Firing clamp composed of setter and bottom plate

Abstract

Provided is a novel firing jig that effectively prevents sliding of a setter. Disclosed is a firing fixture comprising a setter and a base plate on which the setter is placed, the setter being a ceramic sheet comprising a netted portion; the mesh portion includes a first line portion layer composed of a plurality of first line portions and a second line portion layer composed of a plurality of second line portions. (1) An anti-slip portion is provided in a predetermined region on the surface of the base plate on the side on which the setter is placed, the predetermined region facing the mesh-like portion; (2) The relationship of 5 < = Rzjis / D < = 100 is satisfied, where D (mm) is the average width of the first line portion in a predetermined region of the first line portion layer including a portion disposed above the anti-slip portion, and Rzjis ([mu] m) is the 10-point average roughness of the anti-slip portion measured by observation using a laser microscope in accordance with JIS B0601: 1994.

Description

Technical Field

[0001] The utility model relates to a firing fixture composed of a setter and a bottom plate. More specifically, the utility model relates to a firing fixture composed of a setter and a bottom plate on which the setter is placed, which can effectively prevent the setter from sliding. Background Art

[0002] When firing ceramic electronic parts or glass, the fired objects are generally placed on a setter of a ceramic sheet, also called a shelf, and fired. In the firing process using such a setter, a high production efficiency is required to fire many fired objects at the same time. Therefore, a firing jig is used in which a setter is placed on a firing base plate or a component called a firing rack, and a plurality of setters are stacked at predetermined intervals to form a multi-stage stack.

[0003] As conventional techniques related to ceramic setters, for example, there are known setters for heat forming processing made of ceramics containing aluminum nitride as a main component and composed of a porous plate having a large number of holes penetrating the front and back sides, and ceramic kiln tool plates for firing, which are provided with at least a concave-convex shape and have openings on the front and back sides on which the fired object is placed. In addition, as a technique for preventing cracks from occurring on the setter when the fired object is rapidly heated and cooled, there is disclosed a ceramic grid body having a plurality of first ceramic line portions and a plurality of second ceramic line portions intersecting the first line portions and a structure in which the first line portions and the second line portions have a specific contact form (see Patent Document 1 as an example).

[0004] On the other hand, as a firing jig called a base plate, for example, a firing jig is disclosed, which is characterized by having a frame having a hollow portion at the center side and a plurality of bridge portions that are mounted on the hollow portion of the frame and intersect each other in the hollow portion, wherein the frame and the bridge portions are integrally formed. It is reported that the firing jig improves the productivity of manufacturing ceramic products by firing.

[0005] In addition, as another firing fixture called a base plate, etc., Patent Document 2 discloses a firing rack configured to arrange a flat plate-shaped setter for loading a fired object, and comprising: a frame body having an opening on the surface thereof, a column portion passing through the center of the frame body and extending between the frames; a plurality of surrounding portions surrounded by the frame body and the column portion; and a plurality of sub-column portions extending from the center of the surrounding portion toward the frame body or the column portion. It is reported that the firing rack can reduce the unevenness of the temperature distribution in the surface of the loaded flat plate-shaped setter.

[0006] Prior art literature

[0007] Patent Literature

[0008] Patent Document 1: Japanese Patent Application Publication No. 2018-193274

[0009] Patent Document 2: International Publication No. 2021 / 033375

[0010] Contents of the utility model

[0011] Issues to be solved by utility models

[0012] Such a ceramic fixture and base plate (firing rack) are as follows Figure 1 As shown in the example, during firing, the setters are placed on the respective base plates, and the fired objects are placed on the respective setters and stacked in a multi-stage stack. Figure 1 In the figure, S is a setter, P is a base plate stacked in a multi-stage stack, C is a fired object, a setter is placed on each base plate, and a fired object is arranged thereon. There is also a situation where the combination of a ceramic setter and a base plate stacked as a multi-stage stack needs to be stored and then transported in the original state of the multi-stage stack. During such a stacking operation or when transporting in the original state of the multi-stage stack, if the setter slides on the base plate due to a slight slope or vibration (i.e., movement in the horizontal direction or up and down direction), it is possible to cause damage or drop of the setter, deformation and damage of the fired object arranged on the setter, poor firing conditions, and fine fired objects such as electronic parts falling from the setter. Therefore, during the stacking operation of the combination of a ceramic setter and a base plate or when transporting in the state of these multi-stage stacks, good maneuverability is required that the setter does not slide easily on the base plate. However, no technology has been developed so far that can fully prevent such sliding.

[0013] Therefore, the problem to be solved by the utility model is to provide a firing jig, which is a firing jig composed of a combination of a ceramic setter and a base plate, and has good operability such that the setter will not easily slide on the base plate due to a slight inclination or vibration (horizontal or vertical movement) during their stacking operation or transportation in a multi-stage stack state.

[0014] Means used to solve problems

[0015] The inventor of the utility model has conducted a special study and found that, in a firing jig composed of a setter as a ceramic sheet including a so-called mesh portion on at least a portion thereof and a base plate on which the setter is placed, an anti-slip portion is provided in a prescribed area opposite to the mesh portion on a surface of the base plate on the side on which the setter is placed, and when the average width of the first line portion in a prescribed area including the first line portion layer disposed above the anti-slip portion is D (mm), the following JIS B0601:1994 When the 10-point average roughness of the anti-slip portion measured by observation with a laser microscope is Rzjis (μm), the frictional resistance to the movement of the setter on the base plate is increased by designing so that Rzjis / D is within a specific range, so that the setter can be fully prevented from sliding on the base plate. At the same time, the damage and falling of the setter placed on the base plate and the deformation and damage of the fired object arranged on the setter can be effectively suppressed, thereby greatly improving the operability of the firing fixture as a ceramic product, thereby completing the firing fixture related to the utility model.

[0016] Therefore, a typical technical solution of the present invention is as follows:

[0017] A firing jig is a firing jig composed of a setter and a bottom plate on which the setter is placed, wherein the setter is a ceramic sheet including a mesh portion in at least a portion thereof, wherein the mesh portion is a portion including a first line portion layer and a second line portion layer, wherein the first line portion layer and the second line portion layer are integrally formed, wherein the first line portion layer is composed of a plurality of first line portions each extending in one direction and arranged at a given interval, and wherein the second line portion layer is composed of a plurality of second line portions each extending in one direction and arranged at a given interval in a manner of being in contact with and intersecting the first line portions;

[0018] (1) An anti-slip portion is provided in a predetermined area of ​​the surface of the bottom plate on the side where the setter is placed and facing the mesh portion;

[0019] (2) When the average width of the first line portion is D (mm) in a specified area of ​​the first line portion layer including a portion arranged above the anti-slip portion, and the 10-point average roughness of the anti-slip portion measured by observation with a laser microscope in accordance with JIS B0601:1994 is Rzjis (μm), the relationship of 5≤Rzjis / D≤100 is satisfied.

[0020] The firing fixture is also characterized in that:

[0021] It satisfies the relationship 20≤Rzjis / D≤80, where Rzjis and D follow the above definitions.

[0022] The firing fixture is also characterized in that:

[0023] The relationship of 5(μm)≤Rzjis≤25(μm) is satisfied, where Rzjis follows the above definition.

[0024] The firing fixture is also characterized in that:

[0025] The anti-slip portion is formed of projections and depressions formed by shot peening.

[0026] The firing fixture is also characterized in that:

[0027] The anti-slip portion is provided in one or more predetermined areas on the surface of the bottom plate on the side where the setter is placed and facing the mesh portion.

[0028] The anti-slip portion is disposed so that the one or more regions correspond to the vicinity of the peripheral edge of the setter when the setter is placed on the bottom plate.

[0029] The firing fixture is also characterized in that:

[0030] When the anti-slip portion is provided in a specified area on the surface of the base plate on one side of which the fixer is placed, and the 10-point average roughness of the anti-slip portion measured by observation with a laser microscope in accordance with JIS B0601:1994 is denoted as Rzjis, and the maximum height of the anti-slip portion measured by observation with a laser microscope in accordance with JIS B0601:2001 is denoted as Rz, the relationship of 1.2≤Rz / Rzjis≤3 is satisfied.

[0031] Effect of utility model

[0032] According to the firing jig composed of a fixer and a base plate on which the fixer is placed, an anti-slip portion is provided in a specified area on the base plate, and the ratio of the 10-point average roughness Rzjis (measured in accordance with JIS B0601:1994) of the anti-slip portion to the average width D (mm) of the first line portion in a specified area of ​​the first line portion layer is set within a specific range. This can effectively prevent the fixer from sliding on the base plate, and at the same time, effectively suppress damage or falling of the fixer placed on the base plate and deformation or damage of the object to be fired arranged on the fixer, thereby greatly improving the operability of the firing jig as a ceramic product. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 This is a diagram illustrating a known stacked form formed by a multi-stage stack of ceramic setters and base plates (firing racks).

[0034] Figure 2 This is a diagram illustrating an embodiment of a mesh portion of a setter in a firing jig of the present invention.

