A method for coupling silicon-based optoelectronic chip with single-mode optical fiber

Abstract

The present invention relates to the technical field of optical communication equipment, and specifically to a coupling method of a silicon-based optoelectronic chip and a single-mode optical fiber, wherein a silicon dioxide layer is deposited and grown on a silicon substrate, a silicon waveguide is arranged in the silicon dioxide layer, the end face of the single-mode optical fiber is processed into a convex curved surface, there is a gap between the single-mode optical fiber and the silicon dioxide layer, at least one section of low-refractive index waveguide is arranged between the single-mode optical fiber and the silicon waveguide, the low-refractive index waveguide is in a sheet-like rectangular parallelepiped shape with sharp angles at both ends, the silicon waveguide injection end is a sharp angle, the core output end of the single-mode optical fiber is aligned with the low-refractive index waveguide injection end, the low-refractive index waveguide and the silicon waveguide partially overlap in the horizontal direction, and there is a gap in the vertical direction, the silicon dioxide layers on both sides of the low-refractive index waveguide and the silicon waveguide are processed with grooves, and the groove depth is greater than the depth of the silicon waveguide buried in the silicon dioxide layer. The beneficial effects of the present invention are: through the transition of the low-refractive index waveguide, the coupling efficiency and tolerance between the single-mode optical fiber and the silicon optical chip are improved.

Description

Technical Field

[0001] The present invention relates to the technical field of optical communication equipment, and in particular to a method for coupling a silicon-based optoelectronic chip with a single-mode optical fiber. Background Art

[0002] With the development of the Internet and mobile communication networks, the demand for high-speed communication devices in data centers and 5G communications has also increased. Silicon-based optoelectronics, as one of the means to significantly reduce the manufacturing cost of optical devices, has also received attention from the market. Since silicon waveguides have the advantages of low transmission loss and high refractive index in the communication band, silicon-based optoelectronic devices have the advantages of high scalability and high integration. Due to the high integration characteristics of silicon-based optoelectronic chips, the size of silicon waveguides is very different from existing optical communication devices and transmission cables, resulting in huge coupling loss problems. The core diameter of existing optical fibers is usually about 10 times the size of silicon waveguides. Coupling loss has limited silicon-based optoelectronic chips in many applications. Although many solutions have been proposed to reduce this loss. However, a coupling method that is both low-cost and highly anti-interference is still a difficult problem that the industry needs to solve.

[0003] Chinese patent CN101533128B, published on November 10, 2010, is a method for coupling and packaging silicon nano waveguides and optical fibers. In order to achieve efficient optical coupling and simple packaging of silicon nano waveguides and optical fibers, the present invention provides a method for coupling and packaging silicon nano waveguides and optical fibers, which utilizes an inverted cone spot converter to achieve the conversion of a small-size spot in the silicon nano waveguide to a large-size spot in the optical fiber, and utilizes the self-alignment characteristics of the V-shaped optical fiber positioning groove to achieve alignment, coupling and simple packaging of the silicon nano waveguide and the optical fiber. The inverted cone spot converter of the present invention combines the high-efficiency, broadband optical coupling characteristics and optical mode field size conversion capabilities with the characteristics of the SOI substrate and the V-shaped optical fiber positioning groove to achieve precise center alignment and efficient optical coupling between the waveguide and the optical fiber, and the optical fiber fixed packaging process is simple, which is very suitable for actual production applications. However, it is coupled only through spot conversion, has high requirements for the alignment of the optical fiber and the silicon waveguide, is difficult to install, and is not suitable for popularization and use. Summary of the invention

[0004] The technical problem to be solved by the present invention is the low coupling efficiency between single-mode optical fiber and silicon waveguide. A coupling method of silicon-based optoelectronic chip with large tolerance and single-mode optical fiber is proposed, which uses a low refractive index waveguide as a transition and processes the output end of the single-mode optical fiber into a convex surface.

