3D microstructure replication method using poisson effect

Abstract

The present invention relates to a 3D microstructure replication method using a Poisson effect. According to the present invention, provided is a 3D microstructure replication method using a Poisson effect, comprising: a soft mold preparation step for forming a soft mold by transferring a superelastic material to a master mold by a soft lithography method; a resin application step for applying a resin to the soft mold; a compression step for applying vertical pressure to the upper surface of the soft mold and transforming the shape of the soft mold by using the Poisson effect due to the vertical pressure; a resin curing step for curing the resin by applying heat or ultraviolet rays to the transformed soft mold to generate a 3D microstructure; and a releasing step for removing the vertical pressure to restore the shape of the soft mold and releasing the 3D microstructure.

Description

3D microstructure replication method using the Poisson effect

[0001] The present invention relates to a 3D microstructure replication method using the Poisson effect, and more specifically, to a 3D microstructure replication method using the Poisson effect that enables mass production of 3D microstructures by repeatedly replicating microstructures of the same shape using the same method in the process of replicating a 3D microstructure.

[0002] In general, in order to manufacture a three-dimensional structure, a mold capable of creating the shape of the three-dimensional structure must be manufactured.

[0003] To do this, a mold is created, and after going through multiple processes, a final mold is created to produce a three-dimensional structure.

[0004] At this time, rapid prototyping processes can be used to create molds for three-dimensional structures.

[0005] Here, rapid prototyping process refers to forming a prototype of a three-dimensional shape directly from three-dimensional CAD data without a mold using materials such as paper, wax, ABS, and plastic.

[0006] In the field of rapid forming processes, Korean Patent Publication No. 10-2000-0054896, ‘Method and device for manufacturing 3D prototypes using electric roller welding of metal sheets’, is disclosed.

[0007] In the conventional technology, a prototype having a desired shape can be made by forming a shape part on a metal sheet, stacking the metal sheets on which the shape part has been formed, and welding the metal sheets together using a welding roller.

[0008] However, in a method for manufacturing a three-dimensional structure such as a conventional technique, there is a limit to reducing the thickness of the metal sheet, and when the metal sheet is formed to a thickness of several nanometers to several tens of nanometers, a problem may arise in that it is difficult to wind the metal sheet onto a roller.

[0009] In addition, the replication of structures for fine three-dimensional structures is extremely limited, and productivity is low, making mass production of three-dimensional structures difficult.

[0010] Therefore, there is a need to develop a mass-producible microstructure replication method that can fabricate three-dimensional microstructures and reduce the number of processes and complexity of the work.

[0011] In order to solve the above problems, the present invention is a method for replicating 3D microstructures using the Poisson effect, and aims to provide an efficient and precise technology for replicating and mass producing 3D microstructures by reducing the number of work processes and complexity.

[0012] According to an embodiment of the present invention for solving the above problem, a method for replicating a 3D microstructure using the Poisson effect may include a soft mold preparation step of transferring a hyperelastic material to a master mold using soft lithography to form a soft mold, a resin application step of applying resin to the soft mold, a compression step of applying vertical pressure to an upper surface of the soft mold and using the Poisson effect due to the vertical pressure to deform the shape of the soft mold, a resin curing step of applying heat or ultraviolet rays to the soft mold whose shape has been deformed to harden the resin to generate the 3D microstructure, and a releasing step of removing the vertical pressure to the soft mold to restore the shape of the soft mold and releasing the 3D microstructure.

[0013] Additionally, the soft mold preparation step may include a partition formed in a shape that becomes narrower as the master mold moves upward, and a protrusion formed on the outer surface of the partition.

[0014] Additionally, the soft mold preparation step may include a resin cavity, which is a space formed by the partition wall and a space formed by the protrusion.

[0015] In addition, the compression step can form the 3D microstructure by narrowing the separation space by the Poisson effect and connecting the resin cavities located adjacent to the separation space.