[0035] Figure 3 This is a diagram showing an embodiment of a combination of a setter and a base plate in a firing jig of the present invention.

[0036] Figure 4 This is a diagram for explaining one embodiment of the relationship between the first line portion of the mesh portion of the setter in the firing jig of the present invention and the anti-slip portion of the bottom plate.

[0037] Figure 5 This is a diagram for explaining another embodiment of the relationship between the first line portion of the mesh portion of the setter in the firing jig of the present invention and the anti-slip portion of the bottom plate. DETAILED DESCRIPTION

[0038] In the firing fixture of the utility model, the fixer combined with the base plate is a ceramic sheet including a mesh portion in at least a portion thereof, and the mesh portion is a ceramic sheet including a first line portion layer and a second line portion layer, and the first line portion layer and the second line portion layer are integrally formed. The first line portion layer is composed of a plurality of first line portions each extending in one direction and arranged at a given interval, and the second line portion layer is composed of a plurality of second line portions each extending in one direction and arranged at a given interval in a manner of being connected to and intersecting with each of the first line portions. The fixer is not particularly limited as long as it includes such a mesh portion in at least a portion thereof. Any known fixer structure may be used for portions other than the mesh portion of the fixer. In one embodiment, a fixer that is a mesh-shaped ceramic sheet sintered body formed integrally as a whole may also be used.

[0039] Here, the net-shaped sintered body "integrally formed with" the first line portion layer and the second line portion layer means that the line group constituting the first line portion layer and the line group constituting the second line portion layer are fired and connected at these contact portions to form an integral structure, and are formed so as not to be easily separated. In one form, the first line portion layer and the second line portion layer may be fired and connected so that the line group constituting the first line portion layer and the line group constituting the second line portion layer form an integral structure at their contact portions, and are formed so as not to be easily separated; and the first line portion layer and the second line portion layer, or different parts of each line portion layer, are formed of a single composition. In another form, the first line portion layer and the second line portion layer may be fired and connected so that the line group constituting the first line portion layer and the line group constituting the second line portion layer form an integrated structure at their contact portion and are formed so as not to be easily separated; and the first line portion layer and the second line portion layer, or different parts of each line portion layer, are formed of different multiple components.

[0040] exist Figure 2 An embodiment of the mesh portion of the fixer is illustrated in FIG. Figure 2 In the embodiment, the mesh portion 1 includes: a first line portion layer composed of a plurality of first line portions 2 each extending in one direction and arranged at approximately regular intervals; and a second line portion layer composed of a plurality of second line portions 3 each extending in one direction and arranged at approximately regular intervals in a manner that they are in contact with each of the first line portions 2 and intersect with each other. The intersection angle of the two line portions 2 and 3 can be set appropriately, but for example, the intersection angle of the second line portion 3 with respect to the first line portion 2 can be set to approximately 90 degrees. Alternatively, the intersection angle of the second line portion 3 with respect to the first line portion 2 can be changed within a range of 90 degrees ± 10 degrees. The cross-sectional shapes of the first line portion 2 and the second line portion 3 are not particularly limited, but can be approximately circular or approximately elliptical as shown in the figure. The cross-sectional shapes of the first line portion 2 and the second line portion 3 can be approximately polygonal such as approximately rectangular, or a shape in which a part of them is cut in a straight line, in addition to the approximately circular and approximately elliptical shapes.

[0041] The ceramic raw material powders of the first plurality of line portions and the second plurality of line portions of the mesh portion of the ceramic sheet are not particularly limited and may include various ceramic raw materials. Examples of ceramic raw materials used as ceramic raw material powders include aluminum oxide (Al2O3), zirconium oxide (ZrO2), magnesium oxide (MgO), molten stone (3Al2O3-2SiO2), silicon carbide (SiC), silicon nitride (Si3N4), aluminum nitride (AlN), boron carbide (B4C), cordierite (MgO / Al2O3 / SiO2), aluminum titanate (Al2TiO5), magnesium titanate (MgTiO3), titanium diboride (TiB2), etc., or a combination of one or more of these. In addition, the sintered body manufactured using the raw material powders of one or more of these ceramic raw materials naturally also has a composition that can be produced from these raw materials. In the mesh portion of the ceramic sheet of one embodiment, the first line portion layer and the second line portion layer, or different parts of each line portion layer, may also be formed from a single composition. In another embodiment, in the mesh portion of the ceramic sheet, the first line portion layer and the second line portion layer, or different portions of each line portion layer, may be formed of different multiple components. In one embodiment, a setter may be used as a mesh ceramic sheet sintered body integrally formed of a single type of material. By using such a setter, the overall strength of the ceramic sheet becomes very high, and efficient manufacturing of the setter is also achieved.

[0042] The ceramic raw material powder of the portion other than the mesh portion in the case where the mesh portion occupies a part of the ceramic sheet is not particularly limited, and may be the same as or different from the raw material powder of the mesh portion mentioned above. The raw material powder of the portion other than the mesh portion of the ceramic sheet in the case where there is the raw material powder is preferably the same as the raw material powder of the mesh portion connected thereto. In addition, in a preferred embodiment, it may be a sintered body of a ceramic sheet in which the mesh portion and the portion other than the mesh portion are integrally formed. If the sintered body in which the mesh portion and the portion other than the mesh portion are integrally formed and the raw material powders of the two are the same, the overall strength of the ceramic sheet can be improved, and a decrease in the bonding strength caused by the thermal history of heating-cooling (repeated expansion-contraction) during firing can be prevented.

[0043] In one embodiment, the mesh portion of the ceramic sheet can have the following structure (so-called point contact structure): at any intersection of the first line portion and the second line portion, the cross-section of the first line portion has a shape consisting of a straight line portion and a convex curved portion with both ends of the straight line portion as ends, the cross-section of the second line portion has a circular or elliptical shape, and, in the longitudinal section of the intersection, the top of the convex curved portion of the first line portion only contacts the circular or elliptical downwardly convex top of the second line portion.

[0044] In another embodiment, the mesh portion of the ceramic sheet may have the following structure: the cross section of the first line portion has a shape consisting of a straight line portion and a convex curved line portion with both ends of the straight line portion as ends at a portion other than the intersection of the first line portion and the second line portion, the cross section of the second line portion has a circular or elliptical shape at a portion other than the intersection, and the first line portion and the second line portion each form an intersection that is in contact with a surface rather than a point. This structure can be referred to as a surface contact structure relative to the so-called point contact described above.

[0045] In one embodiment of the lower concept equivalent to the above-mentioned construction example formed by such surface contact, the mesh portion of the ceramic sheet may have the following structure: the cross-section of the first line portion has a shape consisting of a straight portion and a convex curved portion with both ends of the straight portion as ends at a portion other than the intersection of the first line portion and the second line portion, the cross-section of the second line portion has a circular or elliptical shape at a portion other than the intersection, and the projection image of the second line portion when viewed from above is a shape that is curved and bulged outward in the width direction at the intersection, thereby, the width of the projection image at the intersection is larger than the width of the projection image at the portion other than the intersection.

[0046] In addition, in yet another embodiment, the mesh portion of the ceramic sheet may have the following structure: the cross-section of the first line portion has a shape consisting of a straight portion and a convex curved portion with both ends of the straight portion as ends at a portion other than the intersection of the first line portion and the second line portion, the cross-section of the second line portion has a circular or elliptical shape at a portion other than the intersection of the first line portion and the second line portion, the sintered body has a straight edge at at least a portion of its contour in a top view, and the first line portion and the second line portion intersect the straight edge (outer edge) independently at an angle of more than 10 degrees and less than 170 degrees (i.e., in a wider angle range including angles that are non-right angles).

[0047] In addition, in yet another embodiment, the mesh portion of the ceramic sheet can be the following plate-shaped ceramic structure: in addition to a plurality of first line portions and a plurality of second line portions, it also has a plurality of third line portions made of ceramic on the diagonals of a quadrilateral defined by the intersection of the first line portions and the second line portions, forming a plurality of triangular through holes defined by the first line portions, the second line portions, and the third line portions.

[0048] When the mesh portion occupies a part of the ceramic sheet, the portion other than the mesh portion is not particularly limited, and examples thereof include a ceramic plate-like body having many fine pores (including a plate-like body having different pore diameters / different pore densities in different regions), a sheet having a first line portion layer (support layer) and a second line portion layer arranged in a shape other than a mesh (an example of which is a so-called narrow plate-shaped sheet), etc.

[0049] The bottom plate of the firing jig of the present invention is not particularly limited as long as it satisfies the following relationship with the setter placed thereon:

[0050] (1) An anti-slip portion is provided in a predetermined area of ​​the surface of the bottom plate on the side where the setter is placed and facing the mesh portion;

[0051] (2) In a specified area of ​​the first line portion layer including a portion arranged above the anti-slip portion, when the average width of the first line portion is denoted by D (mm), and the 10-point average roughness of the anti-slip portion measured by observation using a laser microscope in accordance with JIS B0601:1994 is denoted by Rzjis (μm), the relationship of 5≤Rzjis / D≤100 is satisfied.

