A laser scanning device and method based on on-chip soliton frequency comb without mechanical scanning

Abstract

The present invention relates to a laser scanning device and method based on on-chip soliton frequency comb without mechanical scanning. The laser scanning device includes a broadband laser, an arbitrary signal generator, an electro-optical phase modulator, a core frequency comb chip and a two-dimensional optical phased array chip; the output end of the broadband laser is connected to the light source input port of the electro-optical phase modulator, and the output port of the arbitrary signal generator is connected to the microwave signal input port of the electro-optical phase modulator; the waveform output port of the electro-optical phase modulator is connected to the input port of the core frequency comb chip, and the output port of the core frequency comb chip is connected to the input port of the two-dimensional optical phased array chip. The present invention utilizes the principle of frequency modulated continuous wave coherent ranging, generates parallel multi-channel light sources through frequency comb chips, combines optical phased arrays and gratings to achieve two-dimensional non-mechanical scanning, and adopts a planar array light scanning method, which has faster scanning speed, higher efficiency and longer detection distance.

Description

Technical Field

[0001] The present invention belongs to the field of optoelectronic technology, and more specifically, relates to a laser scanning device and method based on an on-chip soliton frequency comb without mechanical scanning. Background Art

[0002] At present, the scanning devices used for vehicle-mounted laser radar mainly include mechanical, micro-electromechanical system micro-mirror (MEMS, Micro-Electro-Mechanical System), phased-control and Flash beam deflection control technologies. The mechanical laser radar scanning device is installed on the roof and rotates at a certain speed. This method of using a rotating polygonal mirror to control the light beam has a slow scanning speed due to the large mechanical inertia. The MEMS micromirror is improved on the basis of the mechanical type, integrating all mechanical components into a single chip and using semiconductor technology to produce it. It does not require a mechanical rotating motor, but controls the light beam electrically, but the MEMS micromirror still has tiny oscillations that limit the scanning speed. The phased-control laser radar device does not have vibrating components and has the advantages of fast scanning speed, high accuracy, good controllability and low cost. For example, patent CN110174661A, published on August 27, 2019, discloses an optical phased array two-dimensional laser radar scanning chip based on polarization. However, currently, automotive laser radars based on mechanical, MEMS micromirrors and phased-control scanning devices all use the principle of time-of-flight ranging. Laser radars based on the time-of-flight principle map distance information to the delay of reflected laser pulses through point-by-point scanning. Although phased-control automotive laser radars achieve mechanical-free scanning, the point-by-point scanning method limits the speed of radar ranging. At the same time, laser radars based on time-of-flight are susceptible to interference under low visibility and high background light conditions. Summary of the invention

[0003] In order to overcome at least one defect in the above-mentioned prior art, the present invention provides a laser scanning device and method based on an on-chip soliton frequency comb without mechanical scanning, which effectively improves the scanning speed and scanning efficiency.

[0004] In order to solve the above technical problems, the technical solution adopted by the present invention is: a laser scanning device without mechanical scanning based on an on-chip soliton frequency comb, comprising a broadband laser, an arbitrary signal generator, an electro-optical phase modulator, a core frequency comb chip and a two-dimensional optical phased array chip; the output end of the broadband laser is connected to the light source input port of the electro-optical phase modulator, and the output port of the arbitrary signal generator is connected to the microwave signal input port of the electro-optical phase modulator; the waveform output port of the electro-optical phase modulator is connected to the input port of the core frequency comb chip, and the output port of the core frequency comb chip is connected to the input port of the two-dimensional optical phased array chip. The laser generated by the broadband laser and the triangular wave linear frequency modulation signal generated by the arbitrary signal generator are input into the photoelectric phase modulator to generate a frequency-chirped laser signal; the chirped laser signal modulated by the photoelectric phase modulator is coupled to the core frequency comb chip through an optical coupler; the core frequency comb chip can generate dissipative Kerr solitons, and under the action of nonlinear frequency conversion in the microring resonator, a series of equally spaced comb teeth in the frequency domain are generated to form multiple coherent channel optical frequency combs; then the multiple coherent channel light sources are coupled into the two-dimensional optical phased array chip through the coupler, and the two-dimensional deflection control of the light beam is realized through the grating antenna on the two-dimensional optical phased array chip.

