Liquid handling device and liquid handling method

Abstract

The present application provides a kind of liquid treatment device, it includes tank, circulating passage, pump, multiple liquid processing parts and multiple supply passages, circulating passage has the main passage portion being provided with pump and the first branch passage portion and the second branch passage portion being branched from main passage portion, processing liquid flows into each branch passage portion after passing through main passage portion from tank, and returns tank by each branch passage portion, multiple liquid processing parts are divided into first processing part group and second processing part group, multiple supply passages are divided into first passage group and second passage group, liquid processing belonging to first processing part group is connected to first branch passage portion via supply passage belonging to first passage group respectively, liquid processing belonging to second processing part group is connected to second branch passage portion via supply passage belonging to second passage group respectively.According to the present application, the number of components of the processing liquid supply mechanism of liquid treatment device can be reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to a liquid processing apparatus and a liquid processing method. BACKGROUND

[0002] A manufacturing process of a semiconductor device includes a step of supplying a prescribed processing liquid to a processing target such as a semiconductor wafer, to perform liquid processing such as cleaning or wet etching. Patent Literature 1 describes an example of a processing liquid supply mechanism provided in a liquid processing apparatus that performs such liquid processing. The processing liquid supply mechanism described in Patent Literature 1 has a storage tank that stores a processing liquid, and a circulation line (circulation line) that connects both ends of the storage tank. On the circulation line, a heater that heats the processing liquid, a circulation pump that transports the processing liquid, and a filter that removes contaminant substances such as particles contained in the processing liquid are provided in this order from the upstream side that is apart from the storage tank. A plurality of branch supply lines are branched from the circulation line, and each circulation line supplies the processing liquid to a processing section that processes a wafer.

[0003] PRIOR ART DOCUMENTS

[0004] PATENT LITERATURE

[0005] Patent Literature 1: Japanese Patent Application Publication No. 2015-220318 SUMMARY

[0006] The present application provides a technology that can reduce the number of components of a processing liquid supply mechanism of a liquid processing apparatus.

[0007] A liquid processing apparatus according to one embodiment includes a tank that stores a processing liquid supplied from a processing liquid supply section, a circulation passage that connects the tank, a pump provided in the circulation passage, a plurality of liquid processing sections that can perform liquid processing on a wafer, and a plurality of supply passages that supply the processing liquid to the plurality of liquid processing sections, respectively, the circulation passage has a main passage section in which the pump is provided, and a first branch passage section and a second branch passage section that are branched from the main passage section, the processing liquid that flows out of the tank flows into the first branch passage section and the second branch passage section after passing through the main passage section, and returns to the tank through the first branch passage section and the second branch passage section, the plurality of liquid processing sections are divided into a first processing section group that includes a plurality of liquid processing sections, and a second processing section group that includes a plurality of liquid processing sections, the plurality of supply passages are divided into a first passage group that includes a plurality of supply passages, and a second passage group that includes a plurality of supply passages, the liquid processing sections belonging to the first processing section group are connected to the first branch passage section via the supply passages belonging to the first passage group, respectively, and the liquid processing sections belonging to the second processing section group are connected to the second branch passage section via the supply passages belonging to the second passage group, respectively.

[0008] According to the present application, it is possible to reduce the number of components of the processing liquid supply mechanism of the liquid processing apparatus. BRIEF DESCRIPTION OF DRAWINGS

[0009] Figure 1 is a fluid circuit diagram of a liquid processing apparatus according to a first embodiment.

[0010] Figure 2 is a fluid circuit diagram of a liquid processing apparatus according to a second embodiment.

[0011] Figure 3 is a schematic fluid circuit diagram of a liquid processing apparatus according to a third embodiment.

[0012] Figure 4 is a schematic fluid circuit diagram of a liquid processing apparatus according to a fourth embodiment.

[0013] Figure 5 is a schematic fluid circuit diagram of a liquid processing apparatus according to a fifth embodiment.

[0014] Figure 6 is a schematic fluid circuit diagram of a liquid processing apparatus according to a sixth embodiment.

[0015] Figure 7 is a fluid circuit diagram of a liquid processing apparatus according to a seventh embodiment.

[0016] Figure 8 is a timing chart for explaining the operation of the liquid processing apparatus according to the seventh embodiment.

[0017] Figure 9 is a timing chart for explaining the operation of the liquid processing apparatus according to the seventh embodiment.

[0018] Figure 10 is a timing chart for explaining the operation of the liquid processing apparatus according to the seventh embodiment.

[0019] Figure 11 is a fluid circuit diagram showing an example of the structure of a processing liquid supply section.

[0020] EXPLANATION OF REFERENCE NUMERALS

[0021] 10: tank, 20: circulation passage, 22: main passage portion, 24A: first branch passage portion, 24B: second branch passage portion, 70: processing liquid supply section, 30: pump, 60 (60A, 60B): liquid processing section, 62 (62A, 62B): supply passage. DETAILED DESCRIPTION

[0022] Embodiments of a liquid processing apparatus will be described with reference to the drawings. In the drawings, the same or substantially the same components are given the same reference numerals.

[0023] Figure 1 A first embodiment of a liquid treatment device is shown. The liquid treatment device has a treatment liquid supply mechanism including a tank 10 that stores a treatment liquid supplied from a treatment liquid supply section 70, and a circulation passage 20 connected to the tank 10. A pump 30 provided in the circulation passage 20 forms a circulation flow of the treatment liquid from the tank 10 through the circulation passage 20 back to the tank 10.

[0024] The circulation passage 20 includes a main passage portion (trunk portion) 22 on the upstream side and a plurality of (two in the example shown in the drawing) branch passage portions (branch portions) 24A, 24B (hereinafter referred to as "first branch passage portion 24A" and "second branch passage portion 24B") on the downstream side.

[0025] In the following description, the letter "A" at the end of the reference numeral of a component belonging to the first branch passage portion 24A, and the letter "B" at the end of the reference numeral of a component belonging to the second branch passage portion 24B. The components belonging to the first branch passage portion 24A and the components belonging to the second branch passage portion 24B are the same as or substantially the same as each other. When it is not necessary to distinguish the components belonging to the first branch passage portion 24A from the components belonging to the second branch passage portion 24B from each other, the letter "A" or "B" at the end is sometimes deleted to express (for example, 40A, 40B is expressed as 40). Further, the component having the letter "A" at the end of the reference numeral is sometimes referred to as "first (name of component)", and the component having the letter "B" at the end of the reference numeral is sometimes referred to as "second (name of component)". Further, "first" and "second" are sometimes omitted.