[0052] In addition, D1 and D2 in the embodiments described later are both included in the definition of D described above, and Rzjis1 and Rzjis2 in the embodiments described later are both included in the definition of Rzjis described above.

[0053] The shape of the base plate is not particularly limited as long as the base (reference surface) of the upper surface is flat at least in the area where the fixer may be placed, has an outer periphery that can accommodate the entirety of the fixer and can stably place the fixer. The shape of the base plate can be, for example, a flat plate of polygonal shapes such as a roughly circular, roughly elliptical, roughly rectangular, etc. The thickness of the base material portion of the base plate (hereinafter, referring to the portion other than the anti-slip portion of the base plate) at least in the area where the fixer may be placed is not particularly limited, for example, it can be more than 1mm and less than 50mm, or it can be more than 2mm and less than 30mm. The thickness of the base material portion of the base plate, at least in the area where the fixer may be placed, can be the same thickness in the entire base plate, or there can be a change in thickness in a part. In addition, a peripheral wall or rib can be provided on at least a part of the base plate. The base plate can also be provided with a peripheral wall or rib on the entirety of its surroundings. In addition, from the perspective of ensuring the manipulability or air permeability during firing brought about by the multi-stage stack, the base plate can be provided with a leg portion on a part of its bottom (usually at multiple locations near the periphery). Alternatively, the base plate may be provided with supporting columns on a portion of the top (usually at multiple locations near the periphery) instead of such legs. In order to maintain air permeability during the firing process, it is usually preferred to form a single or multiple separate openings (hollow portions) on the base plate. From the viewpoint of air permeability, it is also preferred that most of the base plate other than the periphery is an opening. From the same viewpoint, the opening of the base plate is not particularly limited, and it is preferred that it accounts for more than 60%, more than 70%, or more than 80% of the area within the plane formed by the outer edge of the base plate. In addition, from the same viewpoint, the area of ​​the opening of the base plate is not particularly limited, and it is also preferred that it accounts for more than 70%, more than 80%, or more than 90% of the area of ​​the fixer placed on the base plate.

[0054] In a prescribed area on the surface of one side of the base plate on which the fixture is placed, which is opposite to the mesh part, an anti-slip part is provided to prevent the fixture from sliding. "Anti-slip" in this specification also refers to a condition in which a function of physically preventing and suppressing sliding is given to the prescribed area on the surface of one side of the base plate on which the fixture is placed, which is opposite to the mesh part, thereby bringing a greater friction resistance to the sliding of the fixture when the fixture is placed on the plane, compared with the case where the prescribed area on the surface of one side of the base plate on which the fixture is placed is formed by a plane that is not given the function. The anti-slip part generally refers to a part that is composed of a substantially continuous concave-convex shape formed on the surface of the base plate (base material part), thereby giving the function of physically preventing and suppressing sliding, but it is not limited to this. For example, the anti-slip part may also be a structure in which a substantially continuous concave-convex shape formed within a prescribed area and a substantially continuous concave-convex shape formed within a prescribed area at other positions are arranged at a certain or irregular prescribed interval on the surface of the base plate (base material part).

[0055] The "prescribed area" on the surface of one side of the base plate mounting fixture is not particularly limited as long as it includes a region that is opposite to at least a part of the mesh portion, and the region may be one or more (for example, more than 2 and less than 10). That is, the "prescribed area" on the surface of the base plate may be appropriately determined in accordance with various factors such as the configuration of the mesh portion of the fixture, the shape design of the mesh, etc. An anti-slip portion may be provided in each of one or more (two, more than 3, more than 4, or more than 5) separated prescribed areas. In the case where an anti-slip portion is provided in a plurality of separated prescribed areas, the area of ​​the anti-slip portion in each area may be the same or different. An anti-slip portion may also be provided in a region including all the positions opposite to the mesh portion on the surface of one side of the base plate mounting fixture. An anti-slip portion may also be provided on substantially the entire surface of one side of the base plate mounting fixture.

[0056] exist Figure 3 One embodiment of the combination of the setter and the base plate of the firing jig of the present invention is shown in FIG. Neither the setter nor the base plate of the firing jig of the present invention is limited to Figure 3 of the form, which is just one example.

[0057] exist Figure 34 represents a firing jig (composed of a combination of a base plate and a setter), 5 represents a setter (ceramic sheet), 6 represents a base plate, 7 represents a frame (base material portion of the base plate), 8 represents a hollow portion (opening portion), 9 represents a peripheral wall portion (rib plate), 10 represents a leg portion, and 11 represents an anti-slip portion. The setter 5, which is a part of the firing jig 4, is formed as a whole by a mesh portion composed of a first line portion layer and a second line portion layer, wherein the first line portion layer is composed of a first line portion extending in one direction at approximately regular intervals, and the second line portion layer is composed of a second line portion extending in one direction at approximately regular intervals and in a substantially straight line therewith. The base plate 6, which is another part of the firing jig 4, is composed of a frame 7 which is a roughly rectangular plate-like body having a hollow portion 8, and a vertical peripheral wall portion 9 is formed around the whole, and legs 10 for a multi-stage stacking body are provided at the four corners of the rectangle. The peripheral wall portion (rib plate) 9 is illustrated as a structure forming the entire surrounding, but it may also be a part of the surrounding. The upper surface of the frame 7 of the base plate 6 is a plane capable of placing the entire peripheral portion of the setter 5, and the peripheral wall portion 9 is formed so that when the setter 5 is placed on the frame 7 of the base plate 6, the entire peripheral portion of the setter 5 has a predetermined interval up to the peripheral wall portion. Anti-slip portions (roughly continuous concave-convex shapes) 11 are formed at predetermined positions on the surfaces of the respective sides of the frame 7 of the base plate 6. When the setter 5 is placed on the frame 7 of the base plate 6, the meshed portions constituting the entire setter 5 on the surfaces of the respective sides of the frame 7 are configured to be engaged with at least a portion of the plurality of anti-slip portions 11, and are given the ability to prevent / suppress sliding. By stacking a plurality of firing jigs 4, which are a combination of such setters 5 and base plates 6, in the longitudinal direction, a firing jig of a multi-stage stack can be formed. In such a multi-stage stack, air permeability is ensured between the plurality of leg portions 10 in addition to the hollow portion 8 and also when the peripheral wall portion is formed on a part of the periphery, so that an efficient firing process can be performed.

[0058] As in Figure 3 As shown in FIG. 1 as an example, a preferred embodiment of the firing jig of the present invention is that an anti-slip portion (typically a substantially continuous concave-convex shape) is provided in each of the plurality of predetermined areas on the surface of the base plate on the side where the setter is placed and opposite to the mesh portion, and the anti-slip portion is arranged so that each of the plurality of areas of the base plate corresponds to the vicinity of the peripheral edge of the setter when the setter is placed on the base plate. By satisfying the relationship between the anti-slip portion and the first line portion described below and adopting such an arrangement, the setter is placed on the base plate more stably, and the sliding of the setter on the base plate can be effectively prevented and suppressed.

[0059] In order to more reliably obtain the effect, the total area of ​​the region on the bottom plate where the anti-slip portion is provided is preferably 0.004% or more of the total area of ​​the opposed setter surface, more preferably 0.2% or more, and even more preferably 0.5% or more. On the other hand, from the perspective of reducing the rate of defective products during bottom plate manufacturing and efficiently firing the fired object in a state where the bottom plate and the setter are formed into a multi-stage stack, the ratio may be 15% or less, typically 10% or less.

[0060] exist Figure 4 1 shows an embodiment of a combination of a fixer and a base plate of a firing fixture of the utility model. This figure shows a state where the fixer is placed on the base plate. Here, 12 represents the first line portion of the mesh portion of the fixer, 13 represents the base plate (substrate portion), and 14 represents an anti-slip portion formed in a specified area on the base plate (in the case where a plurality of anti-slip portions are formed in a specified area on the base plate, one of them is represented). In this figure, when the fixer is placed on the base plate, one or more (usually a plurality of protrusions in the protrusion group as shown in the figure) of a group of tiny protrusions of a concave-convex shape formed roughly continuously as the anti-slip portion 14 contacts the first line portion 12.

[0061] In addition, Figure 4 (and the following Figure 5 ), the group of tiny protrusions of the concavo-convex shape of the anti-slip portion 14 is depicted as being in contact with adjacent protrusions as an example for the sake of convenience of explanation, but the present invention is not limited to this.

[0062] like Figure 4 As shown, when the average width of the first line portion 12 in a specified area of ​​the first line portion layer arranged above the anti-slip portion 14 is D1 (mm), and the 10-point average roughness of the anti-slip portion 14 measured by observation with a laser microscope in accordance with JIS B0601:1994 for the anti-slip portion 14 in a specified area opposite to the mesh portion on the bottom plate 13 is Rzjis1 (μm), the ratio of Rzjis1 (μm) to D1 (mm) is greater than 5 and less than 100, that is, the relationship of 5≤Rzjis1 / D1≤100 is satisfied.

