Mask

Abstract

The present application discloses a mask plate, which belongs to the field of display technology. The mask plate includes: a frame and a mask bracket located on the frame, the mask bracket includes a plurality of first support bars and a plurality of shielding bars installed on the frame, the plurality of first support bars and the plurality of shielding bars are arranged alternately, and the shielding bar has a first groove on the side facing the evaporation material; the mask plate also includes at least one second support bar, each second support bar has a corresponding first support bar, and the second support bar is stacked on the corresponding first support bar; the mask plate also includes a plurality of mask bars located on the frame provided with the second support bar. The structure of the double-layer support bar improves the support effect for the mask bar and reduces the sagging amount of the mask bar. The problem of poor bonding between the mask bar and the substrate due to the large sagging amount of the mask bar is solved, and the effect of reducing the sagging amount of the mask bar and improving the tightness of the bonding between the mask bar and the substrate is achieved.

Description

Technical Field

[0001] The present application relates to the field of display technology, and in particular to a mask plate. Background Art

[0002] At present, when making the light-emitting layer of the display panel, the electroluminescent material is first sublimated by evaporation, and then deposited on the substrate that is attached to the mask after passing through the mask, thereby forming an evaporation pattern to achieve the purpose of luminescence. Therefore, the performance of the mask is directly related to the quality of the OLED display panel.

[0003] A mask plate comprises a frame, a mask strip and a mask bracket arranged on the frame, wherein the mask bracket comprises a plurality of support strips and shielding strips, and the mask strip is supported by the support strips to prevent the mask strip from sagging too much.

[0004] In the above method, the support force of the support strips on the mask strips may be insufficient, resulting in a large amount of sagging of the mask strips, which in turn leads to poor performance of the mask plate. Summary of the invention

[0005] The embodiment of the present application provides a mask plate, and the technical solution is as follows:

[0006] According to a first aspect of the present application, a mask plate is provided, the mask plate comprising:

[0007] frame;

[0008] and a mask support located on the frame, the mask support comprising a plurality of first support bars and a plurality of shielding bars mounted on the frame, the plurality of first support bars and the plurality of shielding bars being arranged in a staggered manner, and a side of the shielding bar facing the evaporation material having a first groove;

[0009] and, at least one second support bar, each of the second support bars having a corresponding first support bar, the second support bar being stacked on the corresponding first support bar;

[0010] and a plurality of mask strips located on the frame provided with the second support strips.

[0011] Optionally, the plurality of first support bars are arranged on the frame along a first direction;

[0012] When the number of the plurality of first support bars is an even number, the second support bars are stacked on 2n first support bars in the middle of the plurality of first support bars, and n is greater than or equal to 1;

[0013] When the number of the plurality of first support bars is an odd number, the second support bars are stacked on 2m+1 first support bars located in the middle of the plurality of first support bars, and m is greater than or equal to 0.

[0014] Optionally, the orthographic projection of the second support bar on the corresponding first support bar is located in the corresponding first support bar.

[0015] Optionally, the second support bar is welded to the corresponding first support bar.

[0016] Optionally, the plurality of shielding strips are arranged on the frame along a second direction, and the second direction is perpendicular to the first direction;

[0017] Two edges of the mask strip along the length direction are respectively overlapped on two adjacent shielding strips, and the first groove on the shielding strip includes a first strip-shaped groove extending along the length direction of the shielding strip.

[0018] Optionally, the first groove includes a plurality of first strip-shaped grooves, and the plurality of first strip-shaped grooves are arranged along the length direction of the shielding strip.

[0019] Optionally, the mask strip has a mask area divided by the plurality of first support strips, and the mask area is located on both sides of the first support strip;

[0020] The shielding strip has a first strip-shaped grooves, and the first strip-shaped grooves are located on both sides of the first supporting strip.

[0021] Optionally, the mask plate also includes an alignment mask strip, which is located at the edge of the mask bracket, and the two edges of the alignment mask strip along the length direction are respectively overlapped on the shielding strips at the edge of the frame and the mask bracket, and the side of the alignment mask strip facing the evaporation material has a second groove.

