Stripping device

Abstract

Provided is a peeling device. When a protective member is peeled from a workpiece and discarded in the belt peeling device, an operator will not be injured by a conveying mechanism for conveying the peeled protective member, and pasting a dicing tape or the like to the workpiece and peeling the protective member from the workpiece are continuously performed without stopping the device. The peeling device (1) includes: a box (2) disposed inside the peeling device, having an opening (20) for dropping the protective member peeled by the peeling unit (4) and recovering the protective member; a unit (5) capable of moving the box to an in-device input position for inputting the protective member and an out-of-device output position for taking out the protective member; and an inclined surface (6) formed such that when the box is positioned at the output position to take out the recovered protective member, the protective member peeled and dropped by the peeling unit falls into the box, and the protective member can be recovered into the box regardless of whether the box is positioned at the input position or the output position.

Description

Technical Field

[0001] The present invention relates to a peeling device for peeling a protective member from a plate-shaped workpiece. Background Art

[0002] Regarding a taping machine capable of tape peeling (for example, refer to Patent Document 1), for example, a dicing tape having a diameter larger than that of a plate-shaped workpiece after grinding is pasted on one surface of the back surface of the plate-shaped workpiece and an annular frame to integrate the two, and then the protective member is peeled from the front surface of the plate-shaped workpiece.

[0003] Patent Document 1: Japanese Unexamined Patent Application Publication No. 2016-201488

[0004] The peeled protective member falls into the recycling box through an opening provided on the upper side of the recycling box and is stored in the recycling box. Before the recycling box is full, an operator takes out the stored protective member from the recycling box and discards it.

[0005] When the operator performs the operation of discarding the protective member stored in this recycling box, the device needs to be stopped for the following reasons.

[0006] The first reason: In order to discard the protective member stored in the recycling box, the recycling box is taken out of the device, and thus a space is formed at the position where the recycling box was originally installed. The operator may accidentally put his hand into this space, so the transfer mechanism for transporting the protective member to the recycling box etc. operates and interferes, and it is possible to injure the operator. Therefore, the device needs to be stopped.

[0007] The second reason: In order to discard the protective member stored in the recycling box, the recycling box is taken out of the device, and the protective member peeled from the next plate-shaped workpiece is transported and put into the space where the recycling box is no longer installed. Therefore, the device needs to be stopped until the recycling box is reinstalled.

[0008] Therefore, there is a problem as follows: When peeling and discarding the protective member from the plate-shaped workpiece in the peeling device, the operator is not injured by the transfer mechanism for transporting the peeled protective member, and it is possible to continuously perform operations such as pasting a dicing tape on the plate-shaped workpiece and peeling and discarding the protective member from the plate-shaped workpiece without stopping the device. Summary of the Invention

[0009] An object of the present invention is to provide a peeling device for peeling a protective member from a plate-shaped workpiece.

[0010] The present invention for solving the above problems is a peeling device, which at least has: a holding table that holds the lower surface of a plate-shaped workpiece whose upper surface is covered with a sheet-shaped protective member; and a peeling unit that peels the protective member from the plate-shaped workpiece held by the holding table. The peeling device has: a collection box that is disposed inside the peeling device, has an opening for dropping the protective member peeled by the peeling unit, and collects the protective member; a moving unit that can move the collection box to an input position inside the peeling device where the protective member is input and an extraction position outside the peeling device where the protective member is taken out; and an inclined surface that is formed such that when the collection box is positioned at the extraction position in order to take out the protective member collected in the collection box, the protective member peeled and dropped by the peeling unit falls into the collection box. Regardless of whether the collection box is positioned at the input position or the extraction position, the protective member can be collected in the collection box.

[0011] Preferably, the inclined surface is formed by at least two plates, an upper plate and a lower plate. The inclined surface has: a plurality of through holes that are formed in the lower plate and extend in the length direction; a string blade that is formed at the lower end of the upper plate and is inserted into the through holes; and a guiding portion that guides the upper plate and the lower plate so that they can slide. When the collection box is positioned at the extraction position, the lower end of the upper plate is connected to the upper end of the lower plate and the lower plate extends in a continuous manner with the upper plate to form the inclined surface. When the collection box is positioned at the input position, the upper plate and the lower plate overlap to form the side wall of the collection box.

[0012] The peeling device of the present invention has: a collection box that is disposed inside the peeling device, has an opening for dropping the protective member peeled by the peeling unit, and collects the protective member; a moving unit that can move the collection box to an input position inside the peeling device where the protective member is input and an extraction position outside the peeling device where the protective member is taken out; and an inclined surface that is formed such that when the collection box is positioned at the extraction position in order to take out the protective member collected in the collection box, the protective member peeled and dropped by the peeling unit falls into the collection box. Therefore, during the process of discarding the protective member stored in the collection box, the protective member peeled from the plate-shaped workpiece can also be input into the collection box through the inclined surface. Thus, the peeling device can operate continuously. In addition, when the peeling device functions as a tape attaching machine that peels the protective member pasted on a plate-shaped workpiece after pasting a dicing tape on a ring-shaped frame and the plate-shaped workpiece, the protective member stored in the collection box can be discarded during the peeling operation of the protective member. Therefore, the peeling device can also operate continuously as a tape attaching machine.