[0005] In order to solve the above technical problems, the technical solution adopted by the present invention is: a method for coupling a silicon-based optoelectronic chip with a single-mode optical fiber, which is applied to the coupling of a single-mode optical fiber with a silicon waveguide, a silicon dioxide layer is arranged on a silicon substrate, a silicon waveguide is arranged in the silicon dioxide layer, the end face of the single-mode optical fiber is processed into a convex surface shape, there is a gap between the single-mode optical fiber and the silicon dioxide layer, at least one section of low-refractive index waveguide is arranged between the single-mode optical fiber and the silicon waveguide, the low-refractive index waveguide is in a sheet-like rectangular parallelepiped shape with sharp corners at both ends, the silicon waveguide input end is a sharp corner, the core output end of the single-mode optical fiber is aligned with the low-refractive index waveguide input end, the low-refractive index waveguide and the silicon waveguide partially overlap in the horizontal direction, and there is a gap in the vertical direction, the silicon dioxide layers on both sides of the low-refractive index waveguide and the silicon waveguide are processed with grooves, and the depth of the grooves is greater than the depth of the silicon waveguide buried in the silicon dioxide layer. The convex curved end face of the single-mode optical fiber can converge the signal light emitted from the core of the single-mode optical fiber, making its mode spot size comparable to that of the silicon waveguide, thereby improving the coupling efficiency. The sharp corner of the low-refractive index waveguide incident end amplifies the signal light mode spot, making it easier for the signal light to enter the silicon waveguide, thereby improving the coupling tolerance.

[0006] Preferably, the single-mode optical fiber is fixed by an optical fiber pressing block and an optical fiber fixing block, the optical fiber fixing block is formed simultaneously when the silica layer is generated, the upper surface of the optical fiber fixing block and the lower surface of the optical fiber pressing block are processed with V-shaped grooves, the single-mode optical fiber is fixedly connected by the optical fiber pressing block and the optical fiber fixing block, and the single-mode optical fiber is clamped and fixed by the V-shaped grooves. The optical fiber fixing block is formed by sedimentation growth while the silica layer is sedimented and grown, so that the single-mode optical fiber can be aligned with the low refractive index waveguide. It is recommended but not limited that the silica layer is generated by sedimentation growth, and the optical fiber fixing block is sedimented and grown at the same time, and then etched to form.

[0007] Preferably, the single-mode optical fiber is installed to the coupling position through an optical fiber installer, and the optical fiber installer includes a connecting frame, a screw seat, a screw, a rotating handle, two sliding rods, a slider, an optical fiber clamping seat and an optical fiber clamping block. The optical fiber clamping seat is fixedly connected to the slider, and the optical fiber clamping block is tightly and fixedly connected to the optical fiber clamping seat. V-grooves are provided at the same position of the contact surface of the optical fiber clamping block and the optical fiber clamping seat, and the optical fiber is clamped by the two V-grooves. The second end of the screw is hinged to the slider and relatively fixed along the axial direction. The slider is movably connected to the slide rod, and the screw rod has the same extension direction as the two slide rods. The screw seat is processed with a threaded hole matching the screw, the screw and the screw seat are connected by a threaded pair, the rotating handle is fixedly installed on the first end of the screw, the sliding rod is fixedly installed on the screw seat, the screw seat is fixedly installed on the connecting frame, the connecting frame is detachably fixedly connected to the silicon substrate, after the connecting frame is fixedly connected to the silicon substrate, the single-mode optical fiber is clamped on the optical fiber clamping block and the optical fiber clamping seat, the rotating handle is twisted to drive the screw to rotate, and then the slider is driven to move, the slider drives the single-mode optical fiber to move to the coupling position, after the optical fiber clamping block is installed to fix the single-mode optical fiber, the optical fiber clamping block and the connecting frame are removed.

[0008] Preferably, the optical fiber installer used when installing the single-mode optical fiber to the coupling position also includes an anti-collision device, which locks the slider when the single-mode optical fiber output end moves to the coupling position. The refractive index difference between the silicon waveguide and silicon dioxide is huge, so the silicon waveguide used in conjunction with silicon dioxide has a strong binding effect on light, so the silicon waveguide can have a smaller size, usually only a dozen to tens of microns. The too small size makes its ability to withstand impact force very weak. The single-mode optical fiber needs to be very close to the silicon waveguide and the silicon dioxide layer. When installing the single-mode optical fiber, improper operation will cause the single-mode optical fiber to collide with the silicon dioxide layer and the silicon waveguide, causing damage to the silicon dioxide layer and the silicon waveguide. The anti-collision device can prevent the single-mode optical fiber from colliding with the silicon dioxide layer and the silicon waveguide during the installation of the single-mode optical fiber.