[0022] Optionally, an orthographic projection of the frame on the alignment mask strip overlaps an area where the second groove is located;

[0023] An orthographic projection of the shielding strip at the edge of the mask support on the alignment mask strip overlaps with an area where the second groove is located.

[0024] Optionally, a side of the alignment mask strip facing the evaporation material has a plurality of the second grooves.

[0025] The beneficial effects brought by the technical solution provided by the embodiment of the present application include at least: providing a mask plate, on which a second support bar is stacked on part of the first support bar of the mask plate, so that the double-layer support bar structure improves the support effect for the mask bar and reduces the sagging amount of the mask bar. The problem of poor adhesion between the mask bar and the substrate due to the large sagging amount of the mask bar is solved, and the effect of reducing the sagging amount of the mask bar and improving the tightness of the adhesion between the mask bar and the substrate is achieved.

[0026] In addition, the shielding strip of the mask plate has a groove on the side facing the evaporated material, and the groove is used to collect the evaporated material that enters the gap between the shielding strip and the substrate during the evaporation process, thereby preventing this part of the evaporated material from continuing to diffuse and cause contamination. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0028] Figure 1 is a structural diagram of a mask plate provided in an embodiment of the present application;

[0029] Figure 2 yes Figure 1 A structural diagram of a mask support and a frame of the mask plate shown;

[0030] Figure 3 yes Figure 1 A cross-sectional view of the mask shown;

[0031] Figure 4 It is a schematic diagram of the evaporation process in the mask manufacturing process;

[0032] Figure 5 It is a schematic diagram of the possible diffusion paths of electroluminescent materials during evaporation;

[0033] Figure 6 yes Figure 1 A schematic structural diagram of an alignment mask strip in the mask plate shown;

[0034] Figure 7 is a partial diagram of a second groove of the alignment mask strip;

[0035] Figure 8 yes Figure 1 A schematic diagram of the structure of another alignment mask strip in the mask plate shown.

[0036] The above drawings have shown clear embodiments of the present application, which will be described in more detail later. These drawings and text descriptions are not intended to limit the scope of the present application in any way, but to illustrate the concept of the present application to those skilled in the art by referring to specific embodiments. DETAILED DESCRIPTION

[0037] In order to make the objectives, technical solutions and advantages of the present application clearer, the implementation methods of the present application will be further described in detail below in conjunction with the accompanying drawings.

[0038] Figure 1 : is a structural diagram of a mask plate provided in an embodiment of the present application, the mask plate 1 comprises:

[0039] A frame 101, and a mask support 102 located on the frame 101, the mask support 102 includes a plurality of first support bars 1021 and a plurality of shielding bars 1022 installed on the frame 101, the plurality of first support bars 1021 and the plurality of shielding bars 1022 are arranged alternately, and the shielding bar 1022 has a first groove 10221 on the side facing the evaporation material.

[0040] The frame 101 may be a metal frame, used as a support frame for the first howling sheet 1021 and the cover sheet 1022. The first howling sheet 1021 and the cover sheet 1022 may be welded to the frame 101 by using a tensioning machine and a laser. Figure 1 As shown, a plurality of first support bars 1021 and a plurality of shielding bars 1022 are arranged alternately, and the length direction of the first support bars 1021 may form a 90 degree angle with the length direction of the shielding bars 1022. The first groove 10221 is located on the side of the shielding bars 1022 facing the evaporation material.

[0041] Figure 2 yes Figure 1 The structure diagram of the mask support and frame of the mask plate shown in FIG. Figure 2 As shown, the mask plate 1 also includes at least one second support bar 103, each second support bar 103 has a corresponding first support bar 1021, and the second support bar 103 is stacked on the corresponding first support bar 1021. Such a double-layer support bar structure has high strength and strong supporting force. The material of the second support bar can be the same as that of the first support bar.

