Crystal smelting device with built-in flow suppression magnetic field

Abstract

The utility model discloses a crystal smelting device with a built-in flow suppression magnetic field, which comprises a single crystal furnace, the single crystal furnace comprises a furnace cover and a furnace body, a closed cavity is arranged in the furnace body, and a crystal smelting pot is arranged in the cavity; a magnet for forming a magnetic field to inhibit boiling of crystals in the crystal smelting pot is arranged on one side of the crystal smelting pot in the cavity; the magnet is arranged in the single crystal furnace, the energy consumption is low while the magnetic field intensity is increased, the first cooling device and the second cooling device are arranged in the single crystal furnace, the magnetic field intensity in the single crystal furnace is enhanced, the magnet can be cooled, and the service life of the magnet is prolonged; the extracted monocrystalline silicon has low oxygen content, the concentric circle structure in the monocrystalline silicon is improved, and the quality of the monocrystalline silicon is improved.

Description

[Technical field]

[0001] The invention relates to the technical field of single crystal furnace refining, and in particular to a crystal refining device with a built-in suppressive current magnetic field. [Background technology]

[0002] At present, the single crystal furnace places the superconducting magnet outside the single crystal furnace, surrounding the single crystal furnace. Due to a certain gap between the magnet and the single crystal furnace, the magnetic field strength weakens geometrically, resulting in a decrease in the intensity and uniformity of the magnetic field. The conduction efficiency of the magnetic field will be affected, affecting the efficiency and quality of the crystal refining process; the energy consumption is large, and the cost of the equipment itself, as well as the energy consumption and maintenance costs are high. [Contents of the utility model]

[0003] To solve the above problems, the present invention proposes a crystal refining device with a built-in suppressive current magnetic field, which places the magnet inside the single crystal furnace, thereby solving the problem that the magnetic field strength is geometrically weakened when the magnet is placed outside the single crystal furnace, the installation is complex, the energy consumption is high, and the cost is high.

[0004] A crystal refining device with a built-in current-suppressing magnetic field comprises a single crystal furnace, wherein the single crystal furnace comprises a furnace cover and a furnace body, wherein a sealed chamber is arranged in the furnace body, wherein a crystal refining pot is arranged in the chamber; wherein a magnet is arranged in the chamber on one side of the crystal refining pot to form a magnetic field and suppress boiling of crystals in the crystal refining pot.

[0005] In the crystal refining device with built-in current suppression magnetic field as described above, the magnets are an upper magnetic ring and a lower magnetic ring respectively arranged on the upper and lower sides of the crystal refining pot.

[0006] In the crystal refining device with built-in current-suppressing magnetic field as described above, a first cooling device for cooling the upper magnetic ring is arranged at the upper part of the furnace body, and a second cooling device for cooling the lower magnetic ring is arranged at the lower part of the furnace body.

[0007] In the above-mentioned built-in suppressive magnetic field crystal refining device, the first cooling device includes a first liquid inlet pipe and a first liquid outlet pipe, and a first annular pipe for placing an upper magnetic ring is provided between the first liquid inlet pipe and the first liquid outlet pipe.

[0008] In the above-mentioned built-in current-suppressing magnetic field crystal refining device, the second cooling device includes a second liquid inlet pipe and a second liquid outlet pipe; a second annular pipe connected to the second liquid inlet pipe and the second liquid outlet pipe is provided on the same side thereof for placing the lower magnetic ring.

[0009] In the above-mentioned built-in current-suppressing magnetic field crystal refining device, the upper magnetic ring is provided with a first steel shell that wraps the upper magnetic ring and enhances the heat dissipation capability.

[0010] In the above-mentioned built-in current-suppressing magnetic field crystal refining device, the lower magnetic ring is provided with a second steel shell that wraps the lower magnetic ring and enhances the heat dissipation capability.

[0011] In the crystal refining device with built-in current suppression magnetic field as described above, a shielding sleeve for shielding the magnetic field is provided between the side of the upper magnetic ring facing the center of the first annular tube and the first steel shell.

