A floating chip detection fixture

By designing floating chip detection fixtures, the quality risk problem caused by inaccurate material placement in chip production is solved, and accurate detection and adaptation of chip materials of different thicknesses is achieved, which improves production stability and accuracy sex.

CN111816588BActive Publication Date: 2025-01-10HUIKEN TECH CO LTD
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Patent Information

Application Number
CN202010602110.0
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2020-06-29
Publication Date
2025-01-10
Estimated Expiration
2040-06-29

AI Technical Summary

Technical Problem

During the semiconductor chip production process, the robot arm may have a crooked placement, clogged suction cups or poor vacuum suction when picking and putting up the chip material, causing overlap or crushing, causing quality risks and losses.

Method used

A floating chip detection fixture was designed, including sensor adjustment components, sensor movement components and sensor fixing components. Through structures such as sensor height adjustment, light transmittance window, press wheel shaft and spring fixing bolts, the Accurate detection and adaptation of chip materials of different thicknesses to avoid interference from tray warping.

Benefits of technology

It improves the accuracy and stability of chip detection, reduces quality risks, simplifies the installation and use process, adapts to chip materials of different thicknesses, and reduces mechanical interference.

✦ Generated by Eureka AI based on patent content.

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Abstract

The present invention discloses a floating chip detection fixture, including a sensor adjustment component, a sensor movement component, and a sensor fixing component. The sensor adjustment component is arranged above the sensor movement component, and the sensor movement component is fixed to the sensor fixing component. The sensor adjustment component includes a sensor, a sensor mounting bracket, and a bracket slider. The sensor movement component includes a motion motherboard, a sensor mounting bracket track, and a bottom plate connecting slider. The sensor fixing component includes a bottom plate. The beneficial effects of the present invention are: clear structure, mechanical disassembly and assembly, simple to learn and understand; the sensor height is adjustable, high accuracy, and can adapt to the detection of chip materials of different thicknesses; the sensor has a high degree of adaptability, which can effectively solve the problem of warping and deformation of the material tray and improve the accuracy of sensor detection; the detection fixture adopts a suspended support, without any interference, and is easy to install.
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Description

Technical Field

[0001] The present invention relates to the technical field of chip testing, and in particular to a floating chip detection fixture. Background Art

[0002] In the semiconductor industry, the chip production process is fully automated by machines. The placement of chips is often done by the machine's robotic arm, and the chips are placed in a fixed tray. Generally, the machine is equipped with a track corresponding to the tray, and the servo motor is used to control and drive the movement of the fixture to achieve fully automatic assembly line operation. In the actual production process, when the machine's robotic arm is taking and placing products, the material may occasionally be placed crooked, or the suction cup may be used for too long or blocked, resulting in poor vacuum absorption, causing the chip materials placed in the tray to overlap. If not discovered in time, the abnormal chip materials may be crushed when the tray is stacked; the overlapping chip materials and the bottom chip materials may escape in the next production process, which will bring serious quality risks to production, cause great losses, and even cause customer complaints. Summary of the invention

[0003] The object of the present invention is to provide a floating chip detection fixture to solve the problems raised in the above background technology.

[0004] To achieve the above object, the present invention provides the following technical solutions: a floating chip detection fixture, comprising a sensor adjustment component, a sensor motion component, and a sensor fixing component, wherein the sensor adjustment component is arranged above the sensor motion component, and the sensor motion component is fixed to the sensor fixing component;

[0005] The sensor adjustment assembly comprises a sensor, a sensor mounting bracket, and a bracket slider, wherein the sensor is fixed on the sensor mounting bracket, the sensor mounting bracket is connected with an adjustment rod, and the sensor mounting bracket is fixed on the bracket slider;

[0006] The sensor motion assembly comprises a motion motherboard, a sensor mounting bracket rail, and a bottom plate connecting slider. The sensor mounting bracket rail and the bracket slider are slidably connected and fixed to the motion motherboard. The motion motherboard is fixed to the bottom plate connecting slider. A pull ring fixing bolt is provided on the side of the motion motherboard. A pressure wheel shaft is provided below the motion motherboard. A pressure wheel is provided on the pressure wheel shaft away from the motion motherboard.