[0063] Here, the first line portion 12 is generally designed to have a certain width and extend in one direction, but its width may have a slight error due to the forming process and the firing process of the molded body provided to the firing. Considering such an error in the width of the first line portion, the average width of the first line portion 12 is defined as D1 (the same applies to the average width D2 of other embodiments described later). That is, within a predetermined area, the average value of the width of the first line portion at any five locations in a plan view parallel to the upper surface of the base plate in a direction perpendicular to the design direction of the first line portion is defined as the average width D1.

[0064] In addition, the 10-point average roughness Rzjis1 (μm) of the anti-slip portion 14 is measured by observation using a laser microscope, for example, "VK-8710" manufactured by Keyence Corporation of Japan is used as the laser microscope, and the cross-sectional curve scanned at a photographic magnification of 200 times is used as the observation object for measurement (the same applies to the average width Rzjis2 of other embodiments described later).

[0065] Thus, when the average width of the first line portion provided in the predetermined area of ​​the first line portion layer is D (mm), and the 10-point average roughness of the anti-slip portion provided in the predetermined area on the bottom plate opposite to the mesh portion measured by observation using a laser microscope in accordance with JIS B0601:1994 is Rzjis (μm), a sufficient and appropriate degree of frictional resistance is given to the sliding of the setter on the bottom plate by satisfying the relationship of 5≤Rzjis / D≤100. Thus, the setter can be sufficiently prevented from sliding on the bottom plate, and at the same time, damage and falling of the setter placed on the bottom plate and damage to the object to be fired placed on the setter can be effectively suppressed, thereby achieving an unexpected and excellent effect of greatly improving the operability of the firing jig as a ceramic product.

[0066] In a preferred embodiment, from the viewpoint of further improving the above-mentioned desired effects, when the average width of the first line portion in a specified area of ​​the first line portion layer is D (mm), regarding the anti-slip portion provided in a specified area opposite to the mesh portion on the bottom plate, when the 10-point average roughness of the anti-slip portion measured by observation with a laser microscope in accordance with JIS B0601:1994 is Rzjis (μm), the range of Rzjis / D can be 5≤Rzjis / D≤95, 5≤Rzjis / D≤90, 5≤Rzjis / D≤85, 5≤Rzjis / D≤80, 5≤Rzjis / D≤75, 5≤Rzjis / D≤70, 5≤Rzjis / D≤65, 5≤Rzjis / D≤60, 5≤Rzjis / D≤55, 5≤Rzjis / D≤50, 10≤Rzjis / D D≤100、10≤Rzjis / D≤95、10≤Rzjis / D≤90、10≤Rzjis / D≤85、10≤Rzjis / D≤80、10≤Rzjis / D≤75、10≤Rzjis / D≤70、10≤Rzjis / D≤65、10≤Rzjis / D≤60、10≤Rzjis / D≤55、10≤Rzjis / D≤50、15≤Rzjis / D≤100、15≤Rzjis / D≤95、15≤Rzjis / D≤90、15≤Rzjis / D≤85、1 5≤Rzjis / D≤80、15≤Rzjis / D≤75、15≤Rzjis / D≤70、15≤Rzjis / D≤65、15≤Rzjis / D≤60、15≤Rzjis / D≤55、15≤Rzjis / D≤50、20≤Rzjis / D≤100、20≤Rzjis / D≤95、20≤Rzjis / D≤90、20≤Rzjis / D≤85、20≤Rzjis / D≤80、20≤Rzjis / D≤75、20≤Rzjis / D≤70、20≤Rzjis / D≤65, 20≤Rzjis / D≤60, 20≤Rzjis / D≤55, 20≤Rzjis / D≤50, 25≤Rzjis / D≤100, 25≤Rzjis / D≤95, 25≤Rzjis / D≤90, 25≤Rzjis / D≤85, 25≤Rzjis / D≤80, 25≤Rzjis / D≤75, 25≤Rzjis / D≤70, 25≤Rzjis / D≤65, 25≤Rzjis / D≤60, 25≤Rzjis / D≤55, or 25≤Rzjis / D≤50.

[0067] In another preferred embodiment, from the viewpoint of further improving the above-mentioned desired effects, when the 10-point average roughness of the anti-slip portion provided in a specified area opposite to the mesh portion on the bottom plate measured by observation with a laser microscope in accordance with JIS B0601:1994 is denoted as Rzjis (μm), the range of Rzjis can be 1≤Rzjis≤30 (hereinafter, the expression of μm as the unit of Rzjis will be omitted), 1≤Rzjis≤25, 1≤Rzjis≤20, 1≤Rzjis≤18, 1≤Rzjis≤16, 3≤Rzjis≤30, 3≤Rzjis≤25, 3≤Rzjis≤20, 3≤Rzjis≤18 , 3≤Rzjis≤16, 5≤Rzjis≤30, 5≤Rzjis≤25, 5≤Rzjis≤20, 5≤Rzjis≤18, 5≤Rzjis≤16, 7≤Rzjis≤30, 7≤Rzjis≤25, 7≤Rzjis≤20, 7≤Rzjis≤18, 7≤Rzjis≤16, 10≤Rzjis≤30, 10≤Rzjis≤25, 10≤Rzjis≤20, 10≤Rzjis≤18, or 10≤Rzjis≤16.

[0068] exist Figure 5 Another embodiment of the combination of the setter and the base plate in the firing fixture of the utility model is shown in the figure. This figure shows a state where the setter is placed on the base plate. Here, 15 represents the first line portion of the mesh portion of the setter, 16 represents the base plate (substrate portion), and 17 represents an anti-slip portion formed in a specified area on the base plate (in the case where multiple anti-slip portions are formed in a specified area on the base plate, one of them is represented). In this figure, when the setter is placed on the base plate, one or more (usually multiple protrusions in the protrusion group as shown in the figure) of the group of tiny protrusions of a concave-convex shape formed roughly continuously as the anti-slip portion contacts the first line portion 15.

[0069] like Figure 5As shown, when the average width of the first line portion 15 in a predetermined area of ​​the first line portion layer disposed above the anti-slip portion 17 is D2 (mm), the 10-point average roughness of the anti-slip portion 17 measured by observation using a laser microscope according to JIS B0601:1994 is Rzjis2 (μm), and the maximum height of the anti-slip portion measured by observation using a laser microscope according to JIS B0601:2001 is Rz (μm), not only the relationship of 5≤Rzjis2 / D2≤100 (or any preferred range described above) is satisfied, but also the relationship of the ratio of Rz (μm) to Rzjis2 (μm) being 1.1 or more and 10 or less, that is, 1.1≤Rz / Rzjis2≤10 is satisfied. In a preferred embodiment, the ratio may be 1.2≤Rz / Rzjis2≤3.

[0070] In addition, the observation using a laser microscope for measuring the maximum height Rz (μm) of the anti-slip portion 17 is the same as that of Rzjis1 and Rzjis2. For example, "VK-8710" manufactured by Keyence Corporation of Japan is used as a laser microscope, and the cross-sectional curve scanned at a photographic magnification of 200 times is used as the observation object for measurement.

[0071] Thus, when the average width of the first line portion provided in the predetermined region of the first line portion layer is D (mm), the 10-point average roughness of the anti-slip portion measured by observation using a laser microscope according to JIS B0601:1994 is Rzjis (μm), and the maximum height of the anti-slip portion measured by observation using a laser microscope according to JIS B0601:2001 is Rz (μm), by satisfying the relationship of 1.1≤Rz / Rzjis≤10 in addition to the relationship of 5≤Rzjis / D≤100 (or any preferred range described above), the presence of the concavo-convex shape with a height extremely protruding relative to the average roughness of the concavo-convex shape of the anti-slip portion is excluded, the slipping of the bottom plate of the setter can be sufficiently prevented, and the damage and falling of the setter placed on the bottom plate and the damage to the object to be fired arranged on the setter can be further suppressed. As a result, the operability of the firing jig as a ceramic product can be further improved dramatically.

