An outer positioning frame ring-attaching bottom film device

Abstract

The present invention discloses an outer positioning frame ring and bottom film device in the field of semiconductor processing, comprising a housing, a rotating roller group is arranged on both the front and rear sides corresponding to the positioning platform, a transmission bottom film with viscosity is arranged longitudinally between the two rotating roller groups, a movable suction ring is arranged above the positioning platform, the inner diameter of the outer positioning frame ring is smaller than the outer diameter of the positioning platform, the outer diameter of the outer positioning frame ring is larger than the outer diameter of the positioning platform, and an annular cutting groove is opened on the lower side of the outer positioning frame ring; a rotating disk is coaxially arranged below the positioning platform, a plurality of rotating arms are evenly spaced and arranged on the outer circumference of the rotating disk, a rotating seat is arranged at the end of the rotating arm, a pressure wheel is rotatably connected to the rotating seat, the upper side of the pressure wheel is flush with the positioning platform, and an arc-shaped cutting knife is fixedly connected to the rotating seat, and the upper blade of the cutting knife can be correspondingly extended into the cutting groove. The present invention can automatically cut the bottom film into a circle and fix the outer positioning frame ring on the edge of the upper surface of the bottom film.

Description

Technical Field

[0001] The invention belongs to the field of semiconductor processing, and particularly relates to an outer positioning frame ring-attaching bottom film device. Background Art

[0002] In the prior art, a wafer refers to a silicon chip used in the manufacture of silicon semiconductor integrated circuits. Because of its round shape, it is called a wafer. Various circuit element structures can be processed on the silicon chip to become an integrated circuit product with specific electrical functions. The wafer manufacturing plant melts these polycrystalline silicon, then plants seed crystals in the melt, and then slowly pulls them out to form a cylindrical single crystal silicon rod. Since the silicon rod is gradually generated in the molten silicon raw material from a seed crystal with a determined crystal plane orientation. After being cut, rolled, sliced, chamfered, polished, laser engraved, and packaged, the silicon rod becomes the basic raw material of the integrated circuit factory - silicon wafer, which is the "wafer".

[0003] Several ICs can be integrated on a wafer, and the chip manufacturing process can be divided into several steps, including wafer processing, wafer probe testing, assembly, and testing. Among them, the wafer processing and wafer probe testing are front-end processes, while the assembly and testing processes are back-end processes. During the processing of wafers, the wafers need to undergo several processes, including coating, exposure, development, etching, ion implantation, metal sputtering, and cutting. Usually, the wafer is attached to a base film, and a layer of protective film is provided on the surface of the wafer. An outer positioning frame ring is fixed on the edge of the upper surface of the base film. The outer positioning frame ring coincides with the axis of the wafer. The outer positioning frame ring serves as a support for the wafer, which is convenient for processing and positioning of the wafer to prevent damage to the wafer. At present, there is a lack of equipment on the market that can fit the base film to the outer positioning frame ring, and it is impossible to automatically fix the outer positioning frame ring to the base film. Summary of the invention

[0004] The purpose of the present invention is to provide a device for sticking a bottom film with an outer positioning frame ring, which can automatically cut the bottom film into a circle and fix the outer positioning frame ring on the edge of the upper surface of the bottom film, so as to stick the bottom film to the lower side of the outer positioning frame ring, with a high degree of automation and convenient positioning.

[0005] The object of the present invention is achieved as follows: an outer positioning frame ring sticking bottom film device comprises a machine housing, a circular positioning platform is arranged in the machine housing, rotating roller groups are arranged on the front and rear sides corresponding to the positioning platform, a transmission bottom film with viscosity is arranged longitudinally between the two rotating roller groups, the width of the transmission bottom film is greater than the diameter of the positioning platform, a movable suction ring is arranged above the positioning platform, the outer positioning frame ring is adsorbed under the suction ring, and when the axis of the outer positioning frame ring coincides with the axis of the positioning platform, the inner diameter of the outer positioning frame ring is smaller than the outer diameter of the positioning platform, and the outer diameter of the outer positioning frame ring is greater than The outer diameter of the positioning platform and the lower side of the outer positioning frame ring are provided with an annular cutting groove; a rotating disk is coaxially arranged below the positioning platform, and a plurality of rotating arms are evenly spaced on the outer circumference of the rotating disk, and a rotating seat is provided at the end of the rotating arm, and the rotating seat is located outside the positioning platform, and a pressure wheel is rotatably connected to the rotating seat, and the axis of the pressure wheel is arranged along the radial direction of the positioning platform, and the upper side of the pressure wheel is flush with the positioning platform, and an arc-shaped cutting knife is also fixedly connected to the rotating seat, and the upper side blade of the cutting knife can be correspondingly extended into the cutting groove, and the two end faces of the pressure wheel are respectively located on the left and right sides of the cutting knife in the axial direction.

