A method and device for two-dimensional detection of broadband beam current

Abstract

The present invention describes a method and device for two-dimensional detection of a broadband beam flow, the device comprising a mobile Faraday (1), a channel selection board (27), a signal conversion board (28), a host computer (29), motors 1, 2 and a transmission device (30). The mobile Faraday (1) comprises a Faraday cup (2), (3), (4), (5), (6), (7), (8), (9), (10), (11), (12), (13), (14), (15), (16), (17), (18), (19), (20), (21), (22), (23), (24), (25), (26). The channel selection board (27) comprises channel selection chips (31), (32), (33), (34). The present invention is characterized in that the host computer (29) commands the state of the channel selection chips (31), (32), (33), (34) of the channel selection board (27) through the bus (35), selects the output beam signal, and the signal is processed by the signal conversion board (28) and transmitted to the host computer through the bus (35). Using these devices, the motors 1, 2 and the transmission device (30) drive the mobile Faraday (1) to move in two directions, and detect the size of the two-dimensional beam of the broadband beam.

Description

Technical Field

[0001] The invention relates to two-dimensional detection of a wideband beam current of an ion implanter, and two-dimensional beam current data can be obtained through two-dimensional detection of the beam current. Background Art

[0002] The design and production process of ultra-large integrated circuits almost follows "Moore's Law" to continuously increase the integration of semiconductor devices, and the "line width" of ultra-large chips is also being miniaturized in multiples. Since 2000, the line width of integrated circuits has also entered the "nanoscale" from the "micrometer level". Since 2010, my country's advanced semiconductor production process has also extended from 45nm to 28nm and smaller line widths. The production process of ultra-large-scale integrated circuits has undergone many fundamental changes from "micrometer level" to "nanoscale". Ion implanters are key equipment in 45-22nm process equipment. High-quality beams are the goal of developing ion implanters, which puts higher requirements on the measurement system. Summary of the invention

[0003] In order to accurately detect the quality of a broadband beam, the present invention designs and develops a two-dimensional beam detection system.

[0004] The two-dimensional mobile Faraday consists of a Faraday array consisting of 25 Faraday cups, a moving part, and a beam collection part. The specific structure is as follows Figure 1 As shown in the figure, the Faraday array moves in the horizontal and vertical directions under the drive of the motor screw, and the movement is perpendicular to the beam. By matching the beam collected by each Faraday cup with its real-time position, the shape of the beam profile and the flux density distribution at the measured position can be obtained.

[0005] The two-dimensional mobile Faraday collects the beam current value at the specified position during the movement. The position is represented by X, the beam current value is represented by Y, and the beam current information is (X, Y). Figure 2 2 to 26 in the figure are 25 signal input channels. The information of the input channels is the current value of the beam. Figure 1 31, 32, 33, 34 on the 27-channel selection board are output channel selection switches. Figure 1 28 is a signal conversion board, which is used to convert the current value of the beam into a voltage value with high precision. The collected beam information of channel 31 is (X1, Y1), the collected beam information of channel 32 is (X2, Y2), the collected beam information of channel 33 is (X3, Y3), and the collected beam information of channel 34 is (X4, Y4). By moving the two-dimensional moving Faraday 8 times and switching the channel selection switch, all beam information can be collected once.

[0006] The present invention is achieved through the following technical solutions:

[0007] 1. A method and device for two-dimensional detection of a broadband beam current, characterized in that: a mobile Faraday (1) uses a total of 25 Faraday cups (2), (3), (4), (5), (6), (7), (8), (9), (10), (11), (12), (13), (14), (15), (16), (17), (18), (19), (20), (21), (22), (23), (24), (25), (26).

[0008] 2. A method and device for two-dimensional detection of a wideband beam current is characterized in that the beam current detection adopts a position-triggered data acquisition method of a motion controller.

[0009] 3. A method and device for two-dimensional detection of a wideband beam current, characterized in that: the collected 25-channel signals are selected and output through channel selection chips (31), (32), (33), (34).