[0042] The mask plate 1 further includes a plurality of mask strips 104 located on a frame provided with second support strips 103. Figure 1 and Figure 2 As shown, the length direction of the mask strip (English name: Fine Metal Mask Sheet; abbreviation: FMM Sheet) 104 is the same as the length direction of the shielding strip 1022. The mask strip 104 can be arranged on a frame provided with a second support strip 103 by a stretching process, and the mask strip 104 is welded to the frame, so that the mask plate 1 can be manufactured. And because the supporting force of the double-layer support strip structure is strong, the sagging amount of the mask strip 104 caused by its own gravity can be reduced, so that the mask strip 104 and the substrate are more closely attached, the evaporation accuracy is higher, and the effect is better.

[0043] In summary, the embodiment of the present application provides a mask plate, in which a second support bar is stacked on a portion of the first support bars of the mask plate, so that the double-layer support bar structure improves the support effect for the mask bar and reduces the sagging amount of the mask bar. The problem of the large sagging amount of the mask bar causing the poor bonding between the mask bar and the substrate is solved, and the effect of reducing the sagging amount of the mask bar and improving the tightness of the bonding between the mask bar and the substrate is achieved.

[0044] In addition, the shielding strip of the mask plate has a groove on the side facing the evaporated material, and the groove is used to collect the evaporated material that enters the gap between the shielding strip and the substrate during the evaporation process, thereby preventing this part of the evaporated material from continuing to diffuse and cause contamination.

[0045] Optionally, a plurality of first support bars 1021 are arranged on the frame 101 along the first direction x. Figure 2 As shown, the first direction x is a direction perpendicular to the length direction of the first support bars 1021 , and a plurality of first support bars 1021 are sequentially arranged on the frame 101 along the first direction x at a certain interval.

[0046] When the number of the plurality of first support bars 1021 is an even number, the second support bars 103 are stacked on the 2n first support bars 1021 located in the middle among the plurality of first support bars 1021, where n is greater than or equal to 1. Exemplarily, when the number of the plurality of first support bars 1021 is 6 and n=1, the second support bars 103 stacked with the 2×1 first support bars 1021 are arranged on the 2×1 first support bars 1021 located in the middle, that is, the second support bars 103 are arranged on the third and fourth first support bars 1021 among the six first support bars 1021 (that is, the first support bars 1021 are numbered in sequence from one end thereof, namely, the first, second, third, ...); similarly, when the number of the plurality of first support bars 1021 is 6 and n=2, the second support bars 103 are arranged on the second, third, fourth, and fifth first support bars 1021 among the six first support bars 1021.

[0047] When the number of the plurality of first support bars 1021 is an odd number, the second support bar 103 is stacked on the 2m+1 first support bars 1021 located in the middle among the plurality of first support bars 1021, where m is greater than or equal to 0. Exemplarily, when the number of the plurality of first support bars 1021 is 7 and m=0, the second support bar 103 is stacked on the 2×0+1 first support bars 1021 located in the middle, that is, the second support bar 103 is arranged on the fourth first support bar 1021 among the 7 first support bars 1021; similarly, when the number of the plurality of first support bars 1021 is 7 and m=1, the second support bar 103 is arranged on the third, fourth and fifth first support bars 1021 among the 7 first support bars 1021.

[0048] Figure 3 yes Figure 1 The cross-sectional view of the mask plate at the position bb is shown, (for clarity of the view, Figure 3 The first support bar and the second support bar are omitted, and the substrate G is shown, but it should be noted that the substrate G may not be included in the mask plate provided in the embodiment of the present application). Figure 3 As shown, the mask strip 104 is located on a plurality of shielding strips 1022, and at the same time, the size of the shielding strip 1022 in the second direction y is greater than the size of the gap between two adjacent mask strips 104 in the second direction y, wherein the second direction y is the arrangement direction of the shielding strips 1022. During the evaporation process, the electroluminescent (English name: Electro-Luminescence; abbreviation: EL) material is located below the shielding strip 1022, and the electroluminescent material is heated and sublimated, and moves along the third direction z to the shielding strip 1022 and the mask strip 104, and the electroluminescent material moved to the shielding strip 1022 is blocked by the shielding strip 1022, and then moves to the electroluminescent material on the mask strip 104, and part of the electroluminescent material passes through the mask strip 104 through the opening pattern on the mask strip 104, and then forms an evaporation pattern on the substrate G (such as a glass substrate) bonded to the mask strip 104.

