A tubular membrane module

By using the design of the sealing head, tubular connector and sealing layer in the tubular membrane assembly, combined with thread sealing and step sealing ring, the unevenness of the traditional molecular sieve membrane sealing structure under high pressure is solved, and high efficiency is achieved Sealed and convenient installation, suitable for high temperature and high pressure environments, and supports the reuse of sealing rings.

CN111214960BActive Publication Date: 2024-12-17SHANGHAI YIDING ELECTRONIC SYST INTEGRATION CO LTD
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Patent Information

Application Number
CN202010120036.9
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2020-02-26
Publication Date
2024-12-17
Estimated Expiration
2040-02-26

AI Technical Summary

Technical Problem

The traditional molecular sieve membrane sealing structure is difficult to maintain uniform sealing performance under high pressure and high concentration organic solvent environments, and it is difficult to check the damage of each membrane tube separately, resulting in inconvenient separation process.

Method used

Design a tube membrane assembly, in which the two ends of the tube membrane structure are connected to the flower disk of the cylinder, sealed with a sealing head and a tube connector, and a sealing layer is formed by spraying or applying sealant and baking, combined with Threaded seal structure and step seal ring realize independent installation and sealing connection.

Benefits of technology

It realizes the efficient sealing performance of tubular membrane components, which is easy to install and disassemble, and can inspect the membrane tube separately, adapt to high temperature and high pressure conditions, and the sealing ring can be reused.

✦ Generated by Eureka AI based on patent content.

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Abstract

The present invention relates to the technical field of membrane separation equipment, and in particular to a tubular membrane assembly, wherein a tubular membrane structure is provided, including a tubular membrane element and a head and a tubular connector plugged into the tubular membrane element, and sealant is provided at the plug-in seams, and a sealing layer is formed on the outer wall of the connection between the tubular membrane element and the head and the tubular connector by spraying / coating and baking processes, thereby realizing a sealed connection between the tubular membrane element and the head and the tubular connector; and the tubular connector is provided in an opening of a first faceplate and connected by threaded sealing, so that each tubular membrane structure can be independently installed or disassembled, and each tubular membrane element can be individually repaired; and a matching step portion is provided on the first faceplate and the tubular connector, and a sealing ring is pressed on the matching surface of the step, so that the sealing between the tubular membrane structure and the first faceplate is better.
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Description

Technical Field

[0001] The invention relates to the technical field of membrane separation equipment, in particular to a tubular membrane component. Background Art

[0002] In recent years, with the transformation and upgrading of Chinese products, especially the semiconductor industry and the new energy industry, the quality requirements of organic solvents used are getting higher and higher. Traditional distillation dehydration can no longer meet the customer's requirements for a water content of less than 100ppm. The dehydration technology of molecular sieve membranes will be continuously promoted and popularized. The tubular membrane assembly has a simple structure, is easy to install, disassemble and maintain, and has broad prospects for industrial applications. Since membrane separation technology needs to maintain a pressure difference or concentration difference on both sides of the membrane, the separation process involves a very high concentration of organic solvents, which are highly corrosive. Therefore, the sealing requirements are high, especially the sealing materials.

[0003] The common sealing of molecular sieve membrane is that the two ends of the membrane tube are sealed on the discs at the two ends of the membrane assembly. The discs are provided with holes, and sealing rings are arranged in the holes. The sealing rings are pressed by clamping rings, and the clamping rings are pressed by pressure plates. The pressure plates are fixed to the discs by bolts, so as to achieve the purpose of sealing. This method is very difficult to maintain good and uniform sealing performance for each membrane tube when dozens or hundreds of membrane tubes are installed. The installation requirements are high, and it is impossible to check each membrane tube individually to see if it is damaged and leaks easily, which brings inconvenience to the separation process. This is not what the technicians in this field expect to see. Summary of the invention

[0004] In view of the above problems, the present invention discloses a tubular membrane module, which comprises a cylinder and a tubular membrane structure arranged in the cylinder;

[0005] A first face plate and a second face plate are respectively arranged on both sides of the cylinder, and two ends of the tubular membrane structure are respectively connected to the first face plate and the second face plate;

[0006] The tubular membrane structure comprises a tubular membrane element, a sealing head and a tubular connector, wherein the sealing head and the tubular connector are respectively arranged at two ends of the tubular membrane element, and the sealing head and the tubular connector are plugged into the tubular membrane element, and the plugging seams between the tubular membrane element and the sealing head and the tubular connector are provided with sealant, and the outer walls of the connection between the tubular membrane element and the sealing head and the tubular connector are provided with a sealing layer;

[0007] The first faceplate is provided with an opening, the second faceplate is provided with a slot facing the opening, the sealing head is inserted in the slot, the tubular connector is provided in the opening and is connected to the first faceplate through a threaded seal;

[0008] The diameter of the sealing head is smaller than the minimum diameter of the opening.

