Adjustable partition plate coating structure

Abstract

This utility model discloses an adjustable partition plate coating structure, comprising: a bottom gas barrier device, a top gas barrier device, an ion source top gas barrier connected to the top gas barrier device, an ion source bottom gas barrier connected to the bottom gas barrier device, and two adjustable partition plate mechanisms respectively connected to the bottom gas barrier device and the top gas barrier device; the two adjustable partition plate mechanisms, the bottom gas barrier device, and the top gas barrier device form a working window, and the ion source top gas barrier and the ion source bottom gas barrier are connected at the window. Compared with the traditional partition plate structure, the adjustment device of this utility model adds an upper adjustment plate and a lower adjustment plate in its structural design, so that the front and rear positions of the overall partition plate can be slightly adjusted according to the needs of the production process, thereby improving the convenience of process adjustment and making it more conducive to meeting different product requirements.

Description

Technical Field

[0001] This utility model relates to the field of coating technology, and in particular to an adjustable partition plate coating structure. Background Technology

[0002] In the field of optical coating, magnetron sputtering vacuum coating technology is a type of physical vapor deposition (PVD). Its basic principle is: high-energy charged particles are accelerated and bombarded on the surface of the target material under the action of electric and magnetic fields. Atomic collisions occur on the surface, resulting in the transfer of energy and momentum, which causes the target atoms or molecules to escape from the surface and deposit on the substrate to form a thin film.

[0003] The principle of magnetron sputtering zonal oxidation is based on this, and by controlling sputtering conditions and parameters, regional control of the oxidation process on the target and substrate surfaces can be achieved, thereby obtaining different sputtering effects.

[0004] Specifically, magnetron sputtering zonal oxidation involves precisely adjusting various parameters during the sputtering process to create different oxidation conditions in different regions. For example, by adjusting and controlling parameters such as the type and concentration of reactive gases, sputtering power, and substrate temperature, different oxide films can be formed on the substrate.

[0005] Traditional partitioned oxidation coating structures have fixed partition plate positions, which makes it difficult to adjust the positions of the partitions. They can only obtain film structures within specific areas, resulting in limited regional control and making it less conducive to product diversity.

[0006] Therefore, existing technologies have shortcomings and need to be improved. Utility Model Content

[0007] This invention provides an adjustable partition plate coating structure, which enables the partition plate to be adjusted back and forth and up and down, achieving precise regional control and enabling product diversity.

[0008] The technical solution of this utility model is as follows: An adjustable partition plate coating structure is provided, comprising: a bottom gas barrier plate device, a top gas barrier plate device, an ion source top gas barrier plate connected to the top gas barrier plate device, an ion source bottom gas barrier plate connected to the bottom gas barrier plate device, and two adjustable partition plate mechanisms respectively connected to the bottom gas barrier plate device and the top gas barrier plate device; the two adjustable partition plate mechanisms, the bottom gas barrier plate device, and the top gas barrier plate device form a working window, and the ion source top gas barrier plate and the ion source bottom gas barrier plate are connected at the window; the adjustable partition plate... The plate structure includes: a support plate, an upper partition plate and a lower partition plate connected to the support plate, an upper adjusting plate, and a lower adjusting plate connected to the lower partition plate; the lower adjusting plate is provided with a first lateral adjusting elongated hole, and the lower adjusting plate is connected to the bottom air-tight plate device through the first lateral adjusting elongated hole; the upper adjusting plate is provided with a second lateral adjusting elongated hole and a vertical adjusting elongated hole, the upper adjusting plate is connected to the upper partition plate through the vertical adjusting elongated hole, and the upper adjusting plate is connected to the top air-tight plate device through the second lateral adjusting elongated hole.

[0009] The first and second transverse adjustment elongated holes enable the transverse movement of the adjustable partition plate, while the vertical adjustment elongated holes on the upper adjustment base plate enable the vertical movement of the top air baffle device. Thus, front-to-back and vertical adjustments are achieved, greatly facilitating the adjustment of the coating process and making it more conducive to product diversification.

[0010] Furthermore, the adjustable partition plate coating structure further includes: a third adjustable partition plate mechanism connected to the bottom air barrier device and the top air barrier device respectively, and a partition plate side baffle connected to the third adjustable partition plate mechanism; the partition plate side baffle is disposed on the same side as the ion source top air barrier plate and the ion source bottom air barrier plate. The partition plate side baffle is used to achieve side partitioning and achieve a better partitioning effect.