[0049] Due to its own gravity, the mask strip 104 may sag, and a large amount of sagging causes the mask strip 104 to poorly fit with the substrate G, thereby causing the electroluminescent material to be offset on the substrate G, and may also cause color mixing problems at the edge of the mask plate, making it difficult to achieve an ideal evaporation effect. A second support bar 103 stacked with the first support bar 1021 located in the middle of the multiple first support bars 1021 is provided, and the second support bar 103 applies a force opposite to the direction of gravity to the mask strip 104, which can reduce the sagging of the mask strip 104, increase the fit between the mask strip 104 and the substrate G, and thus improve the evaporation effect.

[0050] Optionally, the orthographic projection of the second support bar 103 on the corresponding first support bar 1021 is located in the corresponding first support bar 1021. Figure 2 As shown, the size of the second support bar 103 is smaller than or equal to the size of the first support bar 1021. Such a structure can avoid unnecessary shielding of the electroluminescent material by the second support bar 103 during the evaporation process and can avoid the second support bar 103 being too heavy.

[0051] Optionally, the second support bar 103 is welded to the corresponding first support bar 1021, for example, the second support bar 103 can be connected to the corresponding first support bar 1021 by laser welding. Among them, laser welding is an efficient and precise welding method that uses a high-energy-density laser beam as a heat source. It has the advantages of small heat-affected zone, rapid heating concentration, high accuracy, small weld and low thermal stress, and has shown unique advantages in the field of display technology.

[0052] When setting the second support bar 103, the second support bar 103 can be welded to the first support bar 1021 by laser welding, and then the excess part can be cut by laser. The laser welding method makes the connection between the two tighter and reduces the possibility of the second support bar 103 falling off. This can alleviate the sagging of the mask bar 104 and improve the problem of poor adhesion between the mask bar 104 and the substrate.

[0053] Optionally, a plurality of shielding strips 1022 are arranged on the frame 101 along a second direction y, and the second direction y is perpendicular to the first direction x. Figure 2 As shown, a plurality of shielding bars 1022 are sequentially arranged at a certain interval along the second direction y on the frame 101 , and the second direction y is the length direction of the first supporting bars 1021 .

[0054] The two edges of the mask strip 104 along the length direction (the two edges along the length direction may be parallel to the length direction of the mask strip) are respectively overlapped on two adjacent shielding strips 1022, and the first groove 10221 on the shielding strip 1022 includes a first strip groove 10221a extending along the length direction of the shielding strip 1022. For example, Figure 1 As shown, the mask strip 104a is formed along the length direction (ie Figure 1 The two edges in the x direction (in the x direction) are overlapped on two adjacent shielding strips 1022a and 1022b, and multiple mask strips 104 are arranged on the frame 101 through a stretching process. There may be a certain gap between each mask strip 104. The shielding strip 1022 can cover this gap to prevent the electroluminescent material from being deposited on the substrate through the gap to form foreign matter (English name: Particle).

[0055] Optionally, the first groove 10221 includes a plurality of first strip-shaped grooves 10221 a , and the plurality of first strip-shaped grooves 10221 a are arranged along the length direction of the shielding strip 1022 .

[0056] like Figure 3As shown, the shielding strip 1022 has a first groove 10221, and the first groove 10221 includes a plurality of first strip grooves 10221a extending along the length direction of the shielding strip 1022. In the related art, the shielding strip and the support strip are generally welded to the frame by laser welding, and then the mask strip is welded thereon by a stretching process to obtain a mask plate.

