Method for manufacturing diamond-like carbon film

Abstract

The method for manufacturing a diamond-like carbon film according to the present invention includes: preparing a diamond-like carbon film using physical vapor deposition; injecting nitrogen and / or oxygen gas into the surface of the diamond-like carbon film under negative pressure to form oxides and / or nitrous oxides; and treating the diamond-like carbon film in a water vapor environment. This method is simple and efficient, effectively improving the surface hydrophilicity of the diamond-like carbon film, enhancing its interaction with lubricating liquids or materials, thereby improving lubrication performance, reducing frictional loss, and extending the service life of mechanical components. In the biomedical field, it can reduce bioattachment and cell adsorption, reducing the risk of infection and benefiting the application and biocompatibility of biomedical devices.

Description

Technical Field

[0001] This invention relates to the field of film processing, and more particularly to a method for manufacturing a diamond-like carbon film. Background Technology

[0002] Diamond-like carbon (DLC) films are rigid thin films composed of carbon elements and are widely used in machinery, tools, automobiles, and other fields. However, in some applications, the poor hydrophilicity of DLC films can cause problems. For example, the poor surface hydrophilicity of DLC films leads to insufficient interaction between them and lubricating fluids or materials, resulting in increased frictional wear and affecting the service life of mechanical parts. In the biomedical field, the poor hydrophilicity of DLC films can easily cause bioadhesion and cell adsorption, increasing the risk of infection.

[0003] Therefore, improving the hydrophilicity of diamond-like carbon films has become one of the current research hotspots, and it is necessary to provide an improved method for manufacturing diamond-like carbon films to overcome the above defects. Summary of the Invention

[0004] The purpose of this invention is to provide an improved method for manufacturing a diamond-like carbon film. This method is simple and efficient, and can effectively improve the surface hydrophilicity of the diamond-like carbon film, improve its interaction with lubricating liquids or materials, thereby improving lubrication performance, reducing friction loss, and extending the service life of mechanical parts. In the biomedical field, it can reduce bioadhesion and cell adsorption, reduce the risk of infection, and is beneficial to the application and biocompatibility of biomedical devices.

[0005] To achieve the above objectives, the method for manufacturing a diamond-like carbon film of the present invention includes the following steps:

[0006] Cobalt-like carbon films were prepared using physical vapor deposition.

[0007] Under negative pressure, nitrogen and / or oxygen gases are injected into the surface of the diamond-like carbon film to form oxides and / or nitrous oxides; and

[0008] The diamond-like carbon film was treated in a water vapor environment.

[0009] Compared with existing technologies, the manufacturing method of this invention uses gases such as nitrogen and oxygen to form an oxide or nitride surface layer on the surface of the carbon-cobalt-like film, thereby improving the hydrophilicity of the carbon-cobalt-like film surface. Subsequent water vapor treatment can homogenize the surface of the carbon-cobalt-like film, further improving its hydrophilicity. This improves the interaction between the film and lubricating liquids or materials, thereby enhancing lubrication performance, reducing frictional loss, and extending the service life of mechanical components. In the biomedical field, it can reduce bioattachment and cell adsorption, reducing the risk of infection and benefiting the application and biocompatibility of biomedical devices. This method is simple and easy to implement, does not use complex or expensive equipment and reagents, and is suitable for large-scale production and application.

[0010] As one embodiment, the preparation of the diamond-like carbon film includes: controlling the initial pressure of the chamber to be 2 × 10⁻⁶. -3 -3×10 -3 Pa, the carbon source for evaporation is aromatic gaseous carbon, and the auxiliary electrode is stainless steel.

[0011] As an example, the preparation of the diamond-like carbon film further includes: controlling the ion-assisted source power to be 250-300W and the arc power to be 15-20W.

[0012] As one example, the pressure in the control chamber is 5 × 10⁻⁶. -3 -6×10 -3 Pa, under this negative pressure environment, the nitrogen and / or oxygen gas is injected.

[0013] Preferably, the nitrogen and / or oxygen gas is injected over a period of 30-45 minutes.

[0014] Preferably, the treatment of the diamond-like carbon film in a water vapor environment includes controlling the temperature of the water vapor to 110-120°C.

[0015] Preferably, the treatment of the diamond-like carbon film in a water vapor environment includes controlling the humidity of the water vapor to 90%-95%.

[0016] As one embodiment, after the diamond-like carbon film is treated in a water vapor environment, it further includes rinsing the diamond-like carbon film with nitrogen and rinsing it with deionized water. Detailed Implementation

[0017] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific implementation methods of this application are described in detail below with reference to some embodiments. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0018] In the description of this application, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0019] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0020] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0021] The method for manufacturing the diamond-like carbon film of the present invention will be further described below with reference to embodiments, but this does not limit the present invention. The method of the present invention aims to provide a simple and efficient method for manufacturing a diamond-like carbon film, which can effectively improve the surface hydrophilicity of the diamond-like carbon film, improve its interaction with lubricating liquids or materials, thereby improving lubrication performance, reducing frictional loss, and extending the service life of mechanical parts; in the biomedical field, it can reduce bioattachment and cell adsorption, reduce the risk of infection, and is beneficial to the application and biocompatibility of biomedical devices.

[0022] In one embodiment of the method for manufacturing the diamond-like carbon film of the present invention, the following steps are included:

[0023] Cobalt-like carbon films were prepared using physical vapor deposition.