[0026] The filter section 40 removes contaminant substances such as particles contained in the treatment liquid that passes through the filter section. The filter section 40 includes a plurality of (three in the example shown in the drawing) filter assemblies provided in parallel. The number of filter assemblies belonging to one filter section 40 can be determined in consideration of the filtering capacity required for the filter section, the pressure drop allowed in the filter section, and the like. In all the drawings of the present application, one symbol represented by a rhombus (square) having a vertical line drawn in the center represents one filter assembly.

[0027] The main passage portion 22 branches into the first branch passage portion 24A and the second branch passage portion 24B at the downstream end thereof, that is, at a branch (branch point) 23 provided on the downstream side of the pump 30. The treatment liquid flowing out of the tank 10 flows into the first branch passage portion 24A and the second branch passage portion 24B after passing through the main passage portion 22, and returns to the tank 10 after passing through the first branch passage portion 24A and the second branch passage portion 24B.

[0028] The liquid processing apparatus has a plurality of liquid processing sections 60 that perform liquid processing on a substrate W (e.g., a semiconductor wafer). Each liquid processing section 60 has the same configuration. Each liquid processing section 60 can have, for example, a spin chuck that holds and rotates the substrate W, and a nozzle 66 that supplies a processing liquid to the substrate W held and rotated by the spin chuck.

[0029] The liquid processing sections 60 are divided into groups (two in the example of the drawing) the same number as the branch passage portions (24A, 24B). The processing liquid is supplied from the first branch passage portion 24A to the liquid processing sections 60A belonging to the first group. Therefore, a plurality of supply passages 62 (62A) are branched from the first branch passage portion 24A in parallel, and are connected to any one of the liquid processing sections 60A belonging to the first group, respectively. The processing liquid is supplied from the second branch passage portion 24B to the liquid processing sections 60B belonging to the second group. Therefore, a plurality of supply passages 62 (62B) are branched from the second branch passage portion 24B in parallel, and are connected to any one of the liquid processing sections 60B belonging to the first group, respectively. The number of the liquid processing sections (60A, 60B) belonging to each group is the same as each other.

[0030] In order to simplify the drawing, Figure 1 ( Figure 2 and Figure 7 the same) an example in which three liquid processing sections 60 belong to one group is drawn. The number of the processing sections belonging to one group is not limited to this. For example, the number of the processing sections belonging to one group can be about 6 to 10.

[0031] A flow control device 64 is provided in each supply passage 62. The flow control device 64 includes one or more of a switching valve, a flow control valve, a flow meter, a liquid flow controller, and the like. The downstream end of the supply passage 62 is connected to a nozzle 66 that supplies a processing liquid to the substrate W. Therefore, the processing liquid can be supplied from the nozzle 66 to the substrate W loaded in the liquid processing section 60 at a controlled flow rate.

[0032] On the branch passage portion 24A, a temperature adjustment section 50 (50A), a temperature sensor 21Q (21QA), a flow meter 25 (25A), a switching valve 26 (26A) having an opening degree adjustment function, and a temperature sensor 21R (21RA) are provided in this order from the upstream side. Also on the branch passage portion 24B, a temperature adjustment section 50 (50B), a temperature sensor 21Q (21QB), a flow meter 25 (25B), a switching valve 26 (26B) having an opening degree adjustment function, and a temperature sensor 21R (21RB) are provided in this order from the upstream side.

[0033] The temperature adjustment section 50 adjusts the temperature of the processing liquid passing therethrough. Each temperature adjustment section 50 includes a plurality of (four in the example of the drawing) temperature adjustment assemblies arranged in parallel. The temperature adjustment assembly can be an assembly that exclusively performs heating, such as an electric resistance heater or a lamp heater, or a heating / cooling assembly that is capable of both heating and cooling, including a temperature adjustment element (e.g., a Peltier element).

[0034] The number of temperature adjustment assemblies belonging to one temperature adjustment section 50 can be determined in consideration of the temperature adjustment capacity required of the temperature adjustment section 50, the pressure drop allowed in the temperature adjustment section 50, and the like. In the example of the drawing, each temperature adjustment section 50 (50A, 50B) is composed of two temperature adjustment assemblies arranged in parallel. In all the drawings attached to this application, one symbol indicated with a diamond (square) having two opposing vertical arrows drawn in the center represents one temperature adjustment assembly.

[0035] The liquid processing apparatus has a control section 100. The control section 100 is, for example, a computer, and has a control arithmetic section and a storage section. The storage section stores a program for controlling various processes performed in the liquid processing. The control arithmetic section controls the actions of various components of the liquid processing apparatus by reading and executing the program stored in the storage section. The program can be recorded in a computer-readable storage medium and installed from the storage medium into the storage section of the control section 100. The computer-readable storage medium includes, for example, a hard disk (HD), a floppy disk (FD), a compact disc (CD), a magneto-optical disk (MO), and a memory card, and the like.

[0036] The control section 100 maintains the temperature of the processing liquid supplied from the first branch passage section 24A to the liquid processing section 60A at a target value by controlling the temperature adjustment action (heating and / or cooling action) of the temperature adjustment section 50A on the basis of the detected temperatures of the temperature sensor 21P located in the vicinity of the outlet of the pump 30, the temperature sensor 21QA located in the vicinity of the outlet of the temperature adjustment section 50A, and the temperature sensor 21RA located immediately upstream of the connection region of the supply passage 62A of the first branch passage section 24A.

[0037] Likewise, the control section 100 maintains the temperature of the processing liquid supplied from the second branch passage section 24B to the liquid processing section 60B at a target value by controlling the temperature adjustment action (heating and / or cooling action) of the temperature adjustment section 50B on the basis of the detected temperatures of the temperature sensor 21P located in the vicinity of the outlet of the pump 30, the temperature sensor 21QB located in the vicinity of the outlet of the temperature adjustment section 50B, and the temperature sensor 21RB located immediately upstream of the connection region of the supply passage 62B of the second branch passage section 24B.