[0072] In a preferred embodiment, from the viewpoint of further improving the above-mentioned desired effects, when the average width of the first line portion in a specified area of ​​the first line portion layer is D (mm), the 10-point average roughness of the anti-slip portion measured by observation with a laser microscope in accordance with JIS B0601:1994 for the anti-slip portion provided in a specified area opposite to the mesh portion on the bottom plate is Rzjis (μm), and the maximum height of the anti-slip portion measured by observation with a laser microscope in accordance with JIS B0601:2001 is Rz (μm), the range of Rz / Rzjis can be 1.1≤Rz / Rzjis≤10, 1.2≤Rz / Rzjis≤10, 1.3≤Rz / Rzjis≤10, 1.4≤Rz / Rzjis≤10, 1.5≤Rz / Rzjis≤10, 1.6≤Rz / Rzjis≤10, 1.7≤Rz / Rzjis≤10 ≤10, 1.8≤Rz / Rzjis≤10, 1.9≤Rz / Rzjis≤10, 2≤Rz / Rzjis≤10, 1.1≤Rz / Rzjis≤7, 1.2≤Rz / Rzjis≤7, 1. 3≤Rz / Rzjis≤7, 1.4≤Rz / Rzjis≤7, 1.5≤Rz / Rzjis≤7, 1.6≤Rz / Rzjis≤7, 1.7≤Rz / Rzjis≤7, 1.8≤Rz / Rzj is≤7, 1.9≤Rz / Rzjis≤7, 2≤Rz / Rzjis≤7, 1.1≤Rz / Rzjis≤5, 1.2≤Rz / Rzjis≤5, 1.3≤Rz / Rzjis≤5, 1.4≤ Rz / Rzjis≤5, 1.5≤Rz / Rzjis≤5, 1.6≤Rz / Rzjis≤5, 1.7≤Rz / Rzjis≤5, 1.8≤Rz / Rzjis≤5, 1.9≤Rz / Rzjis ≤5, 2≤Rz / Rzjis≤5, 1.1≤Rz / Rzjis≤3, 1.2≤Rz / Rzjis≤3, 1.3≤Rz / Rzjis≤3, 1.4≤Rz / Rzjis≤3, 1.5≤Rz / Rzjis≤3, 1.6≤Rz / Rzjis≤3, 1.7≤Rz / Rzjis≤3, 1.8≤Rz / Rzjis≤3, 1.9≤Rz / Rzjis≤3, or 2≤Rz / Rzjis≤3.

[0073] Method for manufacturing base plate with setter and anti-slip part

[0074] Hereinafter, a method for manufacturing a base plate including a setter and an anti-slip portion will be described, but these should be understood as non-limiting examples.

[0075] As described above, the parts other than the mesh part of the setter (if any) may adopt any known setter structure, and the mesh part and the parts other than the mesh part may be combined by any known method, or may be a ceramic sheet sintered body in which the two are integrally formed. Therefore, the following description will focus on the manufacturing method of the mesh part of the setter.

[0076] Examples of ceramic raw material powder used to make the mesh portion of the setter are as described above. The mass ratio of the ceramic raw material powder in the raw material paste can generally be 20 mass % to 85 mass %, preferably 30 mass % to 75 mass %, relative to the mass of the entire paste.

[0077] The average particle size of the ceramic raw material powder used in the raw material paste can generally be in the range of 0.1 to 20 μm, preferably in the range of 0.2 to 10 μm. The average particle size of the ceramic raw material powder here is based on the value of the volume cumulative median diameter (D50) obtained by the laser diffraction / scattering method. When the average particle size of the ceramic raw material powder is within the above range, the strength / stability of the structure after firing is increased, and a sintered body with a reduced possibility of collapse can be obtained.

[0078] As a medium of the raw material paste for manufacturing the first line portion layer and the second line portion layer of the mesh portion, water is usually used. As a medium other than water, ethanol, acetone, ethyl acetate, etc. are also used. Two or more of these mediums can also be mixed. The mass ratio of the medium in the raw material paste can usually be 10 mass% to 60 mass% relative to the mass of the entire paste, and preferably 15 mass% to 55 mass%.

[0079] The raw material paste for making the molded body as the precursor of the first line portion layer and the second line portion layer of the mesh portion may also contain a known sintering aid in an appropriate amount by arbitrary selection. In addition, the raw material paste may contain any known binder. The mass ratio of the binder in the raw material paste may be, for example, 0 mass % to 40 mass % relative to the total mass of the raw material paste, and preferably 1 mass % to 40 mass %.

[0080] From the point of view of being able to smoothly manufacture the line coating body, the viscosity of the raw material paste is preferably high viscosity at the temperature when the line coating body is applied. The viscosity of the raw material paste is not particularly limited, and is preferably 1.5 MPa·s or more and 5.0 MPa·s or less at the temperature when applied (typically room temperature such as about 25°C). The viscosity of the raw material paste here refers to the measured value 4 minutes after the start of the measurement using a cone-plate rotational viscometer or a rheometer at a rotation speed of 0.3 rpm. The raw material paste may contain a known thickener, flocculant, thixotropic agent, etc. as a viscosity adjuster.

[0081] In order to stabilize the ejection amount of the molded body used as the precursor of the first and second lined layer as the mesh portion, the raw material paste may contain, for example, a known plasticizer, lubricant, dispersant, sedimentation inhibitor, pH adjuster, etc.

[0082] The raw material paste thus obtained is discharged from the discharge device onto the flat substrate to form a plurality of first line-coated bodies each extending in one direction and arranged at a given interval. The first line-coated bodies correspond to the first line portions of the mesh-shaped part.

[0083] As the ejection device, various known devices such as a small extruder, a printing press, etc. can be used. These ejection devices can typically be equipped with a dispenser with a nozzle. After the first line coating body is ejected, the medium contained in the first line coating body can be removed and dried to increase the viscosity. The proportion of the medium in the first line coating body after the medium removal operation is preferably reduced to less than 50% by mass, and more preferably reduced to less than 30% by mass.

[0084] Next, a plurality of second line coating bodies are formed using a raw material paste, each extending in one direction and arranged at a given interval in a manner that is connected to and intersects with each of the first line coating bodies. The second line coating body corresponds to the second line portion of the mesh portion. The raw material paste used to form the second line coating body may be the same as or different from the raw material paste used to form the first line coating body, but it is more preferable that they are the same from the perspective of the efficiency of forming the line coating body and the integrity of the structure and physical properties of the produced ceramic sheet sintered body.

[0085] The specific shapes of the plurality of first line coated bodies and the plurality of second line coated bodies formed as molded bodies can be constructed to be suitable for the desired shapes of the various mesh-shaped parts described above.

[0086] In an additional embodiment, a raw material paste can also be used to arbitrarily and selectively form a plurality of third line coating bodies, each extending in one direction, which are arranged at a given interval in a manner that is connected to each line of the first line coating body and crosses the first line coating body and the second line coating body. The raw material paste used to form the arbitrarily selected third line coating body can be the same as or different from the raw material paste used to form the first / second line coating body, but it is more preferable to be the same from the perspective of the efficiency of forming the line coating body and the structural and physical integrity of the produced ceramic sheet sintered body.

[0087] The target mesh portion can be obtained by peeling the molded body including the plurality of first line coating bodies and the plurality of second line coating bodies obtained in this way from the substrate (molded body forming workbench) and placing it in a firing fixture (firing furnace) and firing it. By firing, the mesh portion including the first line portion layer composed of the plurality of first line portions and the second line portion layer composed of the plurality of second line portions is constructed as a sintered body as a structure that is physically bonded by an adhesive and does not generally include each component.

[0088] The firing process used to obtain the mesh-like portion can be carried out in an atmospheric environment (under atmospheric pressure) or under pressure of an inert gas such as nitrogen, as required. The firing temperature can be selected at an appropriate temperature according to the type of raw powder of the ceramic raw material. The same is true for the firing time. As a non-limiting example of the firing temperature, it can be above 500°C, above 800°C, or above 1000°C, and can be below 4000°C, below 3500°C, or below 3000°C. As a non-limiting example of the firing time, it can be more than 30 minutes, more than 1 hour, or more than 2 hours, and can be less than 24 hours, less than 12 hours, or less than 6 hours.

[0089] The ceramic raw material powder and additives for manufacturing the base material part (except the anti-slip part) of the bottom plate and the anti-slip part provided thereon can be appropriately selected from the above items with respect to the mesh part of the setter. For example, the ceramic raw material powder of the bottom plate can be one or a combination of two or more of aluminum oxide (Al2O3), zirconium oxide (ZrO2), magnesium oxide (MgO), molite (3Al2O3-2SiO2), silicon carbide (SiC), silicon nitride (Si3N4), aluminum nitride (AlN), boron carbide (B4C), cordierite (MgO / Al2O3 / SiO2), aluminum titanate (Al2TiO5), magnesium titanate (MgTiO3), titanium diboride (TiB2), etc.

[0090] The base material portion of the bottom plate (excluding the anti-slip portion) and the anti-slip portion provided thereon may be formed of the same raw material (i.e., a raw material containing the same mixture of ceramic raw material powder and additives) or different raw materials. The base material portion of the bottom plate and the anti-slip portion provided thereon are preferably formed of the same raw material from the viewpoint of suppressing heating and cooling (i.e., expansion and contraction) during firing and preventing and suppressing the granulation or peeling of the anti-slip portion caused by the load of the setter and the fired object.

[0091] The method for forming the anti-slip portion of the base plate is not particularly limited as long as it satisfies the above-mentioned relationship between its 10-point average roughness Rzjis and the average width D of the first line portion, and any known process that can form a roughly continuous concave-convex shape on the surface of the base plate (substrate portion) can be used. As a typical example of the method for forming the anti-slip portion, when the base plate and the anti-slip portion provided thereon are formed by the same raw material, shot peening (shot peening) on ​​the surface of the base plate (substrate portion) as a fired object can be cited, and when the base plate and the anti-slip portion provided thereon are formed by different raw materials, a process for forming a concave-convex shape based on the spraying (spraying) of an inorganic substance can be cited. From the perspective of repeated heating and subsequent cooling of the fired object brought about by the firing process, and preventing and suppressing the threshing or peeling of the anti-slip portion caused by the load of the setter and the fired object, shot peening is more preferred.