[0006] When the present invention is working, the rotating roller groups on the front and rear sides drive the transmission bottom film to move, the suction ring sucks the outer positioning frame ring, the suction ring descends to press the outer positioning frame ring on the positioning platform, the inner ring of the outer positioning frame ring is supported on the positioning platform, the outer ring of the outer positioning frame ring is supported on the upper side of the pressure wheel, the cutting knife is arranged corresponding to the cutting groove, the rotating disk rotates and drives the rotating seat to rotate through the rotating arm, the arc cutting knife extends into the cutting groove and cuts the transmission bottom film into a circle, the pressure wheel presses the edge of the transmission bottom film with stickiness on the lower side of the outer positioning frame ring, the outer positioning frame ring and the bottom film are framed and fixed, and then the suction ring moves the wafer with the bottom film pasted out of the machine housing. Compared with the prior art, the present invention has the beneficial effects of: being able to automatically cut the bottom film into a circle, and fixing the outer positioning frame ring on the edge of the upper surface of the bottom film, so as to achieve the bonding of the bottom film to the lower side of the outer positioning frame ring, and then the wafer can be bonded to the bottom film, which is more convenient for wafer processing and has a high degree of automation.

[0007] As a further improvement of the present invention, the rotating roller group includes a plurality of rotating rollers spaced apart in the longitudinal direction, the rotating roller axis is arranged transversely, the left and right ends of the rotating roller are rotatably supported on the corresponding roller brackets, the upper sides of the rotating rollers are flush, and the lower surface of the transmission bottom film is in contact with the upper side of the rotating roller. The roller shaft of each rotating roller is connected to the rotating drive mechanism, the rotating drive mechanism drives each rotating roller to rotate synchronously, and the rotating roller drives the transmission bottom film to move through friction.

[0008] As a further improvement of the present invention, the transmission bottom film includes a source rotating part and a translation part. The transmission bottom film source rotating part is wound into a plurality of circles from the outside to the inside. The inner circle of the transmission bottom film source rotating part is mounted on the discharge shaft. The left and right ends of the discharge shaft are rotatably supported on the corresponding roller brackets. The outer circle side of the transmission bottom film source rotating part is connected to the translation part. The rotating roller drives the transmission bottom film translation part to move. The translation part pulls the transmission bottom film source rotating part to rotate around the discharge shaft. The transmission bottom film source rotating part continuously discharges outwards through self-rotation. When a roll of transmission bottom film is used up, a new transmission bottom film can be replaced.

[0009] As a further improvement of the present invention, a plurality of tee joints are evenly spaced along the circumferential direction on the upper side of the suction ring, bypass passages are provided on the left and right sides of the tee joints, a lower passage is provided on the lower side of the tee joint, the bypass passages of adjacent tee joints are connected by connecting pipes, the bypass passages of the tee joints located on the side are connected to the vacuum device, a plurality of vents are provided on the suction ring corresponding to the lower passages of each tee joint, the vents are connected to the lower passages of the corresponding tee joints, a moving rod is vertically provided on the side of the suction ring, and the upper end of the moving rod is connected to the driving mechanism for transmission. The tee joints are interconnected, the vacuum device vacuums the lower passage of the tee joint, and the vents suck the outer positioning frame ring through vacuum; the driving mechanism drives the suction ring to move freely.

