Silicon ingot

A silicon ingot with a unidirectionally solidified structure and high coincidence grain boundary ratio addresses the issue of preferential corrosion in semiconductor manufacturing, enhancing corrosion resistance and extending the lifespan of components.

WO2025211355A1 Publication Date: 2025-10-09MITSUBISHI MATERIALS ELECTRONICS CHEM CO LTD
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Patent Information

Application Number
PCT/JP2025/013330
Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-04-03
Filing Date
2025-04-01
Publication Date
2025-10-09

AI Technical Summary

Technical Problem

Existing silicon ingots with grain boundaries are prone to preferential corrosion in corrosive environments, leading to potential cracks and particle generation, which is a concern in plasma processing apparatuses used in semiconductor manufacturing.

Method used

A silicon ingot with a unidirectionally solidified structure featuring a single crystal region at the center and a coincidence grain boundary region on the periphery, where the ratio of coincidence grain boundary length to total grain boundary length is 80% or more, suppressing preferential corrosion and extending the lifespan.

Benefits of technology

The silicon ingot effectively reduces grain boundary length and enhances corrosion resistance, ensuring a longer service life in corrosive environments by minimizing localized corrosion.

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Abstract

This silicon ingot 10 has a unidirectionally solidified structure. The silicon ingot is characterized in that, in a cross-section that is orthogonal to the solidification direction, a single crystal region 11 is formed at a center part, and a coincidence boundary region 12 that comprises a plurality of crystal grains and has a ratio of coincidence boundary length to total grain boundary length of at least 80% is formed on the outer circumferential side of the single crystal region 11. The area fraction of the single crystal region 11 in a cross-section that is orthogonal to the solidification direction is preferably at least 25%.
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