Anti-deformation MOCVD (Metal Organic Chemical Vapor Deposition) axis heating assembly

Abstract

The utility model discloses an anti-deformation MOCVD axis heating assembly, which comprises an electrode pin, an omega-shaped heating assembly, a crimping assembly and a fixing assembly, the electrode pin comprises a supporting part, a limiting bulge is integrally formed on the front side wall of the supporting part close to the upper end, the omega-shaped heating assembly is arranged on the supporting part, the crimping assembly is arranged on the omega-shaped heating assembly, and the fixing assembly is arranged on the omega-shaped heating assembly. The omega-shaped heating assembly comprises a heating sheet, annular mounting parts are integrally formed at two ends of the heating sheet, grooves are formed in the heating sheet and the annular mounting parts, the grooves are arranged in a manner of protruding towards the inner side of the heating sheet, and the crimping assembly is arranged on the outer side wall of the annular mounting part. According to the utility model, the groove is arranged in the middle of the heating sheet, the groove plays a role similar to a reinforcing rib, the deformation of the heating sheet is reduced, and compared with the original structure, the groove increases a small heat dissipation area, so that under the same condition, the heat dissipation is greater than that of the original structure, the temperature of the heating wire is low, and the high-temperature damage is smaller.

Description

Technical Field

[0001] The utility model belongs to the technical field of heating components, and in particular relates to an anti-deformation MOCVD axial heating component. Background Art

[0002] MOCVD is a new type of vapor phase epitaxial growth technology developed on the basis of vapor phase epitaxial growth. MOCVD uses organic compounds of group III and group II elements and hydrides of group V and VI elements as crystal growth source materials, and performs vapor phase epitaxy on the substrate in the form of thermal decomposition reaction to grow various group III-V, group II-VI compound semiconductors and their multi-component solid solutions of thin-layer single crystal materials.

[0003] The axial heating component is a component used for heating in MOCVD. However, the existing heating components have high operating temperatures and will creep over a long period of time, which will cause material deformation and affect temperature uniformity. The Ω-shaped heating component is prone to the top arc expanding outward during heating, causing its shape to become elliptical.

[0004] The information disclosed in this background technology section is only intended to increase the understanding of the overall background of the present invention, and should not be regarded as acknowledging or suggesting in any form that the information constitutes the prior art already known to a person skilled in the art. Utility Model Content

[0005] The utility model aims to provide an anti-deformation MOCVD axial heating component, which can solve the problem that the existing heating components are deformed due to high temperature when in use.

[0006] In order to achieve the above purpose, the technical solution provided by a specific embodiment of the utility model is as follows:

[0007] A deformation-resistant MOCVD axial heating assembly, comprising:

[0008] An electrode pin, the electrode pin comprising a support portion, a limiting protrusion being integrally formed near an upper end of a front side wall of the support portion;

[0009] An Ω-shaped heating component is installed on the support part, and the Ω-shaped heating component includes a heating plate, and an annular mounting part is integrally formed at both ends of the heating plate, and a groove is provided on the heating plate and the annular mounting part, and the groove is provided in a manner of protruding toward the inner side of the heating plate; a groove is provided on the heating plate and the groove, and a role similar to a reinforcing rib is achieved through the groove, so as to reduce the deformation of the heating plate when it is used;

[0010] A crimping assembly is arranged on the outer side wall of the annular mounting portion, and the crimping assembly includes a crimping portion; the Ω-shaped heating assembly is conveniently mounted on the electrode pin through the crimping assembly;

[0011] The fixing component is used to fix the electrode pin, the Ω-shaped heating component and the crimping component together. The electrode pin, the Ω-shaped heating component and the crimping component are fastened by the fixing component to ensure stability after installation.

[0012] In one or more embodiments of the present invention, a pair of first mounting holes is formed on the support portion, and the pair of first mounting holes are arranged on upper and lower sides of the limiting protrusion.

[0013] In one or more embodiments of the utility model, a base is integrally formed at the lower end of the support portion, and a through hole is provided on the base. The base is used to support the support portion, and the through hole is used to install and fix the base.

[0014] In one or more embodiments of the present invention, the depth of the groove is set to mm. Setting the depth of the groove to mm improves the strength of the heating plate and increases the heat dissipation.

[0015] In one or more embodiments of the utility model, the shape of the limiting protrusion matches that of the groove, and the limiting protrusion is sleeved in the groove on the annular mounting portion. By sleeved the limiting protrusion in the groove, the movement of the annular mounting portion can be limited by the cooperation of the limiting protrusion and the groove.

[0016] In one or more embodiments of the utility model, a clamping groove matching the shape of the groove is provided on one side of the crimping portion close to the annular mounting portion, and the groove on the annular mounting portion is sleeved in the clamping groove. When the annular mounting portion is sleeved in the clamping groove, the movement of the annular mounting portion can be restricted by the cooperation between the annular mounting portion and the clamping groove.