[0092] Generally, shot peening can be performed by projecting a particle-like medium (projection material) from a nozzle onto a predetermined area on the surface of a base plate (base material) of a fired object.

[0093] For example, the ejection diameter of the nozzle can be between 0.5 mm and 10.0 mm, preferably between 0.75 mm and 8.5 mm. The particle size of the medium can be between 1.0 μm and 1000 μm, preferably between 2.0 μm and 800 μm. The projection amount of the medium can be between 10 g / min and 3000 g / min, preferably between 25 g / min and 2750 g / min. In addition, the ejection pressure of the medium can be between 0.005 MPa and 0.5 MPa, more preferably between 0.01 MPa and 0.1 MPa. Examples of the material of the medium include aluminum oxide, zirconium oxide, silicon carbide, iron, aluminum, core, glass, steel and boron carbide. The Mohs hardness of the medium can be above 4, preferably above 5.5 or above 6.0.

[0094] In order to selectively shot peen desired areas on the base plate, it is also preferred to use a masking method.

[0095] The type of inorganic substance used in the spraying (spraying) of the inorganic substance is not particularly limited, and examples thereof include ceramic materials as metal oxides such as aluminum oxide (aluminum oxide), zirconium oxide (zirconium oxide), titanium oxide (titanium dioxide), chromium oxide (chromium trioxide), magnesium oxide (magnesium oxide) or mixtures thereof.

[0096] As the process of spraying (spraying), it can be appropriately selected from some known methods and conditions. Cold spraying (low temperature spraying method) can also be adopted. In addition, any method such as flame spraying, plasma spraying, high-speed flame (gas) spraying can be adopted.

[0097] [Example]

[0098] Production of a mesh ceramic sheet 1 as a setter

[0099] (1) Preparation of paste for forming line coating body

[0100] 65.3 parts of 3 mol% yttria-added partially stabilized zirconium oxide powder with an average particle size of 0.8 μm, 5.0 parts of hydroxypropyl methylcellulose (average degree of polymerization: 300,000 g / mol) as a water-based binder, 2.5 parts of glycerin as a plasticizer, 1.1 parts of a polycarboxylic acid dispersant (molecular weight 12,000) and 26.1 parts of water were mixed and degassed to prepare a paste. The viscosity of the paste was 2.3 MPa·s at 25°C.

[0101] (2) Formation of line coating

[0102] Using the above paste as a raw material, a dispenser with a circular nozzle with a diameter of 0.8 mm is used to form a first line coating body on a resin substrate. Next, a dryer is used to blow hot air to the first line coating body to remove water and dry the first line coating body. The water content of the first line coating body after drying is 10%. Next, a second line coating body intersecting with the first line coating body is formed. The intersection angle of the two line coating bodies is set to 90 degrees. A dryer is used to blow hot air to the second line coating body to remove water and dry the second line coating body. The water content of the second line coating body after drying is 8%. Through these operations, a grid-like precursor consisting of a first line body and a second line body that cross vertically is obtained.

[0103] (3) Firing process

[0104] After the dried grid-shaped precursor is peeled off from the resin substrate, it is placed in an atmospheric firing furnace. Degreasing and firing are carried out in the firing furnace to obtain a mesh ceramic sheet 1 made of zirconium oxide. The firing temperature is set to 1450°C, and the firing time is set to 3 hours. In the obtained mesh ceramic sheet 1, the first line portion and the second line portion (each of which has a cross-sectional shape that is a roughly elliptical shape that is slightly shorter in the up and down direction) are in point contact at their intersection. The width W1 of the first line portion of the obtained mesh ceramic sheet 1 is 800μm, and the width W2 of the second line portion is 800μm. The width W1a of the first line portion at the intersection is 880μm, and the width W2a of the second line portion is 820μm. The spacing P1 of the first line portion is 400μm, and the spacing P2 of the second line portion is 400μm. In addition, the size of the through hole (opening size) on the mesh ceramic sheet 1 is 0.4mm□, and the area of ​​the through hole is 0.16mm 2The angle between each line portion and the side portion of the mesh ceramic sheet 1 is 45°, and the intersection angle between the first line portion and the second line portion is 90°. The size of the mesh ceramic sheet 1 is 200 mm in length and 200 mm in width.

[0105] Regarding the width W1 (800μm=0.8mm) of the first line portion mentioned above in this film, it is the value of the average width D when the width of the first line portion is measured at any five locations when viewed from above and parallel to the upper surface of the base plate in a direction perpendicular to the design direction of the first line portion using a digital microscope (manufactured by Keyence Corporation of Japan, trade name "VHX-5000").

[0106] Manufacturing of the mesh ceramic sheet 2 as a setter

[0107] After obtaining a grid-shaped precursor consisting of a first line body and a second line body that cross each other vertically by the same process as above, a mesh ceramic sheet 2 made of zirconia is obtained under the same firing conditions as above. The width W1 of the first line portion of the mesh ceramic sheet 2 is 200μm (the average width D=0.2mm obtained by the above measurement method), and the width W2 of the second line portion is 200μm. The width W1a of the first line portion at the intersection is 220μm, and the width W2a of the second line portion is 205μm. The spacing P1 of the first line portion is 200μm, and the spacing P2 of the second line portion is 200μm. In addition, the size of the through hole (opening size) of the mesh ceramic sheet 2 is 0.2mm□, and the area of ​​the through hole is 0.04mm 2 The angle between each line portion and the side portion of the mesh ceramic sheet 2 is 45°, and the intersection angle between the first line portion and the second line portion is 90°. The size of the mesh ceramic sheet 2 is 200 mm in length and 200 mm in width.

[0108] Manufacturing of the base plate 1

[0109] After obtaining a molded body as a precursor using a mixed material containing 65 parts by mass of aluminum oxide and 35 parts by mass of silicon oxide as a binder, a rectangular bottom plate 1 of 220 mm in length × 220 mm in width × 2 mm in thickness was obtained under the conditions of a firing temperature of 1700°C and a firing time of 4 hours. A rectangular opening of 180 mm in length × 180 mm in width was provided in the center of the bottom plate 1, and a rectangular peripheral wall of 3 mm in height and 7 mm in top width was provided on the entire periphery of the bottom plate 1, thereby providing a rectangular plane of 13 mm in width between the opening and the peripheral wall of the bottom plate 1. That is, when the above-mentioned mesh ceramic sheet of 200 mm in length × 200 mm in width was placed on the entire opening and the area of ​​10 mm in width in the rectangular plane, the size was selected so that a gap of 3 mm was given between the end of the mesh ceramic sheet and the rectangular peripheral wall over the entire periphery of the bottom plate.

[0110] The portion other than the rectangular plane portion of the bottom plate was subjected to a masking method, and a shot peening device (LDQ-3 (AB) manufactured by Fuji Seisakusho Co., Ltd., Japan) was used to project white fused alumina #60 from a nozzle with a spray diameter of 12 mm at a spray pressure of 0.5 MPa for 60 seconds to form an anti-slip portion. Thus, a bottom plate 1 having a 10-point average roughness Rzjis of 18 μm in the entire plane portion of the mounting device was obtained. The 10-point average roughness Rzjis of the anti-slip portion was measured using a laser microscope "VK-8710" manufactured by Keyence Corporation of Japan, and a cross-sectional curve scanned at a photographic magnification of 200 times was used as an observation object.

[0111] Manufacturing of base plate 2

[0112] The bottom plate 2 was obtained by the same procedure as that of the bottom plate 1 except that the 10-point average roughness Rzjis of the anti-slip portion was set to 10 μm by appropriately changing the conditions of the shot peening.

[0113] Manufacturing of base plate 3

[0114] The bottom plate 3 was obtained by the same procedure as the bottom plate 1 except that the 10-point average roughness Rzjis of the anti-slip portion was set to 12 μm by appropriately changing the conditions of the shot peening.

[0115] Manufacturing of the base plate 4

[0116] The bottom plate 4 was obtained by the same procedure as that of the bottom plate 1 except that the 10-point average roughness Rzjis of the anti-slip portion was set to 14 μm by appropriately changing the conditions of the shot peening.

[0117] Production of Base Plate 5 (Production for Use in Comparative Example 1 Below)

[0118] The bottom plate 5 was obtained by the same procedure as that of the bottom plate 1 except that the 10-point average roughness Rzjis of the anti-slip portion was set to 0.5 μm by appropriately changing the conditions of the shot peening.

[0119] Production of Base Plate 6 (Production for Use in Comparative Example 2 Below)

[0120] The bottom plate 6 was obtained by the same procedure as the bottom plate 1 except that the 10-point average roughness Rzjis of the anti-slip portion was set to 24 μm by appropriately changing the conditions of the shot peening.