[0057] Since the mask strip may be wrinkled due to uneven force during the stretching process, a large gap will be formed between the shielding strip and the mask strip, and relative movement between the two is likely to occur. Therefore, during the evaporation process, the electroluminescent material may enter the edge of the shielding strip and form foreign matter on the substrate, which directly affects the evaporation yield, and at the same time reduces the quality of the manufactured mask plate and the display effect of the display panel. A first groove 10221 is provided on the side of the shielding strip 1022 facing the evaporation material, and the first groove 10221 includes a plurality of first strip grooves 10221a, and the plurality of first strip grooves 10221a are arranged along the length direction of the shielding strip 1022. During the evaporation process, the electroluminescent material can be stored in the first groove 10221 to reduce the electroluminescent material entering the edge of the shielding strip 1022. At the same time, the upper surface of the shielding strip 1022 is only in contact with the mask strip 104. In the subsequent pressing process, the first groove 10221 on the shielding strip 1022 facing the evaporation material side will not be squeezed, so that the electroluminescent material stored in the first groove 10221 is difficult to diffuse to both sides. Such a structure can increase the quality of the manufactured mask plate and reduce the generation of foreign matter, further improving the quality of the mask plate.

[0058] Among them, after the shielding strip 1022 is used a certain number of times, the electroluminescent material accumulated in the first groove 10221 can be washed away through a cleaning process, so that the electroluminescent material will not fill the first groove 10221 due to excessive accumulation, thereby improving the quality of the mask plate 1 and further improving the display effect of the display panel.

[0059] Of course, the first groove 10221 may also include a first strip-shaped groove, which is not limited in the embodiment of the present application.

[0060] Please refer to Figure 1 Optionally, the mask strip 104 has a mask region 1041 divided by a plurality of first support strips 1021, and the mask region 1041 is located on both sides of the first support strip 1021. For example, Figure 1 As shown, the mask plate has five first support strips 1021 , and therefore, each mask strip 104 has six (ie a=6) mask regions 1041 , and the six mask regions 1041 are distributed on both sides of the first support strip 1021 .

[0061] The shielding bar 1022 has a first strip groove 10221a, and the first strip groove 10221a is located on both sides of the first supporting bar 1021. Figure 1 As shown, each mask strip 104 on the mask plate has six (i.e., a=6) mask areas 1041, and each shielding strip 1022 has six (i.e., a=6) first strip grooves 10221a. With such a structure, the position of the shielding strip 1022 corresponding to each mask area 1041 on each mask strip 104 has a first strip groove 10221a, which can also balance the stress at various locations of the mask support 102. It is ensured that the electroluminescent material is difficult to enter the gap between the mask strip 104 and the shielding strip 1022 during the evaporation process, so as to improve the quality of the manufactured mask plate.

[0062] Optionally, the first strip groove 10221a on the shielding strip 1022 is a half-grooved groove. The half-grooved groove is a rectangular strip groove, and the half-grooved depth h1 (i.e., the height of the half-grooved groove) can be determined according to the thickness of the original material of the shielding strip 1022. For example, the thickness of the shielding strip 1022 is 30 microns, and the half-grooved depth can be 15 microns.

[0063] Among them, the half groove can be made by a grayscale mask process. The grayscale mask process can be a kind of composition process, and the composition process can include the steps of coating photoresist, exposing, developing, etching and stripping photoresist. In the grayscale mask process, during exposure, a grayscale mask plate (a grayscale mask plate is a mask plate that can have different light transmittances in different areas) can be used as a mask to expose the photoresist, and then during etching, a half groove can be etched.