[0009] Preferably, the anti-collision device includes a contact switch, which is installed in front of the single-mode optical fiber output end and is turned on when it contacts an obstacle. The locking mechanism of the anti-collision device for locking the slider includes two brake blocks, a spring and a power supply. A through groove is provided at the joint between the slider and the slide rod, and a T-shaped groove is processed at the bottom of the through groove. The bottoms of the two brake blocks are both engaged with the T-shaped groove. The middle of the two brake blocks is respectively located outside a slide rod, and the middle of the inner side of the two brake blocks is connected by the spring. The two ends of the spring are connected to the power supply through the contact switch. When the contact switch contacts an obstacle, it is turned on, the spring is connected to the power supply and energized, and the spring contracts after being energized, pulling the two brake blocks toward the middle, so that the brake blocks abut against the slide rod, generating friction to lock the slider.

[0010] Preferably, the anti-collision device comprises a probe rod, a contact switch and a locking mechanism, wherein the first end of the probe rod is fixedly mounted on the optical fiber clamping seat, the contact switch is mounted on the second end of the probe rod, the locking mechanism is coupled to the contact switch, and the locking mechanism locks the slider when the contact switch is turned on, the contact switch comprises a front contact, a rear contact and a graphite tube, the front contact and the rear contact are both tubular, the outer wall of the graphite tube is sleeved with the inner wall of the front contact, the rear contact is fixed at the end of the probe rod, the front contact is concentrically fixedly connected with the rear contact through an insulating layer, and the front end of the graphite tube is located in front of the single-mode optical fiber output end. The silica layer and the silicon waveguide have a very weak ability to withstand impact force, so the contact switch needs as little force as possible when triggered. The graphite tube itself has a low density and strong conductivity, and its size can be smaller, and the graphite itself has a lubricating effect, which can reduce the friction between the front contact and the graphite tube, so that the force required when the contact switch is triggered is smaller, thereby reducing the impact force on the silica layer and the silicon waveguide.

[0011] Preferably, the locking mechanism includes two brake blocks, a spring and a power supply, a through groove is opened at the joint of the slider and the slide rod, a T-shaped groove is processed at the bottom of the through groove, the bottoms of the two brake blocks are clamped with the T-shaped groove, the middle parts of the two brake blocks are respectively located on the outside of a slide rod, the middle parts of the inner sides of the two brake blocks are connected by the spring, the front contact is connected to the positive pole of the power supply, the first end of the spring is electrically connected to the rear contact, and the second end of the spring is connected to the negative pole of the power supply.

[0012] Preferably, the outer sides of the two slide bars are processed with a flat surface, and the flat surface is opposite to the inner side surface of the brake block with a gap therebetween.

[0013] The substantial effect of the present invention is that the convex curved end face of the single-mode optical fiber converges the signal light mode spot, which can improve the coupling efficiency, and the sharp angle of the low-refractive index waveguide incident end amplifies the signal light mode spot, making it easier for the signal light to enter the silicon waveguide, thereby improving the coupling tolerance. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the coupling structure of embodiment 1.

[0015] Figure 2 It is a side cross-sectional schematic diagram of the coupling structure of Example 1.

[0016] Figure 3 FIG. 1 is a top view of the coupling structure of Example 1.

[0017] Figure 4 This is a structural diagram of the optical fiber installer of Example 2.

[0018] Figure 5 This is a schematic diagram of the structure of the execution part of the optical fiber installer of Example 2.

[0019] Figure 6 This is a schematic diagram of the structure of the anti-collision device of the optical fiber installer in Example 3.

[0020] Figure 7 This is a schematic diagram of the locking mechanism structure of Example 3.

[0021] Figure 8 The structure of the locking mechanism of the third embodiment is shown in FIG. Figure 2 .

[0022] Fig. 9 This is a schematic diagram of the contact switch structure of Example 3.

[0023] Fig.10 This is a cross-sectional view of the contact switch of Example 3.

[0024] Fig.11 This is a circuit connection diagram of Example 3.