[0005] The present invention utilizes the principle of frequency modulated continuous wave coherent ranging, generates a parallel multi-channel light source through an on-chip soliton frequency comb chip, and combines an optical phased array and a grating to achieve two-dimensional non-mechanical scanning. Compared with the existing vehicle-mounted laser radar ranging scanning technology, the present invention adopts a planar array light scanning method, which has faster scanning speed, higher efficiency and longer detection distance.

[0006] In one embodiment, the two-dimensional optical phased array chip includes a coupler, a beam splitter, a two-dimensional optical phased array on a silicon substrate, and a grating antenna; the input port of the coupler is connected to the output port of the core frequency comb chip, the output port of the coupler is connected to the input port of the beam splitter, the output port of the beam splitter is connected to the input port of the two-dimensional optical phased array on the silicon substrate, and the output port of the two-dimensional optical phased array on the silicon substrate is connected to the grating antenna. The coherent channel light source generated by the core frequency comb chip is incident on the two-dimensional optical phased array chip through the coupler, and at the same time, the incident light coupled into the two-dimensional optical phased array chip is divided into multiple input lights through the beam splitter, and input into the two-dimensional optical phased array on the silicon substrate; the two-dimensional optical phased array on the silicon substrate performs independent phase modulation on each input light through the thermo-optical effect, changes the phase of the light in the waveguide, changes the beam steering, and finally emits the output light through multiple non-uniformly distributed spaced grating antennas.

[0007] In one embodiment, the core frequency comb chip includes a substrate, a micro-ring resonant cavity and a straight waveguide, wherein the micro-ring resonant cavity and the straight waveguide are arranged on the top of the substrate, and the micro-ring resonant cavity is coupled to the straight waveguide. The chirped laser signal modulated by the photoelectric phase modulator is coupled to the core frequency comb chip through an optical coupler; the core frequency comb chip can generate dissipative Kerr solitons, and under the action of nonlinear frequency conversion in the micro-ring resonant cavity, a series of equally spaced comb teeth in the frequency domain are generated to form multiple coherent channel optical frequency combs.

[0008] The parallel multi-channel light source is generated by an on-chip microcavity soliton optical frequency comb based on the Kerr nonlinearity of the microcavity medium. The process of generating a microcavity optical frequency comb is as follows: a beam of laser light emitted by a continuous light laser is coupled into the microcavity, and a series of equally spaced comb teeth are generated in the frequency domain under the action of nonlinear frequency conversion in the cavity. In this process, degenerate four-wave mixing first generates some sidebands near the pump frequency, and then degenerate and non-degenerate four-wave mixing work together to generate more sidebands, which are finally cascaded to fill every resonant frequency within a certain range near the pump frequency to form an optical frequency comb. Dissipative Kerr solitons are generated by pulses that continuously circulate in an integrated silicon nitride microring resonator through four-photon interactions mediated by Kerr nonlinearity. The dissipative soliton spectral lines have good coherence and stable envelopes, which are suitable for application in frequency modulated continuous wave coherent detection of vehicle-mounted laser radar. When combined with triangular frequency modulation of narrow linewidth pump lasers, this effect generates a large-scale parallel array of independent FMCW lasers.

[0009] In one embodiment, the core material of the micro-ring resonator is silicon nitride; the micro-ring radius of the micro-ring resonator is 50um to 200um; the frequency comb frequency output by the core frequency comb chip is 190THz-200THz. In this way, the core frequency comb chip can provide at least 90 coherent light source channels.

[0010] In one of the embodiments, the electro-optical phase modulator is coupled to the core frequency comb chip via a coupler.

[0011] In one of the embodiments, the core frequency comb chip can generate dissipative Kerr solitons, and under the action of nonlinear frequency conversion in the microring resonant cavity, generate a series of equally spaced comb teeth in the frequency domain to form multiple coherent channel optical frequency combs.

[0012] In one embodiment, the central wavelength of the laser generated by the broadband laser is 1100nm to 1600nm.

[0013] In one embodiment, the arbitrary signal generator emits a triangular wave linear frequency modulation signal with a bandwidth of 1 GHz-5 GHz and a modulation rate of 100 kHz-10 MHz.

[0014] In one embodiment, the beam splitter is a star-shaped beam splitter; and the grating antenna is a multi-path non-uniformly distributed spaced grating antenna.

