A UV excimer laser

Abstract

This invention discloses an ultraviolet excimer laser, comprising a housing containing a laser generating component capable of emitting ultraviolet laser light after being filled with halogen gas and reacting with the gas. The housing also contains a controller for controlling the operation of the laser generating component. The housing further includes at least four support components for supporting the laser on a support surface. Each support component includes a support base connected to the housing and supporting the laser on the support surface. Each support base contains a roller assembly capable of moving vertically relative to it. An air bladder is provided between the roller assembly and the housing. The housing also contains an air pump capable of extracting waste gas generated within the laser generating component and inflating the air bladder to push the roller assembly out of the support base. The purpose of this invention is to overcome the shortcomings of the prior art and provide an ultraviolet excimer laser that is easy to move and stable during use.

Description

Technical Field

[0001] The invention relates to an ultraviolet excimer laser. Background Art

[0002] Existing lasers are all placed on a workbench or on the ground for use, but lasers placed directly on the workbench are not easy to move. If rollers are set under the laser, it is necessary to step on the brakes of each roller separately when placing the laser to stop the laser steadily, which is inconvenient to operate. Moreover, if one of the rollers is pressed or forgotten, the laser may shift due to the vibration generated by the fan when it is running, which may cause a large error, and the laser may also slide off the workbench, thereby affecting the use of the laser.

[0003] The present invention is just produced based on the above-mentioned shortcomings. Summary of the invention

[0004] The purpose of the present invention is to overcome the shortcomings of the prior art and provide an ultraviolet excimer laser which is easy to move and stable when used.

[0005] The present invention is achieved through the following technical solutions:

[0006] A UV excimer laser, characterized in that it includes a housing 1, wherein a laser generating assembly 2 capable of being filled with halogen gas and emitting UV laser after a gas reaction is disposed in the housing 1, wherein a controller 7 for controlling the operation of the laser generating assembly 2 is also disposed in the housing 1, wherein at least four supporting assemblies 4 for supporting on a supporting surface 800 are also disposed on the housing 1, wherein each of the supporting assemblies 4 includes a supporting seat 41 connected to the housing 1 and capable of supporting on the supporting surface 800, wherein a roller assembly 5 capable of moving up and down relative to the supporting seat 41 is disposed in the supporting seat 41, wherein an air bag 6 is disposed between the roller assembly 5 and the housing 1, wherein an air pump 3 capable of extracting exhaust gas generated in the laser generating assembly 2 and inflating the air bag 6 to push the roller assembly 5 out of the supporting seat 41 is also disposed in the housing 1.

[0007] The ultraviolet excimer laser as described above is characterized in that: the controller 7 includes a power supply 71 for supplying power to the laser generating component 2 and the air pump 3, the controller 7 also includes a first circuit board 72 for controlling the operation of the laser generating component 2 and a second circuit board 73 for controlling the operation of the airbag 6, the first circuit board 72 and the second circuit board 73 are electrically connected to the power supply 71 through a wire 74, and the wire 74 is provided with a magnetic ring 75 that can suppress the strong electromagnetic interference generated when the laser generating component 2 is working.

[0008] The ultraviolet excimer laser as described above is characterized in that: the air pump 3 is provided with a first air outlet 31 connected to the laser generating assembly 2 and a vent 32 for connecting to the external atmosphere, and the air pump 3 is also connected to a second air outlet 33 which can be connected to the inflation port 61 of each airbag 6 through a pipe.

[0009] The ultraviolet excimer laser as described above is characterized in that: the support seat 41 is provided with a channel 42 for the roller assembly 5 to move up and down, and the support seat 41 is provided with a boss 43 that can prevent the roller assembly 5 from escaping from the channel 42.

[0010] The ultraviolet excimer laser as described above is characterized in that an elastic reset member 44 is provided between the boss 43 and the roller assembly 5 to enable the roller assembly 5 to move upward and reset.

