Helium mass spectrum leak detection clamp tool for target titanium-back tube

Abstract

The utility model belongs to the field of target material sealing performance testing, and particularly relates to a target material titanium back pipe helium mass spectrum leak detection clamp tool. Comprising a fixing assembly, a sealing piece and a connecting assembly, the fixing assembly comprises a first clamping hoop and a second clamping hoop, and the first clamping hoop and the second clamping hoop are arranged in grooves in the outer wall of the titanium back pipe respectively; the connecting assemblies are arranged at the two ends of the titanium back pipe. The sealing piece is arranged between the titanium back pipe and the connecting assembly, and the sealing piece is inserted into the titanium back pipe to be in contact with the inner wall of the titanium back pipe in an attached mode. In the practical application, the overall stability of the titanium back tube during the sealing performance test is ensured through the fixing assembly and the connecting assembly, the air tightness of the titanium back tube is ensured through the sealing element, the titanium back tube can be taken out only by detaching the fixing assembly and the connecting assembly after the test is finished, and the device is convenient to install.

Description

Technical Field

[0001] The utility model belongs to the field of target material sealing test, and specifically relates to a target material titanium back tube helium mass spectrometer leak detection clamp tooling. Background Art

[0002] Currently in the field of ITO target manufacturing, the target is in a vacuum negative pressure state when in use. The titanium back tube used for target welding needs to undergo vacuum negative pressure detection and helium leak detection test. The helium mass spectrometer leak detection equipment has very high requirements on the sealing and stability of the tooling. Poor sealing will cause the helium mass spectrometer leak detection equipment to frequently alarm in the negative pressure vacuum stage and fail to detect normally.

[0003] A sealing test tool with patent application number CN202223398568.2 includes a nozzle head and a nozzle body connected by argon arc welding, and also includes a sealing seat, the sealing seat is a cylindrical structure with one end open, a sealing groove is provided on the inner cavity of the sealing seat, an O-ring is connected in the sealing groove, the O-ring is located between the rear end of the nozzle head and the front end of the weld, and a clamp is connected to the periphery of the sealing seat along the cylindrical structure, the clamp is distributed in the shape of petals on the periphery of the sealing seat, and a clamping groove matching the weld is provided on the bottom of the clamp. When performing a sealing test, the device may be unstable in fixing, which is easy to affect the airtightness test of the device as a whole. Therefore, it is urgent for those skilled in the art to solve the above technical problems. Utility Model Content

[0004] The technical problem to be solved by the utility model is to provide a target material titanium back tube helium mass spectrometer leak detection clamp tooling in view of the deficiencies of the above-mentioned prior art. The target material titanium back tube helium mass spectrometer leak detection clamp tooling fixes the connecting components at both ends of the titanium back tube respectively through the first clamp and the second clamp in the fixing component, and fixes the titanium back tube on the leak detection device through the connecting component, ensures the air tightness of the titanium back tube during leak detection through air tightness, and improves the working stability of the titanium back tube leak detection.

[0005] In order to solve the above technical problems, the technical solution adopted by the utility model is:

[0006] A target titanium back tube helium mass spectrometer leak detection clamp tooling is used to fix the titanium back tube when the titanium back tube is leak tested in a leak detection device, comprising a fixing component, a sealing component and a connecting component; wherein the fixing component is used to fix the connecting component and the sealing component to ensure that the titanium back tube remains stable during the leak detection process, and the sealing component is used to ensure that the contact part between the titanium back tube and the connecting component is tightly connected to prevent external air from entering the inside of the titanium back tube during leak detection; the connecting component is used to connect the leak detection device with the titanium back tube, and the fixing component comprises a first clamp and a second clamp, and the first clamp and the second clamp are respectively placed on the outer wall of the titanium back tube; the connecting component is arranged at both ends of the titanium back tube; the sealing component is arranged between the titanium back tube and the connecting component, and the sealing component is inserted into the inside of the titanium back tube and contacts the inner wall of the titanium back tube.

[0007] Furthermore, the first clamp and the second clamp each include a first fixing portion, a connecting portion, a first movable segment and a second movable segment; the first movable segment and the second movable segment are both made of stainless steel, and the starting portions of the first movable segment and the second movable segment are hinged together and fixed by bolts to form the first clamp or the second clamp which is a circular ring as a whole; the terminal ends of the first movable segment and the second movable segment are the connecting portion, and the connecting portion fixes the first movable segment and the second movable segment by bolts.