[0015] The present invention also provides a laser scanning method based on an on-chip soliton frequency comb without mechanical scanning, using the above-mentioned laser scanning device based on an on-chip soliton frequency comb without mechanical scanning, comprising the following steps:

[0016] The laser light generated by the broadband laser and the triangular wave linear frequency modulation signal generated by the arbitrary signal generator are input into the photoelectric phase modulator to generate a frequency chirped laser signal;

[0017] The chirped laser signal modulated by the optoelectronic phase modulator is coupled to the core frequency comb chip through an optical coupler;

[0018] The core frequency comb chip generates dissipative Kerr solitons. Under the action of nonlinear frequency conversion in the microring resonator, a series of equally spaced comb teeth are generated in the frequency domain, forming multiple coherent channel optical frequency combs, that is, multiple coherent channel light sources are generated.

[0019] The coherent channel light source is incident on the two-dimensional optical phased array chip through the coupler. At the same time, the incident light coupled into the two-dimensional optical phased array chip is divided into multiple input lights through the beam splitter and input into the two-dimensional optical phased array on the silicon substrate.

[0020] The two-dimensional optical phased array on the silicon substrate performs independent phase modulation on each input light through the thermo-optic effect, and finally emits the outgoing light through multiple non-uniformly distributed spaced grating antennas.

[0021] Compared with the prior art, the beneficial effects are:

[0022] 1. The present invention provides a laser scanning device and method without mechanical scanning based on an on-chip soliton frequency comb, which solves the shortcomings of mechanical inertia, slow measurement speed and low scanning accuracy of the existing mechanical scanning system of vehicle-mounted laser radar, and can meet the actual demand for scanning speed in the application of high-level autonomous driving vehicle-mounted laser radar;

[0023] 2. The present invention provides a laser scanning device and method based on on-chip soliton frequency comb without mechanical scanning. The on-chip soliton optical frequency comb chip generates a parallel multi-channel light source. In practical applications, a planar array of light can be generated for two-dimensional non-mechanical scanning. Compared with point-by-point scanning phased-control radar, the use of planar array light for ranging improves scanning efficiency and can respond faster to fast-changing and complex environments.

[0024] 3. The present invention provides a mechanical scanning-free laser scanning device and method based on an on-chip soliton frequency comb. A parallel multi-channel light source is generated by an on-chip soliton optical frequency comb chip. Compared with a flash-type laser radar using a vertical cavity surface emitting laser, the detection distance is improved, and targets can be detected at a farther distance, thereby increasing the response time to obstacles. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic diagram of the connection relationship structure of the laser scanning device of the present invention.

[0026] Figure 2 It is a schematic diagram of the structure of the two-dimensional optical phased array chip of the present invention.

[0027] Figure 3 It is a schematic diagram of the structure of the core frequency comb chip of the present invention.

[0028] Figure 4 It is a schematic diagram of the principle diagram of frequency modulated continuous wave coherent ranging adopted by the present invention.

[0029] Figure 5 It is a schematic diagram of the working principle of the optical phased array adopted in the present invention.

[0030] Figure 6 It is a schematic diagram of the working principle of the diffraction grating adopted in the present invention. DETAILED DESCRIPTION

[0031] The drawings are only for illustrative purposes and should not be construed as limiting the present invention. To better illustrate the present embodiment, some parts in the drawings may be omitted, enlarged or reduced, and do not represent the size of the actual product. For those skilled in the art, it is understandable that some well-known structures and their descriptions may be omitted in the drawings. The positional relationships described in the drawings are only for illustrative purposes and should not be construed as limiting the present invention.

[0032] like Figure 1As shown, a laser scanning device without mechanical scanning based on an on-chip soliton frequency comb includes a broadband laser 1, an arbitrary signal generator 2, an electro-optical phase modulator 3, a core frequency comb chip 4 and a two-dimensional optical phased array chip 5; the output end of the broadband laser 1 is connected to the light source input port of the electro-optical phase modulator 3, and the output port of the arbitrary signal generator 2 is connected to the microwave signal input port of the electro-optical phase modulator 3; the waveform output port of the electro-optical phase modulator 3 is connected to the input port of the core frequency comb chip 4 through a coupler 51; the output port of the core frequency comb chip 4 is coupled and connected to the input port of the two-dimensional optical phased array chip 5. The laser generated by the broadband laser 1 and the triangular wave linear frequency modulation signal generated by the arbitrary signal generator 2 are input into the photoelectric phase modulator to generate a frequency-chirped laser signal; the chirped laser signal modulated by the photoelectric phase modulator is coupled to the core frequency comb chip 4 through the optical coupler 51; the core frequency comb chip 4 can generate dissipative Kerr solitons, and under the action of nonlinear frequency conversion in the microring resonator 42, a series of equally spaced comb teeth in the frequency domain are generated to form multiple coherent channel optical frequency combs; then the multiple coherent channel light sources are coupled into the two-dimensional optical phased array chip 5 through the coupler 51, and the two-dimensional deflection control of the light beam is realized through the grating antenna 54 on the two-dimensional optical phased array chip 5.