[0025] Wherein: 1. Fiber optic block, 2. Single-mode optical fiber, 3. Groove, 4. Silica layer, 5. Silicon waveguide, 6. Low refractive index waveguide, 7. Fiber optic fixing block, 8. Silicon substrate, 9. Connecting frame, 10. Rotating handle, 11. Fiber optic clamping block, 12. Probe rod, 13. Slider, 14. Screw seat, 15. Screw, 16. Slide bar, 17. Fiber optic clamping seat, 18. Spring, 19. T-slot, 20. Brake block, 21. Rear contact, 22. Graphite tube, 23. Front contact. DETAILED DESCRIPTION

[0026] The specific implementation of the present invention will be further described below through specific examples in conjunction with the accompanying drawings.

[0027] Embodiment 1:

[0028] A method for coupling a silicon-based optoelectronic chip with a single-mode optical fiber 2 is applied to the coupling of the single-mode optical fiber 2 with a silicon waveguide 5, such as Figure 1 As shown, it is a schematic diagram of the coupling structure of the first embodiment, as Figure 2 As shown, it is a schematic side cross-sectional view of the coupling structure of the first embodiment. Figure 3As shown, it is a top view of the coupling structure of the first embodiment. In this embodiment, a silica layer 4 is deposited and grown on a silicon substrate 8, and a silicon waveguide 5 is arranged in the silica layer 4. The end face of the single-mode optical fiber 2 is processed into a convex surface shape. There is a gap between the single-mode optical fiber 2 and the silica layer 4. At least one section of low refractive index waveguide 6 is arranged between the single-mode optical fiber 2 and the silicon waveguide 5. The low refractive index waveguide 6 is in a sheet-like rectangular parallelepiped shape with sharp corners at both ends. The incident end of the silicon waveguide 5 is a sharp corner. The core output end of the single-mode optical fiber 2 is aligned with the incident end of the low refractive index waveguide 6. The low refractive index waveguide 6 and the silicon waveguide 5 partially overlap in the horizontal direction, and there is a gap in the vertical direction. The silica layer 4 on both sides of the low refractive index waveguide 6 and the silicon waveguide 5 are processed with grooves 3, and the depth of the groove 3 is greater than the depth of the silicon waveguide 5 buried in the silica layer 4. The convex curved end face of the single-mode optical fiber 2 can converge the signal light emitted from the core of the single-mode optical fiber 2, making its mode spot size comparable to the size of the silicon waveguide 5, thereby improving the coupling efficiency. The sharp corner of the incident end of the low-refractive-index waveguide 6 plays a role in amplifying the signal light mode spot, making it easier for the signal light to enter the silicon waveguide 5, thereby improving the coupling tolerance.

[0029] The single-mode optical fiber 2 is fixed by the optical fiber pressing block 1 and the optical fiber fixing block 7. The optical fiber fixing block 7 is simultaneously precipitated and grown into shape when the silica layer 4 is precipitated and grown. The upper surface of the optical fiber fixing block 7 and the lower surface of the optical fiber pressing block 1 are both processed with V-shaped grooves. The single-mode optical fiber 2 is fixedly connected by the optical fiber pressing block 1 and the optical fiber fixing block 7. The single-mode optical fiber 2 is clamped and fixed by the V-shaped groove. The optical fiber fixing block 7 is simultaneously precipitated and grown into shape when the silica layer 4 is precipitated and grown, so that the single-mode optical fiber 2 can be aligned with the low refractive index waveguide 6.

[0030] Embodiment 2:

[0031] A method for coupling a silicon-based optoelectronic chip with a single-mode optical fiber 2. This embodiment makes specific improvements to the installation process of the single-mode optical fiber 2, such as Figure 4 As shown, this is a structural diagram of the optical fiber installer of the second embodiment, as Figure 5As shown, it is a schematic diagram of the structure of the execution part of the optical fiber installer of the second embodiment. The single-mode optical fiber 2 is installed to the coupling position by the optical fiber installer. The optical fiber installer includes a connecting frame 9, a screw rod seat 14, a screw rod 15, a rotating handle 10, two slide bars 16, a slider 13, an optical fiber clamping seat 17 and an optical fiber clamping block 11. The optical fiber clamping seat 17 is fixedly connected to the slider 13, and the optical fiber clamping block 11 is tightly and fixedly connected to the optical fiber clamping seat 17. The optical fiber clamping block 11 and the optical fiber clamping seat 17 have V-shaped grooves at the same position of the contact surface. The optical fiber is clamped by the two V-shaped grooves. The second end of the screw rod 15 is hinged to the slider 13 and relatively fixed along the axial direction. The slider 13 is movably connected to the slide rod 16. The screw rod 15 extends with the two slide rods 16. The screw seat 14 is processed with a threaded hole matching the screw 15, and the screw 15 is connected to the screw seat 14 through a threaded pair. The rotating handle 10 is fixedly installed on the first end of the screw 15, and the slide bar 16 is fixedly installed on the screw seat 14. The screw seat 14 is fixedly installed on the connecting frame 9. The connecting frame 9 is detachably fixedly connected to the silicon substrate 8. After the connecting frame 9 is fixedly connected to the silicon substrate 8, the single-mode optical fiber 2 is clamped on the optical fiber clamping block 11 and the optical fiber clamping seat 17. The rotating handle 10 is twisted to drive the screw 15 to rotate, and then the slide bar 13 is driven to move. The slide bar 13 drives the single-mode optical fiber 2 to move to the coupling position. After the optical fiber clamp 1 is installed to fix the single-mode optical fiber 2, the optical fiber clamping block 11 and the connecting frame 9 are removed. The rest of the parts are the same as in Example 1.

[0032] Embodiment three:

[0033] A method for coupling a silicon-based optoelectronic chip with a single-mode optical fiber 2. This embodiment makes specific improvements to the installation process of the single-mode optical fiber 2, such as Figure 6 As shown, it is a schematic diagram of the structure of the anti-collision device of the optical fiber installer of the third embodiment. The optical fiber installer used in the present embodiment to install the single-mode optical fiber 2 to the coupling position also includes an anti-collision device, and the anti-collision device locks the slider 13 when the output end of the single-mode optical fiber 2 moves to the coupling position. The refractive index difference between the silicon waveguide 5 and silicon dioxide is huge, so the silicon waveguide 5 used in conjunction with silicon dioxide has a strong binding effect on light, so the silicon waveguide 5 can have a smaller size, usually only a dozen to tens of microns. The too small size makes its ability to withstand impact force very weak. The single-mode optical fiber 2 needs to be very close to the silicon waveguide 5 and the silicon dioxide layer 4. When installing the single-mode optical fiber 2, if the operation is improper, the single-mode optical fiber 2 will collide with the silicon dioxide layer 4 and the silicon waveguide 5, resulting in damage to the silicon dioxide layer 4 and the silicon waveguide 5. The anti-collision device can prevent the collision of the single-mode optical fiber 2 with the silicon dioxide layer 4 and the silicon waveguide 5 during the installation of the single-mode optical fiber 2.

[0034] like Figure 7 As shown, this is a schematic diagram of the locking mechanism structure of the third embodiment. Figure 8 The figure shows the structure of the locking mechanism of the third embodiment. Figure 2The anti-collision device includes a contact switch, which is turned on when in contact with an obstacle. The locking mechanism of the anti-collision device for locking the slider 13 includes two brake blocks 20, a spring 18 and a power supply. A through groove is provided at the sleeve joint of the slider 13 and the slide bar 16, and a T-shaped groove 19 is processed at the bottom of the through groove. The bottoms of the two brake blocks 20 are both engaged with the T-shaped groove. The middle of the two brake blocks 20 are respectively located on the outside of the slide bar 16, and the middle of the inner sides of the two brake blocks 20 are connected by a spring 18. The two ends of the spring 18 are connected to the power supply through the contact switch. When the contact switch is in contact with an obstacle, it is turned on, and the spring 18 is connected to the power supply and energized. After being energized, the spring 18 shrinks and pulls the two brake blocks 20 toward the middle, so that the brake blocks 20 abut against the slide bar 16, generating friction to lock the slider 13.