[0008] The hinged design fixed by bolts allows the first movable section and the second movable section to rotate relative to each other to meet the needs of different angles and directions. It is suitable for occasions that need adjustment and repositioning. The starting part is fixed and hinged by bolts to ensure the firm connection of the clamp in the initial closed position and avoid accidental separation under stress. Since it is fixed by bolts instead of one-time welding or other irreversible connection methods, this clamp can be reused after removal, reducing the cost of maintenance and replacement. The bolted connection can be checked and tightened at any time. For application scenarios such as pressure vessels or pipelines, it can ensure that the connection is always in a safe state and meets the corresponding safety standards and specifications.

[0009] Furthermore, the connection assembly includes a first ventilation cover and a second ventilation cover, the first ventilation cover is provided with a connecting pipe installed at the head end of the titanium back tube, and the connecting pipe is flange-connected to the leak detection device; the second ventilation cover is arranged at the tail end of the titanium back tube.

[0010] Through effective combination with the flange of the leak detection device, the pressure changes of the gas inside the system can be monitored in real time, so that possible leakage can be accurately and timely discovered, improving the safety and operating efficiency of the entire system. If any one of the connecting pipes fails, the other three can still maintain connection, providing a certain degree of fault tolerance, ensuring that the system can still work normally in the event of partial failure or at least maintain basic functions for a short time, waiting for repair.

[0011] Furthermore, the sealing member is an O-shaped sealing rubber ring, and the sealing member is sleeved on the inner sides of the first ventilation cover and the second ventilation cover and inserted into the inner wall of the titanium back tube.

[0012] Furthermore, the sealing member is an O-shaped sealing rubber ring, and the sealing member is sleeved on the inner sides of the first ventilation cover and the second ventilation cover and inserted into the inner wall of the titanium back tube.

[0013] O-rings, with their unique circular cross-section design, can achieve axial and radial bidirectional sealing, especially in static and dynamic applications, they can provide good sealing effects to prevent leakage of gas or liquid media. Rubber O-rings have the characteristics of good elasticity, small compression permanent deformation, wear resistance, and aging resistance, and are particularly suitable for sealing needs under various working conditions. Titanium backing tubes, as high-end materials, can work with rubber O-rings to maintain a long-term and stable sealing effect. O-rings are easy to install and replace. They only need to be simply installed between the vent cover and the titanium backing tube. No complicated process is required, which greatly reduces the difficulty of installation and maintenance costs. O-rings can compensate for the machining tolerances of parts and the effects of thermal expansion and contraction to a certain extent, and can adapt well to the fitting gaps between metal parts to ensure effective sealing over the entire operating temperature range. Compared with other sealing solutions, rubber O-rings have relatively low manufacturing costs, long service life, and high cost performance.

[0014] Furthermore, the sealing member is connected and fixed together with the first clamp or the second clamp by passing through the first ventilation cover or the second ventilation cover with screws.

[0015] By tightening with screws, the seal (O-ring) can be subjected to uniform pressure, ensuring that it fits tightly against the inner wall of the titanium back tube and produces an effective sealing effect to prevent leakage of gas or liquid media. The screw connection enhances the mechanical stability between the seal and the vent cover and the clamp, avoiding loosening caused by vibration, impact and other factors, thereby ensuring the long-term stability of the overall connection assembly. By adjusting the tightening force of the screws, the compression of the seal can be appropriately adjusted, which can not only ensure the sealing, but also prevent premature fatigue failure of the seal due to excessive tightening. The screw connection method is convenient for rapid installation and disassembly on site, and is convenient for regular inspection, replacement or maintenance of the seal, thereby extending the service life of the entire assembly. Screw connection is a mature and relatively low-cost connection method. Compared with other complex connection structures, it simplifies the production process and reduces production costs while ensuring connection strength and sealing.