[0009] In the above tubular membrane assembly, the process of forming the sealing layer on the outer wall of the connection between the tubular membrane element and the head and the tubular connector is specifically:

[0010] Step S1, spraying a predetermined thickness of polytetrafluoroethylene (PTFE) powder or tetrafluoroethylene copolymer powder on the outer wall of the connection between the tubular membrane element and the end cap and the tubular connector;

[0011] Step S2, baking the tubular membrane structure at a temperature of 160-180° to cause cross-linking of the polytetrafluoroethylene powder or the tetrafluoroethylene copolymer powder.

[0012] In the above tubular membrane assembly, the process of forming the sealing layer on the outer wall of the connection between the tubular membrane element and the head and the tubular connector is specifically:

[0013] Step S1, applying a sealing emulsion of a predetermined thickness on the outer wall of the connection between the tubular membrane element and the end cap and the tubular connector;

[0014] The sealing emulsion is prepared by adding polytetrafluoroethylene powder or tetrafluoroethylene copolymer powder into an organic solvent and a binder and stirring evenly;

[0015] Step S2, after the organic solvent is volatilized, the tubular membrane structure is baked at a temperature of 160-180° to allow the polytetrafluoroethylene powder or the tetrafluoroethylene copolymer powder to be cross-linked.

[0016] In the above tubular membrane assembly, the tetrafluoroethylene copolymer is any one of PTFE, PFA and FEP.

[0017] The above-mentioned tubular membrane assembly, wherein the predetermined thickness is 0.1-0.5 mm.

[0018] In the above tubular membrane assembly, the time for baking the tubular membrane structure is 5 to 10 minutes.

[0019] In the above-mentioned tubular membrane assembly, the first faceplate forms a first step portion in the opening, the outer wall of the tubular connector forms a second step portion that matches the first step portion, and a sealing ring is pressed between the first step portion and the second step portion.

[0020] The above tubular membrane assembly, wherein the openings include a smaller through hole located inside the first faceplate and a larger through hole communicating with the outside of the smaller through hole;

[0021] The tubular connector includes a straight pipe section and a threaded pipe section connected to the straight pipe section, and the straight pipe section is adapted to the diameter of the smaller through hole, and the threaded pipe section is adapted to the larger through hole. The outer wall of the threaded pipe section is provided with an external thread, and the first faceplate is provided with an internal thread adapted to the external thread in the larger through hole. The tubular connector is thread-sealed with the first faceplate through the threaded pipe section, and a fluoroplastic tape is provided between the external thread and the internal thread.

[0022] In the above tubular membrane assembly, the plug-in end of the sealing head has a first tongue-and-groove structure adapted to the tubular membrane element, and the plug-in end of the tubular connector has a second tongue-and-groove structure adapted to the tubular membrane element.

[0023] The above-mentioned tubular membrane assembly, wherein the top of the cylinder is provided with a discharge port and a vacuum port, the bottom of the cylinder is provided with a feed port and a liquid discharge port, and the vacuum port and the liquid discharge port are both provided between the first flower disc and the open end of the cylinder.

[0024] The above invention has the following advantages or beneficial effects:

[0025] 1. The present invention arranges two ends of the tubular membrane structure to be connected to the first faceplate and the second faceplate on both sides of the cylinder respectively, and arranges the tubular membrane structure including a tubular membrane element and a head and a tubular connector respectively arranged at the two ends of the tubular membrane element and plugged with the tubular membrane element, and sealant is arranged at the plug-in seams between the tubular membrane element and the head and the tubular connector, and a sealing layer is arranged on the outer wall of the connection between the tubular membrane element and the head and the tubular connector, thereby realizing a sealed connection between the tubular membrane element and the head and the tubular connector.