[0033] The present invention utilizes the principle of frequency modulated continuous wave coherent ranging, generates a parallel multi-channel light source through an on-chip soliton frequency comb chip, and combines an optical phased array and a grating to achieve two-dimensional non-mechanical scanning. Compared with the existing vehicle-mounted laser radar ranging scanning technology, the present invention adopts a planar array light scanning method, which has faster scanning speed, higher efficiency and longer detection distance.

[0034] Specifically, the principle of FMCW coherent ranging is that the signal is scanned and transmitted, and the time-frequency information of the return signal is determined by delayed homodyne detection. Figure 4 As shown, assuming triangular laser scanning, with offset bandwidth B and period T, the distance information (i.e., flight time Δt) is mapped to the beat note frequency, i.e.:

[0035] F = Δt × 2B / T (for static objects)

[0036] Due to the object's relative velocity v, the returning laser light is detected with a Doppler shift:

[0037] Δf=k·v / π

[0038] where k is the wave number and v is the velocity of the illuminated object. As a result, the homodyne return signal of a moving object consists of two frequencies for the upward and downward laser scans, namely:

[0039] f u =F+Δf D f d =|-F+Δf D|

[0040] Then the distance s and speed v of the measured object are expressed as:

[0041]

[0042]

[0043] By using a low-bandwidth detector and a digitizer to zero out the reflected signals of the original comb teeth channel by channel, the coherent ranging signal can be recovered and reconstructed simultaneously, thereby obtaining the offset of each comb line and giving the speed and distance (s offset, v offset) of each pixel.

[0044] In one embodiment, if Figure 2 As shown, the two-dimensional optical phased array chip 5 includes a coupler 51, a beam splitter 52, a two-dimensional optical phased array on a silicon substrate 53, and a grating antenna 54; the input port of the coupler 51 is connected to the output port of the core frequency comb chip 4, the output port of the coupler 51 is connected to the input port of the beam splitter 52, the output port of the beam splitter 52 is connected to the input port of the two-dimensional optical phased array on a silicon substrate 53, and the output port of the two-dimensional optical phased array on a silicon substrate 53 is connected to the grating antenna 54. The coherent channel light source generated by the core frequency comb chip 4 is incident on the two-dimensional optical phased array chip 5 through the coupler 51. At the same time, the incident light coupled into the two-dimensional optical phased array chip 5 is divided into multiple input lights through the beam splitter 52 and input to the two-dimensional optical phased array on a silicon substrate 53; the two-dimensional optical phased array on a silicon substrate 53 performs independent phase modulation on each input light through the thermo-optical effect, changes the phase of the light in the waveguide, changes the beam steering, and finally emits the output light through the multiple non-uniformly distributed spaced grating antennas 54.

[0045] The working principle of the optical phased array is to adjust the phase relationship between the light waves emitted from each phased unit so that they interfere constructively in the set direction and interfere destructively in other directions. The final result is that a high-intensity light beam is generated in that direction, and the light intensity in other directions is close to zero, thereby achieving beam deflection. The principle diagram is shown in the figure below. Figure 5 As shown, a beam of parallel light propagates along the positive direction of the Z axis, and the phase modulator is placed along the X axis. The phase modulation effect of the phase modulator on the incident light can be expressed as:

[0046] Δφ=ksin(θ0)x

[0047] After the incident light is modulated by the phase modulator, it is deflected by an angle of θ0, where k is the wave number. The optical waveguide phased array based on the thermo-optic effect achieves angular deflection of the direction by changing the heating power and thus changing the effective refractive index of the waveguide and the phase of the light in the waveguide through the thermo-optic effect.