[0038] The control of the temperature adjustment section 50A and the control of the temperature adjustment section 50B are independent of each other.

[0039] Specifically, the control section 100 performs feedback control of the temperature adjustment operation (heating and / or cooling operation) of the temperature adjustment section 50A (50B) based on the detected temperature of the temperature sensor 21QA (21QB) near the outlet of the temperature adjustment section 50A (50B) to maintain the detected temperature of the temperature sensor 21QA (21QB) at a set temperature. The set temperature corresponds to a set value SV in the feedback control system, and the detected temperature of the temperature sensor 21QA (21QB) corresponds to a measured value PV in the feedback control system.

[0040] The detected temperature of the temperature sensor 21RA (21RB) near the liquid treatment section 60A (60B) is closest to the temperature of the process liquid actually supplied to the substrate W. The process liquid decreases in temperature by natural heat dissipation in the branch passage portion 24A (24B) during the period from the outlet of the temperature adjustment section 50A (50B) to the supply to the substrate W. The control section 100 corrects the set value (SV) or the manipulated variable (MV) in the feedback control system in accordance with the difference between the detected temperature of the temperature sensor 21QA (21QB) and the detected temperature of the temperature sensor 21RA (21RB). Specifically, if the detected temperature of the temperature sensor 21RA (21RB) is, for example, 1°C lower than the detected temperature of the temperature sensor 21QA (21QB), 1°C can be added to the set value (SV) as a correction value (CV). If the difference between the detected temperature of the temperature sensor 21RA (21RB) and the detected temperature of the temperature sensor 21QA (21QB) is negligible, correction can not be performed based on the detected temperature of the temperature sensor 21RA (21RB).

[0041] The temperature sensor 21P near the outlet of the pump 30 is provided to perform feedforward control. When new process liquid is replenished from the process liquid supply section 70 to the tank 10, process liquid having a relatively low temperature flows from the tank 10 to the temperature adjustment section 50A (50B). Since feedback control is performed based on the detected temperature of the temperature sensor 21QA (21QB) near the outlet of the temperature adjustment section 50A (50B), the amount of heat generation of the temperature adjustment section 50A (50B) does not increase until the detected temperature of the temperature sensor 21QA (21QB) decreases. Therefore, without feedforward control, the process liquid having a low temperature temporarily flows through the branch passage portion 24A (24B) to the liquid treatment section 60A (60B). In addition, when the decrease in the detected temperature of the temperature sensor 21QA (21QB) is to be compensated for, the temperature of the process liquid flowing from the temperature adjustment section 50A (50B) can fluctuate.

[0042] In the feedforward control, the set value (SV) or the operation amount (MV) in the feedback control system is corrected in accordance with the difference between the detected temperature of the temperature sensor 21P and the set temperature (temperature that should be detected by the temperature sensor 21QA (21QB)). Specifically, for example, if the detected temperature of the temperature sensor 21RA (21RB) is detected to be lower than the set temperature by, for example, 5°C, 5°C is added to the set value (SV) as a temporary correction value (CV). The timing at which the correction value (CV) is added to the set value (SV) can be determined through experiments, taking into account the time for the process liquid to flow from the temperature sensor 21P to the temperature adjustment section 50A (50B), the control response of the feedback control system, and the like. By performing the feedforward control, when the temperature of the process liquid flowing into the temperature adjustment section 50A (50B) is relatively sharply lowered, the temperature fluctuation of the process liquid to be supplied to the liquid processing section 60A (60B) can be suppressed.

[0043] The feedforward control can also be performed only when a new process liquid is to be replenished from the process liquid supply section 70 to the tank 10 or the like, which is expected to cause a large disturbance to the temperature adjustment system.

[0044] The on-off valve 26A (26B) having the opening degree adjustment function can adjust the flow rate of the process liquid flowing through the branch passage section 24A (24B) and can also shut off the flow of the process liquid of the branch passage section 24A (24B). The flowmeter 25A (25B) can monitor the flow rate of the process liquid flowing through the branch passage section 24A (24B).

[0045] At the most downstream portion of the branch passage section 24A (24B), a back pressure valve 27A (27B) is provided.

[0046] The process liquid supply section 70 can supply (or replenish) a process liquid to the tank 10. As the process liquid supplied from the process liquid supply section 70, DHF (dilute hydrofluoric acid) can be exemplified. The process liquid supply section 70 can also have a function of generating DHF by diluting HF (hydrofluoric acid) supplied from an HF supply source with DIW (pure water) supplied from a DIW supply source. In this case, the DIW supply source and the HF supply source can be provided as plant production equipment of a semiconductor device manufacturing plant. The process liquid supply section 70 can also include a tank (tank different from the tank 10) for storing a process liquid that is preliminarily prepared. The process liquid supply section 70 can also supply a process liquid obtained by mixing a plurality of components, or can supply a process liquid having a single component.

[0047] Figure 2A second embodiment of the liquid treatment device is shown. The second embodiment differs in that the first branch passage portion 24A is provided with the temperature adjustment section 50A and the filtration section 40A, and the second branch passage portion 24B is provided with the temperature adjustment section 50B and the filtration section 40B. The temperature adjustment section 50A (50B) is provided on the upstream side of the filtration section 40A (40B). The temperature adjustment section 50A (50B) has four temperature adjustment assemblies provided in parallel. The filtration section 40A (40B) has two filtration assemblies provided in parallel. Other than the above, the second embodiment is the same as the first embodiment, and thus repeated explanation is omitted.

[0048] Figures 3 to 6 The configuration of the pump 30, the filtration section 40, and the temperature adjustment section 50 in the third to sixth embodiments of the liquid treatment device is shown only in simplified form. The third to sixth embodiments have the same components (60, 21P, 21Q, 21R, 25, 26, etc.) as those provided in the first and second embodiments, and illustration thereof is omitted.