[0010] As a further improvement of the present invention, the driving mechanism includes two fixed transverse beams arranged in parallel, the fixed transverse beam is located above the suction ring, a transverse guide rail and a transverse rack are arranged on the fixed transverse beam, a transverse frame is arranged between the two fixed transverse beams, transverse seats are arranged at both ends of the transverse frame, the transverse seat is slidably connected with the corresponding transverse guide rail through a slider, a transverse motor is vertically arranged on the transverse seat, and a gear meshing with the corresponding transverse rack is arranged at the output end of the transverse motor; a longitudinal seat is slidably connected to the transverse frame through a longitudinal guide rail, a longitudinal motor is arranged on the longitudinal seat, a longitudinal rack is axially arranged on the transverse frame, and a gear meshing with the longitudinal rack is arranged at the output end of the longitudinal motor; a lifting frame is movably connected to the longitudinal seat, and the upper end of the moving rod is connected to the lifting frame. The transverse motor drives the gear to rotate along the transverse rack, and the transverse frame realizes transverse movement, the longitudinal motor drives the gear to rotate along the longitudinal rack, the longitudinal seat can move longitudinally, and the lifting frame drives the moving rod to move up and down.

[0011] As a further improvement of the present invention, a groove vertically penetrating the longitudinal shift seat is provided in the middle of the longitudinal shift seat, a plurality of lifting guide rails are provided on the side wall of the groove, the lifting frame is vertically inserted into the groove and slidably connected with each lifting guide rail through a slider, a rotatable lead screw is vertically provided on the lifting frame, one end of the lead screw is transmission-connected with the lifting motor, a nut seat is fixedly provided on the upper side of the groove of the longitudinal shift seat, a lead screw nut is fixedly provided on the nut seat, and the lead screw nut is matched with the lead screw. The lifting motor drives the lead screw to rotate, the lead screw nut is fixed, the lead screw can move along the axial direction of the lead screw nut, and the lead screw drives the lifting frame to move up and down.

[0012] As a further improvement of the present invention, the rotating shaft of the rotating disk is connected to the rotating motor through a reducer. The rotating motor drives the rotating disk to rotate after being decelerated by the reducer. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a structural schematic diagram of the present invention.

[0014] Figure 2 A top view of the rotating disk.

[0015] Figure 3 for Figure 1 AA section view in.

[0016] Figure 4 for Figure 3 A partial enlarged view of .

[0017] Figure 5 for Figure 2 B view.

[0018] Figure 6 It is a structural schematic diagram of the driving mechanism of the suction ring.

[0019] Figure 7 A top view of the suction ring.

[0020] Figure 8 The side view of the suction ring.

[0021] Fig. 9 It is a schematic diagram of the three-dimensional structure of the driving mechanism of the suction ring.

[0022] Fig.10 for Fig. 9 Enlarged view of point C in the middle.

[0023] Fig.11 It is a schematic diagram of the three-dimensional structure of the longitudinal shift seat.

[0024] Fig.12 for Fig.11 A partial enlarged view of .

[0025] Fig.13 A top view of the wafer, base film and outer positioning frame ring.

[0026] Among them, 1 is a machine housing, 2 is a positioning platform, 3 is a rotating roller group, 3a is a rotating roller, 4 is a transmission bottom film, 4a is a source rotating part, 4b is a translation part, 5 is a suction ring, 5a is a vent, 6 is an outer positioning frame ring, 7 is a cutting groove, 8 is a rotating disk, 8a is a rotating shaft, 9 is a rotating arm, 10 is a rotating seat, 11 is a pressure wheel, 12 is a cutting knife, 13 is a roller bracket, 14 is a material discharge shaft, 15 is a three-way joint, 16 is a connecting pipe, 17 is a moving rod, 18 is a fixed transverse beam, 19 is a transverse guide rail, 20 is a transverse rack, 21 is a transverse frame, 21a is a transverse seat, 22 is a transverse motor, 23 is a longitudinal guide rail, 24 is a longitudinal seat, 25 is a longitudinal motor, 26 is a longitudinal rack, 27 is a lifting frame, 28 is a lifting guide rail, 29 is a lead screw, 30 is a lifting motor, 31 is a nut seat, 31a is a lead screw nut, 32 is a reducer, 33 is a rotating motor, and 34 is a wafer. DETAILED DESCRIPTION