[0048] The working principle of diffraction grating is as follows Figure 6 As shown. The grooves on the grating cause the light beam to diffract. Due to the diffraction of light, light of different wavelengths is diffracted in different directions after passing through the grating, and the light diffracted by each groove interferes with each other, resulting in different directions of the maximum interference of light of different wavelengths, resulting in spatial dispersion. The distance between two adjacent grooves on the grating is d. Assume that the incident light beam with a wavelength of λ is incident at an angle α to the grating normal, and a beam of diffracted light is at an angle β to the normal. For the incident light rays ray1 and ray2 from the two adjacent grooves, before reaching the grating, the light ray2 travels an additional optical path of dsinα, and after being diffracted by the grating, the light ray1 travels an additional optical path of dsinβ. Therefore, the optical path difference between the diffracted light rays ray1 and ray2 after being diffracted by the grating is d(sinα-sinβ). Diffracted light interferes. According to the principle of interference, when the optical path difference is an integer multiple of the wavelength, it has an enhancement effect. Therefore, for light with a wavelength of λ, its diffraction direction should satisfy the equation:

[0049] d(sinα±sinβ)=mλ(m is a positive integer)

[0050] Where m is the diffraction order. If the diffracted light and the incident light are on the same side of the normal, the above formula takes a positive sign.

[0051] In one embodiment, if Figure 3 As shown, the core frequency comb chip 4 includes a substrate 41, a microring resonant cavity 42 and a straight waveguide 43. The microring resonant cavity 42 and the straight waveguide 43 are arranged on the top of the substrate 41, and the microring resonant cavity 42 is coupled and connected with the straight waveguide 43. The core frequency comb chip 4 can generate dissipative Kerr solitons. Under the action of nonlinear frequency conversion in the microring resonant cavity 42, a series of equally spaced comb teeth in the frequency domain are generated to form multiple coherent channel optical frequency combs. The core material of the microring resonant cavity 42 is silicon nitride; the microring radius of the microring resonant cavity 42 is 50um to 200um; in this embodiment, it is 100um, and the frequency comb frequency output by the core frequency comb chip 4 is 190THz-200THz. In this way, the core frequency comb chip 4 can provide at least 90 coherent light source channels.

[0052] In another embodiment, the central wavelength of the laser generated by the broadband laser 1 is 1100nm-1600nm. The arbitrary signal generator 2 emits a triangular wave linear frequency modulation signal with a bandwidth of 1GHz-5GHz and a modulation rate of 100kHz-10MHz. In this embodiment, the bandwidth is 1.5GHz and the modulation rate is 100kHz.

[0053] In one embodiment, the beam splitter 52 is a star-shaped beam splitter 52, which is divided into 128 paths. The two-dimensional optical phased array 53 on the silicon substrate adopts a 0.4um wide ridge waveguide, the grating antenna 54 adopted is 128 paths with uneven distribution, and weakly coupled shallow grating etching is used to obtain a smaller beam width, and the etching depth is 16nm.

[0054] In another embodiment, the above laser scanning device without mechanical scanning based on on-chip soliton frequency comb is used, and its specific scanning method includes the following steps:

[0055] The broadband laser 1 generates a laser with a central wavelength of 1100nm to 1600nm and the triangular wave linear frequency modulation signal generated by the arbitrary signal generator 2 is input into the photoelectric phase modulator to generate a frequency chirped laser signal;

[0056] The chirped laser signal modulated by the photoelectric phase modulator is coupled to the core frequency comb chip 4 through the optical coupler 51;

[0057] The core frequency comb chip 4 generates dissipative Kerr solitons, and under the effect of nonlinear frequency conversion in the micro-ring resonator 42, generates a series of equally spaced comb teeth in the frequency domain, forming multiple coherent channel optical frequency combs, that is, generating at least 90 coherent channel light sources;

[0058] The coherent channel light source is incident on the two-dimensional optical phased array chip 5 through the coupler 51. At the same time, the incident light coupled into the two-dimensional optical phased array chip 5 is split into 128 input lights through the beam splitter 52 and input into the two-dimensional optical phased array 53 on the silicon substrate.

[0059] The two-dimensional optical phased array 53 on the silicon substrate performs independent phase modulation on each input light through the thermo-optic effect, and finally emits the output light through 128 non-uniformly distributed spaced grating antennas 54.

[0060] A scanning range of 80° is achieved in the direction perpendicular to the waveguide 43, and a scanning range of 17° can be achieved along the waveguide direction. The beam width of 0.14°×0.14° can achieve 500×90 resolvable scanning points in the far-field two-dimensional plane. It can be applied to vehicle-mounted lidar ranging work to achieve two-dimensional mechanical-free scanning.

[0061] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0062] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present invention. A person skilled in the art may change, modify, replace and vary the above embodiments within the scope of the present invention.