[0011] Furthermore, the upper partition plate and the lower partition plate are provided with support grooves on their back sides, and the support plate is disposed in the support grooves, which facilitates the assembly of the support plate with the upper partition plate and the lower partition plate.

[0012] The adjustable partition plate structure further includes side support strips connected to the support plate. The side support strips are used to strengthen the support plate.

[0013] Furthermore, there are two side support bars, and the two side support bars and the support plate form a positioning groove; the lower adjusting plate is connected to a positioning element, and the positioning element cooperates with the positioning groove. The positioning element is used for positioning and installing the support plate.

[0014] Furthermore, the upper adjusting plate is an L-shaped plate comprising a vertical plate and a horizontal plate, wherein the second horizontal adjusting elongated hole is disposed on the horizontal plate and the vertical adjusting elongated hole is disposed on the vertical plate.

[0015] Furthermore, the adjustable partition plate coating structure also includes a reinforcing plate connected to the vertical plate and the horizontal plate.

[0016] By adopting the above solution, this utility model provides an adjustable partition plate coating structure. The first and second lateral adjusting elongated holes enable the lateral movement of the adjustable partition plate, while the vertical adjusting elongated holes on the upper adjusting base plate enable the vertical movement of the top air baffle device. This allows for front-to-back and vertical adjustment, greatly facilitating the adjustment of the coating process and promoting product diversification. Traditional partitioned anodizing coating structures have fixed partition plate positions, making front-to-back adjustment inconvenient and lacking in flexibility. Compared to traditional partition plate structures, this utility model's adjusting device incorporates upper and lower adjusting plates, allowing the overall partition plate's front-to-back position to be slightly adjusted according to production process needs. This improves the convenience of process adjustment and better meets diverse product requirements. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the structure of one embodiment of the present invention;

[0018] Figure 2 for Figure 1 Cross-sectional view of the embodiment;

[0019] Figure 3 This is a schematic diagram of the adjustable partition plate mechanism;

[0020] Figure 4 This is a top view of the adjustable partition plate mechanism. Detailed Implementation

[0021] The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.

[0022] Please see Figures 1-4This embodiment provides an adjustable partition plate coating structure, including: a bottom gas barrier device 10, a top gas barrier device 11, an ion source top gas barrier 12 connected to the top gas barrier device 11, an ion source bottom gas barrier 13 connected to the bottom gas barrier device 10, and two adjustable partition plate mechanisms connected to the bottom gas barrier device 10 and the top gas barrier device 11 respectively; the two adjustable partition plate mechanisms, the bottom gas barrier device 10, and the top gas barrier device 11 form a working window, and the ion source top gas barrier 12 and the ion source bottom gas barrier 13 are connected at the window; the adjustable partition plate structure includes: a support plate 14, and... The support plate 14 is connected to the upper partition plate 15, the lower partition plate 16, the upper adjusting plate 17, and the lower adjusting plate 18 connected to the lower partition plate 16. The lower adjusting plate 18 is provided with a first horizontal adjusting elongated hole 19, and the lower adjusting plate 18 is connected to the bottom air-tight plate device 10 through the first horizontal adjusting elongated hole 19. The upper adjusting plate 17 is provided with a second horizontal adjusting elongated hole 20 and a vertical adjusting elongated hole 21. The upper adjusting plate 17 is connected to the upper partition plate 15 through the vertical adjusting elongated hole 21, and the upper adjusting plate 17 is connected to the top air-tight plate device 11 through the second horizontal adjusting elongated hole 20.

[0023] The first horizontal adjustment elongated hole 19 and the second horizontal adjustment elongated hole 20 enable the horizontal movement of the adjustable partition plate, and the vertical adjustment elongated hole 21 on the upper adjustment base plate enables the top air baffle device 11 to move up and down. Therefore, the front-to-back and up-and-down adjustment is realized, which greatly facilitates the adjustment of the coating process and is more conducive to product diversification.

[0024] In this embodiment, the adjustable partition plate coating structure further includes: a third adjustable partition plate mechanism connected to the bottom air barrier device 10 and the top air barrier device 11 respectively, and a partition plate side baffle 22 connected to the third adjustable partition plate mechanism; the partition plate side baffle 22 is disposed on the same side as the ion source top air barrier 12 and the ion source bottom air barrier 13. The partition plate baffle is used to achieve side partitioning and achieve better partitioning effect.