[0013] In the peeling device of the present invention, the inclined surface is formed by at least two plates, namely an upper plate and a lower plate. The inclined surface has: a plurality of through-holes formed in the lower plate and extending in the longitudinal direction; a string blade formed at the lower end of the upper plate and inserted into the through-holes; and a guiding portion that guides the upper plate and the lower plate in a manner that enables them to slide. When the recycling box is positioned at the take-out position, the lower end of the upper plate is connected to the upper end of the lower plate, and the lower plate extends continuously with the upper plate to form an inclined surface. When the recycling box is positioned at the input position, the upper plate and the lower plate overlap to form the side wall of the recycling box, thereby enabling the efficient formation of an inclined surface that guides the protective component peeled off by the peeling unit and dropped into the recycling box or the accommodation of such an inclined surface. In addition, when moving the recycling box from the take-out position outside the peeling device where the protective component is taken out to the input position inside the peeling device where the protective component is input, through the through-holes and the string blades inserted into the through-holes, in the case where the protective component remains on the upper surface of the lower plate, the string blades are brought into contact with the protective component to drive the protective component onto the bottom of the recycling box, preventing a state where the protective component is wound and clamped between the upper plate and the lower plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 FIG. is a perspective view showing an example of the peeling device.

[0015] Figure 2 FIG. is a cross-sectional view for explaining a state where a peeling tape is pasted on a protective component of a plate-like workpiece and the peeling tape is cut.

[0016] Figure 3 FIG. is a cross-sectional view showing a state where the protective component is peeled off from the plate-like workpiece by relatively moving a clamping unit that clamps the peeling tape pasted on the protective component and a holding table.

[0017] Figure 4 FIG. is a perspective view for explaining the internal structure of the recycling box positioned at the input position.

[0018] Figure 5 FIG. is a perspective view for explaining the structure of the recycling box and the moving unit positioned at the take-out position.

[0019] Figure 6 FIG. is a perspective view for explaining the structure of the recycling box and the guiding portion positioned at the take-out position.

[0020] Figure 7 FIG. is a perspective view for explaining the structure of the recycling box positioned at the take-out position and the formed inclined surface.

[0021] W: Plate-shaped workpiece; Wa: Upper surface; Wb: Lower surface; S: Division predetermined line; D: Device; T1: Dicing tape; F: Ring-shaped frame; T2: Protection member; 1: Peeling device; 10: Base; 13: Workbench moving unit; 130: Ball screw; 131: Guide rail; 132: Motor; 133: Movable member; 30: Holding workbench; 300: Adsorption part; 300a: Holding surface; 301: Frame; 31: Support table; 32: Frame fixing unit; 33: Piston mechanism; T3: Peeling tape; R: Tape reel; 4: Peeling unit; 40: Tape cutting unit; 400: Mounting table; 401: Cutter; 402: Cutter moving unit; 403: Cutter lifting unit; 41: Clamping unit; 410: Support table; 411: Cylinder mechanism; 412: Clamping jaw part; 412b: Fixed jaw; 412a: Movable jaw; 42: Peeling tape providing unit; 420: Reel; 421a, 421b: Guide rollers; 423a, 423b: Feeding rollers; 44: Tape pressing unit; 440: Support table; 441: Pressing plate lifting mechanism; 442: Pressing plate; 46: X-axis direction moving unit; 460: Ball screw; 462: Motor; P1: Taking-out position; P2: Insertion position; 2: Recycling box; 20: Opening; 21: Bottom plate; 219: Hinge; 22: Side wall; 220: Handle; 23: Side wall; 5: Moving unit; 50: Guide rail; 51: Sliding part; 6: Inclined plane; 60: Upper plate; 61: Lower plate; 64: Through hole; 65: String blade; 63: Support plate; 630: Through hole; 66: Guide part; 660: Framework; 661: Guide plate; 661a: Engagement pin; 662: Guide groove; 663: Restricting plate; 9: Housing; 91: Bottom plate; 94: Side plate; 93: Connecting plate; 74: First optical sensor; 77: Second optical sensor; 76: Optical sensor storage box. Detailed implementation mode

[0022] Figure 1 The peeling device 1 of the present invention shown is an example of a peeling device that peels the protection member T2 pasted on the upper surface Wa of the plate-shaped workpiece W using the strip-shaped peeling tape T3. The peeling device 1 at least has: a holding workbench 30 that holds the lower surface Wb of the plate-shaped workpiece W whose upper surface Wa is covered by the sheet-shaped protection member T2; and a peeling unit 4 that peels the protection member T2 of the plate-shaped workpiece W held by the holding workbench 30.

[0023] Figure 1 The plate-shaped workpiece W shown is, for example, a semiconductor wafer with a circular shape having silicon as a base material. Its upper surface Wa is divided into a grid shape by a plurality of vertical division predetermined lines S, and devices D such as ICs are respectively formed in each region divided into a grid shape.

[0024] The protective member T2 is adhered in such a manner as to cover the entire upper surface Wa of the plate-like workpiece W. The protective member T2 is, for example, a protective member composed of a resin film and a circular sheet formed as follows: In a protective member forming apparatus (not shown), the upper surface Wa of the plate-like workpiece W is pressed against the liquid resin provided on the circular sheet, causing the liquid resin to spread from the center of the plate-like workpiece W toward the outer peripheral side, covering the entire upper surface Wa with the liquid resin, and then irradiating the liquid resin with ultraviolet rays, for example, to harden the liquid resin and form the resin film.

[0025] In addition, the plate-like workpiece W can be made of gallium arsenide, sapphire, gallium nitride, ceramics, silicon carbide, etc., in addition to silicon, and the protective member is not limited to the example composed of the above-mentioned resin film and circular sheet.