[0026] 2. The present invention provides an opening on the first faceplate, provides a slot for inserting the end cap on the second faceplate, and provides a tubular connector in the opening and is sealed and connected to the first faceplate by a thread, and the diameter of the end cap is smaller than the minimum diameter of the opening, so that it is only necessary to pass the end cap of the tubular membrane structure through the opening of the first faceplate and insert it into the slot, and fix the tubular connector on the first faceplate by a thread, so that each tubular membrane structure can be independently installed or disassembled, and each membrane tube can be individually checked for damage and leakage.

[0027] 3. A sealing layer is formed on the outer wall of the tubular membrane structure by using a spraying / coating and baking process, thereby improving the sealing performance of the tubular membrane structure.

[0028] Fourth, a first step portion is formed in the opening of the first faceplate, a second step portion matching the first step portion is formed on the outer wall of the tubular connector, and a sealing ring is pressed between the first step portion and the second step portion, thereby improving the sealing performance between the tubular membrane structure and the first faceplate.

[0029] 5. The tubular membrane module also has the advantages of simple structure, easy installation, ability to withstand high temperature and high pressure conditions, and reusable sealing ring, and is very practical. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] The present invention and its features, appearance and advantages will become more apparent by reading the detailed description of non-limiting embodiments with reference to the following drawings. The same reference numerals indicate the same parts in all the drawings. The drawings are not drawn to scale, and emphasis is placed on illustrating the subject matter of the present invention.

[0031] Figure 1 is a cross-sectional view of a tubular membrane module in an embodiment of the present invention;

[0032] Figure 2 is a cross-sectional view of a tubular membrane structure in an embodiment of the present invention;

[0033] Figure 3 yes Figure 2 An enlarged schematic diagram of the middle head and the tubular connector;

[0034] Figure 4 is a cross-sectional view of another tubular membrane structure in an embodiment of the present invention;

[0035] Figure 5 yes Figure 4 Enlarged schematic diagram of the middle head and tubular connector. DETAILED DESCRIPTION

[0036] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments, but they are not intended to limit the present invention.

[0037] like Figures 1 to 5As shown, this embodiment relates to a tubular membrane assembly. Specifically, the tubular membrane assembly includes a barrel 1 and a tubular membrane structure 2 arranged in the barrel 1 (1-1000 tubular membrane structures 2 can be arranged in the barrel 1 of the tubular membrane tube assembly); the first disc 3 and the second disc 4 are respectively arranged on both sides of the barrel 1, and the two ends of the tubular membrane structure 2 are respectively connected to the first disc 3 and the second disc 4, the top of the barrel 1 is provided with a discharge port 11 and a vacuum port 12, the bottom of the barrel 1 is provided with a feed port 13 and a liquid discharge port 14, and the vacuum port 12 and the liquid discharge port 14 are respectively provided. The first faceplate 3 and the open end of the cylinder 1 are both arranged between them to facilitate vacuuming and draining; the tubular membrane structure 2 comprises a tubular membrane element 21, a sealing head 22 / 22′ and a tubular connector 23 / 23′, the sealing head 22 / 22′ and the tubular connector 23 / 23′ are respectively arranged at both ends of the tubular membrane element 21, and the sealing head 22 / 22′ is plug-connected with the tubular membrane element 21, and the tubular connector 23 / 23′ is also plug-connected with the tubular membrane element 21, and the plug-in seam between the tubular membrane element 21 and the sealing head 22 / 22′ is provided with a sealant 24, the tubular membrane element The joint between the tubular membrane element 21 and the tubular connector 23 / 23' is also provided with a sealant 24, and the outer wall of the connection between the tubular membrane element 21 and the head 22 / 22' is provided with a sealing layer 25, and the outer wall of the connection between the tubular membrane element 21 and the tubular connector 23 / 23' is also provided with a sealing layer 25, so as to achieve a sealed connection between the tubular membrane element 21 and the head 22 / 22', and between the tubular membrane element 21 and the tubular connector 23 / 23'; the first faceplate 3 is provided with an opening, and the second faceplate 4 is provided with a slot matching the size of the head 22 / 22' opposite to the opening The sealing head 22 / 22′ is inserted into the slot, and the tubular connector 23 / 23′ is arranged in the opening and is connected to the first faceplate 3 by a threaded seal; and the diameter of the sealing head 22 / 22′ is smaller than the minimum diameter of the opening, so that the tubular membrane structure 2 can be inserted into the slot of the second faceplate 4 through the opening of the first faceplate 3 from one end of the sealing head 22 / 22′, and is threadedly sealed with the first faceplate 3 by the tubular connector 23 / 23′, so that the tubular membrane structure 2 can be conveniently inserted into the cylinder 1, and installation and disassembly are relatively convenient, and the maintenance efficiency is high.

