Ultrapure water system pipeline structure
By designing a pipeline structure using polyvinylidene fluoride in an ultrapure water system, and using a combination design of horse port connection holes and welded saddles, the problems of high price, insufficient cleanliness and strength of PVDF pipelines in the prior art are solved, and the effects of reducing costs, reducing leakage risks and improving construction efficiency are achieved.
Patent Information
- Application Number
- CN202420707518.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-08
- Publication Date
- 2025-03-07
- Estimated Expiration
- 2034-04-08
AI Technical Summary
The demand for PVDF pipelines in existing ultrapure water systems has greatly increased, resulting in soaring prices and extended delivery periods. The cleanliness, strength and installation of the pipelines are difficult, which is easy to cause secondary pollution and leakage.
An ultrapure water system pipeline structure is designed, and the main pipeline with polyvinylidene fluoride material is used. By opening a horse port connection hole on the side wall of the main pipeline, and a welding saddle and valve are installed at the port. Combined with the chamfering design and the use of arc-shaped infrared heating plates, welded saddles are ensured to be closely fit with the main pipeline, reducing the number of welded ports and increasing strength.
Through this design, the cost of material use and welding is reduced, the risk of leakage and construction difficulty is reduced, the cleanliness and strength is improved, the secondary pollution and the generation of stagnant water is avoided, land is saved, and construction period is shortened.
Smart Images
Figure CN222577406U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of pipelines, in particular to an ultrapure water system pipeline structure. Background Art
[0002] With the explosive development of domestic electronic semiconductors, especially the increasingly narrow line width of wafers, the semiconductor wafer manufacturing process has higher and higher requirements for ultrapure water. Under such a background, in the ultrapure water production process, cleaner PVDF pipes will be selected from the polishing section to the LOOP section. At the same time, the matching electronic chemical pipes and the ultrapure water pipes of the matching electronic chemicals also require PVDF pipes. PVDF materials are also important raw materials in the new energy industry, and are concentrated in the fields of lithium batteries, solar backplane films, etc. In the past two years, with the rapid development of new energy, the demand for PVDF has greatly increased. However, the production capacity of PVDF is limited, especially the ultrapure PVDF materials required by the electronic semiconductor industry are even more scarce. At present, there are only a few foreign companies that can produce ultrapure PVDF raw materials, such as Arkema in France and Solvay in the United States, and the pricing power is in their hands. Among them, the only manufacturers of PVDF pipes that can meet the needs of ultrapure water production are GF in Switzerland and ARGU in Germany. With the shortage of raw materials and the increase in demand, since the second half of 2021, the price of PVDF pipes used in ultrapure water has peaked at 12 times the original price, and the delivery time is at least 18 months. The spot price is ridiculously high, especially when some pipe fittings are urgently needed during the project, and they need to be purchased at a high price if they are urgently needed. In the ultrapure water system, there are three requirements for terminal pipelines: strict requirements on cleanliness to prevent substances from precipitating and causing secondary pollution; the pipe fittings should have smooth bends and other parts to avoid dead water. If dead water is produced, it will cause bacteria to grow and cause pollution to the ultrapure water; sufficient strength to avoid leakage, especially in the FAB dust-free workshop, the production machines are extremely precise and very expensive. Once leakage occurs and the machines are damaged, great losses will be caused.
[0003] During the wafer production process, ultrapure water is used in the entire process, from pulling silicon rods at the front end to packaging and testing at the back end. There are extremely high requirements for the stability of the water quality and supply of ultrapure water. Therefore, our company developed and applied this set of equipment after careful calculations and a lot of demonstrations, and applied it in actual production to ensure that the use requirements are fully met.
[0004] Therefore, an ultrapure water system piping structure is needed to improve the above problems. Utility Model Content
[0005] The purpose of the utility model is to provide an ultrapure water system pipeline structure to solve the problems raised in the above background technology.
[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:
[0007] A pipeline structure of an ultrapure water system comprises a main pipeline, a side wall of which is provided with a horse mouth connection hole, a welding saddle is installed at the end of the horse mouth connection hole, a valve is arranged at one end of the welding saddle, a handle is arranged on the outer wall of the valve, and a through hole is arranged on the outer wall of the main pipeline.
[0008] As a preferred solution of the utility model, the main pipe is made of polyvinylidene fluoride material, and the horse mouth connecting holes are provided in multiple groups and are respectively located on opposite outer walls of the main pipe.
[0009] As a preferred solution of the utility model, the welding saddles are provided in multiple groups and are respectively located at the ports of the horse mouth connecting holes.