[0007] The sensor fixing assembly comprises a base plate, a sensor moving assembly bridging track is arranged above the base plate, the bridging track is slidably connected to the base plate connecting slider, and a tension spring fixing bolt is fixed to the base plate.

[0008] Further preferably, a compression spring is sleeved on the adjusting rod.

[0009] Further preferably, the motion motherboard is provided with an adjustment rod fixing block perpendicular to the motion motherboard, and the adjustment rod is passed through the adjustment rod fixing block.

[0010] Further preferably, a light-transmitting window is provided on the motion motherboard.

[0011] Further preferably, the pressure wheel is a circular structure that can rotate around a pressure wheel shaft, and there are no less than two sets of matching components of the pressure wheel shaft and the pressure wheel.

[0012] Further preferably, a tension spring is fixed on the tension spring fixing bolt, and the tension spring and the pull ring are fixedly connected.

[0013] Further preferably, the adjusting rod is provided with a thread, which is threadedly connected to the sensor mounting bracket.

[0014] Further preferably, the detection fixture is a set of shooting mechanisms.

[0015] Beneficial Effects

[0016] The floating chip detection fixture of the present invention has a clear structure, mechanical disassembly and assembly, and is easy to learn and understand; the sensor height is adjustable, with high accuracy, and can adapt to the detection of chip materials of different thicknesses; the sensor has a high degree of adaptability, which can effectively solve the problem of material tray warping and deformation, and improve the accuracy of sensor detection; the detection fixture adopts a suspended support, without any interference, and is easy to install. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 A schematic diagram of the structure of a floating chip detection fixture disclosed in an embodiment of the present invention;

[0018] Figure 2 A schematic diagram of the structure of the sensor adjustment assembly disclosed in an embodiment of the present invention;

[0019] Figure 3 A schematic diagram of the structure of a sensor motion assembly disclosed in an embodiment of the present invention;

[0020] Figure 4 A schematic diagram of the structure of a sensor fixing assembly disclosed in an embodiment of the present invention;

[0021] Figure 5 It is a schematic diagram of the structure of the material tray disclosed in an embodiment of the present invention.

[0022] Reference numerals

[0023] 1- sensor adjustment assembly, 11- sensor, 12- adjustment rod, 13- compression spring, 14- sensor mounting bracket, 15- bracket slider, 2- sensor movement assembly, 21- movement motherboard, 211- adjustment rod fixing block, 212- light-transmitting window, 22- pull ring fixing bolt, 23- pressure wheel shaft, 24- pressure wheel, 25- sensor mounting bracket rail, 26- bottom plate connecting slider, 3- sensor fixing assembly, 31- bottom plate, 32- sensor movement assembly bridge rail, 33- tension spring fixing bolt, 34- tension spring, 4- material tray, 41- material tray rail, 42- chip placement slot. DETAILED DESCRIPTION

[0024] The following are specific embodiments of the present invention and the accompanying drawings to further describe the technical solution of the present invention, but the present invention is not limited to these embodiments. Example

[0025] like Figure 1-5 As shown, a floating chip detection fixture includes a sensor adjustment component 1, a sensor movement component 2, and a sensor fixing component 3, wherein the sensor adjustment component 1 is arranged above the sensor movement component 2, and the sensor movement component 2 is fixed to the sensor fixing component 3;

[0026] The sensor adjustment assembly 1 comprises a sensor 11, a sensor mounting bracket 14, and a bracket slider 15. The sensor 11 is fixed on the sensor mounting bracket 14. The sensor mounting bracket 14 is connected with an adjustment rod 12. The sensor mounting bracket 14 is fixed on the bracket slider 15.

[0027] The sensor motion assembly 2 comprises a motion motherboard 21, a sensor mounting bracket rail 25, and a bottom plate connecting slider 26. The sensor mounting bracket rail 25 and the bracket slider 15 are slidably connected and fixed on the motion motherboard 21. The motion motherboard 21 is fixed on the bottom plate connecting slider 26. A pull ring fixing bolt 22 is provided on the side of the motion motherboard 21. A pressure wheel shaft 23 is provided below the motion motherboard 21. A pressure wheel 24 is provided on the pressure wheel shaft 23 away from the motion motherboard 21.