[0038] In an embodiment of the present invention, the open end of the above-mentioned cylinder 1 is sealed by an end cover flange 6, and a sealing gasket 7 is arranged between the cylinder 1 and the end cover flange 6, and the cylinder 1 and the end cover flange 6 are connected by bolts 8 to achieve the sealing of the cylinder 1, wherein the material of the sealing gasket 7 can be a polymer material such as PTFE, PFA, rubber, EPDM, PTFE, FKM or PE.

[0039] In a preferred embodiment of the present invention, the process of forming the sealing layer 25 on the outer wall of the connection between the tubular membrane element 21 and the end cap 22 / 22' and the tubular connector 23 / 23' is specifically as follows:

[0040] Step S1, spraying a predetermined thickness of polytetrafluoroethylene powder or tetrafluoroethylene copolymer powder on the outer wall of the connection between the tubular membrane element 21 and the end cap 22 / 22' and the tubular connector 23 / 23'.

[0041] Preferably, the tetrafluoroethylene copolymer is any one of PTFE, PFA and FEP.

[0042] Preferably, a single material PTFE powder or tetrafluoroethylene copolymer powder (such as PFA, FEP, ETFE, etc., with a particle size of 60-100 um) can be sprayed on the outer wall of the connection between the tubular membrane element 21 and the head 22 / 22' and the tubular connector 23 / 23'. Alternatively, mica or ceramic powder with a particle size of 1-20 um can be added to the single material powder according to the needs of use, and the addition ratio is 1-10%, in order to enhance the hardness and sealing performance of the sealing layer.

[0043] Preferably, the predetermined thickness is 0.1-0.5 mm.

[0044] Step S2, baking the tubular membrane structure 2 at a temperature of 160-180° to allow the polytetrafluoroethylene powder or the tetrafluoroethylene copolymer powder to be cross-linked.

[0045] Preferably, in step S2, the time for baking the tubular membrane structure 2 is 5 to 10 minutes.

[0046] Preferably, the above process further comprises:

[0047] Step S3, repeating the above steps S1 and S2 in sequence until the thickness of the formed sealing layer 25 meets the process requirements, that is, the number of spraying and baking can be adjusted according to the process requirements.

[0048] In another preferred embodiment of the present invention, the process of forming the sealing layer 25 on the outer wall of the connection between the tubular membrane element 21 and the end cap 22 / 22' and the tubular connector 23 / 23' is specifically as follows:

[0049] Step S1 ′, applying a sealing emulsion of a predetermined thickness on the outer wall of the connection between the tubular membrane element 21 and the sealing head 22 / 22 ′ and the tubular connector 23 / 23 ′.

[0050] The sealing emulsion is prepared by adding polytetrafluoroethylene powder or tetrafluoroethylene copolymer powder into an organic solvent and a binder and stirring the mixture evenly.

[0051] Preferably, the tetrafluoroethylene copolymer is any one of PTFE, PFA and FEP.

[0052] Preferably, a single material PTFE powder or tetrafluoroethylene copolymer powder (such as PFA, FEP, ETFE, etc., with a particle size of 60-100 um) can be sprayed on the outer wall of the connection between the tubular membrane element 21 and the head 22 / 22' and the tubular connector 23 / 23'. Alternatively, mica or ceramic powder with a particle size of 1-20 um can be added to the single material powder according to the needs of use, and the addition ratio is 1-10%, in order to enhance the hardness and sealing performance of the sealing layer.

[0053] Preferably, the predetermined thickness is 0.1-0.5 mm.

[0054] Step S2', after the organic solvent is volatilized, the tubular membrane structure is baked at a temperature of 160-180° to allow the polytetrafluoroethylene powder or the tetrafluoroethylene copolymer powder to be cross-linked.