[0011] The ultraviolet excimer laser as described above is characterized in that: the roller assembly 5 includes a roller frame 51, and the roller frame 51 is rotatably connected to a wheel 52, and the roller frame 51 is provided with a protrusion 511 that can cooperate with the boss 43 to prevent the roller assembly 5 from escaping from the channel 42, the airbag 6 is arranged between the roller frame 51 and the box body 1, and the elastic reset member 44 is a spring and is arranged between the protrusion 511 and the boss 43.

[0012] The ultraviolet excimer laser as described above is characterized in that: a ring-shaped supporting portion 411 is further provided at the bottom of the supporting seat 41 .

[0013] The ultraviolet excimer laser as described above is characterized in that: a first support frame 11 for supporting the laser generating assembly 2 is also provided in the housing 1 .

[0014] The ultraviolet excimer laser as described above is characterized in that: the laser generating component 2 is also connected to a second support frame 12 that can be used to support and place the controller 7, and the box body 1 is also connected to a third support frame 13 and a fourth support frame 14 that can support and place the first circuit board 72 and the second circuit board 73.

[0015] Compared with the prior art, the present invention has the following advantages: when the present invention needs to move, the controller starts the air pump to inflate the airbag, and the volume of the airbag gradually increases in the support seat. When the airbag increases, it presses against the wall of the box and the roller assembly at the same time, and pushes the roller assembly out of the support seat, so that the roller assembly touches the support surface to support the box. At this time, the box can be moved by the roller assembly. Since at least four support assemblies are provided, the box is more stable and moves more smoothly. When the box does not need to be moved, the air pump is controlled to discharge the gas in the airbag to the outside. At this time, due to the decrease in pressure in the airbag, the roller assembly retracts into the support seat under the gravity of the box and other components. At this time, the support seat is used to support the box and is not easy to move. Therefore, when the laser is in use, there will be no vibration of the roller assembly to cause errors. Moreover, the present invention only needs to control the air pump to inflate the airbag to control the roller assembly to push out and move the box, or control the air pump to deflate and retract the roller assembly into the support seat to stabilize the box, without locking each roller, which is more convenient for users to operate. The present invention has a simple structure and is easy to operate. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is one of the stereograms of the ultraviolet excimer laser of the present invention;

[0017] Figure 2 This is the second stereogram of the ultraviolet excimer laser of the present invention;

[0018] Figure 3 is a cross-sectional view of the ultraviolet excimer laser of the present invention;

[0019] Figure 4 yes Figure 3 A magnified image of area A;

[0020] Figure 5 This is the third stereogram of the ultraviolet excimer laser of the present invention;

[0021] Figure 6 yes Figure 5 Magnified view of area B. DETAILED DESCRIPTION

[0022] The present invention will be further described below in conjunction with the accompanying drawings:

[0023] like Figures 1 to 6As shown, the present invention provides an ultraviolet excimer laser, including a housing 1, wherein the housing 1 is provided with a laser generating assembly 2 which can be filled with halogen gas and can emit ultraviolet laser after gas reaction, wherein the housing 1 is also provided with a controller 7 for controlling the operation of the laser generating assembly 2, wherein the housing 1 is also provided with at least four supporting assemblies 4 for supporting on a supporting surface 800, wherein the supporting assemblies 4 each include a supporting seat 41 connected to the housing 1 and capable of supporting on the supporting surface 800, wherein the supporting seat 41 is provided with a roller assembly 5 capable of moving up and down relative to the supporting seat, wherein an air bag 6 is provided between the roller assembly 5 and the housing 1, wherein the housing 1 is also provided with an air pump 3 which can extract the exhaust gas generated in the laser generating assembly 2 and can inflate the air bag 6 to push the roller assembly 5 out of the supporting seat 41. When the laser needs to be moved, the air pump 3 is started by the controller 7 to inflate the airbag 6. The volume of the airbag 6 gradually increases in the support seat 41. When the airbag 6 becomes larger, it simultaneously presses against the wall of the box 1 and the roller assembly 5, and pushes the roller assembly 5 out of the support seat 41, so that the roller assembly 5 supports the box 1. At this time, the box 1 can be moved by the roller assembly 5. Since at least four support assemblies 4 are provided, the box 1 is more stable and moves more smoothly. When the box 1 does not need to be moved, the air pump 3 is controlled to discharge the gas in the airbag 6 to the outside. At this time, due to the decrease in pressure in the airbag 6, the box 1 moves downward relative to the roller assembly 5 under the action of gravity, and the roller assembly 5 retracts into the support seat 41. At this time, the support seat 41 is used to support the box 1. Therefore, when the laser is in use, there will be no vibration of the roller assembly 5 to cause errors. Moreover, the present invention only needs to control the air pump 3 to inflate the airbag 6 to control the roller assembly 5 to push out and move the box body 1, or control the air pump 3 to deflate and retract the roller assembly 5 into the support seat 41 to stabilize the box body 1, without locking each roller, which is more convenient for users to operate. The present invention has a simple structure and is easy to operate.