[0016] The utility model has the following beneficial effects:

[0017] 1. The utility model fixes the first vent cover and the second vent cover to the two ends of the titanium back tube to be detected through the first clamp and the second clamp in the fixing assembly, and the first vent cover is fixedly connected with the leak detection device through the connecting pipe on the first vent cover, thereby ensuring the stability of the titanium back tube leak detection process. At the same time, the second vent cover is a sealing structure and cooperates with the sealing member to ensure good air tightness at the tail end of the titanium back tube;

[0018] 2. The flange of the connecting pipe is directly connected to the leak detection device, which simplifies the installation and disassembly process of the workpiece, enables the helium mass spectrometer leak detector to be quickly connected, and significantly improves the work efficiency on the production line. The sealing performance of the entire leak detection system is improved by the seal in conjunction with the first vent cover and the second vent cover, effectively reducing the influence of the external environment on the air tightness detection of the titanium back tube, and ensuring the accuracy of the test results. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a structural schematic diagram of the utility model.

[0020] Figure 2 It is a left view of the utility model.

[0021] Figure 3 It is the front view of the utility model.

[0022] Figure 4 It is a sectional view of the main view of the utility model.

[0023] Figure 5 It is a structural schematic diagram of the first clamp of the utility model.

[0024] Among them are: 1-fixing assembly; 11-first clamp; 111-first movable section; 112-second movable section; 113-first fixing part; 114-connecting part; 12-second clamp; 2-seal; 3-connecting assembly; 31-first ventilation cover; 32-second ventilation cover; 33-connecting pipe; 34-second fixing part; 4-titanium back tube. DETAILED DESCRIPTION

[0025] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific preferred embodiments.

[0026] In the description of the present invention, it should be understood that the terms "left side", "right side", "upper part", "lower part", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. "First", "second", etc. do not indicate the importance of the components, and therefore cannot be understood as a limitation on the present invention. The specific dimensions used in this embodiment are only for illustrating the technical solution, and do not limit the scope of protection of the present invention.

[0027] Reference Figure 1 It can be seen that a target titanium back tube helium mass spectrometer leak detection clamp tooling includes a first clamp 11 and a second clamp 12 arranged in grooves at both ends of the outer wall of the titanium back tube 4, and the first fixing portion 113 of the first clamp 11 or the second clamp 12 is connected to the first ventilation cover 31 or the second ventilation cover 32 by bolts, so that the fixing component 1 is fixed on the titanium back tube 4 and connected with the connecting component 3 at the same time. The connecting component 3 is connected to the flange of the leak detection device through the connecting pipe 33. The connecting component 3 and the fixing component 1 ensure that the titanium back tube 4 is overall stable during leak detection and will not loosen to affect the measurement result.

[0028] In one embodiment, the first clamp 11 and the second clamp 12 are disposed in grooves on the outer wall of the titanium backing tube 4 to prevent the first clamp 11 and the second clamp 12 from loosening during use.

[0029] Reference Figure 2 It can be seen that the seal 2 is sleeved on the inner side of the first vent cover 31 and inserted into the inner wall of one end of the titanium back tube 4, and is connected to the first fixing portion 113 of the first clamp 11 through the second fixing portion 34 of the first vent cover 31 by screws, and is fastened to the compression seal 2; at the same time, the seal 2 is also sleeved on the inner side of the second vent cover 34 and inserted into the inner wall of the other end of the titanium back tube 4, and is connected to the first fixing portion 113 of the second clamp 12 through the second fixing portion 34 of the second vent cover 32 by screws, and is fastened to the compression seal 2;

[0030] The sealing member 2 ensures that the titanium backing tube 4 will not be inaccurately measured due to poor sealing at both ends during air tightness testing.

[0031] Reference Figure 3 It can be seen that a connecting pipe 33 is provided on the first vent cover 31 or the second vent cover 32 for being connected to the flange of the leak detection device. A second fixing portion is also provided on the first vent cover 31 or the second vent cover 32 for connecting to the first fixing portion 113 of the first clamp 11 or the second clamp 12. The connection and fixing of the connecting component 3 and the fixing component 1 are achieved by bolts to connect the two together, ensuring that the titanium backing tube 4 has good stability when being detected in the leak detection device.

[0032] Reference Figure 4 It can be seen that the seal 2 is arranged between the connecting component 3 and the titanium backing tube 4, and the seal 2 extends into the inner wall of the titanium backing tube 4. The connecting component 3 and the fixing component 1 are fixed together by bolts to achieve the compression of the seal 2, ensuring that the titanium backing tube 4 will not be affected by the external environment during detection.