[0016] In addition, the compression step can calculate the vertical strain according to the current width change of the separation space through the following [Mathematical Formula 1], and select a target vertical strain value among these to deform the shape of the soft mold up to the target vertical strain.

[0017] [Mathematical Formula 1]

[0018]

[0019] (Here, is the current width of the separation space, is the initial width of the separation space, is the width between the facing spaces, is the vertical strain, is Poisson's ratio.)

[0020] The 3D microstructure replication method using the Poisson effect according to the embodiment of the present invention as described above can replicate the microstructure of a 3D structure having a width in the ㎛ unit by inducing a shape deformation of a mold due to the Poisson effect.

[0021] Additionally, the number of processes and complexity of the work can be reduced by using a soft mold that can apply the Poisson effect.

[0022] Additionally, large-area, continuous production can be used to mass-produce 3D microstructures of the same shape with high accuracy.

[0023] FIG. 1 is a flowchart schematically illustrating a 3D microstructure replication method using the Poisson effect according to an embodiment of the present invention.

[0024] Figure 2 is an exemplary drawing illustrating the master mold of Figure 1.

[0025] Figure 3 is an exemplary drawing illustrating the soft mold of Figure 1.

[0026] Figures 4a to 4c are cross-sectional views of Figure 3, showing examples of the order in which the shape of the soft mold is transformed through the compression step.

[0027] FIG. 5a is a photograph showing a 3D microstructure replicated when the compression step of FIG. 1 is not performed, FIG. 5b is a photograph showing a 3D microstructure replicated when the compression step is performed, and FIG. 5c is a photograph showing a 3D microstructure enlarged from FIG. 5b.

[0028] Fig. 6a is a photograph showing a 3D microstructure having a different shape from Fig. 5a, Fig. 6b is a photograph showing a 3D microstructure having a different shape from Fig. 5b, and Fig. 6c is a photograph showing a 3D microstructure having a different shape from Fig. 5c.

[0029] Fig. 7a is an example diagram showing a 3D microstructure target pattern to be replicated, and Figs. 7b and 7c are photographs showing a 3D microstructure replicated in the form of Fig. 7a using Fig. 1.

[0030] Fig. 8a is an example diagram showing a 3D microstructure target pattern of a different shape from Fig. 7a, and Figs. 8b and 8c are photographs showing a 3D microstructure replicated in the shape of Fig. 8a.

[0031] Figures 9a to 9d are photographs showing 3D microstructures replicated with different vertical strains by Figure 1, respectively.

[0032] The present invention is susceptible to various modifications and takes various forms. Specific embodiments are described in detail herein. However, this is not intended to limit the invention to a specific disclosed form, and it should be understood that all modifications, equivalents, and alternatives fall within the spirit and technical scope of the present invention.

[0033] The terminology used in this application is only used to describe specific embodiments and is not intended to limit the present invention. The singular expression includes the plural expression unless the context clearly indicates otherwise. In this application, it should be understood that the terms "comprise" or "have" are intended to specify the presence of a combination of features, numbers, steps, components, etc. described in the specification, but do not exclude in advance the possibility of the presence or addition of one or more other combinations of features, numbers, steps, components, etc.

[0034] Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. Terms defined in commonly used dictionaries should be interpreted as having a meaning consistent with their meaning in the context of the relevant art, and will not be interpreted in an idealized or overly formal sense unless expressly defined herein.

[0035] Here, repetitive descriptions, well-known functions that may unnecessarily obscure the gist of the present invention, and detailed descriptions of configurations are omitted. The embodiments of the present invention are provided to more fully explain the present invention to those of average skill in the art.

[0036] Hereinafter, embodiments of the present invention will be described in detail with reference to FIGS. 1 to 9.

