Layered manual micro-nano displacement platform

Abstract

The utility model discloses a layer structure type manual micro-nano displacement platform which comprises a substrate layer, a motion transformation layer and an output layer which are sequentially stacked from bottom to top. The base layer comprises a base plate, the base plate supports the motion transformation layer through a crossed roller assembly, the motion transformation layer comprises a transformation layer frame, a micro-motion adjustment switching mechanism and a core motion platform which are of an integrated structure, a first input micrometer head transversely drives the transformation layer frame, and a second input micrometer head longitudinally drives the micro-motion adjustment switching mechanism; the output layer comprises an output layer frame and an output platform which are of an integrated structure, the output layer frame is connected with the transformation layer frame, and the output platform is connected with the output layer frame through a supporting hinge mechanism and connected with the core motion platform. The micro-nano displacement platform is formed through stacking assembly, the assembly is simple, the precision is easy to guarantee, the overall structure is compact, the cost is low, and the application range is wide; meanwhile, the large-stroke high-efficiency output and nanoscale high-sensitivity adjusting functions are achieved, the adjusting precision is continuously increased along with input, and the subjective precision adjusting trend is met.

Description

Technical Field

[0001] The utility model relates to the technical field of micro-driving mechanisms, in particular to a layered manual micro-nano displacement platform. Background Art

[0002] Micro-nano positioning can achieve micron-level or nano-level positioning. Since the 21st century, with the development of science and technology, the application of micro-nano positioning systems has become more and more extensive, and has been reflected in the fields of aerospace, mechanical electronics, medical and health care, and daily life. With the development of bioengineering, space optics, microelectronics manufacturing, ultra-precision machining, nanotechnology and other fields, the positioning system is required to have a large stroke and high sensitivity micro-displacement output;

[0003] Existing nanopositioning platforms generally use ceramic drivers to achieve horizontal micro-motion output. The output can reach the nanometer level and meet high sensitivity requirements. However, due to structural principle limitations, there is a problem of limited travel. In addition, this type of positioning platform needs to be configured with electronic control and power supply, and has a complex structure, cumbersome assembly, high assembly precision requirements, high cost, and limited application range. In view of this, the micro-drive field is in urgent need of a manual platform with micro-displacement output with micrometer-level large travel and nanometer-level sensitivity. Utility Model Content

[0004] The purpose of the utility model is to overcome the defects of the prior art and provide a layered manual micro-nano displacement platform to solve one or more problems raised in the above-mentioned background technology.

[0005] In order to achieve the above purpose, the technical solution of the utility model is as follows:

[0006] A layered manual micro-nano displacement platform, used for outputting micron-level travel and nanometer-level adjustment displacement in the lateral direction, comprises a base layer, a motion conversion layer and an output layer stacked in sequence from bottom to top;

[0007] The base layer includes a base plate, two groups of cross roller assemblies are arranged in parallel along the output direction on the base plate, a first input differential head is fixed at one end of the base plate, and the first input differential head is arranged in the transverse direction and is used to input micron-level displacement along the output direction;

[0008] The motion conversion layer includes a conversion layer frame, a micro-adjustment conversion mechanism and a core motion platform of an integrated structure. The micro-adjustment conversion mechanism is connected to the core motion platform, and both are located inside the conversion layer frame; the conversion layer frame is supported and guided by a cross roller assembly directly below it, and a push rod of a first input differential head drives and connects to the end face of the conversion layer frame, driving the conversion layer frame to slide in the output direction at the micron level; a second input differential head is provided on one side of the motion conversion layer, and the second input differential head is provided in the longitudinal direction, connected to the micro-adjustment conversion mechanism, and inputs a micron-level displacement perpendicular to the output direction, and the micro-adjustment conversion mechanism is used to commutate and reduce the micron-level displacement, driving the core motion platform to output a nanometer-level adjustment displacement in the output direction;

[0009] The output layer includes an output layer frame with an integrated structure and an output platform located in the output layer frame. The output layer frame is fixedly connected to the transformation layer frame to synchronize the micron-level sliding stroke. The output platform is connected to the inner frame surface of the output layer frame by a supporting hinge mechanism, and the output platform is fixedly connected to the core motion platform located directly below it to synchronize the output of nanometer-level adjustment displacement.