[0033] Reference Figure 5 It can be seen that the first clamp 11 is arranged at the head end of the outer wall of the titanium back tube 4, and a groove is opened on the outer wall of the titanium back tube 4, the first clamp 11 is arranged in the groove, the first movable section 111 of the first clamp 11 and the connecting portion 114 of the second movable section 112 are hinged together and fixed by bolts, and the first fixing portion 113 of the first movable section 111 and the second movable section 112 fixes the first movable section 111 and the second movable section 112 by bolts;

[0034] When in use, the first clamp 11 and the second clamp 12 are respectively arranged in the grooves at the first end of the titanium back tube 4. After the installation is completed, the first fixing part 113 of the first clamp 11 and the second clamp 12 is connected by bolts to fix the fixing component 1 on the titanium back tube 4, and a part of the seal 2 is installed on the inner wall of the titanium back tube 4. The remaining part of the seal 2 is arranged between the fixing component 1 and the connecting component 3. The connecting component 3 and the fixing component 1 are connected together by bolts. A connecting pipe 34 is arranged on the first ventilation cover 31 of the connecting component 3. The connecting pipe 34 is connected to the flange of the leak detection device. The air pressure of the leak detection device enters the titanium back tube 4 through the connecting pipe 34. The second ventilation cover 32 is a sealing structure that cooperates with the seal 2 to ensure the air tightness of the titanium back tube 4.

[0035] The preferred embodiments of the present invention are described in detail above. However, the present invention is not limited to the specific details in the above embodiments. Within the technical concept of the present invention, various equivalent transformations can be made to the technical scheme of the present invention, and these equivalent transformations all belong to the protection scope of the present invention.

Claims

1. A target titanium backing tube helium mass spectrometer leak detection clamp tooling, used to fix the titanium backing tube when the titanium backing tube is leak tested in a leak detection device, characterized in that: It comprises a fixing assembly, a sealing member and a connecting assembly; wherein, the fixing assembly is used to fix the connecting assembly and the sealing member to ensure that the titanium back tube remains stable during the leak detection process, and the sealing member is used to ensure that the titanium back tube is tightly connected to the contact part of the connecting assembly to prevent external air from entering the inside of the titanium back tube during the leak detection; the connecting assembly is used to connect the leak detection device to the titanium back tube, and the fixing assembly comprises a first clamp and a second clamp, and the first clamp and the second clamp are respectively placed on the outer wall of the titanium back tube; the connecting assembly is arranged at both ends of the titanium back tube; the sealing member is arranged between the titanium back tube and the connecting assembly, and the sealing member is inserted into the inside of the titanium back tube and contacts the inner wall of the titanium back tube.

2. The target titanium backing tube helium mass spectrometer leak detection clamp tooling according to claim 1, characterized in that: The first clamp and the second clamp both include a first fixing portion, a connecting portion, a first movable segment and a second movable segment; the first movable segment and the second movable segment are both made of stainless steel; the starting portions of the first movable segment and the second movable segment are hinged together and fixed by bolts to form the first clamp or the second clamp which is a circular ring as a whole; the terminal end of the first movable segment or the second movable segment is the connecting portion, and the connecting portion fixes the first movable segment and the second movable segment by bolts.

3. The target titanium backing tube helium mass spectrometer leak detection clamp tooling according to claim 1, characterized in that: The connection assembly includes a first ventilation cover and a second ventilation cover. The first ventilation cover is provided with a connecting pipe installed at the head end of the titanium back tube, and the connecting pipe is flange-connected to the leak detection device; the second ventilation cover is arranged at the tail end of the titanium back tube.

4. The target titanium backing tube helium mass spectrometer leak detection clamp tooling according to claim 3, characterized in that: The sealing member is an O-shaped sealing rubber ring, which is sleeved on the inner sides of the first ventilation cover and the second ventilation cover and inserted into the inner wall of the titanium back tube.

5. The target titanium backing tube helium mass spectrometer leak detection clamp tooling according to claim 3, characterized in that: The sealing member is connected and fixed together with the first clamp or the second clamp by passing through the first ventilation cover or the second ventilation cover through screws.

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