[0037]

[0038] FIG. 1 is a flowchart schematically illustrating a method for replicating a 3D microstructure using the Poisson effect according to an embodiment of the present invention, FIG. 2 is an exemplary diagram illustrating a master mold of FIG. 1, FIG. 3 is an exemplary diagram illustrating a soft mold of FIG. 1, FIGS. 4a to 4c are longitudinal cross-sectional views of FIG. 3, illustrating an order in which a soft mold is deformed in a shape through a compression step, FIG. 5a is a 3D microstructure replicated when the compression step of FIG. 1 is not performed, FIG. 5b is a 3D microstructure replicated when the compression step is performed, FIG. 5c is a photograph illustrating a 3D microstructure enlarged from FIG. 5b, FIG. 6a is a 3D microstructure having a different shape from FIG. 5a, FIG. 6b is a 3D microstructure having a different shape from FIG. 5b, FIG. 6c is a photograph illustrating a 3D microstructure having a different shape from FIG. 5c, and FIG. 7a is a 3D microstructure to be replicated. An example diagram showing a target pattern is shown, and FIGS. 7b and 7c are photographs showing a 3D microstructure replicated in the form of FIG. 7a by FIG. 1, FIG. 8a is an example diagram showing a 3D microstructure target pattern of a different form from FIG. 7a, and FIGS. 8b and 8c are photographs showing a 3D microstructure replicated in the form of FIG. 8a, and FIGS. 9a to 9d are photographs showing 3D microstructures replicated with different vertical strains by FIG. 1, respectively.

[0039]

[0040] Referring to FIG. 1, a 3D microstructure replication method using the Poisson effect according to an embodiment of the present invention is a method of replicating a 3D microstructure having a width in the ㎛ unit, and may include a soft mold preparation step (S10), a resin application step (S20), a compression step (S30), a resin curing step (S40), and a release step (S50).

[0041] First, the soft mold preparation step (S10) is a step of forming a soft mold (20) by transferring a superelastic material to a master mold (10) using a soft lithography method.

[0042] Here, referring to FIG. 2, the master mold (10) may include a partition wall (11) formed in a shape that becomes narrower as it moves upward, and a protrusion (12) formed on the outer surface of the partition wall (11).

[0043] Specifically, the master mold (10) can be manufactured using the 2PP (2 Photon Polymerization) method, which is a 3D printing method that uses two photons and a pulse laser to cause a chemical reaction by absorbing two photons at a focused area of ​​the pulse laser, and outputs an object by laminating materials produced by the chemical reaction.

[0044] Accordingly, the master mold (10) can be manufactured in detail.

[0045] Additionally, the bulkhead (11) may have a width equal to or wider than the width of the 3D microstructure to be replicated.

[0046] Accordingly, the 3D microstructure can be stably separated from the separation space (21) formed by the partition wall (11).

[0047] Additionally, the shape of the protrusion (11) may vary depending on the shape of the 3D microstructure that the user wishes to replicate.

[0048] Specifically, the protrusion (11) is a part of a 3D microstructure, and a plurality of protrusions (11) can come together to form a single 3D microstructure.

[0049] For example, when replicating a 3D microstructure in the form of a half ring as shown in Fig. 2, the protrusion (11) may be formed in a form in which the half ring is divided to form left and right symmetry.

[0050] Soft lithography is a transfer method that creates patterns or structures using flexible organic materials.

[0051] Specifically, soft lithography methods may be used, such as replica molding, capillary force lithography, capillary-micromolding, microtransfer molding, and liquid-mediated transfer molding.

[0052] Additionally, superelastic materials can be used as flexible inorganic materials.

[0053] Here, a superelastic material refers to a material that returns to its initial state when the load is removed, even if the deformation of the object is approximately 500% or more.

[0054] These superelastic materials can include silicone, rubber, etc.

[0055] Accordingly, the soft mold (20) can return to its initial shape even if its shape is deformed by vertical pressure (VP), so it can be reused and the shape of a 3D microstructure can be manufactured consistently.

[0056] In addition, referring to FIG. 3, the soft mold (20) may include a resin cavity (22), which is a space formed by a partition wall (11) and a protrusion (12).