[0017] In one or more embodiments of the present invention, a pair of second mounting holes are formed on the annular mounting portion, a pair of third mounting holes are formed on the crimping portion, and the sizes of the first mounting hole, the second mounting hole and the third mounting hole match.

[0018] In one or more embodiments of the present invention, the fixing assembly uses high temperature resistant bolts, and the bolts fix the electrode pins, the Ω-shaped heating assembly and the crimping assembly together through the first mounting hole, the second mounting hole and the third mounting hole.

[0019] Compared with the prior art, the utility model has a groove in the middle of the heating plate, which plays a role similar to a reinforcing rib, thereby reducing the deformation of the heating plate. The groove slightly increases the heat dissipation area compared to the original structure. Under the same conditions, the heat dissipated is greater than that of the original structure, the temperature of the heating wire is low, and the high-temperature damage caused is also smaller. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0021] Figure 1 This is a front view of an anti-deformation MOCVD axial heating assembly in one embodiment of the utility model;

[0022] Figure 2 A three-dimensional diagram of an anti-deformation MOCVD axial heating assembly in one embodiment of the utility model;

[0023] Figure 3 This is a schematic diagram of a heating component in one embodiment of the utility model;

[0024] Figure 4 A schematic diagram of an electrode pin in an embodiment of the utility model;

[0025] Figure 5 It is a schematic diagram of a crimping assembly in one embodiment of the utility model.

[0026] Description of main reference numerals:

[0027] 1-electrode pin, 11-support part, 12-limiting protrusion, 13-first mounting hole, 14-base, 15-through hole, 2-Ω type heating component, 21-heating plate, 22. Ring mounting part, 23-groove, 24-second mounting

[0028] Hole, 3-crimping assembly, 31-crimping portion, 32-third mounting hole, 33-clamping groove, 4-fixing assembly. DETAILED DESCRIPTION

[0029] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0030] like Figure 1 and Figure 2 As shown, an anti-deformation MOCVD axial heating component in an embodiment of the utility model includes an electrode pin 1, an Ω-shaped heating component 2, a crimping component 3 and a fixing component 4.

[0031] like Figure 1 , Figure 2 and Figure 4 As shown, the electrode pin 1 includes a support portion 11, and a limiting protrusion 12 is integrally formed on the front side wall of the support portion 11 near the upper end.

[0032] like Figure 4 As shown, a pair of first mounting holes 13 are provided on the support portion 11, and the pair of first mounting holes 13 are provided on the upper and lower sides of the limiting protrusion 12. By providing a pair of first mounting holes 13 on the support portion 11, it is convenient to install and fix the components through the first mounting holes 13.

[0033] like Figure 2 and Figure 4 As shown, a base 14 is integrally formed at the lower end of the support portion 11, and a through hole 15 is formed on the base 14. The base 14 is used to support the support portion 11, and the through hole 15 is used to install and fix the base 14.

[0034] like Figure 1 and Figure 2 As shown, the Ω-type heating component 2 is installed on the support portion 11. The Ω-type heating component 2 is a component used for heating. By installing the Ω-type heating component 2 on the support portion 11, the Ω-type heating component 2 can be supported by the support portion 11.

[0035] like Figure 2 and Figure 3 As shown, the Ω-shaped heating component 2 includes a heating plate 21, and both ends of the heating plate 21 are integrally formed with an annular mounting portion 22. The heating plate 21 and the annular mounting portion 22 are both provided with grooves 23, and the grooves 23 are provided in a manner of protruding toward the inner side of the heating plate 21; grooves 23 are both provided on the heating plate 21 and the grooves 23, and a role similar to that of a reinforcing rib is achieved through the grooves 23, thereby reducing deformation of the heating plate 21 during use.

[0036] Preferably, due to the high operating temperature of the heating component during use, creep will occur during long-term use, which will cause material deformation and affect temperature uniformity; the heating component of the Ω-shaped structure is prone to the problem that the top arc expands outward when heated, causing its shape to become elliptical. Therefore, by providing a groove 23 on the heating plate 21 and the annular mounting portion 22, the groove 23 can increase the strength of the heating plate 21 and the annular mounting portion 22 during use, thereby improving the deformation resistance of the Ω-shaped heating component 2 during use, reducing the deformation of the Ω-shaped heating component 2 during use, and the groove 23 increases the heat dissipation area slightly compared to the original structure. Under the same conditions, the heat dissipated is greater than the original structure, the temperature of the heating wire is low, and the high-temperature damage caused is also smaller.

[0037] Preferably, the depth of the groove 23 is set to 2 mm. Setting the depth of the groove 23 to 2 mm improves the strength of the heating plate 21 and increases the heat dissipation.