[0024] Under negative pressure, nitrogen and / or oxygen gases are injected into the surface of the diamond-like carbon film to form oxides and / or nitrous oxides; and

[0025] The diamond-like carbon film was treated in a water vapor environment.

[0026] In the manufacturing method of this invention, nitrogen, oxygen, and other gases can form an oxide or nitride surface layer on the surface of the carbon-cobalt-like film, thereby improving the hydrophilicity of the carbon-cobalt-like film surface. Subsequent water vapor treatment can homogenize the surface of the carbon-cobalt-like film, further improving its hydrophilicity. This improves the interaction between the film and lubricating liquids or materials, thereby enhancing lubrication performance, reducing frictional loss, and extending the service life of mechanical components. In the biomedical field, it can reduce bioattachment and cell adsorption, reducing the risk of infection and benefiting the application and biocompatibility of biomedical devices. This method is simple and easy to implement, does not use complex or expensive equipment and reagents, and is suitable for large-scale production and application, further promoting its expanded application in various fields.

[0027] Specifically, in one particular embodiment, a diamond-like carbon film is first prepared. Specifically, the diamond-like carbon film is prepared using physical vapor deposition. Specifically, the initial pressure of the chamber is controlled to be 2 × 10⁻⁶. -3 -3×10 -3 Pa, the carbon source for evaporation is pure aromatic gaseous carbon, and the auxiliary electrode is stainless steel. The power of the ion-assisted source is controlled at 250-300W, and the arc power is 15-20W. Thus, a cobalt-like carbon film of predetermined size is prepared.

[0028] Next, the surface of the diamond-like carbon film is cleaned to remove any surface impurities. Optionally, any suitable surface cleaning process, such as chemical bath or plasma cleaning, can be used in the surface cleaning step.

[0029] Next, gas was injected onto the surface of the diamond-like carbon film. The pressure in the chamber was controlled at 5 × 10⁻⁶. -3 -6×10 -3 Under this negative pressure environment, nitrogen and / or oxygen gas are injected for a period of 30-45 minutes to form oxides and / or nitrous oxides, thereby effectively improving its hydrophilicity.

[0030] Subsequently, the prepared diamond-like carbon film was placed in a steam environment, with the steam temperature controlled at 110-120℃ and the humidity at 90%-95%. The film was treated under these conditions for 1-2 hours, then removed and rinsed thoroughly with nitrogen, followed by rinsing with deionized water and drying. After treatment, the surface properties of the diamond-like carbon film, such as roughness and contact angle, were tested. The results showed that the hydrophilicity of the post-treatment film was significantly improved, and the contact angle decreased from 110° to below 50°; simultaneously, its surface roughness was also improved to some extent.

[0031] Therefore, in the manufacturing method of this invention, nitrogen, oxygen, and other gases can form an oxide or nitride surface layer on the surface of the carbon-cobalt-like film, thereby improving the hydrophilicity of the carbon-cobalt-like film surface. Subsequent water vapor treatment can homogenize the surface of the carbon-cobalt-like film, further improving its hydrophilicity. This improves the interaction between the film and lubricating liquids or materials, thereby enhancing lubrication performance, reducing frictional loss, and extending the service life of mechanical components. In the biomedical field, it can reduce bioattachment and cell adsorption, reducing the risk of infection and benefiting the application and biocompatibility of biomedical devices. This method is simple and easy to implement, does not use complex or expensive equipment and reagents, and is suitable for large-scale production and application.

[0032] The above-disclosed embodiments are merely preferred embodiments of the present invention and should not be construed as limiting the scope of the present invention. Therefore, any equivalent variations made in accordance with the claims of the present invention are still within the scope of the present invention.

Claims

1. A method for manufacturing a diamond-like carbon film, characterized in that, Includes the following steps: Cobalt-like carbon films were prepared using physical vapor deposition. Under negative pressure, nitrogen and / or oxygen gases are injected into the surface of the diamond-like carbon film to form oxides and / or nitrous oxides; and The diamond-like carbon film was treated in a water vapor environment.

2. The method for manufacturing a diamond-like carbon film as described in claim 1, characterized in that, The preparation of the diamond-like carbon film includes: controlling the initial pressure of the chamber to be 2 × 10⁻⁶. -3 -3×10 -3 Pa, the carbon source for evaporation is aromatic gaseous carbon, and the auxiliary electrode is stainless steel.

3. The method for manufacturing a diamond-like carbon film as described in claim 1, characterized in that, The preparation of the diamond-like carbon film also includes: controlling the ion-assisted source power to be 250-300W and the arc power to be 15-20W.

4. The method for manufacturing a diamond-like carbon film as described in claim 1, characterized in that, The pressure in the control chamber is 5 × 10 -3 -6×10 -3 Pa, under this negative pressure environment, the nitrogen and / or oxygen gas is injected.

5. The method for manufacturing a diamond-like carbon film as described in claim 4, characterized in that, The injection time for the nitrogen and / or oxygen gas is 30-45 minutes.

6. The method for manufacturing a diamond-like carbon film as described in claim 1, characterized in that, The treatment of the diamond-like carbon film in a water vapor environment includes controlling the temperature of the water vapor to 110-120℃.

7. The method for manufacturing a diamond-like carbon film as described in claim 1, characterized in that, The treatment of the diamond-like carbon film in a water vapor environment includes controlling the humidity of the water vapor to 90%-95%.

8. The method for manufacturing a diamond-like carbon film as described in claim 1, characterized in that, After the diamond-like carbon film is treated in a steam environment, it is further rinsed with nitrogen and then rinsed with deionized water.