[0057] Specifically, the separation space (21) can be formed in a form in which the lower side is open and becomes narrower as it moves upward due to the bulkhead (11).

[0058] Accordingly, a space (21) in which the Poisson effect (PE) can be applied can be provided in the soft mold (20).

[0059] Additionally, the resin cavity (22) can form a sunken space in the shape of a protrusion (12) due to the protrusion (12).

[0060] That is, the soft mold (20) can be formed as an inverse image of the master mold (10).

[0061] Next, the resin application step (S20) is a step of applying resin to the soft mold (20).

[0062] Specifically, the resin application step (S20) can apply resin to the separation space (21) and the resin cavity (22).

[0063] At this time, the resin application step (S20) can apply resin to the separation space (21) and resin cavity (22) to an extent that a 3D microstructure can be formed.

[0064] Additionally, the resin application step (S20) can use a heat-curable resin or an ultraviolet-curable resin depending on the user's needs.

[0065] Next, the compression step (S30) is a step of applying vertical pressure (VP) to the upper surface of the soft mold (20) and deforming the shape of the soft mold (20) by using the Poisson effect (PE) due to the vertical pressure (VP).

[0066] At this time, the compression step (S30) can apply vertical pressure (VP) by placing a substrate (not shown) on the upper and lower surfaces of the soft mold (20).

[0067] Here, the substrate can be glass, silicon wafer, film, etc.

[0068] Accordingly, the compression step (S30) can apply a vertical pressure (VP) of the same strength to the entire area of ​​the soft mold (20) by placing the substrate on the upper surface of the soft mold (20).

[0069] In addition, the compression step (S30) applies resin to the substrate on the lower surface of the soft mold (20), thereby reducing problems such as shape deformation interference, wear, and heat that may occur due to friction with the soft mold (20) when the shape of the soft mold (20) is deformed.

[0070] Additionally, the compression step (S30) can cause a Poisson effect (PE) in the soft mold (20) by applying vertical pressure (VP) to the soft mold (20).

[0071] Here, the Poisson effect (PE) is the property of an object to expand in a direction perpendicular to the direction of compression when the object is compressed in one direction.

[0072] Accordingly, the compression step (S30) applies vertical pressure (VP) to the soft mold (20) to generate a force that occurs in a horizontal direction perpendicular to the vertical pressure (VP), thereby deforming the soft mold (20) and narrowing the separation space (21).

[0073] Specifically, referring to FIG. 4, FIG. 4a shows a cross-sectional state of a soft mold (20) to which resin has been applied after the resin application step (S20).

[0074] In addition, Fig. 4b shows a state in which vertical pressure (VP) is applied to the soft mold (20) in the state of Fig. 4a.

[0075] At this time, it can be confirmed that the soft mold (20) exerts force inwardly on the separation space (21) due to the Poisson effect (PE).

[0076] In addition, Fig. 4c shows a state in which the vertical pressure (VP) is continuously applied in the state of Fig. 4b, resulting in the Poisson effect (PE) and narrowing of the separation space (21).

[0077] Accordingly, it can be confirmed that the resin cavities (22) located adjacent to each other with the separation space (21) as the center are connected, and the applied resin is filled into the resin cavity (22) to form a 3D microstructure.

[0078] Also, referring to FIGS. 5 and 6a to 6c, FIG. 6a shows the shape of a replicated 3D structure when the compression step (S30) is not performed.

[0079] Here, it can be confirmed that the shape of the separation space (21) and the resin cavity (22) are replicated as is.

[0080] In addition, FIGS. 5 and 6b show the shape of the 3D structure that is replicated when the compression step (S30) is performed.

[0081] Here, it can be confirmed that the shape of the separation space (21) is narrowed, and the resin cavities (22) located adjacent to the separation space (21) are connected to form a 3D microstructure.

[0082] Additionally, FIGS. 5 and 6c show enlarged views of the 3D structure of FIG. 6b.