[0038] like Figure 3-4 As shown, the limiting protrusion 12 matches the shape of the groove 23, and the limiting protrusion 12 is sleeved in the groove 23 on the annular mounting portion 22. By sleeve-fitting the limiting protrusion 12 in the groove 23, the movement of the annular mounting portion 22 can be limited by the cooperation of the limiting protrusion 12 and the groove 23.

[0039] like Figure 1 and Figure 2 As shown, the crimping assembly 3 is arranged on the outer side wall of the annular mounting portion 22, and the crimping assembly 3 includes a crimping portion 31; the crimping assembly 3 facilitates the installation of the Ω-type heating assembly 2 on the electrode pin 1. In order to ensure the stability of the Ω-type heating assembly 2 installed on the electrode pin 1, the crimping assembly 3 is arranged so that the Ω-type heating assembly 2 can be fixed by the cooperation of the electrode pin 1 and the crimping assembly 3.

[0040] like Figure 2 and Figure 5 As shown, a clamping groove 33 matching the shape of the groove 23 is provided on one side of the crimping portion 31 close to the annular mounting portion 22, and the groove 23 on the annular mounting portion 22 is sleeved in the clamping groove 33. When the annular mounting portion 22 is sleeved in the clamping groove 33, the movement of the annular mounting portion 22 can be restricted by the cooperation between the annular mounting portion 22 and the clamping groove 33.

[0041] like Figure 1 and Figure 2 As shown, the fixing component 4 is used to fix the electrode pin 1, the Ω-shaped heating component 2 and the crimping component 3 together. The electrode pin 1, the Ω-shaped heating component 2 and the crimping component 3 are fastened by the fixing component 4 to ensure stability after installation.

[0042] like Figure 3 to Figure 5 As shown, a pair of second mounting holes 24 are formed on the annular mounting portion 22, and a pair of third mounting holes 32 are formed on the crimping portion 31. The sizes of the first mounting hole 13, the second mounting hole 24 and the third mounting hole 32 match each other.

[0043] like Figure 2 As shown, the fixing assembly 4 uses high temperature resistant bolts, and the bolts fix the electrode pin 1, the Ω-shaped heating assembly 2 and the crimping assembly 3 together through the first mounting hole 13, the second mounting hole 24 and the third mounting hole 32.

[0044] Working principle: By providing a groove 23 on the Ω-type heating component 2, the deformation resistance of the Ω-type heating component 2 during use is improved, and the deformation of the Ω-type heating component 2 during use is reduced. In addition, the groove 23 slightly increases the heat dissipation area compared to the original structure. Under the same conditions, the heat dissipated is greater than that of the original structure, the temperature of the heating wire is low, and the high-temperature damage caused is also smaller.

[0045] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

[0046] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A deformation-resistant MOCVD axial heating assembly, characterized in that: include: An electrode pin, the electrode pin comprising a support portion, a limiting protrusion being integrally formed near an upper end of a front side wall of the support portion; An Ω-shaped heating assembly is mounted on the support portion, the Ω-shaped heating assembly comprises a heating plate, both ends of the heating plate are integrally formed with an annular mounting portion, the heating plate and the annular mounting portion are both provided with a groove, and the groove is provided in a manner of protruding toward the inner side of the heating plate; A crimping assembly is arranged on the outer side wall of the annular mounting portion, and the crimping assembly includes a crimping portion; The fixing assembly is used to fix the electrode pin, the Ω-type heating assembly and the crimping assembly together.

2. The anti-deformation MOCVD axial heating assembly according to claim 1, characterized in that: The support portion is provided with a pair of first mounting holes, and the pair of first mounting holes are arranged at upper and lower sides of the limiting protrusion.

3. The anti-deformation MOCVD axial heating assembly according to claim 2, characterized in that: A base is integrally formed at the lower end of the support portion, and a through hole is formed on the base.

4. The anti-deformation MOCVD axial heating assembly according to claim 1, characterized in that: The depth of the groove is set to 2 mm.

5. The anti-deformation MOCVD axial heating assembly according to claim 1, characterized in that: The limiting protrusion matches the shape of the groove, and the limiting protrusion is sleeved in the groove on the annular mounting portion.

6. The anti-deformation MOCVD axial heating assembly according to claim 5, characterized in that: A clamping groove matching the shape of the groove is provided on one side of the crimping portion close to the annular mounting portion, and the groove on the annular mounting portion is sleeved in the clamping groove.

7. The anti-deformation MOCVD axial heating assembly according to claim 2, characterized in that: A pair of second mounting holes is formed on the annular mounting portion, and a pair of third mounting holes is formed on the crimping portion. The sizes of the first mounting hole, the second mounting hole and the third mounting hole match each other.

8. The anti-deformation MOCVD axial heating assembly according to claim 7, characterized in that: The fixing assembly uses high temperature resistant bolts, and the bolts fix the electrode pins, the Ω-shaped heating assembly and the crimping assembly together through the first mounting hole, the second mounting hole and the third mounting hole.

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