[0055] Preferably, in step S2', the time for baking the tubular membrane structure 2 is 5 to 10 minutes.

[0056] Preferably, the above process further comprises:

[0057] Step S3', repeating the above steps S1' and S2' in sequence until the thickness of the formed sealing layer 25 meets the process requirements, that is, the coating and baking times can be adjusted according to the process requirements.

[0058] In the embodiment of the present invention, the plug-in end of the sealing head 22 / 22' has a first tongue-and-groove structure adapted to the tubular membrane element 21, and the plug-in end of the tubular connector 23 / 23' has a second tongue-and-groove structure adapted to the tubular membrane element 21. The first tongue-and-groove structure can be as follows: Figure 2 and 3 The groove 221 shown in FIG. 2 may also be Figure 4 and 5 The protrusion 221' shown in the figure can be used as long as it can meet the plug-in connection between the head 22 / 22' and the tubular membrane element 21; the second tongue-and-groove structure can be as follows Figure 2 and 3 The groove 2311 shown in FIG. 2 may also be Figure 4 and 5 The protrusion 2311′ shown in other embodiments of the present invention may also be that the first tongue-and-groove structure is a groove and the second tongue-and-groove structure is a protrusion, or the second tongue-and-groove structure is a groove and the first tongue-and-groove structure is a protrusion, as long as the connection between the head 22 / 22′ and the tubular membrane element 21 can be achieved.

[0059] In a preferred embodiment of the present invention, the first faceplate 3 is provided with a first step portion in the opening, the outer wall of the tubular connector 23 / 23′ is provided with a second step portion 233 / 233′ matching the first step portion, and a sealing ring 5 is pressed between the first step portion and the second step portion 233 / 233′.

[0060] In a preferred embodiment of the present invention, the sealing ring 5 is an O-ring, which is deformed when the first step surface and the second step surface are crimped to achieve a better sealing effect.

[0061] Specifically, the openings of the first faceplate 3 include a smaller through hole located inside the first faceplate 3 and a larger through hole communicating with the outside of the smaller through hole; Figures 2 to 5 As shown; the tubular connector 23 / 23′ comprises a straight tube section 231 / 231′ and a threaded tube section 232 / 232′ connected to the straight tube section 231 / 231′, and the straight tube section 231 / 231′ is adapted to the diameter of the smaller through hole, the threaded tube section 232 / 232′ is adapted to the larger through hole, the outer wall of the threaded tube section 232 / 232′ is provided with an external thread, and the first faceplate 3 is provided with an internal thread adapted to the external thread in the larger through hole, and the tubular connector 23 / 23 ' is threadedly sealed with the first face disc 3 through a threaded pipe section 232 / 232', and the other end of the threaded pipe section 232 / 232' is also connected to a holding pipe section 234 / 234' communicated with the threaded pipe section 232 / 232' to facilitate human hand holding when the tubular connector 23 / 23' needs to be installed on the first face disc 3 or removed from the first face disc 3, and a fluoroplastic tape is provided between the external thread and the internal thread to ensure a sealing connection between the internal and external threads.

[0062] In the embodiment of the present invention, the tubular membrane element 21 is a ceramic membrane or a metal membrane.

[0063] In the embodiment of the present invention, the material of the above-mentioned tubular connector 23 / 23 ′ is SUS304, SUS316, SUS316L, etc.

[0064] In a preferred embodiment of the present invention, the material of the sealant 24 is a corrosion-resistant and sticky material such as PTFE or PFA, and the material of the sealing ring 5 is PTFE or PFA.

[0065] In summary, the present invention discloses a tubular membrane assembly, which includes a tubular membrane element and a head and a tubular connector plugged with the tubular membrane element by setting a tubular membrane structure, and a sealant is set at the plug-in seam, and a sealing layer is formed on the outer wall of the connection between the tubular membrane element and the head and the tubular connector by spraying / coating and baking processes, thereby realizing a sealed connection between the tubular membrane element and the head and the tubular connector; and by setting the tubular connector in the opening of the first faceplate and connecting it through a threaded seal, each tubular membrane structure can be independently installed or disassembled, and each tubular membrane element can be individually repaired; by setting a matching step portion on the first faceplate and the tubular connector, and pressing the sealing ring on the matching surface of the step, the sealing between the tubular membrane structure and the first faceplate is better. And the tubular membrane assembly also has the advantages of simple structure, convenient installation, ability to withstand high temperature and high pressure conditions, and reusable sealing rings.