[0049] In the third embodiment shown in FIG. 3, the pump 30 is provided in the main passage portion 22. The filtration section 40A and the temperature adjustment section 50A are provided in the first branch passage portion 24A. The filtration section 40B and the temperature adjustment section 50B are provided in the second branch passage portion 24B. Each of the filtration sections (40A, 40B) has one filtration assembly, and each of the temperature adjustment sections (50A, 50B) has one temperature adjustment assembly. Figure 3 In the fourth embodiment shown in FIG. 4, the pump 30 and the filtration section 40 are provided in the main passage portion 22. The temperature adjustment section 50A is provided in the first branch passage portion 24A, and the temperature adjustment section 50B is provided in the second branch passage portion 24B. The filtration section 40 has one filtration assembly, and each of the temperature adjustment sections (50A, 50B) has one temperature adjustment assembly.

[0050] Figure 4 In the fifth embodiment shown in FIG. 5, the pump 30, the filtration section 40, and the temperature adjustment section 50 are provided in the main passage portion 22. The filtration section 40 has one filtration assembly, and the temperature adjustment section 50 has one temperature adjustment assembly.

[0051] In the sixth embodiment shown in FIG. 6, the pump 30 and the filtration section 40 are provided in the main passage portion 22, the temperature adjustment section 50A is provided in the first branch passage portion 24A, and the temperature adjustment section 50B is provided in the second branch passage portion 24B. The sixth embodiment differs from the fourth embodiment in that each of the temperature adjustment sections (50A, 50B) has two temperature adjustment assemblies. Figure 5 In the sixth embodiment shown in FIG. 6, the pump 30 and the filtration section 40 are provided in the main passage portion 22, the temperature adjustment section 50A is provided in the first branch passage portion 24A, and the temperature adjustment section 50B is provided in the second branch passage portion 24B. The sixth embodiment differs from the fourth embodiment in that each of the temperature adjustment sections (50A, 50B) has two temperature adjustment assemblies.

[0052] Figure 6 In the sixth embodiment shown in FIG. 6, the pump 30 and the filtration section 40 are provided in the main passage portion 22, the temperature adjustment section 50A is provided in the first branch passage portion 24A, and the temperature adjustment section 50B is provided in the second branch passage portion 24B. The sixth embodiment differs from the fourth embodiment in that each of the temperature adjustment sections (50A, 50B) has two temperature adjustment assemblies. ​​

[0053] The first to sixth embodiments have in common that the pump 30 is provided in the main passage portion 22 of the circulation passage 20, and that circulation of the treatment liquid in both the first branch passage portion 24A and the second branch passage portion 24B of the circulation passage 20 is generated by the driving force generated by the common pump 30. Thereby, as compared with a structure in which pumps are respectively provided in two circulation passages, the number of pumps can be reduced, and the device cost of the liquid treatment device can be reduced.

[0054] In Figure 4 In the fourth embodiment shown in Figure 3 As compared with the third embodiment shown in

[0055] When the filter portion 40 requires a higher particle collection capacity, as in Figure 3 In the third embodiment shown in Figure 2 As in the second embodiment shown in

[0056] In Figure 1 In the first embodiment shown in Figure 1 As compared with a case in which two filter portions 40A, 40B each having one filter assembly are provided (the third embodiment shown in Figure 3 As compared with a case in which two filter portions 40A, 40B each having one filter assembly are provided (the third embodiment shown in

[0057] In Figure 5 In the fifth embodiment shown in Figure 4Compared with the fourth embodiment shown, the number of temperature adjustment components can be reduced, and the device cost of the liquid processing device can be reduced.

[0058] When the temperature regulating unit 50 requires a higher temperature regulating capability, it can be Figure 4 As in the fourth embodiment shown in FIG. 1 , a temperature regulating section (50A, 50B) is provided in each branch passage portion (24A, 24B). When a higher temperature regulating capability is required, the temperature regulating section (50A, 50B) can be provided in FIG. Figure 6 As in the sixth embodiment shown, a temperature regulating portion (50A, 50B) is provided in each branch passage portion (24A, 24B), and each temperature regulating portion has two (or more) temperature regulating modules.

[0059] Similar to the above-mentioned filter unit, a temperature adjustment unit 50 composed of an odd number (three in this case) of temperature adjustment components may be provided in the main passage portion 22 .

[0060] A method for determining the arrangement order of the pump 30 , the filter unit 40 , and the temperature adjustment unit 50 along the flow direction of the treatment liquid will be briefly described.

[0061] When the temperature control accuracy of the treatment liquid supplied to the liquid treatment unit 60 is particularly important, the temperature control unit 50 is preferably arranged at the most downstream side. In this case, for example, the pump 30, the filter unit 40 and the temperature control unit 50 can be arranged in this order from the upstream side. Figure 1 and Figures 3 to 6 The embodiment shown corresponds to this configuration.

[0062] When it is particularly important to reduce the amount of particles contained in the treatment liquid supplied to the liquid treatment unit 60, it is preferable to arrange the filter unit 40 on the most downstream side. This is because dust may be generated in the temperature adjustment unit 50. In this case, for example, the pump 30, the temperature adjustment unit 50, and the filter unit 40 may be arranged in this order from the upstream side. This arrangement is preferable, for example, when the treatment liquid is IPA (isopropyl alcohol), which can be used as a drying solvent. Figure 2 and 7 The implementation method corresponds to this configuration.

[0063] Some temperature control components, such as the heater assembly, that comprise the temperature control unit 50 may have low pressure resistance. In such cases, to prevent damage to the temperature control components, the temperature control unit 50 is preferably positioned upstream of the pump 30. In such a case, for example, the temperature control unit 50, the pump 30, and the filter unit 40 may be positioned in this order from the upstream side.

[0064] Figure 7A seventh embodiment of the liquid processing apparatus is shown. In the seventh embodiment, the pump 30 and the temperature adjustment section 50 are provided in the main passage section 22, and the filter sections (40A, 40B) are provided in the respective branch passage sections (24A, 24B). The other components of the seventh embodiment are the same as those of the first embodiment and the second embodiment shown in Figure 1 and Figure 2 and thus repeated explanation is omitted.

[0065] Figures 8 to 10 is a time chart for explaining the operation of the liquid processing apparatus according to the seventh embodiment. The items in the time chart are as follows. The operation explained below can be automatically performed under the control of the control section 100 according to the scheme stored in the control section 100.

[0066] "Pump": indicates whether the pump 30 is in operation (on) or in stop (off).