[0028] The sensor fixing assembly 3 comprises a bottom plate 31 , above which a sensor moving assembly bridging track 32 is provided, which is slidably connected to the bottom plate connecting slider 26 , and a tension spring fixing bolt 33 is fixed on the bottom plate 31 .

[0029] In this embodiment, the chip material is placed in the chip placement groove 42 of the material tray 4. The material tray 4 is provided with a material tray track 41 on both sides, which is used to provide a running track for the pressing wheel 24 to ensure that the pressing wheel 24 can run along a specific track. There are two detection jigs, which are symmetrically arranged on both sides of the material tray 4. The placement of the chip material placed in the chip placement groove 42 is detected by the relative rotation of the pressing wheel 24 on the material tray track 41.

[0030] In this embodiment, the sensor adjustment assembly 1 is used for alignment detection. By adjusting the gear position of the adjustment lever 12, the height of the sensor 11 can be fine-tuned, so that the alignment of the sensor 11 is more accurate and suitable for the detection of more types of chip materials.

[0031] In this embodiment, the sensor motion assembly 2 is used to provide support for the sensor 11, assist the fine adjustment of the gear selection of the adjustment lever 12, and provide the sensor 11 with a light-transmitting window 212, and the sensor 11 detects the chip material through the light-transmitting window 212. At the same time, the pressing wheel shaft 23 and the pressing wheel 24 provide a sliding friction to the passing material tray 4 to prevent the detection fixture from directly colliding with the material tray and causing it to flip. By cooperating with the pull ring fixing bolt 22 and the tension spring 34, the pressure wheel 24 can generate downward pressure, thereby applying a downward pressure to the material tray 4, which can reduce the horizontal deformation of the material tray 4. At the same time, it can also ensure that the pressure wheel 24 floats freely up and down with the deformation of the material tray 4, avoiding interference with the detection of the sensor 11 due to the warping deformation of the material tray 4, and because the pressure wheel 24 is in contact with the surface of the material tray track 41, the pressure wheel 24 can automatically rise and fall with the different thickness of the material tray 4 or the amplitude of the material tray track 41, so that the detection fixture can adapt to the thickness of the material tray 4, making the detection of the sensor 11 more accurate and intelligent.

[0032] In this embodiment, the bottom plate 31 is used to fix and support the entire detection fixture, and at the same time provide downward pressure to the sensor 11, so that the pressure wheel 24 can exert a certain pressure on the tray 4 to make the tray 4 level and reduce misjudgment.

[0033] Preferably, a compression spring 13 is sleeved on the adjusting rod 12 to assist the adjusting rod 12 in fine-tuning the sensor mounting bracket 14 , thereby achieving fine-tuning of the sensor 11 .

[0034] Preferably, the moving motherboard 21 is provided with an adjusting rod fixing block 211 perpendicular to the moving motherboard 21 , and the adjusting rod 12 is passed through the adjusting rod fixing block 211 .

[0035] Preferably, a light-transmitting window 212 is provided on the motion motherboard 21, and the light emitted by the sensor 11 can detect the chip material through the light-transmitting window 212. By observing the value displayed by the sensor 11, it is determined whether the light at the transmitting end and the light at the receiving end are aligned at the same level, and the height of the sensor 11 is adjusted by rotating the adjustment rod 12, so that the transmitting end and the receiving end are in the best state when the dirty object passes through. Then, the chip material is placed in the chip placement slot 42, and the overlap of two chip materials or the crooked chip material phenomenon is simulated respectively. The chip material passes through the sensing area manually to set the trigger point position of the sensor 11, and the sensor 11 is triggered by adjusting it, and the machine buzzer is checked for alarm. After setting, check it several times. When everything is normal, let the machine run automatically, and then observe whether the condition is normal. If it is normal, the entire installation and debugging work is completed.