[0121] Manufacturing of the base plate 2a

[0122] The bottom plate 2a is obtained by the same procedure as the bottom plate 1 except that the 10-point average roughness Rzjis of the anti-slip portion is set to 10 μm by appropriately changing the shot peening conditions and further adjusting the maximum height Rz of the anti-slip portion to 12 μm (Rz / Rzjis=1.2).

[0123] The maximum height Rz (JIS B0601: 2001) and the 10-point average roughness Rzjis (JIS B0601: 1994) are measured by using a laser microscope "VK-8710" manufactured by Keyence Corporation of Japan, with the cross-sectional curve scanned at a photographic magnification of 200 times as the observation object (the same applies to the subsequent bottom plates 2b to 2e).

[0124] Manufacturing of base plate 2b

[0125] The bottom plate 2b is obtained by the same procedure as the bottom plate 1 except that the 10-point average roughness Rzjis of the anti-slip portion is set to 10 μm by appropriately changing the shot peening conditions and further adjusting the maximum height Rz of the anti-slip portion to 20 μm (Rz / Rzjis=2).

[0126] Manufacturing of the bottom plate 2c

[0127] The bottom plate 2c was obtained by the same procedure as the bottom plate 1 except that the 10-point average roughness Rzjis of the anti-slip portion was set to 10 μm by appropriately changing the shot peening conditions and further adjusting the maximum height Rz of the anti-slip portion to 30 μm (Rz / Rzjis=3).

[0128] Manufacturing of base plate 2d

[0129] The bottom plate 2d is obtained by the same procedure as the bottom plate 1 except that the 10-point average roughness Rzjis of the anti-slip portion is set to 10 μm by appropriately changing the shot peening conditions and further adjusting so that the maximum height Rz of the anti-slip portion becomes 10 μm (Rz / Rzjis=1).

[0130] Manufacturing of base plate 2e

[0131] The bottom plate 2e was obtained by the same procedure as the bottom plate 1 except that the 10-point average roughness Rzjis of the anti-slip portion was set to 10 μm by appropriately changing the shot peening conditions and further adjusting the maximum height Rz of the anti-slip portion to 50 μm (Rz / Rzjis=5).

[0132] Example 1

[0133] On the above-mentioned bottom plate 1 (10-point average roughness Rzjis of the anti-slip portion on the bottom plate: 18 μm), a mesh ceramic sheet 1 (average width D of the first line portion: 0.8 mm) was placed as a setter so that a gap of 3 mm was given between the end of the mesh ceramic sheet and the rectangular peripheral wall portion over the entire circumference of the bottom plate. In this placed state, the ratio Rzjis (μm) / D (mm) was 22.5.

[0134] Example 2

[0135] On the above-mentioned bottom plate 2 (10-point average roughness Rzjis of the anti-slip portion on the bottom plate: 10 μm), a mesh ceramic sheet 2 (average width D of the first line portion: 0.2 mm) was placed as a setter so that a gap of 3 mm was given between the end of the mesh ceramic sheet and the rectangular peripheral wall portion over the entire circumference of the bottom plate. In this placed state, the ratio Rzjis (μm) / D (mm) was 50.

[0136] Example 3

[0137] On the above-mentioned bottom plate 1 (10-point average roughness Rzjis of the anti-slip portion on the bottom plate: 18 μm), a mesh ceramic sheet 2 (average width D of the first line portion: 0.2 mm) was placed as a setter so that a gap of 3 mm was given between the end of the mesh ceramic sheet and the rectangular peripheral wall portion over the entire circumference of the bottom plate. In this placed state, the ratio Rzjis (μm) / D (mm) was 90.

[0138] Example 4

[0139] On the above-mentioned bottom plate 3 (10-point average roughness Rzjis of the anti-slip portion on the bottom plate: 12 μm), a mesh ceramic sheet 1 (average width D of the first line portion: 0.8 mm) was placed as a setter so that a gap of 3 mm was given between the end of the mesh ceramic sheet and the rectangular peripheral wall portion over the entire circumference of the bottom plate. In this placed state, the ratio Rzjis (μm) / D (mm) was 15.

[0140] Example 5

[0141] On the bottom plate 4 (10-point average roughness Rzjis of the anti-slip portion on the bottom plate: 14 μm), a mesh ceramic sheet 2 (average width D of the first line portion: 0.2 mm) was placed as a setter so that a gap of 3 mm was given between the end of the mesh ceramic sheet and the rectangular peripheral wall portion over the entire circumference of the bottom plate. In this placed state, the ratio Rzjis (μm) / D (mm) was 70.

[0142] Comparative Example 1

[0143] On the above-mentioned bottom plate 5 (10-point average roughness Rzjis of the anti-slip portion on the bottom plate: 0.5 μm), a mesh ceramic sheet 2 (average width D of the first line portion: 0.2 mm) was placed as a setter so that a gap of 3 mm was given between the end of the mesh ceramic sheet and the rectangular peripheral wall portion over the entire circumference of the bottom plate. In this placed state, the ratio Rzjis (μm) / D (mm) was 2.5.

[0144] Comparative Example 2

[0145] On the bottom plate 6 (10-point average roughness Rzjis of the anti-slip portion on the bottom plate: 24 μm), a mesh ceramic sheet 2 (average width D of the first line portion: 0.2 mm) was placed as a setter so that a gap of 3 mm was given between the end of the mesh ceramic sheet and the rectangular peripheral wall portion over the entire circumference of the bottom plate. In this placed state, the ratio Rzjis (μm) / D (mm) was 120.

[0146] Example 6

[0147] On the bottom plate 2a (10-point average roughness Rzjis of the anti-slip portion on the bottom plate: 10 μm; maximum height Rz of the anti-slip portion: 12 μm), a mesh ceramic sheet 2 (average width D of the first line portion: 0.2 mm) was placed as a setter so that a gap of 3 mm was given between the end of the mesh ceramic sheet and the rectangular peripheral wall portion over the entire circumference of the bottom plate. In this placed state, the ratio Rzjis (μm) / D (mm) was 50, and the ratio Rz / Rzjis was 1.2.

[0148] Example 7

[0149] On the bottom plate 2b (10-point average roughness Rzjis of the anti-slip portion on the bottom plate: 10 μm; maximum height Rz of the anti-slip portion: 20 μm), a mesh ceramic sheet 2 (average width D of the first line portion: 0.2 mm) was placed as a setter so that a gap of 3 mm was given between the end of the mesh ceramic sheet and the rectangular peripheral wall portion over the entire circumference of the bottom plate. In this placed state, the ratio Rzjis (μm) / D (mm) was 50, and the ratio Rz / Rzjis was 2.

[0150] Example 8

[0151] On the bottom plate 2c (10-point average roughness Rzjis of the anti-slip portion on the bottom plate: 10 μm; maximum height Rz of the anti-slip portion: 30 μm), a mesh ceramic sheet 2 (average width D of the first line portion: 0.2 mm) was placed as a setter so that a gap of 3 mm was given between the end of the mesh ceramic sheet and the rectangular peripheral wall portion over the entire circumference of the bottom plate. In this placed state, the ratio Rzjis (μm) / D (mm) was 50, and the ratio Rz / Rzjis was 3.

[0152] Reference Example 1

[0153] On the bottom plate 2d (10-point average roughness Rzjis of the anti-slip portion on the bottom plate: 10 μm; maximum height Rz of the anti-slip portion: 10 μm), a mesh ceramic sheet 2 (average width D of the first line portion: 0.2 mm) was placed as a setter so that a gap of 3 mm was given between the end of the mesh ceramic sheet and the rectangular peripheral wall portion over the entire circumference of the bottom plate. In this placed state, the ratio Rzjis (μm) / D (mm) was 50, and the ratio Rz / Rzjis was 1.

[0154] Reference Example 2

[0155] On the bottom plate 2e (10-point average roughness Rzjis of the anti-slip portion on the bottom plate: 10 μm; maximum height Rz of the anti-slip portion: 50 μm), a mesh ceramic sheet 2 (average width D of the first line portion: 0.2 mm) was placed as a setter so that a gap of 3 mm was given between the end of the mesh ceramic sheet and the rectangular peripheral wall portion over the entire circumference of the bottom plate. In this placed state, the ratio Rzjis (μm) / D (mm) was 50, and the ratio Rz / Rzjis was 5.

[0156] Test on the measurement of the starting angle of movement of mesh ceramic sheets

[0157] If the end of the sheet of the firing fixture consisting of the combination of the base plate and the setter of the mesh ceramic sheet placed thereon obtained in the above-mentioned Examples 1 to 5, Comparative Examples 1 to 2, Examples 6 to 8 and Reference Examples 1 to 2 is slowly raised, the inclination angle (°) of the base plate when the mesh ceramic sheet starts to slide on the base plate is measured, and it is defined as the moving start angle when the sheet is inclined. As the angle measuring device of this test, an angle meter with the trade name "AS-1" model BB01B manufactured by Japan Alice Co., Ltd. is used.