[0026] For example, a dicing tape T1 having a diameter larger than that of the plate-like workpiece W is adhered to the lower surface Wb of the plate-like workpiece W. Moreover, the outer peripheral portion of the paste layer of the dicing tape T1 is also adhered to the annular frame F, so that the plate-like workpiece W is supported by the annular frame F via the dicing tape T1, and operations based on the annular frame F can be performed.

[0027] The peeling device 1 has a rectangular parallelepiped-shaped base 10 extending in the X-axis direction. In addition, each device structure such as the base 10 of the peeling device 1, the holding table 30, and the peeling unit 4 is housed in Figure 1 the interior of a rectangular parallelepiped-shaped housing 11 shown by the dashed line. In the present embodiment, the interior of the housing 11 is regarded as the inside of the peeling device 1, and the exterior of the housing 11 is regarded as the outside of the peeling device 1.

[0028] A table moving unit 13 for reciprocally moving the holding table 30 in the X-axis direction is provided on the base 10. The table moving unit 13 has: a ball screw 130 provided on the base 10; a motor 132 connected to one end of the ball screw 130; a pair of guide rails 131 extending in parallel with the ball screw 130; and a movable member 133 capable of moving in the X-axis direction. The holding table 30 is provided on the upper surface of the movable member 133 via a support table 31. The pair of guide rails 131 are in sliding contact with the lower surface of the movable member 133, and the ball screw 130 is screwed to a nut (not shown) provided at the center of the lower surface of the movable member 133. By driving the motor 132 to rotate the ball screw 130, the holding table 30 and the movable member 133 move together in the X-axis direction along the guide rails 131.

[0029] The holding table 30 has: a suction portion 300 formed of a porous member or the like that sucks a plate-shaped workpiece W; and a frame body 301 that supports the suction portion 300. The suction portion 300 communicates with a suction source (not shown) such as a vacuum generating device, and the suction force generated by the suction of the suction source is transmitted to the flat holding surface 300a that is the exposed surface of the suction portion 300, so that the holding table 30 can suck and hold the plate-shaped workpiece W on the holding surface 300a.

[0030] For example, the holding table 30 is surrounded by a frame fixing unit 32 that fixes the fixed annular frame F. The frame fixing unit 32 having an annular shape in plan view and on which the annular frame F is placed is configured to attract and fix the annular frame F by the suction force generated by a suction source (not shown), and can move up and down in the Z-axis direction by a piston mechanism 33 evenly arranged in the circumferential direction. Alternatively, instead of the frame fixing unit 32, a plurality of mechanical clamps that are opened and closed by a spring or the like may be arranged around the holding table 30.

[0031] Above the moving path of the holding table 30, a peeling unit 4 for peeling the protective member T2 of the plate-shaped workpiece W held by the holding table 30 is provided. The peeling unit 4 has, for example: a tape cutting unit 40 that cuts the peeling tape T3 to a specified length; a peeling tape supply unit 42 that pulls out the peeling tape T3 from a tape roll R around which the peeling tape T3 is wound in a roll shape and supplies it to the protective member T2 pasted on the upper surface Wa of the plate-shaped workpiece W; a clamping unit 41 that clamps one end of the peeling tape T3 pulled out from the tape roll R; a tape pressing unit 44 that presses the peeling tape T3 against a region on the outer peripheral side of the protective member T2 for pasting; and an X-axis direction moving unit 46 that moves the tape pressing unit 44 and the clamping unit 41 in the X-axis direction.

[0032] The X-axis direction moving unit 46 has: a ball screw 460 having an axis in the X-axis direction; a pair of guide rails 461 arranged in parallel with the ball screw 460; a motor 462 connected to the ball screw 460 to rotate the ball screw 460; and a movable plate 463 whose internal nut is screwed with the ball screw 460, and the side portion of the movable plate 463 is in sliding contact with the guide rail 461. When the motor 462 rotates the ball screw 460, the movable plate 463 is guided by the guide rail 461 and reciprocates in the X-axis direction, and the tape pressing unit 44 and the clamping unit 41 mounted on the movable plate 463 also reciprocate in the X-axis direction.

[0033] The stripping tape supply unit 42 includes: a reel 420 on which a tape roll R is mounted; guide rollers 421a and 421b that guide the stripping tape T3 pulled out from the tape roll R downward; and feed rollers 423a and 423b that are disposed on the lower side of the guide rollers 421a and 421b. A counter-tension is applied to the reel 420 by a control mechanism (not shown), and the tension condition is adjusted so that the stripping tape T3 pulled out from the tape roll R does not become slack. The guide rollers 421a and 421b can apply tension by folding back while sandwiching the stripping tape T3, and guide it toward the feed rollers 423a and 423b. The feed rollers 423a and 423b can send the stripping tape T3 guided by the guide rollers 421a and 421b toward the clamping unit 41.

[0034] The stripping tape T3 is, for example, a heat seal of a two-layer structure composed of an adhesive layer that adheres by applying heat to the outer peripheral portion of the protective member T2 and a base material. There is no particular limitation on the material of the base material, and it is, for example, made of a resin such as polyethylene terephthalate. The adhesive layer is preferably made of a thermosetting resin, for example, an epoxy resin. The adhesion of the stripping tape T3 to the protective member T2 is set to be stronger than the adhesion of the protective member T2 to the plate-like workpiece W. The stripping tape T3 is wound in a state where the adhesive layer is on the inner side (the lower surface side in the extended state) to form a tape roll R. In addition, the stripping tape T3 is not limited to a heat seal.