[0010] Preferably, the micro-adjustment conversion mechanism includes an input platform, a guide beam group and a transmission flexible inclined beam. The input platform includes two guide parts and an output part. The two guide parts are symmetrically located on both sides of the core motion platform and are connected to the inner frame surfaces on both sides of the transformation layer frame through the guide beam group, so as to guide the input platform to move in a longitudinal straight line. The output part is arranged in the longitudinal direction, and its two ends are respectively connected to one side end of the two guide parts; one end of the transmission flexible inclined beam is connected to the core motion platform, and the other end is connected to the output part, and the other end of the transmission flexible inclined beam is offset along the input direction of the second input differential head, so that the transmission flexible inclined beam forms an initial angle less than 90° with the longitudinal direction; the second input differential head is connected to one of the guide parts to input micron-level displacement.

[0011] More preferably, the guide beam group includes an asymmetrically arranged first guide beam and a second guide beam, the guide portion has a U-shaped hole opened in the transverse direction, the first guide beam connects one side end of the guide portion and one side inner frame surface of the transformation layer frame, and the second guide beam connects the bottom surface of the U-shaped hole and the other side inner frame surface of the transformation layer frame.

[0012] Further preferably, the supporting hinge mechanism comprises two groups of flexible hinge groups respectively arranged at both ends of the output platform, the flexible hinge groups are composed of two symmetrically arranged guide flexible beams, the guide flexible beams are arranged longitudinally, one end of which is connected to the end face of the output platform, and the other end is connected to the lateral inner frame face of the output layer frame, and is used to guide the output platform to move linearly along the lateral direction.

[0013] Further preferably, the displacement platform also includes a sealing frame for covering the gap around the output platform. A circle of frame grooves is provided on the upper edge of the inner frame of the output layer frame. The sealing frame is fixedly installed in the frame groove. A step edge is provided around the output platform. The sealing frame extends to cover the step edge and the guide flexible beam. A displacement gap is reserved between the sealing frame and the two end surfaces of the output platform, and the storage surface of the output platform is higher than the sealing frame.

[0014] Further preferably, a return spring is provided on the base plate, and the return spring is arranged in the transverse direction, and one end of the return spring close to the first input differential head is connected to the base plate by a screw, and the other end of the return spring is fixedly connected to the transformation layer frame by a screw.

[0015] Further preferably, the back plane of the output platform is provided with four strain grooves, which are close to the root of the guide flexible beam, and strain gauges are pasted inside the strain grooves for measuring the strain of the guide flexible beam.

[0016] Compared with the prior art, the layered manual micro-nano displacement platform of the utility model is formed by stacking and fixing an output layer, a motion conversion layer and a base layer in an integrated structure. The assembly is simple and easy, the assembly accuracy is easy to ensure, and the overall structure is compact, the cost is low, and the application range is wide. The motion conversion layer can support bidirectional input, and it can perform micron-level large-stroke movement according to the precise input of the input differential head arranged along the output direction, and perform motion conversion and multiple reduction on the input perpendicular to the output direction to form a nanometer-level adjustment displacement along the output direction. Therefore, the micro-nano displacement platform has the functions of large-stroke efficient output and nanometer-level high-sensitivity adjustment, and the adjustment accuracy increases with the input, that is, the object is roughly adjusted to approach the target through a lower adjustment accuracy, thereby improving the adjustment efficiency, and reducing the distance error between the object and the target coordinates by continuously increasing the adjustment accuracy, which meets the subjective adjustment accuracy trend requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is an assembly stereogram of a layered manual micro-nano displacement platform exemplified by the present utility model;

[0018] Figure 2 It is an exploded stereoscopic diagram of parts of a layered manual micro-nano displacement platform exemplified by the present utility model;

[0019] Figure 3 for Figure 2 Top view of the output layer.

[0020] Figure 4 for Figure 2 Top view of the middle motion transformation layer;

[0021] Figure 5 for Figure 2 A three-dimensional diagram of the structure of the mid-basal layer.

[0022] In the figure: 1. output layer; 11. output layer frame; 111. frame groove; 12. output platform; 13. guide flexible beam; 2. motion transformation layer; 21. transformation layer frame; 22. input platform; 221. guide part; 222. output part; 23. core motion platform; 231. pin hole; 24. transmission flexible inclined beam; 25. first guide beam; 26. second guide beam; 3. base layer; 31. base plate; 32. reset spring; 33. cross roller assembly; 4. first input differential head; 41. first bracket; 5. second input differential head; 51. second bracket; 6. sealing frame. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only the best embodiments of the utility model, not all embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] like Figure 1-Figure 5 The layered manual micro-nano displacement platform shown in the figure is used for manual horizontal input of travel and micro-adjustment, with micron-level travel and nanometer-level adjustment displacement output along the lateral direction (i.e., x-direction). In order to simplify assembly, the displacement platform is stacked and assembled in a modular structure, such as Figure 1-Figure 2 As shown, the displacement platform is composed of a base layer 3, a motion conversion layer 2 and an output layer 1 stacked in sequence from bottom to top;