[0083] Here, it can be confirmed that the 3D microstructure is replicated in a complete form by connecting the resin cavity (22).

[0084] In addition, the compression step (S30) calculates the vertical strain according to the current width change of the above-mentioned separation space through [Mathematical Formula 1] below, and selects a target vertical strain value among these to deform the shape of the soft mold (20) up to the target vertical strain.

[0085] [Mathematical Formula 1]

[0086]

[0087] Here, is the current width of the separation space (21), is the initial width of the separation space (21), is the width between the separation space (21) and the separation space (21) facing each other, is the vertical strain, is Poisson's ratio.

[0088] In addition, the Poisson's ratio represents the ratio of the strain to the deformation of the soft mold (20), and can be calculated through the vertical strain when the height of the soft mold (20) is changed and the horizontal strain when the width of the soft mold (20) is changed.

[0089] Specifically, Poisson's ratio can be calculated as '- horizontal strain / vertical strain'.

[0090] At this time, the reason for taking '-' to obtain the Poisson's ratio is to obtain a positive value for the Poisson's ratio because when the horizontal strain becomes positive, the vertical strain becomes negative, and when the horizontal strain becomes negative, the vertical strain becomes positive.

[0091] At this time, the desired target vertical strain is The value of , that is, the value that makes the current width of the separation space (21) approach 0, can be selected.

[0092] Additionally, the desired target vertical strain may be selected as a range of values ​​that makes it approach zero.

[0093] Additionally, the vertical strain depends on the shape of the 3D microstructure that the user wants to replicate. The value may vary.

[0094] Accordingly, a soft mold (20) capable of replicating the exact shape of a 3D microstructure can be manufactured by calculating the target vertical strain required to replicate the shape of a 3D microstructure that the user wants to replicate.

[0095] Next, the resin curing step (S40) can create a 3D microstructure by applying heat or ultraviolet rays to the soft mold (20) whose shape has been deformed to cure the resin.

[0096] Specifically, in the resin curing step (S40), in the case of a thermosetting resin, heat can be applied to cure the thermosetting resin without removing the vertical pressure from the soft mold (20).

[0097] Additionally, in the case of UV-curable resin, UV-curable resin can be cured by applying UV rays.

[0098] More specifically, in the case of a thermosetting resin, the thermosetting resin can be cured at a temperature of 20°C or higher and 100°C or lower.

[0099] Specifically, the thermosetting resin can be formed at various temperatures within a range of 20°C or higher and 100°C or lower depending on the type of thermosetting resin used.

[0100] Here, in the resin curing step (S40), if curing is performed at a temperature below 20°C, the thermosetting resin may not be completely cured, making it difficult to maintain the shape of the 3D microstructure. If curing is performed at a temperature exceeding 100°C, excessive curing may occur, causing shrinkage of the 3D microstructure.

[0101] Also, in case of UV-curable resin, broadband UV is 10mW / cm 2 Above, 1000mW / cm 2 It can be hardened by irradiating it for more than 1 minute and less than 10 minutes at the following century.

[0102] Specifically, for UV-curable resins, the appropriate light dose for UV curing is 10 mW / cm depending on the type of UV-curable resin used. 2 Above, 1000mW / cm 2 It can be formed in various ways within the following range.

[0103] Here, the resin curing step (S40) uses broadband ultraviolet rays at 10 mW / cm 2 If cured at a power of less than 1000 mW / cm, the UV-curable resin may not be completely cured, making it difficult to maintain the shape of the 3D microstructure. 2 If cured with excessive force, it may cause excessive curing and shrinkage of the 3D microstructure.

[0104] In addition, in the resin curing step (S40), if the broadband ultraviolet ray is irradiated for less than 1 minute, the ultraviolet curable resin may not be completely cured, making it difficult to maintain the shape of the 3D microstructure. If the irradiation is irradiated for more than 10 minutes, the resin may already be sufficiently cured, causing inefficiency in the work.