[0035] The clamping unit 41 includes: a support table 410 fixed to the side surface of the movable plate 463 of the X-axis direction moving unit 46; a cylinder mechanism 411 supported by the support table 410; and a clamping claw portion 412 that can move up and down by the cylinder mechanism 411. The clamping claw portion 412, for example, has: a fixed claw 412b that is substantially L-shaped in side view; and a movable claw 412a that is disposed opposite to the fixed claw 412b in the Z-axis direction and can approach or separate from the fixed claw 412b. In the clamping unit 41, by bringing the movable claw 412a closer to the fixed claw 412b, one end of the stripping tape T3 can be clamped. Also, the clamping claw portion 412 holding the stripping tape T3 can be positioned at a height position suitable for tape pasting on the protective member T2 of the plate-like workpiece W held by the workbench 30 by the cylinder mechanism 411. On the other hand, by separating the movable claw 412a from the fixed claw 412b, the clamping state of one end of the stripping tape T3 in the clamping unit 41 can be released.

[0036] The tape pressing unit 44 is disposed between the feeding rollers 423a and 423b and the clamping unit 41. The tape pressing unit 44 includes: a support table 440 fixed to the side surface of the movable plate 463 of the X-axis direction moving unit 46; a pressing plate lifting mechanism 441 composed of a cylinder or the like and supported by the support table 440; and a pressing plate 442 capable of moving up and down through the pressing plate lifting mechanism 441.

[0037] An unillustrated heater that generates heat by passing an electric current is installed on the pressing plate 442. When the pressing plate 442 is lowered by the pressing plate lifting mechanism 441 to press the peeling tape T3 against the outer peripheral portion of the protection member T2 for pasting, the unillustrated heater heats the pressing plate 442, so that the portion of the peeling tape T3 pressed against the protection member T2 can be partially heat-fused. Thereby, the peeling tape T3 can be well pasted on the protection member T2.

[0038] The tape cutting unit 40 is disposed, for example, between the feeding rollers 423a and 423b and the tape pressing unit 44. As Figure 1 shown, the tape cutting unit 40 includes: a mounting table 400 having a mounting surface 400a for mounting the adhesive layer side (lower side) of the peeling tape T3 and a groove 400b that traverses the mounting surface 400a in the width direction (Y-axis direction) of the peeling tape T3; a cutter 401 that travels in the groove 400b along the extending direction of the groove 400b; a cutter moving unit 402 that is a ball screw mechanism for supporting the cutter 401 by means of a cutter lifting unit 403 and moving the cutter 401 in the extending direction (Y-axis direction) of the groove 400b; and a cutter lifting unit 403 composed of a cylinder or the like that moves the cutter 401 up and down in the Z-axis direction relative to the mounting surface 400a.

[0039] In addition, the peeling device 1 can be configured to function as a taping machine and can paste a dicing tape T1 having a diameter larger than that of the plate-like workpiece W on the lower surface Wb of the plate-like workpiece W. In this case, for example, a pasting roller and a cutter for cutting the strip-shaped dicing tape into a circle while rotating are disposed at the -X direction side end of the base 10.

[0040] Next, an example of the operation of cutting the peeling tape T3 in the peeling device 1 and an example of the operation of peeling the protection member T2 from the plate-like workpiece W using the peeling tape T3 will be described.

[0041] First, place the plate-like workpiece W integrated with the annular frame F on the holding surface 300a of the holding table 30 with the protection member T2 facing upward, and place the annular frame F on the frame fixing unit 32 disposed on the outer peripheral side of the holding table 30. Then, an unillustrated suction source operates to suck and hold the plate-like workpiece W by the holding surface 300a, and the annular frame F is sucked and fixed by the frame fixing unit 32.

[0042] Through Figure 1 The release tape T3 is sent from the tape reel R toward the clamping unit 41 by the illustrated feed rollers 423a and 423b. The adhesive layer side (inner side) of the release tape T3 is placed on the placement surface 400a of the placement table 400 of the tape cutting unit 40. Further, when one end of the release tape T3 is positioned on the upper surface of the fixed claw 412b of the clamping unit 41, the movable claw 412a is moved in a direction approaching the fixed claw 412b, so that the clamping unit 41 clamps one end of the release tape T3. Then, the clamping unit 41 is moved in the -X direction by the X-axis direction moving unit 46, and the clamped release tape T3 is pulled in this direction. At this stage, above the release tape T3, the pressing plate 442 of the tape pressing unit 44 and the cutter 401 of the tape cutting unit 40 are in a standby state.

[0043] For example, the holding table 30 is moved in the +X direction to position the outer peripheral portion of the protection member T2 directly below the tape pressing unit 44. Then, the pressing plate 442 shown in Figure 2 is lowered in the -Z direction by a heater (not shown) provided inside, and the release tape T3 is pressed from above to the outer peripheral portion of the protection member T2 by the lower end of the pressing plate 442, and the adhesive layer of the release tape T3 is heat-bonded to the protection member T2.

[0044] In this state, the cutter 401 is positioned at the start position on the -Y direction side (near the front side of the paper surface) by the cutter moving unit 402. That is, the cutter 401 is positioned at the position of one end of the groove 400b of the placement table 400 exposed from one side edge of the release tape T3. In addition, the cutter 401 is lowered by the cutter lifting unit 403 until the lowermost end of the cutter 401 reaches inside the groove 400b. In addition, the cutter 401 travels in the +Y direction along the extending direction of the groove 400b, and the release tape T3 is cut by the cutter 401. After the cutter 401 cuts the release tape T3, the cutter 401 and the pressing plate 442 are raised in the +Z direction to retract from the release tape T3.