[0024] like Figures 1 to 6As shown, the controller 7 includes a power supply 71 for supplying power to the laser generating assembly 2 and the air pump 3, and the controller 7 also includes a first circuit board 72 for controlling the operation of the laser generating assembly 2 and a second circuit board 73 for controlling the operation of the airbag 6. The first circuit board 72 and the second circuit board 73 are electrically connected to the power supply 71 through a wire 74, and the wire 74 is provided with a magnetic ring 75 that can suppress the strong electromagnetic interference generated when the laser generating assembly 2 is working. Excimer lasers achieve laser output by generating excitation through gas discharge, so certain electromagnetic radiation is inevitably generated. Especially in the industrial field, the output power of excimer lasers is required to be higher and higher, and the output single pulse energy is getting larger and larger, and the electromagnetic radiation brought about is also getting more and more serious. When the gases such as fluorine, neon and krypton in the laser generating assembly 2 react strongly, strong electromagnetic radiation will be generated. The strong electromagnetic interference formed by these electromagnetic radiations not only interferes with the operation of various electronic components and wires 74, accelerates the aging of electronic components and wires 74, shortens the service life, but also causes electromagnetic pollution to the environment, affects the normal operation of surrounding instruments and equipment, and causes harm to the human body. By sleeve-arranging the magnetic ring 75 on the wire 74 for protection, electromagnetic interference can be suppressed, thereby reducing the electromagnetic radiation to which the electronic components and the wire 74 are exposed, and extending the service life of the electronic components.

[0025] like Figure 2 As shown, the air pump 3 is provided with a first air outlet 31 connected to the laser generating assembly 2 and a vent 32 for connecting to the external atmosphere. The air pump 3 is also connected to a second air outlet 33 that can be connected to the inflation port 61 of each air bag 6 through a pipeline. The vent 32 can be directly connected to the atmosphere through a pipeline, and the air bag 6 is inflated through the second air outlet 33. When the laser generating assembly 2 generates enough waste gas, the air pump 3 discharges the waste gas in the laser generating assembly 2 through the vent 32 and the first air outlet 31. The air pump 3 is an air pump that can inflate and deflate.

[0026] like Figures 3 to 4 As shown, the support seat 41 is provided with a channel 42 for the roller assembly 5 to move up and down, and the support seat 41 is provided with a boss 43 that can prevent the roller assembly 5 from escaping from the channel 42. The channel 42 facilitates the roller assembly 5 to move up and down, and the boss 43 is used to prevent the roller assembly 5 from escaping from the channel 42.

[0027] like Figures 3 to 4As shown, an elastic reset member 44 is provided between the boss 43 and the roller assembly 5 to enable the roller assembly 5 to move upward and reset. The elastic reset member 44 is a spring. When the airbag 6 is deflated, the thrust of the airbag 6 gradually decreases until the elastic force of the spring is greater than the thrust of the airbag 6. The roller assembly 5 moves upward relative to the support seat 41 and the roller assembly 5 is separated from the support surface 800. At this time, the support seat 41 plays a role in supporting the box 1, and the laser will be more stable when in use. The support surface 800 is the ground or a work surface.

[0028] like Figures 3 to 4 As shown, the roller assembly 5 comprises a roller frame 51, a wheel 52 is rotatably connected to the roller frame 51, a protrusion 511 is provided on the roller frame 51, which can cooperate with the boss 43 to prevent the roller assembly 5 from being separated from the support seat 41, the airbag 6 is provided between the roller frame 51 and the box body 1, and the elastic reset member 44 is a spring, which is provided between the protrusion 511 and the boss 43. The roller assembly 5 is a universal wheel assembly.