[0064] Alternatively, if Figure 1 and Figure 3 As shown, the mask plate 1 also includes an alignment mask strip (English name: Align Mask) 105, which is located at the edge of the mask bracket 102, and the two edges of the alignment mask strip 105 along the length direction (these two edges can be parallel to the length direction of the alignment mask strip) are overlapped on the shielding strip 1022 at the edge of the frame 101 and the mask bracket 102 respectively, and the side of the alignment mask strip 105 facing the evaporation material has a second groove 1051. Figure 4 It is a schematic diagram of the evaporation process in the mask plate manufacturing process, such as Figure 4As shown, the magnetic separator 201 (English name: Magnet), the pressing plate 202 (English name: Touch Plate), the substrate G (English name: Glass) and the mask plate 1 (English name: Mask Frame Assembly; abbreviation: MFA) are stacked in sequence. The mask plate is assembled with the metal frame through the mask strip, the alignment mask strip and the mask support (English name: F-Mask). Due to process limitations, there is a certain gap between the mask support and the metal frame, and the gap is covered by the alignment mask strip.

[0065] Before evaporation, the substrate G and the mask plate 1 are aligned (including rough alignment and fine alignment) through the mark (English name: Mark) on the substrate G and the evaporation alignment hole (English name: Align Hole) on the alignment mask strip. After the fine alignment, the pressing plate 202 presses the substrate G, and at the same time, the mask strip on the mask plate 1 is sucked up and attached to the substrate G through the magnetic force of the magnetic partition 201. Then, the electroluminescent material is evaporated to the designated area through the mask plate 1, so that it is deposited on the substrate G to achieve the purpose of luminescence.

[0066] Figure 5 It is a schematic diagram of the possible diffusion paths of electroluminescent materials during evaporation, such as Figure 4 and Figure 5 As shown, the mask plate 1 includes a frame 101, a mask support 102, a mask strip 104, and an alignment mask strip 105. The magnetic force of the magnetic partition 201 causes the alignment mask strip 105 to be pulled up, resulting in a certain gap between the alignment mask strip 105 and the frame 101. The electroluminescent material may enter the gap and accumulate during the evaporation process; when aligning before evaporation, the pressing plate 202 presses down the substrate G to fit the mask plate 1, and the alignment mask strip 105 is squeezed, causing the electroluminescent material to diffuse to both sides. Among them, the electroluminescent material diffuses in the direction of the alignment mask strip 105 and reaches the surface of the substrate G, which may form foreign matter and contaminate the substrate G, thereby reducing the product quality; the electroluminescent material diffuses in the direction of the mask strip 104 and reaches the surface of the substrate G along the alignment mask strip 105 and the gap between the mask strip 104, and enters the effective display (Active Area, AA) area, which may be mixed with other organic materials, causing the problem of poor edge color mixing.

[0067] like Figure 3As shown, a second groove 1051 is provided on the side of the alignment mask strip 105 facing the evaporation material, so that during the magnetic adsorption period, the electroluminescent material enters the second groove 1051 and accumulates, and it is difficult to diffuse to both sides. At the same time, when the pressing plate presses down the substrate and the mask plate to fit, although there is extrusion between the alignment mask strip 105 and the frame 101, the upper surface of the frame 101 only contacts the lower surface of the alignment mask strip 105, so that the second groove 1051 will not be squeezed during the pressing process, and the luminescent material in the second groove 1051 will always be in the second groove 1051, reducing the phenomenon of poor color mixing at the edge of the display panel and improving product quality.

[0068] Figure 6 yes Figure 1 A schematic diagram of the structure of an alignment mask strip in the mask plate shown in FIG. Figure 6 As shown, the alignment mask strip 105 has two alignment holes 1052 and a test square hole 1053, wherein the alignment hole 1052 is used to cooperate with the mark on the substrate to realize the alignment of the mask plate and the substrate, and the test square hole 1053 is used for evaporation testing, such as testing the thickness of the evaporated layer. The second groove 1051 on the alignment mask strip 105 can avoid the alignment hole 1052 and the test square hole 1053 to avoid the second groove 1051 from affecting the test square hole 1053 and the alignment hole 1052.

[0069] Optionally, the minimum distance between the second groove and the test square hole can be greater than or equal to a specified value (such as 700 microns), which can reduce the requirements for the manufacturing process and improve the robustness of the alignment mask strip. When there is a conflict between the positions of the second groove and the test square hole, and it is difficult to ensure that the minimum distance is greater than or equal to the specified value, a notch can be set at the edge of the second groove to avoid the test square hole, so that the minimum distance between the second groove and the test square hole can be greater than or equal to the specified value.

