solenoid valve and vacuum pump close simultaneously. The workpiece is firmly suctioned, and the buzzer tri-color light 210 illuminates green. At this time, switching the mode to release vacuum or back to suction vacuum is ineffective. Power outages will not affect the vacuum level. When power is off, the buzzer tri-color light 210 illuminates red and an alarm sounds; the control element 21 status displays that the system is powered off. At this time, the power-off switching module 253 is powered by its own energy storage section and the rechargeable power supply 254. If you want to release the negative pressure, you can only do so by using the vacuum breaking double button 28 to turn off the negative pressure regulation module 24.

[0047] Similarly, when releasing a workpiece, the control unit 22 will only release the workpiece if the adsorption pressure data of the pressure detection element 12 and the adsorption element 11 reaches the negative pressure parameter (i.e., the load of the pressure detection element 12 increases by the weight parameter of the corresponding workpiece) and the adsorption angle data is ≤ (±3°) the adsorption angle parameter. Only when these conditions are met will the control unit 22 issue the final release command via the mode switch button 19 to break the vacuum. Switching to vacuum release via the mode button is only effective if the above conditions are met. After activation and triggering, the vacuum breaker valve and vacuum pump (reverse) open simultaneously to perform the release operation. During the release process, the buzzer tri-color light 210 illuminates yellow, and the host computer software displays "Release in progress." When the control unit 22 determines that the negative pressure detection element data has reached the preset release value, the buzzer tri-color light 210 illuminates green, the host computer software displays "Release complete," and the workpiece control 21 displays "Task complete." At this point, it is considered that one workpiece pick-up and drop has been completed, and the adsorption process data has been uploaded to the MES. Only then can the scanning and assembly of other workpieces continue; otherwise, the workpiece control 21 will display a message indicating that the workpiece assembly is incomplete.

[0048] The adsorption device of this application, by setting up an adsorption execution unit 1, an adsorption control unit 2, and an adsorption management unit, has pre-configured process parameters for different workpieces in the process parameter library of the adsorption management unit. The process parameters include the negative pressure parameters of the workpiece. When the adsorption element 11 adsorbs the workpiece, the pressure detection element 12 detects the adsorption pressure data of the adsorption element 11. The data acquisition module 23 collects the adsorption pressure data of the adsorption element 11 and transmits it to the control element 22. The process control unit 21 calls the corresponding process parameters of the workpiece in the process parameter library and transmits them to the control element 22. The control element 22 controls the negative pressure adjustment module 24 to adjust the adsorption pressure of the adsorption element 11 according to the adsorption pressure data of the adsorption element 11 and the process parameters of the workpiece. Thus, the control element 22 can control the negative pressure adjustment module 24 to adjust the adsorption pressure of the adsorption element 11 according to the pre-configured process parameters of the workpiece and the real-time collected adsorption pressure data of the adsorption element 11, so that the adsorption pressure of the adsorption element 11 corresponds to the process parameters of the workpiece itself when each workpiece is adsorbed by the adsorption element 11. This avoids the adsorption pressure being too high, making it difficult to release the workpiece, leaving marks or damage to the workpiece, and avoids the adsorption pressure being too low, causing the workpiece to fall and be damaged. Meanwhile, the adsorption device has power failure and gas failure protection functions to effectively prevent the workpiece from falling after adsorption; and the adsorption process has judgment of successful pick-up and put-down, process constraints and operation data control, which can effectively prevent mistakes and facilitate regular maintenance and management.

[0049] Example 2 This application provides an adsorption method applicable to the adsorption apparatus as described in Example 1, such as... Figure 5 As shown, and includes the following steps: S1: The adsorption element 11 adsorbs the workpiece, and at the same time the pressure detection element 12 detects the adsorption pressure data of the adsorption element 11. S2: The data acquisition module 23 acquires the adsorption pressure data of the adsorption element 11 and transmits it to the control element 22; S3: The control component 21 calls the corresponding workpiece's process parameters from the process parameter library and transmits them to the control component 22; S4: The control unit 22 controls the negative pressure adjustment module 24 to adjust the adsorption pressure of the adsorption unit 11 according to the adsorption pressure data of the adsorption unit 11 and the process parameters of the workpiece.