[0035] The anti-collision device includes a probe rod 12, a contact switch and a locking mechanism. The first end of the probe rod 12 is fixedly mounted on the optical fiber clamping seat 17, the contact switch is mounted on the second end of the probe rod 12, and the locking mechanism is coupled to the contact switch. The locking mechanism locks the slider 13 when the contact switch is turned on. Fig. 9 As shown, this is a schematic diagram of the contact switch structure of the third embodiment. Fig.10 As shown, it is a cross-sectional view of the contact switch of the third embodiment, the contact switch comprises a front contact 23, a rear contact 21 and a graphite tube 22, the front contact 23 and the rear contact 21 are both in tubular shape, the outer wall of the graphite tube 22 is sleeved with the inner wall of the front contact 23, the rear contact 21 is fixed at the end of the probe 12, the front contact 23 is fixedly connected to the rear contact 21 concentrically through the insulating layer, and the front end of the graphite tube 22 is located in front of the output end of the single-mode optical fiber 2. The ability of the silicon dioxide layer 4 and the silicon waveguide 5 to withstand impact force is very weak, so the contact switch needs as little force as possible when it is triggered. The density of the graphite tube 22 itself is relatively small, the conductivity is strong, and its size can be smaller, and the graphite itself has a lubricating effect, which can reduce the friction between the front contact 23 and the graphite tube 22, so that the force required when the contact switch is triggered is smaller, and thus the impact force on the silicon dioxide layer 4 and the silicon waveguide 5 is smaller.

[0036] like Fig.11 As shown, it is a circuit connection diagram of embodiment 3, the front contact 23 is connected to the positive pole of the power supply, the first end of the spring 18 is electrically connected to the rear contact 21, and the second end of the spring 18 is connected to the negative pole of the power supply.

[0037] Optionally, the outer sides of the two slide bars 16 are processed with a flat surface, which is opposite to the inner side of the brake block 20 with a gap. The flat surface changes the contact between the slide bar 16 and the brake block 20 from line contact to surface contact, which can improve the locking force. The rest of the parts are the same as those in the second embodiment.

[0038] The above-described embodiment is only a preferred solution of the present invention and does not limit the present invention in any form. There are other variations and modifications without exceeding the technical solution described in the claims.

Claims

1. A method for coupling a silicon-based optoelectronic chip with a single-mode optical fiber, applied to coupling a single-mode optical fiber with a silicon waveguide, characterized in that: A silicon dioxide layer is arranged on a silicon substrate, a silicon waveguide is arranged in the silicon dioxide layer, an end face of a single-mode optical fiber is processed into a convex curved surface, there is a gap between the single-mode optical fiber and the silicon dioxide layer, at least one section of low-refractive index waveguide is arranged between the single-mode optical fiber and the silicon waveguide, the low-refractive index waveguide is in a sheet-like rectangular parallelepiped shape with sharp corners at both ends, the silicon waveguide has a sharp corner at the injection end, the core output end of the single-mode optical fiber is aligned with the injection end of the low-refractive index waveguide, the low-refractive index waveguide and the silicon waveguide partially overlap in the horizontal direction, and there is a gap in the vertical direction, the silicon dioxide layers on both sides of the low-refractive index waveguide and the silicon waveguide are processed with grooves, and the depth of the grooves is greater than the depth of the silicon waveguide buried in the silicon dioxide layer; The single-mode optical fiber is fixed by an optical fiber pressing block and an optical fiber fixing block, and the single-mode optical fiber is installed to a coupling position through an optical fiber installer including a slider, two sliding rods and an anti-collision device. The anti-collision device locks the slider when the single-mode optical fiber output end moves to the coupling position. The anti-collision device includes a contact switch, and the contact switch is installed in front of the single-mode optical fiber output end. The contact switch is turned on when it contacts an obstacle. The locking mechanism of the anti-collision device for locking the slider includes two brake blocks, a spring and a power supply. A through groove is provided at the joint between the slider and the sliding rod, and a T-groove is processed at the bottom of the through groove. The bottoms of the two brake blocks are both engaged with the T-groove, and the middle of the two brake blocks are respectively located on the outside of a sliding rod, and the middle of the inner side of the two brake blocks is connected by the spring, and the two ends of the spring are connected to the power supply through the contact switch.