[0105] Next, the release step (S50) is a step of removing vertical pressure from the soft mold (20) to restore the shape of the soft mold (20) and release the 3D microstructure.

[0106] At this time, the separation step (S50) restores the width of the separation space (21) of the soft mold (20) to the initial state where it is wider than the width of the 3D microstructure, so that the 3D microstructure can be safely separated.

[0107] In addition, the forming step (S50) can form a plurality of 3D microstructures depending on the shape of the soft mold (20).

[0108] As described above, the 3D microstructure replication method using the Poisson effect according to an embodiment of the present invention replicates a 3D microstructure using the Poisson effect (PE), thereby replicating a 3D microstructure with a more precise shape than the existing microstructure replication.

[0109] In addition, the number of processes and complexity of the work can be reduced by using a soft mold (20) formed of a superelastic material to which the Poisson effect (PE) can be applied.

[0110] In addition, by reusing the soft mold (20), it is possible to mass-produce 3D microstructures of the same shape with high accuracy through large-area, continuous production.

[0111] In addition, as shown in FIG. 7a, an array of 3D microstructures with high density per area can be manufactured by utilizing 3D space as shown in FIGS. 7b and 7c according to a target pattern of 3D microstructures according to a user's request.

[0112] In addition, a 3D microstructure having a target pattern in the form of a connected ring, which was difficult to replicate using conventional techniques, as shown in FIG. 8a, can be replicated as shown in FIGS. 8b and 8c.

[0113] In this way, the 3D microstructure replication method using the Poisson effect according to an embodiment of the present invention can replicate 3D microstructures applied to a wide range of industrial fields, such as building materials, electronic components, cosmetics, etc., such as fine thin films and superhydrophobic surfaces.

[0114]

[0115] Hereinafter, the present invention will be described in more detail by way of examples.

[0116] However, the following examples are merely illustrative of the present invention, and the content of the present invention is not limited by the following examples.

[0117] [Example]

[0118] [Example 1]

[0119] To replicate a 3D microstructure with a width of 10 μm, a soft mold with a gap space of 15 μm initial width and a mesh-shaped resin cavity was prepared, and MINS 311RM, a UV-curable resin, was applied to the cavity and gap space of the soft mold. The shape of the soft mold was deformed by applying vertical pressure until the target vertical strain value was reached, with the target vertical strain value being approximately 0.292, and 100 mW / cm 2 MINS 311RM was cured by irradiating it with broadband UV light for 1 minute, after which the vertical pressure was removed and the 3D microstructure was replicated.

[0120]

[0121] [Comparison Example 1]

[0122] The 3D microstructure was replicated in the same manner as Example 1, but with a target vertical strain value of approximately 0.224.

[0123]

[0124] [Comparison Example 2]

[0125] The 3D microstructure was replicated in the same manner as Example 1, but with a target vertical strain value of approximately 0.252.

[0126]

[0127] [Comparison Example 3]

[0128] The 3D microstructure was replicated in the same manner as Example 1, but with a target vertical strain value of approximately 0.324.

[0129]

[0130] [Experimental Example 1] Evaluation of the replica shape of 3D microstructures

[0131] In this experiment, the 3D microstructure of Example 1 was photographed using a Scanning Electron Microscope (SEM) and the replica morphology was evaluated.

[0132] At this time, for comparison, 3D microstructures of Comparative Examples 1 to 3 were photographed in the same manner as Example 1, and the replica shapes were evaluated.

[0133] First, the target vertical strain value range for replicating a 3D microstructure with a width of 10 μm into a desirable shape is 0.275 to 0.295.

[0134] At this time, the range of the target vertical strain value is not limited to the range of the target vertical strain required when replicating a 3D microstructure having a width of 10 ㎛, and can be formed in various ways depending on the shape of the 3D microstructure to be replicated.