[0050] The adsorption method of this application, by setting up an adsorption execution unit 1, an adsorption control unit 2, and an adsorption management unit, pre-configures process parameters for different workpieces in the process parameter library of the adsorption management unit. The process parameters include the negative pressure parameters of the workpiece. When the adsorption element 11 adsorbs the workpiece, the pressure detection element 12 detects the adsorption pressure data of the adsorption element 11. The data acquisition module 23 acquires the adsorption pressure data of the adsorption element 11 and transmits it to the control element 22. The process control unit 21 calls the corresponding process parameters of the workpiece in the process parameter library and transmits them to the control element 22. The control element 22 controls the negative pressure adjustment module 24 to adjust the adsorption pressure of the adsorption element 11 according to the adsorption pressure data of the adsorption element 11 and the process parameters of the workpiece. Thus, the control element 22 can control the negative pressure adjustment module 24 to adjust the adsorption pressure of the adsorption element 11 according to the pre-configured process parameters of the workpiece and the real-time acquired adsorption pressure data of the adsorption element 11, so that the adsorption pressure of the adsorption element 11 corresponds to the process parameters of the workpiece itself when each workpiece is adsorbed by the adsorption element 11. This avoids the adsorption pressure being too high, making it difficult to release the workpiece, leaving marks or damage to the workpiece, and avoids the adsorption pressure being too low, causing the workpiece to fall and be damaged. Meanwhile, the adsorption device has power failure and gas failure protection functions to effectively prevent the workpiece from falling after adsorption; and the adsorption process has judgment of successful pick-up and put-down, process constraints and operation data control, which can effectively prevent mistakes and facilitate regular maintenance and management.

[0051] Example 3 This application provides a maintenance method for an adsorption device, applicable to an adsorption device as shown in Example 1, such as... Figure 6 As shown, and includes the following steps: S1: The maintenance preset value of the components configured in the maintenance task order generation module for adsorption execution unit 1 and adsorption control unit 2, wherein the maintenance preset value is the product of the reliability life of the corresponding component and the reliability life risk assessment coefficient. S2: The control unit 22 monitors and statistically analyzes the usage time or number of changes of the components of the adsorption execution unit 1 and the adsorption control unit 2 respectively; S3: When the usage time or number of changes is greater than or equal to the maintenance preset value, the maintenance task order generation module generates the corresponding maintenance task order for the component.

[0052] The maintenance method for the adsorption device according to this application includes a component maintenance unit connected to the control unit 22. This component maintenance unit comprises a connected component lifespan database and a maintenance task generation module. The component lifespan database contains the theoretical lifespan, reliability lifespan, and reliability lifespan risk assessment coefficients of the components of the adsorption execution unit 1 and the adsorption control unit 2, where the reliability lifespan is a percentage of the theoretical lifespan. The maintenance task generation module contains preset maintenance values ​​for the components of the adsorption execution unit 1 and the adsorption control unit 2, where the preset maintenance value is the product of the corresponding component's reliability lifespan and the reliability lifespan risk assessment coefficient. The control unit 22 monitors and statistically analyzes the usage time or number of changes of the components of the adsorption execution unit 1 and the adsorption control unit 2. When a workpiece is picked up and placed, the control unit 21 transmits the process statistics to the maintenance task sheet generation module. The maintenance task sheet generation module calculates that when the usage time or number of changes is greater than or equal to the preset maintenance value, it automatically generates a maintenance task sheet for the corresponding component and gives it to the technician. The technician then performs the maintenance task for the corresponding component. Thus, the maintenance method of the adsorption device in this application facilitates the life management of the components of the adsorption execution unit 1 and the adsorption control unit 2 and realizes the function of regular maintenance.