[0070] For example, Figure 7 for Figure 6 The partial schematic diagram of the second groove and the test square hole is shown in FIG. Figure 7 As shown, the boundary of the second groove 1051 close to the test square hole 1053 can be parallel to the boundary of the test square hole 1053, and there is a gap k at the position where the boundary of the second groove 1051 is relative to the boundary of the test square hole 1053, so that at the gap k, the minimum distance between the second groove 1051 and the test square hole 1053 can be greater than or equal to the specified value.

[0071] Alternatively, if Figure 6As shown, the second groove 1051 on the alignment mask strip 105 is a single rectangle. With such a structure, the second groove 1051 covers all gaps where electroluminescent materials may remain, ensuring that the electroluminescent materials can only be gathered in the second groove 1051, thereby improving the product yield and reducing the pollution caused by the diffusion of electroluminescent materials in the gaps.

[0072] Optionally, the second groove 1051 may be a half groove. A rectangular strip groove is processed on the side of the alignment mask strip 105 facing the evaporation material by a grayscale mask process, such as Figure 3 As shown, the height h2 of the second groove 1051 is determined according to the thickness of the original material of the alignment mask strip 105. For example, the thickness of the original material of the alignment mask strip 105 is 40 microns, and the height h2 of the second groove 1051 can be 20 microns. This ensures that the electroluminescent material can be gathered in the second groove 1051 without affecting the alignment function of the alignment mask strip 105 itself.

[0073] Optionally, the orthographic projection of the frame 101 on the alignment mask strip 105 overlaps with the area where the second groove 1051 is located. The magnetic force of the magnetic separator causes the alignment mask strip to be pulled up, and a certain gap appears between the alignment mask strip and the frame. The electroluminescent material may enter the gap and accumulate during the evaporation process. Figure 3 As shown, the boundary of the second groove 1051 overlaps with the boundary of the frame 101, so that the electroluminescent material located in the gap between the frame 101 and the alignment mask strip 105 can be collected by the second groove 1051, and it is difficult to further diffuse and cause color mixing, thereby improving product quality.

[0074] Optionally, the overlap between the boundary of the second groove 1051 and the boundary of the frame 101 is greater than or equal to 200 microns. Figure 5 As shown, the orthographic projection of the frame 101 on the alignment mask strip 105 overlaps with the area where the second groove 1051 is located, and the size x1 of the overlapped portion between the boundary of the second groove 1051 and the boundary of the frame 101 is set to be greater than or equal to 200 microns, that is, x1≥200um. With such a structure, the electroluminescent material in the gap between the frame 101 and the alignment mask strip 105 is collected in the second groove 1051, effectively reducing the phenomenon of uneven color mixing caused by the diffusion of the electroluminescent material.

[0075] In addition, the orthographic projection of the shielding strip 1022 at the edge of the mask support 102 on the alignment mask strip 105 overlaps with the area where the second groove 1051 is located. Figure 5As shown, optionally, the dimension x2 of the overlapped portion of the boundary of the orthographic projection of the shielding strip 1022 on the alignment mask strip 105 and the boundary of the second groove 1051 is greater than or equal to 300 microns, that is, x2 is greater than or equal to 300um. Such a structure can ensure to the greatest extent that the electroluminescent material stored in the gap during the evaporation process is collected by the second groove 1051, making it difficult for the electroluminescent material to continue to diffuse, thereby reducing the pollution caused by its diffusion.

[0076] Optionally, the side of the alignment mask strip 105 facing the evaporation material has a plurality of second grooves 1051. Figure 8 yes Figure 1 A schematic diagram of another type of mask strip alignment structure in the mask plate shown in FIG. Figure 8 As shown, a plurality of spaced second grooves 1051 are provided on an alignment mask strip 105, and the length direction of the plurality of second grooves 1051 is consistent with the length direction of the alignment mask strip 105, and the plurality of second grooves 1051 are arranged in sequence along the length direction. With such a structure, after the alignment mask strip 105 is processed into a plurality of second grooves 1051 by an etching process, the stress on the surface thereof is relatively uniform.