2. The method for coupling a silicon-based optoelectronic chip with a single-mode optical fiber according to claim 1, characterized in that: The single-mode optical fiber is fixed by an optical fiber pressing block and an optical fiber fixing block. The optical fiber fixing block is formed simultaneously when the silica layer is generated. The upper surface of the optical fiber fixing block and the lower surface of the optical fiber pressing block are processed with V-shaped grooves. The single-mode optical fiber is fixedly connected by the optical fiber pressing block and the optical fiber fixing block, and the single-mode optical fiber is clamped and fixed by the V-shaped groove.

3. A method for coupling a silicon-based optoelectronic chip with a single-mode optical fiber according to claim 1 or 2, characterized in that: The single-mode optical fiber is installed to the coupling position through the optical fiber installer, and the optical fiber installer includes a connecting frame, a screw rod seat, a screw rod, a rotating handle, two sliding rods, a slider, an optical fiber clamping seat and an optical fiber clamping block. The optical fiber clamping seat is fixedly connected to the slider, and the optical fiber clamping block is tightly and fixedly connected to the optical fiber clamping seat. The optical fiber clamping block and the optical fiber clamping seat contact surface are both provided with V-grooves at the same position, and the optical fiber is clamped by the two V-grooves. The second end of the screw rod is hinged to the slider and relatively fixed along the axial direction. The slider is movably connected to the sliding rod, and the screw rod has the same extension direction as the two sliding rods. The screw rod seat A threaded hole matching the screw rod is processed, the screw rod is connected to the screw rod seat by a threaded pair, the rotating handle is fixedly installed on the first end of the screw rod, the sliding rod is fixedly installed on the screw rod seat, the screw rod seat is fixedly installed on the connecting frame, the connecting frame is detachably fixedly connected to the silicon substrate, after the connecting frame is fixedly connected to the silicon substrate, the single-mode optical fiber is clamped on the optical fiber clamping block and the optical fiber clamping seat, the rotating handle is twisted to drive the screw rod to rotate, and then the slider is driven to move, and the slider drives the single-mode optical fiber to move to the coupling position, after the optical fiber clamping block is installed to fix the single-mode optical fiber, the optical fiber clamping block and the connecting frame are removed.

4. The method for coupling a silicon-based optoelectronic chip with a single-mode optical fiber according to claim 3, characterized in that: The optical fiber installer used when installing the single-mode optical fiber to the coupling position also includes an anti-collision device, which locks the slider when the single-mode optical fiber output end moves to the coupling position.

5. The method for coupling a silicon-based optoelectronic chip with a single-mode optical fiber according to claim 4, characterized in that: The anti-collision device includes a probe rod, a contact switch and a locking mechanism. The first end of the probe rod is fixedly mounted on the optical fiber clamping seat, the contact switch is mounted on the second end of the probe rod, the locking mechanism is coupled to the contact switch, and the locking mechanism locks the slider when the contact switch is turned on. The contact switch includes a front contact, a rear contact and a graphite tube. The front contact and the rear contact are both tubular, the outer wall of the graphite tube is sleeved with the inner wall of the front contact, the rear contact is fixed at the end of the probe rod, the front contact is concentrically fixedly connected to the rear contact through an insulating layer, and the front end of the graphite tube is located in front of the single-mode optical fiber output end.

6. The method for coupling a silicon-based optoelectronic chip with a single-mode optical fiber according to claim 5, characterized in that: The locking mechanism includes two brake blocks, a spring and a power supply. A through groove is opened at the joint of the slider and the slide rod, and a T-shaped groove is processed at the bottom of the through groove. The bottoms of the two brake blocks are clamped with the T-shaped groove. The middle parts of the two brake blocks are respectively located on the outside of a slide rod, and the middle parts of the inner sides of the two brake blocks are connected by the spring. The front contact is connected to the positive pole of the power supply, the first end of the spring is electrically connected to the rear contact, and the second end of the spring is connected to the negative pole of the power supply.

7. A method for coupling a silicon-based optoelectronic chip with a single-mode optical fiber according to claim 1 or 6, characterized in that: The outer sides of the two slide bars are processed with a flat surface portion, and the flat surface portion is opposite to the inner side surface of the brake block with a gap therebetween.

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