[0012] In the above-mentioned built-in current-suppressing magnetic field crystal refining device, the shielding sleeve is provided between the side of the lower magnetic ring facing the center of the second annular tube and the second steel shell.

[0013] In the crystal refining device with built-in current-suppressing magnetic field as described above, a connecting plate for reinforcing the second cooling device is connected between the second liquid inlet pipe and the second liquid outlet pipe.

[0014] Compared with the prior art, the present invention has the following advantages:

[0015] 1. The present invention places the magnet inside the single crystal furnace, which increases the magnetic field strength while reducing energy consumption.

[0016] 2. The present invention places the first cooling device and the second cooling device inside the single crystal furnace, which can cool the magnet and increase the service life of the magnet while ensuring the enhancement of the magnetic field strength in the single crystal furnace.

[0017] 3. The single crystal silicon extracted by the present invention has a lower oxygen content, and the concentric circle defects of the single crystal silicon are improved, thereby improving the quality of the single crystal silicon.

Brief Description of the Drawings

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for describing the embodiments are briefly introduced below.

[0019] Figure 1 A schematic diagram of the prior art related to the present invention;

[0020] Figure 2 It is a cross-sectional structural schematic diagram of the present invention;

[0021] Figure 3 It is a cross-sectional magnetic field distribution schematic diagram of the present invention;

[0022] Figure 4 It is a schematic cross-sectional structural diagram of the first cooling device of the present invention;

[0023] Figure 5 It is a schematic cross-sectional structural diagram of the second cooling device of the present invention;

[0024] Figure 6 This is a schematic diagram of the water flow direction of the water-cooling flange of the present invention;

[0025] Figure 7 It is an enlarged schematic diagram of the structure of part A of the present invention. [Specific implementation method]

[0026] In order to make the technical problems, technical solutions and beneficial effects solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0027] Specific embodiments, such as Figures 1 to 7 The shown device is a crystal refining device with a built-in current-suppressing magnetic field, comprising a single crystal furnace 1, wherein the single crystal furnace 1 comprises a furnace cover 11 and a furnace body 12, wherein a sealed chamber 13 is arranged in the furnace body 12, wherein a crystal refining pot 14 is arranged in the chamber 13; wherein a magnet 8 is arranged in the chamber 13 on one side of the crystal refining pot 14 to form a magnetic field and suppress boiling of crystals in the crystal refining pot 14.

[0028] Furthermore, as a preferred implementation mode of the present invention but not limitation, the magnet 8 is an upper magnetic ring 81 and a lower magnetic ring 82 respectively arranged on the upper and lower sides of the crystal refining pot 14 .

[0029] In this embodiment, each magnet can be independently controlled to achieve more precise magnetic field regulation. Each magnet is equipped with an independent control device, and the strength and direction of the magnet can be adjusted as needed. By independently controlling each magnet, the distribution of the magnetic field can be more accurately controlled during the crystal refining process to obtain a higher quality single crystal product. In addition, this embodiment can also set a magnetic field sensing device around the crystal refining pot to monitor the magnetic field distribution during the crystal refining process. The magnetic field sensing device can be implemented by sensors and the like, and can monitor the strength and distribution of the magnetic field in real time, and transmit the monitored data to the control system for processing and analysis. Through the magnetic field sensing device, the changes in the magnetic field during the crystal refining process can be understood in real time, and corresponding adjustments and controls can be made as needed. In addition, this embodiment can also set a rotating device in the furnace body for rotating the crystal refining pot. Through the rotating device, the rotation of the crystal refining pot can be achieved, so that the fluid flow during the crystal refining process is more uniform. Therefore, the efficiency and quality of the crystal refining process can be further improved.

[0030] Furthermore, as a preferred embodiment of the present invention but not a limitation, a first cooling device 31 for cooling the upper magnetic ring 81 is disposed at the upper portion of the furnace body 12 , and a second cooling device 32 for cooling the lower magnetic ring 82 is disposed at the lower portion of the furnace body 12 .