[0053] The above provides a detailed description of the adsorption device, adsorption method, and maintenance method of the adsorption device provided in this application. Specific examples have been used to illustrate the principles and implementation methods of this application. The descriptions of the embodiments above are only for the purpose of helping to understand the method and core ideas of this application. It should be noted that those skilled in the art can make several improvements and modifications to this application without departing from the principles of this application, and these improvements and modifications also fall within the protection scope of this application.

Claims

1. An adsorption device, characterized in that, The device includes an adsorption execution unit (1), an adsorption control unit (2), and an adsorption management unit. The adsorption execution unit (1) includes an adsorption element (11) and a pressure detection element (12) connected to each other. The adsorption control unit (2) includes a workpiece control element (21), a control element (22), a data acquisition module (23), and a negative pressure adjustment module (24) connected to each other. The adsorption element (11) is used to adsorb workpieces and is connected to the negative pressure adjustment module (24). The pressure detection element (12) is connected to the data acquisition module (23). The adsorption control unit is connected to the control unit (21) and includes a process parameter library for the workpiece. The process parameter library is configured with process parameters for different workpieces, including the negative pressure parameter of the workpiece. When the adsorption element (11) adsorbs the workpiece, the pressure detection element (12) detects the adsorption pressure data of the adsorption element (11), the data acquisition module (23) collects the adsorption pressure data of the adsorption element (11) and transmits it to the control element (22), the process control element (21) calls the corresponding process parameters of the workpiece in the process parameter library and transmits them to the control element (22), and the control element (22) controls the negative pressure adjustment module (24) to adjust the adsorption pressure of the adsorption element (11) according to the adsorption pressure data of the adsorption element (11) and the process parameters of the workpiece.

2. The adsorption device according to claim 1, characterized in that, The adsorption execution unit (1) also includes an angle detection element (13) connected to the data acquisition module (23), and the process parameters also include the initial adsorption pressure parameter and adsorption angle parameter of the workpiece; When the adsorption element (11) adsorbs the workpiece, the angle detection element (13) detects the adsorption angle data of the adsorption element (11), the data acquisition module (23) acquires the adsorption angle data of the adsorption element (11) and transmits it to the control element (22), and the control element (22) controls the start and stop of the negative pressure adjustment module (24) according to the adsorption pressure data of the adsorption element (11), the initial adsorption pressure parameter of the workpiece, the adsorption angle data of the adsorption element (11), and the adsorption angle parameter of the workpiece.

3. The adsorption device according to claim 1, characterized in that, The adsorption control unit (2) further includes a control circuit module (25) that supplies power to the control unit (21) and the negative pressure regulation module (24). The control circuit module (25) includes a power supply module (251), a power conversion module (252), a power-off switching module (253), and a rechargeable power supply (254). The power supply module (251) is connected to the power conversion module (252), the power conversion module (252) is connected to the power-off switching module (253), and the power-off switching module (253) is connected to the rechargeable power supply (254).

4. The adsorption device according to claim 1, characterized in that, The adsorption execution unit (1) further includes a first housing (14), a first connector (15), a second connector (16), a buffer (17), and a first connector (18). The first housing (14) includes a first cavity (141). The pressure detection element (12), the second connector (16), and the buffer (17) are disposed in the first cavity (141). One end of the first connector (15) extends out of the first end of the first cavity (141) to detachably connect to the adsorption element (11). The first connector (18) is connected to the second end of the first cavity (141) and extends out of the first cavity (141). The first connector (15) and the second connector (16) have air passage holes (161) that communicate with the adsorption member (11) and the first cavity (141). The first end of the second connector (16) is fixedly connected to the first connector (15), and the second end is inserted into the pressure detection member (12). The buffer member (17) includes a connecting post (171) and an elastic member (172). The first end of the connecting post (171) is fixedly connected to the first connector (15), and the second end is inserted into the pressure detection member (12). The elastic member (172) is connected between the first connector (15) and the pressure detection member (12). The adsorption control unit (2) further includes a second housing (26), a second cover (261), a second connector (27), a signal cable, and a gas path cable. The second housing (26) includes a partition (262) and a second cavity (263) and a third cavity (264) divided by the partition (262). The second cover (261) covers the second cavity (263) and the third cavity (264). The first connector (18) and the second connector (27) connect the signal cable and the gas path cable. The negative pressure adjustment module (24) is disposed in the second cavity (263). The control component (22) and the data acquisition module (23) are disposed in the third cavity (264). The control component (21) is disposed in the second cover (261).