[0067] "Pump RPM": indicates the rotation speed of the pump 30. "Zero" indicates that the rotation speed is zero, "RI" is a low-speed rotation at start-up, "RS" indicates a medium-speed rotation when the processing liquid is caused to flow into only one of the branch passage sections (24A, 24B), and "RW" indicates a high-speed rotation when the processing liquid is caused to flow into both of the branch passage sections (24A, 24B). Among them, zero < RI < RS < RW.

[0068] "VA": indicates whether the on-off valve 26A of the first branch passage section 24A is open (OPEN) or closed (CLOSE).

[0069] "VB": indicates whether the on-off valve 26B of the second branch passage section 24B is open (OPEN) or closed (CLOSE).

[0070] "Heater": indicates whether the temperature adjustment assembly (in this case, the electric heater assembly) of the temperature adjustment section 50 is energized (ON) or not energized (OFF). In the case of "ON", the electric power supplied to the electric heater assembly is not a constant value because it is subjected to feedback control.

[0071] "A ready": indicates whether the processing liquid supply to the liquid processing section 60A connected to the first branch passage section 24A is ready (YES) or not ready (NO).

[0072] "B ready": indicates whether the processing liquid supply to the liquid processing section 60B connected to the second branch passage section 24B is ready (YES) or not ready (NO).

[0073] First, the operation at the start-up of the liquid processing apparatus will be explained with reference to the time chart of Figure 8 .

[0074] Now, assume that the tank 10 is empty. From this state, the supply of the treatment liquid from the treatment liquid supply section 70 to the tank 10 is started (time tO) in a state where both of the on-off valves 26A, 26B are closed. At this time, the pump is stopped (off), and the electric heater assembly of the temperature adjustment section 50 is not energized (off).

[0075] When the liquid level of the treatment liquid in the tank 10 is detected by a liquid level sensor (not shown) to have risen and be equal to or higher than a predetermined lower limit liquid level (time tl), after a predetermined delay time elapses (time t2), only one of the on-off valves 26A is opened, and the pump 30 is started. By this, a circulation flow of the treatment liquid from the tank 10 through the main passage section 22 and the first branch passage section 24A and back to the tank 10 is formed. At this time, the treatment liquid does not flow into the second branch passage section 24B.

[0076] The pump 30 is started at a low rotation speed (RI), and after a predetermined time (time t3) elapses while maintaining the low rotation speed (RI), the rotation speed is gradually increased to a high rotation speed (RW). If the rotation speed of the pump 30 is increased to the high rotation speed (RW) at the same time as the start of the pump, the pressure difference between the primary side and the secondary side of the filter assembly of the filter section 40A sometimes becomes temporarily too large, resulting in breakage of the filter assembly (e.g., filter element). By starting the pump 30 in the above-described order, breakage of the filter assembly can be prevented.

[0077] When the rotation speed of the pump 30 becomes the high rotation speed (RW) (time t4), after a predetermined delay time (e.g., about 10 seconds) elapses (time t5), the monitoring of the flow rate of the treatment liquid in the branch passage section 24A by the flow meter 25A is started. If a predetermined time (time t6) elapses from the time t4, and the flow rate monitoring result of the flow meter 25A is not a problem, the on-off valve 26B is opened, and the on-off valve 26A is closed. By this, a circulation flow of the treatment liquid from the tank 10 through the main passage section 22 and the second branch passage section 24B and back to the tank 10 is formed. At this time, the treatment liquid does not flow into the first branch passage section 24A.

[0078] After a predetermined delay time (e.g., about 10 seconds) elapses from the time t6 (time t7), the monitoring of the flow rate of the treatment liquid in the branch passage section 24B by the flow meter 25B is started. If a predetermined time (time t8) elapses from the time t6, and the flow rate monitoring result of the flow meter 25B is not a problem, the on-off valve 26A is opened in a state where the on-off valve 26B is maintained open. By this, a circulation flow of the treatment liquid from the tank 10 through the main passage section 22 and both of the first branch passage section 24A and the second branch passage section 24B and back to the tank 10 is formed. The time from the time t6 to the time t8 is, for example, about 60 seconds.

[0079] When a predetermined time elapses from the time t8 (time t9), the power supply to the electric heater assembly of the temperature adjusting section 50 is started, and the heating of the treatment liquid is started. The electric power supplied to the electric heater assembly can be controlled by the temperature adjusting method using the above-described feedback control (which can be combined with the feedforward control).

[0080] In this seventh embodiment, the temperature adjusting section 50 provided in the main passage section 22 heats the treatment liquid flowing into both the first branch passage section 24A and the second branch passage section 24B. In this case, the difference between the detected temperature of the temperature sensor 21Q, which is the only one present, and the detected temperature of one of the temperature sensors 21RA, 21RB (for example, the temperature sensor 21RA) can be used for the calculation of the above-described correction value (CV). The average of the detected temperature of the temperature sensor 21RA and the detected temperature of the temperature sensor 21RB can also be used for the calculation of the correction value (CV).

[0081] After the heating of the treatment liquid is started, the heating process waits until the temperature of the treatment liquid is stabilized at the target temperature. When the temperature of the treatment liquid is stabilized (time t10), the preparation for supplying the treatment liquid to all of the liquid treatment sections 60 connected to both the first branch passage section 24A and the second branch passage section 24B is completed (ready state). Thereafter, the treatment is performed in each of the liquid treatment sections 60 according to a predetermined treatment schedule. At this time, the treatment liquid is supplied to each of the liquid treatment sections (60A, 60B) at a flow rate controlled by the flow rate control device 64 via the supply passages (62A, 62B) branched from the branch passage sections (24A, 24B).

[0082] When all of the predetermined liquid treatments in the liquid treatment sections 60 are completed, the pump 30 is stopped, the on-off valves 26A, 26B are closed, and the power supply to the electric heater assembly of the temperature adjusting section 50 is stopped (time t11).