[0025] In this embodiment, the back of the upper partition plate 15 and the lower partition plate 16 are provided with support grooves, and the support plate 14 is disposed in the support grooves, which facilitates the assembly of the support plate 14 with the upper partition plate 15 and the lower partition plate 16.

[0026] In this embodiment, the adjustable partition plate structure further includes a side support strip 23 connected to the support plate 14. The side support strip 23 is used to strengthen the support plate 14.

[0027] In this embodiment, there are two side support bars 23, and the two side support bars 23 and the support plate 14 form a positioning groove; the lower adjusting plate 18 is connected to a positioning element 24, and the positioning element 24 cooperates with the positioning groove. The positioning element is positioned and installed on the support plate 14.

[0028] In this embodiment, the upper adjustment plate 17 is an L-shaped plate including a vertical plate 25 and a horizontal plate 26. The second horizontal adjustment elongated hole 20 is disposed on the horizontal plate 25, and the vertical adjustment elongated hole 21 is disposed on the vertical plate 26.

[0029] In this embodiment, the adjustable partition plate coating structure further includes a reinforcing plate 27 connected to the vertical plate 25 and the horizontal plate 26.

[0030] In summary, this utility model provides an adjustable partition plate coating structure. The first and second lateral adjusting elongated holes enable lateral movement of the adjustable partition plate, while the vertical adjusting elongated hole on the upper adjusting base plate enables vertical movement of the top air-insulating plate device. This allows for front-to-back and vertical adjustment, greatly facilitating the adjustment of the coating process and promoting product diversification. Traditional partitioned anodizing coating structures have fixed partition plate positions, making front-to-back adjustment inconvenient and lacking in flexibility. Compared to traditional partition plate structures, this utility model's adjusting device incorporates upper and lower adjusting plates, allowing the overall partition plate's front-to-back position to be slightly adjusted according to production process needs, thereby improving the convenience of process adjustment and better meeting diverse product requirements.

[0031] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. An adjustable partition plate coating structure, characterized in that, include: The system includes a bottom gas baffle device, a top gas baffle device, an ion source top gas baffle connected to the top gas baffle device, an ion source bottom gas baffle connected to the bottom gas baffle device, and two adjustable partition plate mechanisms connected to the bottom gas baffle device and the top gas baffle device, respectively. The two adjustable partition plate mechanisms, the bottom gas baffle device, and the top gas baffle device form a working window, with the ion source top gas baffle and the ion source bottom gas baffle connected at the window. The adjustable partition plate structure includes: a support plate, an upper partition plate and a lower partition plate connected to the support plate, an upper adjustment plate, and a lower adjustment plate connected to the lower partition plate. The lower adjustment plate has a first horizontal adjustment elongated oval hole, and is connected to the bottom gas baffle device through the first horizontal adjustment elongated oval hole. The upper adjustment plate has a second horizontal adjustment elongated oval hole and a vertical adjustment elongated oval hole, and is connected to the upper partition plate through the vertical adjustment elongated oval hole and to the top gas baffle device through the second horizontal adjustment elongated oval hole.

2. The adjustable partition plate coating structure according to claim 1, characterized in that, Also includes: A third adjustable partition plate mechanism is connected to the bottom gas barrier plate device and the top gas barrier plate device respectively, and a partition plate side baffle is connected to the third adjustable partition plate mechanism; the partition plate side baffle is located on the same side as the ion source top gas barrier plate and the ion source bottom gas barrier plate.

3. The adjustable partition plate coating structure according to claim 1, characterized in that, The upper partition plate and the lower partition plate are provided with support grooves on their back sides, and the support plate is disposed in the support grooves.

4. The adjustable partition plate coating structure according to claim 1, characterized in that, The adjustable partition plate structure also includes: a side support strip connected to the support plate.

5. The adjustable partition plate coating structure according to claim 4, characterized in that, There are two side support bars, and the two side support bars and the support plate form a positioning groove; the lower adjustment plate is connected to a positioning element, and the positioning element cooperates with the positioning groove.

6. The adjustable partition plate coating structure according to claim 1, characterized in that, The upper adjustment plate is an L-shaped plate comprising a vertical plate and a horizontal plate. The second horizontal adjustment elongated hole is disposed on the horizontal plate, and the vertical adjustment elongated hole is disposed on the vertical plate.

7. The adjustable partition plate coating structure according to claim 6, characterized in that, Also includes: A reinforcing plate connected to the vertical plate and the horizontal plate.

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