[0010] 4. A method and device for two-dimensional detection of a wide-band beam current, characterized in that the two-dimensional beam current data of the wide-band beam can be collected by moving the mobile Faraday (1) eight times.

[0011] The present invention has the following significant advantages:

[0012] 1. High detection accuracy.

[0013] 2. Multi-channel multiplexing, low cost.

[0014] 3. Simple structure, easy disassembly and maintenance. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 Assembly diagram of broadband two-dimensional beam detection device

[0016] Figure 2 Beam detection system structure diagram DETAILED DESCRIPTION

[0017] The following is combined with Figure 1 , Attachment Figure 2 The present invention is further described but is not intended to be limited thereto.

[0018] The two-dimensional mobile Faraday collects the beam current value at the specified position during the movement. The position is represented by X, the beam current value is represented by Y, and the beam current information is (X, Y). Figure 2 2 to 26 in the figure are 25 signal input channels. The information of the input channels is the current value of the beam. Figure 2 31, 32, 33, 34 on the 27-channel selection board are output channel selection switches. Figure 228 is a signal conversion board, which is used to convert the current value of the beam into a voltage value with high precision. The collected beam information of channel 31 is (X1, Y1), the collected beam information of channel 32 is (X2, Y2), the collected beam information of channel 33 is (X3, Y3), and the collected beam information of channel 34 is (X4, Y4). By moving the two-dimensional moving Faraday 8 times and switching the channel selection switch, all beam information can be collected once.

[0019] The specific embodiments of the present invention have described the contents of the present invention in detail. For those skilled in the art, any obvious changes made to the present invention without departing from the spirit of the present invention constitute infringement of the present invention and the relevant legal liability will be borne.

Claims

1. A device for two-dimensional detection of a wideband beam, characterized in that: A total of 25 Faraday cups are used on the mobile Faraday (1); The beam current detection adopts a method of collecting data by triggering the position of a motion controller; the collected 25 channels of signals are selected for output through a channel selection first chip (31), a channel selection second chip (32), a channel selection third chip (33), and a channel selection fourth chip (34); the mobile Faraday (1) is moved eight times to collect broadband beam two-dimensional beam current data; The two-dimensional mobile Faraday consists of a Faraday array of 25 Faraday cups, a moving part, and a beam collection part; The first Faraday cup (2), the second Faraday cup (3), the third Faraday cup (4), the fourth Faraday cup (5), the fifth Faraday cup (6), the sixth Faraday cup (7), the seventh Faraday cup (8), and the eighth Faraday cup (9) are arranged in the first row, and the ninth Faraday cup (10), the tenth Faraday cup (11), the eleventh Faraday cup (12), the twelfth Faraday cup (13), the thirteenth Faraday cup (14), the fourteenth Faraday cup (15), and the fifteenth Faraday cup (16) are arranged in the first row. The cup (16), the sixteenth Faraday cup (17) is arranged in the second row, the seventeenth Faraday cup (18), the eighteenth Faraday cup (19), the nineteenth Faraday cup (20), the twentieth Faraday cup (21), the twenty-first Faraday cup (22), the twenty-second Faraday cup (23), the twenty-third Faraday cup (24), and the twenty-fourth Faraday cup (25) are arranged in the third row, and the long Faraday cup (26) is arranged in the fourth row; the signal of the first row is selected for output through the channel selection first chip (31), the signal of the second row is selected for output through the channel selection second chip (32), the signal of the third row is selected for output through the channel selection third chip (33), and the signal of the fourth row is selected for output through the channel selection fourth chip (34); The moving part includes a motor screw for driving the Faraday array to move in two directions, horizontally and vertically, perpendicular to the beam; The beam collection part comprises a host computer (29), a signal conversion board (28) and a channel selection board (27). The host computer (29) instructs to control the states of the channel selection first chip (31), the channel selection second chip (32), the channel selection third chip (33) and the channel selection fourth chip (34) of the channel selection board (27) through a bus (35), and selects an output beam signal. The signal is processed by the signal conversion board (28) and transmitted to the host computer through the bus (35).

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