[0083] According to the above embodiment, when the pump 30 is driven at a high speed (RW) used when the treatment liquid is to flow through two branch passage parts (24A, 24B), first, the treatment liquid is made to flow through only one of the branch passage parts 24A at a large flow rate, and then the treatment liquid is made to flow through only the other branch passage part 24B at a large flow rate. Here, "large flow rate" refers to, for example, about twice the flow rate of the treatment liquid flowing through one branch passage part (24A, 24B) during the normal operation of the liquid treatment device. However, the "large flow rate" here refers to a flow rate that is larger than the flow rate of the treatment liquid flowing through one branch passage part (24A, 24B) during the normal operation of the liquid treatment device (when the treatment units 60A, 60B are processed in a predetermined order). By performing such an operation, the air (bubbles) remaining in the circulation path 20 (the main passage part 22 and the first branch passage part 24A and the second branch passage part 24B) can be discharged in a short time. Therefore, preparations for supplying treatment liquid to all liquid treatment parts 60 connected to both first branch passage portion 24A and second branch passage portion 24B can be completed in a short time.

[0084] Next, refer to Figure 9 This timing diagram illustrates the operation (stopping and resuming operation) when a fault occurs in a component of the liquid processing device belonging to one of the first and second branch passage sections 24A, 24B (here, first branch passage section 24A). This example involves stopping the supply of processing liquid to first branch passage section 24A when a fault is detected and then resuming the supply of processing liquid to first branch passage section 24A after the fault is resolved.

[0085] This action starts from Figure 8 In the timing diagram, the liquid treatment device is in the state between time t10 and time t11 (ready state). Figure 9 At time t20 (corresponding to a time between time t10 and time t11), a failure occurs in a component of the liquid processing device belonging to first branch passage portion 24A.

[0086] Failures that may cause the supply of treatment liquid to a branch passage portion 24A (24B) to be stopped include, for example: leakage of treatment liquid from the piping belonging to the first branch passage portion 24A, failure of the temperature regulating portion 50A belonging to the first branch passage portion 24A, reduction in exhaust pressure in the liquid treatment portion 60A, opening of the maintenance panel on the liquid treatment portion 60A side, etc.

[0087] As a failure to stop supplying the treatment liquid to both the first branch passage portion 24A and the second branch passage portion 24B, for example, include: a failure of the pump 30, a failure of the tank 10 and a sensor (a liquid level sensor or the like) belonging to the tank 10, a leakage occurring in the main passage portion 22, opening of a panel of a treatment liquid supply cabinet (a portion for housing a tank, a pipe, or the like), and the like.

[0088] When the failure is detected at the time t20, the rotational speed of the pump 30 is reduced to the middle rotational speed RS suitable for causing the treatment liquid to flow into only one branch passage portion (24A, 24B), and the on-off valve 26A is closed. Thereby, the treatment liquid no longer flows into the first branch passage portion 24A, and the treatment liquid flows into only the second branch passage portion 24B. The flow rate of the treatment liquid flowing through the second branch passage portion 24B is substantially not changed before and after the time t20. Therefore, the liquid treatment can be continuously performed in all the liquid treatment sections 60 connected to the second branch passage portion 24B.

[0089] If the above-described correction value (CV) is calculated using the detection value of the temperature sensor 21RA until the time t20, the above-described feedback control system is switched to use the detection value of the temperature sensor 21RB for the calculation of the correction value (CV).

[0090] Since the flow rate of the treatment liquid flowing through the electric heater assembly of the temperature adjustment section 50 is reduced by half before and after the time t20, the power supplied to the electric heater assembly of the temperature adjustment section 50 can be temporarily reduced for a predetermined period of time after the time t20. If the feedback control system has sufficient control responsiveness, such an operation can not be performed.

[0091] When it is detected that the failure has been eliminated (time t21), the rotational speed of the pump 30 is increased to the high rotational speed RW suitable for causing the treatment liquid to flow into both the first branch passage portion 24A and the second branch passage portion 24B, and the on-off valve 26A having the opening degree adjustment function is opened. Thereby, the treatment liquid also flows into the first branch passage portion 24A, and the treatment liquid flows into both the first branch passage portion 24A and the second branch passage portion 24B.

[0092] After the time t21, when the temperature and the flow rate of the treatment liquid in the first branch passage portion 24A in which the treatment liquid does not flow are stabilized (time t22), the preparation for supplying the treatment liquid to all the liquid treatment sections 60 connected to the first branch passage portion 24A is completed (a ready state). That is, the liquid treatment can be performed in all the liquid treatment sections 60 connected to the first branch passage portion 24A and the second branch passage portion 24B.

[0093] The temperature of the first branch passage portion 24A (pipe wall) in which no processing liquid has flowed until time t21 is decreasing. Therefore, it is possible to judge whether or not the temperature of the processing liquid flowing through the first branch passage portion 24A has stabilized based on the detected temperature of the temperature sensor 21RA. It is possible to judge the stability of the flow rate of the processing liquid flowing through the first branch passage portion 24A based on the detected value of the flow meter 25A.

[0094] Next, the operation of resuming the operation when a failure has occurred in the components of the liquid processing apparatus belonging to both the first branch passage portion 24A and the second branch passage portion 24B will be described with reference to the time chart of Fig. 9. Figure 10 This operation assumes the case where the failure of the components of the liquid processing apparatus belonging to the second branch passage portion 24B is eliminated, and then the failure of the components of the liquid processing apparatus belonging to the first branch passage portion 24A is also eliminated.

[0095] The state of the liquid processing apparatus at time t30 is identical to the state of the liquid processing apparatus immediately after time tll in the time chart of Fig. 8. That is, the entire region inside the circulation passage 20 is substantially filled with the processing liquid. Figure 8

[0096] It is assumed that at time t31, the failure of the components of the liquid processing apparatus belonging to the second branch passage portion 24B has been eliminated. Then, the on-off valve 26B of the second branch passage portion 24B is opened, and the pump 30 is started. Thereby, the circulation flow of the processing liquid from the tank 10 through the main passage portion 22 and the second branch passage portion 24B and back to the tank 10 is formed. At this time, the processing liquid does not flow into the first branch passage portion 24A.

[0097] The pump 30 is started at a low rotation speed (Rl), and after a predetermined time while maintaining the low rotation speed (Rl) (time t32), the rotation speed is gradually increased to a medium rotation speed (Rs). The reason for gradually increasing the rotation speed of the pump 30 as described above is to prevent damage to the filter assembly.