[0066] Those skilled in the art should understand that those skilled in the art can implement variations by combining the prior art and the above embodiments, which will not be described in detail here. Such variations do not affect the essential content of the present invention, and will not be described in detail here.

[0067] The above describes the preferred embodiments of the present invention. It should be understood that the present invention is not limited to the above-mentioned specific embodiments, and the devices and structures that are not described in detail should be understood to be implemented in a common manner in the art; any technician familiar with the art can use the above-disclosed methods and technical contents to make many possible changes and modifications to the technical solutions of the present invention without departing from the scope of the technical solutions of the present invention, or modify them into equivalent embodiments of equivalent changes, which does not affect the essential content of the present invention. Therefore, any simple modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solutions of the present invention are still within the scope of protection of the technical solutions of the present invention.

Claims

1. A tubular membrane module, characterized in that: It comprises a cylinder and a tubular membrane structure arranged in the cylinder; A first face plate and a second face plate are respectively arranged on both sides of the cylinder, and two ends of the tubular membrane structure are respectively connected to the first face plate and the second face plate; The tubular membrane structure comprises a tubular membrane element, a sealing head and a tubular connector, wherein the sealing head and the tubular connector are respectively arranged at two ends of the tubular membrane element, and the sealing head and the tubular connector are plugged into the tubular membrane element, and the plugging seams between the tubular membrane element and the sealing head and the tubular connector are provided with sealant, and the outer walls of the connection between the tubular membrane element and the sealing head and the tubular connector are provided with a sealing layer; The first faceplate is provided with an opening, the second faceplate is provided with a slot facing the opening, the sealing head is inserted in the slot, the tubular connector is provided in the opening and is connected to the first faceplate through a threaded seal; the first faceplate is formed with a first step portion in the opening, a second step portion matching the first step portion is formed on the outer wall of the tubular connector, and a sealing ring is pressed between the first step portion and the second step portion; the plug-in end of the sealing head has a first tongue-and-groove structure matched with the tubular membrane element, and the plug-in end of the tubular connector has a second tongue-and-groove structure matched with the tubular membrane element; The diameter of the end cap is smaller than the minimum diameter of the opening; The process of forming the sealing layer on the outer wall of the connection between the tubular membrane element and the head and the tubular connector is specifically as follows: Step S1, spraying a predetermined thickness of polytetrafluoroethylene powder or tetrafluoroethylene copolymer powder on the outer wall of the connection between the tubular membrane element and the end cap and the tubular connector; Step S2, baking the tubular membrane structure at a temperature of 160-180° to cause cross-linking of the polytetrafluoroethylene powder or the tetrafluoroethylene copolymer powder.

2. The tubular membrane module according to any one of claims 1, characterized in that: The tetrafluoroethylene copolymer is any one of PTFE, PFA and FEP.

3. The tubular membrane module according to any one of claims 1, characterized in that: The predetermined thickness is 0.1-0.5 mm.

4. The tubular membrane module according to any one of claims 1, characterized in that: The time for baking the tubular membrane structure is 5 to 10 minutes.

5. The tubular membrane module according to claim 1, characterized in that The openings include a smaller through hole located inside the first faceplate and a larger through hole communicating with the outside of the smaller through hole; The tubular connector includes a straight pipe section and a threaded pipe section connected to the straight pipe section, and the straight pipe section is adapted to the diameter of the smaller through hole, and the threaded pipe section is adapted to the larger through hole. The outer wall of the threaded pipe section is provided with an external thread, and the first faceplate is provided with an internal thread adapted to the external thread in the larger through hole. The tubular connector is thread-sealed with the first faceplate through the threaded pipe section, and a fluoroplastic tape is provided between the external thread and the internal thread.

6. The tubular membrane module according to claim 1, characterized in that: The top of the cylinder is provided with a discharge port and a vacuum port, the bottom of the cylinder is provided with a feed port and a liquid discharge port, and the vacuum port and the liquid discharge port are both provided between the first faceplate and the opening end of the cylinder.

Citation Information

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