[0031] In this embodiment, the first cooling device and the second cooling device can adopt different cooling methods, such as water cooling or air cooling. These cooling devices effectively dissipate the heat generated by the magnet by conduction, convection or radiation to keep the magnet within a suitable operating temperature range. In addition, in order to further improve the cooling effect, a cooling medium, such as cooling water or cooling gas, can be used in the cooling device and. The cooling medium can be introduced into the cooling device through a circulation system or an injection system, and flow inside the device to absorb the heat generated by the magnet and take it away. The setting of the cooling device can effectively reduce the operating temperature of the magnet, prevent the influence of overheating on the performance of the magnet, and also extend the service life of the magnet.

[0032] Furthermore, as a preferred embodiment of the present solution but not a limitation, the first cooling device 31 includes a first liquid inlet pipe 311 and a first liquid outlet pipe 312, and a first annular tube 33 is provided between the first liquid inlet pipe 311 and the first liquid outlet pipe 312 for placing the upper magnetic ring 81.

[0033] In this embodiment, in order to enhance the cooling effect and fluid fluidity, the structure of the first annular tube can be optimized. For example, the internal spiral structure or fin structure of the annular tube can be increased to increase the contact area between the cooling liquid and the push rod and improve the cooling efficiency. In addition, the diameter and length of the pipeline can be optimized to achieve a more uniform cooling effect. In addition to the first annular tube, it is possible to consider adding a cooling liquid circulation system to achieve the circulation of the cooling liquid. By adding a circulating pump and a piping system, the cooling liquid can be circulated from the second liquid inlet pipe to the second liquid outlet pipe, further improving the cooling effect and the accuracy of temperature control.

[0034] Furthermore, as a preferred embodiment of the present solution but not a limitation, the second cooling device 32 includes a second liquid inlet pipe 321 and a second liquid outlet pipe 322; a second annular pipe 34 connected to the second liquid inlet pipe 321 and the second liquid outlet pipe 322 is provided on the same side thereof for placing the lower magnetic ring 82.

[0035] In this embodiment, in order to enhance the cooling effect and fluid fluidity, the structure of the second annular tube can be optimized. For example, the internal spiral structure or fin structure of the annular tube can be increased to increase the contact area between the cooling liquid and the push rod and improve the cooling efficiency. In addition, the diameter and length of the pipeline can be optimized to achieve a more uniform cooling effect. In addition to the second annular tube, it is possible to consider adding a cooling liquid circulation system to achieve the circulation of the cooling liquid. By adding a circulating pump and a piping system, the cooling liquid can be circulated from the second liquid inlet pipe to the second liquid outlet pipe, further improving the cooling effect and the accuracy of temperature control.

[0036] Furthermore, as a preferred implementation manner of the present solution but not a limitation, a first steel shell 21 is provided on the upper magnetic ring 81 to wrap the upper magnetic ring 81 and enhance the heat dissipation capability.

[0037] In this embodiment, in order to enhance the heat dissipation capacity of the magnet, the design of the steel shell can be optimized. For example, the steel shell can have heat sinks or heat dissipation channels to increase the surface area and improve the heat dissipation efficiency. In addition, the steel shell can be made of materials with good thermal conductivity, such as copper, aluminum, etc., to quickly conduct the heat of the magnet to the external environment. Optimization design of the shielding sleeve: In order to effectively shield the magnetic field interference, the design of the shielding sleeve can be optimized. The shielding sleeve can be made of magnetic materials, such as iron, nickel, etc., which have good magnetic permeability and concentrate the magnetic field in the space between the magnet and the shielding sleeve. At the same time, the shielding sleeve can also have thermal conductivity to enhance the heat dissipation effect and ensure the stability and safety of the magnet during operation. In order to ensure that the working temperature of the magnet is within a safe range, a temperature sensor and a temperature controller can be equipped. The system can monitor the temperature of the magnet in real time, and adjust the cooling system and the heat dissipation system according to the set temperature range to maintain the stable temperature of the magnet.

[0038] Furthermore, as a preferred implementation of the present solution but not a limitation, a second steel shell 25 is provided on the lower magnetic ring 82 to wrap the lower magnetic ring 82 and enhance the heat dissipation capability.