[0010] As a preferred solution of the utility model, the valves are provided in multiple groups and are respectively located at the ports of the welding saddle, and the handles are provided in multiple groups and are respectively located on the outer wall of the valve.
[0011] As a preferred solution of the utility model, two groups of through holes are provided and are respectively located on the outer wall of the main pipe.
[0012] As a preferred solution of the utility model, the through hole is located on one side of the horse mouth connecting hole, and the opening and the joint of the horse mouth connecting hole adopt a chamfered structure.
[0013] Compared with the prior art, the beneficial effects of the utility model are:
[0014] 1. In the utility model, through the horse mouth connection hole in the pipeline structure of the ultrapure water system, and using the horse mouth connection hole on the outer wall of the main pipeline to replace the tee, firstly, the saddle processing piece is processed according to different pipeline specifications to ensure that the curvature of the processing piece of the welded saddle is consistent with the curvature of the outer wall of the corresponding different main pipelines, and the arc infrared heating ironing plate is used to heat the processing piece and the pipeline wall at the same time, and then the clamp is used to clamp the processing piece to weld the saddle and the main pipeline to ensure that they are closely fitted, and after it is completely cooled, a suitable hole opener is used to open the hole and a vacuum cleaner is turned on at the same time to ensure that the debris is sucked away in time. After the opening is completed, a chamfering device is used to pour out an arc at the connection between the welded saddle and the main pipeline to avoid dead angles. The above work is completed to allow high-purity water to enter Conduct leakage test, save materials and reduce costs; reduce the number of welds to reduce leakage risks; reduce workload and improve work efficiency at the same time; reduce the difficulty of on-site construction and shorten the construction period; reduce the use of pipe fittings, more beautiful and simple; effectively reduce the installation space, more effectively use the site area, save land, which is beneficial to solve the strict requirements for cleanliness, place substances to precipitate, and cause secondary pollution; the parts of pipe fittings such as excessive bends should be smooth to avoid dead water. If dead water is produced, it will cause bacteria to grow and cause ultrapure water pollution; have sufficient strength to avoid leakage, especially in FAB dust-free workshops, where production machines are very precise and expensive. Once leakage damages the machine, it will cause great losses. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] Figure 1 It is a schematic diagram of the overall structure of the utility model;
[0016] Figure 2 This is a schematic diagram of the top view structure of the utility model;
[0017] Figure 3 This is a schematic diagram of the structure of the main pipe connection of the utility model.
[0018] In the figure: 1. Main pipe; 2. Horse mouth connection hole; 3. Welding saddle; 4. Valve; 5. Handle; 6. Through hole. DETAILED DESCRIPTION
[0019] The technical solutions in the embodiments of the utility model will be clearly and completely described below in conjunction with the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model.
[0020] For examples, see Figure 1-3 , the utility model provides a technical solution:
[0021] A pipeline structure of an ultrapure water system comprises a main pipeline 1, a side wall of which is provided with a horse mouth connection hole 2, a welding saddle 3 is installed at the end of the horse mouth connection hole 2, a valve 4 is arranged at one end of the welding saddle 3, a handle 5 is arranged on the outer wall of the valve 4, and a through hole 6 is arranged on the outer wall of the main pipeline 1.
[0022] In this embodiment, please refer to Figure 1 , Figure 2 and Figure 3 The main pipeline 1 is made of polyvinylidene fluoride material, the horse mouth connecting holes 2 are provided with multiple groups and are respectively located on the opposite outer walls of the main pipeline 1, the welding saddles 3 are provided with multiple groups and are respectively located at the ports of the horse mouth connecting holes 2, the valves 4 are provided with multiple groups and are respectively located at the ports of the welding saddles 3, the handles 5 are provided with multiple groups and are respectively located on the outer walls of the valves 4, two groups of through holes 6 are provided and are respectively located on the outer walls of the main pipeline 1, the through holes 6 are located on one side of the horse mouth connecting hole 2, and the opening and joints of the horse mouth connecting hole 2 adopt a chamfered structure.