5. The adsorption device according to claim 4, characterized in that, The adsorption execution unit (1) further includes a mode switching button (19), and the first housing (14) further includes a first cover (142) covering the first cavity (141). The mode switching button (19) is disposed on the first cover (142). The mode switching button (19) includes a button body and a contactor connected together. The button body is disposed on the outer wall of the first cover (142). The contactor is connected to the control component (22) through a signal cable. The signal cable passes through the first cavity (141), the first connector (18), the second connector (27), the second cavity (263), the partition (262), and the third cavity (264).

6. The adsorption device according to claim 4, characterized in that, The adsorption control unit (2) further includes a vacuum breaking double button (28) and a buzzer tricolor light (210). The vacuum breaking double button (28) is connected to the control component (22), and the buzzer tricolor light (210) is connected to the control component (21) and the control component (22). The second housing (26) further includes a second cover (261) covering the second cavity (263) and the third cavity (264). The control component (21) includes connected host computer software and a display screen (211). The display screen (211), the vacuum breaking double button (28), and the buzzer tricolor light (210) are disposed on the outer wall of the second cover (261).

7. The adsorption device according to claim 4, characterized in that, The negative pressure regulating module (24) includes an intake end (241), a vacuum pump, a vacuum solenoid valve, a vacuum breaking valve, and a negative pressure detection device. The intake end (241) is connected to the vacuum pump and the second connector (27). The vacuum pump is connected to the vacuum solenoid valve, the vacuum breaking valve, and the negative pressure detection device. The vacuum solenoid valve is a power-off retention type. The negative pressure detection device is connected to the data acquisition module (23).

8. The adsorption device according to any one of claims 1-7, characterized in that, It also includes a component maintenance unit connected to the control unit (22). The control unit (22) monitors and counts the usage time or number of changes of the components of the adsorption execution unit (1) and the adsorption control unit (2). The component maintenance unit includes a component lifespan library and a maintenance task generation module connected to each other. The component lifespan library is configured with the theoretical lifespan, reliability lifespan and reliability lifespan risk assessment coefficient of the components of the adsorption execution unit (1) and the adsorption control unit (2). The reliability lifespan is a percentage of the theoretical lifespan. The maintenance task generation module generates a maintenance task based on the reliability lifespan, the reliability lifespan risk assessment coefficient and the usage time or number of changes of the components of the adsorption execution unit (1) and the adsorption control unit (2).

9. An adsorption method, characterized in that, Applied to the adsorption device as described in any one of claims 1-8, and comprising the following steps: The adsorption element (11) adsorbs the workpiece, while the pressure detection element (12) detects the adsorption pressure data of the adsorption element (11); The data acquisition module (23) acquires the adsorption pressure data of the adsorption element (11) and transmits it to the control element (22); The control component (21) calls the corresponding process parameters of the workpiece in the process parameter library and transmits them to the control component (22). The control unit (22) controls the negative pressure adjustment module (24) to adjust the adsorption pressure of the adsorption unit (11) according to the adsorption pressure data of the adsorption unit (11) and the process parameters of the workpiece.

10. A maintenance method for an adsorption device, characterized in that, Applied to the adsorption device as described in claim 8, and comprising the following steps: The maintenance preset value of the components configured in the maintenance task order generation module for the adsorption execution unit (1) and the adsorption control unit (2) is wherein the maintenance preset value is the product of the reliability life of the corresponding component and the reliability life risk assessment coefficient. The control unit (22) monitors and statistically analyzes the usage time or number of changes of the components of the adsorption execution unit (1) and the adsorption control unit (2); When the usage time or number of changes is greater than or equal to the maintenance preset value, the maintenance task order generation module generates a corresponding maintenance task order for the component.

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