[0039] In this embodiment, in order to enhance the heat dissipation capacity of the magnet, the design of the steel shell can be optimized. For example, the steel shell can have heat sinks or heat dissipation channels to increase the surface area and improve the heat dissipation efficiency. In addition, the steel shell can be made of materials with good thermal conductivity, such as copper, aluminum, etc., to quickly conduct the heat of the magnet to the external environment. Optimization design of the shielding sleeve: In order to effectively shield the magnetic field interference, the design of the shielding sleeve can be optimized. The shielding sleeve can be made of magnetic materials, such as iron, nickel, etc., which have good magnetic permeability and concentrate the magnetic field in the space between the magnet and the shielding sleeve. At the same time, the shielding sleeve can also have thermal conductivity to enhance the heat dissipation effect and ensure the stability and safety of the magnet during operation. In order to ensure that the working temperature of the magnet is within a safe range, a temperature sensor and a temperature controller can be equipped. The system can monitor the temperature of the magnet in real time, and adjust the cooling system and the heat dissipation system according to the set temperature range to maintain the stable temperature of the magnet.

[0040] Furthermore, as a preferred implementation manner of the present solution but not a limitation, a shielding sleeve 22 for shielding the magnetic field is provided between the side of the upper magnetic ring 81 facing the center of the first annular tube 33 and the first steel shell 21 .

[0041] In this embodiment, the shielding sleeve is a structure with a magnetic field shielding function, which can weaken or shield the magnetic field generated by the upper magnet through special materials or designs. It is placed between the upper magnet and the first steel shell to prevent the magnetic field from interfering with other parts of the device. The shielding sleeve can be made of materials with high magnetic permeability, such as nickel-iron alloy, to provide better magnetic field shielding effect. Its shape and size can be designed and adjusted according to the specific magnetic field distribution and device structure. By setting up the shielding sleeve, the spread and interference of the magnetic field can be effectively reduced, and the working environment of other parts of the device can be kept stable. Therefore, the reliability and accuracy of the device can be improved, and the influence of the magnetic field on other components and equipment can be avoided.

[0042] Furthermore, as a preferred implementation manner of the present solution but not a limitation, the shielding sleeve 22 is provided between the side of the lower magnetic ring 82 facing the center of the second annular tube 34 and the second steel shell 25 .

[0043] In this embodiment, the shielding sleeve is a structure with a magnetic field shielding function, which can weaken or shield the magnetic field generated by the upper magnet through special materials or designs. It is placed between the upper magnet and the first steel shell to prevent the magnetic field from interfering with other parts of the device. The shielding sleeve can be made of a material with high magnetic permeability, such as nickel-iron alloy, to provide a better magnetic field shielding effect. Its shape and size can be designed and adjusted according to the specific magnetic field distribution and device structure. By setting up the shielding sleeve, the spread and interference of the magnetic field can be effectively reduced, and the working environment of other parts of the device can be kept stable. Therefore, the reliability and accuracy of the device can be improved, and the influence of the magnetic field on other components and equipment can be avoided.

[0044] Furthermore, as a preferred implementation manner of the present solution but not a limitation thereof, a connecting plate 9 for reinforcing the second cooling device 32 is connected between the second liquid inlet pipe 321 and the second liquid outlet pipe 322 .

[0045] In this embodiment, the connecting plate is a plate-shaped component with structural strength, which connects and reinforces the second liquid inlet pipe and the second liquid outlet pipe, and also connects and reinforces the second cooling device. The design and manufacture of the connecting plate can be adjusted according to the specific device requirements. It can be made of a material with sufficient strength and rigidity, such as a metal material such as steel or aluminum alloy. By providing the connecting plate, the stability and reliability of the second cooling device can be increased. The connecting plate can withstand the weight and pressure of the cooling device and keep the cooling device tightly connected to the inlet and outlet pipes.