[0098] When the rotation speed of the pump 30 becomes the medium rotation speed (Rs) (time t33), after a predetermined delay time (for example, about 10 seconds), the monitoring of the flow rate of the processing liquid in the second branch passage portion 24B by the flow meter 25B is started. When the flow rate is stabilized (time t34), the power supply to the electric heater assembly of the temperature adjusting section 50 is started to start heating the processing liquid. The power supply to the electric heater assembly can be controlled by using the temperature adjusting method using the above-described feedback control (which can be combined with feedforward control). At this time, the detected temperature of the temperature sensor 21RB is used to calculate the above-described correction value (CV). Thereafter, when the temperature of the processing liquid is stabilized (time t35), the preparation for supplying the processing liquid to all of the liquid processing sections 60 connected to the second branch passage portion 24B is completed (ready state). ​

[0099] It is assumed that the failure of the component of the liquid processing device belonging to the first branch passage portion 24A has been eliminated at time t36. Then, the switching valve 26A of the first branch passage portion 24A is opened. Thereby, the processing liquid flows through both the first branch passage portion 24A and the second branch passage portion 24B. Monitoring of the flow rate of the processing liquid in the first branch passage portion 24A by the flow meter 25A is also started. When the temperature of the processing liquid in the first branch passage portion 24A and the flow rate of the processing liquid are stabilized (time t37), the preparation of the supply of the processing liquid to all of the liquid processing sections 60 connected to the first branch passage portion 24A is also completed (ready state). Thereby, the liquid processing device returns to the normal operation state.

[0100] An example of the configuration of the processing liquid supply section 70 will be described with reference to Figure 11 The processing liquid is DHF as described above, and the processing liquid supply section 70 generates the DHF by diluting the HF supplied from the HF supply source with the DIW supplied from the DIW supply source. The temperature of the DIW supplied from the DIW supply source as a factory production equipment can be higher than the desired temperature. In this case, if the temperature adjustment assembly of the temperature adjustment section 50 provided in the circulation passage 20 does not have sufficient cooling function, it is sometimes not possible to adjust the temperature of the processing liquid to the desired temperature (for example, a temperature close to room temperature). Figure 11 The illustrated configuration can cope with this situation.

[0101] The DIW is supplied to the tank 10 from the DIW supply source 701 via a DIW supply line 702. On the DIW supply line 702, a switching valve 703, a heat exchanger 704, a temperature sensor 705, a switching valve 706, and a switching valve 707 are provided in this order from the upstream side. Between the temperature sensor 705 and the switching valve 706, a return line 708 is branched from the DIW supply line 702. The return line 708 is provided with a switching valve 709.

[0102] The PCW as a cooling medium is supplied to the heat exchanger 704 from a PCW (plant cooling water) supply source 710 provided as a factory production equipment via a PCW supply line 711. The PCW supplied to the heat exchanger 704 is discharged via a PCW discharge line 712. On the PCW supply line 711, a switching valve 713 and a flow control device (for example, a flow control valve) 714 are provided in this order from the upstream side. On the PCW discharge line 712, a flow meter 715 and a switching valve 716 are provided in this order from the upstream side. The PCW cools the DIW by heat exchange with the DIW flowing inside the heat exchanger 704.

[0103] An example of the configuration of the temperature adjustment section 50 will be described with reference to Figure 11The operation of the processing liquid supply part 70 will be described. The operation of the processing liquid supply part 70 can also be performed under the control of the control part 100 described above. The on-off valves 703 and 709 are opened, and the on-off valve 706 is closed. The DIW supplied from the DIW supply source 701 passes through the heat exchanger 704, and then flows into the return line 708 to be returned (or discarded) to the DIW supply source 701. In this state, when the temperature detected by the temperature sensor 705 is higher than the desired temperature, the on-off valves 713 and 716 are opened, and the PCW is supplied from the PCW supply line 711 to the heat exchanger 704, and the DIW passing through the heat exchanger 704 is cooled. The flow rate control device 714 controls the flow rate of the PCW passing through the heat exchanger 704 based on the detected temperature of the temperature sensor 705 so that the temperature of the DIW detected by the temperature sensor 705 becomes the desired temperature. When the temperature of the DIW is stabilized within the desired range, the on-off valve 709 is closed and the on-off valves 706 and 707 are opened. Thus, the DIW within the desired temperature range is supplied to the tank 10.

[0104] The HF supplied from the HF supply source (not shown) can be directly supplied to the tank 10 to be mixed with the DIW in the tank 10. For example, the HF supplied from the not-shown HF supply source can be supplied to the DIW supply line 702 through a not-shown HF supply line connected between the on-off valve 706 and the on-off valve 707. In this case, the DHF generated by being mixed with the HF in the DIW supply line 702 is supplied to the tank 10.

[0105] The heat exchanger 704 is not limited to a heat exchanger that cools a high-temperature liquid, but can be a heat exchanger that heats a low-temperature liquid.

[0106] The embodiments disclosed herein are to be considered in all respects as illustrative and not restrictive, since the appended claims cover all modifications and variations of the embodiments that come within the scope of the scope and spirit of the appended claims.

Claims

1. A liquid processing device, characterized in that: include: a tank for storing the treatment liquid supplied from the treatment liquid supply unit; a circulation passage connected to the tank; a pump provided in the circulation passage; a plurality of liquid processing parts capable of performing liquid processing on the substrate; and a plurality of supply passages for supplying the processing liquid to the plurality of liquid processing parts respectively; The circulation passage includes: a main passage portion provided with the pump; and a first branch passage portion and a second branch passage portion branching from the main passage portion, wherein the treatment liquid flowing out of the tank flows into the first branch passage portion and the second branch passage portion after passing through the main passage portion, and returns to the tank through the first branch passage portion and the second branch passage portion. The plurality of liquid processing units are divided into a first processing unit group including a plurality of liquid processing units and a second processing unit group including a plurality of liquid processing units. The plurality of supply paths are divided into a first path group including a plurality of supply paths and a second path group including a plurality of supply paths, The liquid processing parts belonging to the first processing part group are connected to the first branch path portion via the supply paths belonging to the first path group. The liquid processing parts belonging to the second processing part group are connected to the second branch path portion via the supply paths belonging to the second path group. The liquid processing device also includes: a first on-off valve provided in the first branch passage portion; A second on-off valve provided in the second branch passage portion; and Control Department, The control unit is configured to control the first switch valve and the second switch valve so that when the liquid treatment device is started, the treatment liquid flows only in the first branch passage portion, and then the treatment liquid flows only in the second branch passage portion, and then the treatment liquid flows in both the first branch passage portion and the second branch passage portion.