[0045] Then, the clamping unit 41 holding the release tape T3 is raised, and a part of the protection member T2 is peeled from the upper surface Wa of the plate-like workpiece W. Then, as Figure 3As shown, the clamping unit 41 is moved in the -X direction by the X-axis direction moving unit 46, and the holding table 30 is moved in the +X direction by the table moving unit 13 (refer to Figure 1 ), so that the clamping unit 41 moves radially from the outer peripheral edge of the plate-like workpiece W toward the center relatively, thereby peeling the protective member T2 from the plate-like workpiece W. In addition, a rotating roller (not shown) can be provided above the moving path of the holding table 30, and the peeling is performed while bringing the rotating roller into contact with the protective member T2, thereby suppressing the breakage of the protective member T2 that may occur during the peeling of the protective member T2.

[0046] In addition, for example, as long as the clamping unit 41 can move radially from the outer peripheral edge of the plate-like workpiece W toward the center relatively to peel the protective member T2 from the plate-like workpiece W, for example, the holding table 30 may not be moved in the +X direction and only the clamping unit 41 may be moved in the -X direction to peel the protective member T2.

[0047] When the protective member T2 is completely peeled from the upper surface Wa of the plate-like workpiece W, the clamping unit 41 that clamps the peeling tape T3 adhered to the protective member T2 moves to Figure 1 the +X-direction side end of the base 10 in the peeling device 1 shown, that is, the area below the peeling tape supply unit 42 (the rectangular parallelepiped area indicated by the one-dot chain line in Figure 1 ). And, the clamping unit 41 releases the clamping of the peeling tape T3, and the protective member T2 and the peeling tape T3 fall into the recovery box 2 described below.

[0048] For example, in the +X-direction side end of the base 10 in the peeling device 1, that is, the area below the peeling tape supply unit 42 (the rectangular parallelepiped area indicated by the one-dot chain line in Figure 1 ), there are provided: Figure 4 the recovery box 2 shown, which has an opening 20 and recovers the protective member T2, and into which the protective member T2 peeled by the peeling unit 4 is dropped; the moving unit 5 (refer to Figure 5 ), which can move the recovery box 2 to the input position P2 located inside the peeling device 1 where the protective member T2 is input and the extraction position P1 located outside the peeling device 1 where the protective member T2 is taken out; and the inclined surface 6 (refer to Figure 7 ), which is formed such that when the recovery box 2 is positioned at the extraction position P1 in order to take out the protective member T2 recovered in the recovery box 2, the protective member T2 peeled and dropped by the peeling unit 4 falls into the recovery box 2.

[0049] Figure 4 、 Figure 5The recycling bin 2 shown, for example, is a box with a generally rectangular parallelepiped shape, composed of a bottom plate 21 with a rectangular shape when viewed from above and three side walls that stand upright integrally from the outer periphery of the bottom plate 21 in the +Z direction. Also, the protective member T2 can be stored in the space surrounded by the bottom plate 21 and each side wall, and there is a rectangular opening 20 for inserting the protective member T2 above. For example, the front (+X direction side) side wall among the three side walls of the recycling bin 2 is taken as the side wall 22, and the two side walls on the Y-axis direction side are taken as the side walls 23. Additionally, in Figure 4 it shows the state where the recycling bin 2 is positioned at the insertion position P2 within the peeling device 1, and in Figures 5 - 7 it shows that the recycling bin 2 is positioned at Figure 1 the state of the take-out position P1 outside the peeling device 1 shown.

[0050] As Figures 5 - 7 shown, the recycling bin 2 is stored in a housing 9 fixed within the peeling device 1 in a manner that enables movement in the X-axis direction. The housing 9, for example, has a generally rectangular box-shaped outer shape that is larger than the recycling bin 2. The housing 9 has: a bottom plate 91 on which the bottom plate 21 of the recycling bin 2 slides on the upper surface; two side plates 94 that stand upright integrally from the outer periphery of the bottom plate 91 in the +Z direction and are opposed to each other in the Y-axis direction; and a connecting plate 93 that connects the upper parts of the two side plates 94.

[0051] Figure 5 、 Figure 6 shown, the moving unit 5 can move the recycling bin 2 to the insertion position P2 within the peeling device 1 for inserting the protective member T2 and the take-out position P1 outside the peeling device 1 for taking out the protective member T2. The moving unit 5, for example, has: guide rails 50 that are respectively disposed at the lower parts of the inner surfaces of the two side plates 94 of the housing 9 in a manner that extends parallel to the X-axis direction; and sliding parts 51 that are respectively disposed at the lower parts of the outer surfaces of the two side walls 23 on the Y-axis direction side of the recycling bin 2 and are loosely fitted with the guide rails 50 and slide in contact with the guide rails 50. The driving force required for the moving unit 5 to move the recycling bin 2 can be generated either by an operator or by a ball screw mechanism having a motor (not shown) that moves the sliding part 51.

[0052] At the upper part of the side wall 22 of the recycling bin 2, a handle 220 is formed, for example. The operator places a hand on the handle 220 and pulls the side wall 22 in the +X direction side, so that the recycling bin 2 can be pulled out (slidably moved) from the housing 11 of the peeling device 1 shown in Figure 1 to the outside of the device in the +X direction side, that is, Figure 5 the take-out position P1 shown.

[0053] As Figure 4 、 Figure 7As shown, in this embodiment, the inclined surface 6 is formed by at least two plates, for example, an upper plate 60 and a lower plate 61. The upper plate 60 has a rectangular shape in top view, for example. Figure 7 The lower end of the support plate 63 shown is connected by a hinge (not shown) and can be rotated at a predetermined angle by the hinge. In addition, for example, the inclined surface 6 can be composed of a flexible metal plate or resin plate, etc. In this case, the inclined surface is appropriately bent by the movement of the recovery box 2 between the input position P2 and the removal position P1.