[0027] like Figure 1-13, is an outer positioning frame ring sticking bottom film device, comprising a machine housing 1, a circular positioning platform 2 is arranged in the machine housing 1, and rotating roller groups 3 are arranged on the front and rear sides corresponding to the positioning platform 2, and a transmission bottom film 4 with viscosity is arranged longitudinally between the two rotating roller groups 3, and the width of the transmission bottom film 4 is greater than the diameter of the positioning platform 2, and a movable suction ring 5 is correspondingly arranged above the positioning platform 2, and an outer positioning frame ring 6 is adsorbed under the suction ring 5. When the axis of the outer positioning frame ring 6 coincides with the axis of the positioning platform 2, the inner diameter of the outer positioning frame ring 6 is smaller than the outer diameter of the positioning platform 2, and the outer diameter of the outer positioning frame ring 6 is greater than the outer diameter of the positioning platform 2. An annular cutting groove 7 is provided at the lower side of the ring 6; a rotating disk 8 is coaxially arranged below the positioning platform 2, and a plurality of rotating arms 9 are evenly spaced on the outer periphery of the rotating disk 8, and a rotating seat 10 is provided at the end of the rotating arm 9, and the rotating seat 10 is located outside the positioning platform 2, and a pressing wheel 11 is rotatably connected to the rotating seat 10, and the axis of the pressing wheel 11 is arranged along the radial direction of the positioning platform 2, and the upper side of the pressing wheel 11 is flush with the positioning platform 2, and an arc-shaped cutting knife 12 is also fixedly connected to the rotating seat 10, and the upper side blade of the cutting knife 12 can extend into the cutting groove 7 correspondingly, and the two end surfaces of the pressing wheel 11 are respectively located on the left and right sides of the cutting knife 12 in the axial direction. The rotating roller group 3 includes a plurality of rotating rollers 3a spaced apart in the longitudinal direction, and the axis of the rotating roller 3a is arranged transversely, and the left and right ends of the rotating roller 3a are rotatably supported on the corresponding roller bracket 13, respectively, and the upper sides of each rotating roller 3a are flush, and the lower surface of the transmission bottom film 4 is in contact with the upper side of the rotating roller 3a. The transmission bottom film 4 includes a source rotating part 4a and a translational part 4b. The source rotating part 4a of the transmission bottom film 4 is wound into several circles from the outside to the inside. The inner circle of the source rotating part 4a of the transmission bottom film 4 is mounted on the discharge shaft 14. The left and right ends of the discharge shaft 14 are rotatably supported on the corresponding roller bracket 13. The outer circle side of the source rotating part 4a of the transmission bottom film 4 is connected to the translational part 4b. A plurality of tee joints 15 are evenly spaced along the circumferential direction on the upper side of the suction ring 5, bypass passages are provided on the left and right sides of the tee joint 15, a lower passage is provided on the lower side of the tee joint 15, the bypass passages of adjacent tee joints 15 are connected by a connecting pipe 16, the bypass passage of the tee joint 15 located on the side is connected to the vacuum pumping device, a plurality of vent holes 5a are provided on the suction ring 5 corresponding to the lower passages of each tee joint 15, the vent holes 5a are connected to the lower passages of the corresponding tee joints 15, a moving rod 17 is vertically provided on the side of the suction ring 5, and the upper end of the moving rod 17 is transmission-connected to the driving mechanism.The driving mechanism includes two fixed transverse beams 18 arranged in parallel, the fixed transverse beam 18 is located above the suction ring 5, a transverse guide rail 19 and a transverse rack 20 are provided on the fixed transverse beam 18, a transverse frame 21 is provided between the two fixed transverse beams 18, and transverse seats 21a are provided at both ends of the transverse frame 21 respectively, the transverse seats 21a are slidably connected with the corresponding transverse guide rail 19 through a slider, a transverse motor 22 is vertically provided on the transverse seat 21a, and a gear meshing with the corresponding transverse rack 20 is provided at the output end of the transverse motor 22; a longitudinal seat 24 is slidably connected to the transverse frame 21 through a longitudinal guide rail 23, a longitudinal motor 25 is provided on the longitudinal seat 24, a longitudinal rack 26 is axially provided on the transverse frame 21, and a gear meshing with the longitudinal rack 26 is provided at the output end of the longitudinal motor 25, a lifting frame 27 is movably connected to the longitudinal seat 24, and the upper end of the moving rod 17 is connected to the lifting frame 27. A groove is provided in the middle of the longitudinal shift seat 24 and vertically penetrates the longitudinal shift seat 24. A plurality of lifting guide rails 28 are provided on the side wall of the groove. The lifting frame 27 is vertically inserted into the groove and slidably connected with each lifting guide rail 28 through a slider. A rotatable lead screw 29 is vertically provided on the lifting frame 27. One end of the lead screw 29 is transmission-connected with a lifting motor 30. A nut seat 31 is fixedly provided on the upper side of the groove of the longitudinal shift seat 24. A lead screw nut 31a is fixedly provided on the nut seat 31. The lead screw nut 31a is matched with the lead screw 29. The rotating shaft 8a of the rotating disk 8 is transmission-connected with a rotating motor 33 via a reducer 32.