2. The liquid processing device according to claim 1, characterized in that Also includes: a filter portion provided in the main passage portion for filtering the treatment liquid; a first temperature regulating portion provided in the first branch passage portion; and A second temperature adjustment unit is provided in the second branch passage portion.

3. The liquid treatment device according to claim 2, characterized in that: The filter unit includes a plurality of filter components arranged in parallel in a main passage portion.

4. The liquid processing device according to claim 1, characterized in that Also includes: a first filter portion provided in the first branch passage portion; and A second filter portion is provided in the second branch passage portion.

5. The liquid processing device according to claim 4, characterized in that Also includes: a first temperature regulating portion provided in the first branch passage portion; and A second temperature adjustment unit is provided in the second branch passage portion.

6. The liquid processing device according to claim 1, characterized in that The treatment liquid supply unit includes: a liquid supply line for supplying the treatment liquid itself or a liquid serving as a constituent component of the treatment liquid to the tank; and A temperature regulating mechanism is provided in the liquid supply line for regulating the temperature of the liquid.

7. The liquid processing device according to claim 6, characterized in that: The liquid is provided as a raw material for factory production, and the temperature control mechanism is a cooling heat exchanger using factory cooling water as a cooling medium.

8. The liquid processing device according to claim 1, characterized in that The control unit is configured to control the action of the pump so that when the liquid treatment device is started, when the treatment liquid flows only in the first branch passage portion or the second branch passage portion, the flow rate of the treatment liquid flowing in the first branch passage portion or the second branch passage portion is greater than the flow rate of the treatment liquid flowing in each branch passage portion when the treatment liquid flows in both the first branch passage portion and the second branch passage portion during normal operation of the liquid treatment device.

9. The liquid processing device according to claim 1, characterized in that Also includes: The control unit is configured to be able to perform the following actions: when the liquid treatment device is operating normally, when the treatment liquid flows in both the first branch passage part and the second branch passage part, if an abnormality is confirmed to have occurred in the first branch passage part, the first switch valve is closed and the discharge volume of the pump is reduced.

10. The liquid processing device according to claim 1, wherein Also includes: a temperature regulating portion provided in the circulation passage for regulating the temperature of the treatment liquid flowing in the circulation passage; a first temperature sensor provided in the circulation passage at a position downstream of the temperature adjustment unit; and a second temperature sensor provided in the circulation passage between the tank and the temperature regulating unit, The control unit is configured to perform feedback control on the temperature adjustment unit based on at least the temperature detected by the first temperature sensor. The control unit is further configured to control the temperature adjustment unit by feedforward control based on the temperature detected by the second temperature sensor when the tank is replenished with the processing liquid from the processing liquid supply unit.

11. A liquid treatment method using a liquid treatment device, characterized in that: The liquid processing device comprises: a tank for storing the treatment liquid supplied from the treatment liquid supply unit; a circulation passage connected to the tank; a pump provided in the circulation passage; a plurality of liquid processing sections capable of performing liquid processing on substrates; and a plurality of supply passages for supplying the processing liquid to the plurality of liquid processing parts respectively; The circulation passage includes: a main passage portion provided with the pump; and a first branch passage portion and a second branch passage portion branching from the main passage portion, wherein the treatment liquid flowing out of the tank flows into the first branch passage portion and the second branch passage portion after passing through the main passage portion, and returns to the tank through the first branch passage portion and the second branch passage portion. The plurality of liquid processing units are divided into a first processing unit group including a plurality of liquid processing units and a second processing unit group including a plurality of liquid processing units. The plurality of supply paths are divided into a first path group including a plurality of supply paths and a second path group including a plurality of supply paths, The liquid processing parts belonging to the first processing part group are connected to the first branch path portion via the supply paths belonging to the first path group. The liquid processing parts belonging to the second processing part group are connected to the second branch path portion via the supply paths belonging to the second path group. The liquid processing device also includes: A first on-off valve provided in the first branch passage portion; and A second on-off valve is provided in the second branch passage portion, The liquid treatment method comprises the following steps when the liquid treatment device is started, namely: opening only the first on-off valve to allow the treatment liquid to flow only in the first branch passage portion; Thereafter, opening the second on-off valve and closing the first on-off valve to allow the treatment liquid to flow only in the second branch passage portion; and Thereafter, while the second on-off valve is maintained open, the first on-off valve is opened to allow the processing liquid to flow through both the first branch passage portion and the second branch passage portion.

12. The liquid treatment method according to claim 11, characterized in that: In the step of causing the treatment liquid to flow only in the first branch passage portion, the flow rate of the treatment liquid flowing in the first branch passage portion, and in the step of causing the treatment liquid to flow only in the second branch passage portion, the flow rate of the treatment liquid flowing in the second branch passage portion, are greater than the flow rate of the treatment liquid flowing in each branch passage portion when the treatment liquid flows in both the first branch passage portion and the second branch passage portion during normal operation of the liquid treatment device.

13. The liquid treatment method according to claim 11, characterized in that: In the liquid processing method, when the liquid processing device is operating normally, when the processing liquid flows in both the first branch passage part and the second branch passage part, if an abnormality is confirmed in the first branch passage part, the processing liquid is stopped from flowing to the first branch passage part.

14. The liquid treatment method according to claim 11, wherein: The liquid treatment method includes a temperature adjustment step of adjusting the temperature of the treatment liquid flowing in the circulation passage by a temperature adjustment unit provided in the circulation passage. The temperature adjustment step comprises: During normal operation of the liquid processing apparatus, feedback control is performed on the temperature regulating section based on the temperature of the processing liquid detected by a first temperature sensor provided in the circulation passage downstream of the temperature regulating section; and When the treatment liquid is replenished to the tank from the treatment liquid supply part, the temperature regulating part is controlled by using both the feedforward control based on the temperature of the second temperature sensor and the feedback control, wherein the second temperature sensor is arranged between the tank and the temperature regulating part in the circulation path.

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