[0054] The support plate 63 extending in the Z-axis direction is attached to the connection plate 93 of the housing 9. The support plate 63 is formed with, for example, four through holes 630 at equal intervals in the Y-axis direction.

[0055] like Figure 7 As shown, the lower plate 61 has, for example, a rectangular shape when viewed from above, and its lower end is connected to one end side (-X direction side) of the bottom plate 21 of the recovery box 2 by a hinge 219, and its upper end is in a state of being immersed in a position below the lower surface of the upper plate 60 by a specified length.

[0056] The inclined surface 6 has, for example, a plurality of through holes 64 formed in the lower plate 61 and extending in the longitudinal direction of the lower plate 61; a string blade 65 formed at the lower end of the upper plate 60 and inserted into the through holes 64; and a guide portion 66 (see Figure 5 , Figure 6 ) which guides the upper plate 60 and the lower plate 61 in such a way that they can slide and move.

[0057] like Figure 7 As shown, a total of four through holes 64 extend in the longitudinal direction of the lower plate 61 in the shape of rectangular grooves according to the outer shape of the string blades 65, for example.

[0058] The string blade 65 has, for example, a rectangular plate-like shape smaller than the width of the through hole 64, is inserted into the through hole 64, and its lower end protrudes from the lower surface of the lower plate 61 by a predetermined length. Figure 7 The length of the skeleton 660 contact is shown.

[0059] Figures 5 - 7 The guide portion 66 shown has, for example: a skeleton 660, which is installed on the lower surface of the lower plate 61 in a manner extending along the width direction (Y-axis direction) of the lower plate 61; guide plates 661, which are respectively installed at both ends of the skeleton 660; a guide groove 662, which is formed on the side plate 94 of the shell 9; and a limiting plate 663, which supports the guide plate 661 from the inner side.

[0060] Figure 7The bar-shaped frame 660 shown is formed, for example, to be longer than the width of the lower plate 61. Two frames 660 are mounted, for example, on the lower surface of the lower plate 61. The frame 660 is protrudingly mounted on the lower surface of the lower plate 61 with a gap of a specified width formed between the frame 660 and the lower surface of the lower plate 61. Therefore, the string blade 65 moving in the through-hole 64 in the length direction of the lower plate 61 does not collide with the frame 660.

[0061] Figure 5 、 Figure 6 The guide plate 661 shown is formed in a plate shape with an arc-shaped upper part in the illustrated example, and has an engaging pin 661a protruding toward the side plate 94 side of the housing 9 at its upper end portion and inserted into the guide groove 662.

[0062] For example, on Figure 6 the upper surface of the guide rail 50 of the moving unit 5 shown, a straight groove extending in the X-axis direction and slightly wider than the thickness of the guide plate 661 is formed, and the lower end side of the guide plate 661 slides in this straight groove.

[0063] The guide groove 662 as the movement path of the engaging pin 661a is formed, for example, to curve upward from the middle part to the upper part of the side plate 94 of the housing 9.

[0064] Figure 5 、 Figure 6 The restricting plate 663 shown is disposed, for example, outside the side wall 23 of the recycling box 2, and supports the guide plate 661 from the inside by using this outer surface. The -X direction end of the restricting plate 663 is fixed to the inner surface of the support plate 63. And when arranging the positional relationship, the side wall 23 of the recycling box 2 is located on the innermost side, and the restricting plate 663, the guide plate 661, and the side plate 94 of the housing 9 are arranged toward the outside.

[0065] As Figure 6 shown, the lower end surface of the restricting plate 663 is formed as an inclined surface, Figure 7 the frame 660 shown passes below this inclined lower end surface, and each end thereof is connected to the inner surface of the guide plate 661. Five through-holes 663a are formed at equal intervals in the X-axis direction on the restricting plate 663. The reason why the upper part of the guide plate 661 is formed in an arc shape, for example, is to prevent the through-hole 663a of the restricting plate 663 from being blocked by the guide plate 661 when the engaging pin 661a of the guide plate 661 moves along the guide groove 662.

[0066] An inclined plate 664 is disposed at a position above and inside the restricting plate 663, and the inclined plate 664 guides so that the protection member T2 thrown into the recycling box 2 through the opening 20 reliably falls into the recycling box 2.

[0067] As Figure 5As shown, for example, five light emitting parts constituting the first optical sensor 74 are respectively arranged on the side plate 94 of the housing 9.

[0068] In the upper region of the side wall 23 on the Y-axis direction side of the recycling box 2, for example, a continuous rectangular slit 230 is formed. For example, when the recycling box 2 is in the input position P2, the detection light emitted from the light emitting part of the first optical sensor 74 and passing through the through hole 663a of the restriction plate 663 further passes through the slit 230 toward the -Y direction side, and thus is received by a light receiving part (not shown) on the outer side surface of the side plate 94 on the -Y direction side of the housing 9. Before the detection light reaches this light receiving part, it is blocked by the protective member T2 stacked in the recycling box 2, so that the first optical sensor 74 detects that the recycling box 2 is filled with the protective member T2.