[0028] When the device is working, the rotating roller groups 3 on the front and rear sides drive the transmission bottom film 4 to move, the transverse motor 22 drives the gear to rotate along the transverse rack 20, the transverse frame 21 realizes transverse movement, the longitudinal motor 25 drives the gear to rotate along the longitudinal rack 26, the longitudinal seat 24 can move longitudinally, the lifting motor 30 drives the lead screw 29 to rotate, the lead screw nut 31a is fixed, the lead screw 29 can move axially along the lead screw nut 31a, and the lead screw 29 drives the lifting frame 27 to move up and down; the suction ring 5 sucks the outer positioning frame ring 6, and the suction ring 5 descends to position the outer positioning frame ring 6. The frame ring 6 is pressed on the positioning platform 2, the inner ring of the outer positioning frame ring 6 is supported on the positioning platform 2, the outer ring of the outer positioning frame ring 6 is supported on the upper side of the pressure wheel 11, the cutting knife 12 is arranged corresponding to the cutting groove 7, the rotating disk 8 rotates to drive the rotating seat 10 to rotate through the rotating arm 9, the arc-shaped cutting knife 12 extends into the cutting groove 7 and cuts the transmission bottom film 4 into a circle, the pressure wheel 11 presses the edge of the sticky transmission bottom film on the lower side of the outer positioning frame ring 6, the outer positioning frame ring 6 and the bottom film are framed and fixed, and then the suction ring 5 moves the wafer 34 with the bottom film pasted out of the machine housing 1. The advantages of this device are: it can automatically cut the bottom film into a circle, and fix the outer positioning frame ring 6 on the edge of the upper surface of the bottom film, so that the bottom film is attached to the lower side of the outer positioning frame ring 6, and then the wafer 34 can be attached to the bottom film, which is more convenient when processing the wafer 34, and has a high degree of automation.

[0029] The present invention is not limited to the above-mentioned embodiments. On the basis of the technical solution disclosed in the present invention, technicians in this field can make some substitutions and deformations to some technical features therein according to the disclosed technical content without creative labor, and these substitutions and deformations are all within the protection scope of the present invention.