[0077] In summary, the embodiment of the present application provides a mask plate, in which a second support bar is stacked on a portion of the first support bars of the mask plate, so that the double-layer support bar structure improves the support effect for the mask bar and reduces the sagging amount of the mask bar. The problem of the large sagging amount of the mask bar causing the poor bonding between the mask bar and the substrate is solved, and the effect of reducing the sagging amount of the mask bar and improving the tightness of the bonding between the mask bar and the substrate is achieved.

[0078] In addition, the shielding strip and the alignment mask strip of the mask plate have a first groove and a second groove on the side facing the evaporation material. The first groove and the second groove are used to collect the evaporation material entering the gap during the evaporation process, thereby preventing this part of the evaporation material from continuing to diffuse and cause contamination.

[0079] In the present application, the terms "first", "second", "third", "fourth", "fifth" and "sixth" are used for descriptive purposes only and should not be understood as indicating or implying relative importance. The term "plurality" refers to two or more, unless otherwise clearly defined.

[0080] The above description is only an optional embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. A mask plate, characterized in that: The mask plate comprises: frame; and a mask support located on the frame, the mask support comprising a plurality of first support bars and a plurality of shielding bars mounted on the frame, the plurality of first support bars and the plurality of shielding bars being arranged in a staggered manner, and a side of the shielding bar facing the evaporation material having a first groove; and, at least one second support bar, each of the second support bars having a corresponding first support bar, the second support bar being stacked on the corresponding first support bar; and, a plurality of mask strips located on a frame provided with the second support strips; And, an alignment mask strip, wherein the alignment mask strip is located at the edge of the mask support, and the two edges of the alignment mask strip along the length direction are respectively overlapped on the shielding strips at the edge of the frame and the mask support, and the side of the alignment mask strip facing the evaporation material has at least one second groove, and the alignment mask strip also has two alignment holes and a test square hole; The orthographic projection of the frame on the alignment mask strip overlaps with the area where the second groove is located, and the orthographic projection of the shielding strip at the edge of the mask support on the alignment mask strip overlaps with the area where the second groove is located; The second groove on the alignment mask strip avoids the alignment hole and the test square hole, and the minimum distance between the second groove and the test square hole is greater than or equal to 700 micrometers.

2. The mask plate according to claim 1, characterized in that: The plurality of first support bars are arranged on the frame along a first direction; When the number of the plurality of first support bars is an even number, the second support bars are stacked on 2n first support bars in the middle of the plurality of first support bars, and n is greater than or equal to 1; When the number of the plurality of first support bars is an odd number, the second support bars are stacked on 2m+1 first support bars located in the middle of the plurality of first support bars, and m is greater than or equal to 0.

3. The mask plate according to claim 1, characterized in that: The orthographic projection of the second support bar on the corresponding first support bar is located in the corresponding first support bar.

4. The mask plate according to claim 1, characterized in that: The second support bar is welded to the corresponding first support bar.

5. The mask plate according to claim 2, characterized in that: The plurality of shielding strips are arranged on the frame along a second direction, and the second direction is perpendicular to the first direction; Two edges of the mask strip along the length direction are respectively overlapped on two adjacent shielding strips, and the first groove on the shielding strip includes a first strip-shaped groove extending along the length direction of the shielding strip.

6. The mask plate according to claim 5, characterized in that: The first groove includes a plurality of first strip grooves, and the plurality of first strip grooves are arranged along the length direction of the shielding strip.

7. The mask plate according to claim 6, characterized in that: The mask strip has a number of mask regions divided by the plurality of first support strips, and the mask regions are located on both sides of the first support strips; The shielding strip has a first strip-shaped grooves, and the first strip-shaped grooves are located on both sides of the first supporting strip.

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