[0063] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the embodiments here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. A laser scanning device without mechanical scanning based on an on-chip soliton frequency comb, characterized in that: It comprises a broadband laser (1), an arbitrary signal generator (2), an electro-optical phase modulator (3), a core frequency comb chip (4) and a two-dimensional optical phased array chip (5); the output end of the broadband laser (1) is connected to the light source input port of the electro-optical phase modulator (3), the output port of the arbitrary signal generator (2) is connected to the microwave signal input port of the electro-optical phase modulator (3); the waveform output port of the electro-optical phase modulator (3) is connected to the input port of the core frequency comb chip (4), and the output port of the core frequency comb chip (4) is connected to the input port of the two-dimensional optical phased array chip (5); The two-dimensional optical phased array chip (5) comprises a coupler (51), a beam splitter (52), a two-dimensional optical phased array (53) on a silicon substrate, and a grating antenna (54); the input port of the coupler (51) is connected to the output port of the core frequency comb chip (4), the output port of the coupler (51) is connected to the input port of the beam splitter (52), the output port of the beam splitter (52) is connected to the input port of the two-dimensional optical phased array (53) on the silicon substrate, and the output port of the two-dimensional optical phased array (53) on the silicon substrate is connected to the grating antenna (54); the core The frequency comb chip (4) comprises a substrate (41), a micro-ring resonant cavity (42) and a straight waveguide (43); the micro-ring resonant cavity (42) and the straight waveguide (43) are arranged on the top of the substrate (41); the micro-ring resonant cavity (42) and the straight waveguide (43) are coupled and connected; the core frequency comb chip (4) is capable of generating dissipative Kerr solitons, and under the action of nonlinear frequency conversion in the micro-ring resonant cavity (42), a series of equally spaced comb teeth in the frequency domain are generated to form a plurality of coherent channel optical frequency combs; the central wavelength of the laser generated by the broadband laser (1) is 1100nm~1600nm.

2. The laser scanning device without mechanical scanning based on on-chip soliton frequency comb according to claim 1, characterized in that: The core material of the micro-ring resonant cavity (42) is silicon nitride; the micro-ring radius of the micro-ring resonant cavity (42) is 50 um to 200 um; and the frequency of the frequency comb output by the core frequency comb chip (4) is 190 THz to 200 THz.

3. The laser scanning device without mechanical scanning based on on-chip soliton frequency comb according to claim 1, characterized in that: The electro-optical phase modulator (3) is coupled to the core frequency comb chip (4) via a coupler (51).

4. The laser scanning device without mechanical scanning based on on-chip soliton frequency comb according to claim 1, characterized in that: The arbitrary signal generator (2) emits a triangular wave linear frequency modulation signal with a bandwidth of 1 GHz-5 GHz and a modulation rate of 100 kHz-10 MHz.

5. The laser scanning device without mechanical scanning based on on-chip soliton frequency comb according to any one of claims 1 to 4, characterized in that: The beam splitter (52) is a star-shaped beam splitter (52); and the grating antenna (54) is a multi-path non-uniformly distributed spaced grating antenna (54).

6. A laser scanning method without mechanical scanning based on on-chip soliton frequency comb, characterized in that: The laser scanning device without mechanical scanning based on on-chip soliton frequency comb according to any one of claims 1 to 5 comprises the following steps: The laser light generated by the broadband laser (1) and the triangular wave linear frequency modulation signal generated by the arbitrary signal generator (2) are input into the photoelectric phase modulator to generate a frequency chirped laser signal; The chirped laser signal modulated by the photoelectric phase modulator is coupled to the core frequency comb chip (4) through an optical coupler (51); The core frequency comb chip (4) generates dissipative Kerr solitons, and under the action of nonlinear frequency conversion in the micro-ring resonant cavity (42), generates a series of equally spaced comb teeth in the frequency domain, forming multiple coherent channel optical frequency combs, that is, generating multiple coherent channel light sources; The coherent channel light source is incident on the two-dimensional optical phased array chip (5) through a coupler (51), and at the same time, the incident light coupled into the two-dimensional optical phased array chip (5) is split into multiple input lights through a beam splitter (52) and input into the two-dimensional optical phased array (53) on the silicon substrate; The two-dimensional optical phased array (53) on the silicon substrate performs independent phase modulation on each input light through the thermo-optical effect, and finally emits output light through multiple non-uniformly distributed spaced grating antennas (54).

Images