[0158] Test on the holding time of mesh ceramic sheets during vibration

[0159] The firing fixture consisting of a combination of a base plate and a setter of a mesh ceramic sheet placed thereon obtained in the above-mentioned Examples 1 to 5, Comparative Examples 1 to 2, Examples 6 to 8 and Reference Examples 1 to 2 was set on a vibration tester, and it was vibrated at a strength of 10 levels, and the time (seconds) until the mesh ceramic sheet slid 3 mm on the base plate was measured, which was defined as the holding time when the sheet vibrated. As a 60 Hz vibration tester, a trade name "VIBRATORY PACKER, TYPE VP-40" manufactured by SINFONIA TECHNOLOGY was used.

[0160] Observation test of the damage degree of mesh ceramic sheet during vibration

[0161] The firing jig consisting of a base plate and a setter for a mesh ceramic sheet placed thereon obtained in Examples 1 to 5, Comparative Examples 1 to 2, Examples 6 to 8, and Reference Examples 1 to 2 was set on a vibration tester and continuously vibrated at a level of 10 for 60 seconds, and the appearance of the sheet after the vibration was stopped was observed. If the sheet fell off the base plate before the 60-second vibration was completed, the test was terminated at that point.

[0162] The degree of damage to the sheet was determined based on the following criteria.

[0163] ○ (good): No damage was found in the entire sheet.

[0164] △ (moderate): Scars are seen in part of the film.

[0165] × (bad): Scratches were seen in a wide area or all over the sheet, or the sheet fell off the bottom plate before vibration was completed.

[0166] The measurement / observation results of the starting angle of movement when the sheet is tilted, the holding time when the sheet vibrates, and the degree of damage when the sheet vibrates for the above-mentioned Examples 1 to 5, Comparative Examples 1 to 2, Examples 6 to 8, and Reference Examples 1 to 2 are shown in Table 1 (Examples 1 to 5 and Comparative Examples 1 to 2) and Table 2 (Examples 6 to 8 and Reference Examples 1 to 2) together with the 10-point average roughness Rzjis (μm) of the anti-slip part, the average width D (mm) of the first line part, and the ratio Rzjis / D.

[0167] [Table 1]

[0168] Table 1 Test results of the structure and anti-slip properties of the firing fixture (1)

[0169]

[0170] Note:

[0171] In Example 3, after the vibration for 60 seconds was completed, scratches were observed on a part of the surface of the mesh ceramic sheet due to contact with the anti-slip portion.

[0172] In Comparative Example 1, the mesh ceramic sheet fell off the bottom plate before the 60-second vibration was completed.

[0173] [Table 2]

[0174] Table 2 Test results of the structure and anti-slip properties of the firing fixture (2)

[0175]

[0176] From these results, it is understood that the firing jig according to the present invention can sufficiently prevent the setter, which is a ceramic sheet including a mesh portion, from sliding on the bottom plate, and effectively prevent the setter from being damaged.

[0177] In addition, each technical solution or each embodiment that can be included in the present invention can be summarized as follows. [1].

[0179] A firing fixture, comprising a setter and a base plate on which the setter is placed, characterized in that:

[0180] The setter is a ceramic sheet including a mesh portion in at least a portion thereof, wherein the mesh portion is a portion including a first line portion layer and a second line portion layer, the first line portion layer and the second line portion layer being integrally formed, the first line portion layer being composed of a plurality of first line portions each extending in one direction and arranged at a given interval, and the second line portion layer being composed of a plurality of second line portions each extending in one direction and arranged at a given interval in a manner of being in contact with and intersecting the first line portions;

[0181] (1) An anti-slip portion is provided in a predetermined area of ​​the surface of the bottom plate on the side where the setter is placed and facing the mesh portion;

[0182] (2) When the average width of the first line portion is D (mm) in a specified area of ​​the first line portion layer including a portion arranged above the anti-slip portion, and the 10-point average roughness of the anti-slip portion measured by observation with a laser microscope in accordance with JIS B0601:1994 is Rzjis (μm), the relationship of 5≤Rzjis / D≤100 is satisfied. [2].

[0184] The firing jig as described in the above [1] satisfies the relationship of 20≤Rzjis / D≤80 (wherein Rzjis and D comply with the above definitions). [3].

[0186] The firing jig as described in [1] or [2] above satisfies the relationship of 5 (μm) ≤ Rzjis ≤ 25 (μm) (wherein Rzjis complies with the above definition). [4].

[0188] In the firing jig according to any one of [1] to [3] above, the anti-slip portion is composed of projections and depressions formed by shot peening. [5].

[0190] The firing jig as described in any one of [1] to [4] above, has the anti-slip portion provided in one or more specified areas opposite to the mesh portion on the surface of the base plate on the side on which the fixer is placed; the anti-slip portion is arranged in such a manner that the one or more areas respectively correspond to the vicinity of the periphery of the fixer when the fixer is placed on the base plate. [6].

[0192] For the firing jig as described in any one of [1] to [5] above, when the anti-slip portion is provided in a specified area on the surface of the base plate on one side of which the fixer is placed, the 10-point average roughness of the anti-slip portion measured by observation with a laser microscope in accordance with JIS B0601:1994 is denoted as Rzjis, and the maximum height of the anti-slip portion measured by observation with a laser microscope in accordance with JIS B0601:2001 is denoted as Rz, the relationship of 1.2≤Rz / Rzjis≤3 is satisfied.

[0193] Description of symbols

[0194] C: Burned objects

[0195] S:Setter

[0196] P: Base plate composed of multiple stacks

[0197] M: Firing jig for multi-stage stack (the above symbols C, S, P, M refer to the known examples Figure 1 )

[0198] 1: Mesh area

[0199] 2: The first line

[0200] 3: The second line part.

[0201] 4: Firing fixture (combination of setter and base plate)

[0202] 5: Fixer

[0203] 6: Bottom plate

[0204] 7: Frame (base material of the bottom plate)

[0205] 8: Hollow part (opening)

[0206] 9: Peripheral wall (rib)

[0207] 10: Legs

[0208] 11: Anti-slip part

[0209] 12: First line section

[0210] 13: Bottom plate (base material)

[0211] 14: Anti-slip part

[0212] D1: Average width of the first line

[0213] Rzjis1: 10-point average roughness of the anti-slip part (JIS B0601: 1994)

[0214] 15: First line section

[0215] 16: Bottom plate (base material)

[0216] 17: Anti-slip part

[0217] D2: Average width of the first line

[0218] Rzjis2: 10-point average roughness of the anti-slip part (JIS B0601: 1994)

[0219] Rz: Maximum height of anti-slip portion (JIS B0601: 2001)

Claims

1. A firing jig, comprising a setter and a base plate on which the setter is placed, characterized in that: The setter is a ceramic sheet including a mesh portion in at least a portion thereof, wherein the mesh portion is a portion including a first line portion layer and a second line portion layer, the first line portion layer and the second line portion layer being integrally formed, the first line portion layer being composed of a plurality of first line portions each extending in one direction and arranged at a given interval, and the second line portion layer being composed of a plurality of second line portions each extending in one direction and arranged at a given interval in a manner of being in contact with and intersecting the first line portions; (1) An anti-slip portion is provided in a predetermined area of ​​the surface of the bottom plate on the side where the setter is placed and facing the mesh portion; (2) When the average width of the first line portion is D (mm) in a specified area of ​​the first line portion layer including a portion arranged above the anti-slip portion, and the 10-point average roughness of the anti-slip portion measured by observation with a laser microscope in accordance with JIS B0601:1994 is Rzjis (μm), the relationship of 5≤Rzjis / D≤100 is satisfied.

2. The firing jig according to claim 1, characterized in that: It satisfies the relationship 20≤Rzjis / D≤80, where Rzjis and D follow the above definitions.

3. The firing jig according to claim 1 or 2, characterized in that: The relationship of 5(μm)≤Rzjis≤25(μm) is satisfied, where Rzjis follows the above definition.

4. The firing jig according to claim 1 or 2, characterized in that: The anti-slip portion is formed of projections and depressions formed by shot peening.

5. The firing jig according to claim 1 or 2, characterized in that: The anti-slip portion is provided in one or more predetermined areas on the surface of the bottom plate on the side where the setter is placed and facing the mesh portion. The anti-slip portion is disposed so that the one or more regions correspond to the vicinity of the peripheral edge of the setter when the setter is placed on the bottom plate.

6. The firing jig according to claim 1 or 2, characterized in that: When the anti-slip portion is provided in a specified area on the surface of the base plate on one side of which the fixer is placed, and the 10-point average roughness of the anti-slip portion measured by observation with a laser microscope in accordance with JIS B0601:1994 is denoted as Rzjis, and the maximum height of the anti-slip portion measured by observation with a laser microscope in accordance with JIS B0601:2001 is denoted as Rz, the relationship of 1.2≤Rz / Rzjis≤3 is satisfied.

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