[0069] As Figure 7 shown, an optical sensor storage box 76 protruding toward the +Y direction side is provided above the recycling box 2. In the optical sensor storage box 76, for example, four light receiving parts 770 constituting the second optical sensor 77 are respectively arranged at equal intervals along the Y-axis direction. The second optical sensor 77 is a transmissive optical sensor, and it has a light emitting part 771 opposed to the light receiving part 770 in a straight line along the X-axis direction. The light emitting part 771 is installed, for example, on the inner side surface of the connecting plate 93 of the housing 9. As Figure 4 shown, before the detection light emitted from the light emitting part 771 of the second optical sensor 77 and passing through the through hole 630 of the support plate 63 reaches the light receiving part 770, it is blocked by the protective member T2 stacked in the recycling box 2, so that the second optical sensor 77 detects that the recycling box 2 in the state of being located at the input position P2 is filled with the protective member T2.

[0070] In addition, it is sufficient to arrange either the first optical sensor 74 or the second optical sensor 77.

[0071] As described before, in the Figure 1 shown peeling device 1, during the process of using the peeling tape T3 to peel the protective member T2 from the upper surface Wa of the plate-shaped workpiece W through the peeling unit 4 and then putting the peeled protective member T2 into the recycling box 2, the protective member T2 can be taken out from the recycling box 2, that is, no matter whether the recycling box 2 is positioned at Figure 4 shown input position P2 or take-out position P1, the protective member T2 can be recycled into the recycling box 2. The following is an explanation.

[0072] Figure 1 shown, the clamping unit 41 releases the clamping of the peeled peeling tape T3, allows the protective member T2 and the peeling tape T3 to fall, and separates the protective member T2 and the peeling tape T3 from the Figure 4The opening 20 of the recycling bin 2 at the input position P2 shown is inserted into the recycling bin 2. The protection member T2 and the peeling tape T3 are stacked on the bottom plate 21 of the recycling bin 2. In addition, when the recycling bin 2 is positioned at the input position P2, the upper plate 60 overlaps on the upper surface of the lower plate 61 and forms the side wall on the -X direction side of the recycling bin 2.

[0073] As Figure 4 shown, in a state where the recycling bin 2 is positioned at the input position P2, a plurality of protection members T2 peeled off from the plate-like workpiece W are stacked in the recycling bin 2 until a specified height. Before the detection light of the first optical sensor 74 or the second optical sensor 77 reaches their respective light-receiving parts, the stacked protection members T2 block the light, so that the first optical sensor 74 or the second optical sensor 77 detects that the recycling bin 2 is full of the protection members T2.

[0074] In addition, the peeled protection member T2 may be bent or rolled up and stacked. Therefore, sometimes the above detection light is blocked by a smaller number of protection members T2.

[0075] When it is detected by the first optical sensor 74 or the second optical sensor 77 that the recycling bin 2 is full of the protection members T2, Figure 1 the peeling device 1 shown, for example, displays warning text to take out the protection member T2 from the recycling bin 2 on a monitor (not shown) or emits a warning sound to take out the protection member T2 from the recycling bin 2 from a speaker (not shown).

[0076] For example, an operator who has received this warning places a hand on Figure 4 the handle 220 of the recycling bin 2 shown and pulls the side wall 22 to the +X direction side. The recycling bin 2 is positioned at the take-out position P1 outside the peeling device 1 by Figure 5 the moving unit 5 shown, so that a rectangular protection member take-out port 27 is formed with the optical sensor storage box 76 clamped beside the opening 20. Alternatively, when it is detected by the first optical sensor 74 or the second optical sensor 77 that the recycling bin 2 is full of the protection members T2, the side wall 22 of the recycling bin 2 is automatically moved to the +X direction by the moving unit 5, and the recycling bin 2 is positioned at the take-out position P1 outside the peeling device 1 to form the protection member take-out port 27.

[0077] The operator, for example, puts a hand into the recycling bin 2 from Figure 6 , Figure 7 the protection member take-out port 27 shown, and grabs the protection member T2 stored by being stacked on the bottom plate 21 in the recycling bin 2. Then, the hand is pulled out from the protection member take-out port 27 to take out the protection member T2 from the recycling bin 2. Each time Figure 1The gripping unit 41 of the peeling unit 4 shown in the figure has not moved above the protective member removal port 27 , so the operator's hand does not come into contact with the gripping unit 41 which is located above the opening 20 of the collection box 2 and drops the protective member T2 .

[0078] When positioned at Figure 4 The collection box 2 at the input position P2 shown in FIG. Figure 5 When the moving unit 5 is positioned at the removal position P1 outside the peeling device 1, as shown in FIG. Figure 7 That is, the lower plate 61 connected to the bottom plate 21 of the collection box 2 by means of the hinge 219 is pulled out from the state of being erected in a substantially vertical direction together with the upper plate 60 (the state of forming the side wall on the -X direction side of the collection box 2) to the +X direction side and tilted obliquely.

[0079] In addition, with the help of Figure 7 The frame 660 shown is connected to the lower plate 61 Figure 5 , Figure 6 The engaging pin 661a of the guide plate 661 shown in the figure descends along the guide groove 662. In conjunction with this, the guide plate 661, which is clamped from both sides of the Y-axis direction by the limiting plate 663 and the side plate 94 of the housing 9, also tilts downward from the upright state. Therefore, the lower plate 61 gradually tilts obliquely together with the frame 660.

[0080] In this way, the blade 65 is inserted into the through hole 64 of the lower plate 61 in parallel with the lower plate 61. Figure 7 The upper plate 60 shown is inclined obliquely from a state in which it stands together with the lower plate 61 in a substantially vertical direction (forming a side wall on the −X direction side of the recovery box 2) so that its lower end slides on the upper surface of the lower plate 61. In addition, the string blade 65 descends along the through hole 64.