[0135] Example 1, as shown in Fig. 9c, confirms that the 3D microstructures are formed in a mesh shape that is not disconnected from each other, is completely connected, and is formed accurately and firmly.

[0136] In addition, as shown in Fig. 9a, Comparative Example 1 has a shape closer to that of a spaced space than that of a resin cavity in which a 3D microstructure forms a mesh shape, and it can be confirmed that the shape is not completely formed.

[0137] In addition, as shown in Comparative Example 2 in Fig. 9b, it can be confirmed that the 3D microstructures are in a mesh shape that is disconnected from each other, partially in a shape close to the shape of a spaced space, and that the shape is not completely formed.

[0138] In addition, Comparative Example 3, as shown in Fig. 9d, shows that although the 3D microstructure partially forms a net shape, there are many disconnected parts, and it can be confirmed that the shape is not completely formed.

[0139] Through this, it can be determined that the 3D microstructure of Example 1, which is replicated with a target vertical strain within the desired target vertical strain range, is replicated in its shape intact compared to the 3D microstructures of Comparative Examples 1 to 3, which are replicated with a target vertical strain outside the desired target vertical strain range.

[0140] Furthermore, it can be confirmed that the 3D microstructure that the user wants to replicate can be replicated with high accuracy by using the Poisson effect.

[0141]

[0142] The embodiments of the present invention described above are not implemented only through methods, but may also be implemented through methods for realizing functions corresponding to the configurations of the embodiments of the present invention, configurations included in the methods, etc., and such implementations can be easily implemented by an expert in the technical field to which the present invention pertains based on the description of the embodiments described above.

[0143] In addition, although the embodiments of the present invention have been described in detail above, the scope of the present invention is not limited thereto, and various modifications and improvements made by those skilled in the art using the basic concept of the present invention defined in the following claims also fall within the scope of the present invention.

[0144]

[0145] [Explanation of symbols]

[0146] 10: Master Mold

[0147] 11: Bulkhead

[0148] 12: Protrusion

[0149] 20: Soft mold

[0150] 21: Separation space

[0151] 22: Resin cavity

[0152] PE: Poisson effect

[0153] R: Resin

[0154] VP: vertical pressure

Claims

1. Soft mold preparation stage in which a superelastic material is transferred to a master mold using soft lithography to form a soft mold; A resin application step of applying resin to the above soft mold; A compression step of applying vertical pressure to the upper surface of the soft mold and deforming the shape of the soft mold by using the Poisson effect due to the vertical pressure; A resin curing step of applying heat or ultraviolet rays to the soft mold whose shape has been deformed to harden the resin to create the 3D microstructure; and A method for replicating a 3D microstructure using the Poisson effect, comprising a releasing step of removing vertical pressure from the soft mold to restore the shape of the soft mold and releasing the 3D microstructure.

2. In paragraph 1, The soft mold preparation stage is: A 3D microstructure replication method using the Poisson effect, characterized in that the master mold includes a partition formed in a shape that becomes narrower as it moves upward and a protrusion formed on the outer surface of the partition.

3. In paragraph 2, The soft mold preparation stage is: A 3D microstructure replication method using the Poisson effect, characterized in that the soft mold includes a resin cavity, which is a space formed by the partition wall and a space formed by the protrusion.

4. In paragraph 3, The above compression step is, A 3D microstructure replication method using the Poisson effect, characterized in that the separation space is narrowed by the Poisson effect and the resin cavities located adjacent to the separation space are connected to form the 3D microstructure.

5. In paragraph 4, The above compression step is, A 3D microstructure replication method using the Poisson effect, characterized in that the vertical strain according to the current width change of the separation space is calculated through the following [Mathematical Formula 1], and the shape of the soft mold is deformed to the target vertical strain by selecting a target vertical strain value among these. [Mathematical Formula 1] (Here, is the current width of the separation space, is the initial width of the separation space, is the width between the facing spaces, is the vertical strain, is Poisson's ratio.)

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