[0036] Preferably, the pressing wheel 24 is a circular structure that can rotate around the pressing wheel shaft 23, and there are at least two sets of matching components of the pressing wheel shaft 23 and the pressing wheel 24. In this embodiment, one detection fixture is provided with two sets of matching components of the pressing wheel shaft 23 and the pressing wheel 24, so that the detection fixture exerts greater pressure on the material tray 4 and the contact is more stable.

[0037] Preferably, a tension spring 34 is fixed on the tension spring fixing bolt 33, and the tension spring 34 is connected to the pull ring fixing bolt 22, providing downward pressure to the pressure wheel 24 through the bottom plate 31, and allowing the sensor 11 to float up and down with the unevenness of the tray track 41, thereby ensuring that the sensor 11 always detects a consistent height on the tray 4. At the same time, the pressure generated by the pressure wheel 24 can reduce the deformation of the tray track 41.

[0038] Preferably, the adjusting rod 12 is provided with a thread, which is threadedly connected to the sensor mounting bracket 14 to achieve self-locking of the adjusting rod 12 .

[0039] Preferably, the detection fixture is a set of shooting mechanisms, which can detect the chip materials on the tray 4 at the same time, improve the accuracy of detection, and ensure the balance of the tray 4.

[0040] In this embodiment, the extension length of the pressure wheel shaft 23 can be adjusted to meet the different sizes of the detection fixture, and the detection requirements for chip materials of different thicknesses can be achieved by adjusting the rod 12.

[0041] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein with equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the invention content within the protection scope of the present invention.

Claims

1. A floating chip detection fixture, characterized in that: The sensor comprises a sensor adjustment component (1), a sensor movement component (2), and a sensor fixing component (3), wherein the sensor adjustment component (1) is arranged above the sensor movement component (2), and the sensor movement component (2) is fixed to the sensor fixing component (3); The sensor adjustment assembly (1) comprises a sensor (11), a sensor mounting bracket (14), and a bracket slider (15); the sensor (11) is fixed to the sensor mounting bracket (14); the sensor mounting bracket (14) is connected to an adjustment rod (12); and the sensor mounting bracket (14) is fixed to the bracket slider (15); The sensor motion assembly (2) comprises a motion motherboard (21), a sensor mounting bracket rail (25), and a bottom plate connecting slider (26); the sensor mounting bracket rail (25) and the bracket slider (15) are slidably connected and fixed on the motion motherboard (21); the motion motherboard (21) is fixed on the bottom plate connecting slider (26); a pull ring fixing bolt (22) is provided on the side of the motion motherboard (21); a pressure wheel shaft (23) is provided below the motion motherboard (21); and a pressure wheel (24) is provided on the pressure wheel shaft (23) at the end away from the motion motherboard (21); The sensor fixing assembly (3) comprises a bottom plate (31), a sensor moving assembly bridge track (32) is provided above the bottom plate (31), the bridge track is slidably connected to the bottom plate connecting slider (26), and a tension spring fixing bolt (33) is fixed on the bottom plate (31); A compression spring (13) is sleeved on the adjusting rod (12), a light-transmitting window (212) is provided on the moving motherboard (21), a tension spring (34) is fixed on the tension spring fixing bolt (33), and the tension spring (34) is connected to the pull ring fixing bolt (22).

2. The floating chip detection fixture according to claim 1, characterized in that: An adjusting rod fixing block (211) perpendicular to the moving motherboard (21) is provided on the moving motherboard (21), and the adjusting rod (12) is passed through the adjusting rod fixing block (211).

3. The floating chip detection fixture according to claim 1, characterized in that: The pressing wheel (24) is a circular structure that can rotate around the pressing wheel shaft (23), and there are at least two sets of matching components of the pressing wheel shaft (23) and the pressing wheel (24).

4. The floating chip detection fixture according to claim 1, characterized in that: The adjusting rod (12) is provided with a thread and is threadedly connected to the sensor mounting bracket (14).

5. The floating chip detection fixture according to claim 1, characterized in that: The detection fixture is a set of shooting mechanisms.

Citation Information

Patent Citations

  • Floating type chip detection jig

    CN212967609U