[0081] Furthermore, the recovery box 2 is positioned at the take-out position P1 outside the stripping device 1, so that Figure 7 As shown, the lower end of the upper plate 60 is connected to the upper end of the lower plate 61 and the lower plate 61 is extended to be continuous with the upper plate 60 to form the inclined surface 6.

[0082] When the operator positions the Figure 5 During the recycling process of the protective component T2 in the recycling box 2 shown in FIG. Figure 1 The protective member T2 peeled off from the plate-like workpiece W by the peeling unit 4 is still put into the opening 20. Figure 7 The protective member T2 slides down the upper surface of the slope 6 and accumulates on the bottom plate 21 of the recovery box 2.

[0083] For example, when the operator finishes retrieving the protection member T2 from the inside of the collection box 2 through the protection member extraction port 27, the collection box 2 is pushed toward the -X direction side and returned to Figure 4 the input position P2 shown.

[0084] As described above, the peeling device 1 of the present invention includes: a collection box 2 disposed inside the peeling device 1, having an opening 20 for dropping the protection member T2 peeled by the peeling unit 4, and collecting the protection member T2; a moving unit 5 capable of moving the collection box 2 to an input position P2 inside the peeling device 1 where the protection member T2 is input and an extraction position P1 outside the peeling device 1 where the protection member T2 is taken out; and an inclined surface 6 formed such that when the collection box 2 is positioned at the extraction position P1 to take out the protection member T2 collected in the collection box 2, the protection member T2 peeled and dropped by the peeling unit 4 falls into the collection box 2. Therefore, during the process of discarding the protection member T2 stored in the collection box 2, the protection member T2 peeled from the plate-like workpiece W by peeling the protection member T2 can also be input into the collection box 2 through the inclined surface 6, so that the peeling device 1 can operate continuously. In addition, when the peeling device 1 functions as a tape pasting machine that peels the protection member T2 pasted on the plate-like workpiece W after pasting the dicing tape T1 on the annular frame F and the plate-like workpiece W, the protection member T2 stored in the collection box 2 can be discarded during the peeling operation of the protection member T2. Therefore, the peeling device 1 can also operate continuously as a tape pasting machine.

[0085] In the peeling device 1 of the present invention, the inclined surface 6 is formed by at least two plates, namely, the upper plate 60 and the lower plate 61. The inclined surface 6 has: a plurality of through holes 64 formed in the lower plate 61 and extending in the longitudinal direction; a string blade 65 formed at the lower end of the upper plate 60 and inserted into the through holes 64; and a guiding portion 66 that guides the upper plate 60 and the lower plate 61 in a manner that allows them to slide. When the recycling box 2 is positioned at the take-out position P1, the lower end of the upper plate 60 is connected to the upper end of the lower plate 61, and the lower plate 61 extends continuously with the upper plate 60 to form the inclined surface 6. When the recycling box 2 is positioned at the input position P2, the upper plate 60 and the lower plate 61 overlap to form the side wall of the recycling box 2, so that the inclined surface 6 for efficiently guiding the protective member T2 peeled off and dropped by the peeling unit 4 into the recycling box 2 or accommodating the inclined surface 6 (in a folded state) can be formed. In addition, when the recycling box 2 is moved from the take-out position P1 outside the peeling device 1 for taking out the protective member T2 to the input position P2 inside the peeling device 1 for inputting the protective member T2, when the protective member T2 remains on the upper surface of the lower plate 61, through the through holes 64 and the string blade 65 inserted into the through holes 64, the string blade 65 can be brought into contact with the protective member T2 to drive the protective member T2 onto the bottom plate 21 of the recycling box 2, preventing the state where the protective member T2 is caught and clamped between the upper plate 60 and the lower plate 61.

[0086] The peeling device 1 of the present invention is not limited to the above-described embodiments, and various different implementation methods can of course be used within the scope of its technical idea. In addition, the shapes and the like of the respective structures of the peeling device 1 shown in the drawings are not limited thereto, and can be appropriately changed within the range where the effects of the present invention can be achieved.

Claims

1. A peeling device, which at least has: A holding workbench that holds the lower surface of a plate-shaped workpiece whose upper surface is covered by a sheet-shaped protective member; and A peeling unit that peels the protective member from the plate-shaped workpiece held by the holding workbench, wherein, The peeling device has: A collection box that is disposed inside the peeling device, has an opening for dropping the protective member peeled by the peeling unit, and collects the protective member; A moving unit that can move the collection box to an input position inside the peeling device where the protective member is input and an extraction position outside the peeling device where the protective member is taken out; and An inclined surface that is formed such that when the collection box is positioned at the input position, the inclined surface forms the side wall of the collection box, and when the collection box is positioned at the extraction position in order to take out the protective member collected in the collection box, the inclined surface forms an inclined state so that the protective member peeled and dropped by the peeling unit can fall into the collection box, No matter whether the collection box is positioned at the input position or the extraction position, the protective member can be collected into the collection box.

2. The peeling device according to claim 1, wherein, The inclined surface is formed by at least two plates, an upper plate and a lower plate, and the inclined surface has: A plurality of through holes that are formed in the lower plate and extend in the length direction; A string blade that is formed at the lower end of the upper plate and is inserted into the through holes; And A guiding portion that guides the upper plate and the lower plate so that the upper plate and the lower plate can slide and move, When the collection box is positioned at the extraction position, the lower end of the upper plate is connected to the upper end of the lower plate and the lower plate extends in a continuous manner with the upper plate to form the inclined surface, When the collection box is positioned at the input position, the upper plate and the lower plate overlap to form the side wall of the collection box.

Images