[0025] like Figure 2 and Figure 5 As shown, the base layer 3 includes a base plate 31, which serves as the support base of the platform and the output guide of the large horizontal stroke. Both sides of the base plate 31 are provided with mounting steps for mounting two sets of cross roller assemblies 33. The cross roller assemblies 33 are arranged in parallel along the output direction, and one guide rail thereof is fixedly mounted on the side of the mounting step; a first input differential head 4 is fixedly mounted at one end of the base plate 31 through a first bracket 41. The first input differential head 4 is arranged in the horizontal direction and is used to input micron-level displacement along the output direction;

[0026] The motion transformation layer 2 receives the input of large stroke and micro displacement, and converts the direction and reduces the micro displacement by multiples to form a nanometer-level adjustment displacement output, such as Figure 2 and Figure 4As shown, the motion conversion layer 2 is a conversion layer frame 21, a micro-adjustment conversion mechanism and a core motion platform 23 of an integrated structure formed by warp cutting; the two lower end edges of the conversion layer frame 21 extend downward to form two limit wing plates, and the other guide rail of the cross roller assembly 33 is fixed on the inner side of the limit wing plate, thereby forming a limit and motion guide for the lateral sliding of the conversion layer frame 21, and the push rod of the first input differential head 4 is pressed on the end face of the conversion layer frame 21, and the micron-level displacement is accurately input through the first input differential head 4, and the push rod directly drives the conversion layer frame 21 to move in the output direction The output layer 1 that moves synchronously with the transformation layer frame 21 and slides with a long micron-level stroke of equal length obtains a micron-level displacement output; in addition, a reset spring 32 is provided on the base plate 31, and the reset spring 32 is arranged in the transverse direction, and one end of the reset spring 32 close to the first input differential head 4 is connected to the base plate 31 by a screw, and the other end of the reset spring 32 is fixedly connected to the transformation layer frame 21 by a screw. Under the action of the spring tension, the transformation layer frame 21 and the push rod of the first input differential head 4 are always kept in a pressed contact state, and when the first input differential head 4 is withdrawn, the transformation layer frame 21 is driven to automatically reset;

[0027] Among them, the core motion platform 23 is used as the output terminal of the micro-adjustment conversion motion, which is arranged in the transformation layer frame 21 and is located on the longitudinal symmetric midline of the displacement platform. Since the core motion platform 23 is fixedly connected to the output platform 12, its longitudinal (i.e., y-direction) motion freedom is limited; the micro-adjustment conversion mechanism is used to reverse and reduce the micro-displacement, and the second input differential head 5 is arranged on one side of the transformation layer frame 21 along the longitudinal direction, and its push rod passes through the transformation layer frame 21 and drives the micro-adjustment conversion mechanism to input a micron-level displacement perpendicular to the output direction, and the micro-adjustment conversion mechanism drives the core motion platform 23 to output a nano-level adjustment displacement along the output direction;

[0028] As a specific implementation of the micro-adjustment conversion mechanism, Figure 2 and Figure 4 As shown, the micro-adjustment conversion mechanism includes an input platform 22, a guide beam group and a transmission flexible inclined beam 24. The input platform 22 is used as a rigid carrier for motion input and a supporting body for each flexible beam. Two guide parts 221 and an output part 222 are formed by wire cutting. The output part 222 is arranged along the longitudinal direction, and its two ends are respectively connected to one side end of the two guide parts 221. In the non-input state, the two guide parts 221 are symmetrical structures with the longitudinal symmetry center line as the symmetry center, and are symmetrically located on both sides of the core motion platform 23. The second input differential head 5 is connected to one of the guide parts 221 to input micron-level displacement.

[0029] A rectangular cavity is formed between the two guide parts 221, the output part 222 and the side surface of the transformation layer frame 21. In order to obtain a wider output range, the horizontal length of the rectangular cavity should be as long as possible, so that a transmission flexible inclined beam 24 of sufficient length can be set between the core motion platform 23 and the output part 222. Since the core motion platform 23 only has the freedom of movement in the horizontal direction, the input platform 22 moves slightly in the longitudinal direction under the longitudinal input of the second input differential head 5, and one end of the transmission flexible inclined beam 24 moves synchronously with the output part 222, stretching and driving the core motion platform 23 at the other end thereof to move slightly in the horizontal direction; the other end of the transmission flexible inclined beam 24 is offset along the input direction of the second input differential head 5, so that the transmission flexible inclined beam 24 forms an initial angle θ of less than 90° with the longitudinal direction, that is, a preset initial reduction factor tanθ. With the input of the second input differential head 5, the initial angle increases continuously, the reduction factor increases, and the adjustment accuracy becomes higher and higher. This trend meets the precision control requirements of manual adjustment and is conducive to improving positioning accuracy.