[0029] like Figures 3 to 4 As shown, the bottom of the support seat 41 is further provided with an annular support portion 411. The support portion 411 can make the support seat 41 have better bearing capacity.

[0030] like Figures 1 to 2 As shown, a first support frame 11 for supporting the laser generating assembly 2 is also provided in the box body 1 .

[0031] like Figures 1 to 2 As shown, the laser generating assembly 2 is also connected to a second support frame 12 that can be used to support and place the controller 7, and the box body 1 is also connected to a third support frame 13 and a fourth support frame 14 that can support and place the first circuit board 72 and the second circuit board 73.

Claims

1. An ultraviolet excimer laser, characterized in that: The invention comprises a housing (1), wherein a laser generating assembly (2) capable of being filled with halogen gas and capable of emitting ultraviolet laser light after a gas reaction is provided in the housing (1), wherein a controller (7) for controlling the operation of the laser generating assembly (2) is also provided in the housing (1), wherein at least four supporting assemblies (4) for supporting on a supporting surface (800) are also provided on the housing (1), wherein each of the supporting assemblies (4) comprises a supporting seat (41) connected to the housing (1) and capable of supporting on the supporting surface (800), wherein a roller assembly (5) capable of moving up and down relative to the supporting seat (41) is provided in the supporting seat (41), wherein the roller assembly (5) is connected to the housing (1) and is movable relative to the housing (1). ), an air bag (6) is also arranged between the laser generating assembly (2), and an air pump (3) is also arranged in the housing (1) for extracting the waste gas generated in the laser generating assembly (2) and inflating the air bag (6) to push the roller assembly (5) out of the support seat (41). The controller (7) includes a power supply (71) for supplying power to the laser generating assembly (2) and the air pump (3). The controller (7) also includes a first circuit board (72) for controlling the operation of the laser generating assembly (2) and a second circuit board (73) for controlling the operation of the air bag (6). The first circuit board (72) and the second circuit board (73) are electrically connected to the power supply (71) via a wire (74). The laser generating assembly (2) is connected to the laser generating assembly (2) by a magnetic ring (75) which can suppress the strong electromagnetic interference generated by the laser generating assembly (2) when the laser generating assembly (2) is working. The air pump (3) is provided with a first air outlet (31) which is connected to the laser generating assembly (2) and a vent (32) which is used to communicate with the external atmosphere. The air pump (3) is also connected with a second air outlet (33) which can be connected to the inflation port (61) of each air bag (6). The support seat (41) is provided with a channel (42) which can allow the roller assembly (5) to move up and down. The support seat (41) is provided with a retaining member which can prevent the roller assembly (5) from moving out of the channel (42). The roller assembly (5) comprises a detached boss (43), an elastic reset member (44) being provided between the boss (43) and the roller assembly (5) and capable of causing the roller assembly (5) to move upward and reset, the roller assembly (5) comprising a roller frame (51), a wheel (52) being rotatably connected to the roller frame (51), a protrusion (511) being provided on the roller frame (51) and capable of cooperating with the boss (43) to prevent the roller assembly (5) from detaching from the channel (42), the airbag (6) being provided between the roller frame (51) and the housing (1), and the elastic reset member (44) being a spring and being provided between the protrusion (511) and the boss (43).

2. The ultraviolet excimer laser according to claim 1, characterized in that: The bottom of the support seat (41) is also provided with an annular support portion (411).

3. The ultraviolet excimer laser according to claim 1, characterized in that: A first support frame (11) for supporting the laser generating assembly (2) is also provided in the box (1).

4. The ultraviolet excimer laser according to claim 2, characterized in that: The laser generating assembly (2) is also connected to a second support frame (12) capable of supporting and placing a controller (7), and the box (1) is also connected to a third support frame (13) and a fourth support frame (14) capable of supporting and placing a first circuit board (72) and a second circuit board (73).

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