Claims

1. An outer positioning frame ring-attaching bottom film device, characterized in that: The invention comprises a machine casing, wherein a circular positioning platform is arranged in the machine casing, and rotating roller groups are arranged on the front and rear sides corresponding to the positioning platform, a transmission bottom film with viscosity is arranged longitudinally between the two rotating roller groups, the width of the transmission bottom film is greater than the diameter of the positioning platform, a movable suction ring is arranged correspondingly above the positioning platform, the outer positioning frame ring is adsorbed below the suction ring, and when the axis of the outer positioning frame ring coincides with the axis of the positioning platform, the inner diameter of the outer positioning frame ring is smaller than the outer diameter of the positioning platform, the outer diameter of the outer positioning frame ring is greater than the outer diameter of the positioning platform, and an annular cutting groove is opened on the lower side of the outer positioning frame ring; a rotating disk is coaxially arranged below the positioning platform, a plurality of rotating arms are evenly spaced on the outer circumference of the rotating disk, a rotating seat is arranged at the end of the rotating arm, the rotating seat is located outside the positioning platform, a pressure wheel is rotatably connected to the rotating seat, the axis of the pressure wheel is arranged along the radial direction of the positioning platform, the upper side of the pressure wheel is flush with the positioning platform, an arc-shaped cutting knife is also fixedly connected to the rotating seat, the upper blade of the cutting knife can be correspondingly extended into the cutting groove, and the two end faces of the pressure wheel are respectively located at The left and right sides of the cutting knife; the rotating roller group includes a plurality of rotating rollers distributed at intervals in the longitudinal direction, the rotating roller axis is arranged horizontally, the left and right ends of the rotating roller are respectively rotatably supported on the corresponding roller bracket, the upper sides of each rotating roller are flush, and the lower surface of the transmission bottom film is in contact with the upper side of the rotating roller; the transmission bottom film includes a source rotating part and a translational part, the transmission bottom film source rotating part is wound into a plurality of circles from the outside to the inside, the inner circle of the transmission bottom film source rotating part is sleeved on the unloading shaft, the left and right ends of the unloading shaft are rotatably supported on the corresponding roller bracket, and the outer circle side of the transmission bottom film source rotating part is connected to the translational part; a plurality of three-way joints are evenly distributed at intervals along the circumference on the upper side of the suction ring, bypass passages are arranged on the left and right sides of the three-way joint, a lower passage is arranged on the lower side of the three-way joint, the bypass passages of adjacent three-way joints are connected by connecting pipes, the bypass passages of the three-way joints located on the side are connected to the vacuum device, and a plurality of vents are opened on the suction ring corresponding to the lower passages of each three-way joint, and the vents are connected to the lower passages of the corresponding three-way joints. A moving rod is vertically provided on the side of the suction ring, and the upper end of the moving rod is transmission-connected to the driving mechanism; the driving mechanism comprises two fixed transverse beams arranged in parallel, the fixed transverse beam is located above the suction ring, a transverse guide rail and a transverse rack are provided on the fixed transverse beam, a transverse frame is provided between the two fixed transverse beams, transverse seats are respectively provided at both ends of the transverse frame, the transverse seats are slidably connected to the corresponding transverse guide rails through sliders, a transverse motor is vertically provided on the transverse seat, and a gear meshing with the corresponding transverse rack is provided at the output end of the transverse motor; a longitudinal seat is slidably connected to the transverse frame through the longitudinal guide rail, the longitudinal seat is provided with a longitudinal motor, a longitudinal rack is axially provided on the transverse frame, and a gear meshing with the longitudinal rack is provided at the output end of the longitudinal motor; a lifting frame is movably connected to the longitudinal seat, and the upper end of the moving rod is connected to the lifting frame;A groove is provided in the middle of the longitudinal shift seat and runs through the longitudinal shift seat vertically. A plurality of lifting guide rails are provided on the side wall of the groove. The lifting frame is vertically inserted into the groove and slidably connected with each lifting guide rail through a slider. A rotatable lead screw is vertically provided on the lifting frame. One end of the lead screw is transmission-connected with the lifting motor. A nut seat is fixedly provided on the upper side of the groove of the longitudinal shift seat. A lead screw nut is fixedly provided on the nut seat. The lead screw nut and the lead screw are matched. The rotating shaft of the rotating disk is transmission-connected with the rotating motor through a reducer. The rotating roller groups on the front and rear sides drive the transmission bottom film to move. The suction ring sucks the outer positioning frame ring, and the suction ring descends to press the outer positioning frame ring onto the positioning platform. The inner ring of the outer positioning frame ring is supported on the positioning platform, and the outer ring of the outer positioning frame ring is supported on the upper side of the pressure wheel. The cutting knife is set corresponding to the cutting groove. The rotating disk rotates through the rotating arm to drive the rotating seat to rotate. The arc-shaped cutting knife extends into the cutting groove and cuts the transmission bottom film into a circle. The pressure wheel presses the edge of the sticky transmission bottom film tightly on the lower side of the outer positioning frame ring. The outer positioning frame ring and the bottom film are framed and fixed, and then the suction ring moves the wafer with the bottom film attached out of the machine housing. ;

Images