[0030] Refer again Figure 4 , a guide beam group connecting the inner frame surfaces on both sides of the transformation layer frame 21 and the input platform 22. In order to guide the input platform 22 with a wider input range under the limited lateral size in the transformation layer frame 21, the guide beam group includes a first guide beam 25 and a second guide beam 26 that are arranged in the lateral direction and are not symmetrical. The first guide beam 25 and the second guide beam 26 are parallel and of equal length, and are staggered at both ends of the guide portion 221. In order to obtain a sufficiently long first guide beam 25 and a second guide beam 26 as much as possible, the guide portion 221 is designed as a U-shaped structure, and a U-shaped cavity in the middle is formed by warp cutting. One end of the second guide beam 26 is connected to the bottom surface of the U-shaped cavity, and the other end is connected to the other side of the inner frame surface of the transformation layer frame 21. The first guide beam 25 is connected to one side end of the guide portion 221, and the other end is connected to the one side inner frame surface of the transformation layer frame 21. The two guide portions 221 and their guide beam groups are symmetrical structures, which ensure the support rigidity of the input platform 22 and improve the stability of the longitudinal linear guidance;

[0031] The output layer 1 is a load-bearing layer, which includes an output layer frame 11 of an integral structure and an output platform 12 located in the output layer frame 11. The output layer frame 11 and the transformation layer frame 21 are neatly overlapped and fixedly connected. The output platform 12 is connected to the inner frame of the output layer frame 11 through a support hinge mechanism, and the micron-level sliding stroke of the output layer frame 11 is synchronized to the output platform 12; the core motion platform 23 is located directly below the output platform 12, and the two are positioned and connected in series through three pins distributed in a triangular lattice, eliminating the assembly gap and improving the assembly accuracy. The core motion platform 23 synchronizes the nanometer-level adjustment displacement to the output platform 12 for output; in order to improve the load-bearing strength of the output platform 12, the same flexible hinge group is set at both ends of the output platform 12 for support and guidance. The flexible hinge group is composed of two guiding flexible beams 13 symmetrically arranged on the transverse symmetric midline. The guiding flexible beam 13 is arranged in the longitudinal direction, one end of which is connected to the connector formed by the extension of the end face of the output platform 12, and the other end is connected to the lateral inner frame surface of the output layer frame 11.

[0032] In this embodiment, as a further technical solution, since there is a gap between the side of the output platform 12 and the inner frame surface of the output layer frame 11, the aesthetics is insufficient, and the guiding flexible beam 13 is a thin beam structure, which is exposed to the outside and is easily damaged. The mobile platform is also provided with a sealing frame 6 for covering the gap around the output platform 12. A circle of frame grooves 111 are provided on the upper edge of the inner frame of the output layer frame 11. The sealing frame 6 is fixed in the frame groove 111 by screws. The output platform 12 is higher than the upper plane of the sealing frame 6, and a step edge is provided on its periphery. The upper end of the guiding flexible beam 13 is coplanar with the step edge plane, and the sealing frame 6 extends to the step edge and above the guiding flexible beam 13 for shielding. It should be noted that sufficient displacement gap should be reserved between the sealing frame 6 and the two end surfaces of the output platform 12 to make way for the output of lateral adjustment displacement.

[0033] In addition, in order to measure nano-motion displacement and understand the fine-tuning amount in real time, four strain gauges are arranged on the back plane of the output platform 12. The strain gauges are installed in the strain grooves opened on the back of the connector. The strain grooves are close to the roots of the guide flexible beams 13 and are used to measure the strains of each guide flexible beam 13 respectively to realize fine-tuning displacement monitoring.

[0034] The directional words such as "upper", "lower", "side", "bottom", "end", "horizontal", and "vertical" mentioned in this article are based on Figure 2 The reference coordinate system in , and Figure 1-Figure 5 The orientation or position relationship shown in the relevant drawings is described. These terms are mainly used to better describe the utility model and its embodiments, and are not used to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation; in addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance;

[0035] In addition, some of the above terms may be used to express other meanings in addition to indicating orientation or positional relationship. For example, the terms "on" and "inside" may also be used to express a certain dependency or connection relationship in some cases. For those skilled in the art, the specific meanings of these terms in this utility model can be understood according to specific circumstances.