[0046] This implementation case works as follows:

[0047] The present invention provides a crystal refining device with a built-in suppression magnetic field. When the crystal is placed in a single crystal furnace for smelting, the built-in upper magnetic ring and lower magnetic ring with a shielding sleeve emit a hook-shaped magnetic field. The hook-shaped magnetic field can effectively make the silicon solution viscous, reduce the thermal convection and interface temperature fluctuation of the silicon solution, thereby inhibiting the growth of stripes, and reducing and making the oxygen concentration at the solid-liquid interface uniform; water flows in from the first liquid inlet pipe, passes through the first annular pipe, and then flows out from the first liquid outlet pipe to help the upper magnetic ring to dissipate heat, and the support rod 71 connects the first liquid inlet pipe, the first liquid outlet pipe, and the first annular pipe to play a reinforcing role; water flows in from the second liquid inlet pipe, passes through the second annular pipe, and flows out from the second liquid outlet pipe to help the lower magnetic ring to dissipate heat, the first cooling device and the second cooling device increase the service life of the upper magnetic ring and the lower magnetic ring, and the crystal is attached to the center column 13 and produced as the center column 13 extends.

[0048] The above is an implementation method provided in combination with specific content, and it is not considered that the specific implementation of the present invention is limited to these descriptions. At the same time, due to different industry naming, it is not limited to the above naming, nor is it limited to English naming. Any similarity or similarity with the method, structure, etc. of the present invention, or a number of technical deductions or substitutions made under the premise of the concept of the present invention, shall be regarded as the protection scope of the present invention.

Claims

1. A crystal refining device with a built-in current suppression magnetic field, characterized in that: The single crystal furnace (1) comprises a furnace cover (11) and a furnace body (12); a sealed chamber (13) is provided in the furnace body (12); a crystal refining pot (14) is provided in the chamber (13); a magnet (8) is provided in the chamber (13) and located on one side of the crystal refining pot (14) to form a magnetic field to suppress boiling of crystals in the crystal refining pot (14); The magnet (8) is an upper magnetic ring (81) and a lower magnetic ring (82) respectively arranged on the upper and lower sides of the crystal refining pot (14); The upper part of the furnace body (12) is provided with a first cooling device (31) for cooling the upper magnetic ring (81), and the lower part of the furnace body (12) is provided with a second cooling device (32) for cooling the lower magnetic ring (82).

2. A crystal refining device with built-in current suppression magnetic field according to claim 1, characterized in that: The first cooling device (31) comprises a first liquid inlet pipe (311) and a first liquid outlet pipe (312), and a first annular pipe (33) for placing an upper magnetic ring (81) is provided between the first liquid inlet pipe (311) and the first liquid outlet pipe (312).

3. The crystal refining device with built-in current suppression magnetic field according to claim 2, characterized in that: The second cooling device (32) comprises a second liquid inlet pipe (321) and a second liquid outlet pipe (322); a second annular pipe (34) connected to the second liquid inlet pipe (321) and the second liquid outlet pipe (322) is provided on the same side thereof and is used to place the lower magnetic ring (82).

4. The crystal refining device with built-in current suppression magnetic field according to claim 3 is characterized in that: The upper magnetic ring (81) is provided with a first steel shell (21) which wraps the upper magnetic ring (81) and enhances the heat dissipation capability.

5. The crystal refining device with built-in current suppression magnetic field according to claim 4, characterized in that: The lower magnetic ring (82) is provided with a second steel shell (25) which wraps the lower magnetic ring (82) and enhances the heat dissipation capability.

6. The crystal refining device with built-in current suppression magnetic field according to claim 5, characterized in that: A shielding sleeve (22) for shielding a magnetic field is provided between the first steel shell (21) and the side of the upper magnetic ring (81) facing the center of the first annular tube (33).

7. The crystal refining device with built-in current suppression magnetic field according to claim 6, characterized in that: The shielding sleeve (22) is provided between the side of the lower magnetic ring (82) facing the center of the second annular tube (34) and the second steel shell (25).

8. The crystal refining device with built-in current suppression magnetic field according to claim 3, characterized in that: A connecting plate (9) for reinforcing the second cooling device (32) is connected between the second liquid inlet pipe (321) and the second liquid outlet pipe (322).

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