[0023] Furthermore, cleanliness is ensured: the main pipe 1 is opened with a specially treated alloy cutter head and low-speed cold cutting is adopted to avoid secondary contamination of the pipe by metal during the opening process; all welding heating adopts non-contact infrared heating to prevent contamination of the material during the heating process. The entire cutting process is carried out in a clean environment, and a negative pressure suction port is added to the cutter head to clean up the cut debris while cutting to prevent particle pollution; the welding saddle 3 is processed with imported PVDF raw materials to ensure the purity of the raw materials; to avoid dead water, the chamfer design is adopted at the opening and the joint to ensure smooth water flow; the specifications of the designed reinforced welding saddle 3 correspond to those of the main pipe 1, so that the welding saddle 3 is tightly attached to the pipe wall of the main pipe 1 Close fit to avoid the existence of gaps; holes are opened after welding to avoid dead corners caused by weld extrusion and dead water; strength assurance: all welding uses the welding temperature required by PVDF materials, and the heating plate temperature has five temperature detection points, and the temperature of each place is accurately heated to ensure uniform heating; the saddle processing part is set with a reinforcement area, and the reinforcement area is at least 1.5 times the opening area; the design specifications of the reinforced welding saddle 3 correspond to the specifications of the main pipeline 1, so that the welded saddle 3 fits closely with the pipe wall of the main pipeline 1 to ensure strength; the processed welding saddle 3 and the main pipeline 1 are heated at the same time to ensure that the temperature on both sides is the same to increase the welding strength; after heating is completed, a clamp is used to make the processing part tightly combined with the outer wall of the main pipeline 1; after completion, the pressure test is carried out and it can be used only after passing.
[0024] The working process of the utility model: when the ultrapure water system pipeline structure designed by the present invention is working, a horse mouth connection hole 2 is opened on the outer wall of the main pipeline 1 to replace the tee, and the saddle processing parts are first processed according to different pipeline specifications to ensure that the curvature of the processing parts of the welding saddle 3 is consistent with the curvature of the outer wall of the corresponding different main pipelines 1, and an arc-shaped infrared heating ironing plate is used to heat the processing parts and the pipeline wall at the same time, and then a clamp is used to clamp the processing parts to weld the saddle 3 and the main pipeline 1 to ensure that they are tightly fitted, and after they are completely cooled, a suitable hole opener is used to open the hole and a vacuum cleaner is turned on at the same time to ensure that the debris is sucked away in time. After the opening is completed, a chamfering device is used to pour out an arc at the connection between the welding saddle 3 and the main pipeline 1 to avoid the generation of dead angles. The above work is completed to make high-purity water Carry out leakage test, package and box after passing the test, save materials and reduce costs; reduce the number of welds to reduce the risk of leakage; reduce workload and improve work efficiency at the same time; reduce the difficulty of on-site construction and shorten the construction period; reduce the use of pipe fittings, which is more beautiful and simple; effectively reduce the installation space, make more effective use of the site area, save land, and thus help solve the strict requirements for cleanliness, prevent the precipitation of substances, and cause secondary pollution; the parts of the pipe fittings such as excessive bends should be smooth to avoid stagnant water. If stagnant water is produced, it will cause bacteria to grow and cause ultrapure water pollution; have sufficient strength to avoid leakage, especially in FAB dust-free workshops, where the production machines are very precise and expensive. Once leakage occurs and the machines are damaged, it will cause great losses.
[0025] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.
Claims
1. An ultrapure water system pipeline structure, comprising a main pipeline (1), characterized in that: A horse mouth connection hole (2) is provided on the side wall of the main pipe (1), a welding saddle (3) is installed at the end of the horse mouth connection hole (2), a valve (4) is provided at one end of the welding saddle (3), a handle (5) is provided on the outer wall of the valve (4), and a through hole (6) is provided on the outer wall of the main pipe (1).
2. The ultrapure water system piping structure according to claim 1, characterized in that: The main pipe (1) is made of polyvinylidene fluoride material, and the horse mouth connecting holes (2) are provided in a plurality of groups and are respectively located on opposite outer walls of the main pipe (1).
3. The ultrapure water system piping structure according to claim 1, characterized in that: The welding saddles (3) are provided in multiple groups and are respectively located at the ends of the horse mouth connection holes (2).
4. The ultrapure water system piping structure according to claim 1, characterized in that: The valves (4) are provided in multiple groups and are respectively located at the ports of the welding saddle (3); the handles (5) are provided in multiple groups and are respectively located on the outer walls of the valves (4).
5. The ultrapure water system piping structure according to claim 1, characterized in that: The through holes (6) are provided in two groups and are respectively located on the outer wall of the main pipe (1).
6. The ultrapure water system piping structure according to claim 1, characterized in that: The through hole (6) is located on one side of the horse mouth connection hole (2), and the opening and the joint of the horse mouth connection hole (2) adopt a chamfered structure.