[0036] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A layered manual micro-nano displacement platform, used to output micron-level travel and nanometer-level adjustment displacement in the lateral direction, characterized by: It includes a base layer, a motion transformation layer and an output layer which are stacked in sequence from bottom to top; The base layer comprises a base plate, on which two groups of cross roller assemblies are arranged in parallel along the output direction, and a first input differential head is fixed at one end of the base plate, the first input differential head is arranged in the transverse direction and is used to input micron-level displacement along the output direction; The motion conversion layer includes a conversion layer frame, a micro-adjustment conversion mechanism and a core motion platform of an integrated structure, the micro-adjustment conversion mechanism is connected to the core motion platform, and both are located inside the conversion layer frame; the conversion layer frame is supported and guided by the cross roller assembly directly below it, and the push rod of the first input differential head is driven to connect the end face of the conversion layer frame, driving the conversion layer frame to slide in the output direction at the micron level; a second input differential head is arranged on one side of the motion conversion layer, and the second input differential head is arranged in the longitudinal direction, which is connected to the micro-adjustment conversion mechanism and inputs a micron-level displacement perpendicular to the output direction, and the micro-adjustment conversion mechanism is used to reverse and reduce the micron-level displacement, driving the core motion platform to output a nanometer-level adjustment displacement in the output direction; The output layer includes an output layer frame of an integral structure and an output platform located in the output layer frame. The output layer frame is fixedly connected to the transformation layer frame to synchronize the micron-level sliding stroke. The output platform is connected to the inner frame surface of the output layer frame by a supporting hinge mechanism, and the output platform is fixedly connected to the core motion platform located directly below it to synchronize the output of nanometer-level adjustment displacement.

2. The layered manual micro-nano displacement platform according to claim 1, characterized in that: The micro-adjustment conversion mechanism includes an input platform, a guide beam group and a transmission flexible inclined beam. The input platform includes two guide parts and an output part. The two guide parts are symmetrically located on both sides of the core motion platform, and are connected to the inner frame surfaces on both sides of the transformation layer frame through the guide beam group, so as to guide the input platform to move linearly in the longitudinal direction. The output part is arranged in the longitudinal direction, and its two ends are respectively connected to one side end of the two guide parts; one end of the transmission flexible inclined beam is connected to the core motion platform, and the other end is connected to the output part, and the other end of the transmission flexible inclined beam is offset along the input direction of the second input differential head, so that the transmission flexible inclined beam forms an initial angle less than 90° with the longitudinal direction; the second input differential head is connected to one of the guide parts to input micron-level displacement.

3. The layered manual micro-nano displacement platform according to claim 2, characterized in that: The guide beam group includes a first guide beam and a second guide beam which are asymmetrically arranged. The guide portion has a U-shaped cavity in the transverse direction. The first guide beam connects one side end of the guide portion and one side inner frame surface of the transformation layer frame. The second guide beam connects the bottom surface of the U-shaped cavity and the other side inner frame surface of the transformation layer frame.

4. The layered manual micro-nano displacement platform according to claim 1, characterized in that: The supporting hinge mechanism comprises two groups of flexible hinge groups respectively arranged at the two ends of the output platform, and the flexible hinge groups are composed of two symmetrically arranged guiding flexible beams, which are arranged in the longitudinal direction, one end of which is connected to the end face of the output platform, and the other end is connected to the lateral inner frame face of the output layer frame, so as to guide the output platform to move linearly in the lateral direction.

5. The layered manual micro-nano displacement platform according to claim 4, characterized in that: The displacement platform also includes a sealing frame for covering the gap around the output platform. A circle of frame grooves is provided on the upper edge of the inner frame of the output layer frame. The sealing frame is fixedly installed in the frame groove. A step edge is provided around the output platform. The sealing frame extends to cover the step edge and the guide flexible beam. A displacement gap is reserved between the sealing frame and the two end surfaces of the output platform, and the storage surface of the output platform is higher than the sealing frame.

6. The layered manual micro-nano displacement platform according to claim 1, characterized in that: A return spring is provided on the base plate and arranged in the transverse direction. One end of the return spring close to the first input differential head is connected to the base plate by a screw, and the other end of the return spring is fixedly connected to the transformation layer frame by a screw.

7. The layered manual micro-nano displacement platform according to claim 4, characterized in that: The back plane of the output platform is provided with four strain grooves, which are close to the root of the guide flexible beam, and strain gauges are pasted inside the strain grooves for measuring the strain of the guide flexible beam.

Images